US20020127773A1 - Production of semiconductor device - Google Patents

Production of semiconductor device Download PDF

Info

Publication number
US20020127773A1
US20020127773A1 US10/138,256 US13825602A US2002127773A1 US 20020127773 A1 US20020127773 A1 US 20020127773A1 US 13825602 A US13825602 A US 13825602A US 2002127773 A1 US2002127773 A1 US 2002127773A1
Authority
US
United States
Prior art keywords
chip
metal electrode
semiconductor chip
solid device
bumps
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US10/138,256
Inventor
Kazutaka Shibata
Shigeyuki Ueda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to US10/138,256 priority Critical patent/US20020127773A1/en
Publication of US20020127773A1 publication Critical patent/US20020127773A1/en
Abandoned legal-status Critical Current

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/12—Mountings, e.g. non-detachable insulating substrates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L24/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10—Bump connectors; Manufacturing methods related thereto
    • H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
    • H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
    • H01L2224/13001—Core members of the bump connector
    • H01L2224/13099—Material
    • H01L2224/131—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
    • H01L2224/13138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
    • H01L2224/13144—Gold [Au] as principal constituent
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10—Bump connectors; Manufacturing methods related thereto
    • H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
    • H01L2224/818—Bonding techniques
    • H01L2224/81801—Soldering or alloying
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01004—Beryllium [Be]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01005—Boron [B]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01006—Carbon [C]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01032—Germanium [Ge]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01033—Arsenic [As]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01078—Platinum [Pt]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01079—Gold [Au]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/102—Material of the semiconductor or solid state bodies
    • H01L2924/1025—Semiconducting materials
    • H01L2924/10251—Elemental semiconductors, i.e. Group IV
    • H01L2924/10253—Silicon [Si]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/102—Material of the semiconductor or solid state bodies
    • H01L2924/1025—Semiconducting materials
    • H01L2924/1026—Compound semiconductors
    • H01L2924/1032—III-V
    • H01L2924/10329—Gallium arsenide [GaAs]

Definitions

  • the present invention relates to a method of mounting a semiconductor chip on a surface of a solid device with a face-down posture to produce a semiconductor device.
  • bumps are formed in a raised state.
  • bumps are also formed at positions corresponding to the bumps formed on the semiconductor chip to be mounted.
  • an anisotropic conductive film is interposed between the semiconductor chip and the semiconductor chip or the wiring board as the base.
  • the anisotropic conductive film has a structure in which conductive particles are dispersed in a resin film having adhesive properties.
  • the anisotropic conductive film is crushed between the bumps. Consequently, the bumps are bonded to each other by the resin film having adhesive properties, and conductive particles are sandwiched between the bumps, thereby achieving electrical connection between the bumps.
  • the bumps on the semiconductor chip and the bumps, which are opposed thereto, on the semiconductor chip or the wiring board as the base can be bonded to each other by being directly abutted and pressed against each other even if the anisotropic conductive film is not used. Consequently, it is possible to shorten time required for the step of mounting the semiconductor chip.
  • the opposed bumps may not be satisfactorily joined to each other if the surfaces of the bumps (a joint surface between the bumps) are dirty because an impurity layer adheres thereto.
  • An object of the present invention is to provide a method of producing a semiconductor device, which makes it possible to shorten time required for the step of producing the semiconductor device and to reliably bond a metal electrode portion on a semiconductor chip and a metal electrode portion on a solid device to each other.
  • the present invention relates to a method of opposing and joining a surface of a semiconductor chip to a surface of a solid device to produce a semiconductor device.
  • the method according to the present invention comprises the steps of directly abutting and pressing a metal electrode portion formed in a raised state on the surface of the solid device and a metal electrode portion formed in a raised state on the surface of the semiconductor chip; and transmitting ultrasonic vibration to the metal electrode portions which are pressed against each other.
  • the solid device may be a semiconductor chip other than the semiconductor chip or a wiring board.
  • both the metal electrode portions which are respectively formed in a raised state on the surfaces of the solid device and the semiconductor chip are bumps composed of gold.
  • the metal electrode portion formed on the surface of the semiconductor chip and the metal electrode portion formed on the surface of the solid device are bonded to each other by transmitting the ultrasonic vibration to a portion between the metal electrode portion on the semiconductor chip and the metal electrode portion on the solid device while pressing the metal electrode portions against each other.
  • the ultrasonic vibration may be inputted to the semiconductor chip or the solid device.
  • the ultrasonic vibration which has been inputted to the semiconductor chip or the solid device reaches a joint surface between the metal electrode portion on the semiconductor chip and the metal electrode portion on the solid device upon propagating through the semiconductor chip or the solid device.
  • FIGS. 1A, 1B and 1 C are illustrative cross-sectional views showing the steps of a method of producing a semiconductor device according to an embodiment of the present invention.
  • FIGS. 1A, 1B and 1 C are illustrative cross-sectional views showing the steps of a method of producing a semiconductor device according to an embodiment of the present invention.
  • the producing method shown in FIGS. 1A to 1 C is a method of producing a semiconductor device having a chip-on-chip structure by mounting a secondary chip (daughter chip) 20 on a surface 11 of a primary chip (mother chip) 10 serving as a solid device by a face-down method.
  • the primary chip 10 and the secondary chip 20 are composed of silicon, for example.
  • the surface 11 of the primary chip 10 is a surface, on the side of an active surface layer region on which functional devices such as a transistor forming an internal circuit are formed, of a semiconductor substrate forming a base body of the primary chip 10 .
  • the uppermost surface is covered with a protective film composed of an insulating material.
  • a surface 21 of the secondary chip 20 is a surface, on the side of an active surface layer region on which functional devices forming an internal circuit are formed, of a semiconductor substrate forming a base body of the secondary chip 20 .
  • the uppermost surface is covered with a protective film composed of an insulating material.
  • a plurality of bumps 12 composed of gold, for example, are formed in a raised state on the surface 11 of the primary chip 10 .
  • a plurality of bumps 22 composed of gold, for example are formed in a raised state at positions, corresponding to the bumps 12 on the primary chip 10 , on the surface 21 of the secondary chip 20 .
  • the bumps 12 and 22 can be formed by respectively forming openings in the protective films covering the uppermost surfaces of the primary chip 10 and the secondary chip 20 to expose internal wirings and then, gold-plating the exposed wirings.
  • the secondary chip 20 is mounted on the primary chip 10 by a so-called face-down method with the surface 21 on which the bumps 22 are formed directed toward the surface 11 of the primary chip 10 .
  • the primary chip 10 and the secondary chip 20 are aligned with each other such that the bumps 22 on the secondary chip 20 can be respectively abutted against the bumps 12 on the primary chip 10 . Thereafter, the primary chip 10 and the secondary chip 20 are made to approach, to respectively abut the bumps 22 on the secondary chip 20 against the bumps 12 on the primary chip 10 , as shown in FIG. 1A.
  • the approaching step of the primary chip 10 and the secondary chip 20 may be carried out after aligning the primary chip 10 and the secondary chip 20 , or may be carried out simultaneously with the alignment.
  • ultrasonic vibration at a predetermined energy is transmitted to the secondary chip 20 while pressing the secondary chip 20 against the primary chip 10 using a ultrasonic horn H.
  • the ultrasonic vibration transmitted to the secondary chip 20 from the ultrasonic horn H propagates through the secondary chip 20 , to reach a joint surface between the bump 22 on the secondary chip 20 and the bump 12 on the primary chip 10 . Therefore, a shear force along the joint surface between the bump 22 on the secondary chip 20 and the bump 12 on the secondary chip 10 is exerted on the joint surface by the ultrasonic vibration in addition to a pressing force by pressing the secondary chip 20 .
  • the impurity layer adheres to surfaces of the bumps 12 and 22 , the impurity layer is torn by the shear force, exposing the surfaces of the bumps 12 and 22 . Consequently, the surface of the bump 12 and the surface of the bump 22 are directly brought into contact with each other, and gold which is a material composing the bumps 12 and 22 is satisfactorily diffused. Accordingly, the bump 12 and the bump 22 are bonded (ultrasonically welded). Time required for the bonding is relatively short, for example, approximately 0.2 seconds.
  • the present embodiment it is possible to bond the bump 12 on the primary chip 10 and the bump 22 on the secondary chip 20 to each other in a short time by transmitting the ultrasonic vibration to the joint surface between the bump 12 and the bump 22 while pressing the bump 22 against the bump 12 to directly bring the bumps into contact with each other. Accordingly, time required to produce the semiconductor device can be made shorter, as compared with that in the method of connecting the primary chip 10 and the secondary chip 20 with an anisotropic conductive film interposed therebetween.
  • both the primary chip 10 and the secondary chip 20 are assumed to be composed of silicon, for example, they may be semiconductor chips using another arbitrary semiconductor material such as a compound semiconductor (for example, a gallium arsenide semiconductor) or a germanium semiconductor in addition to silicon.
  • a semiconductor material for the primary chip 10 and a semiconductor material for the secondary chip 20 may be the same or different from each other.
  • the present invention is also applicable to a method of producing a semiconductor device having a flip-chip bonding structure for opposing and joining by a face-down method a surface of a semiconductor chip to a surface of a wiring board serving as a solid device.

Abstract

A method of opposing and joining a surface of a solid device and a surf ace of a semiconductor chip. A metal electrode portion formed in a raised state on the surface of the solid device and a metal electrode portion formed in a raised state on the surface of the semiconductor chip are directly abutted and pressed against each other. In the state, ultrasonic vibration is transmitted to the metal electrode portions which are pressed against each other, to join the metal electrode portions to each other.

Description

    BACKGROUND OF THE INVENTION
  • 1. Field of the Invention [0001]
  • The present invention relates to a method of mounting a semiconductor chip on a surface of a solid device with a face-down posture to produce a semiconductor device. [0002]
  • 2. Description of Related Art [0003]
  • Known as a method of mounting a semiconductor chip on another semiconductor chip or a wiring board has been a face-down method for opposing and joining a surface of a semiconductor chip to a surface of a solid device such as another semiconductor chip or a wiring board. [0004]
  • On the surface of the semiconductor chip to be mounted by the face-down method, metal electrode portions called bumps are formed in a raised state. On the other hand, on the surface of the other semiconductor chip or the wiring board as a base, bumps are also formed at positions corresponding to the bumps formed on the semiconductor chip to be mounted. In mounting the semiconductor chip on the other semiconductor chip or the wiring board as the base, an anisotropic conductive film is interposed between the semiconductor chip and the semiconductor chip or the wiring board as the base. Thereafter, the bumps on the semiconductor chip and the bumps, which are opposed thereto, on the semiconductor chip or the wiring board as the base are pressed against each other. [0005]
  • The anisotropic conductive film has a structure in which conductive particles are dispersed in a resin film having adhesive properties. When the bumps which are opposed to each other with the anisotropic conductive film interposed therebetween are pressed against each other, therefore, the anisotropic conductive film is crushed between the bumps. Consequently, the bumps are bonded to each other by the resin film having adhesive properties, and conductive particles are sandwiched between the bumps, thereby achieving electrical connection between the bumps. [0006]
  • However, it takes relatively long for the anisotropic conductive film to be crushed between the opposed bumps, exhibiting the adhesive properties of the resin film in the anisotropic conductive film. Therefore, it takes relatively long for the step of mounting the semiconductor chip using the anisotropic conductive film. [0007]
  • When gold is used as a material for the bumps, it is considered that the bumps on the semiconductor chip and the bumps, which are opposed thereto, on the semiconductor chip or the wiring board as the base can be bonded to each other by being directly abutted and pressed against each other even if the anisotropic conductive film is not used. Consequently, it is possible to shorten time required for the step of mounting the semiconductor chip. [0008]
  • In this method, however, the opposed bumps may not be satisfactorily joined to each other if the surfaces of the bumps (a joint surface between the bumps) are dirty because an impurity layer adheres thereto. [0009]
    • SUMMARY OF THE INVENTION
  • An object of the present invention is to provide a method of producing a semiconductor device, which makes it possible to shorten time required for the step of producing the semiconductor device and to reliably bond a metal electrode portion on a semiconductor chip and a metal electrode portion on a solid device to each other. [0010]
  • The present invention relates to a method of opposing and joining a surface of a semiconductor chip to a surface of a solid device to produce a semiconductor device. The method according to the present invention comprises the steps of directly abutting and pressing a metal electrode portion formed in a raised state on the surface of the solid device and a metal electrode portion formed in a raised state on the surface of the semiconductor chip; and transmitting ultrasonic vibration to the metal electrode portions which are pressed against each other. [0011]
  • The solid device may be a semiconductor chip other than the semiconductor chip or a wiring board. [0012]
  • It is preferable that both the metal electrode portions which are respectively formed in a raised state on the surfaces of the solid device and the semiconductor chip are bumps composed of gold. [0013]
  • According to the present invention, the metal electrode portion formed on the surface of the semiconductor chip and the metal electrode portion formed on the surface of the solid device are bonded to each other by transmitting the ultrasonic vibration to a portion between the metal electrode portion on the semiconductor chip and the metal electrode portion on the solid device while pressing the metal electrode portions against each other. [0014]
  • When the metal electrode portion on the semiconductor chip and the metal electrode portion on the solid device are bonded to each other with an anisotropic conductive film interposed between the semiconductor chip and the solid device by the adhesive properties of the anisotropic conductive film, it takes approximately 20 seconds for the bonding. Contrary to this, in the method according to the present invention, when both the metal electrode portion on the semiconductor chip and the metal electrode portion on the solid device are composed of gold, time required to bond the metal electrode portion on the semiconductor chip and the metal electrode portion on the solid device is relatively short, for example, approximately 0.2 seconds. In the method according to the present invention, therefore, time required to produce the semiconductor device can be made shorter, as compared with that in the method of bonding the semiconductor chip and the solid device using the anisotropic conductive film. [0015]
  • Even if an impurity layer adheres to the surfaces of the metal electrode portions, the adhering impurity layer is torn by the transmission of the ultrasonic vibration. Consequently, metal atoms composing the metal electrode portions can be satisfactorily diffused between the metal electrode portions. Accordingly, it is possible to reliably bond the metal electrode portion on the semiconductor chip and the metal electrode portion on the solid device. [0016]
  • The ultrasonic vibration may be inputted to the semiconductor chip or the solid device. The ultrasonic vibration which has been inputted to the semiconductor chip or the solid device reaches a joint surface between the metal electrode portion on the semiconductor chip and the metal electrode portion on the solid device upon propagating through the semiconductor chip or the solid device. [0017]
  • The foregoing and other objects, features, aspects and advantages of the present invention will become more apparent from the following detailed description of the present invention when taken in conjunction with the accompanying drawings.[0018]
    • BRIEF DESCRIPTION OF THE DRAWINGS
  • FIGS. 1A, 1B and [0019] 1C are illustrative cross-sectional views showing the steps of a method of producing a semiconductor device according to an embodiment of the present invention.
    • DESCRIPTION OF THE PREFERRED EMBODIMENTS
  • FIGS. 1A, 1B and [0020] 1C are illustrative cross-sectional views showing the steps of a method of producing a semiconductor device according to an embodiment of the present invention. The producing method shown in FIGS. 1A to 1C is a method of producing a semiconductor device having a chip-on-chip structure by mounting a secondary chip (daughter chip) 20 on a surface 11 of a primary chip (mother chip) 10 serving as a solid device by a face-down method.
  • The [0021] primary chip 10 and the secondary chip 20 are composed of silicon, for example. The surface 11 of the primary chip 10 is a surface, on the side of an active surface layer region on which functional devices such as a transistor forming an internal circuit are formed, of a semiconductor substrate forming a base body of the primary chip 10. The uppermost surface is covered with a protective film composed of an insulating material. Similarly, a surface 21 of the secondary chip 20 is a surface, on the side of an active surface layer region on which functional devices forming an internal circuit are formed, of a semiconductor substrate forming a base body of the secondary chip 20. The uppermost surface is covered with a protective film composed of an insulating material.
  • A plurality of [0022] bumps 12 composed of gold, for example, are formed in a raised state on the surface 11 of the primary chip 10. On the other hand, a plurality of bumps 22 composed of gold, for example, are formed in a raised state at positions, corresponding to the bumps 12 on the primary chip 10, on the surface 21 of the secondary chip 20. The bumps 12 and 22 can be formed by respectively forming openings in the protective films covering the uppermost surfaces of the primary chip 10 and the secondary chip 20 to expose internal wirings and then, gold-plating the exposed wirings.
  • The [0023] secondary chip 20 is mounted on the primary chip 10 by a so-called face-down method with the surface 21 on which the bumps 22 are formed directed toward the surface 11 of the primary chip 10.
  • Specifically, the [0024] primary chip 10 and the secondary chip 20 are aligned with each other such that the bumps 22 on the secondary chip 20 can be respectively abutted against the bumps 12 on the primary chip 10. Thereafter, the primary chip 10 and the secondary chip 20 are made to approach, to respectively abut the bumps 22 on the secondary chip 20 against the bumps 12 on the primary chip 10, as shown in FIG. 1A. The approaching step of the primary chip 10 and the secondary chip 20 may be carried out after aligning the primary chip 10 and the secondary chip 20, or may be carried out simultaneously with the alignment.
  • As shown in FIG. 1B, ultrasonic vibration at a predetermined energy is transmitted to the [0025] secondary chip 20 while pressing the secondary chip 20 against the primary chip 10 using a ultrasonic horn H. The ultrasonic vibration transmitted to the secondary chip 20 from the ultrasonic horn H propagates through the secondary chip 20, to reach a joint surface between the bump 22 on the secondary chip 20 and the bump 12 on the primary chip 10. Therefore, a shear force along the joint surface between the bump 22 on the secondary chip 20 and the bump 12 on the secondary chip 10 is exerted on the joint surface by the ultrasonic vibration in addition to a pressing force by pressing the secondary chip 20. Even if an impurity layer adheres to surfaces of the bumps 12 and 22, the impurity layer is torn by the shear force, exposing the surfaces of the bumps 12 and 22. Consequently, the surface of the bump 12 and the surface of the bump 22 are directly brought into contact with each other, and gold which is a material composing the bumps 12 and 22 is satisfactorily diffused. Accordingly, the bump 12 and the bump 22 are bonded (ultrasonically welded). Time required for the bonding is relatively short, for example, approximately 0.2 seconds.
  • When the joining between the [0026] bump 12 on the primary chip 10 and the bump 22 on the secondary chip 20 using ultrasonic waves is thus completed, mounting of the secondary chip 20 on the primary chip 10 is achieved, as shown in FIG. 1C.
  • As described in the foregoing, according to the present embodiment, it is possible to bond the [0027] bump 12 on the primary chip 10 and the bump 22 on the secondary chip 20 to each other in a short time by transmitting the ultrasonic vibration to the joint surface between the bump 12 and the bump 22 while pressing the bump 22 against the bump 12 to directly bring the bumps into contact with each other. Accordingly, time required to produce the semiconductor device can be made shorter, as compared with that in the method of connecting the primary chip 10 and the secondary chip 20 with an anisotropic conductive film interposed therebetween.
  • Even if the impurity layer adheres to the surfaces of the [0028] bumps 12 and 22, the adhering impurity layer is torn by the transmission of the ultrasonic vibration. Consequently, gold composing the bumps 12 and 22 can be satisfactorily diffused between the bump 12 and the bump 22, thereby making it possible to reliably bond the bump 12 and the bump 22.
  • Although description has been made of one embodiment of the present invention, the present invention can be also embodied in another embodiment. Although both the [0029] primary chip 10 and the secondary chip 20 are assumed to be composed of silicon, for example, they may be semiconductor chips using another arbitrary semiconductor material such as a compound semiconductor (for example, a gallium arsenide semiconductor) or a germanium semiconductor in addition to silicon. In this case, a semiconductor material for the primary chip 10 and a semiconductor material for the secondary chip 20 may be the same or different from each other.
  • Although in the above-mentioned one embodiment, a case where the present invention is applied to a method of producing a semiconductor device having a chip-on-chip structure is taken as an example, the present invention is also applicable to a method of producing a semiconductor device having a flip-chip bonding structure for opposing and joining by a face-down method a surface of a semiconductor chip to a surface of a wiring board serving as a solid device. [0030]
  • Although the present invention has been described and illustrated in detail, it is clearly understood that the same is by way of illustration and example only and is not to be taken by way of limitation, the spirit and scope of the present invention being limited only by the terms of the appended claims. [0031]
  • The application claims the conventional priority benefits of Japanese Patent Application Serial No. 11-184185 filed with the Japanese Patent Office on Jun. 29, 1999, the disclosure of which is incorporated herein by reference. [0032]

Claims (5)

What is claimed is:
1. A method of producing a semiconductor device, comprising the steps of:
opposing a surface of a solid device and a surface of a semiconductor chip;
directly abutting and pressing a metal electrode portion formed in a raised state on the surface of said solid device and a metal electrode portion formed in a raised state on the surface of the semiconductor chip; and
transmitting ultrasonic vibration to the metal electrode portions which are pressed against each other, to join the metal electrode portions to each other.
2. The method according to claim 1, wherein
said solid device is a semiconductor chip other than said semiconductor chip.
3. The method according to claim 1, wherein
said solid device is a wiring board.
4. The method according to claim 1, wherein
the metal electrode portions which are respectively formed in a raised state on the surfaces of said solid device and the semiconductor chip are bumps composed of gold.
5. The method according to claim 1, wherein
said ultrasonic vibration is inputted to said semiconductor chip or the solid device, and is transmitted to a joint surface between the metal electrode portion on the semiconductor chip and the metal electrode portion on the solid device upon propagating through the semiconductor chip or the solid device.
US10/138,256 1999-06-29 2002-05-06 Production of semiconductor device Abandoned US20020127773A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US10/138,256 US20020127773A1 (en) 1999-06-29 2002-05-06 Production of semiconductor device

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP11184185A JP2001015553A (en) 1999-06-29 1999-06-29 Manufacture of semiconductor device
JP11-184185 1999-06-29
US09/604,747 US6399419B1 (en) 1999-06-29 2000-06-28 Production of semiconductor device
US10/138,256 US20020127773A1 (en) 1999-06-29 2002-05-06 Production of semiconductor device

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
US09/604,747 Continuation US6399419B1 (en) 1999-06-29 2000-06-28 Production of semiconductor device

Publications (1)

Publication Number Publication Date
US20020127773A1 true US20020127773A1 (en) 2002-09-12

Family

ID=16148858

Family Applications (2)

Application Number Title Priority Date Filing Date
US09/604,747 Expired - Fee Related US6399419B1 (en) 1999-06-29 2000-06-28 Production of semiconductor device
US10/138,256 Abandoned US20020127773A1 (en) 1999-06-29 2002-05-06 Production of semiconductor device

Family Applications Before (1)

Application Number Title Priority Date Filing Date
US09/604,747 Expired - Fee Related US6399419B1 (en) 1999-06-29 2000-06-28 Production of semiconductor device

Country Status (4)

Country Link
US (2) US6399419B1 (en)
JP (1) JP2001015553A (en)
KR (1) KR100699637B1 (en)
TW (1) TW451376B (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050227412A1 (en) * 2004-03-31 2005-10-13 Aptos Corporation Flexible multi-chip module and method of making the same
US20070108627A1 (en) * 2005-11-15 2007-05-17 Matsushita Electric Industrial Co., Ltd. Semiconductor device and method for manufacturing the same
CN101996905A (en) * 2009-08-24 2011-03-30 香港理工大学 Method and system for bonding electrical devices using an electrically conductive adhesive
US8981574B2 (en) 2012-12-20 2015-03-17 Samsung Electronics Co., Ltd. Semiconductor package

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5696031A (en) 1996-11-20 1997-12-09 Micron Technology, Inc. Device and method for stacking wire-bonded integrated circuit dice on flip-chip bonded integrated circuit dice
JP2000223656A (en) * 1999-02-03 2000-08-11 Rohm Co Ltd Semiconductor device for radio communication device and radio communication device using the same
US6297562B1 (en) * 1999-09-20 2001-10-02 Telefonaktieboalget Lm Ericsson (Publ) Semiconductive chip having a bond pad located on an active device
JP2001308141A (en) * 2000-02-18 2001-11-02 Sony Corp Method of manufacturing electronic circuit device
US6838316B2 (en) * 2002-03-06 2005-01-04 Kabushiki Kaisha Toshiba Semiconductor device manufacturing method using ultrasonic flip chip bonding technique
US7612443B1 (en) 2003-09-04 2009-11-03 University Of Notre Dame Du Lac Inter-chip communication
KR20060005910A (en) * 2004-07-14 2006-01-18 (주)아이셀론 A junction structure of a display driver chip/ic chip and a flexible substrate using a au flat bump and a junction method thereof
JP4863746B2 (en) * 2006-03-27 2012-01-25 富士通株式会社 Semiconductor device and manufacturing method thereof
JP5119948B2 (en) * 2008-01-24 2013-01-16 株式会社デンソー Manufacturing method of semiconductor device
US9620473B1 (en) 2013-01-18 2017-04-11 University Of Notre Dame Du Lac Quilt packaging system with interdigitated interconnecting nodules for inter-chip alignment
KR102152906B1 (en) * 2018-11-20 2020-09-09 세메스 주식회사 Bonding apparatus and bonding method

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2770041B2 (en) * 1989-02-06 1998-06-25 新日本製鐵株式会社 Bump forming method and semiconductor element connecting method
WO1994000882A1 (en) * 1992-06-24 1994-01-06 Seiko Epson Corporation Thin film transistor, solid-state device, display device, and method for manufacturing thin film transistor
US6133637A (en) * 1997-01-24 2000-10-17 Rohm Co., Ltd. Semiconductor device having a plurality of semiconductor chips
JP3075398B2 (en) * 1997-11-04 2000-08-14 日本電気株式会社 Ultrasonic bonding collet and bonding method

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050227412A1 (en) * 2004-03-31 2005-10-13 Aptos Corporation Flexible multi-chip module and method of making the same
US7141875B2 (en) * 2004-03-31 2006-11-28 Aptos Corp Flexible multi-chip module and method of making the same
US20070108627A1 (en) * 2005-11-15 2007-05-17 Matsushita Electric Industrial Co., Ltd. Semiconductor device and method for manufacturing the same
US7629687B2 (en) * 2005-11-15 2009-12-08 Panasonic Corporation Semiconductor device and method for manufacturing the same
CN101996905A (en) * 2009-08-24 2011-03-30 香港理工大学 Method and system for bonding electrical devices using an electrically conductive adhesive
US8981574B2 (en) 2012-12-20 2015-03-17 Samsung Electronics Co., Ltd. Semiconductor package
US9633973B2 (en) 2012-12-20 2017-04-25 Samsung Electronics Co., Ltd. Semiconductor package

Also Published As

Publication number Publication date
TW451376B (en) 2001-08-21
JP2001015553A (en) 2001-01-19
KR20010066882A (en) 2001-07-11
KR100699637B1 (en) 2007-03-23
US6399419B1 (en) 2002-06-04

Similar Documents

Publication Publication Date Title
US6399419B1 (en) Production of semiconductor device
US6515357B2 (en) Semiconductor package and semiconductor package fabrication method
KR970053206A (en) Semiconductor device and manufacturing method thereof
US7820487B2 (en) Manufacturing method of semiconductor device
TW417232B (en) Semiconductor device and process for producing the same
US6756686B2 (en) Semiconductor device
KR19990082715A (en) Semiconductor device
JP2000091818A (en) Manufacture of film-type transmission line and method for connecting the same line
US5667132A (en) Method for solder-bonding contact pad arrays
JP3308855B2 (en) Method for manufacturing semiconductor device
JP2002368159A (en) Semiconductor device and manufacturing method therefor
US6818461B2 (en) Method of producing mounting structure and mounting structure produced by the same
KR100379823B1 (en) Manufacturing method of semiconductor integrated circuit device
JP2007053130A (en) Connection structure and connection method
JP4195541B2 (en) Method of mounting a semiconductor chip on a printed circuit board and mounting sheet used for carrying out the method
JP4085572B2 (en) Semiconductor device and manufacturing method thereof
JP4035949B2 (en) Wiring board, semiconductor device using the same, and manufacturing method thereof
JP3715861B2 (en) Assembling method of semiconductor device
US20040159924A1 (en) Semiconductor device
JP3419398B2 (en) Method for manufacturing semiconductor device
JP2002118148A (en) Method of mounting semiconductor chip to printed circuit board, and mounting sheet used for embodying the method
JP2004363319A (en) Mount substrate and semiconductor device
US6407457B1 (en) Contact-bumpless chip contacting method and an electronic circuit produced by said method
JP3721986B2 (en) Semiconductor device and manufacturing method thereof
JPH08139138A (en) Connection method of electronic device

Legal Events

Date Code Title Description
STCB Information on status: application discontinuation

Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION