US20060202309A1 - Integrated circuit substrate material - Google Patents
Integrated circuit substrate material Download PDFInfo
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- US20060202309A1 US20060202309A1 US11/416,989 US41698906A US2006202309A1 US 20060202309 A1 US20060202309 A1 US 20060202309A1 US 41698906 A US41698906 A US 41698906A US 2006202309 A1 US2006202309 A1 US 2006202309A1
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Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C11/00—Multi-cellular glass ; Porous or hollow glass or glass particles
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C11/00—Multi-cellular glass ; Porous or hollow glass or glass particles
- C03C11/002—Hollow glass particles
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C14/00—Glass compositions containing a non-glass component, e.g. compositions containing fibres, filaments, whiskers, platelets, or the like, dispersed in a glass matrix
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/26—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, elements provided for in two or more of the groups H01L29/16, H01L29/18, H01L29/20, H01L29/22, H01L29/24, e.g. alloys
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/29—Coated or structually defined flake, particle, cell, strand, strand portion, rod, filament, macroscopic fiber or mass thereof
- Y10T428/2982—Particulate matter [e.g., sphere, flake, etc.]
- Y10T428/2991—Coated
- Y10T428/2993—Silicic or refractory material containing [e.g., tungsten oxide, glass, cement, etc.]
- Y10T428/2996—Glass particles or spheres
Definitions
- a semiconductor substrate material for producing a semiconductor substrate comprising a multitude of hollow microspheres, each one of the multitude of hollow microspheres having an inner layer and an outer layer, the inner layer comprising a first material, the outer layer comprising a second material, and the first material and the second material differing from one another, wherein the first material of the inner layer of each of the multitude of hollow microspheres has a first melting point, wherein the second material of the outer layer of the multitude of hollow microspheres has a second melting point, and wherein the first melting point is higher than the second melting point.
- FIG. 1 illustrates a cross-sectional of a hollow microsphere in accordance with an embodiment of the present invention
- FIG. 2 illustrates a cross-sectional of a slurry of hollow microspheres in accordance with an embodiment of the present invention
- FIG. 3 illustrates a cross-sectional of a hardened matrix of hollow microspheres in accordance with an embodiment of the present invention
- FIG. 4 illustrates a flow chart for manufacturing a substrate in accordance with the embodiment of FIG. 3 of the present invention
- FIG. 5 illustrates a cross-sectional of a fired matrix of hollow microspheres in accordance with an embodiment of the present invention
- FIG. 6 illustrates a flow chart for manufacturing a substrate in accordance with the embodiment of FIG. 5 of the present invention
- FIG. 7 illustrates a cross-sectional view of a glass-coated, hollow microsphere in accordance with another embodiment of the present invention.
- FIG. 8 illustrates a cross-sectional view of a slurry of glass-coated, hollow microspheres in accordance with another embodiment of the present invention
- FIG. 9 illustrates a cross-sectional view of a dried matrix of glass-coated, hollow microspheres in accordance with another embodiment of the present invention.
- FIG. 10 illustrates a flow chart for manufacturing a substrate in accordance with the embodiment of FIG. 9 of the present invention.
- FIG. 11 illustrates a cross-sectional view of a fired matrix of glass-coated, hollow microspheres in accordance with another embodiment of the present invention
- FIG. 12 illustrates a cross-sectional view of a glazed surface of a fired matrix of glass-coated, hollow microspheres in accordance with another embodiment of the present invention.
- FIG. 13 illustrates a flow chart for manufacturing a substrate in accordance with the embodiments of FIGS. 5, 11 or 12 of the present invention.
- the present invention relates to techniques for manufacturing a integrated circuit substrate using ceramic, glass or glass-coated ceramic, hollow microspheres to create a substrate is low thermal conductivity, low dielectric constant, low electrical conductivity, light weight and high strength.
- FIG. 1 illustrates a cross-section of a hollow microsphere 10 .
