US20040025598A1 - Integrated fluid sensing device - Google Patents

Integrated fluid sensing device Download PDF

Info

Publication number
US20040025598A1
US20040025598A1 US10/634,606 US63460603A US2004025598A1 US 20040025598 A1 US20040025598 A1 US 20040025598A1 US 63460603 A US63460603 A US 63460603A US 2004025598 A1 US2004025598 A1 US 2004025598A1
Authority
US
United States
Prior art keywords
paddle
fluid
flow
strain gauges
support member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US10/634,606
Inventor
Karl-Heinz Forster
Frank Langro
Frank Latino
Josef Binder
Wolfgang Benecke
Thomas Starz
Oliver Ahrens
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Festo SE and Co KG
Original Assignee
Festo SE and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/666,990 external-priority patent/US6619142B1/en
Application filed by Festo SE and Co KG filed Critical Festo SE and Co KG
Priority to US10/634,606 priority Critical patent/US20040025598A1/en
Assigned to FESTO AG & CO. reassignment FESTO AG & CO. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: FORSTER, KARL-HEINZ, STARZ, THOMAS, BENECKE, WOLFGANG, AHRENS, OLIVER, BINDER, JOSEF, LANGRO, FRANK J., LATINO, FRANK
Publication of US20040025598A1 publication Critical patent/US20040025598A1/en
Priority to DE200410036084 priority patent/DE102004036084A1/en
Priority to US11/034,703 priority patent/US6971272B2/en
Abandoned legal-status Critical Current

Links

Images

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6842Structural arrangements; Mounting of elements, e.g. in relation to fluid flow with means for influencing the fluid flow
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15BSYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/06Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
    • F15B13/08Assemblies of units, each for the control of a single servomotor only
    • F15B13/0803Modular units
    • F15B13/0807Manifolds
    • F15B13/0814Monoblock manifolds
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15BSYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/06Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
    • F15B13/08Assemblies of units, each for the control of a single servomotor only
    • F15B13/0803Modular units
    • F15B13/0846Electrical details
    • F15B13/0857Electrical connecting means, e.g. plugs, sockets
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15BSYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/06Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
    • F15B13/08Assemblies of units, each for the control of a single servomotor only
    • F15B13/0803Modular units
    • F15B13/0846Electrical details
    • F15B13/086Sensing means, e.g. pressure sensors
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/20Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by detection of dynamic effects of the flow
    • G01F1/28Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by detection of dynamic effects of the flow by drag-force, e.g. vane type or impact flowmeter
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G01F15/14Casings, e.g. of special material
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G01F15/18Supports or connecting means for meters
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F5/00Measuring a proportion of the volume flow
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/04Measuring force or stress, in general by measuring elastic deformation of gauges, e.g. of springs
    • G01L1/044Measuring force or stress, in general by measuring elastic deformation of gauges, e.g. of springs of leaf springs
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/26Auxiliary measures taken, or devices used, in connection with the measurement of force, e.g. for preventing influence of transverse components of force, for preventing overload
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05DSYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00Control of flow
    • G05D7/06Control of flow characterised by the use of electric means
    • G05D7/0617Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • G05D7/0641Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means
    • G05D7/0652Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means the plurality of throttling means being arranged in parallel
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15BSYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/06Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
    • F15B13/08Assemblies of units, each for the control of a single servomotor only
    • F15B13/0803Modular units
    • F15B13/0832Modular valves
    • F15B13/0839Stacked plate type valves
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15BSYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/06Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
    • F15B13/08Assemblies of units, each for the control of a single servomotor only
    • F15B13/0803Modular units
    • F15B13/0846Electrical details
    • F15B13/0853Electric circuit boards
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00Fluid handling
    • Y10T137/7722Line condition change responsive valves
    • Y10T137/7758Pilot or servo controlled
    • Y10T137/7761Electrically actuated valve
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00Fluid handling
    • Y10T137/8593Systems
    • Y10T137/877With flow control means for branched passages
    • Y10T137/87885Sectional block structure

