US20060084348A1 - Method for backside sealing organic light emitting diode (OLED) displays - Google Patents

Method for backside sealing organic light emitting diode (OLED) displays Download PDF

Info

Publication number
US20060084348A1
US20060084348A1 US11/095,144 US9514405A US2006084348A1 US 20060084348 A1 US20060084348 A1 US 20060084348A1 US 9514405 A US9514405 A US 9514405A US 2006084348 A1 US2006084348 A1 US 2006084348A1
Authority
US
United States
Prior art keywords
frit
electrodes
laser beam
sealing
regions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US11/095,144
Inventor
Keith Becken
Stephan Logunov
Kamjula Reddy
Joseph Schroeder
Holly Strzepek
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to US11/095,144 priority Critical patent/US20060084348A1/en
Publication of US20060084348A1 publication Critical patent/US20060084348A1/en
Abandoned legal-status Critical Current

Links

Images

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00Electroluminescent light sources
    • H05B33/02Details
    • H05B33/04Sealing arrangements, e.g. against humidity
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C27/00Joining pieces of glass to pieces of other inorganic material; Joining glass to glass other than by fusing
    • C03C27/06Joining glass to glass by processes other than fusing
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C27/00Joining pieces of glass to pieces of other inorganic material; Joining glass to glass other than by fusing
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00Electroluminescent light sources
    • H05B33/10Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/80Constructional details
    • H10K50/84Passivation; Containers; Encapsulations
    • H10K50/842Containers
    • H10K50/8426Peripheral sealing arrangements, e.g. adhesives, sealants
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/80Constructional details
    • H10K59/87Passivation; Containers; Encapsulations
    • H10K59/871Self-supporting sealing arrangements
    • H10K59/8722Peripheral sealing arrangements, e.g. adhesives, sealants
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/23Sheet including cover or casing
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/24Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24777Edge feature

Definitions

  • the present invention relates to hermetically sealed glass packages that are suitable to protect thin film devices which are sensitive to the ambient environment.
  • Some examples of such glass packages are organic emitting light diode (OLED) displays, sensors, and other optical devices.
  • OLED organic emitting light diode
  • the present invention is demonstrated using an OLED display as an example.
  • OLEDs have been the subject of a considerable amount of research in recent years because of their use and potential use in a wide variety of electroluminescent devices. For instance, a single OLED can be used in a discrete light emitting device or an array of OLEDs can be used in lighting applications or flat-panel display applications (e.g., OLED displays).
  • OLED displays are known to be very bright and to have a good color contrast and wide viewing angle.
  • OLED displays and in particular the electrodes and organic layers located therein are susceptible to degradation resulting from interaction with oxygen and moisture leaking into the OLED display from the ambient environment. It is well known that the life of the OLED display can be significantly increased if the electrodes and organic layers located therein are hermetically sealed from the ambient environment. Unfortunately, in the past it has been very difficult to develop a sealing process to hermetically seal the OLED display.
  • Today one way to seal the OLED display is to form a hermetic seal by melting a low temperature frit doped with a material that is highly absorbent at a specific wavelength of light.
  • a high power laser is used to heat up and soften the frit which forms a hermetic seal between a cover glass with the frit located thereon and a substrate glass with OLEDs located thereon.
  • the frit is typically ⁇ 1 mm wide and ⁇ 6-100 um thick. If the absorption and thickness of the frit is uniform then sealing can be done at constant laser energy and speed so as to provide a uniform temperature rise at the frit location.
  • the present invention includes a hermetically sealed OLED display and method for manufacturing the hermetically sealed OLED display.
  • the hermetically sealed OLED display is manufactured by depositing a frit (e.g., doped frit) onto a cover plate and by depositing OLEDs onto a substrate plate.
  • a laser e.g., sealing apparatus
  • a laser is then used to heat the frit in a manner where a substantially constant temperature is maintained within the frit along a sealing line while the frit melts and forms a hermetic seal which connects the cover plate to the substrate plate and also protects the OLEDs located between the cover plate and the substrate plate.
  • sealing techniques described herein that enable the laser to heat the frit in a manner where a substantially constant temperature is maintained within the frit along the sealing line which is difficult to accomplish because the sealing line has regions occupied by electrodes that are connected to the OLEDS and regions that are free of the electrodes.
  • the speed and/or power of a laser beam emitted from the laser is dynamically changed as needed to ensure that the frit is uniformly heated along the sealing line which has electrode occupied regions and electrode free regions.
  • FIGS. 1A and 1B are respectively a top view and a cross-sectional side view illustrating the basic components of a hermetically sealed OLED display that can be made by using one or more of the sealing techniques of the present invention
  • FIG. 2 is a flowchart illustrating the steps of a preferred method for manufacturing the hermetically sealed OLED display shown in FIGS. 1A and 1B ;
  • FIG. 3 is a cross-sectional side view of an OLED display being hermetically sealed by a first sealing technique in accordance with the present invention
  • FIGS. 4A-4C are three diagrams that are used to help describe a second sealing technique that can be used to hermetically seal an OLED display in accordance with the present invention
  • FIG. 5 is a cross-sectional side view of an OLED display being hermetically sealed by a third sealing technique in accordance with the present invention.
  • FIG. 6 is a cross-sectional side view of an OLED display being hermetically sealed by a fourth sealing technique in accordance with the present invention.
  • FIG. 7 is a cross-sectional side view of an OLED display being hermetically sealed by a fifth sealing technique in accordance with the present invention.
  • FIG. 8 is a cross-sectional side view of an OLED display being hermetically sealed by a sixth sealing technique in accordance with the present invention.
  • FIGS. 9A-9C are three diagrams that are used to help describe a seventh sealing technique that can be used to hermetically seal an OLED display in accordance with the present invention.
  • FIG. 10 is a cross-sectional side view of an OLED display which is used to show that each of of the aforementioned sealing techniques may have to take into account the starting temperature and subsequent temperatures of the frit while manufacturing the hermitically sealed OLED display in accordance with the present invention.
  • FIG. 11-13 are several diagrams used to help describe some exemplary ways one could manufacture an OLED display using one or more of the aforementioned sealing techniques in accordance with the present invention.
  • FIGS. 1-10 there are disclosed in accordance with the present invention a hermetically sealed OLED display 100 and method 200 for manufacturing the OLED display 100 .
  • the sealing techniques of the present invention are described below with respect to manufacturing the hermetically sealed OLED display 100 , it should be understood that the same or similar sealing techniques can be used to seal two glass plates to one another that can be used in a wide variety of applications and device. Accordingly, the sealing techniques of the present invention should not be construed in a limited manner.
  • FIGS. 1A and 1B there are respectively show a top view and a cross-sectional side view that illustrate the basic components of the hermetically sealed OLED display 100 .
  • the OLED display 100 includes a multilayer sandwich of a cover plate 102 (e.g., glass plate 102 ), one or more OLEDs 104 /electrodes 106 , a doped frit 108 and a substrate plate 110 (e.g., glass plate 110 ).
  • the OLED display 100 has a hermetic seal 112 which was formed from the frit 108 that protects the OLEDs 104 located between the cover plate 102 and the substrate plate 110 .
  • the hermetic seal 112 is typically located just inside the outer edges of the OLED display 100 .
  • the OLEDs 104 are located within a perimeter of the hermetic seal 112 .
  • the electrodes 106 which are connected the OLEDs 104 pass/extend through the hermetic seal 112 so they can connect to an external device (not shown). Again, it is the presence of the electrodes 106 which are often non-transparent metal electrodes 106 that makes it difficult to form a hermetic connection 112 between the cover plate 102 and the substrate plate 110 .
  • the metal electrodes 106 have different patterns and different optical properties such that some of the laser energy from a sealing apparatus 114 (e.g., laser 114 ) is absorbed and/or reflected by the metal electrodes 106 which creates an uneven temperature distribution in the frit 108 during the sealing process which can lead to the formation of a non-hermetic connection between the cover plate 102 and the substrate plate 110 . How this problem is solved by using one or more of the sealing techniques of the present invention so it is possible to make the OLED display 100 is described below with respect to FIGS. 2-10 .
  • the cover plate 102 and the substrate plate 110 are provided.
  • the cover and substrate plates 102 and 110 are transparent glass plates like the ones manufactured and sold by Corning Incorporated under the brand names of Code 1737 glass or Eagle 2000TM glass.
  • the cover and substrate plates 102 and 110 can be any transparent glass plates like for example the ones manufactured and sold by Asahi Glass Co. (e.g., OA10 glass and OA21 glass), Nippon Electric Glass Co., NHTechno and Samsung Corning Precision Glass Co.
  • the frit 108 is deposited near the edges of the cover plate 102 .
  • the frit 108 can be placed approximately 1 mm away from the free edges of the cover plate 102 .
  • the frit 108 is a low temperature glass frit that contains one or more absorbing ions chosen from the group including iron, copper, vanadium, and neodymium (for example).
  • the frit 108 may also be doped with a filler (e.g., inversion filler, additive filler) which lowers the coefficient of thermal expansion of the frit 108 so that it matches or substantially matches the coefficient of thermal expansions of the two glass plates 102 and 110 .
  • the frit 108 can be pre-sintered to the cover plate 102 .
  • the frit 108 which was deposited onto the cover plate 102 is heated so that it becomes attached to the cover plate 102 .
  • a more detailed discussion about how one can pre-sinter the frit 108 to the cover plate 102 is provided below in the text just prior to the description associated with FIG. 11 .
  • the OLEDs 104 and other circuitry including the electrodes 106 are deposited onto the substrate plate 110 .
  • the typical OLED 104 includes one or more organic layers (not shown) and anode/cathode electrodes 106 .
  • any known OLED 104 or future OLED 104 can be used in the OLED display 100 .
  • another type of thin film device can be deposited in this step besides the OLEDs 104 if an OLED display 100 is not being made but instead another glass package like one used in an optical sensor is going to be made using the sealing technique(s) of the present invention.
  • the sealing apparatus 114 heats the frit 108 using one or more of the sealing techniques of the present invention such that a substantially constant temperature is maintained in the frit 108 along the sealing line 116 while the frit 108 melts and forms the hermetic seal 112 which connects and bonds the cover plate 102 to the substrate plate 110 (see FIG. 1B ).
  • the hermetic seal 112 also protects the OLEDs 104 by preventing oxygen and moisture in the ambient environment from entering into the OLED display 100 .
  • the sealing techniques of the present invention enable the sealing apparatus 114 to maintain a constant temperature on the frit line 116 during the sealing process even though there are electrodes 106 that have different patterns and properties that pass under the frit 108 which melts and forms the hermetic seal 112 .
  • the sealing techniques need to take into account several factors which can affect the rate of the heat diffusion and in turn the temperature of the frit 108 at the sealing point 116 .
  • the typical frit 108 transmission can vary from 2% to 30% depending on its composition and thickness.
  • the electrodes 106 depending on their composition can absorb or reflect the light, transmitted through the frit 108 .
  • the thermal conductivity of the substrate plate 110 with and without deposited electrodes 106 often varies which affects the rate of the heat diffusion at the sealing point 116 .
  • the temperature rise (T frit) in the frit 108 at any point along the sealing line 116 can be estimated as follows: Tfrit ⁇ P/a 2sqrt(vD)( ⁇ (frit)+( 1 ⁇ (frit)e(electrode)+(1 ⁇ frit)R(electrode) ⁇ (frit))
  • Tfrit temperature rise in the frit 108
  • P laser power of the laser 114
  • v laser translation speed
  • a is the laser spot size
  • D heat diffusivity in the substrate plate 110
  • ⁇ (frit) is percentage of the laser power absorbed by frit 108 on the first path
  • R(electrode) is reflectivity of the electrode 108
  • e(electrode) is the percentage of laser power absorbed by electrode 108 .
  • this equation represents an amount of energy absorbed by frit 108 on the first path, the amount of the laser energy transmitted through frit 108 and absorbed by the electrode 106 , and the amount of the laser energy transmitted through the frit 108 , reflected from the electrode 106 and absorbed by frit 108 on the second path (e.g., see FIG. 3 ).
  • the equation is valid for semi-infinite volume heating it may not be exact to represent T(frit) dependence on the v (velocity) and K (thermal conductivity) but this equation does show the qualitative dependence of T(frit) on the values of these parameters.
  • the equation also makes it clear that during the sealing process the temperature rise in the frit 108 can be made equal for the electrode-free regions and the electrode occupied regions along the sealing line 116 .
  • the different sealing techniques that can ensure the sealing apparatus 114 uniformly heats the frit 108 along the sealing line 116 which has electrode-free regions and electrode occupied regions are described in detail below with respect to FIGS. 3-10 .
  • the sealing technique is one where the laser 114 needs to dynamically change the power of the laser beam 108 at different points on the sealing line 116 to maintain a substantially constant temperature in the frit 108 along the sealing line 116 that has electrode occupied regions 218 a and electrode free regions 218 b .
  • the laser 114 maintains a constant temperature in the frit 108 on the sealing line 116 by lowering the power of the laser beam 118 when the electrode occupied regions 218 a are present on the sealing line 116 and by increasing the power of the laser beam 118 when the electrode free regions 218 b are present on the sealing line 116 .
  • the sealing technique used is one where the laser 114 dynamically changes the speed (v) of the laser beam 108 to maintain a substantially constant temperature in the frit 108 along the sealing line 116 that has electrode occupied regions 218 a and electrode free regions 218 b .
  • the laser 114 can maintain a constant temperature in the frit 108 on the sealing line 116 by moving the laser beam 118 faster when it is over the electrode occupied regions 218 a and by moving laser beam 118 slower when it is over electrode free regions 218 b .
  • the laser 114 may move the laser beam 118 at a third intermediate speed in the areas where there are electrodes 106 in close proximity to the sealing line 116 .
  • This process which is also shown in FIG. 4B can be implemented regardless of whether the electrodes 106 are highly absorptive and/or highly reflective.
  • a stage/support (not shown) which holds the OLED display 100 could be moved at different speeds under a stationary laser 114 to maintain a constant temperature within the frit 108 .
  • FIG. 4C is a graph illustrating some experimental results that were obtained when two bare glass plates with no electrodes were sealed together using this sealing technique.
  • the sealing technique is one where a high reflector 502 (e.g., mirror 502 ) is placed under the substrate plate 110 while the laser 114 emits the laser beam 118 to melt the frit 108 and form the hermetic seal 112 .
  • the high reflector 502 helps to balance the power absorbed by the frit 108 regardless of whether the frit 108 is located over electrode occupied regions 218 a or electrode free regions 218 b .
  • the temperature rise in the frit 108 at different points along the sealing line 116 can be represented as follows:
  • T(frit)1 P/a 2 sqrt(vD)( ⁇ (frit)+(1 ⁇ (frit)e(electrode)+(1 ⁇ frit)R(electrode) ⁇ (frit))
  • T(frit)2 P/a 2sqrt(vD)( ⁇ (frit)+( 1 ⁇ (frit)*R(reflector)* ⁇ (frit))
  • the sealing technique is one where a partially reflective mask 602 is placed on top of the cover plate 102 while the laser 114 emits the laser beam 118 to melt and form the hermetic seal 112 .
  • the partially reflective mask 602 has different patterns 604 a , 604 b . . . 604 d that represent different reflectivities of the mask 602 to compensate for the different properties of electrodes 106 .
  • the partially reflective mask 602 helps to balance the power absorbed by the frit 108 regardless of whether the frit 108 is located over electrode occupied regions 218 a or electrode free regions 218 b.
  • the sealing technique is one where the laser 114 seals at least a part of the frit line 116 in a first pass at the lowest power corresponding to the right sealing temperature along the line 116 and then finishes the sealing of the line 116 in a second pass at a higher power only at places which failed to reach the correct temperature during the first pass.
  • a feedback mechanism similar to or like the one described below may be used if needed to determine which sections of the frit 108 did not reach the correct temperature during the first pass.
  • the sealing technique is one that uses a feedback mechanism 802 to help ensure there is uniform heating within the frit 108 along the sealing line 116 during the formation of the hermetic seal 112 .
  • the feedback mechanism 802 can be used to monitor the hot spot intensity of the sealing line 116 at a certain fixed wavelength.
  • the hot spot originates from black body emission due to the temperature rise along the sealing line 116 because of the heating by the laser 114 .
  • the emission spectrum is very broad and almost any of the wavelengths from 500-2000 nm could be used for this purpose.
  • the feedback mechanism 100 monitors the on-line emission intensity, converts it to a temperature and optimizes one or more sealing parameters to ensure the temperature is uniform along the sealing line 116 regardless of whether the frit 108 is over electrode occupied regions 218 a or over electrode free regions 218 b .
  • the feedback mechanism 802 can control the power of the laser 114 to make the temperature uniform along the sealing line 116 regardless of whether the frit 108 is over the electrode occupied regions 218 a or electrode free regions 218 b .
  • the sealing technique is one where the beam profile of the laser beam 118 is modified by a circular aperture 902 located at the end of the laser 114 (see FIG. 9A ).
  • the circular aperture 902 is sized to modify the laser beam 118 by blocking/defocusing a portion of that beam 118 such that a modified laser beam 118 a that heats the frit 108 along the sealing line 116 of the OLED display 100 (see FIG. 9B ). As can be seen in the graph shown in FIG.
  • the circular aperture 902 modifies the gaussian shape of the laser beam 118 by clipping its tails.
  • the defocused laser beam 118 a also has a reduced 1/e power level that can provide the needed coverage and needed power at the sealing line 116 while at the same time not to expose any of the devices (e.g., OLEDs 104 ) outside of the frit line 116 to extra heat generation which can permanently damage of the OLDE display 100 .
  • the circular aperture 902 can have a blocking circle (not shown) located in the middle thereof to further change the shape of the laser beam 118 (see FIG. 9C ). As can be seen in the graph shown in FIG.
  • the modified laser beam 118 c has a shape that helps make the temperature uniform over the frit 108 which typically has more heat diffusion at its edges.
  • An elliptical beam 118 causes uniform heating across the frit 108 and also enables gradual heating and cooling along the frit 108 , which helps to reduce residual stress.
  • the OLED display 100 can be sealed by using the sealing techniques described above with respect to changing the power of the laser 114 (see FIG. 3 ) and with using the circular aperture 902 to modify the shape of the laser beam 118 (see FIGS. 9A-9C ).
  • the starting point for sealing the frit 108 typically has a lower temperature than the remaining parts of the frit 108 that are located further down on the sealing line 116 . This is due to the fact that the frit 108 at the starting point is at room temperature while the rest of the frit 108 has an elevated temperature during the formation of the hermetic seal 112 (see FIG. 10 ). This means that sealing parameters of the laser 114 (for example) at the beginning of the frit 108 may need to be adjusted to take into account the differences in the surrounding temperatures.
  • the technique that is described next can be used to increase the sealing speed of the laser 114 which could help improve the efficiency of any of the aforementioned sealing techniques. If a round laser spot is used then the maximum sealing speed would be in the range of ⁇ 10-11 mm/s. However, if one used an elliptical or slit like shaped laser beam 118 to heat the frit 108 , then this would likely result in increasing the speed one could use to seal the OLED display 100 provided that the power density of the elliptical shaped laser beam 118 is the same as the round shaped laser beam 118 .
  • the power of the laser 114 needs to be increased proportionally as the spot area of the elliptical shaped laser beam 118 increases relative to a round shaped laser beam 118 . All of this would enable one to speed-up the sealing process by the ratio of the length to the width of the spot size of the elliptical shaped laser beam 118 .
  • special care may be needed to take care of the corners in the OLED display 100 where the speed of the elliptical shaped laser beam 118 needs to go back to a slow regime (the same as for round beam).
  • one may need to rotate the elliptical shaped laser beam 118 while the laser 114 is located over the corners of the OLED display 100 to properly seal the OLED display 100 .
  • a LCD-type glass e.g. codes 1737 and Eagle 2000
  • OLED organic light emitting device
  • the frit 108 can be applied to the LCD glass plate 102 by screen-printing or by a programmable auger robot which provides a well-shaped pattern. Then, the LCD glass sample 102 with the frit pattern located thereon can be placed in a furnace which “fires” the frit 108 at a temperature that depends on the composition of the frit 108 .
  • the frit 108 can contain one or more of the transition elements (vanadium, iron, nickel, etc.) that have a substantial absorption cross-section at 810 nm (for example) which matches the operating wavelength of an 810 nm laser 114 (for example).
  • the frit 108 is pre-sintered and the organic binder mostly burns out. This step can be important because, otherwise, the organics from the frit 108 could evaporate and then precipitate inside the OLED display 100 during laser sealing.
  • Frit 108 height is an important variable which allows the plates 102 and 110 to be sealed from the backside. What this means is that the laser beam 118 can first traverse the cover plate 102 that has the pre-sintered frit 108 . If the frit 108 is too thin it does not leave enough material to absorb the laser irradiation resulting in failure.
  • frit 108 If the frit 108 is too thick it will be able to absorb enough energy at the first surface to melt, but will shield the necessary energy needed to melt at the secondary surface on plate 110 . This usually results in poor or spotty bonding of the two glass substrates 102 and 110 .
  • the cover plate 102 could go through a mild ultrasonic cleaning environment to remove any debris that has accumulated to this point.
  • the typical solutions used here can be considerably milder than the ones used for cleaning display glass which has no additional deposition. During cleaning, the temperature can be kept lower to avoid degradation of deposited frit 108 .
  • the pre-sintered cover plate 102 can be placed in a vacuum oven at a temperature of 100° C. for 6 or more hours. After removal from the oven the pre-sintered cover plate 102 can be placed in a clean room box to deter dust and debris from accumulating on it before performing the sealing process.
  • the sealing process includes placing the cover plate 102 with a frit 108 on top of another glass plate 110 with OLEDs/electrodes 104 and 106 located on top in such a manner that the frit 108 and OLEDs/electrodes 104 and 106 are sandwiched between the two glass plates 102 and 110 .
  • Mild pressure can be applied to the glass plates 102 and 110 to keep them in contact during the sealing process.
  • the laser 114 focuses its beam 118 on the frit 108 through the cover plate 102 .
  • the laser beam 118 can then be defocused to approximately 3.5 mm spot size to make the temperature gradient more gradual.
  • the frit 108 needs a warm up and anneal phase before melting.
  • the pre-sintered cover plate should be stored in an inert atmosphere to prevent re-adsorption of O 2 and H 2 O before melting.
  • the velocity of travel of the laser 114 to the frit pattern can range between 0.5 mm/s and 15 mm/s depending on the set parameters. Faster travel velocities would generally require more current to the diode laser 114 . For example, one could seal at velocities in the range of 0.5 and 2 mm/s with laser power in the range of 9 and 12 Watts.
  • the power necessary varies depending on the absorption coefficient and thickness of the frit 108 . The necessary power is also affected if a reflective or absorbent layer is placed underneath the substrate plate 110 such as certain lead materials 502 (e.g., see FIG. 5 ).
  • the frit 108 can vary depending on the homogeneity of the frit along with the filler particle size. And, if the frit 108 does have filler particles that absorb the near IR wavelengths, then the frit 108 is somewhat transparent. This can adversely affect the way the frit absorbs and consequently melts to the display substrates 102 and 110 .
  • FIG. 11 illustrates the concept of how the plates 102 and 110 are placed in reference to the laser 114 .
  • Specifications of an exemplary lens system are included but are not a requirement for delivery of energy from the laser 114 .
  • the laser beam 118 can be defocused to reduce the temperature gradient as the frit 108 is traversed by the laser 114 . It should be noted that if the gradient is too steep (focus is too tight) that the OLED display 100 may exhibit violent cracking resulting in immediate failure.
  • the first approach is one where the plates 102 and 110 are placed on a steel block 1102 with a magnet 1104 on top of the plates 102 and 110 .
  • the other approach is to place the display plates 102 and 110 between two clear silica discs 1106 a and 1106 b with low scratch/dig and extremely high flatness. These silica discs 1106 a and 1106 b can then be clamped in a variety of methods and are transparent to the near infrared irradiation. If the discs 1106 a and 1106 b are flat and extremely stiff, then relatively thin display sheets 102 and 110 can adhere to their shape maintaining flatness and direct contact with each other.
  • the motion of a stage 108 which holds the plates 102 and 110 can be controlled by a computer (not shown) which runs programs written to trace the frit 108 that has been dispensed onto the display glass 102 .
  • Most frit 108 patterns are rectangular in shape and have rounded corners. The radius of curvatures for the corners range between 0.5 mm and 4 mm and are necessary to reduce overheating in this area. Overheating can occur as the travel motion in the x direction is reduced while the y direction is increased and vice versa. If the defocus sealing beam 118 is approximately 3.5 mm, then there will likely be additional heating for a completely square corner. To negate this effect of overheating, velocity, power, or radius of the laser beam 118 can be adjusted. For example, this effect can be overcome solely by keeping a radius of curvature larger than the overlap of the defocus laser beam 118 . This is shown in FIG. 12 .
  • any layer like the electrodes 106 that resides under it, that are reflective, will create an additional heat source because the laser beam 118 reflects back into the frit 108 . It is not a double dose but substantially more than what is intended. Also, some of these electrodes 106 can be absorptive in the near IR which means they can have some substantial heating when irradiated by the laser source 114 . When the electrodes 106 exhibit both properties, it creates a very difficult effect to overcome with a sealing regime. This effect is labeled as a power density per unit time. Because electrodes 106 are scattered and placed indeterminately of where the frit 108 is to be placed, it is necessary to manage the power density issue. As described above with the aforementioned sealing techniques of the present invention, there are several ways to manage this issue:
  • the slowest speed can be used where there was no electrode(s) 106 are located in the seal path 116 or adjacent to the seal path 116 .
  • the fastest speed can be used where electrode(s) 106 located in the seal path 116 or adjacent to the seal path 116 .
  • An intermediate speed can be used speed when the frit 108 pattern covered is between electrodes 106 or is over a material that is slightly reflective or adjacent to these materials.
  • FIG. 13 illustrates several different sealing paths 116 that can be traversed by the laser beam 118 to create the OLED display 100 .

Abstract

A hermetically sealed glass package and method for manufacturing the hermetically sealed glass package are described herein. In one embodiment, the hermetically sealed glass package is suitable to protect thin film devices which are sensitive to the ambient environment. Some examples of such glass packages are organic emitting light diode (OLED) displays, sensors, and other optical devices. The present invention is demonstrated using an OLED display as an example.

Description

    CROSS REFERENCE TO RELATED APPLICATION
  • This application is a divisional application of U.S. patent application Ser. No. 10/970,319, filed Oct. 20, 2004, now pending.
  • BACKGROUND OF THE INVENTION
  • 1. Field of the Invention
  • The present invention relates to hermetically sealed glass packages that are suitable to protect thin film devices which are sensitive to the ambient environment. Some examples of such glass packages are organic emitting light diode (OLED) displays, sensors, and other optical devices. The present invention is demonstrated using an OLED display as an example.
  • 2. Description of Related Art
  • OLEDs have been the subject of a considerable amount of research in recent years because of their use and potential use in a wide variety of electroluminescent devices. For instance, a single OLED can be used in a discrete light emitting device or an array of OLEDs can be used in lighting applications or flat-panel display applications (e.g., OLED displays). OLED displays are known to be very bright and to have a good color contrast and wide viewing angle. However, OLED displays and in particular the electrodes and organic layers located therein are susceptible to degradation resulting from interaction with oxygen and moisture leaking into the OLED display from the ambient environment. It is well known that the life of the OLED display can be significantly increased if the electrodes and organic layers located therein are hermetically sealed from the ambient environment. Unfortunately, in the past it has been very difficult to develop a sealing process to hermetically seal the OLED display. Some of the factors that made it difficult to properly seal the OLED display are briefly mentioned below:
      • The hermetic seal should provide a barrier for oxygen (10−3 cc/m2/day) and water (10−6 g/m2/day).
      • The size of the hermetic seal should be minimal (e.g., <2 mm) so it does not have an adverse effect on size of the OLED display.
      • The temperature generated during the sealing process should not damage the materials (e.g., electrodes and organic layers) within the OLED display. For instance, the first pixels of OLEDs which are located about 1-2 mm from the seal in the OLED display should not be heated to more than 100° C. during the sealing process.
      • The gases released during sealing process should not contaminate the materials within the OLED display.
      • The hermetic seal should enable electrical connections (e.g., thin-film chromium electrodes) to enter the OLED display.
  • Today one way to seal the OLED display is to form a hermetic seal by melting a low temperature frit doped with a material that is highly absorbent at a specific wavelength of light. In particular, a high power laser is used to heat up and soften the frit which forms a hermetic seal between a cover glass with the frit located thereon and a substrate glass with OLEDs located thereon. The frit is typically ˜1 mm wide and ˜6-100 um thick. If the absorption and thickness of the frit is uniform then sealing can be done at constant laser energy and speed so as to provide a uniform temperature rise at the frit location. However, when the frit is relatively thin then 100% of the laser energy is not absorbed by the frit and some of the laser energy can be absorbed or reflected by metal electrodes that are attached to the OLEDs on the substrate glass. Since it is desirable to use thin frits and the metal electrodes have different reflectivity and absorption properties as well as different thermal conductivities from the bare substrate glass, this situation can create an uneven temperature distribution within the frit during the sealing process which can lead to a non-hermetic connection between the cover glass and the substrate glass. This sealing problem is solved by using one or more of the sealing techniques of the present invention.
  • BRIEF DESCRIPTION OF THE INVENTION
  • The present invention includes a hermetically sealed OLED display and method for manufacturing the hermetically sealed OLED display. Basically, the hermetically sealed OLED display is manufactured by depositing a frit (e.g., doped frit) onto a cover plate and by depositing OLEDs onto a substrate plate. A laser (e.g., sealing apparatus) is then used to heat the frit in a manner where a substantially constant temperature is maintained within the frit along a sealing line while the frit melts and forms a hermetic seal which connects the cover plate to the substrate plate and also protects the OLEDs located between the cover plate and the substrate plate. There are several sealing techniques described herein that enable the laser to heat the frit in a manner where a substantially constant temperature is maintained within the frit along the sealing line which is difficult to accomplish because the sealing line has regions occupied by electrodes that are connected to the OLEDS and regions that are free of the electrodes. For instance in one sealing technique, the speed and/or power of a laser beam emitted from the laser is dynamically changed as needed to ensure that the frit is uniformly heated along the sealing line which has electrode occupied regions and electrode free regions.
  • BRIEF DESCRIPTION OF THE DRAWINGS
  • A more complete understanding of the present invention may be had by reference to the following detailed description when taken in conjunction with the accompanying drawings wherein:
  • FIGS. 1A and 1B are respectively a top view and a cross-sectional side view illustrating the basic components of a hermetically sealed OLED display that can be made by using one or more of the sealing techniques of the present invention;
  • FIG. 2 is a flowchart illustrating the steps of a preferred method for manufacturing the hermetically sealed OLED display shown in FIGS. 1A and 1B;
  • FIG. 3 is a cross-sectional side view of an OLED display being hermetically sealed by a first sealing technique in accordance with the present invention;
  • FIGS. 4A-4C are three diagrams that are used to help describe a second sealing technique that can be used to hermetically seal an OLED display in accordance with the present invention;
  • FIG. 5 is a cross-sectional side view of an OLED display being hermetically sealed by a third sealing technique in accordance with the present invention;
  • FIG. 6 is a cross-sectional side view of an OLED display being hermetically sealed by a fourth sealing technique in accordance with the present invention;
  • FIG. 7 is a cross-sectional side view of an OLED display being hermetically sealed by a fifth sealing technique in accordance with the present invention;
  • FIG. 8 is a cross-sectional side view of an OLED display being hermetically sealed by a sixth sealing technique in accordance with the present invention;
  • FIGS. 9A-9C are three diagrams that are used to help describe a seventh sealing technique that can be used to hermetically seal an OLED display in accordance with the present invention;
  • FIG. 10 is a cross-sectional side view of an OLED display which is used to show that each of of the aforementioned sealing techniques may have to take into account the starting temperature and subsequent temperatures of the frit while manufacturing the hermitically sealed OLED display in accordance with the present invention; and
  • FIG. 11-13 are several diagrams used to help describe some exemplary ways one could manufacture an OLED display using one or more of the aforementioned sealing techniques in accordance with the present invention.
  • DETAILED DESCRIPTION OF THE DRAWINGS
  • Referring to FIGS. 1-10, there are disclosed in accordance with the present invention a hermetically sealed OLED display 100 and method 200 for manufacturing the OLED display 100. Although the sealing techniques of the present invention are described below with respect to manufacturing the hermetically sealed OLED display 100, it should be understood that the same or similar sealing techniques can be used to seal two glass plates to one another that can be used in a wide variety of applications and device. Accordingly, the sealing techniques of the present invention should not be construed in a limited manner.
  • Referring to FIGS. 1A and 1B, there are respectively show a top view and a cross-sectional side view that illustrate the basic components of the hermetically sealed OLED display 100. The OLED display 100 includes a multilayer sandwich of a cover plate 102 (e.g., glass plate 102), one or more OLEDs 104/electrodes 106, a doped frit 108 and a substrate plate 110 (e.g., glass plate 110). The OLED display 100 has a hermetic seal 112 which was formed from the frit 108 that protects the OLEDs 104 located between the cover plate 102 and the substrate plate 110. The hermetic seal 112 is typically located just inside the outer edges of the OLED display 100. And, the OLEDs 104 are located within a perimeter of the hermetic seal 112. As can be seen, the electrodes 106 which are connected the OLEDs 104 pass/extend through the hermetic seal 112 so they can connect to an external device (not shown). Again, it is the presence of the electrodes 106 which are often non-transparent metal electrodes 106 that makes it difficult to form a hermetic connection 112 between the cover plate 102 and the substrate plate 110. This is because the metal electrodes 106 have different patterns and different optical properties such that some of the laser energy from a sealing apparatus 114 (e.g., laser 114) is absorbed and/or reflected by the metal electrodes 106 which creates an uneven temperature distribution in the frit 108 during the sealing process which can lead to the formation of a non-hermetic connection between the cover plate 102 and the substrate plate 110. How this problem is solved by using one or more of the sealing techniques of the present invention so it is possible to make the OLED display 100 is described below with respect to FIGS. 2-10.
  • Referring to FIG. 2, there is a flowchart illustrating the steps of the preferred method 200 for manufacturing the hermetically sealed OLED display 100. Beginning at steps 202 and 204, the cover plate 102 and the substrate plate 110 are provided. In the preferred embodiment, the cover and substrate plates 102 and 110 are transparent glass plates like the ones manufactured and sold by Corning Incorporated under the brand names of Code 1737 glass or Eagle 2000™ glass. Alternatively, the cover and substrate plates 102 and 110 can be any transparent glass plates like for example the ones manufactured and sold by Asahi Glass Co. (e.g., OA10 glass and OA21 glass), Nippon Electric Glass Co., NHTechno and Samsung Corning Precision Glass Co.
  • At step 206, the frit 108 is deposited near the edges of the cover plate 102. For example, the frit 108 can be placed approximately 1 mm away from the free edges of the cover plate 102. In the preferred embodiment, the frit 108 is a low temperature glass frit that contains one or more absorbing ions chosen from the group including iron, copper, vanadium, and neodymium (for example). The frit 108 may also be doped with a filler (e.g., inversion filler, additive filler) which lowers the coefficient of thermal expansion of the frit 108 so that it matches or substantially matches the coefficient of thermal expansions of the two glass plates 102 and 110. For a more detailed description about the compositions of some exemplary frits 108 that can be used in this application reference is made to U.S. patent application Ser. No. 10/823,331 entitled “Glass Package that is Hermetically Sealed with a Frit and Method of Fabrication”. The contents of this document are incorporated by reference herein.
  • In addition, the frit 108 can be pre-sintered to the cover plate 102. To accomplish this, the frit 108 which was deposited onto the cover plate 102 is heated so that it becomes attached to the cover plate 102. A more detailed discussion about how one can pre-sinter the frit 108 to the cover plate 102 is provided below in the text just prior to the description associated with FIG. 11.
  • At step 208, the OLEDs 104 and other circuitry including the electrodes 106 are deposited onto the substrate plate 110. The typical OLED 104 includes one or more organic layers (not shown) and anode/cathode electrodes 106. However, it should be readily appreciated by those skilled in the art that any known OLED 104 or future OLED 104 can be used in the OLED display 100. In addition, it should be appreciated that another type of thin film device can be deposited in this step besides the OLEDs 104 if an OLED display 100 is not being made but instead another glass package like one used in an optical sensor is going to be made using the sealing technique(s) of the present invention.
  • At step 210, the sealing apparatus 114 (e.g., laser 114) heats the frit 108 using one or more of the sealing techniques of the present invention such that a substantially constant temperature is maintained in the frit 108 along the sealing line 116 while the frit 108 melts and forms the hermetic seal 112 which connects and bonds the cover plate 102 to the substrate plate 110 (see FIG. 1B). The hermetic seal 112 also protects the OLEDs 104 by preventing oxygen and moisture in the ambient environment from entering into the OLED display 100.
  • The sealing techniques of the present invention enable the sealing apparatus 114 to maintain a constant temperature on the frit line 116 during the sealing process even though there are electrodes 106 that have different patterns and properties that pass under the frit 108 which melts and forms the hermetic seal 112. However, to accomplish this, the sealing techniques need to take into account several factors which can affect the rate of the heat diffusion and in turn the temperature of the frit 108 at the sealing point 116. First, the typical frit 108 transmission can vary from 2% to 30% depending on its composition and thickness. Secondly, the electrodes 106 depending on their composition can absorb or reflect the light, transmitted through the frit 108. Thirdly, the thermal conductivity of the substrate plate 110 with and without deposited electrodes 106 often varies which affects the rate of the heat diffusion at the sealing point 116. In general, the temperature rise (T frit) in the frit 108 at any point along the sealing line 116 can be estimated as follows:
    Tfrit˜P/a2sqrt(vD)(ε(frit)+(1−ε(frit)e(electrode)+(1−εfrit)R(electrode)ε(frit))
    where Tfrit is temperature rise in the frit 108, P is laser power of the laser 114, v is laser translation speed, a is the laser spot size, D is heat diffusivity in the substrate plate 110, ε (frit) is percentage of the laser power absorbed by frit 108 on the first path, R(electrode) is reflectivity of the electrode 108 and e(electrode) is the percentage of laser power absorbed by electrode 108.
  • As can be seen, this equation represents an amount of energy absorbed by frit 108 on the first path, the amount of the laser energy transmitted through frit 108 and absorbed by the electrode 106, and the amount of the laser energy transmitted through the frit 108, reflected from the electrode 106 and absorbed by frit 108 on the second path (e.g., see FIG. 3). Even though the equation is valid for semi-infinite volume heating it may not be exact to represent T(frit) dependence on the v (velocity) and K (thermal conductivity) but this equation does show the qualitative dependence of T(frit) on the values of these parameters. The equation also makes it clear that during the sealing process the temperature rise in the frit 108 can be made equal for the electrode-free regions and the electrode occupied regions along the sealing line 116. The different sealing techniques that can ensure the sealing apparatus 114 uniformly heats the frit 108 along the sealing line 116 which has electrode-free regions and electrode occupied regions are described in detail below with respect to FIGS. 3-10.
  • Referring to FIG. 3, there is a cross-sectional side view of the OLED display 100 being hermetically sealed by one of the sealing techniques in accordance with the present invention. In this embodiment, the sealing technique is one where the laser 114 needs to dynamically change the power of the laser beam 108 at different points on the sealing line 116 to maintain a substantially constant temperature in the frit 108 along the sealing line 116 that has electrode occupied regions 218 a and electrode free regions 218 b. In particular, the laser 114 maintains a constant temperature in the frit 108 on the sealing line 116 by lowering the power of the laser beam 118 when the electrode occupied regions 218 a are present on the sealing line 116 and by increasing the power of the laser beam 118 when the electrode free regions 218 b are present on the sealing line 116.
  • Referring to FIG. 4A, there is a diagram which is used to help describe a second sealing technique that can be used to hermetically seal an OLED display in accordance with the present invention. In this embodiment, the sealing technique used is one where the laser 114 dynamically changes the speed (v) of the laser beam 108 to maintain a substantially constant temperature in the frit 108 along the sealing line 116 that has electrode occupied regions 218 a and electrode free regions 218 b. For instance, the laser 114 can maintain a constant temperature in the frit 108 on the sealing line 116 by moving the laser beam 118 faster when it is over the electrode occupied regions 218 a and by moving laser beam 118 slower when it is over electrode free regions 218 b. In fact, the laser 114 may move the laser beam 118 at a third intermediate speed in the areas where there are electrodes 106 in close proximity to the sealing line 116. This process which is also shown in FIG. 4B can be implemented regardless of whether the electrodes 106 are highly absorptive and/or highly reflective. Alternatively, instead of moving the laser 114 over a stationary OLED display 100, a stage/support (not shown) which holds the OLED display 100 could be moved at different speeds under a stationary laser 114 to maintain a constant temperature within the frit 108. FIG. 4C is a graph illustrating some experimental results that were obtained when two bare glass plates with no electrodes were sealed together using this sealing technique.
  • Referring to FIG. 5, there is a cross-sectional side view of the OLED display 100 being hermetically sealed by yet another one of the sealing techniques in accordance with the present invention. In this embodiment, the sealing technique is one where a high reflector 502 (e.g., mirror 502) is placed under the substrate plate 110 while the laser 114 emits the laser beam 118 to melt the frit 108 and form the hermetic seal 112. The high reflector 502 helps to balance the power absorbed by the frit 108 regardless of whether the frit 108 is located over electrode occupied regions 218 a or electrode free regions 218 b. For example, the temperature rise in the frit 108 at different points along the sealing line 116 can be represented as follows:
  • At the electrode occupied regions 218 a:
    T(frit)1=P/a 2sqrt(vD)(ε(frit)+(1−ε(frit)e(electrode)+(1εfrit)R(electrode)ε(frit))
    And, at the electrode free regions 218 b
    T(frit)2=P/a2sqrt(vD)(ε(frit)+(1−ε(frit)*R(reflector)*ε(frit))
    As can be seen, it is possible to decrease the difference T(frit)1−T(frit)2 by using the high reflector 502. The difference would depend on the optical parameters and properties of the electrodes 106. It should be appreciated that in this sealing technique, the power and/or speed of the laser beam 118 can be maintained at a constant or dynamically changed.
  • Referring to FIG. 6, there is a cross-sectional side view of the OLED display 100 being hermetically sealed by yet another one of the sealing techniques in accordance with the present invention. In this embodiment, the sealing technique is one where a partially reflective mask 602 is placed on top of the cover plate 102 while the laser 114 emits the laser beam 118 to melt and form the hermetic seal 112. The partially reflective mask 602 has different patterns 604 a, 604 b . . . 604 d that represent different reflectivities of the mask 602 to compensate for the different properties of electrodes 106. In this way, the partially reflective mask 602 helps to balance the power absorbed by the frit 108 regardless of whether the frit 108 is located over electrode occupied regions 218 a or electrode free regions 218 b.
  • Referring to FIG. 7, there is a cross-sectional side view of the OLED display 100 being hermetically sealed by yet another one of the sealing techniques in accordance with the present invention. In this embodiment, the sealing technique is one where the laser 114 seals at least a part of the frit line 116 in a first pass at the lowest power corresponding to the right sealing temperature along the line 116 and then finishes the sealing of the line 116 in a second pass at a higher power only at places which failed to reach the correct temperature during the first pass. A feedback mechanism similar to or like the one described below may be used if needed to determine which sections of the frit 108 did not reach the correct temperature during the first pass.
  • Referring to FIG. 8, there is a cross-sectional side view of the OLED display 100 being hermetically sealed by yet another one of the sealing techniques in accordance with the present invention. In this embodiment, the sealing technique is one that uses a feedback mechanism 802 to help ensure there is uniform heating within the frit 108 along the sealing line 116 during the formation of the hermetic seal 112. The feedback mechanism 802 can be used to monitor the hot spot intensity of the sealing line 116 at a certain fixed wavelength. The hot spot originates from black body emission due to the temperature rise along the sealing line 116 because of the heating by the laser 114. The emission spectrum is very broad and almost any of the wavelengths from 500-2000 nm could be used for this purpose. In one embodiment, the feedback mechanism 100 monitors the on-line emission intensity, converts it to a temperature and optimizes one or more sealing parameters to ensure the temperature is uniform along the sealing line 116 regardless of whether the frit 108 is over electrode occupied regions 218 a or over electrode free regions 218 b. For instance, the feedback mechanism 802 can control the power of the laser 114 to make the temperature uniform along the sealing line 116 regardless of whether the frit 108 is over the electrode occupied regions 218 a or electrode free regions 218 b. There are many different ways one can use the feedback mechanism 802 some of which are described below:
      • The feedback mechanism 100 can monitor the temperature at different locations on the sealing line 116 while the laser 114 seals an unknown sample OLED display 100. The feedback mechanism 100 modifies the laser speed or power at certain locations along the sealing line 116 in order to keep the temperature constant within the frit 108 while sealing the sample OLED display 100. The laser 114 can then apply these conditions to seal similar OLED displays 100.
      • The feedback mechanism 100 can “actively” monitor the temperature at different locations on the sealing line 116 while the laser 114 seals the OLED display 100. The feedback mechanism 100 also modifies the laser speed or power at certain locations along the sealing line 116 to keep the temperature constant within the frit 108 while sealing the OLED display 100.
  • Referring to FIGS. 9A-9C, there are different views illustrating how the laser 114 can be used to hermetically seal the OLED display 100 using yet another sealing technique in accordance with the present invention. In this embodiment, the sealing technique is one where the beam profile of the laser beam 118 is modified by a circular aperture 902 located at the end of the laser 114 (see FIG. 9A). The circular aperture 902 is sized to modify the laser beam 118 by blocking/defocusing a portion of that beam 118 such that a modified laser beam 118 a that heats the frit 108 along the sealing line 116 of the OLED display 100 (see FIG. 9B). As can be seen in the graph shown in FIG. 9B, the circular aperture 902 modifies the gaussian shape of the laser beam 118 by clipping its tails. The defocused laser beam 118 a also has a reduced 1/e power level that can provide the needed coverage and needed power at the sealing line 116 while at the same time not to expose any of the devices (e.g., OLEDs 104) outside of the frit line 116 to extra heat generation which can permanently damage of the OLDE display 100. In an alternative embodiment, the circular aperture 902 can have a blocking circle (not shown) located in the middle thereof to further change the shape of the laser beam 118 (see FIG. 9C). As can be seen in the graph shown in FIG. 9C, the modified laser beam 118 c has a shape that helps make the temperature uniform over the frit 108 which typically has more heat diffusion at its edges. An elliptical beam 118 causes uniform heating across the frit 108 and also enables gradual heating and cooling along the frit 108, which helps to reduce residual stress.
  • It should be appreciated that more than one of the aforementioned sealing techniques can be used at the same time to form the hermetic seal 112 in the OLED display 100. For instance, the OLED display 100 can be sealed by using the sealing techniques described above with respect to changing the power of the laser 114 (see FIG. 3) and with using the circular aperture 902 to modify the shape of the laser beam 118 (see FIGS. 9A-9C).
  • Moreover, it should be appreciated that in the sealing process the starting point for sealing the frit 108 typically has a lower temperature than the remaining parts of the frit 108 that are located further down on the sealing line 116. This is due to the fact that the frit 108 at the starting point is at room temperature while the rest of the frit 108 has an elevated temperature during the formation of the hermetic seal 112 (see FIG. 10). This means that sealing parameters of the laser 114 (for example) at the beginning of the frit 108 may need to be adjusted to take into account the differences in the surrounding temperatures.
  • The technique that is described next can be used to increase the sealing speed of the laser 114 which could help improve the efficiency of any of the aforementioned sealing techniques. If a round laser spot is used then the maximum sealing speed would be in the range of ˜10-11 mm/s. However, if one used an elliptical or slit like shaped laser beam 118 to heat the frit 108, then this would likely result in increasing the speed one could use to seal the OLED display 100 provided that the power density of the elliptical shaped laser beam 118 is the same as the round shaped laser beam 118. In other words, the power of the laser 114 needs to be increased proportionally as the spot area of the elliptical shaped laser beam 118 increases relative to a round shaped laser beam 118. All of this would enable one to speed-up the sealing process by the ratio of the length to the width of the spot size of the elliptical shaped laser beam 118. However, special care may be needed to take care of the corners in the OLED display 100 where the speed of the elliptical shaped laser beam 118 needs to go back to a slow regime (the same as for round beam). Alternatively, one may need to rotate the elliptical shaped laser beam 118 while the laser 114 is located over the corners of the OLED display 100 to properly seal the OLED display 100.
  • Described below are some different ways one could hermetically seal a LCD-type glass (e.g. codes 1737 and Eagle2000) to an organic light emitting device (OLED) substrate using the aforementioned sealing techniques. For instance, the frit 108 can be applied to the LCD glass plate 102 by screen-printing or by a programmable auger robot which provides a well-shaped pattern. Then, the LCD glass sample 102 with the frit pattern located thereon can be placed in a furnace which “fires” the frit 108 at a temperature that depends on the composition of the frit 108. Again, the frit 108 can contain one or more of the transition elements (vanadium, iron, nickel, etc.) that have a substantial absorption cross-section at 810 nm (for example) which matches the operating wavelength of an 810 nm laser 114 (for example). During this heating, the frit 108 is pre-sintered and the organic binder mostly burns out. This step can be important because, otherwise, the organics from the frit 108 could evaporate and then precipitate inside the OLED display 100 during laser sealing.
  • After the frit 108 is pre-sintered, it can be ground so that the height variation does not exceed 2-4 μm with a target height of 12-15 um. If the height variation is larger, the gap may not close when the frit 108 melts during laser sealing or the gap may introduce stresses which can crack the substrates 102 and 110. Frit 108 height is an important variable which allows the plates 102 and 110 to be sealed from the backside. What this means is that the laser beam 118 can first traverse the cover plate 102 that has the pre-sintered frit 108. If the frit 108 is too thin it does not leave enough material to absorb the laser irradiation resulting in failure. If the frit 108 is too thick it will be able to absorb enough energy at the first surface to melt, but will shield the necessary energy needed to melt at the secondary surface on plate 110. This usually results in poor or spotty bonding of the two glass substrates 102 and 110.
  • After the pre-sintered frit 108 is ground, the cover plate 102 could go through a mild ultrasonic cleaning environment to remove any debris that has accumulated to this point. The typical solutions used here can be considerably milder than the ones used for cleaning display glass which has no additional deposition. During cleaning, the temperature can be kept lower to avoid degradation of deposited frit 108.
  • After cleaning, a final processing step can be performed to remove residual moisture. The pre-sintered cover plate 102 can be placed in a vacuum oven at a temperature of 100° C. for 6 or more hours. After removal from the oven the pre-sintered cover plate 102 can be placed in a clean room box to deter dust and debris from accumulating on it before performing the sealing process.
  • The sealing process includes placing the cover plate 102 with a frit 108 on top of another glass plate 110 with OLEDs/ electrodes 104 and 106 located on top in such a manner that the frit 108 and OLEDs/ electrodes 104 and 106 are sandwiched between the two glass plates 102 and 110. Mild pressure can be applied to the glass plates 102 and 110 to keep them in contact during the sealing process. The laser 114 focuses its beam 118 on the frit 108 through the cover plate 102. The laser beam 118 can then be defocused to approximately 3.5 mm spot size to make the temperature gradient more gradual. The frit 108 needs a warm up and anneal phase before melting. In addition the pre-sintered cover plate should be stored in an inert atmosphere to prevent re-adsorption of O2 and H2O before melting. The velocity of travel of the laser 114 to the frit pattern can range between 0.5 mm/s and 15 mm/s depending on the set parameters. Faster travel velocities would generally require more current to the diode laser 114. For example, one could seal at velocities in the range of 0.5 and 2 mm/s with laser power in the range of 9 and 12 Watts. The power necessary varies depending on the absorption coefficient and thickness of the frit 108. The necessary power is also affected if a reflective or absorbent layer is placed underneath the substrate plate 110 such as certain lead materials 502 (e.g., see FIG. 5). It is also believed that a faster sealing regime can occur if power density per unit time is increased. As described above, the frit 108 can vary depending on the homogeneity of the frit along with the filler particle size. And, if the frit 108 does have filler particles that absorb the near IR wavelengths, then the frit 108 is somewhat transparent. This can adversely affect the way the frit absorbs and consequently melts to the display substrates 102 and 110.
  • FIG. 11 illustrates the concept of how the plates 102 and 110 are placed in reference to the laser 114. Specifications of an exemplary lens system are included but are not a requirement for delivery of energy from the laser 114. Again, the laser beam 118 can be defocused to reduce the temperature gradient as the frit 108 is traversed by the laser 114. It should be noted that if the gradient is too steep (focus is too tight) that the OLED display 100 may exhibit violent cracking resulting in immediate failure.
  • There are two exemplary strategies shown in FIG. 11 that can be used to hold the cover plate 102 in close contact with the glass plate 110. The first approach is one where the plates 102 and 110 are placed on a steel block 1102 with a magnet 1104 on top of the plates 102 and 110. The other approach is to place the display plates 102 and 110 between two clear silica discs 1106 a and 1106 b with low scratch/dig and extremely high flatness. These silica discs 1106 a and 1106 b can then be clamped in a variety of methods and are transparent to the near infrared irradiation. If the discs 1106 a and 1106 b are flat and extremely stiff, then relatively thin display sheets 102 and 110 can adhere to their shape maintaining flatness and direct contact with each other.
  • The motion of a stage 108 which holds the plates 102 and 110 can be controlled by a computer (not shown) which runs programs written to trace the frit 108 that has been dispensed onto the display glass 102. Most frit 108 patterns are rectangular in shape and have rounded corners. The radius of curvatures for the corners range between 0.5 mm and 4 mm and are necessary to reduce overheating in this area. Overheating can occur as the travel motion in the x direction is reduced while the y direction is increased and vice versa. If the defocus sealing beam 118 is approximately 3.5 mm, then there will likely be additional heating for a completely square corner. To negate this effect of overheating, velocity, power, or radius of the laser beam 118 can be adjusted. For example, this effect can be overcome solely by keeping a radius of curvature larger than the overlap of the defocus laser beam 118. This is shown in FIG. 12.
  • Because the frit 108 is to some degree transparent, any layer like the electrodes 106 that resides under it, that are reflective, will create an additional heat source because the laser beam 118 reflects back into the frit 108. It is not a double dose but substantially more than what is intended. Also, some of these electrodes 106 can be absorptive in the near IR which means they can have some substantial heating when irradiated by the laser source 114. When the electrodes 106 exhibit both properties, it creates a very difficult effect to overcome with a sealing regime. This effect is labeled as a power density per unit time. Because electrodes 106 are scattered and placed indeterminately of where the frit 108 is to be placed, it is necessary to manage the power density issue. As described above with the aforementioned sealing techniques of the present invention, there are several ways to manage this issue:
      • One approach is to change the current to the diode laser 114 by decreasing the current where the electrodes 106 are and restoring it where they are not (see FIG. 3).
      • Another approach is to change translation speed to accommodate over heating by increasing velocity where the electrodes 106 are present and reducing velocity where the electrodes 106 are not. It was first determined that there would be two individual velocities necessary to accomplish this, however, a third intermediate velocity may be needed for those areas where there are electrodes 106 in close proximity to the path of the frit 108. This is most likely due to the overlap of the defocusing of the laser beam 118 (see FIGS. 4A, 4B and 12).
      • Yet another approach is to place a highly reflective front surface mirror 502 or create a mirror surface on the steel block 1102 in an effort to make the entire lower lying body reflective. This may eliminate large fluctuations in the power density as the beam 118 traverses these different layers (see FIG. 5).
      • Still yet another approach is to place a mask over the display glass 102 which will reduce the excess light that comes from defocusing the laser beam 118. Also, a reflective mask would prevent undesirable laser light from reaching electrodes, drivers and electroluminescence (EL) materials.
  • The idea of managing the power density of the laser 114 during the sealing process first arose when attempts were made to seal glass plates 102 and 110 which contained molybdenum in their major bus lines and electrodes. Molybdenum has characteristics of being both absorptive and reflective for the near IR. For this reason it was apparent immediately upon sealing that the sample was going to either over heat and crack, or the frit would not melt and seal hermetically at all, unless the power density was managed. As described above, one way to control power density during the sealing process is to vary the speed of translation of the laser beam 118. In some experiments, three speeds were used to complete the loop around the plates 102 and 110. The slowest speed can be used where there was no electrode(s) 106 are located in the seal path 116 or adjacent to the seal path 116. The fastest speed can be used where electrode(s) 106 located in the seal path 116 or adjacent to the seal path 116. An intermediate speed can be used speed when the frit 108 pattern covered is between electrodes 106 or is over a material that is slightly reflective or adjacent to these materials. FIG. 13 illustrates several different sealing paths 116 that can be traversed by the laser beam 118 to create the OLED display 100.
  • Following are some of the different advantages and features of the present invention:
      • It should be appreciated that any of the aforementioned sealing techniques can be used to seal two glass sheets together without the aid of a frit. In this embodiment, one of the glass sheets may be doped with the same material used to dope the frit if needed.
      • The hermetic seal 112 has the following properties:
        • Good thermal expansion match to glass plates 102 and 110.
        • Low softening temperature.
        • Good chemical and water durability.
        • Good bonding to glass plates 102 and 110.
        • Good bonding to metal leads 106 (e.g., anode and cathode electrodes 106).
        • Dense with very low porosity.
      • It is important to understand that other types of glass plates 102 and 110 besides the Code 1737 glass plates and EAGLE 2000™ glass plates can be sealed to one another using the sealing techniques of the present invention. For example, glass plates 102 and 110 made by companies like Asahi Glass Co. (e.g., OA10 glass and OA21 glass), Nippon Electric Glass Co., NHTechno and Samsung Corning Precision Glass Co. can be sealed to one another using the sealing techniques of the present invention.
      • There are other considerations which should also be taken into account in the present invention like making sure there is a right match between the CTEs of the sealed glasses 102 and 110 and frit 108. And, making sure there is a right match between the viscosities (e.g., strain, softening points) of the sealed glasses 102 and 110 and frit 108.
      • It should be noted that the frit 108 that is pre-sintered to the cover plate 102 in accordance with step 206 can be sold as a unit to manufacturers of the OLED display 100 who can then install the OLEDs 104 and perform the final manufacturing step 208 at their facility using a localized heat source.
      • The OLED display 100 can be an active OLED display 100 or a passive OLED display 100.
      • Although the electrodes 106 are described above as being non-transparent, it should be understood that the electrodes 106 can be either reflective, absorptive, transmissive or any combination thereof. For example, ITO electrodes 106 can transmit more than they reflect or absorb.
      • It should be noted that another aspect of the present invention is to control the cooling rate of the OLED display 100 after completing the heating step 208. Abrupt and rapid cooling may cause large thermal strains leading to high elastic thermal stresses on the hermetic seal 112 and the sealed plates 102 and 110. It should also be noted that the suitable cooling rate depends on the size of the particular OLED display 100 to be sealed and the heat dissipation rate to the environment from the OLED display 100.
  • Although several embodiments of the present invention has been illustrated in the accompanying Drawings and described in the foregoing Detailed Description, it should be understood that the invention is not limited to the embodiments disclosed, but is capable of numerous rearrangements, modifications and substitutions without departing from the spirit of the invention as set forth and defined by the following claims.

Claims (17)

1. A method for manufacturing a glass package, said method comprising the steps of:
providing a cover plate;
providing a substrate plate;
depositing a frit onto said cover plate;
depositing at least one thin film device onto said substrate plate; and
directing a laser beam at said cover plate so that said laser beam passes through said cover plate and heats said frit such that said frit melts and forms a hermetic seal which connects said cover plate to said substrate plate and also protects said at least one thin film device located between said cover plate and said substrate plate.
2. The method of claim 1, wherein said frit has a height ≦50 μm.
3. The method of claim 1, wherein said frit is glass doped with a material that is absorbent at a specific wavelength of light.
4. The method of claim 1, wherein said frit is heated by the laser beam so that a substantially constant temperature is maintained in said frit along a sealing line that has regions free of electrodes and regions occupied by electrodes which are connected to said at least one thin film device.
5. The method of claim 4, wherein said electrodes are metal non-transparent electrodes that have different patterns and different optical properties.
6. The method of claim 4, wherein said electrodes are reflective, absorptive, transmissive or any combination thereof.
7. The method of claim 1, wherein said directing step further includes dynamically changing a power of the laser beam to maintain a substantially constant temperature in said frit along a sealing line that has regions free of electrodes and regions occupied by electrodes which are connected to said at least one thin film device.
8. The method of claim 1, wherein said directing step further includes dynamically changing a speed of the laser beam to maintain a substantially constant temperature in said frit along a sealing line that has regions free of electrodes and regions occupied by electrodes which are connected to said at least one thin film device.
9. The method of claim 1, further comprising the step of placing a reflector under said substrate before the laser beam is used to melt said frit so as to maintain a substantially constant temperature in said frit along a sealing line that has regions free of electrodes and regions occupied by electrodes which are connected to said at least one thin film device.
10. The method of claim 1, further comprising the step of placing a partially reflective mask on top of said cover plate before the laser beam is used to melt said frit so as to maintain a substantially constant temperature in said frit along a sealing line that has regions free of electrodes and regions occupied by electrodes which are connected to said at least one thin film device.
11. The method of claim 1, wherein said directing step further includes emitting the laser beam at a relatively low power to melt said frit along a sealing line during a first pass and then during a second pass emitting the laser beam at a relatively high power to melt said frit only at portions of said frit along the sealing line which did not reach a correct temperature during the first pass of said relatively low power laser beam.
12. The method of claim 1, wherein said directing step further includes using a feedback mechanism to control a laser source, which emits the laser beam, in a manner such that when said frit is melted a substantially constant temperature is maintained in said frit along a sealing line that has regions free of electrodes and regions occupied by electrodes which are connected to said at least one thin film device.
13. The method of claim 12, wherein said feedback mechanism measures a hot spot intensity of said frit along the sealing line that has regions free of electrodes and regions occupied by electrodes which are connected to said at least one thin film device.
14. The method of claim 1, wherein said directing step further includes using a focusing lens and a specially shaped aperture to defocus and shape the laser beam such that when said frit is melted a substantially constant temperature is maintained in said frit along a sealing line that has regions free of electrodes and regions occupied by electrodes which are connected to said at least one thin film device.
15. The method of claim 1, wherein said directing step further includes using an elliptical focusing lens to shape the laser beam such that when said frit is melted a substantially constant temperature is maintained in said frit along a sealing line that has regions free of electrodes and regions occupied by electrodes which are connected to said at least one thin film device.
16. The method of claim 1, further comprising the step of pre-sintering said frit to said cover plate.
17. The method of claim 1, wherein each thin film device is an organic emitting light diode.
US11/095,144 2004-10-20 2005-03-30 Method for backside sealing organic light emitting diode (OLED) displays Abandoned US20060084348A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US11/095,144 US20060084348A1 (en) 2004-10-20 2005-03-30 Method for backside sealing organic light emitting diode (OLED) displays

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/970,319 US7371143B2 (en) 2004-10-20 2004-10-20 Optimization of parameters for sealing organic emitting light diode (OLED) displays
US11/095,144 US20060084348A1 (en) 2004-10-20 2005-03-30 Method for backside sealing organic light emitting diode (OLED) displays

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
US10/970,319 Division US7371143B2 (en) 2004-10-20 2004-10-20 Optimization of parameters for sealing organic emitting light diode (OLED) displays

Publications (1)

Publication Number Publication Date
US20060084348A1 true US20060084348A1 (en) 2006-04-20

Family

ID=35636765

Family Applications (3)

Application Number Title Priority Date Filing Date
US10/970,319 Active 2026-04-04 US7371143B2 (en) 2004-10-20 2004-10-20 Optimization of parameters for sealing organic emitting light diode (OLED) displays
US11/095,144 Abandoned US20060084348A1 (en) 2004-10-20 2005-03-30 Method for backside sealing organic light emitting diode (OLED) displays
US12/080,003 Abandoned US20080182062A1 (en) 2004-10-20 2008-03-31 Optimization of parameters for sealing organic emitting light diode (OLED) displays

Family Applications Before (1)

Application Number Title Priority Date Filing Date
US10/970,319 Active 2026-04-04 US7371143B2 (en) 2004-10-20 2004-10-20 Optimization of parameters for sealing organic emitting light diode (OLED) displays

Family Applications After (1)

Application Number Title Priority Date Filing Date
US12/080,003 Abandoned US20080182062A1 (en) 2004-10-20 2008-03-31 Optimization of parameters for sealing organic emitting light diode (OLED) displays

Country Status (7)

Country Link
US (3) US7371143B2 (en)
EP (1) EP1831938B1 (en)
JP (1) JP4625085B2 (en)
KR (1) KR100942118B1 (en)
CN (1) CN101095247B (en)
TW (1) TWI339994B (en)
WO (1) WO2006045067A1 (en)

Cited By (59)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070114909A1 (en) * 2005-11-18 2007-05-24 Park Jin-Woo Method of manufacturing flat panel display device, flat panel display device, and panel of flat panel display device
US20070128965A1 (en) * 2005-12-06 2007-06-07 Burt Ronald L Method of sealing glass substrates
US20070170423A1 (en) * 2006-01-24 2007-07-26 Choi Dong S Organic light-emitting display and method of making the same
US20070170855A1 (en) * 2006-01-25 2007-07-26 Choi Dong-Soo Organic light emitting display device and method of fabricating the same
US20070170857A1 (en) * 2006-01-25 2007-07-26 Dong Soo Choi Organic light-emitting display device and method of manufacturing the same
US20070170859A1 (en) * 2006-01-25 2007-07-26 Dong Soo Choi Organic light emitting display and method of fabricating the same
US20070170856A1 (en) * 2006-01-26 2007-07-26 You Min Cha Method of making electronic device with frit seal and frit sealing apparatus
US20070170839A1 (en) * 2006-01-20 2007-07-26 Choi Dong S Organic light-emitting display device with frit seal and reinforcing structure
US20070173167A1 (en) * 2006-01-26 2007-07-26 Young Seo Choi Organic light-emitting display device and method of fabricating the same
US20070170324A1 (en) * 2006-01-25 2007-07-26 Jae Sun Lee Organic light emitting display and fabricating method of the same
US20070170845A1 (en) * 2006-01-26 2007-07-26 Dong Soo Choi Organic light emitting display device
US20070170605A1 (en) * 2006-01-24 2007-07-26 Jong Woo Lee Organic light emitting display and fabricating method of the same
US20070176549A1 (en) * 2006-01-27 2007-08-02 Jin Woo Park Organic light emitting display and method of fabricating the same
US20070177069A1 (en) * 2006-01-27 2007-08-02 Jong Woo Lee Organic light emitting display and fabricating method of the same
US20070197120A1 (en) * 2006-02-20 2007-08-23 Jong Woo Lee Substrate adhesion apparatus and method for sealing organic light emitting display using the same
US20090044496A1 (en) * 2007-08-16 2009-02-19 Botelho John W Method and apparatus for sealing a glass package
US20090058292A1 (en) * 2007-08-27 2009-03-05 Koo Won-Hoe Flat panel display and fabricating method thereof
US20090069164A1 (en) * 2005-12-06 2009-03-12 Corning Incorporated Glass Package That Is Hermetically Sealed With a Frit and Method of Fabrication
US20090086325A1 (en) * 2007-09-28 2009-04-02 Anping Liu Method and apparatus for frit sealing with a variable laser beam
US20090120915A1 (en) * 2007-11-13 2009-05-14 Canon Kabushiki Kaisha Method for making airtight container
US20090142984A1 (en) * 2007-11-30 2009-06-04 Stephan Lvovich Logunov Methods and apparatus for packaging electronic components
US20090203283A1 (en) * 2008-02-07 2009-08-13 Margaret Helen Gentile Method for sealing an electronic device
US20090221207A1 (en) * 2008-02-28 2009-09-03 Andrew Lawrence Russell Method of sealing a glass envelope
US20090218320A1 (en) * 2008-02-29 2009-09-03 Wenchao Wang Frit sealing using direct resistive heating
US20090230861A1 (en) * 2006-03-31 2009-09-17 Akinobu Miyazaki Plasma Display Panel
US20090261341A1 (en) * 2008-04-21 2009-10-22 Choi Jung-Mi Organic light emitting display and method of manufacturing the same
US20100129666A1 (en) * 2008-11-24 2010-05-27 Stephan Lvovich Logunov Laser assisted frit sealing of high cte glasses and the resulting sealed glass package
US20100126898A1 (en) * 2005-12-06 2010-05-27 Corning Corporation Hermetically Sealed Glass Package and Method of Manufacture
US7837530B2 (en) 2006-03-29 2010-11-23 Samsung Mobile Display Co., Ltd. Method of sealing an organic light emitting display by means of a glass frit seal assembly
US20100296291A1 (en) * 2009-05-20 2010-11-25 Samsung Mobile Display Co., Ltd. Light radiating device and method of fabricating organic light emitting diode display device using the same
US20100304513A1 (en) * 2009-05-28 2010-12-02 Kelvin Nguyen Method for forming an organic light emitting diode device
US7944143B2 (en) 2006-01-25 2011-05-17 Samsung Mobile Display Co., Ltd. Organic light-emitting display device with frit seal and reinforcing structure bonded to frame
US20110237150A1 (en) * 2010-03-29 2011-09-29 Canon Kabushiki Kaisha Manufacturing method of hermetic container
US20110233103A1 (en) * 2010-03-29 2011-09-29 Canon Kabushiki Kaisha Hermetic container and manufacturing method of the same
US20110232840A1 (en) * 2010-03-29 2011-09-29 Canon Kabushiki Kaisha Manufacturing method of hermetic container
US8038495B2 (en) 2006-01-20 2011-10-18 Samsung Mobile Display Co., Ltd. Organic light-emitting display device and manufacturing method of the same
US8120249B2 (en) 2006-01-23 2012-02-21 Samsung Mobile Display Co., Ltd. Organic light emitting display and method of fabricating the same
US20120211146A1 (en) * 2011-02-22 2012-08-23 Guardian Industries Corp. Materials and/or method of making vacuum insulating glass units including the same
US8299705B2 (en) 2006-01-26 2012-10-30 Samsung Display Co., Ltd. Organic light emitting display device and manufacturing method thereof
US8476550B2 (en) 2010-08-25 2013-07-02 Canon Kabushiki Kaisha Manufacturing method of hermetically sealed container
US8475618B2 (en) 2010-09-06 2013-07-02 Canon Kabushiki Kaisha Manufacturing method of hermetic container
US8601834B2 (en) 2010-09-27 2013-12-10 Canon Kabushiki Kaisha Manufacturing method of hermetically sealed container for holding therein atmosphere of reduced pressure
US20140210991A1 (en) * 2013-01-31 2014-07-31 Samsung Display Co., Ltd. Sealing method for flat panel display device
US20140216645A1 (en) * 2013-02-04 2014-08-07 Semiconductor Energy Laboratory Co., Ltd. Method for Forming Glass Layer and Method for Manufacturing Sealed Structure
US20140332827A1 (en) * 2013-05-09 2014-11-13 Au Optronics Corporation Display panel and sealing process thereof
US9073778B2 (en) 2009-11-12 2015-07-07 Hamamatsu Photonics K.K. Glass welding method
TWI504469B (en) * 2009-11-25 2015-10-21 Hamamatsu Photonics Kk Glass welding method and glass layer fixation method
US9181126B2 (en) 2008-05-26 2015-11-10 Hamamatsu Photonics K.K. Glass fusion method
US20150367598A1 (en) * 2010-12-23 2015-12-24 Medtronic, Inc. Devices formed with techniques for bonding substrates using an intermediate layer
US9227871B2 (en) 2009-11-25 2016-01-05 Hamamatsu Photonics K.K. Glass welding method and glass layer fixing method
US9236213B2 (en) 2009-11-25 2016-01-12 Hamamatsu Photonics K.K. Glass welding method and glass layer fixing method
US9281132B2 (en) 2008-07-28 2016-03-08 Corning Incorporated Method for sealing a liquid within a glass package and the resulting glass package
US9472776B2 (en) 2011-10-14 2016-10-18 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing sealed structure including welded glass frits
US9701582B2 (en) 2009-11-25 2017-07-11 Hamamatsu Photonics K.K. Glass welding method and glass layer fixing method
US9887059B2 (en) 2009-11-25 2018-02-06 Hamamatsu Photonics K.K. Glass welding method
US9922790B2 (en) 2009-11-25 2018-03-20 Hamamatsu Photonics K.K. Glass welding method
US20180143351A1 (en) * 2016-11-21 2018-05-24 Mega 1 Company Limited Anti-Glare Head-Up Display System
US10096741B2 (en) 2011-11-28 2018-10-09 Semiconductor Energy Laboratory Co., Ltd. Sealed body, light-emitting module, and method of manufacturing sealed body
US10322469B2 (en) 2008-06-11 2019-06-18 Hamamatsu Photonics K.K. Fusion bonding process for glass

Families Citing this family (99)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4825448B2 (en) * 2005-05-12 2011-11-30 傳 篠田 Manufacturing equipment for manufacturing display devices
KR100707602B1 (en) * 2005-10-20 2007-04-13 삼성에스디아이 주식회사 Organic emitting device and method for preparing the same
KR100685845B1 (en) * 2005-10-21 2007-02-22 삼성에스디아이 주식회사 Organic eletroluminescence display device and method for fabricating of the same
US7537504B2 (en) * 2005-12-06 2009-05-26 Corning Incorporated Method of encapsulating a display element with frit wall and laser beam
TWI327757B (en) * 2005-12-06 2010-07-21 Corning Inc System and method for frit sealing glass packages
US7999372B2 (en) * 2006-01-25 2011-08-16 Samsung Mobile Display Co., Ltd. Organic light emitting display device and method of fabricating the same
KR100671646B1 (en) 2006-01-25 2007-01-19 삼성에스디아이 주식회사 Organic light emitting display device and fabricating method of the same
KR100645705B1 (en) * 2006-01-27 2006-11-15 삼성에스디아이 주식회사 Organic light-emitting display device and method for fabricating the same
JP4977391B2 (en) * 2006-03-27 2012-07-18 日本電気株式会社 Laser cutting method, display device manufacturing method, and display device
KR100846975B1 (en) * 2006-11-09 2008-07-17 삼성에스디아이 주식회사 Sealing device and method of manufacturing display device using the same
KR100824531B1 (en) * 2006-11-10 2008-04-22 삼성에스디아이 주식회사 Organic light emitting display device and fabricating method of the same
KR20080051756A (en) * 2006-12-06 2008-06-11 삼성에스디아이 주식회사 Organic light emitting display apparatus and method of manufacturing thereof
KR100787463B1 (en) * 2007-01-05 2007-12-26 삼성에스디아이 주식회사 A glass frit, a composition for preparing seal material and a light emitting device
KR100838077B1 (en) * 2007-01-12 2008-06-16 삼성에스디아이 주식회사 Manufacturing method of flat panel display device
JP5080838B2 (en) * 2007-03-29 2012-11-21 富士フイルム株式会社 Electronic device and manufacturing method thereof
US8330339B2 (en) * 2007-06-28 2012-12-11 Samsung Display Co., Ltd. Light emitting display and method of manufacturing the same
US8258696B2 (en) * 2007-06-28 2012-09-04 Samsung Mobile Display Co., Ltd. Light emitting display and method of manufacturing the same
KR100879864B1 (en) * 2007-06-28 2009-01-22 삼성모바일디스플레이주식회사 Light emitting display device and method of manufacturing the same
KR100883072B1 (en) * 2007-07-12 2009-02-10 엘지전자 주식회사 Display device
JP2009070687A (en) * 2007-09-13 2009-04-02 Canon Inc Manufacturing method of airtight container
US8198807B2 (en) * 2008-02-28 2012-06-12 Corning Incorporated Hermetically-sealed packages for electronic components having reduced unused areas
KR100926622B1 (en) * 2008-03-17 2009-11-11 삼성모바일디스플레이주식회사 Apparatus and Method for hermetic sealing using frit
KR101519693B1 (en) * 2008-04-25 2015-05-12 하마마츠 포토닉스 가부시키가이샤 Process for fusing glass
JP5308717B2 (en) * 2008-05-26 2013-10-09 浜松ホトニクス株式会社 Glass welding method
US7992411B2 (en) 2008-05-30 2011-08-09 Corning Incorporated Method for sintering a frit to a glass plate
US8147632B2 (en) * 2008-05-30 2012-04-03 Corning Incorporated Controlled atmosphere when sintering a frit to a glass plate
DE102008027519A1 (en) * 2008-06-10 2009-12-17 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Flat luminous body and a method for contacting flat luminous body
JP5535654B2 (en) * 2008-06-11 2014-07-02 浜松ホトニクス株式会社 Glass welding method
US8448468B2 (en) 2008-06-11 2013-05-28 Corning Incorporated Mask and method for sealing a glass envelope
JP5535653B2 (en) * 2008-06-23 2014-07-02 浜松ホトニクス株式会社 Glass welding method
DE102008033394B4 (en) * 2008-07-16 2018-01-25 Osram Oled Gmbh Component with a first and a second substrate
US20100020382A1 (en) * 2008-07-22 2010-01-28 Qualcomm Mems Technologies, Inc. Spacer for mems device
EP2321694A4 (en) * 2008-07-28 2012-05-30 Corning Inc Method for sealing a liquid within a glass package and the resulting glass package
US20100118912A1 (en) * 2008-11-10 2010-05-13 Changyi Lai Quality control of the frit for oled sealing
DE102009036395A1 (en) * 2009-04-30 2010-11-04 Osram Opto Semiconductors Gmbh Component with a first and a second substrate and method for its production
JP5636423B2 (en) * 2009-05-27 2014-12-03 コーニング インコーポレイテッド Laser scoring of glass at high temperatures
CN102066280A (en) * 2009-07-23 2011-05-18 旭硝子株式会社 Method and apparatus for manufacturing glass member provided with sealing material layer and method for manufacturing electronic device
JP5370011B2 (en) * 2009-08-31 2013-12-18 旭硝子株式会社 Method for producing glass member with sealing material layer and method for producing electronic device
JP2011060700A (en) * 2009-09-14 2011-03-24 Canon Inc Manufacturing method of image display device, and jointing method of base material
JP2011060697A (en) 2009-09-14 2011-03-24 Canon Inc Manufacturing method of image display device
JP2011060698A (en) * 2009-09-14 2011-03-24 Canon Inc Jointing method of base material and manufacturing method of image display device
JP2011060699A (en) * 2009-09-14 2011-03-24 Canon Inc Manufacturing method of image display device and jointing method of base material
KR101084231B1 (en) * 2009-10-05 2011-11-16 삼성모바일디스플레이주식회사 Laser irradiation system and laser irradiation method
US8379392B2 (en) * 2009-10-23 2013-02-19 Qualcomm Mems Technologies, Inc. Light-based sealing and device packaging
KR101135538B1 (en) * 2009-11-16 2012-04-13 삼성모바일디스플레이주식회사 Display device and method for menufacturing display device
JP5535588B2 (en) 2009-11-25 2014-07-02 浜松ホトニクス株式会社 Glass welding method and glass layer fixing method
JP5535589B2 (en) * 2009-11-25 2014-07-02 浜松ホトニクス株式会社 Glass welding method and glass layer fixing method
WO2011067700A1 (en) 2009-12-02 2011-06-09 Koninklijke Philips Electronics N.V. Substrate connection by heat activated binder
KR101243920B1 (en) * 2010-01-07 2013-03-14 삼성디스플레이 주식회사 Laser beam irradiation apparatus for substrate sealing, substrate sealing method, and manufacturing method of organic light emitting display device using the same
KR101097328B1 (en) * 2010-01-07 2011-12-23 삼성모바일디스플레이주식회사 Laser beam irradiation apparatus for substrate sealing, substrate sealing method, and manufacturing method of organic light emitting display device using the same
KR101097327B1 (en) * 2010-01-07 2011-12-23 삼성모바일디스플레이주식회사 Laser beam irradiation apparatus for substrate sealing and manufacturing method of organic light emitting display device using the same
KR101097340B1 (en) 2010-03-08 2011-12-23 삼성모바일디스플레이주식회사 Display apparatus
JP5659511B2 (en) * 2010-03-11 2015-01-28 住友化学株式会社 Electrical equipment
CN101807667B (en) * 2010-03-18 2011-11-16 电子科技大学 Encapsulating device of organic photoelectronic device and encapsulating method thereof
TWI503044B (en) * 2010-04-13 2015-10-01 Au Optronics Corp Electro-luminescent device package and packaging process thereof
JP2012009318A (en) * 2010-06-25 2012-01-12 Canon Inc Airtight container and method of manufacturing image display device
KR101722026B1 (en) * 2010-10-22 2017-04-12 삼성디스플레이 주식회사 A flat display panel, a mother substrate for the flat display panel, and a method for manufacturing the flat display panel
KR20120044020A (en) 2010-10-27 2012-05-07 삼성모바일디스플레이주식회사 Organic light emitting display apparatus and method of manufacturing thereof
KR101188929B1 (en) * 2010-11-12 2012-10-08 삼성에스디아이 주식회사 Seal member for photoelectric conversion device, photoelectric conversion device comprising the same and method of preparing the same
KR101772661B1 (en) 2010-11-29 2017-09-13 삼성디스플레이 주식회사 Organic light emitting diode display
KR101693347B1 (en) * 2010-12-03 2017-01-06 삼성디스플레이 주식회사 Display apparatus and method of manufacturing display apparatus
JP5745262B2 (en) * 2010-12-08 2015-07-08 浜松ホトニクス株式会社 Glass welding apparatus and glass welding method
WO2012077718A1 (en) * 2010-12-08 2012-06-14 浜松ホトニクス株式会社 Glass welding device and glass welding method
KR101801352B1 (en) 2011-01-18 2017-11-27 삼성디스플레이 주식회사 flat panel display device and method of manufacturing thereof
KR101071166B1 (en) 2011-04-22 2011-10-10 주식회사 엘티에스 Method for sealing frit using laser
KR101859964B1 (en) * 2011-06-29 2018-05-24 삼성디스플레이 주식회사 Apparatus of sealing substrate and method of sealing substrate using the same
JP2013101923A (en) * 2011-10-21 2013-05-23 Semiconductor Energy Lab Co Ltd Method of heating dispersion composition and method of forming glass pattern
JP5882114B2 (en) * 2012-04-09 2016-03-09 浜松ホトニクス株式会社 Glass welding method
JP6116170B2 (en) * 2012-09-24 2017-04-19 株式会社半導体エネルギー研究所 Manufacturing method of sealing body
KR101993332B1 (en) 2012-10-04 2019-06-27 삼성디스플레이 주식회사 Flat panel display device
KR102160829B1 (en) * 2012-11-02 2020-09-28 가부시키가이샤 한도오따이 에네루기 켄큐쇼 Sealed body and method for manufacturing the same
KR101398020B1 (en) * 2012-11-30 2014-05-30 주식회사 엘티에스 Apparatus for sealing frit using laser
TW201431149A (en) * 2013-01-18 2014-08-01 Innolux Corp Display apparatus and the sealing method thereof
JP2014160788A (en) 2013-02-21 2014-09-04 Panasonic Corp Component mounting apparatus and component mounting method
JP5903668B2 (en) * 2013-02-21 2016-04-13 パナソニックIpマネジメント株式会社 Component mounting apparatus and component mounting method
TW201445724A (en) 2013-05-30 2014-12-01 Innolux Corp Display device packaging method and display device
CN104218186B (en) * 2013-05-30 2016-12-28 群创光电股份有限公司 The method for packing of display device and display device
TWI520324B (en) 2013-11-05 2016-02-01 群創光電股份有限公司 Display panel with varing conductive pattern zone
WO2015100414A1 (en) 2013-12-27 2015-07-02 Arizona Board Of Regents On Behalf Of Arizona State University Deformable origami batteries
CN104882557A (en) * 2014-02-27 2015-09-02 群创光电股份有限公司 Organic light-emitting diode apparatus
CN104157792A (en) * 2014-08-08 2014-11-19 上海和辉光电有限公司 OLED (organic light emitting diode) packaging structure and method
US10418664B2 (en) 2014-09-26 2019-09-17 Arizona Board Of Regents On Behalf Of Arizona State University Stretchable batteries
CN104362259B (en) * 2014-11-17 2017-02-22 京东方科技集团股份有限公司 LED display panel and packaging method thereof
CN104393199B (en) * 2014-11-17 2016-11-30 京东方科技集团股份有限公司 A kind of mask plate and use the display device method for packing of this mask plate
US9425437B2 (en) * 2014-11-18 2016-08-23 Samsung Display Co., Ltd. Method of manufacturing organic light-emitting diode (OLED) display
CN107431059B (en) 2015-01-02 2020-03-17 亚利桑那州立大学董事会 Archimedes spiral design for deformable electronics
CN104600222B (en) 2015-02-04 2016-10-19 京东方科技集团股份有限公司 Method for packing, display floater and display device
US10502991B2 (en) * 2015-02-05 2019-12-10 The Arizona Board Of Regents On Behalf Of Arizona State University Origami displays and methods for their manufacture
CN106158669B (en) * 2015-04-24 2018-11-09 上海微电子装备(集团)股份有限公司 A kind of device and control method of plesiochronous encapsulation
US10390698B2 (en) 2016-06-16 2019-08-27 Arizona Board Of Regents On Behalf Of Arizona State University Conductive and stretchable polymer composite
CN105977399B (en) * 2016-07-22 2018-03-27 京东方科技集团股份有限公司 The method for packing of display panel, display device and display panel
CN107665826B (en) * 2016-07-29 2019-11-26 上海微电子装备(集团)股份有限公司 Laser package method and laser package device
FR3065577B1 (en) 2017-04-25 2021-09-17 Commissariat Energie Atomique SEALING CELL AND METHOD FOR ENCAPSULATING A MICROELECTRONIC COMPONENT WITH SUCH A SEALING CELL
CN107417140B (en) * 2017-04-26 2020-01-14 洛阳兰迪玻璃机器股份有限公司 Induction heating welding method for vacuum glass
CN107565051B (en) * 2017-08-25 2019-08-02 上海天马有机发光显示技术有限公司 Display panel, display device and manufacturing method
GB201806411D0 (en) 2018-04-19 2018-06-06 Johnson Matthey Plc Kit, particle mixture, paste and methods
CN110867390A (en) * 2018-08-28 2020-03-06 三星显示有限公司 Method for manufacturing display device
CN112713254B (en) * 2020-12-28 2023-01-24 武汉天马微电子有限公司 Display panel, display device and preparation method
CN114230199B (en) * 2021-11-12 2023-12-26 中江立江电子有限公司 Large-diameter radio frequency insulator sintering mold and use method thereof

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4252414A (en) * 1978-01-11 1981-02-24 Hitachi, Ltd. Liquid crystal display element
US6037710A (en) * 1998-04-29 2000-03-14 Candescent Technologies, Inc. Microwave sealing of flat panel displays
US6195142B1 (en) * 1995-12-28 2001-02-27 Matsushita Electrical Industrial Company, Ltd. Organic electroluminescence element, its manufacturing method, and display device using organic electroluminescence element
US6406578B1 (en) * 1999-10-19 2002-06-18 Honeywell Inc. Seal and method of making same for gas laser
US6517403B1 (en) * 1997-10-01 2003-02-11 Anthony Cooper Visual display
US20030066311A1 (en) * 2001-10-09 2003-04-10 Chien-Hsing Li Encapsulation of a display element and method of forming the same
US20040207314A1 (en) * 2003-04-16 2004-10-21 Aitken Bruce G. Glass package that is hermetically sealed with a frit and method of fabrication

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR930002923B1 (en) * 1990-05-10 1993-04-15 삼성전관주식회사 Making method of lcd
JP2754461B2 (en) * 1994-07-08 1998-05-20 双葉電子工業株式会社 Container sealing method and sealing device
JPH10125463A (en) * 1995-12-28 1998-05-15 Matsushita Electric Ind Co Ltd Organic electroluminescent element, crystal lighting system, display device, and manufacture of organic electroluminescent element
JPH1074583A (en) * 1996-08-30 1998-03-17 Sanyo Electric Co Ltd Organic el display and manufacture of organic el display
US6129603A (en) * 1997-06-24 2000-10-10 Candescent Technologies Corporation Low temperature glass frit sealing for thin computer displays
US6021648A (en) * 1997-09-29 2000-02-08 U. S. Philips Corporation Method of manufacturing a flat glass panel for a picture display device
JP3379916B2 (en) * 1998-04-02 2003-02-24 松下電器産業株式会社 High melting point material melt bonding equipment
JP3363116B2 (en) * 1998-09-14 2003-01-08 松下電器産業株式会社 Method of manufacturing gas discharge panel and sealing device for gas discharge panel
US6848964B1 (en) * 1998-09-14 2005-02-01 Matsushita Electric Industrial Co., Ltd. Sealing method and apparatus for manufacturing high-performance gas discharge panel
KR100300421B1 (en) * 1999-02-02 2001-09-13 김순택 Method and apparatus of splitting glass
JP2001092376A (en) * 1999-09-20 2001-04-06 Denso Corp Indicating element and its production
US6478911B1 (en) * 2000-09-27 2002-11-12 Guardian Industries Corp. Vacuum IG window unit with edge seal formed via microwave curing, and corresponding method of making the same
US6608283B2 (en) * 2000-02-08 2003-08-19 Emagin Corporation Apparatus and method for solder-sealing an active matrix organic light emitting diode
WO2002046802A2 (en) 2000-12-04 2002-06-13 The University Of Vermont And State Agricultural College Stiction-based chuck for bulge tester and method of bulge testing
US6565400B1 (en) * 2001-06-26 2003-05-20 Candescent Technologies Corporation Frit protection in sealing process for flat panel displays
DE10219951A1 (en) * 2002-05-03 2003-11-13 Patent Treuhand Ges Fuer Elektrische Gluehlampen Mbh Process for encapsulating a component based on organic semiconductors
KR20040019502A (en) * 2002-08-28 2004-03-06 주식회사 엘리아테크 Organic electro-luminescence display panel using photoresist and fabricating method thereof
JP2004095412A (en) * 2002-08-30 2004-03-25 Hitachi Chem Co Ltd Sealing method and sealing material of organic el element
US20040206953A1 (en) 2003-04-16 2004-10-21 Robert Morena Hermetically sealed glass package and method of fabrication
JP2005209413A (en) * 2004-01-20 2005-08-04 Sanyo Electric Co Ltd Manufacturing method of display panel and display panel

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4252414A (en) * 1978-01-11 1981-02-24 Hitachi, Ltd. Liquid crystal display element
US6195142B1 (en) * 1995-12-28 2001-02-27 Matsushita Electrical Industrial Company, Ltd. Organic electroluminescence element, its manufacturing method, and display device using organic electroluminescence element
US6517403B1 (en) * 1997-10-01 2003-02-11 Anthony Cooper Visual display
US6037710A (en) * 1998-04-29 2000-03-14 Candescent Technologies, Inc. Microwave sealing of flat panel displays
US6406578B1 (en) * 1999-10-19 2002-06-18 Honeywell Inc. Seal and method of making same for gas laser
US20030066311A1 (en) * 2001-10-09 2003-04-10 Chien-Hsing Li Encapsulation of a display element and method of forming the same
US20040207314A1 (en) * 2003-04-16 2004-10-21 Aitken Bruce G. Glass package that is hermetically sealed with a frit and method of fabrication
US20050001545A1 (en) * 2003-04-16 2005-01-06 Aitken Bruce G. Glass package that is hermetically sealed with a frit and method of fabrication

Cited By (92)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7431628B2 (en) * 2005-11-18 2008-10-07 Samsung Sdi Co., Ltd. Method of manufacturing flat panel display device, flat panel display device, and panel of flat panel display device
US20070114909A1 (en) * 2005-11-18 2007-05-24 Park Jin-Woo Method of manufacturing flat panel display device, flat panel display device, and panel of flat panel display device
US7641976B2 (en) * 2005-12-06 2010-01-05 Corning Incorporated Glass package that is hermetically sealed with a frit and method of fabrication
US7425166B2 (en) * 2005-12-06 2008-09-16 Corning Incorporated Method of sealing glass substrates
US20100126898A1 (en) * 2005-12-06 2010-05-27 Corning Corporation Hermetically Sealed Glass Package and Method of Manufacture
US8375744B2 (en) 2005-12-06 2013-02-19 Corning Incorporated Hermetically sealed glass package and method of manufacture
WO2007067419A2 (en) * 2005-12-06 2007-06-14 Corning Incorporated Method of sealing glass substrates
US20070128965A1 (en) * 2005-12-06 2007-06-07 Burt Ronald L Method of sealing glass substrates
WO2007067419A3 (en) * 2005-12-06 2008-10-23 Corning Inc Method of sealing glass substrates
US20090069164A1 (en) * 2005-12-06 2009-03-12 Corning Incorporated Glass Package That Is Hermetically Sealed With a Frit and Method of Fabrication
US8415880B2 (en) 2006-01-20 2013-04-09 Samsung Display Co., Ltd. Organic light-emitting display device with frit seal and reinforcing structure
US9004972B2 (en) 2006-01-20 2015-04-14 Samsung Display Co., Ltd. Organic light-emitting display device with frit seal and reinforcing structure
US20070170839A1 (en) * 2006-01-20 2007-07-26 Choi Dong S Organic light-emitting display device with frit seal and reinforcing structure
US8038495B2 (en) 2006-01-20 2011-10-18 Samsung Mobile Display Co., Ltd. Organic light-emitting display device and manufacturing method of the same
US8120249B2 (en) 2006-01-23 2012-02-21 Samsung Mobile Display Co., Ltd. Organic light emitting display and method of fabricating the same
US20070170605A1 (en) * 2006-01-24 2007-07-26 Jong Woo Lee Organic light emitting display and fabricating method of the same
US20070170423A1 (en) * 2006-01-24 2007-07-26 Choi Dong S Organic light-emitting display and method of making the same
US7834550B2 (en) * 2006-01-24 2010-11-16 Samsung Mobile Display Co., Ltd. Organic light emitting display and fabricating method of the same
US8164257B2 (en) 2006-01-25 2012-04-24 Samsung Mobile Display Co., Ltd. Organic light emitting display and method of fabricating the same
US7944143B2 (en) 2006-01-25 2011-05-17 Samsung Mobile Display Co., Ltd. Organic light-emitting display device with frit seal and reinforcing structure bonded to frame
US7825594B2 (en) 2006-01-25 2010-11-02 Samsung Mobile Display Co., Ltd. Organic light emitting display and fabricating method of the same
US20070170855A1 (en) * 2006-01-25 2007-07-26 Choi Dong-Soo Organic light emitting display device and method of fabricating the same
US20070170857A1 (en) * 2006-01-25 2007-07-26 Dong Soo Choi Organic light-emitting display device and method of manufacturing the same
US20070170324A1 (en) * 2006-01-25 2007-07-26 Jae Sun Lee Organic light emitting display and fabricating method of the same
US20070170859A1 (en) * 2006-01-25 2007-07-26 Dong Soo Choi Organic light emitting display and method of fabricating the same
US8729796B2 (en) * 2006-01-25 2014-05-20 Samsung Display Co., Ltd. Organic light emitting display device including a gap to improve image quality and method of fabricating the same
US8128449B2 (en) * 2006-01-26 2012-03-06 Samsung Mobile Display Co., Ltd. Method of making electronic device with frit seal and frit sealing apparatus
US20070170856A1 (en) * 2006-01-26 2007-07-26 You Min Cha Method of making electronic device with frit seal and frit sealing apparatus
US20070173167A1 (en) * 2006-01-26 2007-07-26 Young Seo Choi Organic light-emitting display device and method of fabricating the same
US8299705B2 (en) 2006-01-26 2012-10-30 Samsung Display Co., Ltd. Organic light emitting display device and manufacturing method thereof
US20070170845A1 (en) * 2006-01-26 2007-07-26 Dong Soo Choi Organic light emitting display device
US8063561B2 (en) 2006-01-26 2011-11-22 Samsung Mobile Display Co., Ltd. Organic light emitting display device
US7821197B2 (en) 2006-01-27 2010-10-26 Samsung Mobile Display Co., Ltd. Organic light emitting display and fabricating method of the same
US20070176549A1 (en) * 2006-01-27 2007-08-02 Jin Woo Park Organic light emitting display and method of fabricating the same
US20070177069A1 (en) * 2006-01-27 2007-08-02 Jong Woo Lee Organic light emitting display and fabricating method of the same
US20070197120A1 (en) * 2006-02-20 2007-08-23 Jong Woo Lee Substrate adhesion apparatus and method for sealing organic light emitting display using the same
US7837530B2 (en) 2006-03-29 2010-11-23 Samsung Mobile Display Co., Ltd. Method of sealing an organic light emitting display by means of a glass frit seal assembly
US20110070800A1 (en) * 2006-03-31 2011-03-24 Akinobu Miyazaki Plasma display panel
US20090230861A1 (en) * 2006-03-31 2009-09-17 Akinobu Miyazaki Plasma Display Panel
US20090044496A1 (en) * 2007-08-16 2009-02-19 Botelho John W Method and apparatus for sealing a glass package
KR101383710B1 (en) * 2007-08-27 2014-04-09 삼성디스플레이 주식회사 Display device and manufacturing method thereof
US20090058292A1 (en) * 2007-08-27 2009-03-05 Koo Won-Hoe Flat panel display and fabricating method thereof
US20090086325A1 (en) * 2007-09-28 2009-04-02 Anping Liu Method and apparatus for frit sealing with a variable laser beam
US8247730B2 (en) 2007-09-28 2012-08-21 Corning Incorporated Method and apparatus for frit sealing with a variable laser beam
US20090120915A1 (en) * 2007-11-13 2009-05-14 Canon Kabushiki Kaisha Method for making airtight container
US20090142984A1 (en) * 2007-11-30 2009-06-04 Stephan Lvovich Logunov Methods and apparatus for packaging electronic components
US7815480B2 (en) * 2007-11-30 2010-10-19 Corning Incorporated Methods and apparatus for packaging electronic components
US20090203283A1 (en) * 2008-02-07 2009-08-13 Margaret Helen Gentile Method for sealing an electronic device
US20090221207A1 (en) * 2008-02-28 2009-09-03 Andrew Lawrence Russell Method of sealing a glass envelope
US9123715B2 (en) * 2008-02-28 2015-09-01 Corning Incorporated Method of sealing a glass envelope
US10135021B2 (en) * 2008-02-29 2018-11-20 Corning Incorporated Frit sealing using direct resistive heating
US20090218320A1 (en) * 2008-02-29 2009-09-03 Wenchao Wang Frit sealing using direct resistive heating
US20090261341A1 (en) * 2008-04-21 2009-10-22 Choi Jung-Mi Organic light emitting display and method of manufacturing the same
US9181126B2 (en) 2008-05-26 2015-11-10 Hamamatsu Photonics K.K. Glass fusion method
US10322469B2 (en) 2008-06-11 2019-06-18 Hamamatsu Photonics K.K. Fusion bonding process for glass
US9281132B2 (en) 2008-07-28 2016-03-08 Corning Incorporated Method for sealing a liquid within a glass package and the resulting glass package
US20100129666A1 (en) * 2008-11-24 2010-05-27 Stephan Lvovich Logunov Laser assisted frit sealing of high cte glasses and the resulting sealed glass package
US8245536B2 (en) * 2008-11-24 2012-08-21 Corning Incorporated Laser assisted frit sealing of high CTE glasses and the resulting sealed glass package
US20100296291A1 (en) * 2009-05-20 2010-11-25 Samsung Mobile Display Co., Ltd. Light radiating device and method of fabricating organic light emitting diode display device using the same
US8848749B2 (en) * 2009-05-20 2014-09-30 Samsung Display Co., Ltd. Light radiating device and method of fabricating organic light emitting diode display device using the same
US8440479B2 (en) 2009-05-28 2013-05-14 Corning Incorporated Method for forming an organic light emitting diode device
US20100304513A1 (en) * 2009-05-28 2010-12-02 Kelvin Nguyen Method for forming an organic light emitting diode device
US9073778B2 (en) 2009-11-12 2015-07-07 Hamamatsu Photonics K.K. Glass welding method
US9236213B2 (en) 2009-11-25 2016-01-12 Hamamatsu Photonics K.K. Glass welding method and glass layer fixing method
TWI504469B (en) * 2009-11-25 2015-10-21 Hamamatsu Photonics Kk Glass welding method and glass layer fixation method
US9922790B2 (en) 2009-11-25 2018-03-20 Hamamatsu Photonics K.K. Glass welding method
US9887059B2 (en) 2009-11-25 2018-02-06 Hamamatsu Photonics K.K. Glass welding method
US9701582B2 (en) 2009-11-25 2017-07-11 Hamamatsu Photonics K.K. Glass welding method and glass layer fixing method
US9233872B2 (en) 2009-11-25 2016-01-12 Hamamatsu Photonics K.K. Glass welding method and glass layer fixing method
US9227871B2 (en) 2009-11-25 2016-01-05 Hamamatsu Photonics K.K. Glass welding method and glass layer fixing method
US20110232840A1 (en) * 2010-03-29 2011-09-29 Canon Kabushiki Kaisha Manufacturing method of hermetic container
US8425714B2 (en) 2010-03-29 2013-04-23 Canon Kabushiki Kaisha Manufacturing method of hermetic container
US20110233103A1 (en) * 2010-03-29 2011-09-29 Canon Kabushiki Kaisha Hermetic container and manufacturing method of the same
US8257130B2 (en) 2010-03-29 2012-09-04 Canon Kabushiki Kaisha Manufacturing method of hermetic container
US20110237150A1 (en) * 2010-03-29 2011-09-29 Canon Kabushiki Kaisha Manufacturing method of hermetic container
US8821677B2 (en) 2010-03-29 2014-09-02 Canon Kabushiki Kaisha Hermetic container and manufacturing method of the same
US8476550B2 (en) 2010-08-25 2013-07-02 Canon Kabushiki Kaisha Manufacturing method of hermetically sealed container
US8475618B2 (en) 2010-09-06 2013-07-02 Canon Kabushiki Kaisha Manufacturing method of hermetic container
US8601834B2 (en) 2010-09-27 2013-12-10 Canon Kabushiki Kaisha Manufacturing method of hermetically sealed container for holding therein atmosphere of reduced pressure
US9688053B2 (en) * 2010-12-23 2017-06-27 Medtronic, Inc. Devices formed with techniques for bonding substrates using an intermediate layer
US20150367598A1 (en) * 2010-12-23 2015-12-24 Medtronic, Inc. Devices formed with techniques for bonding substrates using an intermediate layer
US8733128B2 (en) * 2011-02-22 2014-05-27 Guardian Industries Corp. Materials and/or method of making vacuum insulating glass units including the same
US20120211146A1 (en) * 2011-02-22 2012-08-23 Guardian Industries Corp. Materials and/or method of making vacuum insulating glass units including the same
US9472776B2 (en) 2011-10-14 2016-10-18 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing sealed structure including welded glass frits
US10096741B2 (en) 2011-11-28 2018-10-09 Semiconductor Energy Laboratory Co., Ltd. Sealed body, light-emitting module, and method of manufacturing sealed body
US9530981B2 (en) * 2013-01-31 2016-12-27 Samsung Display Co., Ltd. Sealing method for flat panel display device
US20140210991A1 (en) * 2013-01-31 2014-07-31 Samsung Display Co., Ltd. Sealing method for flat panel display device
US20140216645A1 (en) * 2013-02-04 2014-08-07 Semiconductor Energy Laboratory Co., Ltd. Method for Forming Glass Layer and Method for Manufacturing Sealed Structure
US20140332827A1 (en) * 2013-05-09 2014-11-13 Au Optronics Corporation Display panel and sealing process thereof
US9123596B2 (en) * 2013-05-09 2015-09-01 Au Optronics Corporation Display panel and sealing process thereof
US20180143351A1 (en) * 2016-11-21 2018-05-24 Mega 1 Company Limited Anti-Glare Head-Up Display System
US10324288B2 (en) * 2016-11-21 2019-06-18 Mega 1 Company Limited Vehicle display system absorbing ambient light

Also Published As

Publication number Publication date
JP4625085B2 (en) 2011-02-02
KR100942118B1 (en) 2010-02-12
EP1831938B1 (en) 2015-03-04
JP2008517446A (en) 2008-05-22
WO2006045067A1 (en) 2006-04-27
EP1831938A1 (en) 2007-09-12
TWI339994B (en) 2011-04-01
CN101095247A (en) 2007-12-26
TW200629966A (en) 2006-08-16
US7371143B2 (en) 2008-05-13
US20060082298A1 (en) 2006-04-20
CN101095247B (en) 2010-05-05
US20080182062A1 (en) 2008-07-31
KR20070085333A (en) 2007-08-27

Similar Documents

Publication Publication Date Title
US7371143B2 (en) Optimization of parameters for sealing organic emitting light diode (OLED) displays
US7597603B2 (en) Method of encapsulating a display element
US7537504B2 (en) Method of encapsulating a display element with frit wall and laser beam
US9399594B2 (en) Mask and method for sealing a glass envelope
CN100585771C (en) Method of encapsulating a display element

Legal Events

Date Code Title Description
STCB Information on status: application discontinuation

Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION