US20010020199A1 - Self-teaching robot arm position method to compensate for support structure component alignment offset - Google Patents
Self-teaching robot arm position method to compensate for support structure component alignment offset Download PDFInfo
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- US20010020199A1 US20010020199A1 US09/841,539 US84153901A US2001020199A1 US 20010020199 A1 US20010020199 A1 US 20010020199A1 US 84153901 A US84153901 A US 84153901A US 2001020199 A1 US2001020199 A1 US 2001020199A1
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- Prior art keywords
- robot arm
- arm mechanism
- alignment
- hand
- wafer
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
- B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
- B25J9/041—Cylindrical coordinate type
- B25J9/042—Cylindrical coordinate type comprising an articulated arm
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
- B25J15/0052—Gripping heads and other end effectors multiple gripper units or multiple end effectors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
- B25J9/104—Programme-controlled manipulators characterised by positioning means for manipulator elements with cables, chains or ribbons
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
- B25J9/106—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S414/00—Material or article handling
- Y10S414/135—Associated with semiconductor wafer handling
- Y10S414/136—Associated with semiconductor wafer handling including wafer orienting means
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S414/00—Material or article handling
- Y10S414/135—Associated with semiconductor wafer handling
- Y10S414/137—Associated with semiconductor wafer handling including means for charging or discharging wafer cassette
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T74/00—Machine element or mechanism
- Y10T74/20—Control lever and linkage systems
- Y10T74/20207—Multiple controlling elements for single controlled element
- Y10T74/20305—Robotic arm
- Y10T74/20317—Robotic arm including electric motor
Abstract
Description
- This application is a continuation in part of U.S. patent application No. 09/098,389, filed Jun. 16, 1998, which is a division of U.S. patent application No. 08/500,489, filed Jul. 10, 1995, now U.S. Pat. No. 5,765,444.
- The present invention relates to robot arm mechanisms and, in particular, to a self-teaching robot arm positioning method that determines whether there exists misalignment of a specimen holder relative to a robot arm mechanism to prevent the robot arm from reaching toward an unintended location on the specimen holder.
- Currently available robot arm mechanisms include pivotally joined multiple links that are driven by a first motor and are mechanically coupled to effect straight line movement of an end effector or hand and are equipped with a second, independently operating motor to angularly displace the hand about a central axis. Certain robot arm mechanisms are equipped with telescoping mechanisms that move the hand also in a direction perpendicular to the plane of straight line movement and angular displacement of the hand. The hand is provided with a vacuum outlet that secures a specimen, such as a semiconductor wafer, computer hard disk, or compact disk, to the hand as it transports the specimen between processing stations.
- U.S. Pat. No. 4,897,015 of Abbe et al. describes a rotary-to-linear motion robot arm that uses a first motor to control a multi-linkage robot arm to produce straight line radial motion from motor-driven rotary motion. An additional motor may be coupled to the robot arm for operation independent of that of the first motor to angularly move the multi-linkage robot arm without radial motion. Because they independently produce radial motion and angular motion, the first and second motors produce useful robot arm movement when either one of them is operating.
- The robot arm of the Abbe et al. patent extends and retracts an end effector (or a hand) along a straight line path by means of a mechanism that pivotally couples in a fixed relationship a first arm (or forearm) and a second (or upper) arm so that they move in predetermined directions in response to rotation of the upper arm. To achieve angular displacement of the hand, a Θ drive motor rotates the entire robot arm structure. The Abbe et al. patent describes no capability of the robot arm to reach around corners or travel along any path other than a straight line or a circular segment defined by a fixed radius.
- U.S. Pat. No. 5,007,784 of Genov et al. describes a robot arm with an end effector structure that has two oppositely extending hands, each of which is capable of picking up and transporting a specimen. The end effector structure has a central portion that is centrally pivotally mounted about the distal end of a second link or forearm. The extent of pivotal movement about all pivot axes is purposefully limited to prevent damage to vacuum pressure flexible conduits resulting from kinking or twisting caused by over-rotation in a single direction.
- The coupling mechanism of a first link or upper arm, the forearm, and the end effector structure of the robot arm of the Genov et al. patent is more complex than that of the robot arm of the Abbe et al. patent. Nevertheless, the robot arm structures of the Abbe et al. and Genov et al. patents operate similarly in that each of the end effector structures picks up and transports specimens by using one motor to extend and retract a hand and another, different motor to rotate the entire robot arm structure to allow the hand to extend and retract at different ones of a restricted number of angular positions.
- Robot arms of the type described by the Abbe et al. and Genov et al. patents secure a specimen to the hand by means of vacuum pressure delivered to the hand through fluid conduits extending through the upper arm, forearm, and hand and around all of the pivot axes. The Abbe et al. patent is silent about a vacuum pressure delivery system, and the Genov et al. patent describes the use of flexible fluid conduits. The presence of flexible fluid conduits limits robot arm travel path planning because unidirectional robot arm link rotation about the pivot axes “winds up” the conduits and eventually causes them to break. Thus, conduit breakage prevention requirements prohibit continuous robot arm rotation about any of the pivot axes and necessitate rewind maneuvers and travel path “lockout” spaces as part of robot arm travel path planning. The consequences of such rewind maneuvers are more complex and limited travel path planning, reduced throughput resulting from rewind time, and reduced available work space because of the lockout spaces.
- Moreover, subject to lockout space constraints, commercial embodiments of such robot arms have delivered specimens to and retrieve specimens from stations angularly positioned about paths defined only by radial distances from the axes of rotation of the robot arms.
- Thus, the robot arm structures described by the Abbe et al. and Genov et al. patents are incapable of transporting specimens between processing stations positioned in compact, irregularly shaped working spaces. For example, neither of these robot arm structures is set up to remove specimen wafers from and place specimen wafers in wafer cassettes having their openings positioned side-by-side in a straight line arrangement of a tightly packed working space.
- Wafer cassettes are usually positioned side by side on a support structure along a radial path measured from the central axis of or along a straight line distance from the robot arm mechanism. These wafer cassettes are often misaligned from their nominal cassette opening arrangements relative to the robot arm mechanism. Such misalignment could cause a robot arm mechanism to direct the hand or the wafer it carries to strike the cassette instead of extend into its opening to, respectively, remove or replace a wafer. Robot arm mechanism contact with the cassette resulting from alignment offset can, therefore, create contaminant particles.
- An object of the invention is, therefore, to provide a multiple link robot arm system that has straight line motion, extended reach, corner reacharound, and continuous bidirectional rotation capabilities for transporting specimens to virtually any location in an available work space that is free of lockout spaces.
- Another object of the invention is to provide such a system that increases specimen processing throughput in the absence of robot arm rewind time and radial positioning of processing station requirements.
- A further object of this invention is to provide such a system that is capable of continuous rotation in either direction with no susceptibility to kinking, twisting, or breaking of conduits delivering vacuum pressure to the hand.
- Still another object of the invention is to provide such a system that uses two motors capable of synchronous operation and a linkage coupling mechanism that permit a hand of an end effector structure to change its extension as the multiple link robot arm mechanism to which the hand is associated changes its angular position.
- Yet another object of the invention is to provide a system component misalignment correction technique for either mechanical alignment of system components or robot arm mechanism trajectory control to compensate for support structure alignment offset.
- Each of two preferred embodiments of the present invention includes two end effectors or hands. A first embodiment comprises two multiple link robot arm mechanisms mounted on a torso link that is capable of 360 degree rotation about a central or “torso” axis. Each robot arm mechanism includes an end effector having a single hand. A second embodiment is a modification of the first embodiment in that the former has one of the robot arm mechanisms removed from the torso link and substitutes on the remaining robot arm mechanism an end effector with oppositely extending hands for the end effector having a single hand.
- Each of the multiple link robot arm mechanisms of the first and second embodiments uses two motors capable of synchronized operation to permit movement of the robot arm hand along a curvilinear path as the extension of the hand changes. A first motor rotates a forearm about an elbow axis that extends through distal and proximal ends of the upper arm and forearm, respectively, and a second motor rotates an upper arm about a shoulder axis that extends through a proximal end of the upper arm. A mechanical linkage couples the upper arm and the forearm. The mechanical linkage forms an active drive link and a passive drive link. The active drive link operatively connects the first motor and the forearm to cause the forearm to rotate about the elbow axis in response to the first motor. The passive drive link operatively connects the forearm and the hand to cause the hand to rotate about a wrist axis in response to rotation of the forearm about the elbow axis. The wrist axis extends through distal and proximal ends of the forearm and hand, respectively.
