US20020006247A1 - Optical switch - Google Patents
Optical switch Download PDFInfo
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- US20020006247A1 US20020006247A1 US09/894,853 US89485301A US2002006247A1 US 20020006247 A1 US20020006247 A1 US 20020006247A1 US 89485301 A US89485301 A US 89485301A US 2002006247 A1 US2002006247 A1 US 2002006247A1
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04Q—SELECTING
- H04Q11/00—Selecting arrangements for multiplex systems
- H04Q11/0001—Selecting arrangements for multiplex systems using optical switching
- H04Q11/0005—Switch and router aspects
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/06—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of fluids in transparent cells
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0875—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more refracting elements
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/12—Fluid-filled or evacuated lenses
- G02B3/14—Fluid-filled or evacuated lenses of variable focal length
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1828—Diffraction gratings having means for producing variable diffraction
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/32—Optical coupling means having lens focusing means positioned between opposed fibre ends
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3502—Optical coupling means having switching means involving direct waveguide displacement, e.g. cantilever type waveguide displacement involving waveguide bending, or displacing an interposed waveguide between stationary waveguides
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/36—Mechanical coupling means
- G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
- G02B6/3632—Mechanical coupling means for mounting fibres to supporting carriers characterised by the cross-sectional shape of the mechanical coupling means
- G02B6/3644—Mechanical coupling means for mounting fibres to supporting carriers characterised by the cross-sectional shape of the mechanical coupling means the coupling means being through-holes or wall apertures
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/36—Mechanical coupling means
- G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
- G02B6/3648—Supporting carriers of a microbench type, i.e. with micromachined additional mechanical structures
- G02B6/366—Supporting carriers of a microbench type, i.e. with micromachined additional mechanical structures the additional structures allowing for adjustment or alignment in all dimensions, i.e. 3D microoptics arrangements, e.g. free space optics on the microbench, microhinges or spring latches, with associated microactuating elements for fine adjustment or alignment
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
- G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
- G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
- G02B6/3546—NxM switch, i.e. a regular array of switches elements of matrix type constellation
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
- G02B6/357—Electrostatic force
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
- G02B6/3572—Magnetic force
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
- G02B6/3578—Piezoelectric force
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3582—Housing means or package or arranging details of the switching elements, e.g. for thermal isolation
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/36—Mechanical coupling means
- G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
- G02B6/3632—Mechanical coupling means for mounting fibres to supporting carriers characterised by the cross-sectional shape of the mechanical coupling means
- G02B6/3636—Mechanical coupling means for mounting fibres to supporting carriers characterised by the cross-sectional shape of the mechanical coupling means the mechanical coupling means being grooves
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/36—Mechanical coupling means
- G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
- G02B6/3648—Supporting carriers of a microbench type, i.e. with micromachined additional mechanical structures
- G02B6/3656—Supporting carriers of a microbench type, i.e. with micromachined additional mechanical structures the additional structures being micropositioning, with microactuating elements for fine adjustment, or restricting movement, into two dimensions, e.g. cantilevers, beams, tongues or bridges with associated MEMs
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/36—Mechanical coupling means
- G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
- G02B6/3684—Mechanical coupling means for mounting fibres to supporting carriers characterised by the manufacturing process of surface profiling of the supporting carrier
- G02B6/3692—Mechanical coupling means for mounting fibres to supporting carriers characterised by the manufacturing process of surface profiling of the supporting carrier with surface micromachining involving etching, e.g. wet or dry etching steps
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/43—Arrangements comprising a plurality of opto-electronic elements and associated optical interconnections
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04Q—SELECTING
- H04Q11/00—Selecting arrangements for multiplex systems
- H04Q11/0001—Selecting arrangements for multiplex systems using optical switching
- H04Q11/0005—Switch and router aspects
- H04Q2011/0007—Construction
- H04Q2011/0026—Construction using free space propagation (e.g. lenses, mirrors)
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Computer Networks & Wireless Communication (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Switches Operated By Changes In Physical Conditions (AREA)
- Optical Communication System (AREA)
Abstract
An optical switch includes a plurality of transmitting devices integrated on a single substrate. Each individual transmitting device includes a directing device. A plurality of receiving devices are provided. At least a portion of the transmitting devices direct output beams from the plurality of transmitting devices to the plurality of receiving devices.
Description
- This application claims benefit of 60/214,837 filed Jun. 28, 2000, which application is fully incorporated herein as if set forth in its entirety.
- 1. Field of the Invention
- This invention relates generally to optical communications, and more particularly to all-optical switching of fiber networks.
- 2. Description of the Related Art
- A critical technology in enhancing speed and bandwidth in communication systems is All-Optical switching, a primary goal of the telecommunication industry. Optical cross-connects are the enabling devices for the planned all-optical communication networks. They connect high-capacity fiber optic communication links coming into a particular hub with any of hundreds of outgoing channels. In doing so they solve two major problems. First, they provide controlled connections among numerous intermediate links to create a continuous optical pathway between endpoints anywhere in the network, optimizing the stream of data and reducing the cost of service. Secondly, they protect the network in the event of catastrophic failure of an intermediate link by instantaneously re-routing a circuit. An all-optical network will be easier to manage and more reliable while reducing the cost of bandwidth.
- There are several types of All-Optical switches known in the art. The classification of optical switches is presented in FIG. 1. Among them there are switches based on light birefringence phenomenon, switches utilizing light polarization in liquid crystals, switches utilizing bubbles in capillaries, electromechanical switches, and mirror-based switches.
- Many 1×N switch architectures are based on a combination of two-state gates in a tree like structures. For N input channels N similar structures are required. It is clear that N×N switch requires N gates. Moreover, in such a switch each of N output channels requires additional couplers and therefore increases both cost and optical losses in this switch architecture.
- The operation of birefringent switches, typically based on lithium niobate or titanium niobate crystals, is polarization sensitive, and thus these switches require polarization-preserving optical fibers, and also require careful input/output waveguide mode matching in the optical system. Lithium niobate based switches have relatively large insertion loss and provide only a moderate degree of channel isolation. Besides, such switches require complicated fabricating processes. Examples of such switches can be found in the U.S. Pat. No. 4,976,505 and U.S. Pat. No. 5,946,116.
- Liquid Crystal Optical Switches offer relatively high on/off ratios and relatively low optical insertion losses. But they require polarized light. Additionally, liquid crystal switches have certain environmental limitations including limited operating temperature range and environmental degradation. It is generally agreed upon that the technology lends itself only for small-size switching arrays. Examples of such switches can be found in publication Bawa et al., “Miniaturized total-reflection ferroelectric liquid-crystal electro-optic switch,” Appl. Phys. Lett., vol. 57, No. 15, pp. 1479-1481, Oct. 8, 1990 and in the U.S. Pat. No. 5,132,822.
- Another architecture, based on waveguides and gas bubbles in fluid media, is described in the U.S. Pat. 6,055,344. At each switching point an input waveguide intersects an output waveguide at a fluid-filled trench. If the intersection is filled by liquid then the light passes straight through the intersection. When a gas bubble is placed in the intersection then light reflects to the output waveguide. It is obvious that an N×N channel switch also requires N2 gates. Gas bubble based switches have certain environmental limitations including operating temperature range and environmental degradation. Insertion loss for such switches greatly depends on optical path and can vary many times within one switch. A similar architecture, based on waveguides and mirrors, is described in the U.S. Pat. No. 5,960,132.
- Optical switch utilizing thermo-optical attenuators as the gates is described in “Silica-based optical- matrix switch with intersecting Mach-Zehnder waveguides for larger fabrication tolerances” by M. Kawachi et al, Conference OFC/IOOC '93, Feb. 21-26, 1993, San Jose, Calif. (U.S.A.), paper TuH4. Each input guide splits on two guides. After splitting each guide will have a gate, which can either open or close the guide. It can be shown that the total number of required gates for an N×N switch is 2 N2.
- Another technology is based on a sliding mirror between two or three fibers, which can potentially be used as a variable optical attenuator or as an optical switch in small-size switching arrays. See U.S. Pat. No. 6,031,946.
- Another group of optical switches utilizes multi-state switching elements. One of the great advantages of open space architecture is that the light beams can physically cross each other without interference of the signals transmitted by both beams. The light beams carrying information are transparent to each other. This is a unique property of light, which allows building switches with absolutely different architecture not possible in the electrical wire world.
- The majority of current open space optical switching technologies are based on MEMS micro-mirrors. Schematically this principle is shown in FIG. 2 The
light beams 10 from theinput fibers 12 are focused withcollimators 14 on the first set ofmirrors 16, where they are redirected, as shown in 18, onto a second set ofmirrors 20, which in their turn are redirecting thebeams 22 into requiredoutput collimators 24 and then to thefibers 26. N×N optical switch based on this architecture requires 2N mirrors. Optical attenuation is in the range of 5 to 10 dB and they require at least two major optical alignments: between the transmitting array and the first mirror array and between the second mirror array and the receiving array. This architecture is complicated mechanically, optically and electronically. - Some of these MEMS micro-mirror arrays are based on surface micromachining technology. These devices have few disadvantages. The reported switching time is relatively slow. The optical losses are high. A large portion of these losses is inherent to this technology. For example, a non-flatness of the mirror is one of the sources of optical losses.
- Other technologies use micro-mirrors based on bulk silicon micromachining. Bulk micro-machined mirrors with Gimbals suspension are inherently extremely fragile due to the relatively large mass of the mirrors, which are suspended by very thin beams. This results in low yield, high cost, and low reliability. See U.S. Pat. No. 5,629,790 incorporated fully herein by reference.
- In another approach the switching or channel selection is achieved by means of a prism. Optical losses are moderate but the architecture and structure of the switch is complicated. See U.S. Pat. No. 5,999,669 and U.S. Pat. No. 6,005,993.
- Another approach of redirecting the light beams between the transmitting and receiving arrays is based on lateral movement of the micro-lenses in front of collimators. However, it requires large space around the lens and the efficiency of the real estate utilization in the array is very low. See, for example: H. Toshiyoshi, Guo-Dung J. Su, J. LaCosse, M. C. Wu, “
Microlens 2D Scanners for Fiber Optic Switches”, Proc.3rd Int'l Conf. On Micro Opto Electro Mechanical Systems (MOEMS99), Aug. 30-Sep. 1, 1999, Mainz, Germany, pp. 165-167. - In electromechanical optical switches the input optical fibers are moving relative to the output optical fibers. Electromechanical switches don't require mirrors and therefore, don't require corresponding optical alignments and have smaller optical losses. However, macro actuators, for example step motors, are usually used in electromechanical switches as actuators. As an alignment of the fibers is critical in such systems, providing this precise and reproducible alignment with the motors is a big challenge. Another limitation of the electromechanical switches is that it is difficult to move simultaneously and independently more than one input fiber with respect to N output fibers. Besides, actuators used in these optical switches typically have only one degree of freedom, i.e. they allow circular motion of the fiber. Although these switches historically appeared first, they are usually 1×N switches, mechanically complicated, unreliable and slow. Examples of electromechanical optical switches are described in U.S. Pat. No. 4,378,144, U.S. Pat. No. 5,920,665.
- Another optical switch is described in U.S. Pat. No. 4,512,036. In this switch, the end of the fiber is bent in two dimensions relative to a lens, which focuses the beam to a receiving lens. Piezoelectric actuators perform the bending of the fiber. Besides being costly, the dimensions of these beam steering units affect the overall size of the optical switch. As piezoelectric actuators have certain limitations in the displacement, this type of switch can be used only for relatively low port-count. The main disadvantage of this switch is that it is trying to combine different incompatible technologies in one device. They can not be integrated in one batch fabricating process. As a result, the technology of assembling is very complex, performance and reliability are low and expected cost is large.
- An enabling development for all-optical systems is the concept of Optical MEMS. An acronym for Micro-Electro-Mechanical Systems, MEMS is a term used to describe a concept—Microsystems that monolithically integrate micro-structures, sensors, actuators or optical components, like mirrors, lenses, couplers, etc., with associated mechanical, optical and electronic functions. MEMS are now used throughout the world in an ever-expanding range of applications in automotive, industrial and consumer products. Communication technology and specifically optical communication will be revolutionized with Optical MEMS. One of Optical MEMS switches is disclosed in this patent application.
- There is a need for an optical switch with a larger number of switching channels that have the same optical loss. There is a further need for an optical switch with smaller optical loss in each switching channel.
- Accordingly, an object of the present invention is to provide an optical switch with a larger number of switching channels with the same optical loss.
- Another object of the present invention is to provide an optical switch with smaller optical loss in each switching channel.
- Yet another object of the present invention is to provide an optical switch with faster switching.
- Still another object of the present invention is to provide an optical switch with lower cost of switching per channel.
- Yet another object of the present invention is to provide an optical switch that has higher reliability.
- A further object of the present invention is to provide an optical switch with lower sensitivity to vibrations.
- Another object of the present invention is to provide an optical switch with lower temperature sensitivity of optical switching.
- A further object of the present invention is to provide a smaller size optical switch.
- Yet another object of the present invention is to provide an optical switch with a simpler architecture.
- Another object of the present invention is to provide an optical switch with an improved movable microstructure.
- Yet a further object of the present invention is to provide an optical switch with a more effective actuator of movable microstructure.
- Another object of the present invention is to provide an optical switch that has higher sensitivity sensors for a closed loop control system.
- Yet another object of the present invention is to provide a multi-position open loop control system for an optical switch.
- A further object of the present invention is to provide a higher level of integration of different components for an optical switch.
- Still another object of the present invention is to provide a higher level of integration of different MEMS, electronic and micro-optical components of an optical switch.
- Yet another object of the present invention is to provide optical switch with fewer components.
- Another object of the present invention is to provide an optical switch that has less optical alignments of components.
- These and other objects of the present invention are achieved in an optical switch that includes a plurality of transmitting devices integrated on a single substrate. Each individual transmitting device includes a directing device. A plurality of receiving devices are provided. At least a portion of the transmitting devices direct output beams from the plurality of transmitting devices to the plurality of receiving devices.
- In another object of the present invention, a method for optical switching between input fiber channels output fiber channels provides a plurality of transmitting devices, including a plurality of optical fibers, and a plurality of receiving devices, including a plurality of optical fibers. The plurality of transmitting devices are integrated on a single substrate. At least a portion of the transmitter output beams are focused and directed from the plurality of transmitting devices to the plurality of receiving devices.
- FIG. 1 is a schematic diagram of prior art optical switches.
- FIG. 2 is a prior art schematic diagram that illustrates open space optical switching technologies based on MEMS micro-mirrors.
- FIG. 3 is a schematic diagram of one embodiment of an optical switch of the present invention.
- FIG. 4 is a schematic diagram illustrating the architecture of one embodiment of an optical switch of the present invention.
- FIG. 5 illustrates an enlarged portion of the FIG. 4 optical switch.
- FIGS.6(a) and (b) are schematic diagrams illustrating embodiments of transmitting directing devices of the present invention.
- FIGS.6 (c)-(e) are schematic diagrams illustrating different kinds of optical bodies useful with the present invention.
- FIGS.7(a)-(f) are schematic diagrams illustrating different geometric shapes of optical bodies useful with the present invention.
- FIGS.8(a)-(c) are schematic diagrams illustrating an embodiment of fiber connectors of the present invention.
- FIGS.9(a)-(h) are schematic diagrams illustrating various lens system embodiments of the present invention.
- FIGS.10(a)-(f) are schematic diagrams illustrating additional lens system embodiments of the present invention.
- FIGS.11(a)-(d) are schematic diagrams illustrating various embodiments of focusing devices of the present invention.
- FIG. 12 is a schematic diagram illustrating one embodiment of a transmitting directing device of the present invention.
- FIG. 13 is a schematic diagram of a gimbals suspension of the moveable part of a transmitting device useful in one embodiment of the present invention.
- FIG. 14 illustrates the overload protection, of one embodiment of the present invention, against acceleration applied in either X or Z direction.
- FIG. 15(a) is a top view illustrating one embodiment of a fiber cell of a transmitting directing device with an electrostatic actuator according to one embodiment of the present invention.
- FIG. 15(b) is a cross-section of the FIG. 15(a) one-fiber cell.
- FIG. 16(a) is a top view and a cross section of the one-fiber cell of the transmitting directing device with an electrostatic actuator according to another embodiment of the present invention.
- FIG. 16(b) is a cross section of the FIG. 16(a) one fiber cell.
- FIG. 17(a) is a top view and a cross section of the one-fiber cell of the transmitting directing device with an electrostatic actuator and a suspension using diagonal beams.
- FIG. 17(b) is a cross section of the FIG. 17(a) one fiber cell.
- FIG. 18(a) is a top view illustrating one embodiment of an actuator used with the present invention.
- FIG. 18(b) is a cross sectional view illustrating one embodiment of an actuator with a planar suspension used with present invention
- FIG. 18(c) is a cross sectional view illustrating one embodiment of an actuator with non-uniform beam suspension and actuation movable plates located in different plane relative to suspension used with the present invention.
- FIG. 18(d) is a cross sectional view illustrating one embodiment of an actuator with spring like suspension and actuation movable plates located in different plane relative to suspension used with the present invention.
- FIG. 18(e is a cross sectional view illustrating one embodiment of an actuator with non-uniform beam suspension and actuation movable plates having additional cylindrical surface providing increased actuation force used with the present invention.
- FIG. 19 is a three-dimensional view of the suspension illustrated in FIG. 18(e).
- FIG. 20 is a three-dimensional view of the suspension shown illustrated in FIG. 18(d).
- FIG. 21(a) illustrates an example of electrostatic actuation of the optical switch with eight electrodes for eight angular positions of the movable part of the actuator.
- FIG. 21(b) is a cross section view of FIG. 21(a) electrostatic actuation of the optical switch.
- FIG. 22(a) is a top view of an actuator useful in making a mushroom like suspension for use with the present invention.
- FIG. 22(b) is a cross sectional view of an actuator with a flat mushroom hat for use with the present invention.
- FIG. 22(c) is a cross sectional view of an actuator with a fiber that extends over the FIG. 22(b) mushroom hat.
- FIG. 22(d) is a cross sectional view of an actuator with lens system on the top of the FIG. 22(b) mushroom hat.
- FIG. 22(e) is a cross sectional view of an actuator with an additional cylindrical surface on the top of the FIG. 22(b) mushroom hat
- FIG. 22(f) is a cross sectional view of an actuator with an additional cylinder and lens on the top of the FIG. 22(b) mushroom hat.
- FIGS.23(a)-(f) illustrate different embodiments of the light redirecting devices of the present invention.
- FIGS.24(a)-(f) illustrate different embodiments of the moveable parts of the fiber useful with the present invention.
- FIGS.25(a)-(b) illustrate different embodiments of optically transparent media that can be employed with the present invention.
- FIG. 3 illustrates one embodiment of an
optical switch 30 of the present invention. The FIG. 3 embodiment includes five major components, a transmitting unit, hereafter a “transmitting array” 32, an opticaltransparent media 34, a receiving unit, hereafter a “receiving array” 36, acontrol system 38 and apackaging 40. Transmitting and receivingarrays optical body 42, afiber connector 44, acavity 46, alens 48, a focusingdevice 50 and a transmittingdirecting device 54. - FIGS. 4 and 5 illustrate one embodiment of architecture of
optical switch 30. Included is transmittingarray 32 with transmitting directingdevices 54 andincoming fibers 12. Light beams from transmitting directingdevices 54 travel through opticaltransparent media 34 to receivingdevices 56, which are mounted in receivingarray 36. Receivingdevices 56 focus the light intooutput fibers 26. Transmitting and receivingarrays control circuit 38. In one embodiment, each element ofoptical switch 30 is included inpackage 40. - In one embodiment of the present invention, the entire
optical switch 30 can be micro-packaged to include transmittingarray 32, opticaltransparent media 34, receivingarray 36,control system 38 as well as the fiber connectors at the input and out. The present invention utilizes MEMS based technology and packaging to achieve full integration of all or a portion of the optical, electronic and mechanical components of optical switch into one system fabricated that is fabricated in one integrated process. - Transmitting directing
device 54 is shown in more detail in FIGS. 6(a) and 6(b).Array 32 or the body ofarray 32 includescavities Incoming fiber 12, withprotective layer 58, is fixed in transmittingarray 32 withfixture 59. Fixture can include a variety of different devices and materials, including but not limited to an adhesive material. The flexible end offiber 60 is connected tooptical body 42 withoptical connector 62.Optical connector 62 can be a splice, an optically transparent adhesive and the like.Fiber 60 is connected tooptical body 42 at alocation 64, which is positioned inoptical body 42 in front of alocation 66 oflens 68. The portion ofoptical body 42 connected withconnector 62 couplesoptical body 42 withsuspension Suspension actuator drivers Drivers suspension Actuator 75 applies a pulling force tosuspension 73,connector 62 then moveslens 68 andoptical body 42, along withfiber 60. This results in a redirection of the light beam. - FIGS.6(c), (d) and (e) illustrate different embodiments of
optical body 42. As illustrated in FIG. 6(c),optical body 42 can be made from solid opticallytransparent material 78. In this embodiment,optical body 42 is located incavity optical body 42 in a two-dimensional, eyeball like configuration. - FIG. 6(d) shows that
optical body 42 can be made fromplastic film 80 filled withtransparent liquid 82. Alternative, as illustrated FIG. 6(e),optical body 42 can be made fromframework 84 with an interior that includes an optically transparent air orclean gas 86. Light from the end offiber 88 is then collected and focused bylens 68. - FIGS.7(a)-(f) also illustrates different shapes and types of
optical bodies 42. In FIG. 7(a), a portion ofoptical body 42 has a spherical shape.Optical body 42 can have a funnel type of geometric configuration wherefiber 60 andoptical body 42 move.Cavity 46 can be filled withliquid material 90. In this embodiment,optical body 42, with its spherical shape, behaves similar to an eyeball and has an advantage of not requiring spring suspension. Spring suspension usually serves two functions, mechanical shock protection and providing angular tilt ofoptical body 42. In the FIG. 7(a) embodiment, the tilt ofoptical body 42 does not require large displacement or shock protection.Liquid material 90 incavity 46 provides lubrication betweenoptical body 42 andcavity 46 in the process of rotatingoptical body 42 for redirecting the light beam. - FIG. 7(b) illustrates and embodiment where
optical body 42 has a conical geometric configuration. If the shape of the cone corresponds to the shape of the diverged light beam exiting from the end offiber 60 tolens 68, then the mass ofoptical body 42 can be minimized for a selectedoptical body 42 material. In this embodiment,cavities 46 in transmittingarray 32 have cylindrical geometric configurations. Ifoptical body 42 is suspended by springs there is no need for a funnel likeoptical cavity 46, where the spherical body seats, andoptical cavity 46 can be cylindrical. In FIG. 7(c)optical body 42 is illustrated as having funnel geometry, which can be easier to fabricate in a batch process. - As illustrated in FIG. 7(d),
optical body 90 is cylindrical where it is coupled at the bottom withfiber 60.Lens 68 is positioned at the opposing side of the body. The space betweenfiber 60 andlens 68 can be filled with an opticallytransparent material 92 which can decrease the height and mass ofoptical body 90. - The embodiment of FIG. 7(e) is similar to that of FIG. 7(d) except that the inside of the cylinder is not completely filled with optically transparent material. In this embodiment, optically
transparent material 94 is used as a mechanical andoptical connector 94 betweenfiber 60 andlens 68, and decreases the mass of the cylindrical body. - In the FIG. 7(f) embodiment,
optical body 90 includes a system oflens Fiber 60 can be connected withlens 68 with a very thin layer of opticallytransparent material 96. The space betweenlenses transparent material 92. The use oflenses transparent material 96 decreases the size and the mass of the movable parts ofoptical switch 30. - The embodiments of FIGS.8(a)-8(c) illustrate the relationship of
connector 62,fiber 60 andoptical body 42. - In FIG. 8(a)
fiber 60 extends into and is connected incavity 98 with optically transparent and mechanicallystrong adhesive 94. Connector betweenoptical body 42 andfiber 60, can be made as a solid single body, as illustrated in FIG. 8(b). In this case,lens 68 andfiber 98 are made as a singleoptical body 42.Fiber 98 is connected tofiber 60. - In FIG. 8(c),
optical body 42 can be made fromplastic film 80 and filled withliquid 82. In this embodiment, connector of body and fiber can be made as a continuation ofoptical body 42 as ahose 81.Fiber 60 is inserted inhose 81 making an optical and mechanical connection withbody 42. - The light beam coming from the transmitting fiber should be collimated or focused for being redirected through the open space between transmitting and receiving
arrays - The size and the material of the lens is determined by a variety of factors including but not limited to, the required diameter of the beam size, mass of the focusing system, required optical properties and the like. In one embodiment, the size of the lenses used with
optical switch 30 is in the millimeter and sub-millimeter range. Different materials can be used for the lenses depending on, the required wavelength, refractive index and technological processes. Suitable materials include but are not limited to different kinds of glass, semiconductor materials, different polymers and the like. - FIGS.9(a)-9(h) illustrate different embodiment of lenses that are employed at the output end of
optical body 42 of transmittingarray 32, and at the input end ofoptical body 42 of receivingarray 36. - In FIG. 9(a), a simple one
lens 68 is coupled toconnector 94 andmoveable part 70, and is optically and mechanically connected at the end offiber 60 with opticallytransparent material 94. A change in the angular position ofmovable part 70moves lens 68 and the distal end offiber 60, resulting in a redirection oflight beam 100.Lens 68 can be made from different materials including but not limited to, glass, polymers, silicon and the like. Makinglens 68 from the same structural material as the other components, for example silicon, has an advantage of direct integration oflens 68, or system of lenses, with other MEMS components, as illustrated in FIG. 9(b). - Referring not to FIG. 9(c), a system of
lenses moveable part 70 at a selected distance in order to improve the collimating or focusing of the light beam.Lens 68 can be coupled to the distal end offiber 60 with an opticallytransparent adhesive 94. In FIG. 9(d),lens 102 is asymmetric and deflects the light beam to a certain angle in a neutral position ofmovable part 70. In this embodiment,lens 68, which serves as a focusing lens, can be coupled to the distal end offiber 60 with an opticallytransparent adhesive 94. - As illustrated in FIG. 9(e) when the size of
lens 104 is comparable with the diameter offiber 60,lens 104 can be positioned at the distal end offiber 60 and directly connected tomovable part 70. In other embodiments, shown in FIG. 9(f),lenses fiber 60 itself. - The system of lens illustrated in FIG. 9(g) is similar to 9(c), and the space between
lenses transparent material 92 that has required optical properties in order to optimize the focusing or collimating of the total light beam. For example, opticallytransparent material 92 can change the diameter and the length of the focuser. This affects the performance characteristics of the lens system. FIG. 9(h) illustrates alens 68 made from elastic opticallytransparent polymer films lens 68, in this embodiment, is filled with atransparent liquid 110 which can be delivered to the inside oflens 68 through acapillary channel 112.Lens 68 is mounted onmoveable part 70 where the end offiber 60 is also mounted and at a certain distance fromlens 68. The space between the distal end offiber 60 andlens 68 can also be filled with an optically transparent liquid in order to optimize the mechanical and optical properties of the lens system. - FIGS.10(a)-10(f) illustrates different embodiments of micro-collimators or micro-focusers that are based on either micro-Fresnel lenses or grating micro-lenses.
- In the FIG. 10(a) embodiment, a simple collimator/focuser is based on one
lens 120 that is in a fixed relationship tomoveable part 70. The distal end offiber 60 is also fixed tomovable part 70.Lens 120 can have agrating surface 122 that is formed on the outside of the collimator/focuser. The space between the distal end offiber 60 andlens 120 can be filled with an opticallytransparent material 92 that has optical properties for optimizing the collimator geometry. In some instances, for example when the grating lens is fabricated on one wafer that is bonded to another wafer with other MEMS components, it is preferable to positiongratings 122 on the inside surface oflens 120, as shown in FIG. 10(b). - Both
surfaces lens 120 can be grating surfaces in order to provide an improvement in the optical properties of the focuser/collimator. This is illustrated in FIG. 10(c). - With the embodiment of FIG. 10(d), two
grating lenses moveable part 70.Fiber 60 is also optically and mechanically connected withmovable part 70. The space betweenlenses transparent material 128. The use of a two-lens system provides greater flexibility in designing required optical properties of the focuser/collimator. - Referring not to FIG. 10(e), a system of three lenses, 120, 126 and 130, are used for greater focusing and collimating ability. It will be appreciated that the grating properties of
lenses telescopic lens 134 can be used for decreasing the length and the mass of the focuser/collimator. When the same structural material is used forlens 120 and the other components, then the structure of the integrated micro-collimator can look like that illustrated in FIG. 10(f). - When the size of transmitting and receiving
arrays arrays arrays array 36 can change significantly between the center of receivingarray 36 and its periphery. In this can it can be desirable to provide an adjustable focusing of the lenses so that the diameter of the light spot on receiving elements ofarray 36 would have the same size. This also requires refocusing of the light beam and can be achieved with adjustable focus lenses, as illustrated in FIGS. 11(a)-11(c). - FIG. 11(a) illustrates the principle of a lens with an adjustable focus. This lens consists of two optically
transparent polymer films moveable part 70. An interior volume betweenpolymer films transparent liquid 110. The same opticallytransparent liquid 110 is in acapillary channel 112 that is coupled tochamber 138 whereactuator 139 is positioned.Chamber 136 is filled with opticallytransparent liquid 110 and coupled, throughchannel 140, to anotherchamber 141.Chamber 141 includes apressure sensor 142. One of thepolymer films fiber 60 with opticallytransparent material 94.Actuator 139, which can be a thermal actuator, changes the pressure of the opticallytransparent liquid 110 inchamber 138. This pressure is equalized and changes the pressure inchamber 136. Due to the changing ofpressure films films pressure sensor 142. The pressure is proportional to the curvature and focal distance of the lens. - FIG. 11(b) illustrates a combination of the FIG. 11(a) focusing lens with the grating lenses with grating
films 143 are positioned on the outside of the lens and the inside ofoptical body 94. When pressure inside the lens changes, and the curvature of the polymer grating lens changes, then a change of the focal distance of the lens can occur due to two factors, change of the curvature of the regular lens and change of the grating geometry in the grating lens. The combined effect of focal distance variation can be larger. - Variations in pressure applied to grating
films 143 can be used for correction of the light beam characteristics. A grating 144 can be located on the interior surface of afilm 145 that is inside the lens, as shown in FIG. 11(c), or from both sides offilm 145, illustrated in FIG. 11(d). - Referring now to FIG. 12(a), one embodiment of the cross-section of an one-
fiber cell 162 of transmitting directingdevice 54 is illustrated. One-fiber cell 162 containsbase member 32 coupled to amicro-machined die 153. Micro-machined die 153 includes aframe 154 and amovable parts Lens 68 is connected withmovable parts Lens 68 is preferably a micro-lens located in the central area ofmovable parts Fiber 12 is connected withbase member 32 andmovable parts Fiber 60 is preferably coupled tomovable part 156 withoptical body 42.Optical body 42 limits the divergence of thelight beam 152 exiting from the edge offiber 60 and guideslight beam 152 tolens 68. An end point offiber 60 is positioned close to the focal plane oflens 68.Lens 68 transformslight beam 152 into collimatedbeam 151. -
Actuators electrodes base member 32. This actuator design allows changing angular position ofmovable part Actuators electrodes movable parts Actuators Lens 68 moves together withmovable part movable parts lens 68 in an equilibrium position when no force is applied tomovable part 156 fromactuators movable parts lens 68 afteractuator 77 has applied some force tomovable part 158. As can be seen from FIGS. 12(a) and FIG. 12(b), changing angular position ofmovable part 156 allows changes the angular position oflens 68 and the direction oflight beam 151. Therefore,light beam 151 can be spatially redirected by the interaction ofactuator movable parts 156 158. -
Frames 154 is coupled withmovable parts suspensions Suspensions movable parts device 54 assembly.Suspensions movable parts actuators Suspensions movable parts frame 154. For example, ifactuators base member 32, thensuspensions movable parts movable parts lens 68. -
Actuators mechanical actuators mechanical actuators suspensions suspensions movable parts lens 68. Thermo-mechanical actuators mechanical actuators - There are several options for the heater structure. With a multi-layer structure, the heater can be made on the metal layer, silicon layer, or on both in the electrical circuit. The heater is electrically and thermally coupled with
base 32. If thermo-mechanical, bimetallic,actuators base member 32 can provide the necessary current to the heater. The thermal connection betweenmicro-machined die 153 andbase member 32 can provide sufficient thermal resistance to, create the necessary temperature gradient acrosssuspensions movable structures lens 68. - With
piezoelectric actuators suspensions suspensions movable structures lens 68. In this embodiment,piezoelectric actuators base 32. This coupling provides for the application of the necessary voltage to the piezoelectric material. - FIG. 13(a) illustrates gimbal suspension of
movable part 156.Fiber 60 is coupled tomoveable part 156 which moves in one angular direction ontorsion beams 155.Torsion beams 155 are coupled to outer frame orouter ring 158, which in turn, are connected bytorsion beams 160 to theframe 154. This suspension provides two-dimensional angular redirecting of the light beam. This gimbals works withelectrostatic actuators moveable part 156 and one of theelectrodes movable part 156 withlens 68 andfiber 60, resulting in a redirection of the light beam fromlens 68 in one angular dimension. In the same manner, the correspondingelectrodes outer ring 158 and tilt or rotate it ontorsion beams 160.Lens 68,fiber 60 and the light beam are then redirected in another angular dimension. - With any torsional suspension, including gimbal, for higher sensitivity the ratio of length to diameter or torsion suspension should be larger. However, with long suspension, mechanical shock overload protection becomes worse. With the present invention, this problem is solves, as illustrated in FIG. 14.
Torsion suspension 155 goes through limitingtubes 161 that are mechanically connected to frame 158. The torsion movement of the beams and the tilt ofelectrodes tubes 161. However, when overload acceleration is applied in either the X or Z directions, as in FIG. 14, thentubes 161 limit the motion ofsuspension 155 and the mechanical shock overload protection ofmoveable part 156. -
Suspension 155 ofmoveable part 156 can be made as a system of springs, for example three or more. The springs can be flat, flat planar, or flat transverse. Additionally, the springs can have different geometries such as beam structures. meandering, tethers, spiral, and the like, and can be continuous, perforated flat, corrugated diaphragms, and the like. - FIG. 15(a) shows top view of a one-
fiber cell 162 of transmitting directingdevice 54 withactuator - FIG. 15(b) illustrates a cross-section of one-
fiber cell 162 of the transmitting directingdevice 54. One-fiber cell 162 containsbase member 32 which can be made from different materials, including but not limited to ceramics, silicon and the like.Base member 32 is connected with micro-machined due 153 which includesframe 154 andmovable parts movable part 156.Fiber 60 is connected withmovable part 156 andmicro-lens 68 withoptical body 42.Movable parts frame 154. - In one embodiment,
movable parts electrodes 166 positioned around and coupled to micro-lens 68.Electrodes 166 are isolated fromframe 154 by an air-gap 167 and are suspended by four beams 164. Beams 164 also provide electrical connection of said fourelectrodes 166 withframe 154 with at least one conductive element formed either on the surface of the frame or in the frame such as silicon, and the like.Movable part Micro-machined die 153, which is silicon in one embodiment, is mechanically and electrically connected withbase member 32 via connectingmembers 169. At least some of the connectingmembers 169 can be electrically conductive. Some electrical potentials can be transferred to micro-machined die 153 fromelectrical circuits 165 located on the surface or in the body ofbase member 32 using connectingmembers 169. For example, solder bumps can be used for the mechanical and electrical connection. - In one embodiment,
electrodes 157 are located on the surface ofbase member 32. Different electrical potentials can be applied tomovable structure 156 and to at least one ofelectrodes movable structure 156 and at least oneelectrode 157 causes electrostatic force attractingmovable structure 156 tobase member 32. When no electrostatic force is applied tomovable structure 156 it maintains in an equilibrium position. The electrostatic force applied tomovable structure 156 results in change to the angular position ofmovable structure 156. Micro-lens 68 also changes its angular orientation. This redirects the light beams, which goes throughmicro-lens 68. - FIG. 16(a) illustrates a top view of one-
fiber cell 162 of transmitting directingdevice 54 withactuators - FIG. 16(b) shows a cross-section of the FIG. 16(a) one-
fiber cell 162. The major difference in the one-fiber cell 162 of FIG. 16(a) in comparison with FIG. 15(a) is thedifferent suspension 155 used formovable structure 156. The “meander”beams 170 have smaller bending stiffness compared tostraight beams 155 of FIG. 15(a). This allows larger angular deflection ofmovable part 156 withlens 68 by applying the same voltage betweenelectrode 157 andmovable structure 156. For the same required deflection, the structure of FIG. 16(a) permits use of a smaller voltage foractuator 76. - FIGS.17(a)-(b) illustrates different kind of
suspension 155 useful with the present invention. Flat planar beams are utilized in FIGS. 17(a)-(b). Further the beams an be thin enough to be tethers that are positioned diagonally so thatelectrodes movable part 156,lens 68 andfiber 60 in different angles. The advantage of this structure is that thediagonal suspension 155 can be longer for the same size of the rectangular die and allows a larger tilt for the same applied driving voltage. - The accuracy of the mutual angular alignment of transmitting and receiving parts affects the optical losses between the input and output channels. With the present invention, the system that controls the position of
movable parts control system 38 is closed loop and requires a feedback signal from the different beam positioning sensors. It will be appreciated thatcontrol system 38 can also be an open loop system. -
Control system 38 provides the processing of the protocol data ofoptical switch 30, creating a system for driving actuator signals, and then distributes these signals betweendifferent actuator control system 38 also processes the signals from the sensors and adjusts the actuator control signals depending on the requirement.Control system 38 also provides feedback to actuators 76 and 77 to actively damp vibrations of themovable parts arrays 32 into receivingarrays 36 often can not be provided by existing mechanical sensors due their low sensitivity and long term stability. - Balancing accuracy and increasing complexity can be achieved with double closed
loop control system 38. In this embodiment,control system 38 has two feedback loops. One is based on mechanical sensors built in thesuspensions control system 38 with the information about current position ofsuspensions arrays arrays - Micro-machined die153 can contain one or several sensors, not shown, for the closed loop that generate electrical signals proportional to the deflection of certain elements of the
suspensions movable structure 156 and, therefore, the spatial orientation oflens 68. The sensors can be capacative, electromagnetic piezoelectric, piezoresistive, and piezo-junction (piezotransistor), and the like. Electrical signal from the sensors can be used for different purposes including but not limited to, (i) aiming the light beam todifferent receiving arrays 36, (ii) mechanical shock damping, (iii) sense vibrations after switching damping, (iv) calibration in production, (v) on-field self test, and (vi) failure detection. Capacitive sensors employ capacitance change betweenbase member 32 andmovable structure 156. The measured change of capacitance corresponds to the change of the angular position oflens 68. - Electromagnetic sensors use the effect of voltage generation in the case of a moving conductor in a magnetic filed. The magnetic field can be created by one or more permanent magnets located on or in
base member 32. One or more conductors can be located onsuspensions movable structure 156. - Piezoelectric sensors also can be used with
suspensions suspensions actuators - Piezoresistive sensors and piezo-junction sensors are based on the same physical effect, the dependence of the carriers mobility on mechanical stress in semiconductor materials. This effect causes changes of the resistance in an amount that is proportional to the stress in the piezoresistor area. It also causes changes of the p-n junction parameters under stress and this change can be effectively amplified in piezotransistor-based circuits. Both bipolar and CMOS piezotransistors can be used. Different circuits with piezoresistors and piezotransistors can be used. For example, a Wheatstone bridge or four-terminal resistor (X-ducer) can be used in a piezoresistive sensor circuit. Piezotransistors combined in different circuits can provide smaller areas on the surface of
suspensions - FIGS.18(a)-18(e) illustrates different examples of suspensions and electrodes for
actuators - FIG. 18(a) shows that
electrodes 172 are made as circular plates so that they can provide equal maximum tilt when one of the edges ofelectrode 172 travels down in different angular directions. The maximum angular deflection in any direction is determined by agap 168, illustrated in FIG. 18(b) betweenelectrodes 172 and actuators the electrostatic plates of 174, 176, 178, and the like, of anactuator 76. - The number of
electrostatic plates actuator 76 can vary. By way of example, without limitation,actuator 76 in FIG. 18(a) includes eight electrostatic plates, 174, 176, 177, 178 and so one. The angle of position ofmovable part 156 depends on whichelectrostatic plates 174 and so on, receive an applied voltage. Applying the voltage to eitherplates moveable part 156. - FIG. 18(b) illustrates a simple flat structure of
electrodes electrodes - FIG. 18(c) shows a different embodiment of suspension and
electrodes electrodes 172 can be continuously circular without slots for the suspension. Suspension is provided bybeams 196, which can be non-uniform in thickness and havethinner sections 198. When a voltage is applied toplates moveable member 172. This results in a change of the angle or position offiber 60 andbeam 196 to create the required tilt or angle of the outgoing light beam. - FIG. 18(d) illustrates another suspension embodiment of the suspension which has flat
transverse beams 190 optionally one ormore springs 192 is included as part of the suspension. This type of suspension is also illustrated three-dimensionally in FIG. 19. When voltage is applied betweenelectrodes electrode 172 and all movable parts of the moveable member together withfiber 60 will tilt.Springs 192 make the suspension more flexible for tilt and less voltage is required for the same degree of tile. - The suspension of FIG. 18(e) is a variation of
moveable part 156 suspension and is illustrated three-dimensionally in FIG. 20. In the FIG. 18(e) embodiment,moveable part 156 is acylinder 204 withbeams 200, FIG. 20.Beams 200 can optionally havethinner sections 202. Thesethinner sections 202 can be used as a concentrator of mechanical stress for increasing sensitivity of the sensors positioned onbeams 200. Thecylindrical shape 204 has several advantages including, (i) permittingelectrodes 172 to be more rigid so they can transfer their motion to the angular motion offiber 60 more accurate and (ii) does not increase the mass of the movable part becausecylinder 204 is hollow. The sidewall ofcylinder 204 can also be used as an additional surface forelectrode 172 to increasing sensitivity/efficiency ofactuator 76.Actuator plate 178 can also be expanded on the internalcylindrical part 206 as shown in FIG. 18(e). When electrostatic voltage is applied toplate 178, it is also applied toelectrode 206 that is electrically coupled toplate 178. The electrostatic force acts betweenplate 178 andelectrode 172 and also betweenplate 206 and movable surface ofcylinder 204. The result is an increase of the electrostatic force and a decrease in the required voltage required to tiltelectrode 172 andoptical body 42 to the same angle. - FIGS.21(a)-(b) illustrate an embodiment of electrostatic actuation of
optical switch 30 for eight angular positions. For example, when the voltage is applied onsteady electrodes moveable plate 190 moves toward the +Y direction. When the voltage is applied on the plates, for example, 182 and 180, thenmovable plate 194 is attracted to the base and moves toward the −Y direction. Correspondingly, when the voltage is applied to 176 and 177, then the entiremoveable part 156 is tilt toward the +XY direction. Thus, changing the combination of the voltage applied to different electrodes can change the angle or positions oflens 68 and the outgoing light beam. In provides discrete or digital positioning of the light beam. - FIGS.22(a)-22(f) illustrates another suspension embodiment where
fiber 208 serves as a suspension formoveable part 156. In this embodiment,movable part 156 has a circular disk that is fixed on the end offiber 208. - FIG. 22(a) shows a top view of one transmitting or receiving cell that includes
frame 154 andmoveable plate 210 fixed at the end offiber 208.Moveable plate 210 is at adistance 211 away fromelectrodes 174 as shown in FIG. 22(b). -
Electrodes 174 can be sectors of a circle. In a neutral position, when the voltage is not applied to any of theelectrodes 174,moveable plate 210 stays in the neutral position, see FIG. 22(b) and the light exists fromfiber 208 in a straight upward direction. - When the voltage is applied to one of the
electrodes 174, thenmovable plate 210 bends toward thiselectrode 174 because of the electrostatic force applied to this capacitor. This force tiltsmoveable plate 210 and deflects the end offiber 208 to redirecting the light beam. - FIG. 22(c) illustrates the same cross section of the same kind of redirecting mechanism with the only difference being that the central part of
moveable plate 210 is acylinder 212 which allows to extend the end offiber 208 to extend above movingplate 210. This embodiment produces larger linear deflections at the end offiber 208 with the same angular deflection of thefiber 208 in the area that serves as a suspension of the whole redirecting mechanism. FIG. 22(d) illustrates, in cross-section, the redirecting mechanism, which can further include micro-lenses 68 and 69 incorporated incylindrical micro-collimator 212 ofmoveable plate 210.Lenses - The redirecting mechanism illustrated in FIG. 22(e) has a cylindrical moving plate similar to that of FIG. 18(e). In this embodiment, the suspension is also
fiber 208 itself. When voltage is applied toelectrode 174 then the electrostatic force betweenelectrode 174 andmoveable plate 210 attractsmoveable plate 210 towardelectrode 174. - An
additional electrode 214, positioned on an interior offrame 154, also serves as an electrode for the electrostatic actuator. The additional electrostatic force betweenelectrode 214 andcylinder 204 attracts this side of the cylinder towardelectrode 214. This increases the efficiency ofactuator 76 by increasing deflection or angle or tilt ofmoveable plate 210 for the same driving voltage applied toelectrodes fiber 208. - The redirecting mechanism of FIG. 22(f) is a variation the FIG. 22(e) embodiment. In FIG. 22(f)
lens 68 is fixed at the end ofcylinder 204, creating a micro-collimator that is integrated with themovable part 156 ofactuator 76. - FIGS.23(a)-23(f) illustrate different embodiment of light redirecting mechanisms of the present invention.
- FIG. 23(a) illustrates redirection of light with
fiber 223,optical body 42 andlens 68 rotating or moving the light beam out of transmittingarray 32. In some cases, onelens 68 cannot provide quality light beam collimating and additional lens are required. The system of lens and micro-lenses can be moveable together inoptical body 42. - In FIG. 23(b), an
additional lens 220 is provided that is not moveable.Lens 220 serves as an additional focusing or collimating lens and transmits the redirect beam. - In FIG. 23(c), the end of
fiber 223 has its own collimating or focusing micro-lens. The end offiber 223 is preferably positioned at a distance tolens 220 that is selected in order for thebeam exiting fiber 223 is collected bylens 220. The end offiber 223 is redirected with the assistance ofmoveable part 222 which also redirects the light beam. This embodiment enablesoptical body 42 to be lightweight and requires only a small redirection. Optical losses experienced in the FIG. 23(c) embodiment can be resolved in the FIG. 23(d) embodiment where the gap between the end offiber 223 andlens 220 is filled with an opticallytransparent material 225. Opticallytransparent material 225 does not prevent free movement of the end offiber 223 and provides an optical matching offiber 223 withlens 220 in order to decrease optical losses. - Referring not to FIG. 23(e),
fiber 223 is stationary and can include its own micro-lens or micro-collimating system. A distal end offiber 223 is located at an input ofwaveguide 221.Waveguide 221 is mechanically coupled tomoveable part 226 ofactuator 76. The mechanical system of angular rotation ofwaveguide 221 is made in such a way that the pivot point is located close to the distal end offiber 223. As a result, with angular redirection ofwaveguide 221 the input ofwaveguide 221 is always optically coupled with the distal end offiber 223. The lightbeam exiting fiber 223 enterswaveguide 221.Waveguide 221 then redirects the beam toward the corresponding receivingarray 36. This embodiment has the advantage that there is no need to move and bendfiber 223. The overall suspension ofmovable part 156, including the suspension and along with the springy properties offiber 223, is more flexible and requires less driving voltage for a selected tilt. This embodiment is also advantageous because of its simplification in the assembling process. -
Waveguide 221 can also be combined withmicro-collimating system 227 is illustrated in FIG. 23(f).Micro-collimator system 227 is mechanically and optically coupled withmovable part 156 andwaveguide 221. Micro-collimator 227 can includeseveral lenses - FIGS.24(a)-(f) illustrates different versions of
moveable part 156 offiber 223. Whenfiber 223 is used as a suspension, then the entire thickness can be used as in FIG. 24(a). In this embodiment, the end offiber 223 is coupled optically and mechanically withlens 68 andmoveable part 156. When the mechanical suspension other thanfiber 223 itself is used, then the flexibility of the end offiber 223 can be critical. In this embodiment, the end offiber 223 can be thinned as shown in FIG. 24(b). The end offiber 230 can be thinner than its initial cladding. Thisthinner fiber 230 provides more flexibility, ability to bend, and is connected tolens 68 andmoveable part 156. - In FIG. 24(c)
fiber 223 is again thinned from its initial cladding except the very distal end offiber 223 is thinker. This enhances the mechanical coupling withlens 68. - In another embodiment, illustrated in FIG. 24(d), circular or other
geometric trenches 234 are made at the end offiber 223. This structure provides enough flexibility for the end offiber 223 to be bent and while preventing the maximum curvature, maximum bending, offiber 223 and reduces the possible optical loses. The geometry oftrenches 234 and their pitch can be designed in such a way that the maximum bending offiber 223 does not exceed the maximum allowable bending for a required level of optical loss. - FIG. 24(e) illustrates another embodiment of the end of
fiber 223. In this embodiment,lens 236 is bonded or sealed directly tofiber 223, or made from the fiber material.Moveable part 156 is connected directly to the end offiber 223. The flexible part offiber 223 has a smaller diameter than the diameter of its cladding. Additionally, as in FIG. 24(f),lens 236, for example a GRIN lens and the like, is attached directly to fiber 231 andmoveable part 156 is also bonded directly to the end of fiber 231. - FIGS.25(a)-25(b) illustrate different embodiments of optically transparent media between transmitting
array 32 and receivingarray 36. The optically transparent media can be vacuum, gas, air, liquid, gel, and the like. In FIG. 25(a) optically transparent media is housed in aclosed volume 250 filled with opticallytransparent material 252.Closed volume 250 has at least twotransparent windows array 32 to receivingarrays 36. - Referring now to FIG. 25(b),
closed volume 250 has multiple sets ofwindows arrays Windows - The foregoing description of a preferred embodiment of the invention has been presented for purposes of illustration and description. It is not intended to be exhaustive or to limit the invention to the precise forms disclosed. Obviously, many modifications and variations will be apparent to practitioners skilled in this art. It is intended that the scope of the invention be defined by the following claims and their equivalents.
Claims (67)
1. An optical switch, comprising:
a plurality of transmitting devices integrated on a single substrate, each of an individual transmitting device including a directing device;
a plurality of receiving devices,
wherein at least a portion of the transmitting devices direct output beams from the plurality of transmitting devices to the plurality of receiving devices.
2. The switch of claim 1 , wherein the plurality of transmitting devices are integrated on a single substrate in a batch process.
3. The switch of claim 1 , wherein the plurality of transmitting devices includes a plurality of focusing devices, each of an optical fiber from the plurality of transmitting devices being coupled to at least one focusing device.
4. The switch of claim 1 , wherein the plurality of transmitting devices includes a plurality of directing devices, each of an optical fiber of the plurality of transmitting devices being coupled to at least one directing device.
5. The switch of claim 1 , wherein the plurality of transmitting devices includes a plurality of focusing devices and a plurality of directing devices, wherein each of a focusing device is coupled to a directing device.
6. The switch of claim 3 , wherein each focusing device includes at least one lens.
7. The switch of claim 5 , wherein each lens is selected from a regular lens, a GRIN lens, a diffractive grated lens, and a Fresnel lens.
8. The switch of claim 3 , wherein at least a portion of the focusing devices include a micro-collimator.
9. The switch of claim 3 , wherein at least a portion of the focusing devices include an optical waveguide.
10. The switch of claim 3 , wherein at least a portion of the focusing devices include a variable-focus lens.
11. The switch of claim 4 , wherein each directing device is a micro-mechanical device.
12. The switch of claim 4 , wherein at least a portion of the directing devices includes an actuator.
13. The switch of claim 11 , wherein each micro-mechanical device includes an actuator.
14. The switch of claim 13 , wherein each actuator is selected from an electro-static actuator, an electromagnetic actuator, a piezoelectric actuator, a thermo-mechanical actuator and a polymer actuator.
15. The switch of claim 14 , wherein the polymer actuator is an electro-active polymer actuator, an optical-active polymer actuator, a chemically active polymer actuator, a magneto-active polymer actuator, an acousto-active polymer actuator and a thermally active polymer actuator.
16. The switch of claim 11 , wherein each micro-mechanical device includes a suspension member that provides movement of a distal portion of an optical fiber of the plurality of transmitting optical fibers.
17. The switch of claim 16 , wherein each suspension member includes at least one elastic deformation member that provides a mechanical coupling between a substrate and the movable part of the directing device.
18. The switch of claim 3 , further comprising:
an optical body positioned between each focusing device and a distal end of each of a optical fiber of the plurality of transmitting optical fibers.
19. The switch of claim 18 , wherein the optical body includes at least one of a solid optical transparent material, a liquid optically transparent material, a gaseous optically transparent material, a gel optically transparent material.
20. The switch of claim 1 , wherein at least a portion of the receiving devices are directed to receive the transmitter output beams from the plurality of transmitting devices while simultaneously focusing the incoming beams into the plurality of optical fibers of the plurality of receiving devices.
21. The switch of claim 1 , wherein the plurality of receiving devices includes a plurality of focusing devices, each of an optical fiber of a plurality of receiving optical devices being coupled to at least one focusing device.
22. The switch of claim 1 , wherein the plurality of receiving devices includes a plurality of directing devices, each of an optical fiber of a plurality of receiving optical devices being coupled to at least one directing device.
23. The switch of claim 1 , wherein the plurality of receiving devices includes a plurality of focusing devices and a plurality of directing devices, wherein each of a focusing device is coupled to a directing device.
24. The switch of claim 21 , wherein each focusing device includes at least one lens.
25. The switch of claim 21 , wherein at least a portion of focusing devices include a micro-collimator.
26. The switch of claim 21 , wherein at least a portion of the focusing devices include an optical waveguide.
27. The switch of claim 21 , wherein at least a portion of focusing devices include a variable-focus lenses.
28. The switch of claim 24 , wherein each lens is selected from a regular lens, a GRIN lens, a diffractive grated lens, and a Fresnel lens.
29. The switch of claim 22 , wherein each directing device is an micro-mechanical device.
30. The switch of claim 22 , wherein at least a portion of the directing devices includes an optical waveguide.
31. The switch of claim 29 , wherein each micro-mechanical device includes an actuator.
32. The switch of claim 31 , wherein each actuator is selected from an electro-static actuator, an electromagnetic actuator, a piezoelectric actuator, a thermo-mechanical actuator and a polymer actuator.
33. The switch of claim 32 , wherein the polymer actuator is an electro-active polymer actuator, an optical-active polymer actuator, a chemically active polymer actuator, a magneto-active polymer actuator, an acousto-active polymer actuator and a thermally active polymer actuator.
34. The switch of claim 29 , wherein each micro-mechanical device includes a suspension member that provides movement of a distal portion of a transmitting optical fiber of the plurality of transmitting optical fibers.
35. The switch of claim 34 , wherein each suspension member includes at least one elastic deformation member that provides a mechanical coupling between a substrate and at least a portion of each micro-mechanical device.
36. The switch of claim 21 , further comprising:
an optical body positioned between each focusing device and a distal end of each optical fiber of the plurality of receiving devices.
37. The switch of claim 36 , wherein the optical body includes at least one of a solid optical transparent material, a liquid optically transparent material, a gaseous optically transparent material, a gel optically transparent material.
38. The switch of claim 1 , wherein at least a portion of transmitting devices are MEMS devices.
39. The switch of claim 3 , wherein at least a portion of focusing devices are MEMS devices.
40. The switch of claim 4 , wherein at least a portion of directing devices are MEMS devices.
41. The switch of claim 21 , wherein at least a portion of focusing devices are MEMS devices.
42. The switch of claim 22 , wherein at least a portion of directing devices are MEMS devices.
43. The switch of claim 24 , wherein at least a portion of lenses are MEMS devices.
44. The switch of claim 1 , wherein each of a transmitting device includes a fiber placement cavity.
45. The switch of claim 1 , further comprising at least one transmitter substrate with a plurality of fiber placement cavities, each of a fiber placement cavity corresponding to a transmitting device of the plurality of transmitting devices.
46. The switch of claim 45 , further comprising at least one receiver substrate with a plurality of fiber placement cavities, each of a fiber placement cavity corresponding to a receiving device of the plurality of receiving devices.
47. The switch of claim 46 , wherein each of a transmitter device includes a focusing device and a directing device positioned adjacent to a fiber placement cavity.
48. The switch of claim 47 , wherein each of a receiver device includes a focusing device and a directing device positioned adjacent to a fiber placement cavity.
49. The switch of claim 45 , wherein each of a transmitter device includes a focusing device and a directing device at least partially positioned in a fiber placement cavity.
50. The switch of claim 49 , wherein each of a receiver device includes a focusing devices a directing device at least partially positioned in a fiber placement cavity.
51. The switch of claim 48 , wherein each directing device includes a suspension member that provides movement of a distal portion of a transmitting or receiving optical fiber.
52. The switch of claim 50 , wherein each directing device includes a suspension member that provides movement of a distal portion of a transmitting or receiving optical fiber.
53. The switch of claim 1 , further comprising:
a first substrate coupled to the plurality of transmitting devices that include a plurality of transmitting optical fibers, a plurality of focusing members and a plurality of directing members;
a second substrate coupled to the plurality of receiving devices that include a plurality of receiving optical fibers, a plurality of focusing members and a plurality of directing members.
54. The switch of claim 53 , wherein at least a portion of the receiving devices are directed to receive the transmitter output beams from the plurality of transmitting devices while simultaneously focusing the incoming beams into the plurality of optical fibers of the plurality of receiving devices.
55. The switch of claim 53 , wherein the first and second substrates each include a plurality of fiber placement cavities.
56. The switch of claim 55 , wherein a cross-sectional dimension of a fiber placement cavity is greater than the size of the components positioned in the cavity.
57. The switch of claim 53 , wherein the plurality of transmitting devices includes a plurality of elastic deformation members that provide a mechanical coupling between the first substrate and a movable parts of directing devices.
58. The switch of claim 53 , wherein the plurality of receiving devices includes a plurality of elastic deformation members that provide a mechanical coupling between the second substrate and a movable parts of directing devices.
59. The switch of claim 1 , further comprising
an optically transparent media between transmitting and receiving devices where light beams from said transmitting devices can mutually intersect on their way to corresponding receiving devices.
60. The switch of claim 59 , wherein the optically transparent media includes a vacuum, a solid optically transparent material, a liquid optically transparent material, a gaseous optically transparent material, a gel optically transparent material.
61. The switch of claim 59 , wherein optically transparent media is a system of lenses between transmitting and receiving devices.
62. The switch of claim 61 , wherein each lens is selected from a regular lens, a GRIN lens, a diffractive grated lens, and a Fresnel lens.
63. The switch of claim 1 , wherein a number of transmitting devices and a number of receiving devices are the same.
64. The switch of claim 1 , further comprising:
a control system coupled to the plurality of transmitting devices and plurality of receiving devices, the control system providing control signals that coordinate positioning of transmitting devices and receiving devices.
65. The switch of claim 1 , further comprising:
at least one sensor coupled to the plurality of transmitting devices and the control system; and
at least one sensor coupled to the plurality of receiving devices and the control system.
66. The switch of claim 65 , wherein each of the plurality of transmitting and receiving devices includes at least one photosensitive sensor.
67. A method for optical switching between input fiber channels output fiber channels comprising:
providing a plurality of transmitting devices including a plurality of optical fibers and a plurality of receiving devices including a plurality of optical fibers, the plurality of transmitting devices being integrated on a single substrate; and
focusing and directing at least a portion of the transmitter output beams from the plurality of transmitting devices to the plurality of receiving devices.
Priority Applications (1)
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US11668878B2 (en) * | 2021-02-26 | 2023-06-06 | Viavi Solutions Inc. | Fiber-optic switches using multicore optical fibers |
WO2023114689A1 (en) * | 2021-12-17 | 2023-06-22 | Nufern | Positioning device and alignment fixture for linear optical fiber array |
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WO2002001276A2 (en) | 2002-01-03 |
AU2001271580A1 (en) | 2002-01-08 |
WO2002001274A3 (en) | 2002-09-19 |
WO2002001277A3 (en) | 2002-10-03 |
AU2001282859A1 (en) | 2002-01-08 |
WO2002001275A2 (en) | 2002-01-03 |
US6577793B2 (en) | 2003-06-10 |
AU2002215617A1 (en) | 2002-01-08 |
WO2002001275A3 (en) | 2003-01-16 |
WO2002001276A3 (en) | 2003-02-06 |
US20020181844A1 (en) | 2002-12-05 |
WO2002001274A2 (en) | 2002-01-03 |
WO2002001277A2 (en) | 2002-01-03 |
US20020181843A1 (en) | 2002-12-05 |
US20020181842A1 (en) | 2002-12-05 |
AU2001278855A1 (en) | 2002-01-08 |
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