- the hollow microsphere 10 may be made of ceramic or glass 20 and may have a hollow, gas filled interior, such as any glass or ceramic microsphere manufactured by 3M under the trade name microsphere, Zeeospheres, Scotchlite glass bubbles, or other known glass or ceramic, hollow microsphere of silica-alumina ceramic, alkali alumina silicate, soda-lime-borosilicate, or other similar substance.
- the microspheres may be of 1.0-225 micron in size, with a 200-1040.degree. C. melting temperature and externally coated with binding materials to allow microsphere matrix wafer formation.
- FIG. 2 shows microspheres 10 in a slurry matrix 40 composed of an appropriate vehicle for the desired substrate applications.
- slurry matrix 40 may be composed of glass particles; binders, such as ethyl celluose, acrylics, polyvinyl alcohols, organic polymers; solvents, such as water, acetone, polyglycols; viscosity modifiers, such as surfactants, organic thickeners or other fillers as required to accomplish the desired substrate characteristics for thermal conductivity, dielectric constant, mass, strength, cost of materials and manufacture, etc.
- binders such as ethyl celluose, acrylics, polyvinyl alcohols, organic polymers
- solvents such as water, acetone, polyglycols
- viscosity modifiers such as surfactants, organic thickeners or other fillers as required to accomplish the desired substrate characteristics for thermal conductivity, dielectric constant, mass, strength, cost of materials and manufacture, etc.
- FIG. 3 shows microspheres 10 in a dried or cured slurry matrix 50 .
- the microspheres 10 have a random arrangement in the dried or cured slurry matrix 50 .
- FIG. 4 is a flow chart of a possible method to manufacture a substrate according to FIGS. 1-3 , in which microspheres 10 are combined 12 with an appropriate matrix 40 , dried or cured 14 until the slurry matrix 40 hardens, and formed 16 into semiconductor wafers or integrated circuit die 50 .
- the slurry matrix 40 may be dried or cured by heat, x-ray, high-energy radiation, electron beam, microwave or by any other known drying or curing method.
- the slurry matrix may be formed into wafers or die either before or after the slurry matrix 40 is dried or cured.
- the slurry matrix 40 may be formed into wafers or die by means of die cutting, stamping, powder pressing, lamination, etc. It should be noted that the matrix of microspheres may be formed into wafers of integrated circuit substrates prior to the drying step, in which case the forming would be by means of doctor blade casting, mold casting, etc.
- FIG. 5 shows fired slurry matrix 60 with hollow microspheres 10 .
- this method would include combining 22 the microspheres 10 with the matrix 60 , firing 24 the slurry matrix and forming 26 wafers or integrated circuit substrates of the matrix 60 containing microspheres 10 .
- This process may more particularly comprise ball milling or spraying to mix the microsphere matrix raw materials 22 , firing the microsphere matrix to sinter materials and laser cutting, saw cutting, grinding, etc. to form the final wafer form.
- FIG. 7 show a cross-sectional view of a glass coated microsphere 100 according to another embodiment of the present invention.
- the microsphere 100 may include a high temperature glass or ceramic hollow microsphere 120 that is coated with a low temperature glass 130 .
- the inner microsphere 120 may be any hollow, gas filled interior, such as any glass or ceramic microsphere manufactured by 3M under the trade name microsphere, Zeeospheres, Scotchlite glass bubbles, or other known glass or ceramic, hollow microsphere of silica-alumina ceramic, alkali alumina silicate, soda-lime-borosilicate or other similar substance.
- the outer low temperature glass coating 130 may be made by spray coating, slurry coating, vapor deposition, etc.
- the composition of the inner microsphere 120 and the other glass coating 130 may be selected such that the outer glass coating 130 has a lower melting temperature than the inner microsphere 120 .
- the glass-coated microspheres may be made of a microsphere of approximately 10-250 microns in size with 500-1040.degree. C. melting temperature and have an outer layer of glass of 1.0-10.0 microns in thickness with a 200-330.degree. C. melting temperature.
- FIG. 8 shows a cross-sectional view of glass-coated microspheres 100 in a slurry matrix 140 composed of an appropriate vehicle for the desired substrate applications.
- slurry matrix 140 may be composed of glass particles; binders, such as borophosphate glass and polyvinyl alcohol binder; solvents, such as water; viscosity modifiers, such as liquid surfactants or magnesium silicates thickening agents or other fillers as required to accomplish the desired substrate characteristics for thermal conductivity, dielectric constant, mass, strength, cost of materials and manufacture, etc.
- FIG. 9 shows a cross-sectional view of glass-coated microspheres 100 in a dried or cured slurry matrix 150 .
- the glass-coated microspheres 100 have a random arrangement in the dried or cured slurry matrix 150 .
- FIG. 10 is a flow chart of a possible method to manufacture a substrate according to FIGS. 7-9 , in which glass-coated microspheres 100 are combined 112 with an appropriate matrix 140 , dried or cured 114 until the slurry matrix 140 hardens, and formed 1 16 into semiconductor wafers or integrated circuit die 150 .
- the slurry matrix 140 may be dried or cured by heat, x-ray, high-energy radiation, microwave, ultraviolet, radiation or by any other known drying or curing method.
- the slurry matrix 140 may be formed into wafers, integrated circuit substrates or die either before or after the slurry matrix 140 is dried or cured.
- the slurry matrix 140 may be formed into wafers or die by means of die cutting, stamping, cutting, etc. It should be noted that the matrix of glass-coated microspheres may be formed into wafers or integrated circuit substrates prior to the drying step, in which case the forming would be by means of knife coating (tape casting), mold casting, calendaring, etc.
- FIG. 11 shows cross-sectional view of fired glass-coated microspheres 100 .
- this method would include firing 212 the glass-coated microspheres 100 and forming 214 wafers or integrated circuit substrates of the glass-coated microspheres 100 .
- the firing or sintering step 212 should be at a temperature such that the outer glass-coating 130 of the glass-coated microspheres melts and the microspheres 100 become sintered or glued together 155 .
- the firing or sintering temperature should not be high enough to melt the inner glass or ceramic microspheres 120 .
- the outer glass coating material 130 should be selected from any of several materials such as, borophosphate glass, borosilicate glass, etc., such that it has a relatively low melting point.
- the inner microsphere 120 should be selected from any known microsphere with a higher melting point than the outer glass coating material, such that when the outer glass coating is sintered, the inner microsphere does not melt, but the outer glass coatings of the microspheres essentially binds, sinters or glues the microspheres together.
- This process may optionally include glazing 216 of a top surface 160 of the wafer or integrated circuit substrate in order to smooth the surface of the substrate of sintered glass-coated microspheres 100 .
- the glazing process may include screen printing thick film glass 160 , spin coating glass, vapor deposition, etc.
- the present invention may create a semiconductor substrate having applications where there are requirements for high strength of ceramic; lightweight substrate; low dielectric-constant substrate, (such as in high frequency circuit applications, a need for less capacitive coupling, low loss of signal propagation or microwave applications); or applications requiring low thermal conductivity.
Abstract
A semiconductor substrate material is disclosed for producing a semiconductor substrate. In an embodiment, the semiconductor substrate material may include a multitude of hollow microspheres. Each one of the multitude of hollow microspheres may have an inner layer and an outer layer. The inner layer may include a first material, the outer layer may include a second material, and the first material and the second material may differ from one another. The first material of the inner layer of each of the multitude of hollow microspheres may have a first melting point, the second material of the outer layer of the multitude of hollow microspheres may have a second melting point, and the first melting point may be higher than the second melting point.
Description
- This patent application is a continuation-in-part of pending prior U.S. patent application Ser. No. 10/629,271, filed Jul. 29, 2003 by Marvin Glenn Wong et al. for INTEGRATED CIRCUIT SUBSTRATE MATERIAL AND METHOD.
- The above-identified patent application is hereby incorporated herein by reference.
- Electronic components, such as integrated circuits are becoming more and more common in various devices. Under certain circumstances, it is important for the integrated circuit substrate to have various qualities or attributes. Often certain qualities are balanced against other qualities. It is sometimes important for the substrate to have low thermal conductivity, low mass, low cost, low dielectric constant, high strength, etc. Depending upon the application, some of these qualities may be less important than others and the design team makes trade-offs to maximize the desired qualities with the minimum weaknesses and costs.
- Accordingly, there exists a need in the industry for materials that can be used for integrated circuit substrates that meet the different electrical and physical requirements of current electronics.
- In one embodiment, there is disclosed a semiconductor substrate material for producing a semiconductor substrate, the semiconductor substrate material comprising a multitude of hollow microspheres, each one of the multitude of hollow microspheres having an inner layer and an outer layer, the inner layer comprising a first material, the outer layer comprising a second material, and the first material and the second material differing from one another, wherein the first material of the inner layer of each of the multitude of hollow microspheres has a first melting point, wherein the second material of the outer layer of the multitude of hollow microspheres has a second melting point, and wherein the first melting point is higher than the second melting point.
- Other embodiments are also disclosed.
- A more complete appreciation of this invention, and many of the attendant advantages thereof, will be readily apparent as the same becomes better understood by reference to the following detailed description when considered in conjunction with the accompanying drawings in which like reference symbols indicate the same or similar components, wherein:
-
FIG. 1 illustrates a cross-sectional of a hollow microsphere in accordance with an embodiment of the present invention; -
FIG. 2 illustrates a cross-sectional of a slurry of hollow microspheres in accordance with an embodiment of the present invention; -
FIG. 3 illustrates a cross-sectional of a hardened matrix of hollow microspheres in accordance with an embodiment of the present invention; -
FIG. 4 illustrates a flow chart for manufacturing a substrate in accordance with the embodiment ofFIG. 3 of the present invention; -
FIG. 5 illustrates a cross-sectional of a fired matrix of hollow microspheres in accordance with an embodiment of the present invention; -
FIG. 6 illustrates a flow chart for manufacturing a substrate in accordance with the embodiment ofFIG. 5 of the present invention; -
FIG. 7 illustrates a cross-sectional view of a glass-coated, hollow microsphere in accordance with another embodiment of the present invention; -
FIG. 8 illustrates a cross-sectional view of a slurry of glass-coated, hollow microspheres in accordance with another embodiment of the present invention; -
FIG. 9 illustrates a cross-sectional view of a dried matrix of glass-coated, hollow microspheres in accordance with another embodiment of the present invention; -
FIG. 10 illustrates a flow chart for manufacturing a substrate in accordance with the embodiment ofFIG. 9 of the present invention; -
FIG. 11 illustrates a cross-sectional view of a fired matrix of glass-coated, hollow microspheres in accordance with another embodiment of the present invention; -
FIG. 12 illustrates a cross-sectional view of a glazed surface of a fired matrix of glass-coated, hollow microspheres in accordance with another embodiment of the present invention; and -
FIG. 13 illustrates a flow chart for manufacturing a substrate in accordance with the embodiments ofFIGS. 5, 11 or 12 of the present invention. - As shown in the drawings for purposes of illustration, the present invention relates to techniques for manufacturing a integrated circuit substrate using ceramic, glass or glass-coated ceramic, hollow microspheres to create a substrate is low thermal conductivity, low dielectric constant, low electrical conductivity, light weight and high strength.
- Turning now to the drawings,
FIG. 1 illustrates a cross-section of ahollow microsphere 10. Thehollow microsphere 10 may be made of ceramic orglass 20 and may have a hollow, gas filled interior, such as any glass or ceramic microsphere manufactured by 3M under the trade name microsphere, Zeeospheres, Scotchlite glass bubbles, or other known glass or ceramic, hollow microsphere of silica-alumina ceramic, alkali alumina silicate, soda-lime-borosilicate, or other similar substance. The microspheres may be of 1.0-225 micron in size, with a 200-1040.degree. C. melting temperature and externally coated with binding materials to allow microsphere matrix wafer formation. -
FIG. 2 showsmicrospheres 10 in aslurry matrix 40 composed of an appropriate vehicle for the desired substrate applications. For example,slurry matrix 40 may be composed of glass particles; binders, such as ethyl celluose, acrylics, polyvinyl alcohols, organic polymers; solvents, such as water, acetone, polyglycols; viscosity modifiers, such as surfactants, organic thickeners or other fillers as required to accomplish the desired substrate characteristics for thermal conductivity, dielectric constant, mass, strength, cost of materials and manufacture, etc. -
FIG. 3 showsmicrospheres 10 in a dried or curedslurry matrix 50. As is readily apparent inFIG. 3 , themicrospheres 10 have a random arrangement in the dried or curedslurry matrix 50.FIG. 4 is a flow chart of a possible method to manufacture a substrate according toFIGS. 1-3 , in whichmicrospheres 10 are combined 12 with anappropriate matrix 40, dried or cured 14 until theslurry matrix 40 hardens, and formed 16 into semiconductor wafers orintegrated circuit die 50. Theslurry matrix 40 may be dried or cured by heat, x-ray, high-energy radiation, electron beam, microwave or by any other known drying or curing method. The slurry matrix may be formed into wafers or die either before or after theslurry matrix 40 is dried or cured. Theslurry matrix 40 may be formed into wafers or die by means of die cutting, stamping, powder pressing, lamination, etc. It should be noted that the matrix of microspheres may be formed into wafers of integrated circuit substrates prior to the drying step, in which case the forming would be by means of doctor blade casting, mold casting, etc. -
FIG. 5 shows firedslurry matrix 60 withhollow microspheres 10. As shown inFIG. 6 , this method would include combining 22 themicrospheres 10 with thematrix 60, firing 24 the slurry matrix and forming 26 wafers or integrated circuit substrates of thematrix 60 containingmicrospheres 10. This process may more particularly comprise ball milling or spraying to mix the microsphere matrixraw materials 22, firing the microsphere matrix to sinter materials and laser cutting, saw cutting, grinding, etc. to form the final wafer form. -
FIG. 7 show a cross-sectional view of a glass coatedmicrosphere 100 according to another embodiment of the present invention. Themicrosphere 100 may include a high temperature glass or ceramichollow microsphere 120 that is coated with alow temperature glass 130. Theinner microsphere 120 may be any hollow, gas filled interior, such as any glass or ceramic microsphere manufactured by 3M under the trade name microsphere, Zeeospheres, Scotchlite glass bubbles, or other known glass or ceramic, hollow microsphere of silica-alumina ceramic, alkali alumina silicate, soda-lime-borosilicate or other similar substance. The outer lowtemperature glass coating 130 may be made by spray coating, slurry coating, vapor deposition, etc. The composition of theinner microsphere 120 and theother glass coating 130 may be selected such that theouter glass coating 130 has a lower melting temperature than theinner microsphere 120. By way of example only, the glass-coated microspheres may be made of a microsphere of approximately 10-250 microns in size with 500-1040.degree. C. melting temperature and have an outer layer of glass of 1.0-10.0 microns in thickness with a 200-330.degree. C. melting temperature. -
FIG. 8 shows a cross-sectional view of glass-coatedmicrospheres 100 in aslurry matrix 140 composed of an appropriate vehicle for the desired substrate applications. For example,slurry matrix 140 may be composed of glass particles; binders, such as borophosphate glass and polyvinyl alcohol binder; solvents, such as water; viscosity modifiers, such as liquid surfactants or magnesium silicates thickening agents or other fillers as required to accomplish the desired substrate characteristics for thermal conductivity, dielectric constant, mass, strength, cost of materials and manufacture, etc. -
FIG. 9 shows a cross-sectional view of glass-coatedmicrospheres 100 in a dried or curedslurry matrix 150. As is readily apparent inFIG. 9 , the glass-coatedmicrospheres 100 have a random arrangement in the dried or curedslurry matrix 150.FIG. 10 is a flow chart of a possible method to manufacture a substrate according toFIGS. 7-9 , in which glass-coatedmicrospheres 100 are combined 112 with anappropriate matrix 140, dried or cured 114 until theslurry matrix 140 hardens, and formed 1 16 into semiconductor wafers or integrated circuit die 150. Theslurry matrix 140 may be dried or cured by heat, x-ray, high-energy radiation, microwave, ultraviolet, radiation or by any other known drying or curing method. Theslurry matrix 140 may be formed into wafers, integrated circuit substrates or die either before or after theslurry matrix 140 is dried or cured. Theslurry matrix 140 may be formed into wafers or die by means of die cutting, stamping, cutting, etc. It should be noted that the matrix of glass-coated microspheres may be formed into wafers or integrated circuit substrates prior to the drying step, in which case the forming would be by means of knife coating (tape casting), mold casting, calendaring, etc. -
FIG. 11 shows cross-sectional view of fired glass-coatedmicrospheres 100. As shown inFIGS. 11-13 , this method would include firing 212 the glass-coatedmicrospheres 100 and forming 214 wafers or integrated circuit substrates of the glass-coatedmicrospheres 100. The firing orsintering step 212 should be at a temperature such that the outer glass-coating 130 of the glass-coated microspheres melts and themicrospheres 100 become sintered or glued together 155. The firing or sintering temperature should not be high enough to melt the inner glass orceramic microspheres 120. - Thus, the outer
glass coating material 130 should be selected from any of several materials such as, borophosphate glass, borosilicate glass, etc., such that it has a relatively low melting point. And theinner microsphere 120 should be selected from any known microsphere with a higher melting point than the outer glass coating material, such that when the outer glass coating is sintered, the inner microsphere does not melt, but the outer glass coatings of the microspheres essentially binds, sinters or glues the microspheres together. This process may optionally include glazing 216 of atop surface 160 of the wafer or integrated circuit substrate in order to smooth the surface of the substrate of sintered glass-coatedmicrospheres 100. The glazing process may include screen printingthick film glass 160, spin coating glass, vapor deposition, etc. - The present invention may create a semiconductor substrate having applications where there are requirements for high strength of ceramic; lightweight substrate; low dielectric-constant substrate, (such as in high frequency circuit applications, a need for less capacitive coupling, low loss of signal propagation or microwave applications); or applications requiring low thermal conductivity.
- Although this preferred embodiment of the present invention has been disclosed for illustrative purposes, those skilled in the art will appreciate that various modifications, additions and substitutions are possible, without departing from the scope of the invention, resulting in equivalent embodiments that remain within the scope of the appended claims.
Claims (20)
1. A semiconductor substrate material for producing a semiconductor substrate, the semiconductor substrate material comprising:
a multitude of hollow microspheres, each one of the multitude of hollow microspheres having an inner layer and an outer layer, the inner layer comprising a first material, the outer layer comprising a second material, and the first material and the second material differing from one another, wherein the first material of the inner layer of each of the multitude of hollow microspheres has a first melting point, wherein the second material of the outer layer of the multitude of hollow microspheres has a second melting point, and wherein the first melting point is higher than the second melting point.
2. The semiconductor substrate material in accordance with claim 1 , wherein the multitude of hollow microspheres comprises a multitude of gas filled glass microspheres, and wherein the second material of the outer layer comprises a glass material, the inner layer of each of the gas filled glass microspheres has the first melting point, the outer layer of the glass material has the second melting point, and the first melting point is higher than the second melting point.
3. The semiconductor substrate material in accordance with claim 2 , wherein at least one of the multitude of gas filled glass microspheres is sintered together with another one of the multitude of gas filled glass microspheres.
4. The semiconductor substrate material in accordance with claim 2 , wherein a hardened matrix contains the gas filled glass microspheres.
5. The semiconductor substrate material in accordance with claim 2 , further comprising a glaze is disposed on a top surface of the semiconductor substrate.
6. The semiconductor substrate material in accordance with claim 5 , wherein the glass material of the outer layer of at least one of the multitude of gas filled glass microspheres is sintered together with the glass material of the outer layer of another one of the multitude of gas filled glass microspheres.
7. The semiconductor substrate material in accordance with claim 2 , wherein the hardened matrix containing the multitude of hollow microspheres comprises glass particles, a binder material, and a viscosity modifier.
8. The semiconductor substrate material in accordance with claim 7 , wherein the binder material comprises at least one chosen from the group consisting of ethyl cellulose, an acrylic, a polyvinyl alcohol, an organic polymer, and a borophosphate glass.
9. The semiconductor substrate material in accordance with claim 7 , wherein the at least one viscosity modifier comprises at least one chosen from the group consisting of a surfactant, an organic thickener, a magnesium silicates thickening agent, and a filler material.
10. The semiconductor substrate material in accordance with claim 2 , wherein the semiconductor substrate forms a semiconductor wafer.
11. The semiconductor substrate material in accordance with claim 2 , wherein the semiconductor substrate forms an integrated circuit die.
12. The semiconductor substrate material in accordance with claim 1 , wherein the outer layer of at least one of the multitude of hollow microspheres is sintered together with the outer layer of another one of the multitude of hollow microspheres.
13. The semiconductor substrate material in accordance with claim 1 , wherein a hardened matrix contains the multitude of microspheres.
14. The semiconductor substrate material in accordance with claim 1 , further comprising a glaze is disposed on a top surface of the semiconductor substrate.
15. The semiconductor substrate material in accordance with claim 15 , wherein the outer layer of at least one of the multitude of hollow microspheres is sintered together with the outer layer of another one of the multitude of hollow microspheres.
16. The semiconductor substrate material in accordance with claim 1 , wherein the hardened matrix containing the multitude of hollow microspheres comprises glass particles, a binder material, and a viscosity modifier.
17. The semiconductor substrate material in accordance with claim 16 , wherein the binder material comprises at least one chosen from the group consisting of ethyl cellulose, an acrylic, a polyvinyl alcohol, an organic polymer, and a borophosphate glass.
18. The semiconductor substrate material in accordance with claim 16 , wherein the at least one viscosity modifier comprises at least one chosen from the group consisting of a surfactant, an organic thickener, a magnesium silicates thickening agent, and a filler material.
19. The semiconductor substrate material in accordance with claim 1 , wherein the semiconductor substrate forms a semiconductor wafer.
20. The semiconductor substrate material in accordance with claim 1 , wherein the semiconductor substrate forms an integrated circuit die.
Priority Applications (1)
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US11/416,989 US20060202309A1 (en) | 2003-07-29 | 2006-05-02 | Integrated circuit substrate material |
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US10/629,271 US7135767B2 (en) | 2003-07-29 | 2003-07-29 | Integrated circuit substrate material and method |
US11/416,989 US20060202309A1 (en) | 2003-07-29 | 2006-05-02 | Integrated circuit substrate material |
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US10/629,271 Division US7135767B2 (en) | 2003-07-29 | 2003-07-29 | Integrated circuit substrate material and method |
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US20060202309A1 true US20060202309A1 (en) | 2006-09-14 |
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US10/629,271 Expired - Fee Related US7135767B2 (en) | 2003-07-29 | 2003-07-29 | Integrated circuit substrate material and method |
US11/416,989 Abandoned US20060202309A1 (en) | 2003-07-29 | 2006-05-02 | Integrated circuit substrate material |
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US (2) | US7135767B2 (en) |
EP (1) | EP1649518A2 (en) |
JP (1) | JP2007504072A (en) |
KR (1) | KR20060061809A (en) |
CN (1) | CN1830088A (en) |
WO (1) | WO2005017974A2 (en) |
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Also Published As
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KR20060061809A (en) | 2006-06-08 |
WO2005017974A2 (en) | 2005-02-24 |
JP2007504072A (en) | 2007-03-01 |
US20050022905A1 (en) | 2005-02-03 |
EP1649518A2 (en) | 2006-04-26 |
US7135767B2 (en) | 2006-11-14 |
CN1830088A (en) | 2006-09-06 |
WO2005017974A3 (en) | 2005-09-15 |
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