Definitions

  • This invention relates generally to pneumatic and hydraulic equipment, and more particularly to the measurement of physical characteristics, such as flow rate, pressure, and temperature of a fluid used to control these devices.
  • a fluid flow device such as a valve manifold 10 and its corresponding base plate 12 shown in FIG. 1, is used to accurately direct fluids used to control pneumatic and/or hydraulic equipment.
  • Fluid flow devices and other control devices are disclosed in U.S. Pat. Nos. 5,348,047 to Stoll, et al. and 5,458,048 to Hohner, which are incorporated herein by reference.
  • the term “fluid” is generically used herein to refer to any gas, liquid, suspension, and/or slurry used as a control medium in such equipment.
  • the base plate 12 is mounted to a bottom surface of the valve manifold 10 , as shown by dashed lines in FIG. 1.
  • the base plate 12 includes channels 16 , which pass through the base plate 12 and coincide with apertures on the underside of the fluid flow device 10 .
  • a fitting 14 is fitted to one end of each of the channels 16 .
  • the fittings 14 can readily be connected to tubes that direct the fluid to and/or from the valve manifold 10 .
  • the channels 16 then direct the fluid through the base plate 12 to the appropriate aperture in the valve manifold 10 .
  • the valve manifold 10 can then redirect or modify the flow of fluid in response to electronic control.
  • another function that may be performed is the measurement of fluid characteristics, such as flow rate, pressure, and temperature.
  • an integrated fluid sensing device which includes a fluid flow device and a circuit board.
  • the fluid flow device includes a first mating portion and a second mating portion.
  • the first mating portion includes a first aperture
  • the second mating portion includes a second aperture.
  • the first aperture and the second aperture are at least partially aligned such that the first aperture and the second aperture define a first channel through the first and second mating portions when the first and second mating portions are joined together.
  • the first channel is able to communicate fluid therethrough.
  • the circuit board is disposed between the first mating portion and the second mating portion and includes at least one sensor. The sensor is at least partially aligned with the first channel and is able to detect a physical characteristic of the fluid flowing through the first channel.
  • a method of integrating a sensor in a fluid flow device includes the steps of dividing the fluid flow device into a first mating portion and a second mating portion, and positioning a circuit board between the first mating portion and the second mating portion.
  • the first mating portion including a first aperture
  • the second mating portion including a second aperture.
  • the first aperture and the second aperture are at least partially aligned such that the first aperture and the second aperture define a first channel through the first and second portions when the first and second mating portions are joined together.
  • the first channel is able to communicate a fluid therethrough.
  • the circuit board includes at least one sensor, which is at least partially aligned with the first channel. The sensor is able to detect a physical characteristic of the fluid flowing through the first channel.
  • an integrated fluid sensing device which includes at least one valve, a base plate, and a circuit board.
  • the base plate is removably coupled to the valve and includes a first mating portion and a second mating portion.
  • the base plate includes a first channel through the first and second mating portions when the first and second mating portions are joined together.
  • the circuit board is disposed between the first mating portion and the second mating portion.
  • the circuit board includes at least one sensor and an electrical contact. The electrical contact is coupled to the sensor and is accessible to an exterior of the fluid flow device when the first and second portions are joined together.
  • the sensor is at least partially aligned with the first channel and is able to detect a physical characteristic of the fluid flowing through the first channel.
  • a flow sensor which includes a paddle and a support member.
  • the paddle is disposed at least partially in an orifice and is displaced in response to fluid flow.
  • the support member positions the paddle in the orifice and includes a plurality of strain gauges.
  • the strain gauges are disposed on only one side of the support member and are mechanically stressed in response to the paddle being displaced by the fluid flow.
  • a method of sensing flow includes the steps of disposing a paddle at least partially in an orifice, directing a fluid flow through the orifice, positioning the paddle in the orifice by a support member, and disposing the plurality of strain gauges on only one side of the support member.
  • the paddle is displaced in response to the fluid flow.
  • the support member includes a plurality of strain gauges and the plurality of strain gauges are mechanically stressed in response to the paddle being displaced by the fluid flow.
  • FIG. 1 is an isometric view of a conventional fluid control device including a valve manifold and a base plate.
  • FIGS. 2 a and 2 b are side views of a flow sensor.
  • FIG. 2 c is an isometric view of the flow sensor shown in FIGS. 2 a and 2 b.
  • FIG. 2 d is an isometric view of a conventional hot-wire anemometer.
  • FIGS. 3 a and 3 b are bottom and top views, respectively, of the conventional base plate shown in FIG. 1.
  • FIG. 3 c is a side, cross-sectional view of the base plate shown in FIG. 3 b taken along the line A-A′.
  • FIG. 4 a is a side, cross-sectional view of the base plate in which a circuit board has been inserted between an upper portion and a lower portion of a base plate in accordance with the present invention.
  • FIG. 4 b is a side, cross-sectional view of one channel in the base plate shown in FIG. 4 a.
  • FIG. 4 c is a top, cross-sectional view of the base plate shown in FIG. 4 b taken along the line Y-Y′.
  • FIG. 4 d is a side, cross-sectional view of one channel in an alternative embodiment of the base plate formed in accordance with the present invention.
  • FIGS. 4 e and 4 f are top, cross-sectional views of two embodiments of the base plate shown in FIG. 4 d taken along the line X-X′.
  • FIG. 4 g is a side, cross-sectional view of one channel in an alternative embodiment of the base plate formed in accordance with the present invention without a bypass channel directing flow around the sensor.
  • FIGS. 5 a and 5 b are partially-exploded, side, cross-sectional views of two embodiments of the base plate formed in accordance with the present invention.
  • FIG. 6 a is a top view of a circuit board.
  • FIG. 6 b is a side, cross-sectional view of the circuit board shown in FIG. 6 a taken along the line B-B′.
  • FIG. 6 c is an alternative embodiment of the circuit board shown in FIG. 6 a , which includes an application-specific integrated circuit (ASIC).
  • ASIC application-specific integrated circuit
  • FIG. 6 d is an alternative embodiment of the circuit board shown in FIG. 6 c , which includes a telemetric unit for wireless transmission of sensor data.
  • FIG. 7 a is a top view of a spacing layer.
  • FIG. 7 b is a side, cross-sectional view of the spacing layer shown in FIG. 7 a taken along the line C-C′.
  • FIG. 8 a is a top view of a sealing layer.
  • FIG. 8 b is a side, cross-sectional view of the sealing layer shown in FIG. 8 a taken along the line D-D′.
  • FIG. 9 is a side, cross-sectional view of the integrated fluid sensing device formed in accordance with the present invention.
  • FIG. 10 is an isometric cross-sectional view of a flow sensor formed in accordance with the present invention.
  • FIG. 11 is an enlarged cross-sectional view of a portion of the flow sensor shown in FIG. 10.
  • FIG. 12 is a magnified view of an actual layout of a support member for the flow sensor formed in accordance with the present invention.
  • FIGS. 2 a , 2 b , and 2 c One type of sensor 18 , which is used to measure the flow of liquid, is shown in FIGS. 2 a , 2 b , and 2 c .
  • the flow sensor 18 includes an orifice 20 , a cantilever paddle structure 22 , and an implanted piezo-resistive Wheatstone bridge 24 .
  • FIG. 2 a shows the paddle structure 22 in an undeflected state
  • FIG. 2 b shows the paddle structure 22 in a deflected state.
  • the fluid to be measured is directed through the orifice 20 in the flow sensor 18 .
  • the dynamic pressure built up by the fluid deflects the paddle structure 22 .
  • the mechanical stress of the paddle structure 22 changes the resistance of the piezo-resistive Wheatstone bridge 24 at the base of the paddle structure 22 , and this change in resistance creates a corresponding change in voltage.
  • the change in voltage is detected on a set of contacts 26 electrically connected to the Wheatstone bridge 24 , as shown in FIG. 2 c .
  • a second Wheatstone bridge is preferably positioned on the flow sensor 18 surrounding the orifice 20 .
  • a support member preferably positions the paddle structure 22 .
  • the size of the support member is preferably minimized to concentrate the mechanical stress of deflection, and thus increase the sensitivity of the flow sensor 18 .
  • the overall size of the flow sensor is determined by the paddle size, which can be adjusted to the specific needs of the control task.
  • the output voltage of the Wheatstone bridge 24 is proportional to the square of the volumetric flow rate.
  • the sensitivity of the flow sensor 18 is dependent upon the size of the orifice 20 , and is adjustable over a broad range.
  • the paddle structure 22 is perpendicularly oriented to the direction of flow of liquid, as liquid passes through the orifice 20 in the flow sensor 18 , the kinetic pressure of the liquid induces a mechanical stress that is detected by the piezo-resistors in the Wheatstone bridge 24 .
  • FIG. 3 a shows a bottom view of a multipole or base plate 12 .
  • Threaded holes 28 are provided in the base plate 12 to accommodate fittings 14 as shown in FIG. 1.
  • the fittings 14 enable tubes (not shown) to be connected to the base plate 12 .
  • the base plate 12 is preferably manufactured as a separate unit from the valve 10 shown in FIG. 1 so that the valve manifold 10 can be removed from the base plate 12 without disturbing the tubes connected to the base plate 12 .
  • FIG. 3 b shows a top view of the conventional base plate 12 including a line A-A′.
  • FIG. 3 c shows a side, cross-sectional view of the base plate 12 taken across the line A-A′.
  • the arrows K in FIG. 3 c indicate the flow of fluid through the channel in the base plate 12 .
  • the apertures in the top of the base plate 12 are preferably offset from the corresponding apertures in the bottom of the base plate 12 . This offset diverts the flow of fluid through the channel, which limits the pressure of the fluid as it comes in contact with components in the valve manifold 10 .
  • FIG. 4 a shows a side, cross-sectional view of the base plate 12 after it has been separated into an upper portion 12 A and a lower portion 12 B along a line X-X′ shown in FIG. 3 c .
  • a circuit board 30 which includes at least one sensor 18 , is inserted between the upper and lower portions of the base plate.
  • An arrow L indicates the flow of fluid through the channel and through the sensor 18 .
  • a bypass path L′ is preferably provided to divert the majority of flow around the sensor 18 .
  • the bypass path L′ reduces the flow through the sensor 18 , which protects sensitive components in the sensor 18 that are subject to wear and breakage. About 10-15% of the total flow of fluid is preferably allowed to pass through the sensor 18 . The remaining flow is diverted around the sensor 18 and through the bypass path L′.
  • FIG. 4 b shows a side, cross-sectional view of the base plate portions 12 A, 12 B and the circuit board 30 in which the bypass path L′ has been implemented around the sensor 18 .
  • FIG. 4 c is a top, cross-sectional view of the circuit board taken along cross-section line Y-Y′ showing an orifice 32 for the bypass path L′ and an orifice 34 , which allows the flow of fluid through the sensor 18 .
  • FIG. 4 d shows an alternative geometry for the channel in the base plate 12 having at least two (2) bypass paths L′.
  • FIGS. 4 f and 4 e show top, cross-sectional views of the circuit board 30 taken along cross-section line X-X′ shown in FIG. 4 d .
  • the circuit board 30 in FIG. 4 e accommodates six (6) bypass paths L′, and the circuit board 30 in FIG. 4 f accommodates eight (8) bypass paths L′.
  • the channel may be constructed without a bypass channel directing flow around the sensor 18 .
  • FIG. 4 g shows a side, cross-sectional view of the base plate portions 12 A, 12 B and the circuit board 30 in which a bypass path has not been implemented around the sensor 18 .
  • about 100% of the flow is directed through the sensor 18 .
  • FIG. 5A shows an alternative embodiment of the base plate, which incorporates four (4) layers between the upper portion 12 A and the lower portion 12 B of the base plate 12 .
  • An upper sealing layer 32 A and a lower sealing layer 32 B are preferably inserted above and below the circuit board 30 , respectively.
  • the sealing layers are preferably manufactured from a pliable and/or deformable material, such as rubber, which substantially prevents leakage of the fluid from the channel. Leakage is particularly prevalent between the hard surfaces of the circuit board 30 and the base plate 12 A.
  • a spacing layer 34 is preferably inserted above or below the circuit board 30 to protect the sensitive components and contacts on the circuit board 30 .
