US20030231437A1 - Current-perpendicular-to-plane magnetoresistive device with oxidized free layer side regions and method for its fabrication - Google Patents
Current-perpendicular-to-plane magnetoresistive device with oxidized free layer side regions and method for its fabrication Download PDFInfo
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- US20030231437A1 US20030231437A1 US10/174,866 US17486602A US2003231437A1 US 20030231437 A1 US20030231437 A1 US 20030231437A1 US 17486602 A US17486602 A US 17486602A US 2003231437 A1 US2003231437 A1 US 2003231437A1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
- G01R33/09—Magnetoresistive devices
- G01R33/093—Magnetoresistive devices using multilayer structures, e.g. giant magnetoresistance sensors
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y25/00—Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
- G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
- G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
- G11B5/3906—Details related to the use of magnetic thin film layers or to their effects
- G11B5/3909—Arrangements using a magnetic tunnel junction
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N50/00—Galvanomagnetic devices
- H10N50/01—Manufacture or treatment
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N50/00—Galvanomagnetic devices
- H10N50/10—Magnetoresistive devices
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
- G11B2005/3996—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects large or giant magnetoresistive effects [GMR], e.g. as generated in spin-valve [SV] devices
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3109—Details
- G11B5/3116—Shaping of layers, poles or gaps for improving the form of the electrical signal transduced, e.g. for shielding, contour effect, equalizing, side flux fringing, cross talk reduction between heads or between heads and information tracks
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3109—Details
- G11B5/313—Disposition of layers
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
- Y10T29/49036—Fabricating head structure or component thereof including measuring or testing
- Y10T29/49041—Fabricating head structure or component thereof including measuring or testing with significant slider/housing shaping or treating
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
- Y10T29/49036—Fabricating head structure or component thereof including measuring or testing
- Y10T29/49043—Depositing magnetic layer or coating
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
- Y10T29/49036—Fabricating head structure or component thereof including measuring or testing
- Y10T29/49043—Depositing magnetic layer or coating
- Y10T29/49044—Plural magnetic deposition layers
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- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
- Y10T29/49036—Fabricating head structure or component thereof including measuring or testing
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
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- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
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Abstract
A current-perpendicular-to the-plane (CPP) magnetoresistive device has two ferromagnetic layers separated by a nonmagnetic spacer layer with the free ferromagnetic layer having a central region of ferromagnetic material and nonmagnetic side regions formed of one or more oxides of the ferromagnetic material. One type of CPP device is a magnetic tunnel junction (MTJ) magnetoresistive read head in which the lower pinned layer has a width and height greater than the width and height, respectively, of the overlying central region of the upper free layer, with the side regions of the free layer being oxidized and therefore nonmagnetic. The MTJ read head is formed by patterning resist in the shape of the free layer central region over the stack of layers in the MTJ, ion milling or etching the stack down into the free layer, and then exposing the stack to oxygen to oxidize the ferromagnetic material in the side regions not covered by the resist.
Description
- The invention relates generally to a current-perpendicular-to-the-plane (CPP) magnetoresistive device that operates with the sense current directed perpendicularly to the planes of two ferromagnetic layers separated by a nonmagnetic spacer layer, and more particularly to a magnetic tunnel junction (MTJ) type of CPP device and method for its fabrication.
- A magnetic tunnel junction (MTJ) has two metallic ferromagnetic layers separated by a very thin nonmagnetic insulating tunnel barrier layer, wherein the tunneling current perpendicularly through the layers depends on the relative orientation of the magnetizations in the two ferromagnetic layers. The high magnetoresistance at room temperature and generally low magnetic switching fields of the MTJ makes it a promising candidate for the use in magnetic sensors, such as a read head in a magnetic recording disk drive, and nonvolatile memory elements or cells for magnetic random access memory (MRAM).
- IBM's U.S. Pat. No. 5,650,958 describes an MTJ for use as a magnetoresistive read head and as a non-volatile memory cell wherein one of the ferromagnetic layers has its magnetization fixed, such as by being pinned by exchange coupling with an adjacent antiferromagnetic layer, and the other ferromagnetic layer is “free” to rotate in the presence of an applied magnetic field in the range of interest of the read head or memory cell. When the MTJ is a disk drive magnetoresistive read head, the magnetization of the fixed or pinned ferromagnetic layer will be generally perpendicular to the plane of the disk, and the magnetization of the free ferromagnetic layer will be generally parallel to the plane of the disk but will rotate slightly when exposed to magnetic fields from the recorded data on the disk. When the MTJ is a memory cell, the magnetization of the free ferromagnetic layer will be either parallel or antiparallel to the magnetization of the pinned ferromagnetic layer.
- IBM's U.S. Pat. No. 5,729,410 describes an MTJ magnetoresistive read head with longitudinal biasing of the free ferromagnetic layer in which the MTJ device has electrical leads that connect to the sense circuitry. The leads are in contact with the insulating material in the read gap and the gap material is in contact with the magnetic shields so that the leads are electrically insulated from the shields. IBM's U.S. Pat. No. 5,898,548 describes an MTJ magnetoresistive read head with a narrow gap in which the leads are in direct contact with the magnetic shields, so that the shields also carry current from the sense circuitry.
- In addition to MTJ devices, there are other current-perpendicular-to-the-plane (CPP) sensors that operate with the sense current directed perpendicularly to the planes of two ferromagnetic layers separated by a nonmagnetic spacer layer. One other type of CPP sensor is a spin-valve (SV) sensor in which the nonmagnetic spacer layer is electrically conductive. Thus in a MTJ magnetoresistive read head, the spacer layer is typically alumina (Al2O3) while in a CPP SV magnetoresistive read head the spacer layer is typically copper. CPP SV read heads are described by A. Tanaka et al., “Spin-valve heads in the current-perpendicular-to-plane mode for ultrahigh-density recording”, IEEE TRANSACTIONS ON MAGNETICS, 38 (1): 84-88 Part 1 January 2002.
- In the previously cited '958 patent, the pinned ferromagnetic layer is the lower ferromagnetic layer and has an outer perimeter greater than that of the upper free ferromagnetic layer. This MTJ device is patterned by ion milling down through the upper free ferromagnetic layer, stopping at the barrier layer. Alumina is then deposited on the sides of the free ferromagnetic layer on top of the barrier layer. The ion milling process suffers from the disadvantages of redeposition of conductive material and the inability to precisely control the removal process due to uncertainties in the ion milling rate and film thicknesses, which makes it difficult to avoid damaging the pinned ferromagnetic layer.
- What is needed is an MTJ device with a pinned ferromagnetic layer having an outer perimeter greater than that of the free ferromagnetic layer and that can be fabricated without the disadvantages of the prior art ion milling process.
- The invention is a CPP device wherein the free ferromagnetic layer has a central region of ferromagnetic material defined by side edges, and nonmagnetic side regions adjacent the edges of the central region formed of one or more oxides of the ferromagnetic material. In one embodiment the device is a MTJ magnetoresistive read head formed between two magnetic shields, with the pinned ferromagnetic layer on a first nonmagnetic spacer on the bottom shield, the insulating tunnel barrier layer on the pinned layer, the free ferromagnetic layer on the tunnel barrier layer, a second nonmagnetic spacer on the free ferromagnetic layer and the top shield on the free ferromagnetic layer. The pinned layer has a width and height greater than the width and height, respectively, of the overlying central region of the free layer, with the regions of the free layer other than the central region being oxidized and therefore nonmagnetic. The MTJ read head is formed by patterning resist in the shape of the free layer central region over the stack of layers in the MTJ, ion milling the stack down into the free layer, and then exposing the stack to oxygen to oxidize the ferromagnetic material in the side regions not covered by the resist. The material of the free layer as deposited is an alloy comprising Fe and one or more of Co and Ni, which remains in the central region, with the side regions becoming one or more nonmagnetic oxides of Fe and Co and/or Ni. Additional insulating material different from the oxides, such as Al2O3 or SiO2, can be formed as cover layers over the nonmagnetic side regions of the free layer.
- For a fuller understanding of the nature and advantages of the present invention, reference should be made to the following detailed description taken together with the accompanying figures.
- FIG. 1 is a cross-sectional view a conventional prior art MTJ device.
- FIG. 2 is a cross-sectional view of the MTJ device of the present invention in the form of an MTJ read head for a magnetic recording disk drive.
- FIG. 3 is a perspective view of the MTJ read head of FIG. 2 with the top lead, insulating covers and insulating outer regions removed.
- FIGS.4A-4I illustrate the process sequence for forming the MTJ read head of the present invention with the selective oxidation process to form the oxidized side region of the free layer.
- FIG. 5 is a graph showing the effect of oxidation on the ferromagnetic free layer material vs. time.
- Prior Art
- FIG. 1 illustrates in cross-sectional view a conventional prior art MTJ device. The device includes a
substrate 9, abase multilayer stack 10, a spacer layer of an insulatingtunnel barrier layer 20, atop stack 30, aninsulating layer 40 surroundingtop stack 30 andbottom stack 10, and a top wiring layer orelectrical lead 50. Thetunnel barrier layer 20 is sandwiched between the twostacks - The
base stack 10 formed onsubstrate 9 includes afirst seed layer 12 deposited onsubstrate 9, an optional “template”ferromagnetic layer 14 on theseed layer 12, a layer ofantiferromagnetic material 16 on thetemplate layer 14, and a “pinned”ferromagnetic layer 18 formed on and exchange coupled with the underlyingantiferromagnetic layer 16. Theferromagnetic layer 18 is called the pinned layer because its magnetization direction (shown by arrow 19) is prevented from rotation in the presence of applied magnetic fields in the desired range of interest for the MTJ device, i.e., the field from the write current if the device is a MTJ memory cell, or the field from the data recorded on the disk if the device is a MTJ read head. Thetop electrode stack 30 includes a “free”ferromagnetic layer 32 and a protective orcapping layer 34 formed on thefree layer 32. The magnetization direction of theferromagnetic layer 32 is not pinned by exchange coupling, and is thus free to rotate in the presence of applied magnetic fields in the range of interest. When the device is an MTJ memory cell, the magnetization direction offerromagnetic layer 32 will be either parallel or antiparallel to themagnetization direction 19 of pinnedferromagnetic layer 18. When the device is an MTJ sensor, such as a disk drive read head, the magnetization direction of pinnedferromagnetic layer 18 will be oriented into the paper in FIG. 1 and the magnetization direction of freeferromagnetic layer 32 will be oriented in the plane of the paper in FIG. 1 (perpendicular to the magnetization direction of pinned ferromagnetic layer 18) in the absence of an applied magnetic field, but will rotate slightly when exposed to a magnetic field from the recorded data on the disk, as described in the previously cited '410 patent. - The materials for MTJ devices with the structure illustrated in FIG. 1 are well known, and representative ones will be described. The
MTJ base stack 10 comprises a stack of 200 Å Pt/40 Å Ni81Fe19/100 Å Mn50Fe50/80 Å Ni81Fe19 (layers substrate 9. In addition to Pt, other conducting underlayers include Ta, Cu and Au. Other CoFe and NiFe alloys may be used for the ferromagnetic layers and other antiferromagnetic materials include NiMn, PtMn and IrMn.Substrate 9 would be a silicon wafer if the device is a memory cell.Substrate 9 would typically be the bottom electrically conductive lead located on either the alumina gap material or the magnetic shield material on the trailing surface of the head carrier if the device is a read head, as shown in the previously cited '410 patent. Thestack 10 is grown in the presence of a magnetic field applied parallel to the surface of the substrate wafer. The magnetic field serves to orient the Mn50Fe50antiferromagnetic layer 16.Layer 16 pins the magnetization direction of the NiFe freeferromagnetic layer 18 by exchange coupling. Next, thetunnel barrier layer 20 is formed by depositing and then oxidizing a 5-15 Å Al layer. This creates the Al2O3 insulatingtunnel barrier layer 20. While Al2O3 is the most common tunnel barrier material, a wide range of other materials may be used, including MgO, AlN, aluminum oxynitride, oxides and nitrides of gallium and indium, and bilayers and trilayers of such materials. TheMTJ top stack 30 is an 80 Å Co/200 Å Pt stack (layers ferromagnetic layer 32 is preferably either a single layer of an alloy of Fe and one or more of Co and Ni, or a bilayer of a CoFe alloy and a NiFe alloy. Thetop stack 30 is surrounded by aninsulation layer 40, which is typically SiO2 if the device is a memory cell and alumina if the device is a read head. The junction is contacted by a 200 Å Ag/3000 ÅAu contact layer 50 that serves as the top wiring lead. Other capping or lead materials include Ta, Ti, Ru and Rh. - This MTJ structure is fabricated by sputtering all the layers in the junction stack (layers12, 14, 16, 18, 20, 32, 34) onto the
substrate 9, followed by ion milling down through the freeferromagnetic layer 32 to thebarrier layer 20. This process of direct subtractive removal of the free ferromagnetic layer by ion milling or reactive ion etching (RIE) suffers from the disadvantages of redeposition of conductive material, inability to precisely control the removal process, and ion damage that can extend 20-40 Å below the etched surface. The ion milling or RIE of the free layer and pinned layer can cause redeposition of the material in these layers onto the edges of thetunnel barrier layer 20 and electrically “short” the insulating tunnel barrier at its edges. In addition, uncertainties in the ion milling rate and film thicknesses make it difficult to avoid damaging the underlying layers. Typical ion milling rates are 1 Å/sec for capping material (Ta) and free layer material (NiFe or CoFe). Typical capping layer thickness is 100 Å to 200 Å and typical free layer thickness is 30 Å to 40 Å. The film thickness uniformity and ion mill removal rate uniformity are each approximately 5%. Thus the use of ion milling or RIE to precisely remove thecapping layer 34 andfree layer 32 and stop at thetunnel barrier layer 20 has an inherent uncertainty of 13 Å to 24 Å in the removal process. This uncertainty is greater than or equivalent to the thickness of thetunnel barrier layer 20. - The Invention
- The MTJ device of the present invention is shown in FIG. 2 in the form of an MTJ read head for a magnetic recording disk drive. The cross-sectional view of FIG. 2 is essentially the read head as would be viewed from the disk with “TW” representing the trackwidth of the data tracks on the disk. The layers formed on the
substrate 109, which is typically the permalloy (NiFe) bottom shield or the alumina gap material in the head structure, are the bottomelectrical lead layer 102,seed layer 112,antiferromagnetic layer 116, fixed or pinnedferromagnetic layer 118 with itsmagnetization direction 119 being shown as into the paper, nonmagnetic insulatingtunnel barrier layer 120, freeferromagnetic layer 132 with itsmagnetization direction 135 being in the plane of the paper and perpendicular todirection 119 in the absence of an applied field from the recorded data on the disk, cappinglayer 134 and topelectrical lead 150. The top magnetic shield (not shown) or alumina gap material (not shown) would then be formed ontop lead 150, as depicted in the previously cited '410 and '548 patents. Thebottom lead 102 andtop lead 150 are formed of nonmagnetic materials and thus serve as first and second spacer layers to separate the ferromagnetic layers of the device from the bottommagnetic shield 109 and top magnetic shield, respectively. - Typical material compositions and thicknesses for
layers 102 through 134 are as follows: - 20-50 Å Ru or Ta lead layer/20-50 Å NiFe or NiFeCr seed layer/200 Å PtMn or IrMn antiferromagnetic layer/30 Å NiFe or CoFe or NiFe—CoFe bilayer pinned layer/10-20 Å Al2O3 tunnel barrier layer/30 Å NiFe or CoFe or CoFe—NiFe bilayer free layer/50-100 Å Ta, Ru or Ti capping layer.
- The device is similar to the prior art of FIG. 1 with the primary difference being that there are
nonmagnetic side regions 142 adjacentfree layer 132 that are formed of oxides of the ferromagnetic material making upfree layer 132. Theside regions 142 are formed by selectively oxidizing the free layer to render it locally nonmagnetic (substantially incapable of conducting magnetic flux) and electrically insulating. Insulating alumina covers 140 are formed on top of the oxidizedside regions 142. Additional alumina is located inouter regions 147 surrounding the outer edges of thetunnel barrier layer 120 and the layers beneath it.Covers 140 andouter regions 147 may be formed of other insulating material, such as SiO2. - FIG. 3 is a perspective view of the MTJ read head with the
top lead 150 and alumina covers 140 andouter regions 147 removed. Because the pinnedlayer 118 has a width W wider than the width (trackwidth TW) of thefree layer 132 in the trackwidth direction, better longitudinal biasing of the free layer in this direction is achieved since the edge domain effects of the pinned layer are physically separated from the edges of the free layer by thenonmagnetic side regions 142. FIG. 3 also illustrates that the pinnedlayer 118 can have a height H greater than the height (stripe height SH) of thefree layer 132 in the stripe height dimension perpendicular to the trackwidth dimension. Because the pinnedlayer 118 can be formed with an aspect ratio (H/W) greater than unity, better stabilization of the pinnedlayer magnetization direction 119 along its height H can be achieved. - The MTJ device of the present invention is fabricated using controlled oxidation of selected
regions 142 of thefree layer 132 to render the free layer nonmagnetic and non-conducting in these selected regions above the pinnedlayer 118. The oxidation process does not penetrate the previously oxidizedtunnel barrier layer 120 and therefore can not damage the underlying pinned layer. - FIGS.4A-4I illustrate the process sequence for forming the MTJ device with the selective oxidation process. The process begins (FIG. 4A) by sputter depositing on the substrate (not shown) the MTJ layers 102 through 118 followed by a layer of Al, typically 5-15 Å thick. The Al is then oxidized by evacuation of the Ar sputtering gas and then either introduction of oxygen or exposure to an oxygen plasma. This forms the alumina (Al2O3)
tunnel barrier layer 120, typically 10-20 Å thick. The remaininglayers capping layer 134 to define the lateral edges (TW and SH) of thefree layer 132, as shown in FIG. 4B. The stack is then moved to the RIE or ion milling tool where it is etched through thecapping layer 134 and ending at or into the free layer 132 (FIG. 4C). - Next, the exposed portions of
free layer 132 are oxidized in the RIE or ion milling tool to render theseregions 142 of the free layer nonmagnetic and non-conducting (FIG. 4D). Suitable oxidation processes include ozone treatment, air oxidation, thermal oxidation, plasma oxidation, electrolytic oxidation, implantation of oxygen or molecular oxygen (O2, O3) ions or neutrals. Reactive oxygen plasma induced oxidation can be performed in a RF coupled plasma, electron cyclotron resonance coupled plasma, or an inductively coupled plasma (ICP) system. A preferred process for oxidation of the free layer is with an ICP tool, which generates a dense plasma of oxygen radicals and allows the substrate bias to be controlled separately from the plasma source. When etching a test wafer with photoresist in the ICP system in an oxygen plasma under our typical plasma oxidation conditions, the etch rate is uniform across an entire 5 inch wafer to within 3%. The ICP oxidation process that induced demagnetization of the ferromagnetic layer had parameters of 30 scc O2/min, 20° C. substrate temperature, 10 mT chamber pressure, 50W @ 13.56 MHz applied to the source coils, and 18W @ 13.56 MHz applied to the substrate. - The
regions 142 become oxides of the material in thefree layer 132, e.g., one or more oxides of Fe and Co and/or Ni. Because theunderlying layer 120 is already oxidized, the oxidation process is self-limiting, so control of the oxidation time is not critical. Next, insulation material, typically alumina or SiO2, is deposited to form covers 140 above thenonmagnetic side regions 142, followed by lift-of of the resist 800, resulting in the structure shown in FIG. 4E. While the deposition of thecovers 140 is preferred, this additional step may not be necessary if theoxide regions 142 are sufficiently free of pin holes. New resist 820 is then patterned to define the outside lateral extent of the pinnedlayer 118 as well as the other layers in the stack (FIG. 4F). The stack is then ion milled or RIE to remove all the layers down to the substrate (FIG. 4G), and an insulating layer of alumina or SiO2 is then deposited to form the outer regions 147 (FIG. 4H). Finally the topelectrical lead 150, typically 200 Å of Ta, Au or Cu, is deposited and patterned over the capping layer 134 (FIG. 4I). FIG. 5 is a graph showing the effect of oxidation on the effective ferromagnetic layer thickness (as calculated from measurements of magnetic moment) vs. time. Shown in the plot are data points for two compositions: a 31 Å CoFe single layer and a 10 Å CoFe/32 Å NiFe bilayer. While these two compositions have different physical thicknesses, they each have substantially the same effective magnetic thicknesses as a 36 Å film of NiFe. The oxidation time was approximately 6 minutes to demagnetize the CoFe single layer, and approximately 14 minutes to demagnetize the CoFe/NiFe bilayer. - While the device and method for its fabrication have been described above with respect to an MTJ device, particularly an MTJ sensor in the form an MTJ read head, the invention is also applicable to current-perpendicular-to-the-plane or CPP spin-valve (SV) sensors. A CPP SV read head has a structure substantially the same as the above-described MTJ read head, with the exception that the spacer layer is electrically conductive instead of insulating. For example, a copper spacer layer can replace the alumina tunneling barrier layer.
- While the present invention has been particularly shown and described with reference to the preferred embodiments, it will be understood by those skilled in the art that various changes in form and detail may be made without departing from the spirit and scope of the invention. Accordingly, the disclosed invention is to be considered merely as illustrative and limited in scope only as specified in the appended claims.
Claims (24)
1. A magnetic tunnel junction device comprising:
a substrate;
a pinned ferromagnetic layer on the substrate and having a width in a first dimension in the plane of the pinned layer and a magnetization direction oriented in a preferred direction and substantially prevented from rotation in the presence of an applied magnetic field in the range of interest;
an insulating tunnel barrier layer on the pinned layer;
a free ferromagnetic layer on the tunnel barrier layer and having a width defined by side edges and less than the width of the pinned layer, the free layer having a magnetization direction substantially free to rotate in the presence of an applied magnetic field in the range of interest; and
a nonmagnetic side region located on the tunnel barrier layer on each side of and adjacent to the side edges of the free layer, each side region being formed of one or more oxides of the same ferromagnetic material present in the free layer.
2. The magnetic tunnel junction device according to claim 1 wherein the magnetization directions of the pinned and free ferromagnetic layers are substantially parallel or antiparallel to one another in the absence of an applied magnetic field.
3. The magnetic tunnel junction device according to claim 1 wherein the magnetization directions of the pinned and free ferromagnetic layers are substantially perpendicular to one another in the absence of an applied magnetic field.
4. The magnetic tunnel junction device according to claim 1 wherein the pinned layer has a height in a second dimension in the plane of the pinned layer perpendicular to said first dimension and wherein the free layer has a height less than the height of the pinned layer.
5. The magnetic tunnel junction device according to claim 1 further comprising a capping layer on the free layer.
6. The magnetic tunnel junction device according to claim 1 further comprising a layer of antiferromagnetic material on the substrate below the pinned layer for pinning the magnetization of the pinned layer by antiferromagnetic exchange coupling.
7. The magnetic tunnel junction device according to claim 1 wherein the tunnel barrier layer is formed substantially of alumina.
8. The magnetic tunnel junction device according to claim 1 further comprising an insulating cover on each insulating side region and formed of material having a composition different from the composition of the side region.
9. The magnetic tunnel junction device according to claim 1 wherein the substrate is a magnetic shield layer formed on the trailing surface of a head carrier.
10. The magnetic tunnel junction device according to 9 further comprising a nonmagnetic electrically conductive lead layer on the shield layer.
11. The magnetic tunnel junction device according to claim 1 wherein the free layer is formed of an alloy comprising Co and Fe, and wherein the nonmagnetic side regions are formed of one or more oxides of Co and Fe.
12. The magnetic tunnel junction device according to claim 1 wherein the free layer is formed of an alloy comprising Ni and Fe, and wherein the nonmagnetic side regions are formed of one or more oxides of Ni and Fe.
13. The magnetic tunnel junction device according to claim 1 wherein the free layer is formed of an alloy comprising Co, Ni and Fe, and wherein the nonmagnetic side regions are formed of one or more oxides of Co, Ni and Fe.
14. A magnetic tunnel junction read head for sensing data recorded on a magnetic recording disk, the head comprising:
a first magnetic shield layer;
a fixed ferromagnetic layer over the shield layer and having a width W along a dimension corresponding to the trackwidth TW dimension of the disk and a height H along a dimension substantially perpendicular to the TW dimension, the magnetization of the fixed layer being fixed in a direction along its height;
an insulating tunnel barrier layer on the fixed ferromagnetic layer;
a free ferromagnetic layer formed of an alloy comprising the elements of Fe and one or more of Co and Ni on the tunnel barrier layer and having a width TW defined by side edges and less than W and a stripe height SH less than H, the free layer having a magnetization direction in the TW dimension in the absence of an applied field, the magnetization direction of the free layer being substantially free to rotate in the presence of magnetic fields from the disk;
a nonmagnetic side region located on the tunnel barrier layer on each side of and adjacent to the side edges of the free layer, each side region being formed of one or more oxides of the elements in the alloy of said ferromagnetic free layer; and
a second magnetic shield layer over the free layer and nonmagnetic side regions.
15. The magnetic tunnel junction read head according to claim 14 further comprising a first nonmagnetic electrically conductive bottom lead layer between the first shield layer and the fixed layer, and a second nonmagnetic electrically conductive top lead layer between the free layer and the second shield layer.
16. The magnetic tunnel junction read head according to claim 15 further comprising an antiferromagnetic layer on the bottom lead layer, the fixed layer being located on and in contact with the antiferromagnetic layer and exchange coupled with the fixed layer for pinning the magnetization of the fixed layer in said direction along its height.
17. The magnetic tunnel junction read head according to claim 14 wherein H/W is greater than one.
18. A current-perpendicular to the plane magnetoresistive sensor comprising:
a substrate;
a pinned ferromagnetic layer on the substrate and having a width in a first dimension in the plane of the pinned layer and a magnetization direction oriented in a preferred direction and substantially prevented from rotation in the presence of an applied magnetic field in the range of interest;
a nonmagnetic spacer layer on the pinned layer;
a free ferromagnetic layer on the spacer layer and having a width defined by side edges and less than the width of the pinned layer, the free layer having a magnetization direction substantially free to rotate in the presence of an applied magnetic field in the range of interest; and
a nonmagnetic side region located on the spacer layer on each side of and adjacent to the side edges of the free layer, each side region being formed of one or more oxides of the same ferromagnetic material present in the free layer.
19. The sensor according to claim 18 wherein the spacer layer is electrically insulating.
20. The sensor according to claim 18 wherein the spacer layer is electrically conducting.
21. A method for making a current-perpendicular to the plane magnetoresistive sensor comprising:
depositing on a substrate in succession a layer of antiferromagnetic material, a first layer of ferromagnetic material, a spacer layer of nonmagnetic material, a second layer of ferromagnetic material, and a layer of capping material;
providing a mask over a central region of the capping layer and underlying central region of the second ferromagnetic layer;
removing the capping layer and a portion of the second ferromagnetic layer in side regions not covered by the mask;
oxidizing the remaining material in the second ferromagnetic layer in the side regions not covered by the mask; and
removing the mask.
22. The method according to claim 21 further comprising depositing over the oxidized side regions electrically insulating cover material different from the material of the oxidized side regions.
23. The method according to claim 21 wherein depositing the nonmagnetic spacer layer comprises depositing electrically insulating material.
24. The method according to claim 23 wherein depositing electrically insulating material comprises depositing a layer of aluminum and then oxidizing the aluminum.
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US10/174,866 US20030231437A1 (en) | 2002-06-17 | 2002-06-17 | Current-perpendicular-to-plane magnetoresistive device with oxidized free layer side regions and method for its fabrication |
US10/869,590 US7043823B2 (en) | 2002-06-17 | 2004-06-15 | Method of manufacturing a current-perpendicular-to-plane magnetoresistive device with oxidized free layer side regions |
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US10/174,866 US20030231437A1 (en) | 2002-06-17 | 2002-06-17 | Current-perpendicular-to-plane magnetoresistive device with oxidized free layer side regions and method for its fabrication |
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US7043823B2 (en) | 2006-05-16 |
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