US20060191478A1 - High density plasma CVD chamber - Google Patents
High density plasma CVD chamber Download PDFInfo
- Publication number
- US20060191478A1 US20060191478A1 US11/414,049 US41404906A US2006191478A1 US 20060191478 A1 US20060191478 A1 US 20060191478A1 US 41404906 A US41404906 A US 41404906A US 2006191478 A1 US2006191478 A1 US 2006191478A1
- Authority
- US
- United States
- Prior art keywords
- chamber
- dome
- coil
- plasma
- gate valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32458—Vessel
- H01J37/32522—Temperature
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
- C23C16/507—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges using external electrodes, e.g. in tunnel type reactors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
Definitions
- This invention relates generally to semiconductor processing equipment and, more particularly, to a chemical vapor deposition chamber suitable for high density plasma processing.
- Chemical vapor deposition is a gas reaction process used in the semiconductor industry to form thin layers or films of desired materials on a substrate.
- Some high density plasma (HDP) enhanced CVD processes use a reactive chemical gas along with physical ion generation through the use of an RF generated plasma to enhance the film deposition by attraction of the positively charged plasma ions onto a negatively biased substrate surface at angles near the vertical to the surface, or at preferred angles to the surface by directional biasing of the substrate surface.
- One goal in the fabrication of integrated circuits (ICs) is to form very thin, yet uniform films onto substrates, at a high throughput.
- CVD films include tungsten, silicon dioxide, silicon nitride and polysilicon, although other CVD films suitable as insulators, dielectrics, conductors, semiconductors, superconductors and magnetics are known.
- the system of the present invention has been found to be particularly effective in forming thin films of doped and undoped silicon dioxide.
- the present invention is directed to the design of a plasma CVD chamber which provides more uniform conditions for forming thin CVD films on a substrate.
- Embodiments of the invention improve temperature control of the upper chamber and improve particle performance by reducing or minimizing the temperature fluctuations on the dome between the deposition and non-deposition cycles. This allows higher source power plasma to be generated and facilitates gapfill for extremely small geometries.
- the dome design improves the uniformity of the plasma distribution over the substrate to be processed.
- an apparatus for processing semiconductor substrates comprises a chamber defining a plasma processing region therein.
- the chamber includes a bottom, a side wall, and a dome disposed on top of the side wall.
- the dome has a dome top and has a side portion defining a chamber diameter.
- a top RF coil is disposed above the dome top.
- a side RF coil is disposed adjacent the side portion of the dome. The side RF coil is spaced from the top RF coil by a coil separation.
- a ratio of the coil separation to the chamber diameter is typically at least about 0.15, more desirably about 0.2-0.25.
- the dome top has a dome top thickness.
- a ratio of the dome top thickness to the chamber diameter is typically at least about 0.019, more desirably about 0.023-0.03.
- a ground shield is disposed adjacent a corner region of the dome between the dome top and a side portion of the dome, and the ground shield comprises an aluminum block.
- the use of the aluminum block reduces RF loss to ground as compared to the use of graphite by reducing eddy current, and improves RF coupling in the plasma.
- the side RF coil, a heating element, and a cooling element are disposed adjacent a side portion of the dome. The side RF coil is decoupled from the heating element and the cooling element. Decoupling the temperature control aspect from the side RF coil allows the side RF coil to be spaced away from the dome, thereby reducing the capacitive coupling of the plasma.
- an apparatus for processing semiconductor substrates comprises a chamber defining a plasma processing region therein.
- the chamber includes a bottom, a side wall, and a dome disposed on top of the side wall.
- a vacuum system includes a pump and a gate valve disposed in a lower chamber portion of the chamber near the bottom.
- the gate valve is a throttle gate valve with pressure throttling capability.
- an apparatus for processing semiconductor substrates comprises a chamber defining a plasma processing region therein.
- the chamber includes a bottom, a side wall, and a dome disposed on top of the side wall.
- a substrate support is disposed in the chamber to support a substrate.
- a vacuum system includes a pump and a gate valve disposed in a lower chamber portion of the chamber near the bottom.
- a screen is disposed above the gate valve and the pump, and is disposed below the substrate support.
- the screen comprises aluminum.
- FIG. 1 is a simplified diagram of an embodiment of a high density plasma chemical vapor deposition (HDP-CVD) system according to the present invention
- FIG. 2 is a simplified cross section of a gas ring that may be used in conjunction with the exemplary HDP-CVD system of FIG. 1 ;
- FIG. 3 is a simplified cross-sectional view of the upper chamber and lower chamber of the HDP-CVD system of FIG. 1 according to another embodiment of the present invention
- FIG. 4 is a simplified cross-sectional view of an example of an existing heat conduction stack
- FIG. 5 is a simplified cross-sectional view of a heat conduction stack above the dome top of the upper chamber of FIG. 3 according to an embodiment of the present invention
- FIG. 6 is a simplified cross-sectional view of an existing ground shield
- FIG. 7 is a simplified cross-sectional view of a ground shield in the upper chamber of FIG. 3 according to an embodiment of the present invention.
- FIG. 8 is a simplified cross-sectional view of an existing side RF coil arrangement
- FIG. 9 is a simplified cross-sectional view of a side RF coil arrangement for the upper chamber of FIG. 3 according to an embodiment of the present invention.
- FIG. 10 is a schematic view of a cooling system for cooling the cold plate of the upper chamber of FIG. 3 according to an embodiment of the present invention
- FIG. 11 is a simplified cross-sectional view illustrating placement of a screen in an existing chamber.
- FIG. 12 is a simplified cross-sectional view illustrating placement of the screen according to an embodiment of the present invention.
- FIG. 1 illustrates one embodiment of a high density plasma chemical vapor deposition (HDP-CVD) system 10 in which a dielectric layer can be deposited.
- System 10 includes a chamber 13 , a vacuum system 70 , a source plasma system 80 A, a bias plasma system 80 B, a gas delivery system 33 , and a remote plasma cleaning system 50 .
- HDP-CVD high density plasma chemical vapor deposition
- the upper portion of chamber 13 includes a dome 14 , which is made of a ceramic dielectric material, such as aluminum oxide or aluminum nitride. Dome 14 defines an upper boundary of a plasma processing region 16 . Plasma processing region 16 is bounded on the bottom by the upper surface of a substrate 17 and a substrate support 18 .
- a heater plate 23 and a cold plate 24 surmount, and are thermally coupled to, dome 14 .
- Heater plate 23 and cold plate 24 allow control of the dome temperature to within about ⁇ 10° C. over a range of about 100° C. to 200° C. This allows optimizing the dome temperature for the various processes. For example, it may be desirable to maintain the dome at a higher temperature for cleaning or etching processes than for deposition processes. Accurate control of the dome temperature also reduces the flake or particle counts in the chamber and improves adhesion between the deposited layer and the substrate.
- Substrate support 18 includes inner and outer passages (not shown) that can deliver a heat transfer gas (sometimes referred to as a backside cooling gas) to the backside of the substrate.
- a heat transfer gas sometimes referred to as a backside cooling gas
- the lower portion of chamber 13 includes a body member 22 , which joins the chamber to the vacuum system.
- a base portion 21 of substrate support 18 is mounted on, and forms a continuous inner surface with, body member 22 .
- Substrates are transferred into and out of chamber 13 by a robot blade (not shown) through an insertion/removal opening (not shown) in the side of chamber 13 .
- Lift pins (not shown) are raised and then lowered under the control of a motor (also not shown) to move the substrate from the robot blade at an upper loading position 57 to a lower processing position 56 in which the substrate is placed on a substrate receiving portion 19 of substrate support 18 .
- Substrate receiving portion 19 includes an electrostatic chuck 20 that secures the substrate to substrate support 18 during substrate processing.
- substrate support 18 is made from an aluminum oxide or aluminum ceramic material.
- Vacuum system 70 includes throttle body 25 , which houses three-blade throttle valve 26 and is attached to gate valve 27 and turbo-molecular pump 28 .
- throttle body 25 offers minimum obstruction to gas flow, and allows symmetric pumping, as described in co-pending, co-assigned U.S. patent application Ser. No. 08/574,839, filed Dec. 12, 1995, and which is incorporated herein by reference.
- Gate valve 27 can isolate pump 28 from throttle body 25 , and can also control chamber pressure by restricting the exhaust flow capacity when throttle valve 26 is fully open.
- the arrangement of the throttle valve, gate valve, and turbo-molecular pump allow accurate and stable control of chamber pressures from between about 1 milli-Torr to about 2 Torr.
- the source plasma system 80 A includes a top coil 29 and side coil 30 , mounted on dome 14 .
- a symmetrical ground shield (not shown) reduces electrical coupling between the coils.
- Top coil 29 is powered by top source RF (SRF) generator 31 A
- side coil 30 is powered by side SRF generator 31 B, allowing independent power levels and frequencies of operation for each coil.
- SRF source RF
- This dual coil system allows control of the radial ion density in chamber 13 , thereby improving plasma uniformity.
- Side coil 30 and top coil 29 are typically inductively driven, which does not require a complimentary electrode.
- the top source RF generator 31 A provides up to 5,000 watts of RF power or higher at nominally 2 MHz and the side source RF generator 31 B provides up to 5,000 watts of RF power or higher at nominally 2 MHz.
- the operating frequencies of the top and side RF generators may be offset from the nominal operating frequency (e.g. to 1.7-1.9 MHz and 1.9-2.1 MHz, respectively) to improve plasma-generation efficiency.
- a bias plasma system 80 B includes a bias RF (BRF) generator 31 C and a bias matching network 32 C.
- the bias plasma system 80 B capacitively couples substrate portion 17 to body member 22 , which act as complimentary electrodes.
- the bias plasma system 80 B serves to enhance the transport of plasma species (e.g., ions) created by the source plasma system 80 A to the surface of the substrate.
- bias RF generator provides up to 5,000 watts of RF power or higher at 13.56 MHz.
- RF generators 31 A and 31 B include digitally controlled synthesizers and operate over a frequency range between about 1.8 to about 2.1 MHz. Each generator includes an RF control circuit (not shown) that measures reflected power from the chamber and coil back to the generator and adjusts the frequency of operation to obtain the lowest reflected power, as understood by a person of ordinary skill in the art.
- RF generators are typically designed to operate into a load with a characteristic impedance of 50 ohms. RF power may be reflected from loads that have a different characteristic impedance than the generator. This can reduce power transferred to the load. Additionally, power reflected from the load back to the generator may overload and damage the generator.
- the impedance of a plasma may range from less than 5 ohms to over 900 ohms, depending on the plasma ion density, among other factors, and because reflected power may be a function of frequency, adjusting the generator frequency according to the reflected power increases the power transferred from the RF generator to the plasma and protects the generator. Another way to reduce reflected power and improve efficiency is with a matching network.
- Matching networks 32 A and 32 B match the output impedance of generators 31 A and 31 B with their respective coils 29 and 30 .
- the RF control circuit may tune both matching networks by changing the value of capacitors within the matching networks to match the generator to the load as the load changes.
- the RF control circuit may tune a matching network when the power reflected from the load back to the generator exceeds a certain limit.
- One way to provide a constant match, and effectively disable the RF control circuit from tuning the matching network is to set the reflected power limit above any expected value of reflected power. This may help stabilize a plasma under some conditions by holding the matching network constant at its most recent condition. Other measures may also help stabilize a plasma.
- the RF control circuit can be used to determine the power delivered to the load (plasma) and may increase or decrease the generator output power to keep the delivered power substantially constant during deposition of a layer.
- a gas delivery system 33 provides gases from several sources, 34 A- 34 F chamber for processing the substrate via gas delivery lines 38 (only some of which are shown).
- gas delivery lines 38 only some of which are shown.
- the actual sources used for sources 34 A- 34 F and the actual connection of delivery lines 38 to chamber 13 varies depending on the deposition and cleaning processes executed within chamber 13 .
- Gases are introduced into chamber 13 through a gas ring 37 and/or a top nozzle 45 .
- FIG. 2 is a simplified, partial cross-sectional view of chamber 13 showing additional details of gas ring 37 .
- first and second gas sources, 34 A and 34 B, and first and second gas flow controllers, 35 A′ and 35 B′ provide gas to ring plenum 36 in gas ring 37 via gas delivery lines 38 (only some of which are shown).
- Gas ring 37 has a plurality of gas nozzles 39 (only one of which is shown for purposes of illustration) that provides a uniform flow of gas over the substrate. Nozzle length and nozzle angle may be changed to allow tailoring of the uniformity profile and gas utilization efficiency for a particular process within an individual chamber.
- gas ring 37 has 24 gas nozzles 39 made from an aluminum oxide ceramic.
- Gas ring 37 also has a plurality of gas nozzles 40 (only one of which is shown), which in a preferred embodiment are co-planar with and the same in length as source gas nozzles 39 , and in one embodiment receive gas from body plenum 41 .
- Gas nozzles 39 and 40 are not fluidly coupled in some embodiments it is desirable not to mix gases before injecting the gases into chamber 13 . In other embodiments, gases may be mixed prior to injecting the gases into chamber 13 by providing apertures (not shown) between body plenum 41 and gas ring plenum 36 .
- third and fourth gas sources, 34 C and 34 D, and third and fourth gas flow controllers, 35 C and 35 D′ provide gas to body plenum via gas delivery lines 38 . Additional valves, such as 43 B (other valves not shown), may shut off gas from the flow controllers to the chamber.
- valve 43 B to isolate chamber 13 from delivery line 38 A and to vent delivery line 38 A to vacuum foreline 44 , for example.
- valve 43 A and 43 C may be incorporated on other gas delivery lines.
- Such 3 -way valves may be placed as close to chamber 13 as practical, to minimize the volume of the unvented gas delivery line (between the 3-way valve and the chamber).
- two-way (on-off) valves may be placed between a mass flow controller (“MFC”) and the chamber or between a gas source and an MFC.
- MFC mass flow controller
- chamber 13 also has top nozzle 45 and top vent 46 .
- Top nozzle 45 and top vent 46 allow independent control of top and side flows of the gases, which improves film uniformity and allows fine adjustment of the film's deposition and doping parameters.
- Top vent 46 is an annular opening around top nozzle 45 .
- first gas source 34 A supplies source gas nozzles 39 and top nozzle 45 .
- Source nozzle MFC 35 A′ controls the amount of gas delivered to source gas nozzles 39 and top nozzle MFC 35 A controls the amount of gas delivered to top gas nozzle 45 .
- two MFCs 35 B and 35 B′ may be used to control the flow of oxygen to both top vent 46 and oxidizer gas nozzles 40 from a single source of oxygen, such as source 34 B.
- the gases supplied to top nozzle 45 and top vent 46 may be kept separate prior to flowing the gases into chamber 13 , or the gases may be mixed in top plenum 48 before they flow into chamber 13 . Separate sources of the same gas may be used to supply various portions of the chamber.
- remote microwave-generated plasma cleaning system 50 is provided to periodically clean deposition residues from chamber components.
- the cleaning system includes a remote microwave generator 51 that creates a plasma from a cleaning gas source 34 E (e.g., molecular fluorine, nitrogen trifluoride, other fluorocarbons or equivalents) in reactor cavity 53 .
- a cleaning gas source 34 E e.g., molecular fluorine, nitrogen trifluoride, other fluorocarbons or equivalents
- the reactive species resulting from this plasma are conveyed to chamber 13 through cleaning gas feed port 54 via applicator tube 55 .
- the materials used to contain the cleaning plasma e.g., cavity 53 and applicator tube 55 ) must be resistant to attack by the plasma.
- the distance between reactor cavity 53 and feed port 54 should be kept as short as practical, since the concentration of desirable plasma species may decline with distance from reactor cavity 53 .
- Generating the cleaning plasma in a remote cavity allows the use of an efficient microwave generator and does not subject chamber components to the temperature, radiation, or bombardment of the glow discharge that may be present in a plasma formed in situ. Consequently, relatively sensitive components, such as electrostatic chuck 20 , do not need to be covered with a dummy wafer or otherwise protected, as may be required with an in situ plasma cleaning process.
- FIG. 3 shows details of the dome 14 and illustrates a number of features of the dome construction, coil arrangement, and ground shield design in the upper chamber of the chamber 13 according to a specific embodiment of the present invention.
- the dome 14 includes a dome top 100 having a central portion area that is generally flat.
- the RF coil coverage of the RF top coil 102 generally matches the size of the flat dome top 100 , and may be wider than that of previous top coils.
- the RF top coil 102 may reach further to the edge of the dome top 100 than previous top coils. This may be accomplished by adding one or more outside turns to the top coil 102 .
- An inside turn may be removed without compromising uniformity since gapfill is typically good at the center. The removal of an inside turn can make room for a top mount clean feed such as a top mount remote plasma source 103 into the chamber 13 .
- Disposed above the dome top 100 is a heat conduction or cooling stack 110 .
- the remote plasma generator 103 is desirably a compact, self-contained unit that can be conveniently mounted on the chamber 13 .
- One suitable unit is the ASTRONTM generator available from Applied Science and Technology, Inc. of Woburn, Mass.
- the ASTRONTM generator utilizes a low-field toroidal (LFTTM) plasma to dissociate a process gas.
- LFTTM low-field toroidal
- the plasma dissociates a process gas including a fluorine-containing gas such as NF3 and a carrier gas such as argon to generate free fluorine which is used to clean film deposits in the process chamber 13 .
- the top-mounted remote plasma generator 103 replaces the microwave-generated plasma cleaning system 50 of the embodiment in FIGS. 1 and 2 .
- the oxygen is no longer introduced through the top vent 46 as in the embodiment in FIGS. 1 and 2 , and instead is only introduced through the side nozzle into the chamber 13 .
- An example of providing a top-mounted remote plasma generator on a process chamber of a substrate processing system is found in commonly assigned and copending U.S. patent application Ser. No. 09/561,325 entitled “Integration of Remote Plasma Generator with Semiconductor Processing Chamber,” filed Apr. 28, 2000, the entire disclosure of which is incorporated herein by reference.
- FIG. 4 shows an example of a previously used heat conduction stack 112 .
- a ChromericsTM heat transfer sheet 114 is disposed below the RF top coil 116 .
- Stacked above the RF top coil 116 are an aluminum nitride RF insulator 118 , a conducting plate 120 , a heater plate 122 , another conducting plate 124 , and a cooling plate or cold plate 126 .
- the heat conduction stack 110 integrates the heater into the aluminum nitride block to form an integrated heater-RF insulator block 130 disposed above the RF top coil 102 .
- heater coils 131 can be embedded into the aluminum nitride block 130 .
- a conducting plate 132 and a cooling plate 134 are stacked above the integrated heater-RF insulator block 130 .
- the conducting plate 132 typically includes a graphite sheet.
- the ChromericsTM heat transfer sheet is replaced by a heat transfer sheet 136 made of a silicone elastomer compound which is highly conformable and has a high thermal conductivity.
- a suitable material is the HeatPathTM thermal interface material available from Raychem Corporation, Menlo Park, Calif. Such a material is advantageously more compliant and has a higher thermal conductivity than ChromericsTM.
- the thermal resistance between the dome 14 and the cooling plate 134 is reduced by employing the integrated heater-RF insulator block 130 and the improved thermal interface sheet 136 between the RF top coil 102 and the dome 14 .
- the increase in the area of the generally flat dome top 100 is complimented by a larger surface area for the cold plate 134 .
- the larger cold plate 134 has more surface area available for heat transfer.
- the size of the cold plate 134 correlates generally with that of the RF top coil 102 , and is larger than the substrate size.
- the cold plate 134 has a coverage which is substantially the same as the coverage of the top RF coil 102 .
- FIG. 6 shows an example of a previously used ground shield design.
- a graphite block 140 is disposed between the dome 142 and the cooling/heating elements.
- Those elements include a heater 144 which is grounded, and a cooling element 146 which is typically a water cooling element supported by a bracket 148 .
- a thermocouple 149 is in contact with the heater 144 .
- FIG. 7 shows an exemplary embodiment of an improved ground shield 150 which is disposed at the corner region of the dome 14 between the dome top and a side portion of the dome, as seen in FIG. 3 .
- the interface between the dome 14 and the cooling/heating elements comprises an aluminum block 152 , which reduces RF loss to ground as compared to the use of graphite by reducing eddy current and improves RF coupling in the plasma.
- a heater 156 is desirably embedded in the aluminum block 152 .
- a cooling element 158 which is typically a water cooling channel, is desirably embedded in the heater 154 . This provides more surface area for cooling.
- a thermocouple 159 may extend through the ground shield 150 to contact the dome 14 , which provides better temperature measurement, and thus quicker response time for temperature adjustment and control.
- the ground shield 150 allows the dome temperature at the corner region to be more precisely controlled than previous ground shields.
- FIG. 8 shows a previously used configuration with RF side coils 160 supported by copper brackets 162 attached to the side of the dome 164 .
- the side coils 160 are typically attached to the brackets 162 by silver brazing 166 .
- Cooling elements 168 extend through the side coils 160 .
- Heaters 170 are supported by the brackets 162 .
- Heat flux 172 flows between the plasma 174 inside the chamber and the heating and cooling elements outside the chamber through the dome 164 .
- the side RF coil 180 is disposed adjacent a side portion of the dome 14 .
- the copper tubes 182 only carry RF currents, and are not involved in cooling or heating.
- the cooling element 184 and the heating element 186 are decoupled from the side RF coil 180 . This decoupling improves the reliability of the side coil design.
- the decoupled cooling element 184 has increased surface area for improved heat transfer.
- the side RF coil 180 , cooling element 184 , and heater 186 may be supported by an aluminum nitride block or structure 188 which is thermally conductive and electrically insulative. Heat flux 192 flows between the plasma 194 inside the chamber and the heating and cooling elements outside the chamber through the dome 14 .
- the side RF coil 180 can be spaced away from the dome 14 , reducing the capacitive coupling to the plasma 194 .
- a dielectric spacer ring can be placed between the dome 14 and the side RF coil 180 to space the side RF coil 180 from the dome 14 by a desired amount.
- the separation between the top RF coil 102 and the side RF coil 180 is increased.
- the separation d is the minimum vertical distance between the top RF coil 102 and the side RF coil 180 .
- a chamber 13 designed to process 200-mm substrates has a chamber width or diameter as defined at the side portion of the dome 14 of about 15 inches or 380 mm.
- the separation d between the top and side coils may be increased by about 1.54 inches or 39 mm from about 1.8 inches or 46 mm in previous chambers to about 3.34 inches or 85 mm. This may involve adding height to the dome 14 .
- the previous height between the top coil and the substrate surface is about 5.56 inches or 141 mm, and the height is increased by about 1.54 inches or 39 mm to about 7.1 inches or 180 mm.
- the ratio of the coil separation to the chamber diameter is typically at least about 0.15, and more desirably about 0.2-0.25.
- the ratio of the coil separation to the height between the top coil and the substrate surface is typically at least about 0.3, and more desirably about 0.4-0.5.
- the increase in the separation d is important for improving the plasma uniformity inside the chamber 13 and the results produced by plasma CVD processes therein.
- the dome top 100 in previous chambers has a tendency to deflect, which adversely affects heat transfer through the dome top 100 .
- the deflection may be decreased by increasing the thickness of the dome top 100 from about 0.23 inch or 5.8 mm to about 0.39 inch or 9.9 mm for a chamber diameter of about 15 inches or 380 mm.
- the ratio of the dome top thickness to the chamber diameter is typically at least about 0.019, and more desirably about 0.023-0.03.
- Another feature of the present invention is an improved cooling scheme.
- the cold plate is typically cooled by circulating therethrough water at a generally constant temperature (e.g., about 80° F.).
- the temperature of the cooling fluid is reduced (e.g., to less than about 60° F., such as about 35-40° F.) to provide additional heat removal capacity.
- the flow of the cooling fluid is adjustable to reduce the flow rate when there is no plasma in the chamber, thereby reducing the heat removal capacity and increasing the heater life.
- FIG. 10 shows an example of providing flow control of the cooling fluid from a fluid source 200 .
- the cooling fluid encounters parallel branches having a two-way valve 204 in one branch and a metering valve 206 in the other branch.
- the two-way valve 204 is normally closed when there is no processing and no plasma in the chamber. When there is a process with a plasma, the two-way valve 204 is switched to an open position.
- the metering valve 206 may be a needle valve or the like, and is manually adjustable to set some minimum flow of cooling fluid to the cold plate 134 as desired.
- the lower chamber body 210 incorporates features that improve the conductance, as shown in FIG. 3 .
- the gate valve 214 of the vacuum system is a throttle gate valve that has a pressure throttling capability and replaces the gate valve 27 of FIG. 1 , thereby eliminating the turbo-throttle valve 26 of FIG. 1 and increasing the conductance of the lower chamber body 210 .
- the conductance may be increased by a factor of about two or more.
- the high conductance of the lower chamber body 210 allows lower pressures to be achieved with the use of large capacity vacuum pumps.
- the pressure may be decreased by about 50%.
- the decrease in pressure produces an increase in electron temperature.
- a screen 220 normally resides between the gate valve 27 and the turbo-pump 28 , as seen in FIG. 11 .
- the screen 220 is used for trapping parts and wafer chips from falling into the turbo-pump 28 .
- the gate valve 27 is closed and thus the deposition accumulated on the screen 220 is not cleaned.
- the screen 220 is typically made of stainless steel which is a particulate source.
- the screen 222 is moved to a position above the gate valve 27 , so that the screen 222 can be cleaned during a chamber cleaning process to reduce particulates.
- the screen 222 may be positioned below the throttle valve 26 , or above the throttle valve 26 and below the substrate support 18 (e.g., at positions 222 A or 222 B).
- the screen 222 is made of aluminum or a similar material which produces less particulates than stainless steel.
- the screen 220 or 222 may be grounded to reduce or eliminate deposition by extinguishing the plasma, for instance, by connecting the screen to a grounded chassis of the chamber.
- a potential may be applied to the screen by connecting the screen to a voltage source.
- the above features improve temperature control of the dome 14 and improve particle performance, by reducing or minimizing the temperature fluctuations on the dome between the deposition and non-deposition cycles. This allows higher source power plasma to be generated and facilitates gapfill for extremely small geometries.
- the dome design improves the uniformity of the plasma distribution over the substrate to be processed.
Abstract
The present invention is directed to the design of a plasma CVD chamber which provides more uniform conditions for forming thin CVD films on a substrate. In one embodiment, an apparatus for processing semiconductor substrates comprises a chamber defining a plasma processing region therein. The chamber includes a bottom, a side wall, and a dome disposed on top of the side wall. The dome has a dome top and having a side portion defining a chamber diameter. A top RF coil is disposed above the dome top. A side RF coil is disposed adjacent the side portion of the dome. The side RF coil is spaced from the top RF coil by a coil separation. A ratio of the coil separation to the chamber diameter is typically at least about 0.15, more desirably about 0.2-0.25.
Description
- This application is a continuation of U.S. patent application Ser. No. 10/150,581, filed on May 17, 2002 which is herein incorporated by reference for all purposes.
- This application is also related to commonly assigned U.S. patent application Ser. No. 10/150,458; filed May 17, 2002, entitled “UPPER CHAMBER FOR HIGH DENSITY PLASMA CVD,” the entire disclosure of which is incorporated herein by reference.
- This invention relates generally to semiconductor processing equipment and, more particularly, to a chemical vapor deposition chamber suitable for high density plasma processing.
- Chemical vapor deposition (CVD) is a gas reaction process used in the semiconductor industry to form thin layers or films of desired materials on a substrate. Some high density plasma (HDP) enhanced CVD processes use a reactive chemical gas along with physical ion generation through the use of an RF generated plasma to enhance the film deposition by attraction of the positively charged plasma ions onto a negatively biased substrate surface at angles near the vertical to the surface, or at preferred angles to the surface by directional biasing of the substrate surface. One goal in the fabrication of integrated circuits (ICs) is to form very thin, yet uniform films onto substrates, at a high throughput. Many factors, such as the type and geometry of the power source and geometry, the gas distribution system and related exhaust, substrate heating and cooling, chamber construction, design, and symmetry, composition and temperature control of chamber surfaces, and material build up in the chamber, must be taken into consideration when evaluating a process system as well as a process which is performed by the system.
- Some of the most widely used CVD films include tungsten, silicon dioxide, silicon nitride and polysilicon, although other CVD films suitable as insulators, dielectrics, conductors, semiconductors, superconductors and magnetics are known. The system of the present invention has been found to be particularly effective in forming thin films of doped and undoped silicon dioxide.
- One problem encountered in IC fabrication is the difficulty associated with establishing a uniform plasma density over the entire substrate surface during processing. As substrate sizes increase, i.e., to 200-300 mm, single coil assemblies suffer wall losses and the like, thereby creating inefficient coupling of power into the plasma resulting in center peaked or cusped plasma profiles. The resulting deposition of material under non-uniform plasma densities results in films which are typically center thick or edge thick, and in either instance tend to be non-uniform.
- The present invention is directed to the design of a plasma CVD chamber which provides more uniform conditions for forming thin CVD films on a substrate. Embodiments of the invention improve temperature control of the upper chamber and improve particle performance by reducing or minimizing the temperature fluctuations on the dome between the deposition and non-deposition cycles. This allows higher source power plasma to be generated and facilitates gapfill for extremely small geometries. The dome design improves the uniformity of the plasma distribution over the substrate to be processed.
- In accordance with an embodiment of the present invention, an apparatus for processing semiconductor substrates comprises a chamber defining a plasma processing region therein. The chamber includes a bottom, a side wall, and a dome disposed on top of the side wall. The dome has a dome top and has a side portion defining a chamber diameter. A top RF coil is disposed above the dome top. A side RF coil is disposed adjacent the side portion of the dome. The side RF coil is spaced from the top RF coil by a coil separation. A ratio of the coil separation to the chamber diameter is typically at least about 0.15, more desirably about 0.2-0.25.
- In some embodiments, the dome top has a dome top thickness. A ratio of the dome top thickness to the chamber diameter is typically at least about 0.019, more desirably about 0.023-0.03.
- In specific embodiments, a ground shield is disposed adjacent a corner region of the dome between the dome top and a side portion of the dome, and the ground shield comprises an aluminum block. The use of the aluminum block reduces RF loss to ground as compared to the use of graphite by reducing eddy current, and improves RF coupling in the plasma. The side RF coil, a heating element, and a cooling element are disposed adjacent a side portion of the dome. The side RF coil is decoupled from the heating element and the cooling element. Decoupling the temperature control aspect from the side RF coil allows the side RF coil to be spaced away from the dome, thereby reducing the capacitive coupling of the plasma.
- In accordance with another embodiment of the present invention, an apparatus for processing semiconductor substrates comprises a chamber defining a plasma processing region therein. The chamber includes a bottom, a side wall, and a dome disposed on top of the side wall. A vacuum system includes a pump and a gate valve disposed in a lower chamber portion of the chamber near the bottom. The gate valve is a throttle gate valve with pressure throttling capability.
- In accordance with still another embodiment of the present invention, an apparatus for processing semiconductor substrates comprises a chamber defining a plasma processing region therein. The chamber includes a bottom, a side wall, and a dome disposed on top of the side wall. A substrate support is disposed in the chamber to support a substrate. A vacuum system includes a pump and a gate valve disposed in a lower chamber portion of the chamber near the bottom. A screen is disposed above the gate valve and the pump, and is disposed below the substrate support. In some embodiments, the screen comprises aluminum.
-
FIG. 1 is a simplified diagram of an embodiment of a high density plasma chemical vapor deposition (HDP-CVD) system according to the present invention; -
FIG. 2 is a simplified cross section of a gas ring that may be used in conjunction with the exemplary HDP-CVD system ofFIG. 1 ; -
FIG. 3 is a simplified cross-sectional view of the upper chamber and lower chamber of the HDP-CVD system ofFIG. 1 according to another embodiment of the present invention; -
FIG. 4 is a simplified cross-sectional view of an example of an existing heat conduction stack; -
FIG. 5 is a simplified cross-sectional view of a heat conduction stack above the dome top of the upper chamber ofFIG. 3 according to an embodiment of the present invention; -
FIG. 6 is a simplified cross-sectional view of an existing ground shield; -
FIG. 7 is a simplified cross-sectional view of a ground shield in the upper chamber ofFIG. 3 according to an embodiment of the present invention; -
FIG. 8 is a simplified cross-sectional view of an existing side RF coil arrangement; -
FIG. 9 is a simplified cross-sectional view of a side RF coil arrangement for the upper chamber ofFIG. 3 according to an embodiment of the present invention; -
FIG. 10 is a schematic view of a cooling system for cooling the cold plate of the upper chamber ofFIG. 3 according to an embodiment of the present invention; -
FIG. 11 is a simplified cross-sectional view illustrating placement of a screen in an existing chamber; and -
FIG. 12 is a simplified cross-sectional view illustrating placement of the screen according to an embodiment of the present invention. -
FIG. 1 illustrates one embodiment of a high density plasma chemical vapor deposition (HDP-CVD)system 10 in which a dielectric layer can be deposited.System 10 includes achamber 13, avacuum system 70, asource plasma system 80A, abias plasma system 80B, agas delivery system 33, and a remoteplasma cleaning system 50. - The upper portion of
chamber 13 includes adome 14, which is made of a ceramic dielectric material, such as aluminum oxide or aluminum nitride.Dome 14 defines an upper boundary of aplasma processing region 16.Plasma processing region 16 is bounded on the bottom by the upper surface of asubstrate 17 and asubstrate support 18. - A
heater plate 23 and acold plate 24 surmount, and are thermally coupled to,dome 14.Heater plate 23 andcold plate 24 allow control of the dome temperature to within about ±10° C. over a range of about 100° C. to 200° C. This allows optimizing the dome temperature for the various processes. For example, it may be desirable to maintain the dome at a higher temperature for cleaning or etching processes than for deposition processes. Accurate control of the dome temperature also reduces the flake or particle counts in the chamber and improves adhesion between the deposited layer and the substrate. - Generally, exposure to the plasma heats a substrate positioned on
substrate support 18.Substrate support 18 includes inner and outer passages (not shown) that can deliver a heat transfer gas (sometimes referred to as a backside cooling gas) to the backside of the substrate. - The lower portion of
chamber 13 includes abody member 22, which joins the chamber to the vacuum system. Abase portion 21 ofsubstrate support 18 is mounted on, and forms a continuous inner surface with,body member 22. Substrates are transferred into and out ofchamber 13 by a robot blade (not shown) through an insertion/removal opening (not shown) in the side ofchamber 13. Lift pins (not shown) are raised and then lowered under the control of a motor (also not shown) to move the substrate from the robot blade at anupper loading position 57 to alower processing position 56 in which the substrate is placed on asubstrate receiving portion 19 ofsubstrate support 18.Substrate receiving portion 19 includes anelectrostatic chuck 20 that secures the substrate tosubstrate support 18 during substrate processing. In a preferred embodiment,substrate support 18 is made from an aluminum oxide or aluminum ceramic material. -
Vacuum system 70 includesthrottle body 25, which houses three-blade throttle valve 26 and is attached togate valve 27 and turbo-molecular pump 28. It should be noted thatthrottle body 25 offers minimum obstruction to gas flow, and allows symmetric pumping, as described in co-pending, co-assigned U.S. patent application Ser. No. 08/574,839, filed Dec. 12, 1995, and which is incorporated herein by reference.Gate valve 27 can isolate pump 28 fromthrottle body 25, and can also control chamber pressure by restricting the exhaust flow capacity whenthrottle valve 26 is fully open. The arrangement of the throttle valve, gate valve, and turbo-molecular pump allow accurate and stable control of chamber pressures from between about 1 milli-Torr to about 2 Torr. - The
source plasma system 80A includes atop coil 29 andside coil 30, mounted ondome 14. A symmetrical ground shield (not shown) reduces electrical coupling between the coils.Top coil 29 is powered by top source RF (SRF)generator 31A, whereasside coil 30 is powered byside SRF generator 31B, allowing independent power levels and frequencies of operation for each coil. This dual coil system allows control of the radial ion density inchamber 13, thereby improving plasma uniformity.Side coil 30 andtop coil 29 are typically inductively driven, which does not require a complimentary electrode. In a specific embodiment, the topsource RF generator 31A provides up to 5,000 watts of RF power or higher at nominally 2 MHz and the sidesource RF generator 31B provides up to 5,000 watts of RF power or higher at nominally 2 MHz. The operating frequencies of the top and side RF generators may be offset from the nominal operating frequency (e.g. to 1.7-1.9 MHz and 1.9-2.1 MHz, respectively) to improve plasma-generation efficiency. - A
bias plasma system 80B includes a bias RF (BRF)generator 31C and abias matching network 32C. Thebias plasma system 80B capacitively couplessubstrate portion 17 tobody member 22, which act as complimentary electrodes. Thebias plasma system 80B serves to enhance the transport of plasma species (e.g., ions) created by thesource plasma system 80A to the surface of the substrate. In a specific embodiment, bias RF generator provides up to 5,000 watts of RF power or higher at 13.56 MHz. -
RF generators -
Matching networks generators respective coils - A
gas delivery system 33 provides gases from several sources, 34A-34F chamber for processing the substrate via gas delivery lines 38 (only some of which are shown). As would be understood by a person of skill in the art, the actual sources used forsources 34A-34F and the actual connection ofdelivery lines 38 tochamber 13 varies depending on the deposition and cleaning processes executed withinchamber 13. Gases are introduced intochamber 13 through agas ring 37 and/or atop nozzle 45.FIG. 2 is a simplified, partial cross-sectional view ofchamber 13 showing additional details ofgas ring 37. - In one embodiment, first and second gas sources, 34A and 34B, and first and second gas flow controllers, 35A′ and 35B′, provide gas to ring
plenum 36 ingas ring 37 via gas delivery lines 38 (only some of which are shown).Gas ring 37 has a plurality of gas nozzles 39 (only one of which is shown for purposes of illustration) that provides a uniform flow of gas over the substrate. Nozzle length and nozzle angle may be changed to allow tailoring of the uniformity profile and gas utilization efficiency for a particular process within an individual chamber. In one embodiment,gas ring 37 has 24gas nozzles 39 made from an aluminum oxide ceramic. -
Gas ring 37 also has a plurality of gas nozzles 40 (only one of which is shown), which in a preferred embodiment are co-planar with and the same in length assource gas nozzles 39, and in one embodiment receive gas frombody plenum 41.Gas nozzles chamber 13. In other embodiments, gases may be mixed prior to injecting the gases intochamber 13 by providing apertures (not shown) betweenbody plenum 41 andgas ring plenum 36. In one embodiment, third and fourth gas sources, 34C and 34D, and third and fourth gas flow controllers, 35C and 35D′, provide gas to body plenum via gas delivery lines 38. Additional valves, such as 43B (other valves not shown), may shut off gas from the flow controllers to the chamber. - In embodiments where flammable, toxic, or corrosive gases are used, it may be desirable to eliminate gas remaining in the gas delivery lines after a deposition. This may be accomplished using a 3-way valve, such as
valve 43B, to isolatechamber 13 fromdelivery line 38A and to ventdelivery line 38A to vacuumforeline 44, for example. As shown inFIG. 1 , other similar valves, such as 43A and 43C, may be incorporated on other gas delivery lines. Such 3-way valves may be placed as close tochamber 13 as practical, to minimize the volume of the unvented gas delivery line (between the 3-way valve and the chamber). Additionally, two-way (on-off) valves (not shown) may be placed between a mass flow controller (“MFC”) and the chamber or between a gas source and an MFC. - Referring again to
FIG. 1 ,chamber 13 also hastop nozzle 45 andtop vent 46.Top nozzle 45 andtop vent 46 allow independent control of top and side flows of the gases, which improves film uniformity and allows fine adjustment of the film's deposition and doping parameters.Top vent 46 is an annular opening aroundtop nozzle 45. In one embodiment,first gas source 34A suppliessource gas nozzles 39 andtop nozzle 45.Source nozzle MFC 35A′ controls the amount of gas delivered to sourcegas nozzles 39 andtop nozzle MFC 35A controls the amount of gas delivered totop gas nozzle 45. Similarly, twoMFCs top vent 46 andoxidizer gas nozzles 40 from a single source of oxygen, such assource 34B. The gases supplied totop nozzle 45 andtop vent 46 may be kept separate prior to flowing the gases intochamber 13, or the gases may be mixed intop plenum 48 before they flow intochamber 13. Separate sources of the same gas may be used to supply various portions of the chamber. - In the embodiment shown in
FIGS. 1 and 2 , remote microwave-generatedplasma cleaning system 50 is provided to periodically clean deposition residues from chamber components. The cleaning system includes aremote microwave generator 51 that creates a plasma from a cleaninggas source 34E (e.g., molecular fluorine, nitrogen trifluoride, other fluorocarbons or equivalents) inreactor cavity 53. The reactive species resulting from this plasma are conveyed tochamber 13 through cleaninggas feed port 54 viaapplicator tube 55. The materials used to contain the cleaning plasma (e.g.,cavity 53 and applicator tube 55) must be resistant to attack by the plasma. The distance betweenreactor cavity 53 and feedport 54 should be kept as short as practical, since the concentration of desirable plasma species may decline with distance fromreactor cavity 53. Generating the cleaning plasma in a remote cavity allows the use of an efficient microwave generator and does not subject chamber components to the temperature, radiation, or bombardment of the glow discharge that may be present in a plasma formed in situ. Consequently, relatively sensitive components, such aselectrostatic chuck 20, do not need to be covered with a dummy wafer or otherwise protected, as may be required with an in situ plasma cleaning process. -
FIG. 3 shows details of thedome 14 and illustrates a number of features of the dome construction, coil arrangement, and ground shield design in the upper chamber of thechamber 13 according to a specific embodiment of the present invention. Thedome 14 includes adome top 100 having a central portion area that is generally flat. The RF coil coverage of theRF top coil 102 generally matches the size of theflat dome top 100, and may be wider than that of previous top coils. TheRF top coil 102 may reach further to the edge of thedome top 100 than previous top coils. This may be accomplished by adding one or more outside turns to thetop coil 102. An inside turn may be removed without compromising uniformity since gapfill is typically good at the center. The removal of an inside turn can make room for a top mount clean feed such as a top mountremote plasma source 103 into thechamber 13. Disposed above thedome top 100 is a heat conduction or coolingstack 110. - The
remote plasma generator 103 is desirably a compact, self-contained unit that can be conveniently mounted on thechamber 13. One suitable unit is the ASTRON™ generator available from Applied Science and Technology, Inc. of Woburn, Mass. The ASTRON™ generator utilizes a low-field toroidal (LFT™) plasma to dissociate a process gas. In one example, the plasma dissociates a process gas including a fluorine-containing gas such as NF3 and a carrier gas such as argon to generate free fluorine which is used to clean film deposits in theprocess chamber 13. The top-mountedremote plasma generator 103 replaces the microwave-generatedplasma cleaning system 50 of the embodiment inFIGS. 1 and 2 . In this embodiment, the oxygen is no longer introduced through thetop vent 46 as in the embodiment inFIGS. 1 and 2 , and instead is only introduced through the side nozzle into thechamber 13. An example of providing a top-mounted remote plasma generator on a process chamber of a substrate processing system is found in commonly assigned and copending U.S. patent application Ser. No. 09/561,325 entitled “Integration of Remote Plasma Generator with Semiconductor Processing Chamber,” filed Apr. 28, 2000, the entire disclosure of which is incorporated herein by reference. -
FIG. 4 shows an example of a previously usedheat conduction stack 112. A Chromerics™heat transfer sheet 114 is disposed below theRF top coil 116. Stacked above theRF top coil 116 are an aluminumnitride RF insulator 118, a conductingplate 120, aheater plate 122, another conductingplate 124, and a cooling plate orcold plate 126. - In the exemplary embodiment as shown in
FIG. 5 , theheat conduction stack 110 integrates the heater into the aluminum nitride block to form an integrated heater-RF insulator block 130 disposed above theRF top coil 102. For instance, heater coils 131 can be embedded into thealuminum nitride block 130. A conductingplate 132 and acooling plate 134 are stacked above the integrated heater-RF insulator block 130. The conductingplate 132 typically includes a graphite sheet. In some embodiments, the Chromerics™ heat transfer sheet is replaced by aheat transfer sheet 136 made of a silicone elastomer compound which is highly conformable and has a high thermal conductivity. A suitable material is the HeatPath™ thermal interface material available from Raychem Corporation, Menlo Park, Calif. Such a material is advantageously more compliant and has a higher thermal conductivity than Chromerics™. The thermal resistance between thedome 14 and thecooling plate 134 is reduced by employing the integrated heater-RF insulator block 130 and the improvedthermal interface sheet 136 between theRF top coil 102 and thedome 14. - The increase in the area of the generally
flat dome top 100 is complimented by a larger surface area for thecold plate 134. The largercold plate 134 has more surface area available for heat transfer. The size of thecold plate 134 correlates generally with that of theRF top coil 102, and is larger than the substrate size. In a specific embodiment, thecold plate 134 has a coverage which is substantially the same as the coverage of thetop RF coil 102. -
FIG. 6 shows an example of a previously used ground shield design. In this example, agraphite block 140 is disposed between thedome 142 and the cooling/heating elements. Those elements include aheater 144 which is grounded, and acooling element 146 which is typically a water cooling element supported by abracket 148. Athermocouple 149 is in contact with theheater 144. -
FIG. 7 shows an exemplary embodiment of animproved ground shield 150 which is disposed at the corner region of thedome 14 between the dome top and a side portion of the dome, as seen inFIG. 3 . The interface between thedome 14 and the cooling/heating elements comprises analuminum block 152, which reduces RF loss to ground as compared to the use of graphite by reducing eddy current and improves RF coupling in the plasma. In addition to theheater 154 disposed on the outside of thealuminum block 152, aheater 156 is desirably embedded in thealuminum block 152. Acooling element 158, which is typically a water cooling channel, is desirably embedded in theheater 154. This provides more surface area for cooling. Athermocouple 159 may extend through theground shield 150 to contact thedome 14, which provides better temperature measurement, and thus quicker response time for temperature adjustment and control. Theground shield 150 allows the dome temperature at the corner region to be more precisely controlled than previous ground shields. - Another feature found in some embodiments of the upper chamber is the side coil arrangement.
FIG. 8 shows a previously used configuration with RF side coils 160 supported bycopper brackets 162 attached to the side of thedome 164. The side coils 160 are typically attached to thebrackets 162 bysilver brazing 166. Coolingelements 168 extend through the side coils 160.Heaters 170 are supported by thebrackets 162.Heat flux 172 flows between theplasma 174 inside the chamber and the heating and cooling elements outside the chamber through thedome 164. - In the exemplary embodiment of
FIG. 9 , theside RF coil 180 is disposed adjacent a side portion of thedome 14. Thecopper tubes 182 only carry RF currents, and are not involved in cooling or heating. Thecooling element 184 and theheating element 186 are decoupled from theside RF coil 180. This decoupling improves the reliability of the side coil design. The decoupledcooling element 184 has increased surface area for improved heat transfer. Theside RF coil 180, coolingelement 184, andheater 186 may be supported by an aluminum nitride block orstructure 188 which is thermally conductive and electrically insulative.Heat flux 192 flows between theplasma 194 inside the chamber and the heating and cooling elements outside the chamber through thedome 14. By decoupling the temperature control aspect from theside RF coil 180, theside RF coil 180 can be spaced away from thedome 14, reducing the capacitive coupling to theplasma 194. For instance, a dielectric spacer ring can be placed between thedome 14 and theside RF coil 180 to space theside RF coil 180 from thedome 14 by a desired amount. - To improve plasma uniformity inside the
chamber 13, the separation between thetop RF coil 102 and theside RF coil 180 is increased. As shown inFIG. 3 , the separation d is the minimum vertical distance between thetop RF coil 102 and theside RF coil 180. In one example, achamber 13 designed to process 200-mm substrates has a chamber width or diameter as defined at the side portion of thedome 14 of about 15 inches or 380 mm. The separation d between the top and side coils may be increased by about 1.54 inches or 39 mm from about 1.8 inches or 46 mm in previous chambers to about 3.34 inches or 85 mm. This may involve adding height to thedome 14. In one example, the previous height between the top coil and the substrate surface is about 5.56 inches or 141 mm, and the height is increased by about 1.54 inches or 39 mm to about 7.1 inches or 180 mm. In general, the ratio of the coil separation to the chamber diameter is typically at least about 0.15, and more desirably about 0.2-0.25. The ratio of the coil separation to the height between the top coil and the substrate surface is typically at least about 0.3, and more desirably about 0.4-0.5. The increase in the separation d is important for improving the plasma uniformity inside thechamber 13 and the results produced by plasma CVD processes therein. - The
dome top 100 in previous chambers has a tendency to deflect, which adversely affects heat transfer through thedome top 100. The deflection may be decreased by increasing the thickness of thedome top 100 from about 0.23 inch or 5.8 mm to about 0.39 inch or 9.9 mm for a chamber diameter of about 15 inches or 380 mm. In general, the ratio of the dome top thickness to the chamber diameter is typically at least about 0.019, and more desirably about 0.023-0.03. - Another feature of the present invention is an improved cooling scheme. To cool the dome in existing systems, the cold plate is typically cooled by circulating therethrough water at a generally constant temperature (e.g., about 80° F.). In the present cooling scheme, the temperature of the cooling fluid is reduced (e.g., to less than about 60° F., such as about 35-40° F.) to provide additional heat removal capacity. Moreover, the flow of the cooling fluid is adjustable to reduce the flow rate when there is no plasma in the chamber, thereby reducing the heat removal capacity and increasing the heater life.
-
FIG. 10 shows an example of providing flow control of the cooling fluid from afluid source 200. The cooling fluid encounters parallel branches having a two-way valve 204 in one branch and ametering valve 206 in the other branch. The two-way valve 204 is normally closed when there is no processing and no plasma in the chamber. When there is a process with a plasma, the two-way valve 204 is switched to an open position. Themetering valve 206 may be a needle valve or the like, and is manually adjustable to set some minimum flow of cooling fluid to thecold plate 134 as desired. - In some embodiments, the
lower chamber body 210 incorporates features that improve the conductance, as shown inFIG. 3 . For example, thegate valve 214 of the vacuum system is a throttle gate valve that has a pressure throttling capability and replaces thegate valve 27 ofFIG. 1 , thereby eliminating the turbo-throttle valve 26 ofFIG. 1 and increasing the conductance of thelower chamber body 210. The conductance may be increased by a factor of about two or more. The high conductance of thelower chamber body 210 allows lower pressures to be achieved with the use of large capacity vacuum pumps. The pressure may be decreased by about 50%. The decrease in pressure produces an increase in electron temperature. The increase in electron temperature is believe to result in improved gapfill for extremely small geometries by allowing the ions to penetrate deeper into trenches. This allows gapfill for trenches having aspect ratios of about 5:1 or higher for a feature size of about 0.13 μm or below. - In the vacuum system, a
screen 220 normally resides between thegate valve 27 and the turbo-pump 28, as seen inFIG. 11 . Thescreen 220 is used for trapping parts and wafer chips from falling into the turbo-pump 28. During chamber clean, thegate valve 27 is closed and thus the deposition accumulated on thescreen 220 is not cleaned. Further, thescreen 220 is typically made of stainless steel which is a particulate source. - In the embodiment shown in
FIG. 12 , thescreen 222 is moved to a position above thegate valve 27, so that thescreen 222 can be cleaned during a chamber cleaning process to reduce particulates. Thescreen 222 may be positioned below thethrottle valve 26, or above thethrottle valve 26 and below the substrate support 18 (e.g., atpositions screen 222 is made of aluminum or a similar material which produces less particulates than stainless steel. - In some embodiments, the
screen - The above features improve temperature control of the
dome 14 and improve particle performance, by reducing or minimizing the temperature fluctuations on the dome between the deposition and non-deposition cycles. This allows higher source power plasma to be generated and facilitates gapfill for extremely small geometries. The dome design improves the uniformity of the plasma distribution over the substrate to be processed. - It is to be understood that the above description is intended to be illustrative and not restrictive. Many embodiments will be apparent to those of skill in the art upon reviewing the above description. By way of example, the present invention may extend to other types of CVD chambers and processes for processing different types of substrates. The scope of the invention should, therefore, be determined not with reference to the above description, but instead should be determined with reference to the appended claims along with their full scope of equivalents.
Claims (9)
1. An apparatus for processing semiconductor substrates, the apparatus comprising:
a chamber defining a plasma processing region therein, the chamber including a bottom, a side wall, and a dome disposed on top of the side wall; and
a vacuum system including a pump and a gate valve disposed in a lower chamber portion of the chamber near the bottom, the gate valve being a throttle gate valve with pressure throttling capability.
2. The apparatus of claim 1 further comprising a screen disposed above the gate valve.
3. An apparatus for processing semiconductor substrates, the apparatus comprising:
a chamber defining a plasma processing region therein, the chamber including a bottom, a side wall, and a dome disposed on top of the side wall;
a substrate support disposed in the chamber to support a substrate;
a vacuum system including a pump disposed below the substrate support and a gate valve disposed in a lower chamber portion of the chamber near the bottom; and
a screen disposed above the gate valve.
4. The apparatus of claim 3 wherein the screen comprises aluminum.
5. The apparatus of claim 3 wherein the vacuum system further comprises a throttle valve disposed above the gate valve and above the screen.
6. The apparatus of claim 3 wherein the vacuum system further comprises a throttle valve disposed above the gate valve and below the screen.
7. The apparatus of claim 3 wherein the gate valve is a throttle gate valve with pressure throttling capability.
8. The apparatus of claim 3 wherein the screen is grounded.
9. The apparatus of claim 3 wherein a potential is applied to the screen.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/414,049 US20060191478A1 (en) | 2002-05-17 | 2006-04-27 | High density plasma CVD chamber |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/150,581 US7074298B2 (en) | 2002-05-17 | 2002-05-17 | High density plasma CVD chamber |
US11/414,049 US20060191478A1 (en) | 2002-05-17 | 2006-04-27 | High density plasma CVD chamber |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US10/150,581 Division US7074298B2 (en) | 2002-05-17 | 2002-05-17 | High density plasma CVD chamber |
Publications (1)
Publication Number | Publication Date |
---|---|
US20060191478A1 true US20060191478A1 (en) | 2006-08-31 |
Family
ID=29419277
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US10/150,581 Expired - Fee Related US7074298B2 (en) | 2002-05-17 | 2002-05-17 | High density plasma CVD chamber |
US11/414,049 Abandoned US20060191478A1 (en) | 2002-05-17 | 2006-04-27 | High density plasma CVD chamber |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US10/150,581 Expired - Fee Related US7074298B2 (en) | 2002-05-17 | 2002-05-17 | High density plasma CVD chamber |
Country Status (1)
Country | Link |
---|---|
US (2) | US7074298B2 (en) |
Cited By (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20090056875A1 (en) * | 2004-12-13 | 2009-03-05 | Novellus Systems, Inc. | Enhanced stripping of low-K films using downstream gas mixing |
US20090208715A1 (en) * | 2008-02-20 | 2009-08-20 | Applied Materials, Inc. | Index modified coating on polymer substrate |
US7585777B1 (en) | 2004-07-13 | 2009-09-08 | Novellus Systems, Inc. | Photoresist strip method for low-k dielectrics |
US20090238993A1 (en) * | 2008-03-19 | 2009-09-24 | Applied Materials, Inc. | Surface preheating treatment of plastics substrate |
US20090238998A1 (en) * | 2008-03-18 | 2009-09-24 | Applied Materials, Inc. | Coaxial microwave assisted deposition and etch systems |
US20090283400A1 (en) * | 2008-05-14 | 2009-11-19 | Applied Materials, Inc. | Microwave-assisted rotatable pvd |
US20100078315A1 (en) * | 2008-09-26 | 2010-04-01 | Applied Materials, Inc. | Microstrip antenna assisted ipvd |
US20100078320A1 (en) * | 2008-09-26 | 2010-04-01 | Applied Materials, Inc. | Microwave plasma containment shield shaping |
US7797855B2 (en) * | 2005-08-31 | 2010-09-21 | Tokyo Electron Limited | Heating apparatus, and coating and developing apparatus |
US20110076420A1 (en) * | 2008-01-30 | 2011-03-31 | Applied Materials, Inc. | High efficiency low energy microwave ion/electron source |
US20110076422A1 (en) * | 2008-01-30 | 2011-03-31 | Applied Materials, Inc. | Curved microwave plasma line source for coating of three-dimensional substrates |
US8057649B2 (en) | 2008-05-06 | 2011-11-15 | Applied Materials, Inc. | Microwave rotatable sputtering deposition |
US8058181B1 (en) | 2002-03-26 | 2011-11-15 | Novellus Systems, Inc. | Method for post-etch cleans |
US8129281B1 (en) | 2005-05-12 | 2012-03-06 | Novellus Systems, Inc. | Plasma based photoresist removal system for cleaning post ash residue |
US8193096B2 (en) | 2004-12-13 | 2012-06-05 | Novellus Systems, Inc. | High dose implantation strip (HDIS) in H2 base chemistry |
US8435895B2 (en) | 2007-04-04 | 2013-05-07 | Novellus Systems, Inc. | Methods for stripping photoresist and/or cleaning metal regions |
US8444869B1 (en) | 2006-10-12 | 2013-05-21 | Novellus Systems, Inc. | Simultaneous front side ash and backside clean |
US8591661B2 (en) | 2009-12-11 | 2013-11-26 | Novellus Systems, Inc. | Low damage photoresist strip method for low-K dielectrics |
US8721797B2 (en) | 2009-12-11 | 2014-05-13 | Novellus Systems, Inc. | Enhanced passivation process to protect silicon prior to high dose implant strip |
US9018108B2 (en) | 2013-01-25 | 2015-04-28 | Applied Materials, Inc. | Low shrinkage dielectric films |
US9514954B2 (en) | 2014-06-10 | 2016-12-06 | Lam Research Corporation | Peroxide-vapor treatment for enhancing photoresist-strip performance and modifying organic films |
US9564344B2 (en) | 2009-12-11 | 2017-02-07 | Novellus Systems, Inc. | Ultra low silicon loss high dose implant strip |
US9613825B2 (en) | 2011-08-26 | 2017-04-04 | Novellus Systems, Inc. | Photoresist strip processes for improved device integrity |
WO2021145992A1 (en) * | 2020-01-15 | 2021-07-22 | Applied Materials, Inc. | Methods and apparatus for carbon compound film deposition |
US11342164B2 (en) * | 2011-12-16 | 2022-05-24 | Taiwan Semiconductor Manufacturing Company, Ltd. | High density plasma chemical vapor deposition chamber and method of using |
Families Citing this family (248)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4071968B2 (en) * | 2002-01-17 | 2008-04-02 | 東芝三菱電機産業システム株式会社 | Gas supply system and gas supply method |
US7074298B2 (en) * | 2002-05-17 | 2006-07-11 | Applied Materials | High density plasma CVD chamber |
US20040231798A1 (en) * | 2002-09-13 | 2004-11-25 | Applied Materials, Inc. | Gas delivery system for semiconductor processing |
KR100549529B1 (en) * | 2003-12-26 | 2006-02-03 | 삼성전자주식회사 | Semiconductor manufacturing equipment |
US7722737B2 (en) * | 2004-11-29 | 2010-05-25 | Applied Materials, Inc. | Gas distribution system for improved transient phase deposition |
US7651587B2 (en) * | 2005-08-11 | 2010-01-26 | Applied Materials, Inc. | Two-piece dome with separate RF coils for inductively coupled plasma reactors |
KR100650260B1 (en) * | 2005-12-27 | 2006-11-27 | 동부일렉트로닉스 주식회사 | Apparatus of plasma etcher |
US20070170867A1 (en) * | 2006-01-24 | 2007-07-26 | Varian Semiconductor Equipment Associates, Inc. | Plasma Immersion Ion Source With Low Effective Antenna Voltage |
JP5074741B2 (en) * | 2006-11-10 | 2012-11-14 | 株式会社日立ハイテクノロジーズ | Vacuum processing equipment |
KR100798351B1 (en) * | 2006-12-12 | 2008-01-28 | 주식회사 뉴파워 프라즈마 | Plasma processing chamber having multi remote plasma generator |
US20090078202A1 (en) * | 2007-09-26 | 2009-03-26 | Neocera, Llc | Substrate heater for material deposition |
JP2012506620A (en) * | 2008-10-21 | 2012-03-15 | アプライド マテリアルズ インコーポレイテッド | Plasma source and process for cleaning the chamber |
US9394608B2 (en) | 2009-04-06 | 2016-07-19 | Asm America, Inc. | Semiconductor processing reactor and components thereof |
US8802201B2 (en) | 2009-08-14 | 2014-08-12 | Asm America, Inc. | Systems and methods for thin-film deposition of metal oxides using excited nitrogen-oxygen species |
JP5592098B2 (en) * | 2009-10-27 | 2014-09-17 | 東京エレクトロン株式会社 | Plasma processing apparatus and plasma processing method |
KR101196422B1 (en) * | 2011-02-22 | 2012-11-01 | 엘아이지에이디피 주식회사 | Plasma processing apparatus |
WO2012157161A1 (en) * | 2011-05-19 | 2012-11-22 | 古河機械金属株式会社 | Method of washing semiconductor manufacturing apparatus component, apparatus for washing semiconductor manufacturing apparatus component, and vapor phase growth apparatus |
US20130023129A1 (en) | 2011-07-20 | 2013-01-24 | Asm America, Inc. | Pressure transmitter for a semiconductor processing environment |
US8728239B2 (en) * | 2011-07-29 | 2014-05-20 | Asm America, Inc. | Methods and apparatus for a gas panel with constant gas flow |
US9017481B1 (en) | 2011-10-28 | 2015-04-28 | Asm America, Inc. | Process feed management for semiconductor substrate processing |
US10714315B2 (en) | 2012-10-12 | 2020-07-14 | Asm Ip Holdings B.V. | Semiconductor reaction chamber showerhead |
US9741575B2 (en) | 2014-03-10 | 2017-08-22 | Taiwan Semiconductor Manufacturing Co., Ltd. | CVD apparatus with gas delivery ring |
US11015245B2 (en) | 2014-03-19 | 2021-05-25 | Asm Ip Holding B.V. | Gas-phase reactor and system having exhaust plenum and components thereof |
US10858737B2 (en) | 2014-07-28 | 2020-12-08 | Asm Ip Holding B.V. | Showerhead assembly and components thereof |
US9890456B2 (en) | 2014-08-21 | 2018-02-13 | Asm Ip Holding B.V. | Method and system for in situ formation of gas-phase compounds |
US10941490B2 (en) | 2014-10-07 | 2021-03-09 | Asm Ip Holding B.V. | Multiple temperature range susceptor, assembly, reactor and system including the susceptor, and methods of using the same |
US10276355B2 (en) | 2015-03-12 | 2019-04-30 | Asm Ip Holding B.V. | Multi-zone reactor, system including the reactor, and method of using the same |
US10458018B2 (en) | 2015-06-26 | 2019-10-29 | Asm Ip Holding B.V. | Structures including metal carbide material, devices including the structures, and methods of forming same |
US10211308B2 (en) | 2015-10-21 | 2019-02-19 | Asm Ip Holding B.V. | NbMC layers |
US11139308B2 (en) | 2015-12-29 | 2021-10-05 | Asm Ip Holding B.V. | Atomic layer deposition of III-V compounds to form V-NAND devices |
US10529554B2 (en) | 2016-02-19 | 2020-01-07 | Asm Ip Holding B.V. | Method for forming silicon nitride film selectively on sidewalls or flat surfaces of trenches |
US10865475B2 (en) | 2016-04-21 | 2020-12-15 | Asm Ip Holding B.V. | Deposition of metal borides and silicides |
US10190213B2 (en) | 2016-04-21 | 2019-01-29 | Asm Ip Holding B.V. | Deposition of metal borides |
US10367080B2 (en) | 2016-05-02 | 2019-07-30 | Asm Ip Holding B.V. | Method of forming a germanium oxynitride film |
US11453943B2 (en) | 2016-05-25 | 2022-09-27 | Asm Ip Holding B.V. | Method for forming carbon-containing silicon/metal oxide or nitride film by ALD using silicon precursor and hydrocarbon precursor |
US9859151B1 (en) | 2016-07-08 | 2018-01-02 | Asm Ip Holding B.V. | Selective film deposition method to form air gaps |
US10612137B2 (en) | 2016-07-08 | 2020-04-07 | Asm Ip Holdings B.V. | Organic reactants for atomic layer deposition |
KR102532607B1 (en) | 2016-07-28 | 2023-05-15 | 에이에스엠 아이피 홀딩 비.브이. | Substrate processing apparatus and method of operating the same |
US9887082B1 (en) | 2016-07-28 | 2018-02-06 | Asm Ip Holding B.V. | Method and apparatus for filling a gap |
US9812320B1 (en) | 2016-07-28 | 2017-11-07 | Asm Ip Holding B.V. | Method and apparatus for filling a gap |
US10643826B2 (en) | 2016-10-26 | 2020-05-05 | Asm Ip Holdings B.V. | Methods for thermally calibrating reaction chambers |
US11532757B2 (en) | 2016-10-27 | 2022-12-20 | Asm Ip Holding B.V. | Deposition of charge trapping layers |
US10229833B2 (en) | 2016-11-01 | 2019-03-12 | Asm Ip Holding B.V. | Methods for forming a transition metal nitride film on a substrate by atomic layer deposition and related semiconductor device structures |
US10714350B2 (en) | 2016-11-01 | 2020-07-14 | ASM IP Holdings, B.V. | Methods for forming a transition metal niobium nitride film on a substrate by atomic layer deposition and related semiconductor device structures |
KR102546317B1 (en) | 2016-11-15 | 2023-06-21 | 에이에스엠 아이피 홀딩 비.브이. | Gas supply unit and substrate processing apparatus including the same |
KR20180068582A (en) * | 2016-12-14 | 2018-06-22 | 에이에스엠 아이피 홀딩 비.브이. | Substrate processing apparatus |
US11447861B2 (en) | 2016-12-15 | 2022-09-20 | Asm Ip Holding B.V. | Sequential infiltration synthesis apparatus and a method of forming a patterned structure |
US11581186B2 (en) | 2016-12-15 | 2023-02-14 | Asm Ip Holding B.V. | Sequential infiltration synthesis apparatus |
KR20180070971A (en) | 2016-12-19 | 2018-06-27 | 에이에스엠 아이피 홀딩 비.브이. | Substrate processing apparatus |
US10269558B2 (en) | 2016-12-22 | 2019-04-23 | Asm Ip Holding B.V. | Method of forming a structure on a substrate |
US10867788B2 (en) | 2016-12-28 | 2020-12-15 | Asm Ip Holding B.V. | Method of forming a structure on a substrate |
US11390950B2 (en) | 2017-01-10 | 2022-07-19 | Asm Ip Holding B.V. | Reactor system and method to reduce residue buildup during a film deposition process |
US10468261B2 (en) | 2017-02-15 | 2019-11-05 | Asm Ip Holding B.V. | Methods for forming a metallic film on a substrate by cyclical deposition and related semiconductor device structures |
US10529563B2 (en) | 2017-03-29 | 2020-01-07 | Asm Ip Holdings B.V. | Method for forming doped metal oxide films on a substrate by cyclical deposition and related semiconductor device structures |
KR102457289B1 (en) | 2017-04-25 | 2022-10-21 | 에이에스엠 아이피 홀딩 비.브이. | Method for depositing a thin film and manufacturing a semiconductor device |
US10770286B2 (en) | 2017-05-08 | 2020-09-08 | Asm Ip Holdings B.V. | Methods for selectively forming a silicon nitride film on a substrate and related semiconductor device structures |
US10892156B2 (en) | 2017-05-08 | 2021-01-12 | Asm Ip Holding B.V. | Methods for forming a silicon nitride film on a substrate and related semiconductor device structures |
US10886123B2 (en) | 2017-06-02 | 2021-01-05 | Asm Ip Holding B.V. | Methods for forming low temperature semiconductor layers and related semiconductor device structures |
US11306395B2 (en) | 2017-06-28 | 2022-04-19 | Asm Ip Holding B.V. | Methods for depositing a transition metal nitride film on a substrate by atomic layer deposition and related deposition apparatus |
KR20190009245A (en) | 2017-07-18 | 2019-01-28 | 에이에스엠 아이피 홀딩 비.브이. | Methods for forming a semiconductor device structure and related semiconductor device structures |
US11374112B2 (en) | 2017-07-19 | 2022-06-28 | Asm Ip Holding B.V. | Method for depositing a group IV semiconductor and related semiconductor device structures |
US11018002B2 (en) | 2017-07-19 | 2021-05-25 | Asm Ip Holding B.V. | Method for selectively depositing a Group IV semiconductor and related semiconductor device structures |
US10541333B2 (en) | 2017-07-19 | 2020-01-21 | Asm Ip Holding B.V. | Method for depositing a group IV semiconductor and related semiconductor device structures |
US10590535B2 (en) | 2017-07-26 | 2020-03-17 | Asm Ip Holdings B.V. | Chemical treatment, deposition and/or infiltration apparatus and method for using the same |
US10770336B2 (en) | 2017-08-08 | 2020-09-08 | Asm Ip Holding B.V. | Substrate lift mechanism and reactor including same |
US10692741B2 (en) | 2017-08-08 | 2020-06-23 | Asm Ip Holdings B.V. | Radiation shield |
US11139191B2 (en) | 2017-08-09 | 2021-10-05 | Asm Ip Holding B.V. | Storage apparatus for storing cassettes for substrates and processing apparatus equipped therewith |
US11769682B2 (en) | 2017-08-09 | 2023-09-26 | Asm Ip Holding B.V. | Storage apparatus for storing cassettes for substrates and processing apparatus equipped therewith |
US11830730B2 (en) | 2017-08-29 | 2023-11-28 | Asm Ip Holding B.V. | Layer forming method and apparatus |
US11056344B2 (en) | 2017-08-30 | 2021-07-06 | Asm Ip Holding B.V. | Layer forming method |
KR102491945B1 (en) * | 2017-08-30 | 2023-01-26 | 에이에스엠 아이피 홀딩 비.브이. | Substrate processing apparatus |
US11295980B2 (en) | 2017-08-30 | 2022-04-05 | Asm Ip Holding B.V. | Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process and related semiconductor device structures |
KR102630301B1 (en) | 2017-09-21 | 2024-01-29 | 에이에스엠 아이피 홀딩 비.브이. | Method of sequential infiltration synthesis treatment of infiltrateable material and structures and devices formed using same |
US10844484B2 (en) | 2017-09-22 | 2020-11-24 | Asm Ip Holding B.V. | Apparatus for dispensing a vapor phase reactant to a reaction chamber and related methods |
US10658205B2 (en) | 2017-09-28 | 2020-05-19 | Asm Ip Holdings B.V. | Chemical dispensing apparatus and methods for dispensing a chemical to a reaction chamber |
US10403504B2 (en) | 2017-10-05 | 2019-09-03 | Asm Ip Holding B.V. | Method for selectively depositing a metallic film on a substrate |
US10923344B2 (en) | 2017-10-30 | 2021-02-16 | Asm Ip Holding B.V. | Methods for forming a semiconductor structure and related semiconductor structures |
US10910262B2 (en) | 2017-11-16 | 2021-02-02 | Asm Ip Holding B.V. | Method of selectively depositing a capping layer structure on a semiconductor device structure |
US11022879B2 (en) | 2017-11-24 | 2021-06-01 | Asm Ip Holding B.V. | Method of forming an enhanced unexposed photoresist layer |
JP7206265B2 (en) | 2017-11-27 | 2023-01-17 | エーエスエム アイピー ホールディング ビー.ブイ. | Equipment with a clean mini-environment |
CN111316417B (en) | 2017-11-27 | 2023-12-22 | 阿斯莫Ip控股公司 | Storage device for storing wafer cassettes for use with batch ovens |
US10872771B2 (en) | 2018-01-16 | 2020-12-22 | Asm Ip Holding B. V. | Method for depositing a material film on a substrate within a reaction chamber by a cyclical deposition process and related device structures |
CN111630203A (en) | 2018-01-19 | 2020-09-04 | Asm Ip私人控股有限公司 | Method for depositing gap filling layer by plasma auxiliary deposition |
TW202325889A (en) | 2018-01-19 | 2023-07-01 | 荷蘭商Asm 智慧財產控股公司 | Deposition method |
US11018047B2 (en) | 2018-01-25 | 2021-05-25 | Asm Ip Holding B.V. | Hybrid lift pin |
USD880437S1 (en) | 2018-02-01 | 2020-04-07 | Asm Ip Holding B.V. | Gas supply plate for semiconductor manufacturing apparatus |
US11081345B2 (en) | 2018-02-06 | 2021-08-03 | Asm Ip Holding B.V. | Method of post-deposition treatment for silicon oxide film |
US10896820B2 (en) | 2018-02-14 | 2021-01-19 | Asm Ip Holding B.V. | Method for depositing a ruthenium-containing film on a substrate by a cyclical deposition process |
WO2019158960A1 (en) | 2018-02-14 | 2019-08-22 | Asm Ip Holding B.V. | A method for depositing a ruthenium-containing film on a substrate by a cyclical deposition process |
KR102636427B1 (en) | 2018-02-20 | 2024-02-13 | 에이에스엠 아이피 홀딩 비.브이. | Substrate processing method and apparatus |
US10975470B2 (en) | 2018-02-23 | 2021-04-13 | Asm Ip Holding B.V. | Apparatus for detecting or monitoring for a chemical precursor in a high temperature environment |
US11473195B2 (en) | 2018-03-01 | 2022-10-18 | Asm Ip Holding B.V. | Semiconductor processing apparatus and a method for processing a substrate |
US11629406B2 (en) | 2018-03-09 | 2023-04-18 | Asm Ip Holding B.V. | Semiconductor processing apparatus comprising one or more pyrometers for measuring a temperature of a substrate during transfer of the substrate |
US11114283B2 (en) | 2018-03-16 | 2021-09-07 | Asm Ip Holding B.V. | Reactor, system including the reactor, and methods of manufacturing and using same |
KR102646467B1 (en) | 2018-03-27 | 2024-03-11 | 에이에스엠 아이피 홀딩 비.브이. | Method of forming an electrode on a substrate and a semiconductor device structure including an electrode |
US11230766B2 (en) | 2018-03-29 | 2022-01-25 | Asm Ip Holding B.V. | Substrate processing apparatus and method |
US11088002B2 (en) | 2018-03-29 | 2021-08-10 | Asm Ip Holding B.V. | Substrate rack and a substrate processing system and method |
KR102501472B1 (en) | 2018-03-30 | 2023-02-20 | 에이에스엠 아이피 홀딩 비.브이. | Substrate processing method |
KR20190128558A (en) | 2018-05-08 | 2019-11-18 | 에이에스엠 아이피 홀딩 비.브이. | Methods for depositing an oxide film on a substrate by a cyclical deposition process and related device structures |
TW202349473A (en) | 2018-05-11 | 2023-12-16 | 荷蘭商Asm Ip私人控股有限公司 | Methods for forming a doped metal carbide film on a substrate and related semiconductor device structures |
KR102596988B1 (en) | 2018-05-28 | 2023-10-31 | 에이에스엠 아이피 홀딩 비.브이. | Method of processing a substrate and a device manufactured by the same |
TW202013553A (en) | 2018-06-04 | 2020-04-01 | 荷蘭商Asm 智慧財產控股公司 | Wafer handling chamber with moisture reduction |
US11718913B2 (en) | 2018-06-04 | 2023-08-08 | Asm Ip Holding B.V. | Gas distribution system and reactor system including same |
US11286562B2 (en) | 2018-06-08 | 2022-03-29 | Asm Ip Holding B.V. | Gas-phase chemical reactor and method of using same |
KR102568797B1 (en) | 2018-06-21 | 2023-08-21 | 에이에스엠 아이피 홀딩 비.브이. | Substrate processing system |
US10797133B2 (en) | 2018-06-21 | 2020-10-06 | Asm Ip Holding B.V. | Method for depositing a phosphorus doped silicon arsenide film and related semiconductor device structures |
CN112292478A (en) | 2018-06-27 | 2021-01-29 | Asm Ip私人控股有限公司 | Cyclic deposition methods for forming metal-containing materials and films and structures containing metal-containing materials |
WO2020003000A1 (en) | 2018-06-27 | 2020-01-02 | Asm Ip Holding B.V. | Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material |
US10612136B2 (en) | 2018-06-29 | 2020-04-07 | ASM IP Holding, B.V. | Temperature-controlled flange and reactor system including same |
KR20200002519A (en) | 2018-06-29 | 2020-01-08 | 에이에스엠 아이피 홀딩 비.브이. | Method for depositing a thin film and manufacturing a semiconductor device |
US10388513B1 (en) | 2018-07-03 | 2019-08-20 | Asm Ip Holding B.V. | Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition |
US10755922B2 (en) | 2018-07-03 | 2020-08-25 | Asm Ip Holding B.V. | Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition |
US10767789B2 (en) | 2018-07-16 | 2020-09-08 | Asm Ip Holding B.V. | Diaphragm valves, valve components, and methods for forming valve components |
US10957781B2 (en) * | 2018-07-31 | 2021-03-23 | International Business Machines Corporation | Uniform horizontal spacer |
US11053591B2 (en) | 2018-08-06 | 2021-07-06 | Asm Ip Holding B.V. | Multi-port gas injection system and reactor system including same |
US10883175B2 (en) | 2018-08-09 | 2021-01-05 | Asm Ip Holding B.V. | Vertical furnace for processing substrates and a liner for use therein |
US10829852B2 (en) | 2018-08-16 | 2020-11-10 | Asm Ip Holding B.V. | Gas distribution device for a wafer processing apparatus |
US11430674B2 (en) | 2018-08-22 | 2022-08-30 | Asm Ip Holding B.V. | Sensor array, apparatus for dispensing a vapor phase reactant to a reaction chamber and related methods |
KR20200030162A (en) | 2018-09-11 | 2020-03-20 | 에이에스엠 아이피 홀딩 비.브이. | Method for deposition of a thin film |
US11024523B2 (en) | 2018-09-11 | 2021-06-01 | Asm Ip Holding B.V. | Substrate processing apparatus and method |
US10998205B2 (en) * | 2018-09-14 | 2021-05-04 | Kokusai Electric Corporation | Substrate processing apparatus and manufacturing method of semiconductor device |
US11049751B2 (en) | 2018-09-14 | 2021-06-29 | Asm Ip Holding B.V. | Cassette supply system to store and handle cassettes and processing apparatus equipped therewith |
CN110970344A (en) | 2018-10-01 | 2020-04-07 | Asm Ip控股有限公司 | Substrate holding apparatus, system including the same, and method of using the same |
US11232963B2 (en) | 2018-10-03 | 2022-01-25 | Asm Ip Holding B.V. | Substrate processing apparatus and method |
KR102592699B1 (en) | 2018-10-08 | 2023-10-23 | 에이에스엠 아이피 홀딩 비.브이. | Substrate support unit and apparatuses for depositing thin film and processing the substrate including the same |
KR102546322B1 (en) | 2018-10-19 | 2023-06-21 | 에이에스엠 아이피 홀딩 비.브이. | Substrate processing apparatus and substrate processing method |
KR102605121B1 (en) | 2018-10-19 | 2023-11-23 | 에이에스엠 아이피 홀딩 비.브이. | Substrate processing apparatus and substrate processing method |
USD948463S1 (en) | 2018-10-24 | 2022-04-12 | Asm Ip Holding B.V. | Susceptor for semiconductor substrate supporting apparatus |
US11087997B2 (en) | 2018-10-31 | 2021-08-10 | Asm Ip Holding B.V. | Substrate processing apparatus for processing substrates |
KR20200051105A (en) | 2018-11-02 | 2020-05-13 | 에이에스엠 아이피 홀딩 비.브이. | Substrate support unit and substrate processing apparatus including the same |
US11572620B2 (en) | 2018-11-06 | 2023-02-07 | Asm Ip Holding B.V. | Methods for selectively depositing an amorphous silicon film on a substrate |
US11031242B2 (en) | 2018-11-07 | 2021-06-08 | Asm Ip Holding B.V. | Methods for depositing a boron doped silicon germanium film |
US10847366B2 (en) | 2018-11-16 | 2020-11-24 | Asm Ip Holding B.V. | Methods for depositing a transition metal chalcogenide film on a substrate by a cyclical deposition process |
US10818758B2 (en) | 2018-11-16 | 2020-10-27 | Asm Ip Holding B.V. | Methods for forming a metal silicate film on a substrate in a reaction chamber and related semiconductor device structures |
US11217444B2 (en) | 2018-11-30 | 2022-01-04 | Asm Ip Holding B.V. | Method for forming an ultraviolet radiation responsive metal oxide-containing film |
KR102636428B1 (en) | 2018-12-04 | 2024-02-13 | 에이에스엠 아이피 홀딩 비.브이. | A method for cleaning a substrate processing apparatus |
WO2020117400A1 (en) * | 2018-12-07 | 2020-06-11 | Applied Materials, Inc. | A component, method of manufacturing a component, and method of cleaning a component |
US11158513B2 (en) | 2018-12-13 | 2021-10-26 | Asm Ip Holding B.V. | Methods for forming a rhenium-containing film on a substrate by a cyclical deposition process and related semiconductor device structures |
TW202037745A (en) | 2018-12-14 | 2020-10-16 | 荷蘭商Asm Ip私人控股有限公司 | Method of forming device structure, structure formed by the method and system for performing the method |
TWI819180B (en) | 2019-01-17 | 2023-10-21 | 荷蘭商Asm 智慧財產控股公司 | Methods of forming a transition metal containing film on a substrate by a cyclical deposition process |
KR20200091543A (en) | 2019-01-22 | 2020-07-31 | 에이에스엠 아이피 홀딩 비.브이. | Semiconductor processing device |
CN111524788B (en) | 2019-02-01 | 2023-11-24 | Asm Ip私人控股有限公司 | Method for topologically selective film formation of silicon oxide |
US11482533B2 (en) | 2019-02-20 | 2022-10-25 | Asm Ip Holding B.V. | Apparatus and methods for plug fill deposition in 3-D NAND applications |
KR102626263B1 (en) | 2019-02-20 | 2024-01-16 | 에이에스엠 아이피 홀딩 비.브이. | Cyclical deposition method including treatment step and apparatus for same |
JP2020136678A (en) | 2019-02-20 | 2020-08-31 | エーエスエム・アイピー・ホールディング・ベー・フェー | Method for filing concave part formed inside front surface of base material, and device |
TW202104632A (en) | 2019-02-20 | 2021-02-01 | 荷蘭商Asm Ip私人控股有限公司 | Cyclical deposition method and apparatus for filling a recess formed within a substrate surface |
TW202100794A (en) | 2019-02-22 | 2021-01-01 | 荷蘭商Asm Ip私人控股有限公司 | Substrate processing apparatus and method for processing substrate |
KR20200108242A (en) | 2019-03-08 | 2020-09-17 | 에이에스엠 아이피 홀딩 비.브이. | Method for Selective Deposition of Silicon Nitride Layer and Structure Including Selectively-Deposited Silicon Nitride Layer |
US11742198B2 (en) | 2019-03-08 | 2023-08-29 | Asm Ip Holding B.V. | Structure including SiOCN layer and method of forming same |
KR20200108243A (en) | 2019-03-08 | 2020-09-17 | 에이에스엠 아이피 홀딩 비.브이. | Structure Including SiOC Layer and Method of Forming Same |
JP2020167398A (en) | 2019-03-28 | 2020-10-08 | エーエスエム・アイピー・ホールディング・ベー・フェー | Door opener and substrate processing apparatus provided therewith |
KR20200116855A (en) | 2019-04-01 | 2020-10-13 | 에이에스엠 아이피 홀딩 비.브이. | Method of manufacturing semiconductor device |
KR20200123380A (en) | 2019-04-19 | 2020-10-29 | 에이에스엠 아이피 홀딩 비.브이. | Layer forming method and apparatus |
KR20200125453A (en) | 2019-04-24 | 2020-11-04 | 에이에스엠 아이피 홀딩 비.브이. | Gas-phase reactor system and method of using same |
KR20200130121A (en) | 2019-05-07 | 2020-11-18 | 에이에스엠 아이피 홀딩 비.브이. | Chemical source vessel with dip tube |
KR20200130118A (en) | 2019-05-07 | 2020-11-18 | 에이에스엠 아이피 홀딩 비.브이. | Method for Reforming Amorphous Carbon Polymer Film |
KR20200130652A (en) | 2019-05-10 | 2020-11-19 | 에이에스엠 아이피 홀딩 비.브이. | Method of depositing material onto a surface and structure formed according to the method |
JP2020188255A (en) | 2019-05-16 | 2020-11-19 | エーエスエム アイピー ホールディング ビー.ブイ. | Wafer boat handling device, vertical batch furnace, and method |
USD947913S1 (en) | 2019-05-17 | 2022-04-05 | Asm Ip Holding B.V. | Susceptor shaft |
USD975665S1 (en) | 2019-05-17 | 2023-01-17 | Asm Ip Holding B.V. | Susceptor shaft |
USD935572S1 (en) | 2019-05-24 | 2021-11-09 | Asm Ip Holding B.V. | Gas channel plate |
USD922229S1 (en) | 2019-06-05 | 2021-06-15 | Asm Ip Holding B.V. | Device for controlling a temperature of a gas supply unit |
KR20200141002A (en) | 2019-06-06 | 2020-12-17 | 에이에스엠 아이피 홀딩 비.브이. | Method of using a gas-phase reactor system including analyzing exhausted gas |
KR20200143254A (en) | 2019-06-11 | 2020-12-23 | 에이에스엠 아이피 홀딩 비.브이. | Method of forming an electronic structure using an reforming gas, system for performing the method, and structure formed using the method |
USD944946S1 (en) | 2019-06-14 | 2022-03-01 | Asm Ip Holding B.V. | Shower plate |
USD931978S1 (en) | 2019-06-27 | 2021-09-28 | Asm Ip Holding B.V. | Showerhead vacuum transport |
KR20210005515A (en) | 2019-07-03 | 2021-01-14 | 에이에스엠 아이피 홀딩 비.브이. | Temperature control assembly for substrate processing apparatus and method of using same |
JP2021015791A (en) | 2019-07-09 | 2021-02-12 | エーエスエム アイピー ホールディング ビー.ブイ. | Plasma device and substrate processing method using coaxial waveguide |
CN112216646A (en) | 2019-07-10 | 2021-01-12 | Asm Ip私人控股有限公司 | Substrate supporting assembly and substrate processing device comprising same |
KR20210010307A (en) | 2019-07-16 | 2021-01-27 | 에이에스엠 아이피 홀딩 비.브이. | Substrate processing apparatus |
KR20210010816A (en) | 2019-07-17 | 2021-01-28 | 에이에스엠 아이피 홀딩 비.브이. | Radical assist ignition plasma system and method |
KR20210010820A (en) | 2019-07-17 | 2021-01-28 | 에이에스엠 아이피 홀딩 비.브이. | Methods of forming silicon germanium structures |
US11643724B2 (en) | 2019-07-18 | 2023-05-09 | Asm Ip Holding B.V. | Method of forming structures using a neutral beam |
TW202121506A (en) | 2019-07-19 | 2021-06-01 | 荷蘭商Asm Ip私人控股有限公司 | Method of forming topology-controlled amorphous carbon polymer film |
CN112309843A (en) | 2019-07-29 | 2021-02-02 | Asm Ip私人控股有限公司 | Selective deposition method for achieving high dopant doping |
CN112309900A (en) | 2019-07-30 | 2021-02-02 | Asm Ip私人控股有限公司 | Substrate processing apparatus |
CN112309899A (en) | 2019-07-30 | 2021-02-02 | Asm Ip私人控股有限公司 | Substrate processing apparatus |
US11227782B2 (en) | 2019-07-31 | 2022-01-18 | Asm Ip Holding B.V. | Vertical batch furnace assembly |
US11587815B2 (en) | 2019-07-31 | 2023-02-21 | Asm Ip Holding B.V. | Vertical batch furnace assembly |
US11587814B2 (en) | 2019-07-31 | 2023-02-21 | Asm Ip Holding B.V. | Vertical batch furnace assembly |
CN112323048B (en) | 2019-08-05 | 2024-02-09 | Asm Ip私人控股有限公司 | Liquid level sensor for chemical source container |
USD965524S1 (en) | 2019-08-19 | 2022-10-04 | Asm Ip Holding B.V. | Susceptor support |
USD965044S1 (en) | 2019-08-19 | 2022-09-27 | Asm Ip Holding B.V. | Susceptor shaft |
JP2021031769A (en) | 2019-08-21 | 2021-03-01 | エーエスエム アイピー ホールディング ビー.ブイ. | Production apparatus of mixed gas of film deposition raw material and film deposition apparatus |
KR20210024423A (en) | 2019-08-22 | 2021-03-05 | 에이에스엠 아이피 홀딩 비.브이. | Method for forming a structure with a hole |
USD940837S1 (en) | 2019-08-22 | 2022-01-11 | Asm Ip Holding B.V. | Electrode |
USD949319S1 (en) | 2019-08-22 | 2022-04-19 | Asm Ip Holding B.V. | Exhaust duct |
USD979506S1 (en) | 2019-08-22 | 2023-02-28 | Asm Ip Holding B.V. | Insulator |
USD930782S1 (en) | 2019-08-22 | 2021-09-14 | Asm Ip Holding B.V. | Gas distributor |
KR20210024420A (en) | 2019-08-23 | 2021-03-05 | 에이에스엠 아이피 홀딩 비.브이. | Method for depositing silicon oxide film having improved quality by peald using bis(diethylamino)silane |
US11286558B2 (en) | 2019-08-23 | 2022-03-29 | Asm Ip Holding B.V. | Methods for depositing a molybdenum nitride film on a surface of a substrate by a cyclical deposition process and related semiconductor device structures including a molybdenum nitride film |
KR20210029090A (en) | 2019-09-04 | 2021-03-15 | 에이에스엠 아이피 홀딩 비.브이. | Methods for selective deposition using a sacrificial capping layer |
KR20210029663A (en) | 2019-09-05 | 2021-03-16 | 에이에스엠 아이피 홀딩 비.브이. | Substrate processing apparatus |
US11562901B2 (en) | 2019-09-25 | 2023-01-24 | Asm Ip Holding B.V. | Substrate processing method |
CN112593212B (en) | 2019-10-02 | 2023-12-22 | Asm Ip私人控股有限公司 | Method for forming topologically selective silicon oxide film by cyclic plasma enhanced deposition process |
TW202129060A (en) | 2019-10-08 | 2021-08-01 | 荷蘭商Asm Ip控股公司 | Substrate processing device, and substrate processing method |
TW202115273A (en) | 2019-10-10 | 2021-04-16 | 荷蘭商Asm Ip私人控股有限公司 | Method of forming a photoresist underlayer and structure including same |
KR20210045930A (en) | 2019-10-16 | 2021-04-27 | 에이에스엠 아이피 홀딩 비.브이. | Method of Topology-Selective Film Formation of Silicon Oxide |
US11637014B2 (en) | 2019-10-17 | 2023-04-25 | Asm Ip Holding B.V. | Methods for selective deposition of doped semiconductor material |
KR20210047808A (en) | 2019-10-21 | 2021-04-30 | 에이에스엠 아이피 홀딩 비.브이. | Apparatus and methods for selectively etching films |
US11646205B2 (en) | 2019-10-29 | 2023-05-09 | Asm Ip Holding B.V. | Methods of selectively forming n-type doped material on a surface, systems for selectively forming n-type doped material, and structures formed using same |
KR20210054983A (en) | 2019-11-05 | 2021-05-14 | 에이에스엠 아이피 홀딩 비.브이. | Structures with doped semiconductor layers and methods and systems for forming same |
US11501968B2 (en) | 2019-11-15 | 2022-11-15 | Asm Ip Holding B.V. | Method for providing a semiconductor device with silicon filled gaps |
KR20210062561A (en) | 2019-11-20 | 2021-05-31 | 에이에스엠 아이피 홀딩 비.브이. | Method of depositing carbon-containing material on a surface of a substrate, structure formed using the method, and system for forming the structure |
CN112951697A (en) | 2019-11-26 | 2021-06-11 | Asm Ip私人控股有限公司 | Substrate processing apparatus |
KR20210065848A (en) | 2019-11-26 | 2021-06-04 | 에이에스엠 아이피 홀딩 비.브이. | Methods for selectivley forming a target film on a substrate comprising a first dielectric surface and a second metallic surface |
CN112885693A (en) | 2019-11-29 | 2021-06-01 | Asm Ip私人控股有限公司 | Substrate processing apparatus |
CN112885692A (en) | 2019-11-29 | 2021-06-01 | Asm Ip私人控股有限公司 | Substrate processing apparatus |
JP2021090042A (en) | 2019-12-02 | 2021-06-10 | エーエスエム アイピー ホールディング ビー.ブイ. | Substrate processing apparatus and substrate processing method |
KR20210070898A (en) | 2019-12-04 | 2021-06-15 | 에이에스엠 아이피 홀딩 비.브이. | Substrate processing apparatus |
KR20210078405A (en) | 2019-12-17 | 2021-06-28 | 에이에스엠 아이피 홀딩 비.브이. | Method of forming vanadium nitride layer and structure including the vanadium nitride layer |
US11527403B2 (en) | 2019-12-19 | 2022-12-13 | Asm Ip Holding B.V. | Methods for filling a gap feature on a substrate surface and related semiconductor structures |
KR20210095050A (en) | 2020-01-20 | 2021-07-30 | 에이에스엠 아이피 홀딩 비.브이. | Method of forming thin film and method of modifying surface of thin film |
TW202130846A (en) | 2020-02-03 | 2021-08-16 | 荷蘭商Asm Ip私人控股有限公司 | Method of forming structures including a vanadium or indium layer |
TW202146882A (en) | 2020-02-04 | 2021-12-16 | 荷蘭商Asm Ip私人控股有限公司 | Method of verifying an article, apparatus for verifying an article, and system for verifying a reaction chamber |
US11776846B2 (en) | 2020-02-07 | 2023-10-03 | Asm Ip Holding B.V. | Methods for depositing gap filling fluids and related systems and devices |
TW202146715A (en) | 2020-02-17 | 2021-12-16 | 荷蘭商Asm Ip私人控股有限公司 | Method for growing phosphorous-doped silicon layer and system of the same |
US11876356B2 (en) | 2020-03-11 | 2024-01-16 | Asm Ip Holding B.V. | Lockout tagout assembly and system and method of using same |
KR20210116240A (en) | 2020-03-11 | 2021-09-27 | 에이에스엠 아이피 홀딩 비.브이. | Substrate handling device with adjustable joints |
KR20210124042A (en) | 2020-04-02 | 2021-10-14 | 에이에스엠 아이피 홀딩 비.브이. | Thin film forming method |
TW202146689A (en) | 2020-04-03 | 2021-12-16 | 荷蘭商Asm Ip控股公司 | Method for forming barrier layer and method for manufacturing semiconductor device |
TW202145344A (en) | 2020-04-08 | 2021-12-01 | 荷蘭商Asm Ip私人控股有限公司 | Apparatus and methods for selectively etching silcon oxide films |
US11821078B2 (en) | 2020-04-15 | 2023-11-21 | Asm Ip Holding B.V. | Method for forming precoat film and method for forming silicon-containing film |
US11898243B2 (en) | 2020-04-24 | 2024-02-13 | Asm Ip Holding B.V. | Method of forming vanadium nitride-containing layer |
KR20210132600A (en) | 2020-04-24 | 2021-11-04 | 에이에스엠 아이피 홀딩 비.브이. | Methods and systems for depositing a layer comprising vanadium, nitrogen, and a further element |
KR20210132605A (en) | 2020-04-24 | 2021-11-04 | 에이에스엠 아이피 홀딩 비.브이. | Vertical batch furnace assembly comprising a cooling gas supply |
KR20210134869A (en) | 2020-05-01 | 2021-11-11 | 에이에스엠 아이피 홀딩 비.브이. | Fast FOUP swapping with a FOUP handler |
KR20210141379A (en) | 2020-05-13 | 2021-11-23 | 에이에스엠 아이피 홀딩 비.브이. | Laser alignment fixture for a reactor system |
KR20210143653A (en) | 2020-05-19 | 2021-11-29 | 에이에스엠 아이피 홀딩 비.브이. | Substrate processing apparatus |
KR20210145078A (en) | 2020-05-21 | 2021-12-01 | 에이에스엠 아이피 홀딩 비.브이. | Structures including multiple carbon layers and methods of forming and using same |
TW202201602A (en) | 2020-05-29 | 2022-01-01 | 荷蘭商Asm Ip私人控股有限公司 | Substrate processing device |
TW202218133A (en) | 2020-06-24 | 2022-05-01 | 荷蘭商Asm Ip私人控股有限公司 | Method for forming a layer provided with silicon |
TW202217953A (en) | 2020-06-30 | 2022-05-01 | 荷蘭商Asm Ip私人控股有限公司 | Substrate processing method |
KR20220010438A (en) | 2020-07-17 | 2022-01-25 | 에이에스엠 아이피 홀딩 비.브이. | Structures and methods for use in photolithography |
TW202204662A (en) | 2020-07-20 | 2022-02-01 | 荷蘭商Asm Ip私人控股有限公司 | Method and system for depositing molybdenum layers |
TW202212623A (en) | 2020-08-26 | 2022-04-01 | 荷蘭商Asm Ip私人控股有限公司 | Method of forming metal silicon oxide layer and metal silicon oxynitride layer, semiconductor structure, and system |
USD990534S1 (en) | 2020-09-11 | 2023-06-27 | Asm Ip Holding B.V. | Weighted lift pin |
USD1012873S1 (en) | 2020-09-24 | 2024-01-30 | Asm Ip Holding B.V. | Electrode for semiconductor processing apparatus |
TW202229613A (en) | 2020-10-14 | 2022-08-01 | 荷蘭商Asm Ip私人控股有限公司 | Method of depositing material on stepped structure |
TW202217037A (en) | 2020-10-22 | 2022-05-01 | 荷蘭商Asm Ip私人控股有限公司 | Method of depositing vanadium metal, structure, device and a deposition assembly |
TW202223136A (en) | 2020-10-28 | 2022-06-16 | 荷蘭商Asm Ip私人控股有限公司 | Method for forming layer on substrate, and semiconductor processing system |
TW202235675A (en) | 2020-11-30 | 2022-09-16 | 荷蘭商Asm Ip私人控股有限公司 | Injector, and substrate processing apparatus |
US11946137B2 (en) | 2020-12-16 | 2024-04-02 | Asm Ip Holding B.V. | Runout and wobble measurement fixtures |
TW202231903A (en) | 2020-12-22 | 2022-08-16 | 荷蘭商Asm Ip私人控股有限公司 | Transition metal deposition method, transition metal layer, and deposition assembly for depositing transition metal on substrate |
USD981973S1 (en) | 2021-05-11 | 2023-03-28 | Asm Ip Holding B.V. | Reactor wall for substrate processing apparatus |
USD980813S1 (en) | 2021-05-11 | 2023-03-14 | Asm Ip Holding B.V. | Gas flow control plate for substrate processing apparatus |
USD980814S1 (en) | 2021-05-11 | 2023-03-14 | Asm Ip Holding B.V. | Gas distributor for substrate processing apparatus |
USD990441S1 (en) | 2021-09-07 | 2023-06-27 | Asm Ip Holding B.V. | Gas flow control plate |
Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4264393A (en) * | 1977-10-31 | 1981-04-28 | Motorola, Inc. | Reactor apparatus for plasma etching or deposition |
US4369730A (en) * | 1981-03-16 | 1983-01-25 | Energy Conversion Devices, Inc. | Cathode for generating a plasma |
US5000225A (en) * | 1989-11-17 | 1991-03-19 | Applied Materials, Inc. | Low profile, combination throttle/gate valve for a multi-pump chamber |
US5944902A (en) * | 1997-02-10 | 1999-08-31 | Applied Materials, Inc. | Plasma source for HDP-CVD chamber |
US6074512A (en) * | 1991-06-27 | 2000-06-13 | Applied Materials, Inc. | Inductively coupled RF plasma reactor having an overhead solenoidal antenna and modular confinement magnet liners |
US6109206A (en) * | 1997-05-29 | 2000-08-29 | Applied Materials, Inc. | Remote plasma source for chamber cleaning |
US6136685A (en) * | 1997-06-03 | 2000-10-24 | Applied Materials, Inc. | High deposition rate recipe for low dielectric constant films |
US6171438B1 (en) * | 1995-03-16 | 2001-01-09 | Hitachi, Ltd. | Plasma processing apparatus and plasma processing method |
US6293306B1 (en) * | 1999-07-09 | 2001-09-25 | Arthur Brenes | Throttle gate valve |
US6380094B1 (en) * | 1994-09-20 | 2002-04-30 | Infineon Technologies Ag | Method for preventing redeposition of etching products onto substrate surfaces during a tungsten re-etching process in the production of LSI circuits |
US7074298B2 (en) * | 2002-05-17 | 2006-07-11 | Applied Materials | High density plasma CVD chamber |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6054013A (en) * | 1996-02-02 | 2000-04-25 | Applied Materials, Inc. | Parallel plate electrode plasma reactor having an inductive antenna and adjustable radial distribution of plasma ion density |
-
2002
- 2002-05-17 US US10/150,581 patent/US7074298B2/en not_active Expired - Fee Related
-
2006
- 2006-04-27 US US11/414,049 patent/US20060191478A1/en not_active Abandoned
Patent Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4264393A (en) * | 1977-10-31 | 1981-04-28 | Motorola, Inc. | Reactor apparatus for plasma etching or deposition |
US4369730A (en) * | 1981-03-16 | 1983-01-25 | Energy Conversion Devices, Inc. | Cathode for generating a plasma |
US5000225A (en) * | 1989-11-17 | 1991-03-19 | Applied Materials, Inc. | Low profile, combination throttle/gate valve for a multi-pump chamber |
US6074512A (en) * | 1991-06-27 | 2000-06-13 | Applied Materials, Inc. | Inductively coupled RF plasma reactor having an overhead solenoidal antenna and modular confinement magnet liners |
US6380094B1 (en) * | 1994-09-20 | 2002-04-30 | Infineon Technologies Ag | Method for preventing redeposition of etching products onto substrate surfaces during a tungsten re-etching process in the production of LSI circuits |
US6171438B1 (en) * | 1995-03-16 | 2001-01-09 | Hitachi, Ltd. | Plasma processing apparatus and plasma processing method |
US5944902A (en) * | 1997-02-10 | 1999-08-31 | Applied Materials, Inc. | Plasma source for HDP-CVD chamber |
US6109206A (en) * | 1997-05-29 | 2000-08-29 | Applied Materials, Inc. | Remote plasma source for chamber cleaning |
US6136685A (en) * | 1997-06-03 | 2000-10-24 | Applied Materials, Inc. | High deposition rate recipe for low dielectric constant films |
US6293306B1 (en) * | 1999-07-09 | 2001-09-25 | Arthur Brenes | Throttle gate valve |
US7074298B2 (en) * | 2002-05-17 | 2006-07-11 | Applied Materials | High density plasma CVD chamber |
Cited By (34)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8058181B1 (en) | 2002-03-26 | 2011-11-15 | Novellus Systems, Inc. | Method for post-etch cleans |
US7585777B1 (en) | 2004-07-13 | 2009-09-08 | Novellus Systems, Inc. | Photoresist strip method for low-k dielectrics |
US8058178B1 (en) | 2004-07-13 | 2011-11-15 | Novellus Systems, Inc. | Photoresist strip method for low-k dielectrics |
US9941108B2 (en) | 2004-12-13 | 2018-04-10 | Novellus Systems, Inc. | High dose implantation strip (HDIS) in H2 base chemistry |
US20090056875A1 (en) * | 2004-12-13 | 2009-03-05 | Novellus Systems, Inc. | Enhanced stripping of low-K films using downstream gas mixing |
US8641862B2 (en) | 2004-12-13 | 2014-02-04 | Novellus Systems, Inc. | High dose implantation strip (HDIS) in H2 base chemistry |
US8193096B2 (en) | 2004-12-13 | 2012-06-05 | Novellus Systems, Inc. | High dose implantation strip (HDIS) in H2 base chemistry |
US8716143B1 (en) | 2005-05-12 | 2014-05-06 | Novellus Systems, Inc. | Plasma based photoresist removal system for cleaning post ash residue |
US8129281B1 (en) | 2005-05-12 | 2012-03-06 | Novellus Systems, Inc. | Plasma based photoresist removal system for cleaning post ash residue |
US7797855B2 (en) * | 2005-08-31 | 2010-09-21 | Tokyo Electron Limited | Heating apparatus, and coating and developing apparatus |
US8444869B1 (en) | 2006-10-12 | 2013-05-21 | Novellus Systems, Inc. | Simultaneous front side ash and backside clean |
US9373497B2 (en) | 2007-04-04 | 2016-06-21 | Novellus Systems, Inc. | Methods for stripping photoresist and/or cleaning metal regions |
US8435895B2 (en) | 2007-04-04 | 2013-05-07 | Novellus Systems, Inc. | Methods for stripping photoresist and/or cleaning metal regions |
US20110097517A1 (en) * | 2008-01-30 | 2011-04-28 | Applied Materials, Inc. | Dynamic vertical microwave deposition of dielectric layers |
US20110076422A1 (en) * | 2008-01-30 | 2011-03-31 | Applied Materials, Inc. | Curved microwave plasma line source for coating of three-dimensional substrates |
US20110076420A1 (en) * | 2008-01-30 | 2011-03-31 | Applied Materials, Inc. | High efficiency low energy microwave ion/electron source |
US7993733B2 (en) | 2008-02-20 | 2011-08-09 | Applied Materials, Inc. | Index modified coating on polymer substrate |
US8679594B2 (en) | 2008-02-20 | 2014-03-25 | Applied Materials, Inc. | Index modified coating on polymer substrate |
US20090208715A1 (en) * | 2008-02-20 | 2009-08-20 | Applied Materials, Inc. | Index modified coating on polymer substrate |
US20090238998A1 (en) * | 2008-03-18 | 2009-09-24 | Applied Materials, Inc. | Coaxial microwave assisted deposition and etch systems |
US20090238993A1 (en) * | 2008-03-19 | 2009-09-24 | Applied Materials, Inc. | Surface preheating treatment of plastics substrate |
US8057649B2 (en) | 2008-05-06 | 2011-11-15 | Applied Materials, Inc. | Microwave rotatable sputtering deposition |
US8349156B2 (en) | 2008-05-14 | 2013-01-08 | Applied Materials, Inc. | Microwave-assisted rotatable PVD |
US20090283400A1 (en) * | 2008-05-14 | 2009-11-19 | Applied Materials, Inc. | Microwave-assisted rotatable pvd |
US20100078320A1 (en) * | 2008-09-26 | 2010-04-01 | Applied Materials, Inc. | Microwave plasma containment shield shaping |
US20100078315A1 (en) * | 2008-09-26 | 2010-04-01 | Applied Materials, Inc. | Microstrip antenna assisted ipvd |
US8721797B2 (en) | 2009-12-11 | 2014-05-13 | Novellus Systems, Inc. | Enhanced passivation process to protect silicon prior to high dose implant strip |
US8591661B2 (en) | 2009-12-11 | 2013-11-26 | Novellus Systems, Inc. | Low damage photoresist strip method for low-K dielectrics |
US9564344B2 (en) | 2009-12-11 | 2017-02-07 | Novellus Systems, Inc. | Ultra low silicon loss high dose implant strip |
US9613825B2 (en) | 2011-08-26 | 2017-04-04 | Novellus Systems, Inc. | Photoresist strip processes for improved device integrity |
US11342164B2 (en) * | 2011-12-16 | 2022-05-24 | Taiwan Semiconductor Manufacturing Company, Ltd. | High density plasma chemical vapor deposition chamber and method of using |
US9018108B2 (en) | 2013-01-25 | 2015-04-28 | Applied Materials, Inc. | Low shrinkage dielectric films |
US9514954B2 (en) | 2014-06-10 | 2016-12-06 | Lam Research Corporation | Peroxide-vapor treatment for enhancing photoresist-strip performance and modifying organic films |
WO2021145992A1 (en) * | 2020-01-15 | 2021-07-22 | Applied Materials, Inc. | Methods and apparatus for carbon compound film deposition |
Also Published As
Publication number | Publication date |
---|---|
US7074298B2 (en) | 2006-07-11 |
US20030213562A1 (en) | 2003-11-20 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US7074298B2 (en) | High density plasma CVD chamber | |
US7354501B2 (en) | Upper chamber for high density plasma CVD | |
US7498268B2 (en) | Gas delivery system for semiconductor processing | |
US7776156B2 (en) | Side RF coil and side heater for plasma processing apparatus | |
US6682603B2 (en) | Substrate support with extended radio frequency electrode upper surface | |
US7510624B2 (en) | Self-cooling gas delivery apparatus under high vacuum for high density plasma applications | |
US6077357A (en) | Orientless wafer processing on an electrostatic chuck | |
US6182602B1 (en) | Inductively coupled HDP-CVD reactor | |
US6109206A (en) | Remote plasma source for chamber cleaning | |
US6286451B1 (en) | Dome: shape and temperature controlled surfaces | |
US6083344A (en) | Multi-zone RF inductively coupled source configuration | |
US6189483B1 (en) | Process kit | |
US5994662A (en) | Unique baffle to deflect remote plasma clean gases | |
JP4801250B2 (en) | Method for depositing a film on a substrate in a deposition chamber | |
US6143078A (en) | Gas distribution system for a CVD processing chamber | |
US6464843B1 (en) | Contamination controlling method and apparatus for a plasma processing chamber | |
US6173673B1 (en) | Method and apparatus for insulating a high power RF electrode through which plasma discharge gases are injected into a processing chamber | |
US6511577B1 (en) | Reduced impedance chamber | |
US20090025636A1 (en) | High profile minimum contact process kit for hdp-cvd application | |
KR101216360B1 (en) | Thermal Management of Inductively Coupled Plasma Reactors | |
US20230335377A1 (en) | Showerhead assembly with heated showerhead |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
STCB | Information on status: application discontinuation |
Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION |