US20050205518A1 - Method for shaping thin films in the near-edge regions of in-process semiconductor substrates - Google Patents

Method for shaping thin films in the near-edge regions of in-process semiconductor substrates Download PDF

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Publication number
US20050205518A1
US20050205518A1 US11/131,611 US13161105A US2005205518A1 US 20050205518 A1 US20050205518 A1 US 20050205518A1 US 13161105 A US13161105 A US 13161105A US 2005205518 A1 US2005205518 A1 US 2005205518A1
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wafer
substrate
edge
flow
diluent
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US11/131,611
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Michael Robbins
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Accretech USA Inc
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Accretech USA Inc
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Priority to US11/131,611 priority Critical patent/US20050205518A1/en
Publication of US20050205518A1 publication Critical patent/US20050205518A1/en
Assigned to ACCRETECH USA, INC. reassignment ACCRETECH USA, INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: ROBBINS, MICHAEL D.
Priority to US11/825,671 priority patent/US20080017316A1/en
Priority to US11/825,669 priority patent/US20080011421A1/en
Priority to US11/825,676 priority patent/US20080011332A1/en
Priority to US11/825,659 priority patent/US20080190558A1/en
Priority to US11/825,670 priority patent/US20080010845A1/en
Abandoned legal-status Critical Current

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67017Apparatus for fluid treatment
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67017Apparatus for fluid treatment
    • H01L21/67063Apparatus for fluid treatment for etching
    • H01L21/67069Apparatus for fluid treatment for etching for drying etching
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32Gas-filled discharge tubes
    • H01J37/32009Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32366Localised processing
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104Forming layers
    • H01L21/02107Forming insulating materials on a substrate
    • H01L21/02225Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
    • H01L21/0226Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
    • H01L21/02263Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase
    • H01L21/02271Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3105After-treatment
    • H01L21/311Etching the insulating layers by chemical or physical means
    • H01L21/31105Etching inorganic layers
    • H01L21/31111Etching inorganic layers by chemical means
    • H01L21/31116Etching inorganic layers by chemical means by dry-etching
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67017Apparatus for fluid treatment
    • H01L21/67063Apparatus for fluid treatment for etching
    • H01L21/67075Apparatus for fluid treatment for etching for wet etching
    • H01L21/6708Apparatus for fluid treatment for etching for wet etching using mainly spraying means, e.g. nozzles
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104Forming layers
    • H01L21/02107Forming insulating materials on a substrate
    • H01L21/02109Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
    • H01L21/02112Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
    • H01L21/02123Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
    • H01L21/02164Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material being a silicon oxide, e.g. SiO2
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/314Inorganic layers
    • H01L21/316Inorganic layers composed of oxides or glassy oxides or oxide based glass
    • H01L21/31604Deposition from a gas or vapour
    • H01L21/31608Deposition of SiO2
    • H01L21/31612Deposition of SiO2 on a silicon body

Definitions

  • This invention relates to a method and apparatus for shaping thin films on in-process semiconductor substrates. More particularly, this invention relates to a method and apparatus for shaping thin films in the near-edge regions of in-process semiconductor substrates employing plasma techniques.
  • EBR Error Bead Removal
  • the invention provides an apparatus and method for shaping a thin film on a wafer.
  • the apparatus of the invention employs a rotatable chuck for holding a wafer, a housing having a slot for receiving an edge of a wafer on the chuck, at least one plasma source mounted on the housing for generating a flow of reactive gas and a channel in the housing communicating with the plasma source to direct the flow of reactive gas toward the edge of the wafer in the slot of the housing.
  • an exhaust plenum is disposed within the housing for receiving the reactive gas and an exhaust line communicates with and extends from the exhaust plenum for expelling reactive gas from the plenum.
  • At least one additional channel in the housing radially within the first channel for directing a flow of diluent/quenching gas onto the wafer; and at least one exhaust channel in the housing between this additional channel and the first channel for exhausting the diluent/quenching gas and reactive gas therefrom.
  • the housing is of semi-circular shape to receive a major portion of the wafer on the chuck in the slot but may be of any other suitable shape.
  • the apparatus may also be constructed with multiple sets of the inlet channels and exhaust channel and a plurality of plasma sources, for example, three plasma sources spaced circumferentially of the housing, for selectively etching of a polymer on a wafer, etching of silicon dioxide on a wafer and depositing an encapsulating silicon dioxide layer on a wafer.
  • a plurality of plasma sources for example, three plasma sources spaced circumferentially of the housing, for selectively etching of a polymer on a wafer, etching of silicon dioxide on a wafer and depositing an encapsulating silicon dioxide layer on a wafer.
  • the method of the invention comprises the steps of mounting a wafer having a thin film on a rotatable chuck; directing a flow of diluent/quenching gas onto the wafer in a radially outward direction; exhausting the flow of diluent/quenching gas from the wafer downstream of the flow of diluent/quenching gas; directing a flow of reactive gases towards the wafer radially outward of the diluent/quenching gas to react with the wafer; and rotating the wafer relative to the flow of reactive gas to remove film fragments from the edge of the wafer or to deposit material on the wafer.
  • the wafer is moved in a rectilinear direction relative to the flow of reactive gas to allow removal of material from the thin film normally on the wafer while shaping the thin film to a predetermined shape. Thereafter, a second flow of reactive gases can be directed towards the wafer radially outward of the diluent/quenching gas to react with the wafer to deposit material thereon while the wafer is rotated to deposit a thin protective film of the material on the shaped thin film on the wafer.
  • the processing capability enabled by the method and apparatus described herein addresses both removal of the flaking films and control of the film shape that remains after processing.
  • the film shaping capability allows for the use of conventional cleaning processes without particle trapping. Further, the process can also encapsulate the freshly processed surface with a thin film that prevents future flaking.
  • an in-process semiconductor substrate (wafer) is held in place on a platen (e.g., using vacuum).
  • the platen is sufficiently smaller, in diameter, than the wafer, allowing access to all of the edge surfaces of the wafer.
  • the platen is attached to a spindle, which, in-turn, is connected to a rotational electromechanical system.
  • the electromechanical system enables computer control of the rotational movement of the wafer during processing.
  • the entire platen assembly is mounted on a 3-axis (X, Y, Z) linear electromechanical positioning device.
  • Plasma sources similar to one described in U.S. Pat. No. 5,961,772, are located in proximity to the edge surfaces of the wafer.
  • the gaseous output-flow from the plasma source (the flame) is directed to impinge on the edge surfaces by means of gas flow hardware design and electromechanical positioning devices (X, Y and Z wafer motion axes).
  • Proper selection of the input gases will determine the nature of the processing performed on the wafer. Certain gas mixtures will cause material on the wafer to react with the constituents in the flame such that the reaction by-products are volatile at the operating pressure. In such cases, the process is subtractive and is commonly referred to as etching. Other input gas mixtures will cause flame constituents to react with each other to deposit material onto the wafer. In such cases, the process is additive and is commonly referred to as chemical vapor deposition (CVD).
  • CVD chemical vapor deposition
  • the dwell time of the reactive gas flow on any one location of the wafer's edge surfaces shall be controlled via the computer controlled, electro-mechanical positioning devices.
  • the flame shall be commanded to dwell for longer times on areas where large material removal is desired and dwell shorter times on areas where less material removal is desired.
  • the flame shall be commanded to dwell longer times where thicker films are desired and shorter times where thinner films are desired.
  • a flow of diluent and/or quenching gas shall be provided.
  • the diluent and/or quenching gas flow is oriented to inhibit the diffusion of reactive gases from affecting areas on the wafer not intended for processing.
  • adjustable exhaust ports will be employed to direct the reactive gas flow away from the areas not intended for processing.
  • FIG. 1 a illustrates a part cross-sectional view of a wafer having flaking film fragments in a peripheral edge region
  • FIG. 1 b illustrates the wafer of FIG. 1 a after application of a photoresist coating in accordance with a prior art technique to remedy flaking film;
  • FIG. 1 c illustrates the wafer of FIG. 1 b after exposure of the photoresist in accordance with the prior art technique
  • FIG. 1 d illustrates the wafer of FIG. 1 c after development of the photoresist in accordance with the prior art technique
  • FIG. 1 e illustrates the wafer of FIG. 1 d after a wet or dry thin film etch in accordance with the prior art technique
  • FIG. 1 f illustrates the wafer of FIG. 1 e after a photoresist strip and cleaning in accordance with the prior art technique
  • FIG. 2 a illustrates a part cross-sectional view of a wafer having flaking film fragments in a peripheral edge region
  • FIG. 2 b illustrates a part cross-sectional view of the wafer of FIG. 2 a after removal of the flaking film fragments and shaping of the remaining film topography in accordance with a preferred embodiment of the invention
  • FIG. 2 c illustrates the wafer of FIG. 2 b after encapsulation of the processed surface in accordance with the preferred embodiment of the invention
  • FIG. 3 illustrates a schematic side view of an apparatus for etching of the peripheral edge region of a wafer in accordance with the preferred embodiment of the invention
  • FIG. 4 illustrates a plan view of the apparatus of FIG. 3 ;
  • FIG. 5 illustrates an enlarged view of a peripheral edge region of a wafer during etching in accordance with the preferred embodiment of the invention.
  • FIG. 6 illustrates a schematic side view of an apparatus for thin film deposition onto the peripheral edge region of a wafer in accordance with the preferred embodiment of the invention
  • FIG. 7 illustrates an enlarged view of a peripheral edge region of a wafer during thin film deposition in accordance with the preferred embodiment of the invention.
  • a previously known technique for edge bead removal frequently results in topography near the edge of a wafer 10 that is not readably cleanable and that traps particles.
  • the wafer 10 is provided with a thin film coating 11 of any suitable material. As indicated, fragment flakes 12 may break away in the form of thin film flakes. Subsequently, as indicated in FIG. 1 b , a photoresist coating 13 is applied. After the photoresist coating 13 is exposed using conventional techniques, as indicated in FIG. 1 c , and subsequently developed as indicated in FIG. 1 d , the coating 11 and flakes 12 at the peripheral edge of the wafer 10 are again uncovered. A wet or dry thin film etch step may then be carried out to remove the coating 11 and flakes 12 at the peripheral edge of the wafer 10 , as indicated in FIG. 1 e (depicts a wet etch profile). Finally, the photoresist coating 13 is stripped and the surface is cleaned as indicated in FIG. 1 f . However, small particles 14 may become trapped in the region where the coating 11 ends on the wafer 10 .
  • the invention proposes to process a coated wafer as shown in FIG. 2 a by removing the flaking film fragments and shaping the remaining film topography in a manner as illustrated.
  • the peripheral edge of the coating 11 is tapered radially outwardly adjacent to the outermost periphery of the wafer 10 .
  • the processed surface of the coating 11 is encapsulated within a layer 15 .
  • a wafer 10 is placed on a vacuum chuck 16 that is able to move horizontally in the X and Y axes and also vertically in the Z axis.
  • the vacuum chuck, 16 is configured with a rotational axis, E as shown.
  • the vacuum chuck is typically incorporated in an electro-mechanical system (not shown) having suitable means for moving the vacuum chuck 16 with these 4 degrees of freedom (X, Y, Z, E).
  • three plasma sources, 17 t , 17 e and 17 b are respectively located in proximity to the top side, the edge and the bottom side of the wafer 10 in order to supply the reactive gas flow toward the three surfaces of the wafer 10 .
  • Each plasma source is constructed, such as the atmospheric pressure plasma jet described in U.S. Pat. No. 5,961,772. This arrangement of three plasma sources allows for maximum flexibility in processing options as follows:
  • pairs of flow channels 19 t , 19 b and 20 t , 20 b associated with their respective plasma sources 17 t and 17 b provide a means to control the unwanted diffusion of reactive gas flow onto portions of the wafer 10 where processing is unwanted.
  • Channels 19 t and 19 b supply a diluent or quenching gas flow inward toward the wafer, 10 , and directed radially outwards towards the edge of wafer 10 .
  • Fine exhaust channels 20 t and 20 b provide an exhaust flow directed outward from the plane of the wafer 10 .
  • Conductance adjustment valves, 21 t and 21 b are tuned to match the diluent or quenching gas flow rate of the channels 19 t and 19 b respectively.
  • Reactive gases from plasma sources 17 t , 17 e and 17 b that diffuse towards the center of the wafer are neutralized, entrained in the exhaust flow and removed via fine exhaust channels 20 t and 20 b . This technique provides for the sharp boundary between the processed and unprocessed regions.
  • the plasma sources, 17 t , 17 t ′ and 17 t ′′ are mounted to a semi-circular housing, 18 .
  • the housing includes a slot 22 for receiving the wafer 10 as indicated in FIG. 3 , the housing 18 is equal to or approximately equal to one-half the size of the wafer 10 .
  • the housing also includes an exhaust plenum, 23 , which is connected to the exhaust source (not shown) via an adjustable conductance control valve 24 .
  • 17 including 17 t , 17 e , and 17 b
  • 17 ′ including 17 t ′, 17 e ′, and 17 b ′
  • 17 ′′ including 17 t ′′, 17 e ′′ and 17 b ′′
  • quenching gas lines 19 (including 19 t and 19 b ), 19 ′ (including 19 t′ and 19 b ′) and 19 ′′ (including 19 t ′′ and 19 b ′′)
  • exhaust conductance control valves 21 including 21 t and 21 b
  • 21 ′ including 21 t ′ and 21 b ′
  • 21 ′′ including 21 t ′′ and 21 b ′′
  • 24 ′ and 24 ′′ may be arranged around the housing, 18 , as shown.
  • each set can operate independently with respect to process chemistry.
  • one set can perform etching of polymers, as indicated by 17 t ′, 17 e ′, 17 b ′, 19 t ′, 19 b ′, 21 t ′, 21 b ′ and 24 ′, while another set performs etching of SiO 2 , as indicated by items, 17 t , 17 e , 17 b , 19 t , 19 b , 21 t , 21 b and 24 , while a third set, as indicated by items 17 t ′′, 17 e ′′, 17 b ′′, 19 t ′′, 19 b , 21 t ′′, 21 b ′′ and 24 ′′ deposits an encapsulating SiO 2 layer.
  • the first column contains the input gases.
  • the second column contains the active output species.
  • the third column contains the type of process performed and the fourth column contains the thin film addressed by the process.
  • FIGS. 2 a , 2 b and 2 c A typical sequence of events to shape an SiO 2 thin film on the top surface of a wafer followed by an SiO 2 CVD encapsulation process as depicted in FIGS. 2 a , 2 b and 2 c is described below with reference to FIGS. 3 and 5 :
  • a well-centered wafer, 10 is placed on the vacuum wafer platen, 16 .
  • the vacuum wafer platen is moved in X, Y and Z axes such that the wafer is centered within the slot, 22 , and the edge portion of the wafer is located immediately adjacent to diluent/quenching gas supply channels 19 t and 19 b.
  • Diluent/quenching gas flow rate setpoints are sent to the mass flow controllers (MFC) 25 t and 25 b and the diluent/quenching gas shutoff valves 26 t and 26 b are commanded to open. Gas begins to flow down diluent/quenching gas supply channels 19 t and 19 b and impinges on the edge of the wafer 10 .
  • MFC mass flow controllers
  • Fine exhaust channel conductance control valve, 21 t is commanded open to a predefined position. (Conductance control valve 21 b is not opened. This allows the diluent/quenching gas flow from channel 19 b to protect the backside of the wafer 10 from unwanted diffusion of reactive gases).
  • Process gas flow rate setpoints are sent to the process input gas MFCs (not shown) and process input gas shutoff valve 27 t is commanded to open. Process input gases He, O 2 and CF 4 begin to flow through channel 30 t.
  • the conductance control valve 24 of housing exhaust plenum 23 is commanded to a pre-defined position.
  • a forward power setpoint is sent to the RF power supply 29 t and the RF power is commanded on.
  • a plasma is formed inside the plasma source 17 t and reactive gases begin to flow through channel 30 t into the housing exhaust plenum 23 and out through the conductance control valve 24 to the exhaust system (not shown).
  • the impedance matching network, 28 t tunes the load impedance to match the output impedance of the RF power supply 29 t .
  • the control system (not shown) compares the magnitude of the power reflected back to power supply 29 t to a pre-defined threshold value.
  • the control system (not shown) decides to halt the process or continue based upon the reflected power comparison.
  • a successful comparison signifies formation of a stable plasma inside plasma source 17 t.
  • the vacuum wafer platen 16 is commanded to begin rotating at a predefined angular velocity.
  • the vacuum wafer platen 16 is commanded to move in the X, Y and Z axes, positioning the edge surfaces into the reactive gas stream flowing from reactive gas channel 30 t.
  • the shaping of the thin films is controlled by the dynamics of the vacuum wafer platen's, 16 , motion as follows:
  • the wafer 10 is moved in the positive X direction in a smoothly accelerating motion.
  • the SiO 2 thin film fragment begins to react with the atomic fluorine in the reactive gas flow to produce a volatile by-product according to the following chemical equation: SiO 2 +F 4 ⁇ SiF 4 +O 2
  • the exhaust plenum 23 directs the effluent flow towards the exhaust system (not shown) under control of the conductance control valve 24 .
  • the housing exhaust plenum's conductance control valve 24 is closed.
  • an encapsulating SiO 2 thin film 15 can be deposited as follows:
  • Fine exhaust channel conductance control valve 21 t ′′ is commanded open to a predefined position. (Conductance control valve 21 b ′′ is not opened. This allows the diluent/quenching gas flow from channel 19 b ′′ to protect the backside of the wafer 10 from unwanted diffusion of reactive gases).
  • Process gas flow rate setpoints are sent to the process input gas MFCs (not shown) and process input gas shutoff valve 27 t ′′ is commanded to open. Process input gases He, TEOS and O 3 begin to flow through channel 30 t′′.
  • the conductance control valve 24 ′′ of the housing exhaust plenum 23 is commanded to a pre-defined position.
  • a forward power setpoint is sent to the RF power supply 29 t ′′ and the RF power is commanded on.
  • a plasma is formed inside the plasma source 17 t ′′ and reactive gases begin to flow through channel 30 t ′′ into the housing exhaust plenum 23 and out through the conductance control valve 24 ′′ to the exhaust system (not shown).
  • the impedance matching network 28 t ′′ tunes the load impedance to match the output impedance of the RF power supply 29 t ′′.
  • the control system (not shown) compares the magnitude of the power reflected back to power supply 29 t ′′ to a pre-defined threshold value.
  • the control system (not shown) decides to halt the process or continue based upon the reflected power comparison.
  • a successful comparison signifies formation of a stable plasma inside plasma source 17 t′′.
  • the vacuum wafer platen 16 is commanded to begin rotating at a predefined angular velocity.
  • the vacuum wafer platen 16 is commanded to move in the X, Y and Z axes, positioning the edge surfaces into the reactive gas stream flowing from reactive gas channel 30 t′′.
  • the shaping of the thin film deposition is controlled by the dynamics of the motion of the vacuum wafer platen 16 as follows:
  • the exhaust plenum 23 directs the flow towards the exhaust system (not shown) under control of the conductance control valve 24 ′′.
  • the vacuum wafer platen 16 is commanded to reverse direction and move in a smoothly decelerating motion until it arrives back at its starting position. The described motion will yield an SiO 2 thin film deposition profile that, when applied to the thin film shape 11 depicted in FIG. 2 b , will result in the deposited thin film shape 15 depicted in FIG. 2 c.
  • the diluent/quenching gas supply channel conductance control valve 21 t ′′ is closed.
  • the wafer 10 can be removed from the vacuum wafer platen 16 .
  • the shape of the etched surface can be nearly anything. The limiting factors are the spatial frequency capabilities of the reactive gas footprint shape and the servo system dynamic response. Other shapes of interest might include convex or concave shapes or shapes that intersect the wafer top surface plane further in from the edge.
  • the protective thin film 15 may be of any suitable thickness. Typically, the film 15 is thin enough such that none of the layer of film 15 extends above the plane of the remaining film 11 and thick enough to be mechanically strong enough to weather the stresses exerted by the film 11 the protective film 15 is covering. For example, a thickness of 0.1 to 0.3 um should be sufficient. The thickness of the layer of film 15 may also be varied in the same way the etching process profile is varied, via a spatial variation of the reactive gas footprint dwell time.
  • the invention thus provides an apparatus and method of shaping thin films in the regions of in-process semiconductor substrates that are economical and relatively simple and efficient.
  • the invention also provides a method that allows flakes to be readily removed from a semiconductor substrate and the edge region of the processed substrate to be contoured to a desired shape.

Abstract

A method for shaping and/or encapsulating near-edge regions of a substrate wafer is described. A housing provides channels for flowing a reactive gas towards the wafer edge. The reactive gas is directed towards the wafer edge for removing or depositing a thin film on the wafer edge. Gasses are exhausted downstream from the flow of the reactive gas. A second channel in the housing directs a flow of diluent/quenching gas onto the wafer for exhausting of the diluent/quenching gas and the reactive gas away from the wafer. The method may also provide a sequence of process steps, for example, selectively etching of a material on the wafer, etching of second material on the wafer and depositing an encapsulating material layer on the wafer.

Description

    CROSS-REFERENCE TO RELATED APPLICATIONS
  • This application is a divisional of U.S. patent application Ser. No. 10/401,074 filed on Mar. 27, 2003, which claims the benefit of Provisional Application 60/376,154, filed Apr. 26, 2002. The disclosures of the above applications are incorporated herein by reference.
  • FIELD OF THE INVENTION
  • This invention relates to a method and apparatus for shaping thin films on in-process semiconductor substrates. More particularly, this invention relates to a method and apparatus for shaping thin films in the near-edge regions of in-process semiconductor substrates employing plasma techniques.
  • BACKGROUND
  • Future trends in integrated circuit (IC) manufacturing processes require manufacturing engineers to become more attentive to the root causes of contamination. An emerging awareness, within the IC manufacturing engineering community, has recognized the substrate's edge exclusion area and edge surfaces as source locations of contamination. Contamination problems originating in these edge areas are the result of poorly adhering films that partially delaminate and break loose from the surface. These loose film fragments, or flakes, if they migrate towards the center of the wafer where active devices are being constructed, can become killer defects.
  • There is also a problem with existing remedies (Edge Bead Removal or EBR) for the flaking films. Traditional EBR methods are time consuming and expensive. Additionally, these EBR processes produce large volumes of hazardous waste. Finally, EBR processes yield topography near the edge that is not readily cleanable and traps particles.
  • Accordingly, it is an object of the invention to enable the use of relatively simple techniques for removing flaking films during the processing of a wafer.
  • It is another object of the invention to control the film shape on a processed wafer.
  • It is another object of the invention to provide an economical technique for shaping the edge of a wafer during processing.
  • SUMMARY OF THE INVENTION
  • Briefly, the invention provides an apparatus and method for shaping a thin film on a wafer.
  • The apparatus of the invention employs a rotatable chuck for holding a wafer, a housing having a slot for receiving an edge of a wafer on the chuck, at least one plasma source mounted on the housing for generating a flow of reactive gas and a channel in the housing communicating with the plasma source to direct the flow of reactive gas toward the edge of the wafer in the slot of the housing.
  • In addition, an exhaust plenum is disposed within the housing for receiving the reactive gas and an exhaust line communicates with and extends from the exhaust plenum for expelling reactive gas from the plenum.
  • Still further, there is at least one additional channel in the housing radially within the first channel for directing a flow of diluent/quenching gas onto the wafer; and at least one exhaust channel in the housing between this additional channel and the first channel for exhausting the diluent/quenching gas and reactive gas therefrom.
  • Generally, the housing is of semi-circular shape to receive a major portion of the wafer on the chuck in the slot but may be of any other suitable shape.
  • The apparatus may also be constructed with multiple sets of the inlet channels and exhaust channel and a plurality of plasma sources, for example, three plasma sources spaced circumferentially of the housing, for selectively etching of a polymer on a wafer, etching of silicon dioxide on a wafer and depositing an encapsulating silicon dioxide layer on a wafer.
  • The method of the invention comprises the steps of mounting a wafer having a thin film on a rotatable chuck; directing a flow of diluent/quenching gas onto the wafer in a radially outward direction; exhausting the flow of diluent/quenching gas from the wafer downstream of the flow of diluent/quenching gas; directing a flow of reactive gases towards the wafer radially outward of the diluent/quenching gas to react with the wafer; and rotating the wafer relative to the flow of reactive gas to remove film fragments from the edge of the wafer or to deposit material on the wafer.
  • During rotation, the wafer is moved in a rectilinear direction relative to the flow of reactive gas to allow removal of material from the thin film normally on the wafer while shaping the thin film to a predetermined shape. Thereafter, a second flow of reactive gases can be directed towards the wafer radially outward of the diluent/quenching gas to react with the wafer to deposit material thereon while the wafer is rotated to deposit a thin protective film of the material on the shaped thin film on the wafer.
  • The processing capability enabled by the method and apparatus described herein addresses both removal of the flaking films and control of the film shape that remains after processing. The film shaping capability allows for the use of conventional cleaning processes without particle trapping. Further, the process can also encapsulate the freshly processed surface with a thin film that prevents future flaking.
  • In accordance with the invention, an in-process semiconductor substrate (wafer) is held in place on a platen (e.g., using vacuum). The platen is sufficiently smaller, in diameter, than the wafer, allowing access to all of the edge surfaces of the wafer. The platen is attached to a spindle, which, in-turn, is connected to a rotational electromechanical system. The electromechanical system enables computer control of the rotational movement of the wafer during processing. Further, the entire platen assembly is mounted on a 3-axis (X, Y, Z) linear electromechanical positioning device. Plasma sources, similar to one described in U.S. Pat. No. 5,961,772, are located in proximity to the edge surfaces of the wafer. The gaseous output-flow from the plasma source (the flame) is directed to impinge on the edge surfaces by means of gas flow hardware design and electromechanical positioning devices (X, Y and Z wafer motion axes).
  • Proper selection of the input gases will determine the nature of the processing performed on the wafer. Certain gas mixtures will cause material on the wafer to react with the constituents in the flame such that the reaction by-products are volatile at the operating pressure. In such cases, the process is subtractive and is commonly referred to as etching. Other input gas mixtures will cause flame constituents to react with each other to deposit material onto the wafer. In such cases, the process is additive and is commonly referred to as chemical vapor deposition (CVD).
  • The dwell time of the reactive gas flow on any one location of the wafer's edge surfaces shall be controlled via the computer controlled, electro-mechanical positioning devices. For shaping the local topography using an etching process, the flame shall be commanded to dwell for longer times on areas where large material removal is desired and dwell shorter times on areas where less material removal is desired. For CVD processes, the flame shall be commanded to dwell longer times where thicker films are desired and shorter times where thinner films are desired.
  • For both etching and CVD processes, it will be important for the boundary between the processed area and the unprocessed area to be sharply defined. For this purpose, a flow of diluent and/or quenching gas shall be provided. The diluent and/or quenching gas flow is oriented to inhibit the diffusion of reactive gases from affecting areas on the wafer not intended for processing. Further, adjustable exhaust ports will be employed to direct the reactive gas flow away from the areas not intended for processing. These and other objects and advantages will become more apparent from the following detailed description taken in conjunction with the accompanying drawings.
  • Further areas of applicability of the present invention will become apparent from the detailed description provided hereinafter. It should be understood that the detailed description and specific examples, while indicating the preferred embodiment of the invention, are intended for purposes of illustration only and are not intended to limit the scope of the invention.
  • BRIEF DESCRIPTION OF THE DRAWINGS
  • The present invention will become more fully understood from the detailed description and the accompanying drawings, wherein:
  • FIG. 1 a illustrates a part cross-sectional view of a wafer having flaking film fragments in a peripheral edge region;
  • FIG. 1 b illustrates the wafer of FIG. 1 a after application of a photoresist coating in accordance with a prior art technique to remedy flaking film;
  • FIG. 1 c illustrates the wafer of FIG. 1 b after exposure of the photoresist in accordance with the prior art technique;
  • FIG. 1 d illustrates the wafer of FIG. 1 c after development of the photoresist in accordance with the prior art technique;
  • FIG. 1 e illustrates the wafer of FIG. 1 d after a wet or dry thin film etch in accordance with the prior art technique;
  • FIG. 1 f illustrates the wafer of FIG. 1 e after a photoresist strip and cleaning in accordance with the prior art technique;
  • FIG. 2 a illustrates a part cross-sectional view of a wafer having flaking film fragments in a peripheral edge region;
  • FIG. 2 b illustrates a part cross-sectional view of the wafer of FIG. 2 a after removal of the flaking film fragments and shaping of the remaining film topography in accordance with a preferred embodiment of the invention;
  • FIG. 2 c illustrates the wafer of FIG. 2 b after encapsulation of the processed surface in accordance with the preferred embodiment of the invention;
  • FIG. 3 illustrates a schematic side view of an apparatus for etching of the peripheral edge region of a wafer in accordance with the preferred embodiment of the invention;
  • FIG. 4 illustrates a plan view of the apparatus of FIG. 3;
  • FIG. 5 illustrates an enlarged view of a peripheral edge region of a wafer during etching in accordance with the preferred embodiment of the invention.
  • FIG. 6 illustrates a schematic side view of an apparatus for thin film deposition onto the peripheral edge region of a wafer in accordance with the preferred embodiment of the invention;
  • FIG. 7 illustrates an enlarged view of a peripheral edge region of a wafer during thin film deposition in accordance with the preferred embodiment of the invention.
  • DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS
  • The following description of the preferred embodiment(s) is merely exemplary in nature and is in no way intended to limit the invention, its application, or uses.
  • Referring to FIGS. 1 a to 1 f, a previously known technique for edge bead removal (E.B.R.) frequently results in topography near the edge of a wafer 10 that is not readably cleanable and that traps particles.
  • In accordance with the prior art technique, the wafer 10 is provided with a thin film coating 11 of any suitable material. As indicated, fragment flakes 12 may break away in the form of thin film flakes. Subsequently, as indicated in FIG. 1 b, a photoresist coating 13 is applied. After the photoresist coating 13 is exposed using conventional techniques, as indicated in FIG. 1 c, and subsequently developed as indicated in FIG. 1 d, the coating 11 and flakes 12 at the peripheral edge of the wafer 10 are again uncovered. A wet or dry thin film etch step may then be carried out to remove the coating 11 and flakes 12 at the peripheral edge of the wafer 10, as indicated in FIG. 1 e (depicts a wet etch profile). Finally, the photoresist coating 13 is stripped and the surface is cleaned as indicated in FIG. 1 f. However, small particles 14 may become trapped in the region where the coating 11 ends on the wafer 10.
  • Referring to FIGS. 2 a, 2 b and 2 c, the invention proposes to process a coated wafer as shown in FIG. 2 a by removing the flaking film fragments and shaping the remaining film topography in a manner as illustrated. For example as indicated in FIG. 2 b, the peripheral edge of the coating 11 is tapered radially outwardly adjacent to the outermost periphery of the wafer 10. Thereafter, as indicated in FIG. 2 c, the processed surface of the coating 11 is encapsulated within a layer 15.
  • Referring to FIG. 3, a wafer 10 is placed on a vacuum chuck 16 that is able to move horizontally in the X and Y axes and also vertically in the Z axis. In addition, the vacuum chuck, 16, is configured with a rotational axis, E as shown. The vacuum chuck is typically incorporated in an electro-mechanical system (not shown) having suitable means for moving the vacuum chuck 16 with these 4 degrees of freedom (X, Y, Z, E).
  • Referring to FIG. 3, three plasma sources, 17 t, 17 e and 17 b are respectively located in proximity to the top side, the edge and the bottom side of the wafer 10 in order to supply the reactive gas flow toward the three surfaces of the wafer 10. Each plasma source is constructed, such as the atmospheric pressure plasma jet described in U.S. Pat. No. 5,961,772. This arrangement of three plasma sources allows for maximum flexibility in processing options as follows:
      • Independent processing of the top, bottom or edge surfaces of wafer 10
      • Simultaneous processing of any two of the above named surfaces of the wafer 10
      • Simultaneous processing of all three of the above named surfaces of the wafer 10.
  • Referring to FIGS. 3 and 5, pairs of flow channels 19 t, 19 b and 20 t, 20 b associated with their respective plasma sources 17 t and 17 b provide a means to control the unwanted diffusion of reactive gas flow onto portions of the wafer 10 where processing is unwanted. Channels 19 t and 19 b supply a diluent or quenching gas flow inward toward the wafer, 10, and directed radially outwards towards the edge of wafer 10. Fine exhaust channels 20 t and 20 b provide an exhaust flow directed outward from the plane of the wafer 10. Conductance adjustment valves, 21 t and 21 b are tuned to match the diluent or quenching gas flow rate of the channels 19 t and 19 b respectively. Reactive gases from plasma sources 17 t, 17 e and 17 b that diffuse towards the center of the wafer are neutralized, entrained in the exhaust flow and removed via fine exhaust channels 20 t and 20 b. This technique provides for the sharp boundary between the processed and unprocessed regions.
  • Referring to FIGS. 3 and 4, the plasma sources, 17 t, 17 t′ and 17 t″ are mounted to a semi-circular housing, 18. The housing includes a slot 22 for receiving the wafer 10 as indicated in FIG. 3, the housing 18 is equal to or approximately equal to one-half the size of the wafer 10. The housing also includes an exhaust plenum, 23, which is connected to the exhaust source (not shown) via an adjustable conductance control valve 24.
  • As illustrated three sets of plasma sources, 17 (including 17 t, 17 e, and 17 b), 17′ (including 17 t′, 17 e′, and 17 b′) and 17″ (including 17 t″, 17 e″ and 17 b″), quenching gas lines, 19 (including 19 t and 19 b), 19′ (including 19t′ and 19 b′) and 19″ (including 19 t″ and 19 b″) and exhaust conductance control valves 21 (including 21 t and 21 b), 21′ (including 21 t′ and 21 b′) 21″ (including 21 t″ and 21 b″) and 24, 24′ and 24″ may be arranged around the housing, 18, as shown. In this arrangement each set can operate independently with respect to process chemistry. For example, one set can perform etching of polymers, as indicated by 17 t′, 17 e′, 17 b′, 19 t′, 19 b′, 21 t′, 21 b′ and 24′, while another set performs etching of SiO2, as indicated by items, 17 t, 17 e, 17 b, 19 t, 19 b, 21 t, 21 b and 24, while a third set, as indicated by items 17 t″, 17 e″, 17 b″, 19 t″, 19 b, 21 t″, 21 b″ and 24″ deposits an encapsulating SiO2 layer.
  • Examples of processes are shown in Table 1. The first column contains the input gases. The second column contains the active output species. The third column contains the type of process performed and the fourth column contains the thin film addressed by the process.
    TABLE 1
    Input Gases Active output species Process Type Thin Film
    He, CF4, O2 Atomic Fluorine Etch Si, SiO2, Si3N4,
    W, Ta
    He, O2 Atomic Oxygen Etch Organic
    Polymers
    He, O3, TEOS (O—Si—O) CVD SiO2
  • A typical sequence of events to shape an SiO2 thin film on the top surface of a wafer followed by an SiO2 CVD encapsulation process as depicted in FIGS. 2 a, 2 b and 2 c is described below with reference to FIGS. 3 and 5:
  • 1. A well-centered wafer, 10, is placed on the vacuum wafer platen, 16.
  • 2. The vacuum wafer platen is moved in X, Y and Z axes such that the wafer is centered within the slot, 22, and the edge portion of the wafer is located immediately adjacent to diluent/quenching gas supply channels 19 t and 19 b.
  • 3. Diluent/quenching gas flow rate setpoints are sent to the mass flow controllers (MFC) 25 t and 25 b and the diluent/quenching gas shutoff valves 26 t and 26 b are commanded to open. Gas begins to flow down diluent/quenching gas supply channels 19 t and 19 b and impinges on the edge of the wafer 10.
  • 4. Fine exhaust channel conductance control valve, 21 t, is commanded open to a predefined position. (Conductance control valve 21 b is not opened. This allows the diluent/quenching gas flow from channel 19 b to protect the backside of the wafer 10 from unwanted diffusion of reactive gases).
  • 5. Process gas flow rate setpoints are sent to the process input gas MFCs (not shown) and process input gas shutoff valve 27 t is commanded to open. Process input gases He, O2 and CF4 begin to flow through channel 30 t.
  • 6. The conductance control valve 24 of housing exhaust plenum 23 is commanded to a pre-defined position.
  • 7. A forward power setpoint is sent to the RF power supply 29 t and the RF power is commanded on. A plasma is formed inside the plasma source 17 t and reactive gases begin to flow through channel 30 t into the housing exhaust plenum 23 and out through the conductance control valve 24 to the exhaust system (not shown).
  • 8. The impedance matching network, 28 t, tunes the load impedance to match the output impedance of the RF power supply 29 t. The control system (not shown) compares the magnitude of the power reflected back to power supply 29 t to a pre-defined threshold value. The control system (not shown) decides to halt the process or continue based upon the reflected power comparison. A successful comparison signifies formation of a stable plasma inside plasma source 17 t.
  • 9. Assuming the decision is to continue, the vacuum wafer platen 16 is commanded to begin rotating at a predefined angular velocity.
  • 10. The vacuum wafer platen 16 is commanded to move in the X, Y and Z axes, positioning the edge surfaces into the reactive gas stream flowing from reactive gas channel 30 t.
  • 11. The shaping of the thin films is controlled by the dynamics of the vacuum wafer platen's, 16, motion as follows:
  • 12. Referring to FIGS. 2, 3 and 5, from the starting position the wafer 10 is moved in the positive X direction in a smoothly accelerating motion. As the edge of the wafer moves beneath reactive gas channel 30 t the SiO2 thin film fragment begins to react with the atomic fluorine in the reactive gas flow to produce a volatile by-product according to the following chemical equation:
    SiO2+F4→SiF4+O2
    As the process effluent, SiF4+O2 is produced, the exhaust plenum 23 directs the effluent flow towards the exhaust system (not shown) under control of the conductance control valve 24. Continued movement of the wafer in the positive X axis brings the main portion of the coating 11 into contact with the reactive gas flowing through channel 30 t and the above chemical reaction proceeds to remove a portion of coating 11. When the preprogrammed edge exclusion limit is reached the vacuum wafer platen 16 is commanded to reverse direction and move in a smoothly decelerating motion until it it arrives back at its starting position. The described motion will yield an SiO2 removal profile that, when applied to the thin film shape 11 and 12 depicted in FIG. 2 a, will result in the thin film shape 11 depicted in FIG. 2 b.
  • 13. Once the thin film removal shaping is complete the RF power supply 29 t is commanded off.
  • 14. The process input gas shutoff valve 27 t is closed.
  • 15. The diluent/quenching gas shutoff valves 26 t and 26 b are closed.
  • 16. The diluent/quenching gas supply channel conductance control valve 21 t is closed.
  • 17. The housing exhaust plenum's conductance control valve 24 is closed.
  • Depending on the application, certain metal films may have become exposed during the oxide removal step. To prevent these metal films from flaking, an encapsulating SiO2 thin film 15 can be deposited as follows:
      • 18. Referring to FIGS. 6 and 7, diluent/quenching gas flow rate setpoints are sent to the mass flow controllers (MFC) 25 t″ and 25 b″ and the diluent/quenching gas shutoff valves 26 t″ and 26 b″ are commanded to open. Gas begins to flow down diluent/quenching gas supply channels 19 t″ and 19 b″ and impinges on the edge of the wafer 10.
  • 19. Fine exhaust channel conductance control valve 21 t″ is commanded open to a predefined position. (Conductance control valve 21 b″ is not opened. This allows the diluent/quenching gas flow from channel 19 b″ to protect the backside of the wafer 10 from unwanted diffusion of reactive gases).
  • 20. Process gas flow rate setpoints are sent to the process input gas MFCs (not shown) and process input gas shutoff valve 27 t″ is commanded to open. Process input gases He, TEOS and O3 begin to flow through channel 30 t″.
  • 21. The conductance control valve 24″ of the housing exhaust plenum 23 is commanded to a pre-defined position.
  • 22. A forward power setpoint is sent to the RF power supply 29 t″ and the RF power is commanded on. A plasma is formed inside the plasma source 17 t″ and reactive gases begin to flow through channel 30 t″ into the housing exhaust plenum 23 and out through the conductance control valve 24″ to the exhaust system (not shown).
  • 23. The impedance matching network 28 t″ tunes the load impedance to match the output impedance of the RF power supply 29 t″. The control system (not shown) compares the magnitude of the power reflected back to power supply 29 t″ to a pre-defined threshold value. The control system (not shown) decides to halt the process or continue based upon the reflected power comparison. A successful comparison signifies formation of a stable plasma inside plasma source 17 t″.
  • 24. Assuming the decision is to continue, the vacuum wafer platen 16 is commanded to begin rotating at a predefined angular velocity.
  • 25. The vacuum wafer platen 16 is commanded to move in the X, Y and Z axes, positioning the edge surfaces into the reactive gas stream flowing from reactive gas channel 30 t″.
  • 26. The shaping of the thin film deposition is controlled by the dynamics of the motion of the vacuum wafer platen 16 as follows:
  • 27. From the starting position the wafer 10 is moved in the X and Y direction such that the net direction vector is pointing in the direction of the plasma source 17 t″. A smoothly accelerating motion is employed. As the edge of the wafer moves beneath reactive gas channel 30 t″ the SiO2 thin film begins to deposit on the wafer, 10, surface according to the following chemical equation:
    Si(OC2H5)+8O3→SiO2+10H2O+8CO2
  • As the process effluent, 10H2O+8CO2, is produced, the exhaust plenum 23 directs the flow towards the exhaust system (not shown) under control of the conductance control valve 24″. Continued movement of the wafer brings more of the previously etched thin film 11 into contact with the reactive gas flow and the above chemical reaction continues depositing the thin film 15. When the pre-programmed edge exclusion limit is reached the vacuum wafer platen 16 is commanded to reverse direction and move in a smoothly decelerating motion until it arrives back at its starting position. The described motion will yield an SiO2 thin film deposition profile that, when applied to the thin film shape 11 depicted in FIG. 2 b, will result in the deposited thin film shape 15 depicted in FIG. 2 c.
  • 28. Once the thin film deposition shaping is complete the RF power supply 29 t″ is commanded off.
  • 29. The process input gas shutoff valve 27 t″ is closed.
  • 30. The diluent/quenching gas shutoff valves 26 t″ and 26 b″ are closed.
  • 31. The diluent/quenching gas supply channel conductance control valve 21 t″ is closed.
      • 32. The housing exhaust plenum's conductance control valve 24″ is closed.
  • 33. With the processing sequence complete, the wafer 10 can be removed from the vacuum wafer platen 16.
  • The shape of the etched surface can be nearly anything. The limiting factors are the spatial frequency capabilities of the reactive gas footprint shape and the servo system dynamic response. Other shapes of interest might include convex or concave shapes or shapes that intersect the wafer top surface plane further in from the edge.
  • The protective thin film 15 may be of any suitable thickness. Typically, the film 15 is thin enough such that none of the layer of film 15 extends above the plane of the remaining film 11 and thick enough to be mechanically strong enough to weather the stresses exerted by the film 11 the protective film 15 is covering. For example, a thickness of 0.1 to 0.3 um should be sufficient. The thickness of the layer of film 15 may also be varied in the same way the etching process profile is varied, via a spatial variation of the reactive gas footprint dwell time.
  • The invention thus provides an apparatus and method of shaping thin films in the regions of in-process semiconductor substrates that are economical and relatively simple and efficient.
  • The invention also provides a method that allows flakes to be readily removed from a semiconductor substrate and the edge region of the processed substrate to be contoured to a desired shape.
  • The description of the invention is merely exemplary in nature and, thus, variations that do not depart from the gist of the invention are intended to be within the scope of the invention. Such variations are not to be regarded as a departure from the spirit and scope of the invention.

Claims (21)

1. A method of processing a thin film on an edge of a substrate comprising the steps of:
mounting a substrate having a thin film thereon on a rotatable chuck;
directing a flow of reactive species through a channel in a housing angled towards the edge of the substrate; and
rotating the substrate relative to the flow of reactive species to process the thin film on the edge of the substrate.
2. The method of claim 1 wherein the channel is angled towards the edge of the substrate between greater than a vertical position and less than a horizontal position in relation to a top surface of the substrate.
3. The method of claim 1 further comprising the steps of:
directing a flow of diluent/quenching gas onto the substrate in a radially outward direction.
4. The method of claim 3 further comprising the steps of:
exhausting the flow of diluent/quenching gas from the substrate downstream of the flow of diluent/quenching gas.
5. The method of claim 1 further comprising the steps of:
directing a flow of diluent/quenching gas onto the substrate in a radially outward direction.
6. The method of claim 1 further comprising the steps of:
moving the substrate in a rectilinear direction relative to the flow of the reactive species to remove material from a thin film on the substrate while shaping the thin film to a predetermined shape.
7. The method of claim 1 wherein the reactive species comprises fluorine.
8. The method of claim 1 further comprising the steps of:
directing a flow of a second reactive species through a second channel in the housing angled towards the edge of the substrate for depositing a new thin film on the substrate.
9. The method of claim 8 further comprising the steps of:
directing a second flow of diluent/quenching gas onto the substrate in a radially outward direction.
10. The method of claim 1 further comprising the steps of:
directing a flow of a second reactive species through a second channel in the housing angled towards the edge of the substrate for depositing a new thin film on the substrate, wherein the second channel is co-radial with the channel, wherein the second channel is angled towards the edge of the substrate between greater than a vertical position and less than a horizontal position in relation to a top surface of the substrate; and
directing a second flow of diluent/quenching gas onto the substrate in a radially outward direction.
11. The method of claim 10 wherein the new thin film has a thickness in the range of from 0.1 to 0.3 μm.
12. The method of claim 1 further comprising the steps of:
collecting the reactive species in a plenum located about the edge of the substrate and exhausting the reactive species from said plenum.
13. The method of claim 1 further comprising the steps of:
generating the reactive species from a plasma source.
14. The method of claim 1 further comprising the steps of:
generating the reactive species from an atmospheric-pressure plasma jet.
15. The method of claim 1 wherein the thin film is a silicon dioxide.
16. A method for processing a substrate comprising:
providing a housing having a plurality of channels for directing a flow of reactive species towards an edge of a substrate wherein the channels are radially angled in a direction towards the edge of the substrate;
flowing gases through at least one of the channels towards the edge of the substrate; and
exhausting exhaust gases downstream from the at least one of the channels.
17. A method of shaping a thin film on a wafer comprising the steps of mounting a wafer having a thin film thereon on a rotatable chuck;
directing a flow of diluent/quenching gas onto the wafer in a radially outward direction;
exhausting the flow of diluent/quenching gas from the wafer downstream of the flow of diluent/quenching gas;
directing a flow of reactive gases towards the wafer radially outward of the diluent/quenching gas to react with the wafer; and
rotating the wafer relative to the flow of reactive gas to deposit a thin protective film of material on the edge of the wafer.
18. A method as set forth in claim 17 wherein the thin protective film has a thickness in the range of from 0.1 to 0.3 μm.
19. A method of processing a wafer comprising the steps of:
rotating the wafer;
directing a flow of a first reactive species radially outward towards an edge of the wafer for etching the edge, wherein the first reactive species are directed through a first channel angled towards the edge; and
directing a flow of a second reactive species radially outward towards the edge of the wafer for deposition of a material on the edge, wherein the second reactive species are directed through a second channel angled towards the edge.
20. The method of claim 19 further comprising the steps of:
flowing a diluent/quenching gas radially outward towards the edge for preventing movement of the first reactive species radially inward, wherein the diluent/quenching gas originates from within the radial origin of the flow of the first reactive species.
21. The method of claim 19 further comprising the steps of:
providing a plurality of channels for directing the first reactive species towards near-edge, top bevel, crown, and bottom bevel of the wafer.
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US11/825,671 US20080017316A1 (en) 2002-04-26 2007-07-06 Clean ignition system for wafer substrate processing
US11/825,669 US20080011421A1 (en) 2002-04-26 2007-07-06 Processing chamber having labyrinth seal
US11/825,676 US20080011332A1 (en) 2002-04-26 2007-07-06 Method and apparatus for cleaning a wafer substrate
US11/825,659 US20080190558A1 (en) 2002-04-26 2007-07-06 Wafer processing apparatus and method
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US11/825,671 Continuation-In-Part US20080017316A1 (en) 2002-04-26 2007-07-06 Clean ignition system for wafer substrate processing
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US11/825,670 Continuation-In-Part US20080010845A1 (en) 2002-04-26 2007-07-06 Apparatus for cleaning a wafer substrate
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