US20060244777A1 - Print head apparatus with malfunction detector - Google Patents
Print head apparatus with malfunction detector Download PDFInfo
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- US20060244777A1 US20060244777A1 US11/479,096 US47909606A US2006244777A1 US 20060244777 A1 US20060244777 A1 US 20060244777A1 US 47909606 A US47909606 A US 47909606A US 2006244777 A1 US2006244777 A1 US 2006244777A1
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- Prior art keywords
- detecting
- ink
- pressure wave
- print head
- nozzle
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
- B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
- B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
- B41J2/0451—Control methods or devices therefor, e.g. driver circuits, control circuits for detecting failure, e.g. clogging, malfunctioning actuator
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
- B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
- B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
- B41J2/0458—Control methods or devices therefor, e.g. driver circuits, control circuits controlling heads based on heating elements forming bubbles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
- B41J2/14072—Electrical connections, e.g. details on electrodes, connecting the chip to the outside...
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
- B41J2/14153—Structures including a sensor
Definitions
- the present invention relates to print heads used in printers and plotters and the like and, more specifically, to detecting malfunctions within such print heads.
- Printers and plotters are known in the art and include those made by Hewlett-Packard, Canon and Epson, amongst others. In the discussion that follows, printers and plotters are referred to collectively with the term “printers”. Problems associated with current printers and print head arrangements include that the print head may run out of ink while printing, the print head nozzle may become clogged and the ink expulsion mechanism may not fire, amongst other malfunctions. Evidence of such malfunctions are usually detected when the printed document is pulled out of the printer and examined visually. At this point it is too late for appropriate correction. Some types of electronic sensing are known in the art, such as techniques for detecting when an ink expulsion mechanism has not fired. These techniques, however, are limited in scope and do not, for example, detect when a nozzle is clogged or unclogged.
- FIG. 1 is a cross sectional side view of a print head in accordance with the present invention.
- FIG. 2 is a side view of a piezoelectric acoustic wave transducer in accordance with the present invention.
- FIG. 3 is a side view of a portion of an interdigitated pressure wave transducer in accordance with the present invention.
- FIG. 4 is a plan view of an arrangement of piezoelectric acoustic pressure wave transducers and interdigitated piezoelectric pressure wave transducers in a print head in accordance with the present invention.
- FIG. 5 is a graph of illustrating the pressure on an expulsion mechanism surface versus time for a clogged nozzle firing and an unclogged nozzle firing is shown.
- Print head 10 includes a substrate in or on which is provided an ink expulsion mechanism 14 .
- Ink expulsion mechanism 14 may expel ink through thermal or mechanical excitation or through other appropriate expulsion means.
- mechanism 14 is thermally actuated and may be implemented with a resistive element as is known in the art.
- Ink expulsion mechanism 14 is controlled by off-die circuitry or by a combination of on-die and off-die circuitry as is known. Representative off-die coupling is indicated by signal line 15 and contact pad 16 .
- a barrier layer 20 is formed on substrate 12 and an orifice plate 30 is formed on barrier layer 20 .
- the substrate, barrier layer and orifice plate define an ink well or conduit 24 that channels ink from a supply (not shown) into proximity with the expulsion mechanism.
- An orifice or nozzle 31 through which ink is expelled is formed in the orifice plate and positioned over ink expulsion mechanism 14 .
- Suitable material for barrier layer 20 and orifice plate 30 are known in the art.
- ink expulsion mechanism 14 is a thermally actuated device such as a resistor
- an ink drop is expelled by essentially boiling a drop of ink through nozzle 31 .
- pressure waves a series of acoustic pressure waves 26 (hereinafter referred to as “pressure waves”) are produced. These waves propagate through the components of the print head, including primarily the substrate and ink well. In the substrate (and conventional thin film layers formed thereon), both longitudinal and shear waves are produced. Longitudinal waves can be detected by an interdigitated piezoelectric pressure wave transducer 50 or the like which is described in more detail with reference to FIGS. 3 and 4 . In ink well 24 , longitudinal pressure waves are produced.
- a piezoelectric acoustic pressure wave transducer 40 which is described in more detail with reference to FIG. 2 .
- the term “interdigitated transducer” will be used for the interdigitated piezoelectric pressure wave transducer and the term “acoustic transducer” will be used for the piezoelectric acoustic pressure wave transducer. While both an acoustic transducer and an interdigitated transducer are described as being provided on substrate 12 , it should be recognized that they need not be provided together because either transducer is capable of sufficiently detecting pressure waves. The provision of both provides redundancy.
- Acoustic transducer 40 and interdigitated transducer 50 are preferably coupled to processing circuit 60 .
- Processing circuit 60 preferably includes an amplifier, a filter and an analog to digital converter or related signal processing circuitry.
- Processing circuit 60 may be configured to provide the necessary processing to determine dry-fire, no-fire and clogged-fire conditions (that is, a misfire) or the sensor output signals can be delivered to off-die logic 70 for such processing.
- the output of processing circuit 60 is propagated over signal line 17 to contact pad 18 .
- FIG. 2 a side view of an acoustic transducer in accordance with the present invention is shown.
- FIG. 2 illustrates the acoustic transducer of FIG. 1 in more detail.
- FIG. 2 illustrates substrate 12 on which the following layers are formed: an insulation layer 21 , a conductive coupling layer 41 , piezoelectric material 42 , a first end a second signal conductive layer 44 , 45 , a passivation layer 47 and a surface coat layer 48 .
- these layers are made of the following or a like material: insulation layer 21 is silicon dioxide (SiO 2 ), conductive layer 41 is tantalum aluminum (TaAl), piezoelectric material 42 is aluminum nitride (AlN), first and second conductive layers or traces 44 , 45 are aluminum (Al), passivation layer 47 includes a first layer of silicon nitride (Si 3 N 4 ) and a second layer of silicon carbide (SiC), and coating 48 layer is tantalum (Ta). It should be recognized that the arrangement and composition of these layers may be altered in a manner consistent with device fabrication techniques without deviating from the present invention. It should also be recognized that other piezoelectric material such as zinc oxide (ZnO) or PZT may be used and that other types of suitable pressure sensors may be used.
- ZnO zinc oxide
- PZT palladium gallium oxide
- the first and second conductive layers 44 , 45 form conductors for reading a voltage generated by piezoelectric material 42 in response to an incident pressure wave.
- a pressure wave traveling through the ink well compress the thin film stack, resulting in a mechanical strain in the thin film layers. In the piezoelectric layer, this strain produces a measurable electric charge across the two conductors.
- FIG. 3 a side view of a portion of an interdigitated transducer in accordance with the present invention is shown.
- FIG. 3 illustrates the interdigitated transducer of FIG. 1 .
- the layout of this transducer and its arrangement with another interdigitated transducer are shown in FIG. 4 .
- FIG. 3 illustrates substrate 12 on which are formed insulation layer 21 , piezoelectric material 52 , first and second conductors 54 , 55 (only one of which is shown), a passivation layer 57 and a coating layer 58 .
- the substrate, insulation layer, passivation layer and coating layer are as discussed above for acoustic transducer 40 .
- the piezoelectric material and conductive layers are preferably similar in composition to their counterparts in transducer 40 , however, their areal arrangement is different as shown in FIG. 4 .
- FIG. 4 a plan view of an arrangement of acoustic transducers and interdigitated transducers in a print head in accordance with the present invention is shown.
- FIG. 4 illustrates substrate 12 , a plurality of ink expulsion mechanisms 14 , barrier layer 20 , ink well 24 , a plurality of acoustic transducers 40 and a plurality of interdigitated transducers 50 .
- Orifice plate 30 would be placed over the arrangement of FIG. 4 with nozzles aligned with the ink expulsion mechanisms 14 . It should be recognized that the transducer arrangement disclosed in FIG. 4 is representative and provided for pedagogical purposes.
- ink expulsion mechanisms ink well and the size number and arrangement of transducers may be modified from that of FIG. 4 without departing from the present invention. Furthermore, it should be recognized that although the interdigitated transducers are shown in the ink well, since they detect pressure waves in the substrate they may be placed anywhere on the substrate including under the barrier layer.
- the interdigitated transducers are preferably implemented as interdigitated conductors 54 - 55 placed over a corresponding pattern of piezoelectric material 52 . These interdigitated transducers exhibit a directional detection characteristic that is advantageous to some implementations of the present invention.
- FIG. 4 illustrates two interdigitated pressure wave transducers 50 and 50 ′ that are arranged orthogonally to one another. This arrangement facilitates detection of pressure waves traveling in different directions.
- the acoustic transducers 40 of FIG. 4 are essentially as described above with references to FIGS. 1 and 2 . Each of transducers 40 and 50 are shown with their first and second conductors 44 , 45 and 54 , 55 , respectively being coupled to vias 13 (under the barrier layer) that are coupled to signal processing circuit 60 of FIG. 1 .
- FIG. 5 a graph illustrating the pressure on the surface of resistor or expulsion mechanism 14 verses time for a clogged nozzle firing and an unclogged nozzle firing is shown.
- This pressure spike is normally around 20 MPa (greater than 10 K PSI) and occurs at approximately 13.5 ⁇ S after firing.
- the pressure spike has a different signature. Typically it is lower in magnitude by about 15-25 percent (e.g., approximately 16 Mpa) and occurs earlier (e.g., 15-20% earlier, usually approximately 11 ⁇ S).
- the combination of decreased magnitude and quicker response time permits differentiation of an unclogged firing from a clogged firing.
- the absence of a pressure wave indicates a “no-fire” event.
Abstract
A print head and method that are capable of detecting a plurality of performance conditions such as a dry-fire, no-fire or clogged-nozzle condition. Pressure wave sensors within a print head are disclosed that are capable of detecting pressure waves generated by the firing of an ink expulsion mechanism. The characteristics of the pressure wave generated by the firing event (e.g., magnitude and timing) are indicative of the operating condition within the head. Multiple sensor types are disclosed.
Description
- The present invention relates to print heads used in printers and plotters and the like and, more specifically, to detecting malfunctions within such print heads.
- Printers and plotters are known in the art and include those made by Hewlett-Packard, Canon and Epson, amongst others. In the discussion that follows, printers and plotters are referred to collectively with the term “printers”. Problems associated with current printers and print head arrangements include that the print head may run out of ink while printing, the print head nozzle may become clogged and the ink expulsion mechanism may not fire, amongst other malfunctions. Evidence of such malfunctions are usually detected when the printed document is pulled out of the printer and examined visually. At this point it is too late for appropriate correction. Some types of electronic sensing are known in the art, such as techniques for detecting when an ink expulsion mechanism has not fired. These techniques, however, are limited in scope and do not, for example, detect when a nozzle is clogged or unclogged.
- A need thus exists to detect print head malfunction in such a manner as to eliminate or minimize corruption of a printed image. Early detection of a malfunction permits preventative steps to be taken such as print head replacement or software based compensation within the firing algorithm, etc.
- Accordingly, it is an object of the present invention to provide a print head that can detect a malfunction therein.
- It is another object of the present invention to provide a print head that can detect such conditions as a clogged nozzle, no fire and dry fire.
- It is another object of the present invention to provide a print head that incorporates a pressure sensor and circuitry therefor that detects firing of an ink expulsion mechanism and determines characteristics about the firing based on the sensed signals.
- It is also an object of the present invention to provide a print head with a piezoelectric type pressure sensor.
- These and related objects of the present invention are achieved by use of a print head apparatus with a malfunction detector as described herein.
- The attainment of the foregoing and related advantages and features of the invention should be more readily apparent to those skilled in the art, after review of the following more detailed description of the invention taken together with the drawings.
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FIG. 1 is a cross sectional side view of a print head in accordance with the present invention. -
FIG. 2 is a side view of a piezoelectric acoustic wave transducer in accordance with the present invention. -
FIG. 3 is a side view of a portion of an interdigitated pressure wave transducer in accordance with the present invention. -
FIG. 4 is a plan view of an arrangement of piezoelectric acoustic pressure wave transducers and interdigitated piezoelectric pressure wave transducers in a print head in accordance with the present invention. -
FIG. 5 is a graph of illustrating the pressure on an expulsion mechanism surface versus time for a clogged nozzle firing and an unclogged nozzle firing is shown. - Referring to
FIG. 1 , a cross sectional side view of aprint head 10 in accordance with the present invention is shown.Print head 10 includes a substrate in or on which is provided anink expulsion mechanism 14.Ink expulsion mechanism 14 may expel ink through thermal or mechanical excitation or through other appropriate expulsion means. In a preferred embodiment,mechanism 14 is thermally actuated and may be implemented with a resistive element as is known in the art.Ink expulsion mechanism 14 is controlled by off-die circuitry or by a combination of on-die and off-die circuitry as is known. Representative off-die coupling is indicated bysignal line 15 andcontact pad 16. - A
barrier layer 20 is formed onsubstrate 12 and anorifice plate 30 is formed onbarrier layer 20. The substrate, barrier layer and orifice plate define an ink well or conduit 24 that channels ink from a supply (not shown) into proximity with the expulsion mechanism. An orifice ornozzle 31 through which ink is expelled is formed in the orifice plate and positioned overink expulsion mechanism 14. Suitable material forbarrier layer 20 andorifice plate 30 are known in the art. - Assuming that
ink expulsion mechanism 14 is a thermally actuated device such as a resistor, an ink drop is expelled by essentially boiling a drop of ink throughnozzle 31. During formation and collapse of a boiling ink bubble, a series of acoustic pressure waves 26 (hereinafter referred to as “pressure waves”) are produced. These waves propagate through the components of the print head, including primarily the substrate and ink well. In the substrate (and conventional thin film layers formed thereon), both longitudinal and shear waves are produced. Longitudinal waves can be detected by an interdigitated piezoelectricpressure wave transducer 50 or the like which is described in more detail with reference toFIGS. 3 and 4 . In ink well 24, longitudinal pressure waves are produced. These waves can be detected with a piezoelectric acousticpressure wave transducer 40 which is described in more detail with reference toFIG. 2 . For purposes of the present discussion, the term “interdigitated transducer” will be used for the interdigitated piezoelectric pressure wave transducer and the term “acoustic transducer” will be used for the piezoelectric acoustic pressure wave transducer. While both an acoustic transducer and an interdigitated transducer are described as being provided onsubstrate 12, it should be recognized that they need not be provided together because either transducer is capable of sufficiently detecting pressure waves. The provision of both provides redundancy. -
Acoustic transducer 40 and interdigitatedtransducer 50 are preferably coupled toprocessing circuit 60.Processing circuit 60 preferably includes an amplifier, a filter and an analog to digital converter or related signal processing circuitry.Processing circuit 60 may be configured to provide the necessary processing to determine dry-fire, no-fire and clogged-fire conditions (that is, a misfire) or the sensor output signals can be delivered to off-die logic 70 for such processing. The output ofprocessing circuit 60 is propagated oversignal line 17 to contactpad 18. - Referring to
FIG. 2 , a side view of an acoustic transducer in accordance with the present invention is shown.FIG. 2 illustrates the acoustic transducer ofFIG. 1 in more detail.FIG. 2 illustratessubstrate 12 on which the following layers are formed: aninsulation layer 21, aconductive coupling layer 41,piezoelectric material 42, a first end a second signalconductive layer passivation layer 47 and asurface coat layer 48. In a preferred embodiment, these layers are made of the following or a like material:insulation layer 21 is silicon dioxide (SiO2),conductive layer 41 is tantalum aluminum (TaAl),piezoelectric material 42 is aluminum nitride (AlN), first and second conductive layers ortraces passivation layer 47 includes a first layer of silicon nitride (Si3N4) and a second layer of silicon carbide (SiC), and coating 48 layer is tantalum (Ta). It should be recognized that the arrangement and composition of these layers may be altered in a manner consistent with device fabrication techniques without deviating from the present invention. It should also be recognized that other piezoelectric material such as zinc oxide (ZnO) or PZT may be used and that other types of suitable pressure sensors may be used. - The first and second
conductive layers piezoelectric material 42 in response to an incident pressure wave. A pressure wave traveling through the ink well compress the thin film stack, resulting in a mechanical strain in the thin film layers. In the piezoelectric layer, this strain produces a measurable electric charge across the two conductors. - Referring to
FIG. 3 , a side view of a portion of an interdigitated transducer in accordance with the present invention is shown.FIG. 3 illustrates the interdigitated transducer ofFIG. 1 . The layout of this transducer and its arrangement with another interdigitated transducer are shown inFIG. 4 .FIG. 3 illustratessubstrate 12 on which are formedinsulation layer 21,piezoelectric material 52, first andsecond conductors 54, 55 (only one of which is shown), apassivation layer 57 and acoating layer 58. The substrate, insulation layer, passivation layer and coating layer are as discussed above foracoustic transducer 40. The piezoelectric material and conductive layers are preferably similar in composition to their counterparts intransducer 40, however, their areal arrangement is different as shown inFIG. 4 . - Referring to
FIG. 4 , a plan view of an arrangement of acoustic transducers and interdigitated transducers in a print head in accordance with the present invention is shown.FIG. 4 illustratessubstrate 12, a plurality ofink expulsion mechanisms 14,barrier layer 20, ink well 24, a plurality ofacoustic transducers 40 and a plurality of interdigitatedtransducers 50.Orifice plate 30 would be placed over the arrangement ofFIG. 4 with nozzles aligned with theink expulsion mechanisms 14. It should be recognized that the transducer arrangement disclosed inFIG. 4 is representative and provided for pedagogical purposes. The ink expulsion mechanisms ink well and the size number and arrangement of transducers may be modified from that ofFIG. 4 without departing from the present invention. Furthermore, it should be recognized that although the interdigitated transducers are shown in the ink well, since they detect pressure waves in the substrate they may be placed anywhere on the substrate including under the barrier layer. - The interdigitated transducers are preferably implemented as interdigitated conductors 54-55 placed over a corresponding pattern of
piezoelectric material 52. These interdigitated transducers exhibit a directional detection characteristic that is advantageous to some implementations of the present invention.FIG. 4 illustrates two interdigitatedpressure wave transducers acoustic transducers 40 ofFIG. 4 are essentially as described above with references toFIGS. 1 and 2 . Each oftransducers second conductors processing circuit 60 ofFIG. 1 . - Referring to
FIG. 5 , a graph illustrating the pressure on the surface of resistor orexpulsion mechanism 14 verses time for a clogged nozzle firing and an unclogged nozzle firing is shown. As alluded to above, the cavitation of the air bubble(s) at resistor orexpulsion mechanism 14 during firing causes a considerable pressure spike on the surface of the resistor. This pressure spike is normally around 20 MPa (greater than 10 K PSI) and occurs at approximately 13.5 μS after firing. When the nozzle associated with a particular resistor is clogged, however, the pressure spike has a different signature. Typically it is lower in magnitude by about 15-25 percent (e.g., approximately 16 Mpa) and occurs earlier (e.g., 15-20% earlier, usually approximately 11 μS). The combination of decreased magnitude and quicker response time permits differentiation of an unclogged firing from a clogged firing. The absence of a pressure wave indicates a “no-fire” event. - While the invention has been described in connection with specific embodiments thereof, it will be understood that it is capable of further modification, and this application is intended to cover any variations, uses, or adaptations of the invention following, in general, the principles of the invention and including such departures from the present disclosure as come within known or customary practice in the art to which the invention pertains and as may be applied to the essential features hereinbefore set forth, and as fall within the scope of the invention and the limits of the appended claims.
Claims (10)
1-16. (canceled)
17. A method of monitoring performance of a print head, comprising the steps of:
attempting expulsion of a volume of ink through a nozzle of a print head;
detecting within said print head a characteristic of a pressure wave generated by said attempt to expel said volume of ink.
18. The method of claim 17 , further comprising the step of determining from said detected characteristic a status of said attempted expulsion of said volume of ink.
19. The method of claim 17 , wherein said detecting step includes the step of detecting the presence or absence of a pressure wave.
20. The method of claim 17 , wherein said detecting step includes the step of detecting a magnitude and timing of said pressure wave.
21. The method of claim 20 , wherein said detecting step further comprises the steps of establishing a first magnitude related to an expulsion of said volume of ink and detecting a second magnitude in the range of 15% to 25% less than said first magnitude.
22. The method of claim 20 , wherein said detecting step further comprises the steps of establishing a first timing of said pressure wave related to an expulsion of said volume of ink and detecting a second timing in the range of 15% to 20% earlier than said first timing.
23-25. (canceled)
26. A method of detecting a misfiring nozzle in an inkjet printhead comprising the steps of:
establishing a first magnitude of a pressure wave corresponding to an ejection of a predetermined volume of ink from a nozzle; and
detecting a second magnitude of a pressure wave in the range of 15% to 25% less than said first magnitude whereby a misfiring nozzle may be detected.
27. A method of detecting a misfiring nozzle in an inkjet printhead comprising the steps of:
establishing a first timing of an arrival of a pressure wave from an ejection of a predetermined volume of ink from a nozzle; and
detecting a second timing of an arrival of a pressure wave in the range of 15% to 20% earlier than said first timing whereby a misfiring nozzle may be detected.
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US11/479,096 US7717531B2 (en) | 1999-10-12 | 2006-06-30 | Print head apparatus with malfunction detector |
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US09/416,618 US7249818B1 (en) | 1999-10-12 | 1999-10-12 | Print head apparatus with malfunction detector |
US11/479,096 US7717531B2 (en) | 1999-10-12 | 2006-06-30 | Print head apparatus with malfunction detector |
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US09/416,618 Division US7249818B1 (en) | 1999-10-12 | 1999-10-12 | Print head apparatus with malfunction detector |
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US7717531B2 US7717531B2 (en) | 2010-05-18 |
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US11/479,096 Expired - Fee Related US7717531B2 (en) | 1999-10-12 | 2006-06-30 | Print head apparatus with malfunction detector |
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JP4496433B2 (en) * | 2005-03-31 | 2010-07-07 | 富士フイルム株式会社 | Liquid ejection device |
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US10843462B2 (en) * | 2017-06-29 | 2020-11-24 | Canon Kabushiki Kaisha | Liquid discharge head substrate, liquid discharge head, liquid discharge apparatus, method for forming conductive layer, and method for manufacturing liquid discharge head substrate |
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Also Published As
Publication number | Publication date |
---|---|
EP1092543A2 (en) | 2001-04-18 |
EP1092543A3 (en) | 2001-09-26 |
US7249818B1 (en) | 2007-07-31 |
US7717531B2 (en) | 2010-05-18 |
EP1092543B1 (en) | 2006-06-28 |
DE60029068D1 (en) | 2006-08-10 |
DE60029068T2 (en) | 2006-12-28 |
JP2001105606A (en) | 2001-04-17 |
JP3704463B2 (en) | 2005-10-12 |
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