  • the spacing layer 34 may be separate from or integrated with the circuit board 30 .
  • one or more alignment holes 36 are preferably provided through each of the layers 30 , 32 , and 34 and partially through the upper portion 12 A and the lower portion 12 B of the base plate.
  • a guide pin (not shown) is preferably placed in each of the alignment holes, which ensures a preferably unique orientation of the layers 30 , 32 , and 34 with the portions of the base plate 12 A, 12 B as they are joined together.
  • One or more screw holes 38 are provided through the bottom portion 12 B of the base plate, each of the layers 30 , 32 , 34 , and partially through the upper portion 12 A of the base plate to accommodate a screw, which joins the portions of the base plate together and sandwiches the layers.
  • the screw maintains compression between the portions of the base plate, which aids in preventing leakage of fluid from the channel.
  • FIG. 5 b shows an alternative embodiment of the base plate 12 shown in FIG. 5 a , in which the screw hole 38 has been relocated nearer an external surface of the base plate.
  • FIG. 6 a shows the circuit board 30 with eight (8) sensors 18 .
  • Each of the sensors 18 is preferably positioned within a depression on the circuit board 30 and affixed to the circuit board 30 by an adhesive, surface mount technology (SMD), wire bond technology, flip-chip technology, or the like.
  • the sensor 18 is preferably connected to bond pads 40 , which are coupled to electrically conductive traces 42 on the circuit board 30 .
  • the traces 42 are brought to the edge of the board, which is preferably accessible from the outside of the base plate 12 when the upper portion 12 A and the lower portion 12 B of the base plate 12 are joined together.
  • the sensors 18 are advantageously encapsulated within and electrically accessible outside the integrated fluid sensing device formed in accordance with the present invention.
  • the fragile components of the sensor 18 are inherently protected from shock, humidity, dust, corrosive chemicals, and other environmental hazards.
  • FIG. 6 b is a side, cross-sectional view of the circuit board 30 taken along the line B-B′, which shows the alignment holes 36 , screw hole 38 and sensor 18 .
  • FIG. 6 c shows an alternative embodiment of the circuit board 30 shown in FIG. 6 a , which includes a microprocessor, a microcontroller, or an application-specific integrated circuit (ASIC) 44 .
  • the ASIC 44 monitors and processes signals from each of the sensors 18 and outputs the processed information externally to the base plate 12 .
  • the ASIC 44 may include circuitry that enables it to interface to Fieldbus compatible components and controllers.
  • Fieldbus is a commercial standard describing a digital, serial, multi-drop, two-way communication link, which interconnects measurement and control equipment such as sensors, actuators, and controllers. It serves as a Local Area Network (LAN) for instruments used in process control and manufacturing automation applications and has a built-in capability to distribute the control application across the network.
  • LAN Local Area Network
  • FIG. 6 d shows an alternative embodiment of the circuit board 30 shown in FIG. 6C, in which, in addition to the ASIC 44 , a telemetric unit 46 is provided for the wireless transmission of information processed by the ASIC 44 .
  • the telemetric unit 46 preferably inputs a signal from each of the sensors 18 , which is representative of the sensed physical characteristic and outputs a wireless signal, such as a radio frequency or infrared signal.
  • FIG. 7 a shows a top view of the spacing layer 34 , which is also shown in FIGS. 5 a and 5 b .
  • the spacing layer 34 is preferably used to protect the sensitive components of the sensor 18 and the bond pads 40 , which electrically connect the sensor 18 to the edge of the circuit board 30 .
  • the spacing layer 34 is preferably sealed by an appropriate choice of pliable material deposited on the spacing layer 34 or by inserting an additional sealing layer between the spacing layer 34 and the circuit board 30 .
  • Bumps and/or recesses may be integrated onto the spacing layer 34 to further protect corresponding sensors 18 and bond pads 40 on the circuit board 30 .
  • the bumps or recesses may alternatively be incorporated on the circuit board 30 without requiring a separate spacing layer 34 .
  • FIG. 7 b is a side, cross-sectional view of the spacing layer 34 taken along line C-C′, which shows the alignment holes 36 , the screw hole 38 , and an aperture 48 for the sensor 18 .
  • FIG. 8 a shows the sealing layer 32 , which prevents leakage from the channel to the exterior of the base plate 12 .
  • the functionality of the sealing layer 32 could alternatively be incorporated into the circuit board 30 by applying, for instance, independent seals around each of the orifices in the circuit board 30 .
  • FIG. 8 b is a side, cross-sectional view of the sealing layer 32 taken across the line D-D′, which shows the alignment holes 36 , the screw hole 38 , and the aperture 38 for the sensor 18 .
  • FIG. 9 shows the integrated fluid flow device formed in accordance with the present invention.
  • the circuit board 30 which includes one or more sensors 18 is sandwiched between the upper portion 12 A and the lower portion 12 B of the base plate.
  • the primary flow of fluid within the channel is indicated by arrow L, which is preferably diverted around the sensor 18 through the bypass path L′.
  • a small portion L′′ of the primary flow L flows through the sensor 18 and continues through the channel into the upper portion 12 A of the base plate.
  • pneumatic components such as pneumatically actuated cylinders or valves.
  • the integrated fluid sensing device of the present invention can be implemented with any quantity of valves or manifolds used to control hydraulic and/or pneumatic equipment. It is also anticipated that the sensor can measure any conceivable physical characteristic of the fluid, such as temperature, flow rate, pressure, and the like. It is further anticipated that the sensor can be implemented as alternative types of transducers, such as a magnetic flowmeter, hot-wire anemometer, bimetallic strip, thermocouple, pressure cell, or pressure transducer. Additional details concerning transducers can be found in S. Wolf, “Guide to Electronic Measurements and Laboratory Practice”, Prentice-Hall, Inc., pp. 414-451, (1973), which is incorporated herein by reference.
  • the hot-wire anemometer 19 is shown in FIG. 2 d and includes a fine resistive wire 21 , which is heated by a current passing through it. If a cooler fluid flows past the wire 21 , the fluid removes heat from the wire 21 . The rate of heat transfer varies with the type of fluid, but it also tends to vary as the square root of the velocity at which the fluid flows past the wire 21 . If the current in the wire 21 is kept constant, the change in resistance due to the cooling will yield a voltage signal, which can be monitored to indicate flow rate. Since the diameter of the wire 21 can be made very small, the anemometer 19 can be made very sensitive and responsive to high-frequency changes in the flow rate.
  • a flow sensor 50 formed in accordance with the present invention, which is used to measure the flow of fluid is shown in FIG. 10.
  • the paddle 54 is preferably mechanically coupled to that portion 58 of the flow sensor 50 surrounding an aperture or orifice 52 by a bender or support member 56 .
  • the support member 56 preferably positions the paddle 54 in the orifice 52 and includes an implanted piezo-resistive full Wheatstone bridge 70 .
  • the overall length and width of the flow sensor in the preferred embodiment, as indicated by dimension B, is approximately 5 mm.
  • the flow sensor 50 preferably includes a paddle 54 at least partially disposed in the orifice 52 .
  • the length and width of the orifice 52 of the preferred embodiment, as indicated by dimension A, is approximately 1 mm.
  • the width of the support member 56 in the preferred embodiment is preferably about 100 ⁇ m, as indicated by dimension D in FIG. 12, which shows a magnified view of an actual layout of the support member 56 .
  • Each of the dimensions in the preferred embodiment of the flow sensor may be adjusted based upon design choice and/or sensor specifications while remaining within the scope of the present invention.
  • the surface area of the support member 56 is preferably less than that of the paddle 54 to concentrate the mechanical stress of deflection on the support member 56 , and thus increase the sensitivity of the flow sensor 50 .
  • the overall size of the flow sensor 50 is preferably determined by the surface area of the paddle 54 , which is adjustable in accordance with the needs and or sensitivity required for the specific control task.
  • the fluid to be measured is preferably directed through the orifice 52 in the flow sensor 50 .
  • the dynamic pressure provided by the fluid preferably deflects the paddle 54 , which places mechanical stress on the support member 56 .
  • the mechanical stress on the support member 56 changes the resistance of piezo-resistive stress gauges 72 , 74 , 76 , and 78 coupled by ohmic contacts or conductors 62 , 64 , 66 , and 68 in a Wheatstone bridge 70 disposed on the support member 56 .
  • This change in resistance creates a corresponding change in voltage, which is preferably provided on one or more electrical contacts or doped regions 60 coupled to the conductors 62 , 64 , 66 , and 68 , which are shown in greater detail in the exploded view of the support member 56 in FIG. 11.
  • the strain gauges 72 and 76 are preferably subjected to transverse stress in response to deflection of the paddle 54 .
  • the strain gauges 74 and 78 are preferably subjected to longitudinal stress in response to deflection of the paddle 54 .
  • the output voltage of the Wheatstone bridge 70 is preferably proportional to the square of the volumetric flow rate.
  • the sensitivity of the flow sensor 50 depends on the size of the orifice 52 and the size or surface area of the paddle 54 , both of which are adjustable over a broad range.
  • the paddle 54 is preferably perpendicularly oriented to the direction of fluid flow, which is indicated by arrow C in FIGS. 10 and 11 , as fluid passes through the orifice, the kinetic pressure of the fluid induces a mechanical stress on the support member 56 .
  • This mechanical stress is preferably detected by the piezo-resistive stress gauges or resistors 72 , 74 , 76 , and 78 in the Wheatstone bridge 70 .
  • the stress gauges 72 , 74 , 76 , and 78 are preferably exclusively disposed on the support member 56 .
  • the paddle 54 is preferably used exclusively for its mechanical resistance to fluid flow without any passive or active electronic components disposed thereon.
  • the flow sensor 50 formed in accordance with a preferred embodiment of the present invention is preferably a two-part flow sensor including a standardized support member 56 , which can be generically used for all such flow sensors, and a customizable paddle 54 , which may be dimensionally tailored to the sensitivity requirements of a specific application without substantially changing the overall manufacturing process of the flow sensor 50 .
  • the flow sensor 50 formed in accordance with the present invention preferably includes a full Wheatstone bridge to achieve optimal signal output and sensitivity, both positive and negative deflections must be detected by the strain gauges 72 , 74 , 76 , and 78 .
  • Wire or foil strain gauges merely exhibit sensitivity to longitudinal stress, and thus must be disposed on both the front and rear faces of the stressed component to detect the positive and negative deflections required by the full Wheatstone bridge.
  • piezo-resistive stress gauges 72 , 74 , 76 , and 78 in the flow sensor 50 formed in accordance with the present invention which are able to detect both longitudinal and transverse stress, enable the full Wheatstone bridge 70 to be disposed on only one side of the support member 56 , which significantly simplifies and reduces the cost of manufacturing the flow sensor 50 in accordance with the present invention.
  • the integrated fluid sensing device formed in accordance with the present invention significantly reduces measurement errors, space requirements, external tubing, connectors, fittings, and the cost of installation and maintenance of sensors that measure the physical characteristics of a fluid used to control hydraulic or pneumatic equipment. It will also be appreciated that the integrated fluid sensing device of the present invention enables sensors to be mounted on a single circuit board having common signal processing, communication, error control, and connective circuitry.
  • the integrated fluid sensing device formed in accordance with the present invention is able to readily display and transmit data, which represents physical characteristics of the fluid used to control hydraulic and pneumatic equipment. It will also be appreciated that the integrated fluid sensing device formed in accordance with the present invention substantially encloses sensors that measure the physical characteristics of the fluid and protects these sensors from environmental hazards.
  • the flow sensor formed in accordance with the present invention can readily be adapted to different flow rates without substantial change or additional cost in the manufacturing process. It will also be appreciated that the flow sensor includes a generic or standardized support member having one or more strain gauges disposed on only one side of the support member and a customizable paddle displaced by fluid flow, which does not include a strain gauge.

Abstract

A circuit board, which includes one or more sensors, is integrated in a fluid control device, such as a valve manifold and a base plate. The fluid control device selectively directs a fluid used to control pneumatic or hydraulic equipment. The sensors are used to measure physical characteristics of the fluid, such as flow rate, pressure, and temperature. A flow sensor includes a paddle and a support member. The paddle is disposed at least partially in an orifice and is displaced in response to fluid flow. The support member positions the paddle in the orifice and includes a plurality of strain gauges. The strain gauges are disposed on only one side of the support member and are mechanically stressed in response to the paddle being displaced by the fluid flow.

Description

    CROSS-REFERENCE TO RELATED APPLICATION
  • This application is a continuation-in-part of U.S. patent application Ser. No. 09/666,990 filed Sep. 21, 2000, the disclosure of which is incorporated herein by reference.[0001]
  • BACKGROUND OF THE INVENTION
  • 1. Field of the Invention [0002]
  • This invention relates generally to pneumatic and hydraulic equipment, and more particularly to the measurement of physical characteristics, such as flow rate, pressure, and temperature of a fluid used to control these devices. [0003]
  • 2. Description of the Prior Art [0004]
  • A fluid flow device, such as a [0005] valve manifold 10 and its corresponding base plate 12 shown in FIG. 1, is used to accurately direct fluids used to control pneumatic and/or hydraulic equipment. Fluid flow devices and other control devices are disclosed in U.S. Pat. Nos. 5,348,047 to Stoll, et al. and 5,458,048 to Hohner, which are incorporated herein by reference. The term “fluid” is generically used herein to refer to any gas, liquid, suspension, and/or slurry used as a control medium in such equipment.
  • The [0006] base plate 12 is mounted to a bottom surface of the valve manifold 10, as shown by dashed lines in FIG. 1. The base plate 12 includes channels 16, which pass through the base plate 12 and coincide with apertures on the underside of the fluid flow device 10. A fitting 14 is fitted to one end of each of the channels 16. The fittings 14 can readily be connected to tubes that direct the fluid to and/or from the valve manifold 10. The channels 16 then direct the fluid through the base plate 12 to the appropriate aperture in the valve manifold 10. The valve manifold 10 can then redirect or modify the flow of fluid in response to electronic control. In addition to directing the flow of fluid, another function that may be performed is the measurement of fluid characteristics, such as flow rate, pressure, and temperature.
  • To incorporate the flow sensor shown in FIGS. 2[0007] a, 2 b, and 2 c in conventional fluid flow devices, additional tubing, fittings, and connectors must be spliced into the network of tubes coupling the base plate 12 to and from the source of the fluid and portions of the equipment to be controlled. The additional tubes, fittings, and connectors increase measurement error, space requirements, and the cost of installing and maintaining the equipment. In addition, the electronics that monitor the sensors require a substantial amount of additional wiring, which adds to the clutter of the resulting system and severely degrades its reliability. Further, the sensors and associated electronics, by being externally located to the fluid flow device, are inherently unprotected from environmental hazards, such as shock, dust, and pollutants, which are common in and around hydraulic and/or pneumatic equipment.
  • U.S. Pat. No. 3,424,000 to Chelner et al. (Chelner) describes a flow sensor, which includes four (4) strain gauges mounted on both the front and rear sides of a wafer. The wafer is deflected in response to fluid flow and provides a substrate for mounting strain gauges, electrical conductors, and contacts. [0008]
  • However, to modify the sensitivity of the Chelner flow sensor, the substrate for the electrical components must be modified, which has a significant impact on the deposition of electrical components thereon, and thus the overall manufacturing and standardization process. In addition, the double-sided placement of strain gauges on the wafer substantially complicates and adds to the cost of passivation and production of such flow sensors. [0009]
  • OBJECTS AND SUMMARY OF THE INVENTION
  • It is an object of the present invention to provide an integrated fluid sensing device, which significantly reduces measurement errors, space requirements, and the cost of installing and maintaining sensors that measure the physical characteristics of a fluid used to control hydraulic or pneumatic equipment. [0010]
  • It is a further object of the present invention to provide an integrated fluid sensing device, which includes sensors mounted on a single circuit board having common signal processing, communication, error control, and connecting circuitry. [0011]
  • It is still a further object of the present invention to provide an integrated fluid sensing device, which can readily be adapted to various physical characteristics of a fluid used to control hydraulic or pneumatic equipment by changing a single circuit board. [0012]
  • It is yet a further object of the present invention to provide an integrated fluid sensing device, which can readily display and transmit sensed data, via wired or wireless means, which represents physical characteristics of a fluid used to control hydraulic or pneumatic equipment. [0013]
  • It is still another object of the present invention to provide an integrated fluid sensing device that significantly reduces the amount of external tubing, connectors, and fittings required to sense the physical characteristics of a fluid used in the control of hydraulic or pneumatic equipment. [0014]
  • It is yet another object of the present invention to provide an integrated fluid sensing device, which substantially encloses sensors that measure the physical characteristics of a fluid and protects these sensors against environmental hazards. [0015]
  • It is another object of the present invention to provide a flow sensor, which can readily be adapted to different flow rates without any substantial change or additional cost in the manufacturing process. [0016]
  • It is yet another object of the present invention to provide a flow sensor, in which a generic support member includes one or more strain gauges. [0017]
  • It is still another object of the present invention to provide a flow sensor, in which a paddle that is displaced by fluid flow does not include a strain gauge. [0018]
  • It is a further object of the present invention to provide a flow sensor, in which a support member includes strain gauges on only one side of the of the support member. [0019]
  • In accordance with the present invention, an integrated fluid sensing device is provided, which includes a fluid flow device and a circuit board. The fluid flow device includes a first mating portion and a second mating portion. The first mating portion includes a first aperture, and the second mating portion includes a second aperture. The first aperture and the second aperture are at least partially aligned such that the first aperture and the second aperture define a first channel through the first and second mating portions when the first and second mating portions are joined together. The first channel is able to communicate fluid therethrough. The circuit board is disposed between the first mating portion and the second mating portion and includes at least one sensor. The sensor is at least partially aligned with the first channel and is able to detect a physical characteristic of the fluid flowing through the first channel. [0020]
  • In further accordance with the present invention, a method of integrating a sensor in a fluid flow device is provided, which includes the steps of dividing the fluid flow device into a first mating portion and a second mating portion, and positioning a circuit board between the first mating portion and the second mating portion. The first mating portion including a first aperture, and the second mating portion including a second aperture. The first aperture and the second aperture are at least partially aligned such that the first aperture and the second aperture define a first channel through the first and second portions when the first and second mating portions are joined together. The first channel is able to communicate a fluid therethrough. The circuit board includes at least one sensor, which is at least partially aligned with the first channel. The sensor is able to detect a physical characteristic of the fluid flowing through the first channel. [0021]
  • In still further accordance with the present invention an integrated fluid sensing device is provided, which includes at least one valve, a base plate, and a circuit board. The base plate is removably coupled to the valve and includes a first mating portion and a second mating portion. The base plate includes a first channel through the first and second mating portions when the first and second mating portions are joined together. The circuit board is disposed between the first mating portion and the second mating portion. The circuit board includes at least one sensor and an electrical contact. The electrical contact is coupled to the sensor and is accessible to an exterior of the fluid flow device when the first and second portions are joined together. The sensor is at least partially aligned with the first channel and is able to detect a physical characteristic of the fluid flowing through the first channel. [0022]
  • In yet further accordance with the present invention, a flow sensor is provided, which includes a paddle and a support member. The paddle is disposed at least partially in an orifice and is displaced in response to fluid flow. The support member positions the paddle in the orifice and includes a plurality of strain gauges. The strain gauges are disposed on only one side of the support member and are mechanically stressed in response to the paddle being displaced by the fluid flow. [0023]
  • In accordance with the present invention, a method of sensing flow is provided, which includes the steps of disposing a paddle at least partially in an orifice, directing a fluid flow through the orifice, positioning the paddle in the orifice by a support member, and disposing the plurality of strain gauges on only one side of the support member. The paddle is displaced in response to the fluid flow. The support member includes a plurality of strain gauges and the plurality of strain gauges are mechanically stressed in response to the paddle being displaced by the fluid flow. [0024]
  • These and other objects, features, and advantages of the present invention will become apparent from the following detailed description of illustrative embodiments thereof, which is to be read in connection with the accompanying drawings.[0025]
  • BRIEF DESCRIPTION OF THE DRAWINGS
  • FIG. 1 is an isometric view of a conventional fluid control device including a valve manifold and a base plate. [0026]
  • FIGS. 2[0027] a and 2 b are side views of a flow sensor.
  • FIG. 2[0028] c is an isometric view of the flow sensor shown in FIGS. 2a and 2 b.
  • FIG. 2[0029] d is an isometric view of a conventional hot-wire anemometer.
  • FIGS. 3[0030] a and 3 b are bottom and top views, respectively, of the conventional base plate shown in FIG. 1.
  • FIG. 3[0031] c is a side, cross-sectional view of the base plate shown in FIG. 3b taken along the line A-A′.
  • FIG. 4[0032] a is a side, cross-sectional view of the base plate in which a circuit board has been inserted between an upper portion and a lower portion of a base plate in accordance with the present invention.
  • FIG. 4[0033] b is a side, cross-sectional view of one channel in the base plate shown in FIG. 4a.
  • FIG. 4[0034] c is a top, cross-sectional view of the base plate shown in FIG. 4b taken along the line Y-Y′.
  • FIG. 4[0035] d is a side, cross-sectional view of one channel in an alternative embodiment of the base plate formed in accordance with the present invention.
  • FIGS. 4[0036] e and 4 f are top, cross-sectional views of two embodiments of the base plate shown in FIG. 4d taken along the line X-X′.
  • FIG. 4[0037] g is a side, cross-sectional view of one channel in an alternative embodiment of the base plate formed in accordance with the present invention without a bypass channel directing flow around the sensor.
  • FIGS. 5[0038] a and 5 b are partially-exploded, side, cross-sectional views of two embodiments of the base plate formed in accordance with the present invention.
  • FIG. 6[0039] a is a top view of a circuit board.
  • FIG. 6[0040] b is a side, cross-sectional view of the circuit board shown in FIG. 6a taken along the line B-B′.
  • FIG. 6[0041] c is an alternative embodiment of the circuit board shown in FIG. 6a, which includes an application-specific integrated circuit (ASIC).
  • FIG. 6[0042] d is an alternative embodiment of the circuit board shown in FIG. 6c, which includes a telemetric unit for wireless transmission of sensor data.
  • FIG. 7[0043] a is a top view of a spacing layer.
  • FIG. 7[0044] b is a side, cross-sectional view of the spacing layer shown in FIG. 7a taken along the line C-C′.
  • FIG. 8[0045] a is a top view of a sealing layer.
  • FIG. 8[0046] b is a side, cross-sectional view of the sealing layer shown in FIG. 8a taken along the line D-D′.
  • FIG. 9 is a side, cross-sectional view of the integrated fluid sensing device formed in accordance with the present invention. [0047]
  • FIG. 10 is an isometric cross-sectional view of a flow sensor formed in accordance with the present invention. [0048]
  • FIG. 11 is an enlarged cross-sectional view of a portion of the flow sensor shown in FIG. 10. [0049]
  • FIG. 12 is a magnified view of an actual layout of a support member for the flow sensor formed in accordance with the present invention.[0050]
  • DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS
  • One type of [0051] sensor 18, which is used to measure the flow of liquid, is shown in FIGS. 2a, 2 b, and 2 c. The flow sensor 18 includes an orifice 20, a cantilever paddle structure 22, and an implanted piezo-resistive Wheatstone bridge 24. FIG. 2a shows the paddle structure 22 in an undeflected state, and FIG. 2b shows the paddle structure 22 in a deflected state.
  • The fluid to be measured is directed through the [0052] orifice 20 in the flow sensor 18. The dynamic pressure built up by the fluid deflects the paddle structure 22. The mechanical stress of the paddle structure 22 changes the resistance of the piezo-resistive Wheatstone bridge 24 at the base of the paddle structure 22, and this change in resistance creates a corresponding change in voltage. The change in voltage is detected on a set of contacts 26 electrically connected to the Wheatstone bridge 24, as shown in FIG. 2c. For temperature compensation, a second Wheatstone bridge is preferably positioned on the flow sensor 18 surrounding the orifice 20. A support member preferably positions the paddle structure 22. The size of the support member is preferably minimized to concentrate the mechanical stress of deflection, and thus increase the sensitivity of the flow sensor 18. Furthermore, the overall size of the flow sensor is determined by the paddle size, which can be adjusted to the specific needs of the control task.
  • The output voltage of the [0053] Wheatstone bridge 24 is proportional to the square of the volumetric flow rate. The sensitivity of the flow sensor 18 is dependent upon the size of the orifice 20, and is adjustable over a broad range. Thus, since the paddle structure 22 is perpendicularly oriented to the direction of flow of liquid, as liquid passes through the orifice 20 in the flow sensor 18, the kinetic pressure of the liquid induces a mechanical stress that is detected by the piezo-resistors in the Wheatstone bridge 24.
  • FIG. 3[0054] a shows a bottom view of a multipole or base plate 12. Threaded holes 28 are provided in the base plate 12 to accommodate fittings 14 as shown in FIG. 1. The fittings 14 enable tubes (not shown) to be connected to the base plate 12. The base plate 12 is preferably manufactured as a separate unit from the valve 10 shown in FIG. 1 so that the valve manifold 10 can be removed from the base plate 12 without disturbing the tubes connected to the base plate 12.
  • FIG. 3[0055] b shows a top view of the conventional base plate 12 including a line A-A′. FIG. 3c shows a side, cross-sectional view of the base plate 12 taken across the line A-A′. The arrows K in FIG. 3c indicate the flow of fluid through the channel in the base plate 12. As is best seen from FIG. 3C, the apertures in the top of the base plate 12 are preferably offset from the corresponding apertures in the bottom of the base plate 12. This offset diverts the flow of fluid through the channel, which limits the pressure of the fluid as it comes in contact with components in the valve manifold 10.
  • FIG. 4[0056] a shows a side, cross-sectional view of the base plate 12 after it has been separated into an upper portion 12A and a lower portion 12B along a line X-X′ shown in FIG. 3c. A circuit board 30, which includes at least one sensor 18, is inserted between the upper and lower portions of the base plate. An arrow L indicates the flow of fluid through the channel and through the sensor 18. A bypass path L′ is preferably provided to divert the majority of flow around the sensor 18. The bypass path L′ reduces the flow through the sensor 18, which protects sensitive components in the sensor 18 that are subject to wear and breakage. About 10-15% of the total flow of fluid is preferably allowed to pass through the sensor 18. The remaining flow is diverted around the sensor 18 and through the bypass path L′.
  • FIG. 4[0057] b shows a side, cross-sectional view of the base plate portions 12A, 12B and the circuit board 30 in which the bypass path L′ has been implemented around the sensor 18. FIG. 4c is a top, cross-sectional view of the circuit board taken along cross-section line Y-Y′ showing an orifice 32 for the bypass path L′ and an orifice 34, which allows the flow of fluid through the sensor 18.
  • FIG. 4[0058] d shows an alternative geometry for the channel in the base plate 12 having at least two (2) bypass paths L′. FIGS. 4f and 4 e show top, cross-sectional views of the circuit board 30 taken along cross-section line X-X′ shown in FIG. 4d. The circuit board 30 in FIG. 4e accommodates six (6) bypass paths L′, and the circuit board 30 in FIG. 4f accommodates eight (8) bypass paths L′.
  • By appropriate dimensioning of the [0059] sensor 18, the channel may be constructed without a bypass channel directing flow around the sensor 18. FIG. 4g shows a side, cross-sectional view of the base plate portions 12A, 12B and the circuit board 30 in which a bypass path has not been implemented around the sensor 18. Thus, in the embodiment shown in FIG. 4g, about 100% of the flow is directed through the sensor 18.
  • FIG. 5A shows an alternative embodiment of the base plate, which incorporates four (4) layers between the [0060] upper portion 12A and the lower portion 12B of the base plate 12. An upper sealing layer 32A and a lower sealing layer 32B are preferably inserted above and below the circuit board 30, respectively. The sealing layers are preferably manufactured from a pliable and/or deformable material, such as rubber, which substantially prevents leakage of the fluid from the channel. Leakage is particularly prevalent between the hard surfaces of the circuit board 30 and the base plate 12A. In addition, a spacing layer 34 is preferably inserted above or below the circuit board 30 to protect the sensitive components and contacts on the circuit board 30. The spacing layer 34 may be separate from or integrated with the circuit board 30.
  • In addition, one or more alignment holes [0061] 36 are preferably provided through each of the layers 30, 32, and 34 and partially through the upper portion 12A and the lower portion 12B of the base plate. A guide pin (not shown) is preferably placed in each of the alignment holes, which ensures a preferably unique orientation of the layers 30, 32, and 34 with the portions of the base plate 12A, 12B as they are joined together.
  • One or more screw holes [0062] 38 are provided through the bottom portion 12B of the base plate, each of the layers 30, 32, 34, and partially through the upper portion 12A of the base plate to accommodate a screw, which joins the portions of the base plate together and sandwiches the layers. The screw maintains compression between the portions of the base plate, which aids in preventing leakage of fluid from the channel. FIG. 5b shows an alternative embodiment of the base plate 12 shown in FIG. 5a, in which the screw hole 38 has been relocated nearer an external surface of the base plate.
  • FIG. 6[0063] a shows the circuit board 30 with eight (8) sensors 18. Each of the sensors 18 is preferably positioned within a depression on the circuit board 30 and affixed to the circuit board 30 by an adhesive, surface mount technology (SMD), wire bond technology, flip-chip technology, or the like. The sensor 18 is preferably connected to bond pads 40, which are coupled to electrically conductive traces 42 on the circuit board 30. The traces 42 are brought to the edge of the board, which is preferably accessible from the outside of the base plate 12 when the upper portion 12A and the lower portion 12B of the base plate 12 are joined together.
  • The [0064] sensors 18 are advantageously encapsulated within and electrically accessible outside the integrated fluid sensing device formed in accordance with the present invention. Thus, the fragile components of the sensor 18 are inherently protected from shock, humidity, dust, corrosive chemicals, and other environmental hazards.
  • FIG. 6[0065] b is a side, cross-sectional view of the circuit board 30 taken along the line B-B′, which shows the alignment holes 36, screw hole 38 and sensor 18. FIG. 6c shows an alternative embodiment of the circuit board 30 shown in FIG. 6a, which includes a microprocessor, a microcontroller, or an application-specific integrated circuit (ASIC) 44. The ASIC 44 monitors and processes signals from each of the sensors 18 and outputs the processed information externally to the base plate 12. The ASIC 44 may include circuitry that enables it to interface to Fieldbus compatible components and controllers.
  • Fieldbus is a commercial standard describing a digital, serial, multi-drop, two-way communication link, which interconnects measurement and control equipment such as sensors, actuators, and controllers. It serves as a Local Area Network (LAN) for instruments used in process control and manufacturing automation applications and has a built-in capability to distribute the control application across the network. [0066]
  • FIG. 6[0067] d shows an alternative embodiment of the circuit board 30 shown in FIG. 6C, in which, in addition to the ASIC 44, a telemetric unit 46 is provided for the wireless transmission of information processed by the ASIC 44. The telemetric unit 46 preferably inputs a signal from each of the sensors 18, which is representative of the sensed physical characteristic and outputs a wireless signal, such as a radio frequency or infrared signal.
  • FIG. 7[0068] a shows a top view of the spacing layer 34, which is also shown in FIGS. 5a and 5 b. The spacing layer 34 is preferably used to protect the sensitive components of the sensor 18 and the bond pads 40, which electrically connect the sensor 18 to the edge of the circuit board 30. The spacing layer 34 is preferably sealed by an appropriate choice of pliable material deposited on the spacing layer 34 or by inserting an additional sealing layer between the spacing layer 34 and the circuit board 30. Bumps and/or recesses may be integrated onto the spacing layer 34 to further protect corresponding sensors 18 and bond pads 40 on the circuit board 30. The bumps or recesses may alternatively be incorporated on the circuit board 30 without requiring a separate spacing layer 34. FIG. 7b is a side, cross-sectional view of the spacing layer 34 taken along line C-C′, which shows the alignment holes 36, the screw hole 38, and an aperture 48 for the sensor 18.
  • FIG. 8[0069] a shows the sealing layer 32, which prevents leakage from the channel to the exterior of the base plate 12. The functionality of the sealing layer 32 could alternatively be incorporated into the circuit board 30 by applying, for instance, independent seals around each of the orifices in the circuit board 30. FIG. 8b is a side, cross-sectional view of the sealing layer 32 taken across the line D-D′, which shows the alignment holes 36, the screw hole 38, and the aperture 38 for the sensor 18.
  • FIG. 9 shows the integrated fluid flow device formed in accordance with the present invention. The [0070] circuit board 30, which includes one or more sensors 18 is sandwiched between the upper portion 12A and the lower portion 12B of the base plate. The primary flow of fluid within the channel is indicated by arrow L, which is preferably diverted around the sensor 18 through the bypass path L′. A small portion L″ of the primary flow L flows through the sensor 18 and continues through the channel into the upper portion 12A of the base plate. Once the fluid exits the upper portion 12A, it is preferably outputted to pneumatic components, such as pneumatically actuated cylinders or valves.
  • It is anticipated that the integrated fluid sensing device of the present invention can be implemented with any quantity of valves or manifolds used to control hydraulic and/or pneumatic equipment. It is also anticipated that the sensor can measure any conceivable physical characteristic of the fluid, such as temperature, flow rate, pressure, and the like. It is further anticipated that the sensor can be implemented as alternative types of transducers, such as a magnetic flowmeter, hot-wire anemometer, bimetallic strip, thermocouple, pressure cell, or pressure transducer. Additional details concerning transducers can be found in S. Wolf, “Guide to Electronic Measurements and Laboratory Practice”, Prentice-Hall, Inc., pp. 414-451, (1973), which is incorporated herein by reference. [0071]
  • The hot-[0072] wire anemometer 19 is shown in FIG. 2d and includes a fine resistive wire 21, which is heated by a current passing through it. If a cooler fluid flows past the wire 21, the fluid removes heat from the wire 21. The rate of heat transfer varies with the type of fluid, but it also tends to vary as the square root of the velocity at which the fluid flows past the wire 21. If the current in the wire 21 is kept constant, the change in resistance due to the cooling will yield a voltage signal, which can be monitored to indicate flow rate. Since the diameter of the wire 21 can be made very small, the anemometer 19 can be made very sensitive and responsive to high-frequency changes in the flow rate.
  • A flow sensor [0073] 50 formed in accordance with the present invention, which is used to measure the flow of fluid is shown in FIG. 10. The paddle 54 is preferably mechanically coupled to that portion 58 of the flow sensor 50 surrounding an aperture or orifice 52 by a bender or support member 56. The support member 56 preferably positions the paddle 54 in the orifice 52 and includes an implanted piezo-resistive full Wheatstone bridge 70.
  • The overall length and width of the flow sensor in the preferred embodiment, as indicated by dimension B, is approximately 5 mm. The flow sensor [0074] 50 preferably includes a paddle 54 at least partially disposed in the orifice 52. The length and width of the orifice 52 of the preferred embodiment, as indicated by dimension A, is approximately 1 mm. The width of the support member 56 in the preferred embodiment is preferably about 100 μm, as indicated by dimension D in FIG. 12, which shows a magnified view of an actual layout of the support member 56. Each of the dimensions in the preferred embodiment of the flow sensor may be adjusted based upon design choice and/or sensor specifications while remaining within the scope of the present invention.
  • The surface area of the [0075] support member 56 is preferably less than that of the paddle 54 to concentrate the mechanical stress of deflection on the support member 56, and thus increase the sensitivity of the flow sensor 50. The overall size of the flow sensor 50 is preferably determined by the surface area of the paddle 54, which is adjustable in accordance with the needs and or sensitivity required for the specific control task.
  • The fluid to be measured is preferably directed through the [0076] orifice 52 in the flow sensor 50. The dynamic pressure provided by the fluid preferably deflects the paddle 54, which places mechanical stress on the support member 56. As shown in FIG. 11, the mechanical stress on the support member 56 changes the resistance of piezo-resistive stress gauges 72, 74, 76, and 78 coupled by ohmic contacts or conductors 62, 64, 66, and 68 in a Wheatstone bridge 70 disposed on the support member 56.
  • This change in resistance creates a corresponding change in voltage, which is preferably provided on one or more electrical contacts or doped [0077] regions 60 coupled to the conductors 62, 64, 66, and 68, which are shown in greater detail in the exploded view of the support member 56 in FIG. 11. The strain gauges 72 and 76 are preferably subjected to transverse stress in response to deflection of the paddle 54. The strain gauges 74 and 78 are preferably subjected to longitudinal stress in response to deflection of the paddle 54.
  • The output voltage of the [0078] Wheatstone bridge 70 is preferably proportional to the square of the volumetric flow rate. The sensitivity of the flow sensor 50 depends on the size of the orifice 52 and the size or surface area of the paddle 54, both of which are adjustable over a broad range. Thus, since the paddle 54 is preferably perpendicularly oriented to the direction of fluid flow, which is indicated by arrow C in FIGS. 10 and 11, as fluid passes through the orifice, the kinetic pressure of the fluid induces a mechanical stress on the support member 56. This mechanical stress is preferably detected by the piezo-resistive stress gauges or resistors 72, 74, 76, and 78 in the Wheatstone bridge 70.
  • The stress gauges [0079] 72, 74, 76, and 78 are preferably exclusively disposed on the support member 56. The paddle 54 is preferably used exclusively for its mechanical resistance to fluid flow without any passive or active electronic components disposed thereon. Thus, the flow sensor 50 formed in accordance with a preferred embodiment of the present invention is preferably a two-part flow sensor including a standardized support member 56, which can be generically used for all such flow sensors, and a customizable paddle 54, which may be dimensionally tailored to the sensitivity requirements of a specific application without substantially changing the overall manufacturing process of the flow sensor 50.
  • Further, since the flow sensor [0080] 50 formed in accordance with the present invention preferably includes a full Wheatstone bridge to achieve optimal signal output and sensitivity, both positive and negative deflections must be detected by the strain gauges 72, 74, 76, and 78. Wire or foil strain gauges merely exhibit sensitivity to longitudinal stress, and thus must be disposed on both the front and rear faces of the stressed component to detect the positive and negative deflections required by the full Wheatstone bridge. However, use of piezo-resistive stress gauges 72, 74, 76, and 78 in the flow sensor 50 formed in accordance with the present invention, which are able to detect both longitudinal and transverse stress, enable the full Wheatstone bridge 70 to be disposed on only one side of the support member 56, which significantly simplifies and reduces the cost of manufacturing the flow sensor 50 in accordance with the present invention.
  • From the foregoing description, it will be appreciated that the integrated fluid sensing device formed in accordance with the present invention significantly reduces measurement errors, space requirements, external tubing, connectors, fittings, and the cost of installation and maintenance of sensors that measure the physical characteristics of a fluid used to control hydraulic or pneumatic equipment. It will also be appreciated that the integrated fluid sensing device of the present invention enables sensors to be mounted on a single circuit board having common signal processing, communication, error control, and connective circuitry. [0081]
  • Further, it will be appreciated that the integrated fluid sensing device formed in accordance with the present invention is able to readily display and transmit data, which represents physical characteristics of the fluid used to control hydraulic and pneumatic equipment. It will also be appreciated that the integrated fluid sensing device formed in accordance with the present invention substantially encloses sensors that measure the physical characteristics of the fluid and protects these sensors from environmental hazards. [0082]
  • It will also be appreciated that the flow sensor formed in accordance with the present invention can readily be adapted to different flow rates without substantial change or additional cost in the manufacturing process. It will also be appreciated that the flow sensor includes a generic or standardized support member having one or more strain gauges disposed on only one side of the support member and a customizable paddle displaced by fluid flow, which does not include a strain gauge. [0083]
  • Although illustrative embodiments of the present invention have been described herein with reference to the accompanying drawings, it is to be understood that the invention is not limited to those precise embodiments, and that various other changes and modifications may be effected therein by one skilled in the art without departing from the scope or spirit of the invention. [0084]

Claims (40)

What is claimed is:
1. A flow sensor comprising:
a paddle being disposed at least partially in an orifice, a fluid flow directed through the orifice, the paddle being displaced in response to the fluid flow; and
a support member positioning the paddle at least partially in the orifice, the support member including a plurality of strain gauges, the plurality of strain gauges being disposed on only one side of the support member, at least one of the plurality of strain gauges being mechanically stressed in response to the paddle being displaced by the fluid flow.
2. A flow sensor as defined by claim 1, wherein the paddle includes a surface area, the surface area of the paddle being adaptable to provide different displacements of the paddle in response to the fluid flow.
3. A flow sensor as defined by claim 1, wherein the paddle includes a first surface area, the support member including a second surface area, the first surface area being unequal to the second surface area.
4. A flow sensor as defined by claim 1, wherein the paddle does not have any electrical components mounted thereon.
5. A flow sensor as defined by claim 1, wherein the plurality of strain gauges is operatively configured in a Wheatstone bridge.
6. A flow sensor as defined by claim 1, wherein at least one of the plurality of strain gauges is responsive to at least one of transverse stress and longitudinal stress.
7. A flow sensor as defined by claim 1, wherein at least one of the plurality of strain gauges is piezo-resistive.
8. A method of sensing flow, the method comprising the steps of:
disposing a paddle at least partially in an orifice;
directing a fluid flow through the orifice, the paddle being displaced in response to the fluid flow;
positioning the paddle at least partially in the orifice by a support member, the support member including a plurality of strain gauges; and
disposing the plurality of strain gauges on only one side of the support member, the plurality of strain gauges being mechanically stressed in response to the paddle being displaced by the fluid flow.
9. A method of sensing flow as defined by claim 8, further comprising the step of adapting a surface area of the paddle to provide different displacements of the paddle in response to the fluid flow.
10. A method of sensing flow as defined by claim 8, further comprising the step of providing a first surface area of the paddle unequal to a second surface area of the support member.
11. A method of sensing flow as defined by claim 8, further comprising the step of disposing the plurality of strain gauges exclusively on the support member.
12. A method of sensing flow as defined by claim 8, further comprising the step of configuring the plurality of strain gauges operatively in a Wheatstone bridge.
13. A method of sensing flow as defined by claim 8, further comprising the step of providing at least one of the plurality of strain gauges as responsive to at least one of transverse stress and longitudinal stress.
14. A method of sensing flow as defined by claim 8, further comprising the step of providing at least one of the plurality of strain gauges as a piezo-resistive strain gauge.
15. A fluid sensing device, the fluid sensing device comprising:
a fluid flow device including a first mating portion and a second mating portion, the first mating portion including a first aperture, the second mating portion including a second aperture, the first aperture and the second aperture being at least partially aligned such that the first aperture and the second aperture define a channel through the first and second mating portions when the first and second mating portions are joined together, the channel being able to communicate fluid therethrough; and
a circuit board sandwiched between the first mating portion and the second mating portion, the circuit board including at least one flow sensor, the at least one flow sensor being at least partially aligned with the channel, the at least one flow sensor being able to detect a physical characteristic of the fluid flowing through the channel, the flow sensor including a paddle and a support member, the paddle being at least partially disposed in the channel, the paddle being displaced in response to fluid flowing through the channel, the support member positioning the paddle at least partially in the channel, the support member including a plurality of strain gauges, the plurality of strain gauges being mechanically stressed in response to the paddle being displaced.
16. A fluid sensing device as defined by claim 15, wherein the plurality of strain gauges are disposed on only one side of the support member.
17. A fluid sensing device as defined by claim 15, wherein the fluid flow device includes a valve manifold and a base plate, the base plate being removably coupled to the valve manifold, the base plate including the first mating portion and the second mating portion.
18. A fluid sensing device as defined by claim 15, wherein the first mating portion includes a plurality of first apertures and the second mating portion includes a plurality of second apertures, the plurality of first apertures and the plurality of second apertures being at least partially aligned such that the plurality of first apertures and the plurality of second apertures define a plurality of channels through the first and second mating portions when the first and second mating portions are joined together, the plurality of channels being able to communicate fluid therethrough, the circuit board including a plurality of flow sensors, the plurality of flow sensors being at least partially aligned with the plurality of channels, the plurality of flow sensors being able to detect a physical characteristic of the fluid flowing through the plurality of channels.
19. A fluid sensing device as defined by claim 15, wherein the paddle includes a surface area, the surface area of the paddle being adaptable to provide different displacements of the paddle in response to the fluid flow.
20. A fluid sensing device as defined by claim 15, wherein the paddle includes a first surface area, the support member including a second surface area, the first surface area being unequal to the second surface area.
21. A fluid sensing device as defined by claim 15, wherein the paddle does not have any electrical components mounted thereon.
22. A fluid sensing device as defined by claim 15, wherein the plurality of strain gauges is operatively configured in a Wheatstone bridge.
23. A fluid sensing device as defined by claim 15, wherein at least one of the plurality of strain gauges is responsive to at least one of transverse stress and longitudinal stress.
24. A fluid sensing device as defined by claim 15, wherein at least one of the plurality of strain gauges is piezo-resistive.
25. A fluid sensing device comprising:
at least one valve;
a base plate removably coupled to the at least one valve, the base plate including a first portion and a second portion, the first portion including a first mating surface, the second portion including a second mating surface the base plate including a channel through the first and second portions when the first and second mating surfaces are joined together, the channel being in fluid communication with the at least one value; and
a circuit board sandwiched between the first portion and the second portion, the circuit board including at least one flow sensor, the at least one flow sensor being at least partially aligned with the channel, the at least one flow sensor being able to detect a physical characteristic of the fluid flowing through the channel, the at least one flow sensor including a paddle and a support member, the paddle being at least partially disposed in the channel, a fluid flow being directed through the channel, the paddle being displaced in response to the fluid flow, the support member positioning the paddle at least partially in the channel, the support member including a plurality of strain gauges the plurality of strain gauges being mechanically stressed in response to the paddle being displaced by the fluid flow.
26. A fluid sensing device as defined by claim 25, wherein the plurality of strain gauges are disposed on only one side of the support member.
27. A fluid sensing device as defined by claim 25, wherein the base plate includes a plurality of channels through the first and second portions when the first and second mating surfaces are joined together, the plurality of channels being able to communicate fluid therethrough, the circuit board including a plurality of flow sensors, the plurality of flow sensors being at least partially aligned with the plurality of channels, the plurality of flow sensors being able to detect a physical characteristic of the fluid flowing through the plurality of channels.
28. A fluid sensing device as defined by claim 25, wherein the paddle includes a surface area, the surface area of the paddle being adaptable to provide different displacements of the paddle in response to the fluid flow.
29. A fluid sensing device as defined by claim 25, wherein the paddle includes a first surface area, the support member including a second surface area, the first surface area being unequal to the second surface area.
30. A fluid sensing device as defined by claim 25, wherein the paddle does not have any electrical components mounted thereon.
31. A fluid sensing device as defined by claim 25, wherein the plurality of strain gauges is operatively configured in a Wheatstone bridge.
32. A fluid sensing device as defined by claim 25, wherein at least one of the plurality of strain gauges is responsive to at least one of transverse stress and longitudinal stress.
33. A fluid sensing device comprising:
at least one valve including at least one duct and a substantially flat first mating surface;
a base plate removably coupled to the at least one valve, the base plate having a second mating surface, the base plate including at least one channel in fluid communication with the at least one duct; and
a circuit board sandwiched between the first mating surface of the valve and the second mating surface of the base plate, the circuit board comprising at least one flow sensor, the at least one flow sensor being at least partially aligned with at least one of the duct and the channel, the at least one flow sensor being able to detect a physical characteristic of a fluid flowing therethrough, the at least one flow sensor including a paddle and a support member, the paddle being at least partially aligned with at least one of the duct and the channel, a fluid flow being directed through the channel, the paddle being displaced in response to the fluid flow, the support member positioning the paddle, the support member including a plurality of strain gauges, the plurality of strain gauges being mechanically stressed in response to the paddle being displaced by the fluid flow.
34. A fluid sensing device as defined by claim 33, wherein the plurality of strain gauges is disposed on only one side of the support member.
35. A fluid sensing device as defined by claim 33, wherein the at least one valve includes a plurality of ducts, the base plate including a plurality of channels in fluid communication with the plurality of ducts, the circuit board comprising a plurality of flow sensors at least partially aligned with the plurality of ducts and the plurality of channels.
36. A fluid sensing device as defined by claim 33, wherein the paddle includes a surface area, the surface area of the paddle being adaptable to provide different displacements of the paddle in response to the fluid flow.
37. A fluid sensing device as defined by claim 33, wherein the paddle includes a first surface area, the support member including a second surface area, the first surface area being unequal to the second surface area.
38. A fluid sensing device as defined by claim 33, wherein the paddle does not have any electrical components mounted thereon.
39. A fluid sensing device as defined by claim 33, wherein the plurality of strain gauges is operatively configured in a Wheatstone bridge.
40. A fluid sensing device as defined by claim 33, wherein at least one of the plurality of strain gauges is responsive to at least one of transverse stress and longitudinal stress.
US10/634,606 2000-09-21 2003-08-05 Integrated fluid sensing device Abandoned US20040025598A1 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
US10/634,606 US20040025598A1 (en) 2000-09-21 2003-08-05 Integrated fluid sensing device
DE200410036084 DE102004036084A1 (en) 2003-08-05 2004-07-24 Flow sensor for pneumatic and hydraulic equipment, has paddle disposed partially in orifice in response to fluid flow directed through orifice and strain gauge in support unit disposes Wheatstone bridge on support unit side
US11/034,703 US6971272B2 (en) 2000-09-21 2005-01-13 Integrated fluid sensing device

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/666,990 US6619142B1 (en) 2000-09-21 2000-09-21 Integrated fluid sensing device
US10/634,606 US20040025598A1 (en) 2000-09-21 2003-08-05 Integrated fluid sensing device

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
US09/666,990 Continuation-In-Part US6619142B1 (en) 2000-09-21 2000-09-21 Integrated fluid sensing device

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US11/034,703 Division US6971272B2 (en) 2000-09-21 2005-01-13 Integrated fluid sensing device

Publications (1)

Publication Number Publication Date
US20040025598A1 true US20040025598A1 (en) 2004-02-12

Family

ID=34116069

Family Applications (2)

Application Number Title Priority Date Filing Date
US10/634,606 Abandoned US20040025598A1 (en) 2000-09-21 2003-08-05 Integrated fluid sensing device
US11/034,703 Expired - Fee Related US6971272B2 (en) 2000-09-21 2005-01-13 Integrated fluid sensing device

Family Applications After (1)

Application Number Title Priority Date Filing Date
US11/034,703 Expired - Fee Related US6971272B2 (en) 2000-09-21 2005-01-13 Integrated fluid sensing device

Country Status (2)

Country Link
US (2) US20040025598A1 (en)
DE (1) DE102004036084A1 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070137936A1 (en) * 2004-01-09 2007-06-21 Jfe Steel Corporation Lubricant feed state monitoring sensor and lubricant feed state monitoring device
EP2554952A1 (en) * 2010-03-30 2013-02-06 Kikuchi Seisakusho Co., Ltd. Flowrate sensor and flowrate detection device
EP3009819A1 (en) * 2014-10-17 2016-04-20 Commissariat à l'Énergie Atomique et aux Énergies Alternatives System for measuring tangential force applied by a fluid with increased sensitivity

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006003054B4 (en) * 2006-01-20 2014-10-02 Phoenix Contact Gmbh Method, liquid supply unit and measuring device for a level indicator
US20080312557A1 (en) * 2007-06-18 2008-12-18 Dong Uk Cho Method and system for measuring urinary flow rate
US20100313973A1 (en) * 2009-06-11 2010-12-16 Grumbles Ernest W Fluid-Controlled Electronic Games and Measurement Devices
US8544341B2 (en) 2009-06-11 2013-10-01 Ernest W. Grumbles Device including an accelerometer in a watertight container for sensing a urine stream
US8499795B2 (en) * 2009-11-24 2013-08-06 Keihin Corporation Solenoid valve device
DE102010024690A1 (en) * 2010-06-23 2011-12-29 Mahle International Gmbh Fluid flow measuring device, valve device and measuring method
US8966970B2 (en) 2012-12-18 2015-03-03 General Electric Company Flow sensor assembly having a hybrid sensor response
DE102015225358B4 (en) * 2015-12-16 2020-04-02 Continental Automotive Gmbh Air mass meter
DE102022121840B3 (en) * 2022-08-30 2024-01-25 Schaeffler Technologies AG & Co. KG Hydraulic control in panel design

Citations (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3340733A (en) * 1964-09-28 1967-09-12 Exxon Research Engineering Co Design for a strain gauge target flow meter
US3424000A (en) * 1966-07-29 1969-01-28 North American Rockwell Semiconductor flowmeter
US3927565A (en) * 1973-01-30 1975-12-23 Bertin & Cie Apparatus and method for measuring the mass flow of a fluid stream
US4565098A (en) * 1984-09-10 1986-01-21 Fischer & Porter Company Hybrid sensing system for vortex flowmeter
US4729244A (en) * 1986-01-16 1988-03-08 Cosmo Instruments Co., Ltd. Flow rate measuring apparatus
US4875932A (en) * 1988-05-26 1989-10-24 Cosmo Instruments Co., Ltd. Apparatus for measuring a flow rate
US4986127A (en) * 1988-04-06 1991-01-22 Hitachi, Ltd. Multi-functional sensor
US5000226A (en) * 1984-08-24 1991-03-19 Kurt Stoll Circuit assembly
US5131265A (en) * 1991-02-22 1992-07-21 Motorola, Inc. Real-time rheology measurement sensor
US5144843A (en) * 1988-07-26 1992-09-08 Hitachi Construction Machinery Co., Ltd. Pressure sensor
US5187984A (en) * 1990-04-27 1993-02-23 Schlumberger Industries Hydrostatic pressure transducer
US5259248A (en) * 1990-03-19 1993-11-09 Hitachi Ltd. Integrated multisensor and static and differential pressure transmitter and plant system using the integrated multisensor
US5348047A (en) * 1992-07-10 1994-09-20 Festo Kg Valve arrangement
US5383470A (en) * 1993-09-20 1995-01-24 Steve Novak Portable spirometer
US5458048A (en) * 1992-08-19 1995-10-17 Festo Kg Electro-pneumatic control device
US5463904A (en) * 1994-02-04 1995-11-07 The Foxboro Company Multimeasurement vortex sensor for a vortex-generating plate
US5469749A (en) * 1991-09-20 1995-11-28 Hitachi, Ltd. Multiple-function fluid measuring and transmitting apparatus
US5495769A (en) * 1993-09-07 1996-03-05 Rosemount Inc. Multivariable transmitter
US5511428A (en) * 1994-06-10 1996-04-30 Massachusetts Institute Of Technology Backside contact of sensor microstructures
US5546794A (en) * 1993-12-01 1996-08-20 Robert Bosch Gmbh Device for measuring the mass of a flowing medium
US5551283A (en) * 1993-08-10 1996-09-03 Ricoh Seiki Company, Ltd. Atmosphere measuring device and flow sensor
US5663508A (en) * 1995-08-07 1997-09-02 Delco Electronics Corporation Silicon flow sensor
US5717147A (en) * 1996-08-22 1998-02-10 Rupprecht & Patashnick Company, Inc. Air sampler filter cassette carrier
US5791369A (en) * 1995-06-12 1998-08-11 Fujikin Incorporated Pressure type flow rate control apparatus
US5820262A (en) * 1996-12-05 1998-10-13 Johnson Service Company Smart refrigerant sensor
US5868159A (en) * 1996-07-12 1999-02-09 Mks Instruments, Inc. Pressure-based mass flow controller
US5883310A (en) * 1994-11-04 1999-03-16 The Regents Of The University Of California Micromachined hot-wire shear stress sensor
US5899962A (en) * 1993-09-20 1999-05-04 Rosemount Inc. Differential pressure measurement arrangement utilizing dual transmitters
US5965813A (en) * 1998-07-23 1999-10-12 Industry Technology Research Institute Integrated flow sensor
US6023969A (en) * 1997-09-17 2000-02-15 Feller; Murray F. Flow modulated mass flow sensor
US6295874B1 (en) * 1999-09-07 2001-10-02 Endress + Hauser Gmbh & Co. Apparatus for determining a physical process variable of a medium
US6408698B1 (en) * 1998-09-03 2002-06-25 Board Of Trustees Operating - Michigan State University Sensors and method for measurement of flow rates and cumulative flow in ducts
US6443328B1 (en) * 2000-06-16 2002-09-03 Badger Meter, Inc. Electronic lube gun with low battery protection
US6470741B1 (en) * 2000-06-23 2002-10-29 Instrumentarium, Inc. Hot wire anemometer gas flow sensor having improved operation and compensation
US6561216B2 (en) * 2000-01-20 2003-05-13 Smc Kabushiki Kaisha Combined sensor and flow controller provided with combined sensor
US20030159697A1 (en) * 2002-02-22 2003-08-28 Allan Wallace Flow sensing apparatus
US6615867B2 (en) * 2001-01-30 2003-09-09 Smc Corporation Spacer type pressure reducing valve

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58135916A (en) 1982-02-08 1983-08-12 Hitachi Ltd Thermal flow meter for internal combustion engine
GB8720357D0 (en) 1987-08-28 1987-10-07 Thorn Emi Flow Measurement Ltd Fluid metering system
DE3732856A1 (en) 1987-09-29 1989-04-06 Siemens Ag Intelligent air quantity meter
US4914742A (en) 1987-12-07 1990-04-03 Honeywell Inc. Thin film orthogonal microsensor for air flow and method
JPH0318735A (en) 1989-06-15 1991-01-28 Matsushita Electric Ind Co Ltd Pressure and temperature sensor element
JP2846518B2 (en) 1992-03-18 1999-01-13 株式会社日立製作所 Air flow detector and engine control device using the same
DE19502499A1 (en) 1995-01-27 1996-08-01 Pepperl & Fuchs ASI-slaves control and activation bus-system
US6631638B2 (en) 2001-01-30 2003-10-14 Rosemount Aerospace Inc. Fluid flow sensor
EP1365216B1 (en) 2002-05-10 2018-01-17 Azbil Corporation Flow sensor and method of manufacturing the same

Patent Citations (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3340733A (en) * 1964-09-28 1967-09-12 Exxon Research Engineering Co Design for a strain gauge target flow meter
US3424000A (en) * 1966-07-29 1969-01-28 North American Rockwell Semiconductor flowmeter
US3927565A (en) * 1973-01-30 1975-12-23 Bertin & Cie Apparatus and method for measuring the mass flow of a fluid stream
US5000226A (en) * 1984-08-24 1991-03-19 Kurt Stoll Circuit assembly
US4565098A (en) * 1984-09-10 1986-01-21 Fischer & Porter Company Hybrid sensing system for vortex flowmeter
US4729244A (en) * 1986-01-16 1988-03-08 Cosmo Instruments Co., Ltd. Flow rate measuring apparatus
US4986127A (en) * 1988-04-06 1991-01-22 Hitachi, Ltd. Multi-functional sensor
US4875932A (en) * 1988-05-26 1989-10-24 Cosmo Instruments Co., Ltd. Apparatus for measuring a flow rate
US5144843A (en) * 1988-07-26 1992-09-08 Hitachi Construction Machinery Co., Ltd. Pressure sensor
US5259248A (en) * 1990-03-19 1993-11-09 Hitachi Ltd. Integrated multisensor and static and differential pressure transmitter and plant system using the integrated multisensor
US5187984A (en) * 1990-04-27 1993-02-23 Schlumberger Industries Hydrostatic pressure transducer
US5131265A (en) * 1991-02-22 1992-07-21 Motorola, Inc. Real-time rheology measurement sensor
US5469749A (en) * 1991-09-20 1995-11-28 Hitachi, Ltd. Multiple-function fluid measuring and transmitting apparatus
US5348047A (en) * 1992-07-10 1994-09-20 Festo Kg Valve arrangement
US5458048A (en) * 1992-08-19 1995-10-17 Festo Kg Electro-pneumatic control device
US5551283A (en) * 1993-08-10 1996-09-03 Ricoh Seiki Company, Ltd. Atmosphere measuring device and flow sensor
US5495769A (en) * 1993-09-07 1996-03-05 Rosemount Inc. Multivariable transmitter
US5899962A (en) * 1993-09-20 1999-05-04 Rosemount Inc. Differential pressure measurement arrangement utilizing dual transmitters
US5383470A (en) * 1993-09-20 1995-01-24 Steve Novak Portable spirometer
US5546794A (en) * 1993-12-01 1996-08-20 Robert Bosch Gmbh Device for measuring the mass of a flowing medium
US5463904A (en) * 1994-02-04 1995-11-07 The Foxboro Company Multimeasurement vortex sensor for a vortex-generating plate
US5511428A (en) * 1994-06-10 1996-04-30 Massachusetts Institute Of Technology Backside contact of sensor microstructures
US5883310A (en) * 1994-11-04 1999-03-16 The Regents Of The University Of California Micromachined hot-wire shear stress sensor
US5791369A (en) * 1995-06-12 1998-08-11 Fujikin Incorporated Pressure type flow rate control apparatus
US5663508A (en) * 1995-08-07 1997-09-02 Delco Electronics Corporation Silicon flow sensor
US5868159A (en) * 1996-07-12 1999-02-09 Mks Instruments, Inc. Pressure-based mass flow controller
US5717147A (en) * 1996-08-22 1998-02-10 Rupprecht & Patashnick Company, Inc. Air sampler filter cassette carrier
US5820262A (en) * 1996-12-05 1998-10-13 Johnson Service Company Smart refrigerant sensor
US6023969A (en) * 1997-09-17 2000-02-15 Feller; Murray F. Flow modulated mass flow sensor
US5965813A (en) * 1998-07-23 1999-10-12 Industry Technology Research Institute Integrated flow sensor
US6408698B1 (en) * 1998-09-03 2002-06-25 Board Of Trustees Operating - Michigan State University Sensors and method for measurement of flow rates and cumulative flow in ducts
US6295874B1 (en) * 1999-09-07 2001-10-02 Endress + Hauser Gmbh & Co. Apparatus for determining a physical process variable of a medium
US6561216B2 (en) * 2000-01-20 2003-05-13 Smc Kabushiki Kaisha Combined sensor and flow controller provided with combined sensor
US6443328B1 (en) * 2000-06-16 2002-09-03 Badger Meter, Inc. Electronic lube gun with low battery protection
US6470741B1 (en) * 2000-06-23 2002-10-29 Instrumentarium, Inc. Hot wire anemometer gas flow sensor having improved operation and compensation
US6615867B2 (en) * 2001-01-30 2003-09-09 Smc Corporation Spacer type pressure reducing valve
US20030159697A1 (en) * 2002-02-22 2003-08-28 Allan Wallace Flow sensing apparatus

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070137936A1 (en) * 2004-01-09 2007-06-21 Jfe Steel Corporation Lubricant feed state monitoring sensor and lubricant feed state monitoring device
EP2554952A1 (en) * 2010-03-30 2013-02-06 Kikuchi Seisakusho Co., Ltd. Flowrate sensor and flowrate detection device
EP2554952A4 (en) * 2010-03-30 2014-06-18 Kikuchi Seisakusho Co Ltd Flowrate sensor and flowrate detection device
EP3009819A1 (en) * 2014-10-17 2016-04-20 Commissariat à l'Énergie Atomique et aux Énergies Alternatives System for measuring tangential force applied by a fluid with increased sensitivity
FR3027389A1 (en) * 2014-10-17 2016-04-22 Commissariat Energie Atomique TANGENTIAL FORCE MEASUREMENT SYSTEM APPLIED BY AN INCREASED SENSITIVITY FLUID

Also Published As

Publication number Publication date
DE102004036084A1 (en) 2005-03-03
US6971272B2 (en) 2005-12-06
US20050121080A1 (en) 2005-06-09

Similar Documents

Publication Publication Date Title
US6971272B2 (en) Integrated fluid sensing device
US6619142B1 (en) Integrated fluid sensing device
EP1999437B1 (en) Modular sensor system for measuring multiple measurands in a common package
CN102980711B (en) There is the sensor of the encapsulation of multiple sensor element
US7832269B2 (en) Packaging multiple measurands into a combinational sensor system using elastomeric seals
US7401522B2 (en) Pressure sensor using compressible sensor body
US5581038A (en) Pressure measurement apparatus having a reverse mounted transducer and overpressure guard
JP2001511884A (en) Pressure transducer with error compensation
US7124641B2 (en) Capacitive pressure transmitter
EP3287758B1 (en) Differential pressure sensor incorporating common mode error compensation
WO2000003220A1 (en) Methods and apparatus for sensing differential and gauge static pressure in a fluid flow line
EP0774652B1 (en) Coplanar pressure sensor mounting for remote sensor with two housings
US20050072245A1 (en) Pressure sensor
US6722205B2 (en) Unitary pressure sensor housing and assembly
JPH10197316A (en) Density correction-type liquid level detecting device
EP1552260B1 (en) Pressure sensor and production thereof
EP1554553A1 (en) Pressure sensor housing and assembly
JP2006514265A (en) Pressure sensor housing and assembly

Legal Events

Date Code Title Description
AS Assignment

Owner name: FESTO AG & CO., GERMANY

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:FORSTER, KARL-HEINZ;LANGRO, FRANK J.;LATINO, FRANK;AND OTHERS;REEL/FRAME:014372/0264;SIGNING DATES FROM 20030618 TO 20030706

STCB Information on status: application discontinuation

Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION