US20030102571A1 - Semiconductor package structure with a heat-dissipation stiffener and method of fabricating the same - Google Patents

Semiconductor package structure with a heat-dissipation stiffener and method of fabricating the same Download PDF

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Publication number
US20030102571A1
US20030102571A1 US10/294,159 US29415902A US2003102571A1 US 20030102571 A1 US20030102571 A1 US 20030102571A1 US 29415902 A US29415902 A US 29415902A US 2003102571 A1 US2003102571 A1 US 2003102571A1
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substrate
stiffener
semiconductor chip
front surface
centrally
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US10/294,159
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Shih-Kuang Chiu
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Siliconware Precision Industries Co Ltd
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Siliconware Precision Industries Co Ltd
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
    • H01L21/563—Encapsulation of active face of flip-chip device, e.g. underfilling or underencapsulation of flip-chip, encapsulation preform on chip or mounting substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
    • H01L23/49833—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers the chip support structure consisting of a plurality of insulating substrates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10—Bump connectors; Manufacturing methods related thereto
    • H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • H01L2224/161—Disposition
    • H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • H01L2224/321—Disposition
    • H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/32225—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732—Location after the connecting process
    • H01L2224/73201—Location after the connecting process on the same surface
    • H01L2224/73203—Bump and layer connectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732—Location after the connecting process
    • H01L2224/73201—Location after the connecting process on the same surface
    • H01L2224/73203—Bump and layer connectors
    • H01L2224/73204—Bump and layer connectors the bump connector being embedded into the layer connector
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732—Location after the connecting process
    • H01L2224/73251—Location after the connecting process on different surfaces
    • H01L2224/73253—Bump and layer connectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151—Die mounting substrate
    • H01L2924/153—Connection portion
    • H01L2924/1531—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
    • H01L2924/15311—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/161—Cap
    • H01L2924/1615—Shape
    • H01L2924/16152—Cap comprising a cavity for hosting the device, e.g. U-shaped cap
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/161—Cap
    • H01L2924/1615—Shape
    • H01L2924/16195—Flat cap [not enclosing an internal cavity]

Definitions

  • This invention relates to semiconductor packaging technology, and more particularly, to a semiconductor package structure with a heat-dissipation stiffener and a method of fabricating the same, which allow the finished package product to be more assured in quality and reliability.
  • flip-chip bonding is an essential fabrication process including a first step of bonding the semiconductor chip over the substrate by means of solder balls; a second step of injecting a cleaning solvent into the gap between the chip and the substrate to wash away the remnant flux therein; a third step of performing an underfill process; a fourth step of performing ball-mounting process to mount solder balls on the back surface of the substrate; and a fifth step of performing a singulation process to cut apart the package body into separate package units.
  • the patented package structure 10 includes a substrate 14 ; a semiconductor chip 12 bonded to the substrate 14 by means of solder balls 30 ; a stiffener 20 having a centrally-hollowed portion 24 and adhered to the substrate 14 by means of an adhesive 46 ; an underfill layer 32 filled and cured in the gap between the semiconductor chip 12 and the substrate 14 ; and a plurality of solder balls implanted on the back surface of the substrate 14 .
  • the stiffener 20 is mounted in position, the semiconductor chip 12 is accommodated within the centrally-hollowed portion 24 thereof, so that the stiffener 20 can be easily integrated to the package structure.
  • the foregoing package structure would be less likely subjected to package warpage.
  • One draw-back to the forgoing package structure is that when a cleaning solvent is injected to the gap between the semiconductor chip 12 and the substrate 14 to clean away remnant solder flux, the cleaning solvent would be partly obstructed by the stiffener 20 , making the cleaning process very difficult to carry out efficiently and thoroughly. When some solder flux is still left, it would cause the subsequently formed flip-chip underfill layer to have voids, which would considerably degrade the quality and reliability of the finished package product.
  • the package structure of the invention includes a substrate having a front surface and a back surface; a thermally-conductive stiffener mounted over the front surface of the substrate, the stiffener being formed with a centrally-hollowed portion and an outward-extending passage; a semiconductor chip mounted on the front surface of the substrate and within the centrally-hollowed portion of the stiffener; an underfill layer filled and cured in a gap between the semiconductor chip and the substrate; and a plurality of solder balls mounted on the back surface of the substrate.
  • the passage can be formed in the front surface of the substrate.
  • the passage is used for the injection of a cleaning solvent into the gap between the semiconductor chip and the substrate so as to clean away remnant solder flux.
  • the cleaning effect can be more enhanced by using, for example, centrifugal, rotating, or disturbing type of flow accelerating means to help increase the flow speed of the injected solvent.
  • the invention allows the cleaning solvent used in the solder flux cleaning process to be unobstructed by the stiffener so that the cleaning solvent can be more smoothly injected into the gap between the semiconductor chip and the substrate. This benefit allows the subsequently formed underfill layer to be substantially free of voids; and therefore, the finished package product is more assured in quality and reliability.
  • FIG. 1 is a schematic top view of the semiconductor package structure disclosed in U.S. Pat. No. 6,020,221;
  • FIG. 2 (PRIOR ART) is a schematic sectional diagram of the semiconductor package structure of FIG. 1;
  • FIG. 3 is a schematic top view of a first preferred embodiment of the semiconductor package structure of the invention.
  • FIG. 4 is a schematic sectional diagram of the semiconductor package structure of FIG. 3 cutting through the line AA′;
  • FIG. 5 is a schematic sectional diagram of the semiconductor package structure of FIG. 3 cutting through the line BB′;
  • FIG. 6 is a schematic sectional diagram of a second preferred embodiment of the semiconductor package structure of the invention.
  • FIG. 7 is a schematic sectional diagram of a third preferred embodiment of the semiconductor package structure of the invention.
  • FIG. 8 is a schematic sectional diagram of a fourth preferred embodiment of the semiconductor package structure of the invention.
  • FIG. 9 is a schematic sectional diagram of a fifth preferred embodiment of the semiconductor package structure of the invention.
  • FIG. 10 is a schematic sectional diagram of a sixth preferred embodiment of the semiconductor package structure of the invention.
  • the first embodiment of the semiconductor package structure of the invention 100 includes a substrate 140 ; a stiffener 200 having a centrally-hollowed portion 240 and adhered to the front surface of the substrate 140 by means of an adhesive 460 ; a semiconductor chip 120 bonded to the front surface of the substrate 140 by means of solder balls 300 and accommodated within the centrally-hollowed portion 240 of the stiffener 200 ; an underfill layer 320 filled and cured in the gap between the semiconductor chip 120 and the substrate 140 ; and a plurality of solder balls 640 mounted on the back surface of the substrate 140 .
  • the stiffener 200 is dimensioned substantially identically to the substrate 140 .
  • the stiffener 200 is formed with at least one passage 250 extending outwards from the centrally-hollowed portion 240 , which allows the cleaning solvent used in subsequent cleaning process to flow smoothly into the gap between the semiconductor chip 120 and the substrate 140 to clean away remnant solder flux.
  • the stiffener 200 should be made of a material that is rigid enough to prevent package warpage, substantially equal in CTE to the substrate 140 , and thermally conductive to provide high heat-dissipation efficiency.
  • the semiconductor chip 120 can be then mounted through the centrally-hollowed portion 240 of the stiffener 200 onto the front surface of the substrate 140 .
  • the stiffener 200 can then serve both as strengthening means and heat-dissipation means to the package structure.
  • a cleaning solvent is injected through the passage 250 into the gap between the semiconductor chip 120 and the substrate 140 for the purpose of cleaning away remnant solder flux in the gap.
  • a flip-chip underfill process is performed to form an underfill layer 320 in the gap between the semiconductor chip 120 and the substrate 140 .
  • a plurality of solder balls 640 are implanted on the back surface of the substrate 140 .
  • a singulation process is performed to provide the intended package product.
  • the semiconductor package structure of the invention allows the cleaning solvent used in the solder flux cleaning process to be unobstructed by the stiffener 200 so that the cleaning solvent can be more smoothly injected into the gap between the semiconductor chip 120 and the substrate 140 .
  • This benefit allows the subsequently formed underfill layer 320 to be substantially free of voids; and therefore, the finished package product is more assured in quality and reliability.
  • the cleaning effect can be more enhanced by using, for example, centrifugal, rotating, or disturbing type of flow accelerating means to help increase the flow speed of the injected solvent.
  • FIG. 6 is a schematic sectional diagram of the second preferred embodiment of the semiconductor package structure of the invention. As shown, this embodiment differs from the previous one only in that this embodiment includes a plurality of passages 250 a. This allows an increase in the contact area between the stiffener 200 a and the substrate 140 , and thus an increase in the strengthening effect and heat-dissipation efficiency by the stiffener 200 a.
  • FIG. 7 is a schematic sectional diagram of the third preferred embodiment of the semiconductor package structure of the invention. As shown, this embodiment is characterized in that the passage 250 b in the stiffener 200 b is formed in the center of the stiffener 200 b. This allows the stiffener 200 b to use its full bottom surface for contact with the substrate 140 , so that the overall contact area between the stiffener 200 b and the substrate 140 can be increased, thereby resulting in an increased strengthening effect and heat-dissipation efficiency.
  • FIG. 8 is a schematic sectional diagram of the fourth preferred embodiment of the semiconductor package structure of the invention. As shown, this embodiment is characterized in that a lid 440 is mounted by means of an adhesive 460 over the top opening of the centrally-hollowed portion 240 of the stiffener 200 for sealing the semiconductor chip 120 .
  • FIG. 9 is a schematic sectional diagram of the fifth preferred embodiment of the semiconductor package structure of the invention. As shown, this embodiment differs from the previous one particularly in that the stiffener 200 d is integrally formed with a lid. In the fabrication process, the semiconductor chip 120 is first mounted on the substrate 140 ; and then, the lidded stiffener 200 d is adhered to the substrate 140 .
  • FIG. 10 is a schematic sectional diagram of a sixth preferred embodiment of the semiconductor package structure of the invention. This embodiment is characterized in that the passage 145 is formed in the substrate 140 e, which also allows the injection of cleaning solvent from outside into the gap between the substrate 140 e and the stiffener 200 e.

Abstract

A semiconductor package structure with a heat-dissipation stiffener and a method of fabricating the same are proposed. The proposed packaging technology includes a substrate; a thermally-conductive stiffener mounted over the front surface of the substrate, the stiffener being formed with a centrally-hollowed portion and an outward-extending passage; a semi-conductor chip mounted on the front surface of the substrate and within the centrally-hollowed portion of the stiffener; an underfill layer filled and cured in a gap between the semiconductor chip and the substrate; and a plurality of solder balls mounted on the back surface of the substrate. Alternatively, the passage can be formed in the front surface of the substrate. During fabrication process, the passage is used for the injection of a cleaning solvent into the gap between the semiconductor chip and the substrate so as to clean away remnant solder flux. The proposed packaging technology allows the cleaning solvent used in the solder flux cleaning process to be unobstructed by the stiffener so that the cleaning solvent can be more smoothly injected into the gap between the semiconductor chip and the substrate. This benefit allows the subsequently formed underfill layer to be substantially free of voids, allowing the finished package product to be more assured in quality and reliability.

Description

    BACKGROUND OF THE INVENTION
  • 1. Field of the Invention [0001]
  • This invention relates to semiconductor packaging technology, and more particularly, to a semiconductor package structure with a heat-dissipation stiffener and a method of fabricating the same, which allow the finished package product to be more assured in quality and reliability. [0002]
  • 2. Description of Related Art [0003]
  • In BGA (Ball Grid Array, BGA) technology, flip-chip bonding is an essential fabrication process including a first step of bonding the semiconductor chip over the substrate by means of solder balls; a second step of injecting a cleaning solvent into the gap between the chip and the substrate to wash away the remnant flux therein; a third step of performing an underfill process; a fourth step of performing ball-mounting process to mount solder balls on the back surface of the substrate; and a fifth step of performing a singulation process to cut apart the package body into separate package units. [0004]
  • One drawback to the forgoing process, however, is that, since the semiconductor chip is different in coefficient of thermal expansion (CTE) from the substrate, the entire package structure would be easily subjected to warpage after undergoing high-temperature conditions during die bonding, flip-chip underfill, and ball mounting processes, which would easily cause chip cracking, making the resulted package product degraded in quality and reliability. When flex or thin substrate is used as the base, the package warpage would be even more worse. [0005]
  • One solution to the foregoing problem is disclosed in U.S. Pat. No. 6,020,221, which teaches the use of a stiffener to help prevent package warpage, whose package structure is briefly described in the following with reference to FIGS. [0006] 1-2. As shown, the patented package structure 10 includes a substrate 14; a semiconductor chip 12 bonded to the substrate 14 by means of solder balls 30; a stiffener 20 having a centrally-hollowed portion 24 and adhered to the substrate 14 by means of an adhesive 46; an underfill layer 32 filled and cured in the gap between the semiconductor chip 12 and the substrate 14; and a plurality of solder balls implanted on the back surface of the substrate 14. When the stiffener 20 is mounted in position, the semiconductor chip 12 is accommodated within the centrally-hollowed portion 24 thereof, so that the stiffener 20 can be easily integrated to the package structure.
  • Due to the provision of the [0007] stiffener 20 which is highly rigid in material quality, the foregoing package structure would be less likely subjected to package warpage. One draw-back to the forgoing package structure, however, is that when a cleaning solvent is injected to the gap between the semiconductor chip 12 and the substrate 14 to clean away remnant solder flux, the cleaning solvent would be partly obstructed by the stiffener 20, making the cleaning process very difficult to carry out efficiently and thoroughly. When some solder flux is still left, it would cause the subsequently formed flip-chip underfill layer to have voids, which would considerably degrade the quality and reliability of the finished package product.
    • SUMMARY OF THE INVENTION
  • It is therefore an objective of this invention to provide a new semiconductor packaging technology that allows the cleaning solvent used to clean away remnant solder flux to be smoothly injected to the gap between the chip and the substrate, so as to allow subsequently formed flip-chip underfill layer to be substantially free of voids, so that the quality and reliability of the finished package product can be more assured. [0008]
  • In accordance with the foregoing and other objectives, the invention proposes a new semiconductor packaging technology. The package structure of the invention includes a substrate having a front surface and a back surface; a thermally-conductive stiffener mounted over the front surface of the substrate, the stiffener being formed with a centrally-hollowed portion and an outward-extending passage; a semiconductor chip mounted on the front surface of the substrate and within the centrally-hollowed portion of the stiffener; an underfill layer filled and cured in a gap between the semiconductor chip and the substrate; and a plurality of solder balls mounted on the back surface of the substrate. Alternatively, the passage can be formed in the front surface of the substrate. During fabrication process, the passage is used for the injection of a cleaning solvent into the gap between the semiconductor chip and the substrate so as to clean away remnant solder flux. The cleaning effect can be more enhanced by using, for example, centrifugal, rotating, or disturbing type of flow accelerating means to help increase the flow speed of the injected solvent. [0009]
  • The invention allows the cleaning solvent used in the solder flux cleaning process to be unobstructed by the stiffener so that the cleaning solvent can be more smoothly injected into the gap between the semiconductor chip and the substrate. This benefit allows the subsequently formed underfill layer to be substantially free of voids; and therefore, the finished package product is more assured in quality and reliability.[0010]
    • BRIEF DESCRIPTION OF DRAWINGS
  • FIG. 1 (PRIOR ART) is a schematic top view of the semiconductor package structure disclosed in U.S. Pat. No. 6,020,221; [0011]
  • FIG. 2 (PRIOR ART) is a schematic sectional diagram of the semiconductor package structure of FIG. 1; [0012]
  • FIG. 3 is a schematic top view of a first preferred embodiment of the semiconductor package structure of the invention; [0013]
  • FIG. 4 is a schematic sectional diagram of the semiconductor package structure of FIG. 3 cutting through the line AA′; [0014]
  • FIG. 5 is a schematic sectional diagram of the semiconductor package structure of FIG. 3 cutting through the line BB′; [0015]
  • FIG. 6 is a schematic sectional diagram of a second preferred embodiment of the semiconductor package structure of the invention; [0016]
  • FIG. 7 is a schematic sectional diagram of a third preferred embodiment of the semiconductor package structure of the invention; [0017]
  • FIG. 8 is a schematic sectional diagram of a fourth preferred embodiment of the semiconductor package structure of the invention; [0018]
  • FIG. 9 is a schematic sectional diagram of a fifth preferred embodiment of the semiconductor package structure of the invention; and [0019]
  • FIG. 10 is a schematic sectional diagram of a sixth preferred embodiment of the semiconductor package structure of the invention.[0020]
    • DETAILED DESCRIPTION OF PREFERRED EMBODIMENTS
  • First Preferred Embodiment [0021]
  • The first preferred embodiment of the invention is disclosed in full details in the following with reference to FIGS. 3, 4, and [0022] 5.
  • As shown, the first embodiment of the semiconductor package structure of the [0023] invention 100 includes a substrate 140; a stiffener 200 having a centrally-hollowed portion 240 and adhered to the front surface of the substrate 140 by means of an adhesive 460; a semiconductor chip 120 bonded to the front surface of the substrate 140 by means of solder balls 300 and accommodated within the centrally-hollowed portion 240 of the stiffener 200; an underfill layer 320 filled and cured in the gap between the semiconductor chip 120 and the substrate 140; and a plurality of solder balls 640 mounted on the back surface of the substrate 140. The stiffener 200 is dimensioned substantially identically to the substrate 140. Further, the stiffener 200 is formed with at least one passage 250 extending outwards from the centrally-hollowed portion 240, which allows the cleaning solvent used in subsequent cleaning process to flow smoothly into the gap between the semiconductor chip 120 and the substrate 140 to clean away remnant solder flux. Moreover, the stiffener 200 should be made of a material that is rigid enough to prevent package warpage, substantially equal in CTE to the substrate 140, and thermally conductive to provide high heat-dissipation efficiency.
  • In the fabrication process, after the [0024] stiffener 200 is assembled in position, the semiconductor chip 120 can be then mounted through the centrally-hollowed portion 240 of the stiffener 200 onto the front surface of the substrate 140. The stiffener 200 can then serve both as strengthening means and heat-dissipation means to the package structure. After this, a cleaning solvent is injected through the passage 250 into the gap between the semiconductor chip 120 and the substrate 140 for the purpose of cleaning away remnant solder flux in the gap. Next, a flip-chip underfill process is performed to form an underfill layer 320 in the gap between the semiconductor chip 120 and the substrate 140. After this, a plurality of solder balls 640 are implanted on the back surface of the substrate 140. Finally, a singulation process is performed to provide the intended package product.
  • It can be learned from the foregoing description that the semiconductor package structure of the invention allows the cleaning solvent used in the solder flux cleaning process to be unobstructed by the [0025] stiffener 200 so that the cleaning solvent can be more smoothly injected into the gap between the semiconductor chip 120 and the substrate 140. This benefit allows the subsequently formed underfill layer 320 to be substantially free of voids; and therefore, the finished package product is more assured in quality and reliability. The cleaning effect can be more enhanced by using, for example, centrifugal, rotating, or disturbing type of flow accelerating means to help increase the flow speed of the injected solvent.
  • Second Preferred Embodiment [0026]
  • FIG. 6 is a schematic sectional diagram of the second preferred embodiment of the semiconductor package structure of the invention. As shown, this embodiment differs from the previous one only in that this embodiment includes a plurality of [0027] passages 250 a. This allows an increase in the contact area between the stiffener 200 a and the substrate 140, and thus an increase in the strengthening effect and heat-dissipation efficiency by the stiffener 200 a.
  • Third Preferred Embodiment [0028]
  • FIG. 7 is a schematic sectional diagram of the third preferred embodiment of the semiconductor package structure of the invention. As shown, this embodiment is characterized in that the passage [0029] 250 b in the stiffener 200 b is formed in the center of the stiffener 200 b. This allows the stiffener 200 b to use its full bottom surface for contact with the substrate 140, so that the overall contact area between the stiffener 200 b and the substrate 140 can be increased, thereby resulting in an increased strengthening effect and heat-dissipation efficiency.
  • Fourth Preferred Embodiment [0030]
  • FIG. 8 is a schematic sectional diagram of the fourth preferred embodiment of the semiconductor package structure of the invention. As shown, this embodiment is characterized in that a [0031] lid 440 is mounted by means of an adhesive 460 over the top opening of the centrally-hollowed portion 240 of the stiffener 200 for sealing the semiconductor chip 120.
  • Fifth Preferred Embodiment [0032]
  • FIG. 9 is a schematic sectional diagram of the fifth preferred embodiment of the semiconductor package structure of the invention. As shown, this embodiment differs from the previous one particularly in that the [0033] stiffener 200 d is integrally formed with a lid. In the fabrication process, the semiconductor chip 120 is first mounted on the substrate 140; and then, the lidded stiffener 200 d is adhered to the substrate 140.
  • Sixth Preferred Embodiment [0034]
  • FIG. 10 is a schematic sectional diagram of a sixth preferred embodiment of the semiconductor package structure of the invention. This embodiment is characterized in that the [0035] passage 145 is formed in the substrate 140 e, which also allows the injection of cleaning solvent from outside into the gap between the substrate 140 e and the stiffener 200 e.
  • The invention has been described using exemplary embodiments. However, it is to be understood that the scope of the invention is not limited to the disclosed embodiments. On the contrary, it is intended to cover various modifications and similar arrangements. The scope of the claims, therefore, should be accorded the broadest interpretation so as to encompass all such modifications and similar arrangements. [0036]

Claims (16)

What is claimed is:
1. A semiconductor package structure, which comprises:
a substrate having a front surface and a back surface;
a thermally-conductive stiffener mounted over the front surface of the substrate, the stiffener being formed with a centrally-hollowed portion and an outward-extending passage;
a semiconductor chip mounted on the front surface of the substrate and within the centrally-hollowed portion of the stiffener;
an underfill layer filled and cured in a gap between the semiconductor chip and the substrate; and
a plurality of solder balls mounted on the back surface of the substrate.
2. The semiconductor package structure of claim 1, wherein the centrally-hollowed portion of the stiffener is greater in dimension than the semiconductor chip to allow the semiconductor chip to be accommodated therein.
3. The semiconductor package structure of claim 1 or 2, wherein the semiconductor chip is bonded to the substrate by means of solder balls.
4. The semiconductor package structure of claim 1 or 2, further comprising:
a lid mounted over the centrally-hollowed portion of the stiffener for sealing the semiconductor chip therein.
5. The semiconductor package structure of claim 4, wherein the lid is integrally formed with the stiffener.
6. A thermally-conductive stiffener for use on a semiconductor package, which is formed with a centrally-hollowed portion and a passage extending outwards from the centrally-hollowed portion to the edge thereof.
7. A semiconductor package structure, which comprises:
a substrate having a front surface and a back surface, with the front surface being formed with a passage extending from edge to center of the substrate;
a thermally-conductive stiffener mounted over the front surface of the substrate, the stiffener being formed with a centrally-hollowed portion;
a semiconductor chip mounted on the front surface of the substrate and within the centrally-hollowed portion of the stiffener;
an underfill layer filled and cured in a gap between the semiconductor chip and the substrate; and
a plurality of solder balls mounted on the back surface of the substrate.
8. A substrate for use on a semiconductor package, which has a front surface and a back surface, with the front surface being formed with a passage extending from edge to center of the substrate.
9. A method for fabricating a semiconductor package, comprising the steps of:
preparing a substrate having a front surface and a back surface;
mounting a thermally-conductive stiffener over the front surface of the substrate, the stiffener being formed with a centrally-hollowed portion and an outward-extending passage;
mounting a semiconductor chip through the centrally-hollowed portion of the stiffener onto the front surface of the substrate;
injecting a cleaning solvent through the passage in the stiffener into the gap between the semiconductor chip and the substrate;
performing a flip-chip underfill process to form an underfill layer in the gap between the semiconductor chip and the substrate;
implanting a plurality of solder balls on the back surface of the substrate; and
performing a singulation process to cut apart each package unit.
10. A method for fabricating a semiconductor package, comprising the steps of:
preparing a substrate having a front surface and a back surface, with the front surface being formed with a passage extending from edge to center of the substrate;
mounting a thermally-conductive stiffener over the front surface of the substrate, the stiffener being formed with a centrally-hollowed portion;
mounting a semiconductor chip through the centrally-hollowed portion of the stiffener onto the front surface of the substrate;
injecting a cleaning solvent through the passage into the gap between the semiconductor chip and the substrate;
performing a flip-chip underfill process to form an underfill layer in the gap between the semiconductor chip and the substrate;
implanting a plurality of solder balls on the back surface of the substrate; and
performing a singulation process to cut apart each package unit.
11. The method of claim 9 or 10, further comprising the step of:
accelerating the flow speed of the cleaning solvent.
12. The method of claim 11, wherein the cleaning solvent is accelerated through centrifugal type of flow accelerating means.
13. The method of claim 11, wherein the cleaning solvent is accelerated through rotating type of flow accelerating means.
14. The method of claim 11, wherein the cleaning solvent is accelerated through disturbance type of flow accelerating means.
15. The method of claim 9 or 10, wherein the semiconductor chip is bonded to the substrate by means of solder balls.
16. The method of claim 9 or 10, further comprising the step of:
mounting a lid over the centrally-hollowed portion of the stiffener to seal the semiconductor chip therein.
US10/294,159 2000-05-12 2002-11-14 Semiconductor package structure with a heat-dissipation stiffener and method of fabricating the same Abandoned US20030102571A1 (en)

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