- In two embodiments described in detail below, a motor controller controls the first and-second motors in two preferred operational states to enable the robot arm mechanism to perform two principal motion sequences. The first operational state maintains the position of the first motor and rotates the second motor so that the mechanical linkage causes linear displacement (i.e., extension or retraction) of the hand. The second operational state rotates the first and second motors so that the mechanical linkage causes angular displacement of the hand about the shoulder axis. The second operational state can provide an indefinite number of travel paths for the hand, depending on coordination of the control of the first and second motors.
- Whenever the first and second motors move equal angular distances, the angular displacement of the upper arm about the shoulder axis and the angular displacement of the forearm about the elbow axis equally offset and thereby result in only a net angular displacement of the hand about the shoulder axis. Thus, under these conditions, there is no linear displacement of the hand and no rotation of the hand about the wrist axis. Whenever the first and second motors move different angular distances, the angular displacement of the upper arm about the shoulder axis and the angular displacement of the forearm about the elbow axis only partly offset and thereby result in angular displacements of the hand about the shoulder and wrist axes and consequently a linear displacement of the hand. Coordination of the position control of the first and second motors enables the robot arm mechanism to describe a compound curvilinear path of travel for the hand.
- A third or torso motor rotates the torso link about the central axis, which extends through the center of the torso link and is equidistant from the shoulder axes of the robot arm mechanisms of the first embodiment. The motor controller controls the operation of the torso motor to permit rotation of the torso link independent of the motion of the robot arm mechanism or mechanisms mounted to it. The presence of the rotatable torso link together with the independent robot arm motion permits simple, nonradial positioning of specimen processing stations relative to the torso axis, extended paddle reach, and corner reacharound capabilities. The consequence is a high speed, high throughput robot arm system that operates in a compact work space.
- Each of the robot arm mechanisms of the first embodiment is equipped with a rotary fluid slip ring acting as a fluid feedthrough conduit. These slip rings permit the hand to rotate continuously in a single direction as the robot arm links rotate continuously about the shoulder, elbow, and wrist axes without a need to unwind to prevent kinking or twisting of fluid pressure lines. Vacuum pressure is typically delivered through the fluid pressure lines.
- The robot arm mechanism of the second embodiment is equipped with a rotary fluid multiple-passageway spool that delivers fluid pressure separately to each rotary joint of and permits continuous rotation of the robot arm links in a single direction about the central, shoulder, elbow, and wrist axes.
- Preferred embodiments implementing the self-teaching robot arm positioning method to compensate for support structure alignment offset need not include two end effectors or hands. A misalignment correction technique carried out in accordance with the invention entails the use of a component emulating fixture preferably having mounting features that are matable to support structure mounting elements. The emulating fixture preferably includes two upwardly extending, cylindrical locating features that are positioned to engage a fork-shaped end effector in two different extension positions. The robot arm positioning method is self teaching in that the motor angular position data measured relative to the fixture features are substituted into stored mathematical expressions representing robot arm mechanism motion to provide robot arm position output information that determines the alignment position of the wafer carrier and thereby the existence of error in its actual alignment relative to a nominal alignment.
- For manual correction, robot arm mechanism position output information provides the angular offset between the actual and nominal radial distances between the robot arm mechanism shoulder axis and the two locating features. Position coordinates for proper alignment by manual repositioning of any misaligned wafer carrier can then be derived. For automatic correction, robot arm mechanism position output information is used to derive a trajectory that causes the end effector to properly access the wafers stored in a misaligned wafer carrier.
- Additional objects and advantages of this invention will be apparent from the following detailed description of preferred embodiments thereof which proceeds with reference to the accompanying drawings.
- FIGS. 1A, 1B, and1C are respective side elevation, plan, and cross-sectional views of a two-arm, multiple link robot arm system of the present invention.
- FIG. 2 is a side elevation view in stick diagram form showing the link components and the associated mechanical linkage of the robot arm system of FIGS. 1A, 1B, and1C.
- FIG. 3 is an isometric view in stick diagram form showing the rotational motion imparted by the motor drive links of the mechanical linkage of the robot arm system of FIGS. 1A, 1B, and1C.
- FIGS. 4A and 4B are respective cross-sectional and fragmentary plan views showing the interior components, mechanical linkage, and fluid pressure line paths of the robot arm system of FIGS. 1A, 1B, and1C.
- FIGS. 5A and 5B are respective side elevation and plan views of a rotary fluid slip ring installed at each rotary joint of the robot arm system of FIGS. 1A, 1B, and1C.
- FIG. 6A is a diagram showing the spatial relationships and parameters that are used to derive control signals provided by, and FIG. 6B is a block diagram of, the motor controller for the embodiments of the dual end effector, multiple link robot arm system of the invention.
- FIGS. 7A and 7B are respective side elevation and plan views of an alternative one-arm, multiple link robot arm system having an end effector structure with two oppositely extending hands.
- FIGS.8A-1 and 8A-2 and FIG. 8B are respective fragmentary cross-sectional and plan views showing the interior components, mechanical linkage, and fluid pressure line paths of the robot arm system of FIGS. 7A and 7B.
- FIGS. 9A and 9B are respective side elevation and plan views of the rotary multiple fluid-passageway spool installed in each rotary joint of the robot arm system of FIGS. 8A and 8B.
- FIG. 10 shows in a series of 16 frames the various positions of the two-arm, multiple link robot arm system of FIGS. 1A, 1B, and1C as it retrieves two specimens from two parallel-aligned storage locations and sequentially places the two specimens temporarily at a process location.
- FIG. 11 shows in a series of 19 frames the various positions of a one-arm, two-hand multiple link robot arm system of FIGS. 7A and 7B as it retrieves two specimens from parallel-aligned storage locations and sequentially places the two specimens temporarily at a process location.
- FIG. 12 shows an upper surface of a support structure adapted to receive a front-opening wafer carrier for 300 mm diameter semiconductor wafers.
- FIG. 13A shows a wafer carrier with its carrier or box door removed to reveal the interior of the wafer carrier; and FIGS. 13B and 13C show, respectively, a bottom surface and a carrier front retaining feature on the bottom surface of the wafer carrier.
- FIGS. 14A and 14B are respective bottom and top plan views of a component emulating fixture of the invention.
- FIGS. 15A and 15B are respective diagrammatic cross-sectional and rear end elevation views of the component emulating fixture of FIGS. 14A and 14B.
- FIGS. 16A, 16B, and16C are, respectively, a bottom plan view of the component emulating fixture superimposed on an outline of the wafer carrier, a side elevation view of the fixture similar to that of FIG. 15A, and a rear end view of the fixture inverted relative to that of FIG. 15B.
- FIG. 17 shows two wafer carriers positioned side by side with their front openings in a nominal coplanar relation, similar to that depicted in FIG. 6A.
- FIG. 18 shows two wafer carriers positioned side by side but with one of them offset such that their front openings are misaligned from the nominal coplanar position shown in FIG. 17.
- FIG. 19 is a diagram showing two radii representing distances between a robot arm mechanism shoulder axis and locating feature longitudinal axis for the extension of the end effector to two locating features of the component emulating fixture.
- FIGS. 1A, 1B, and1C are respective side elevation, plan, and cross-sectional views of a two-arm, multiple link
robot arm system 8 mounted on and through an aperture in the top surface of a support table 9. - With reference to FIGS. 1A and 1B, two similar but independently controllable three-link
robot arm mechanisms torso link 11, which is mounted to the top surface of abase housing 12 for rotation about a central ortorso axis 13. Because they are mirror images of each other,robot arm mechanisms robot arm mechanism 10R but is similarly applicable torobot arm mechanism 10L. -
Robot arm mechanism 10R comprises anupper arm 14R mounted to the top surface of acylindrical spacer 15R, which is positioned on the right-hand end oftorso link 11 for rotation about ashoulder axis 16R.Cylindrical spacer 15R provides room for the motors and certain other components ofrobot arm mechanism 10R, as will be described below.Upper arm 14R has adistal end 18R to which aproximal end 20R of aforearm 22R is mounted for rotation about anelbow axis 24R, andforearm 22R has adistal end 26R to which aproximal end 28R of ahand 30R is mounted for rotation about awrist axis 32R.Hand 30R is equipped at itsdistal end 34R with afluid pressure outlet 36R that preferably applies vacuum pressure supplied torobot arm mechanism 10R at aninlet 38 to securely hold a semiconductor wafer, compact disk, or other suitable specimen (not shown) in place onhand 30R. As will be described in detail later, each ofupper arm 14R,forearm 22R, andhand 30R is capable of continuous rotation about itsrespective shoulder axis 16R,elbow axis 24R, andwrist axis 32R. - FIG. 2 shows the link components and associated mechanical linkage of
robot arm mechanism 10R. With reference to FIG. 2,robot arm mechanism 10R is positioned by first and secondconcentric motors First motor 50R rotatesforearm 22R aboutelbow axis 24R, andsecond motor 52R rotatesupper arm 14R aboutshoulder axis 16R. - More specifically,
first motor 50R rotates aforearm spindle 56R that extends through an aperture inupper arm 14R and terminates in anupper arm pulley 58R. Apost 60R extends upwardly atdistal end 18R ofupper arm 14R through the center of abearing 62R that is mounted to abottom surface 64R offorearm 22R at itsproximal end 20R.Post 60R also extends through an aperture inforearm 22R and terminates in aforearm pulley 66R. Anendless belt 68R connectsupper arm pulley 58R and the outer surface of bearing 62R to rotateforearm 22R aboutelbow axis 24R in response to rotation offirst motor 50R. -
Second motor 52R rotates anupper arm spindle 80R that is mounted to abottom surface 82R ofupper arm 14R to rotateupper arm 14R aboutshoulder axis 16R. Coordinated operation of first andsecond motors shoulder axis 16R. A post 84R extends upwardly through the center of abearing 86R that is mounted to abottom surface 88R ofhand 30R. Anendless belt 90R connectsforearm pulley 66R to the outer surface of bearing 86R to rotatehand 30R aboutshoulder axis 16R in response to the coordinated rotational motions ofmotors - The mechanical linkage coupling
upper arm 14R andforearm 22R forms an active drive link and a passive drive link. The active drive link includesbelt 68R connectingupper arm pulley 58R and the outer surface of bearing 62R and causesforearm 22R to rotate in response to rotation offirst motor 50R. The passive drive link includesbelt 90R connectingforearm pulley 66R and the outer surface of bearing 86R and causeshand 30R to rotate aboutwrist axis 32R in response to rotation offorearm 22R aboutelbow axis 24R. Rotation ofhand 30R can also be caused by a complex interaction among the active and passive drive links and the rotation ofupper arm 14R in response to rotation ofsecond motor 52R. - A third or
torso motor 92 rotates atorso link spindle 94 that is mounted to a bottom surface oftorso link 11, to whichrobot arm mechanism 10R is rotatably mounted. Amain ring 96 supports a bearingassembly 98 around which spindle 94 rotates.Motor 92 is capable of 360 degree continuous rotation aboutcentral axis 13 and therefore can, in cooperation withrobot arm mechanism 10R, movehand 30R along an irregular path to any location within the reach ofhand 30R. - Motor controller54 (FIGS. 6A and 6B) controls
motors robot arm mechanism 10R to perform two principal motion sequences. The first motion sequence changes the extension or radial position ofhand 30R, and the second motion sequence changes the angular position ofhand 30R relative to shoulderaxis 16R. FIG. 3 is a useful diagram for showing the two motion sequences. - With reference to FIGS. 2 and 3, in the first operational state,
motor controller 54 causesfirst motor 50R to maintain the position offorearm spindle 56R andsecond motor 52R to rotateupper arm spindle 80R. The non-rotation offirst motor 50R maintains the position ofupper arm pulley 58R, and the rotation ofupper arm spindle 80R bysecond motor 52R rotatesupper arm 14R aboutshoulder axis 16R, thereby causing rotation offorearm 22R aboutelbow axis 24R and counter-rotation ofhand 30R aboutwrist axis 32R. Because the ratio of the diameters ofupper arm pulley 58R and the outer surface of bearing 62R are 4:2 and the ratio of the diameters offorearm pulley 66R and the outer surface of bearing 86R is 1:2, the rotation ofupper arm 14R in a direction specified by P2 shown in FIG. 3 will causehand 30R to move along astraight line path 100. (The diameters offorearm pulley 66R and the outer surface of bearing 86R are one-half of the diameters of, respectively, the outer surface of bearing 62R andupper arm pulley 58R to streamline the sizes and shapes offorearm 22R andhand 30R.) Wheneverupper arm 14R rotates in the clockwise direction specified by P2,hand 30R extends (i.e., increases radial distance fromshoulder axis 16R) alongpath 100. Wheneverupper arm 14R rotates in the counter-clockwise direction specified by P2,hand 30R retracts (i.e., decreases radial distance fromshoulder axis 16R) alongpath 100. Skilled persons will appreciate thatrobot arm mechanism 10 in a mirror image configuration of that shown in FIG. 3 would extend and retract in response toupper arm 14 rotation in directions opposite to those described. FIG. 1B shows that whenrobot arm mechanism 10R is extended, axes 13, 16R, 24R, and 32R are collinear. - In the second operational state,
motor controller 52R causesfirst motor 50R to rotateforearm spindle 56R in the direction specified by P1 andsecond motor 52R to rotateupper arm spindle 80R in the direction specified by P2. In the special case in whichmotors hand 30R is only angularly displaced aboutshoulder axis 16R. This is so because the rotation offorearm 22R aboutelbow axis 24R caused by the rotation offirst motor 50R and the rotation ofhand 30R aboutwrist axis 32R caused by rotation ofsecond motor 52R and the operation of the passive drive link offset each other to produce no net rotation aboutelbow axis 24R andwrist axis 32R. Thus,hand 30R is fixed radially at a point alongpath 100 and describes a circular path as onlyupper arm 14R rotates aboutshoulder axis 16R. By application of kinematic constraints to achieve a desired travel path forhand 30,motor controller 54 can operate first andsecond motors robot arm mechanism 10R along non-radial straight line paths, as will be further described below. - Skilled persons will appreciate that to operate
robot arm mechanism 10R, first andsecond motors robot arm mechanism 10R can be operated such thatforearm 22R rotates aboutelbow axis 24R. Such motion would causehand 30R to describe a simple spiral path betweenshoulder axis 16R and the full extension ofhand 30R. This motion is accomplished by fixing the position ofshoulder 14R andoperating motor 50R to moveforearm 22R. Applicants note that the prior art described above is incapable of rotating the elbow joint without also rotating the shoulder joint, thereby requiring the operation of two motors. -
Motor controller 54 controls the operation oftorso motor 92 and therefore the rotation of torso link 11 in a direction specified by P3 independently of the operational states ofmotors - FIGS. 4A and 4B show the interior components, mechanical linkage, and fluid pressure conduits of
robot arm mechanism 10R shown in FIGS. 1A, 1B, and 1C. With reference to FIGS. 4A and 4B, a motor housing composed of an interior portion oftorso link 11 and acylindrical spacer 15R containsfirst motor 50R andsecond motor 52R arranged in concentric relation such that theirrespective forearm spindle 56R andupper arm spindle 80R rotate aboutshoulder axis 16R.Forearm spindle 56R is positioned nearer toshoulder axis 16R and is directly connected toupper arm pulley 58R journalled for rotation onbearings 102R.Upper arm spindle 80R is positioned farther radially fromshoulder axis 16R and is directly connected tobottom surface 82R ofupper arm 14R journalled for rotation onbearings 104R. The angular positions ofmotors glass scale encoders 106R and 108R.Encoders 106R and 108R include respective annular diffraction grating scales 110R and 112R and respective light source/detector subassemblies (not shown). Such glass scale encoders are known to skilled persons. -
Base housing 12 containsmotor 92, which is arranged such thattorso link spindle 94 journalled onbearings 98 rotates aboutcentral axis 13. The angular position ofmotor 92 is tracked by aglass scale encoder 118 of a type similar toencoders 106R and 108R. -
Robot arm system 8 includes two separatefluid pressure conduits conduit 124L extending betweenfluid pressure inlet 38L andoutlet 36L of fluid pocket or land 126L andconduit 124R extending betweenfluid pressure inlet 38R andoutlet 36R ofland 126R. In the preferred embodiments described, the fluid pressure conduits deliver vacuum pressure but are capable of delivering positive amounts of fluid pressure. Each ofpath segments base housing 12 and ofpath segments torso link 11 is partly a flexible hose and partly a hole in a solid component. -
Path segments upper arm 14R,forearm 22R, andhand 30R are either channels formed by complementary depressions in mating components or holes passing through solid components.Outlet 36R constitutes a hole invacuum land 126R on the specimen-contacting surface ofhand 30R. - Each path segment terminating or originating at
shoulder axis 16R,elbow axis 24R, andwrist axis 32R includes a rotaryfluid slip ring 136 that functions as a vacuum feedthrough conduit that permits continuous rotation about any one of these three axes.Path segments central axis 13 by an enlarged version of a rotary multiple fluid-passageway spool 300, which rotates within a bearingassembly 120 supported bymain ring 96.Spool 300 is described below with reference to FIGS. 9A and 9B in connection with the detailed description of the alternative preferred embodiment. - FIGS. 5A and 5B show rotary
fluid slip ring 136, which is fitted into each of the rotary joints atshoulder axis 16R,elbow axis 24R, andwrist axis 32R. For purposes of convenience only, the following describes the operation ofslip ring 136 in the rotary jointdefining wrist axis 32R. - With reference to FIGS. 4A, 4B,5A, and 5B,
slip ring 136 includes a convexupper surface 142 and a convexlower surface 144 separated by anannular leaf spring 146. Each ofsurfaces central aperture 148. When it is fitted in a rotary joint,slip ring 136 receives through central aperture 148 a protrusion 150 from the top surface of post 84R that extends fromdistal end 26R offorearm 22R. Protrusion 150 has a hole 152 that extends into and through post 84R along its entire length and is in fluid communication withvacuum path segment 132R withinforearm 22R. The wrist joint formed byforearm 22R andhand 30R causesupper surface 142 to fit against an interior vacuum channel surface 154R ofhand 30R andlower surface 144 to fit against a depression 156R in the top surface of post 84R. The raised upper andlower surfaces leaf spring 146 and form a vacuum seal for the space between the top of protrusion 150 and vacuum channel surface 154R ofhand 30R. The reinforced co-polymer material from whichupper surface 142 is made forms a bearing surface that maintains a vacuum-tight seal during rotary motion aboutwrist axis 32R. - The mechanical construction of
robot arm mechanism 10 does not restricthand 30R to straight line motion but provides two degrees of freedom to achieve complex trajectories. This is beneficial because it facilitates specimen processing layouts to provide relatively small footprints and processing component placements that enhance ergonomic loading of specimens. A common application is to access specimens in straight line rather than complex hand movements. Thus, the following description gives an example of how a skilled person would implementcontroller 54 to carry out this common specimen access operation. - FIG. 6A is a diagram that specifies a local coordinate axis frame whose axes are defined by the orientation of a
semiconductor wafer cassette 168 r and its location relative to shoulderaxis 16R. With reference to FIG. 6A, the following description sets forth the mathematical expressions from which are derived thecommand signals controller 54 uses to retrieve from cassette 168 r awafer 170 r along a vector perpendicular to the opening ofcassette 168 r. - The following parameters are pertinent to the derivation of the path of travel of hand30:
- ΘS=angle of
motor 52R - ΘE=angle of
motor 50R - r=distance between
shoulder axis 16R andelbow axis 24R and distance betweenelbow axis 24R andwrist axis 32R - β=angle between
upper arm 14R andforearm 22R - p=length of
hand 30R - E=2r=extension of robot arm
- Ri=reach of robot arm (i.e., its radius measured from
shoulder axis 16R to thecenter 172 r ofwafer 170 r positioned onhand 30R). -
- For β=0, equation (1) provides that Ri=p and x=0, y=0, ΘS=ΘS
R , ΘE=ΘER . The quantities ΘSR and ΘER represent reference motor angles. The motor angles may be expressed as ΘS=ΘSR +ΔΘSR , ΘE=ΘER +ΔΘER . The angle β may be expressed as β=2(ΔΘSR −ΔΘER ) because of the construction of the mechanical linkages ofrobot arm mechanism 10R. This equation relates the angle β to changes in the motor angles. - To retrieve
wafer 170 r fromcassette 168 r along a straight line path, the displacement along the X-axis equals X0, which is a constant. Thus, X(t)=X0. The quantity X(t) can be expressed as a function of the lengths of the X-axis components of its links: - X(t)=r cos Θ1 +r cos Θ2 +p cos Θp, (2)
- in which
- Θ1=angle of
upper arm 14R - Θ2=angle of
forearm 22R - Θp=angle of
hand 30R. -
- Thus, to compute X0, one substitutes the foregoing identities for Θ1, Θ2, and Θp into equation (2) for X(t) and finds:
- X 0 =r(cos Θ1+cos Θ2)+p cos Θp
- X 0 =r(cos Θ1+cos(Θ1+π−β))+p cos(Θ1+π/2−β/2)
- X 0 =r(cos Θ1−cos(Θ1−β))−p sin(Θ1−β/2). (3)
- Equation (3) expresses the constraint that sets out the relationship between the angles ΘS and ΘE of
motors hand 30R. - Skilled persons can implement constraint equation (3) by means of a servomechanism controller in any one of a number of ways. For example, to achieve high speed operation to implement a given wafer move profile, one can compute from equation (3) command signal values and store them in a look-up table for real-time use. The precomputation process would entail the indexing of ΘS in accordance with the wafer move profile and determining from equation (3) the corresponding ΘE values, thereby configuring the displacement of ΘS and ΘE in a master-slave relationship.
- To achieve angular displacement of
hand 30R aboutshoulder axis 16R,controller 54causes motors hand 30R to reach the desired destination. The linear extension ofhand 30R does not change during this move. Skilled persons will appreciate that complicated concurrent linear and angular displacement move profiles ofhand 30R could be accomplished by programmingcontroller 54 to operatemotors second wafer cassette 168, positioned so that thecenter 172 l of a storedwafer 170 l is coincident to Y0. The parallel arrangement of the openings ofcassettes shoulder axis 16. Such nonradial placement is not implemented in the prior art references described above.Robot arm mechanism 10 is not restricted to radial placement but can accommodate any combination of distances within its reach. - FIG. 6B is a simplified block diagram showing the primary components of
controller 54. With reference to FIG. 6B,controller 54 includes aprogram memory 174 that stores move sequence instructions forrobot arm mechanism 10R. Amicroprocessor 176 receives fromprogram memory 174 the move sequence instructions and interprets them to determine whether the first or second operational state is required or whether motion ofmotor 92 is required to positiontorso link 11. Asystem clock 178 controls the operation ofmicroprocessor 176. A look-up table (LUT) 180 stores corresponding values for ΘS (motor 52R) and ΘE (motor 50R) to accomplish the straight line motion of the first operational state and the angular displacements of ΘS and ΘE to accomplish the angular motion of the second operational state. Because the rotation oftorso link 11 is independent of the motions of the robot arm mechanisms mounted to it, the overall coordination of the angular displacement ofmotor 92 with the angular displacements ofmotors LUT 180. This results in higher speed and more accurate straight line motion because multiple axis servomechanism following errors and drive accuracy errors do not affect the straight line path ofhand 30R. -
Microprocessor 176 provides ΘS and ΘE position signals to aservomechanism amplifier 182, which delivers ΘS and ΘE command signals tomotors Microprocessor 176 also provides position signals toservomechanism amplifier 176 to deliver a command signal totorso motor 92.Servomechanism amplifier 182 receives fromglass scale encoders respective motors -
Microprocessor 176 also provides control signals to avacuum valve controller 184, which causes a vacuum valve (not shown) to provide from a vacuum source (not shown) an appropriate amount of vacuum pressure to outlet 36 in response to the need to hold a wafer on or release a wafer fromhand 30R. - FIGS. 7A and 7B show an alternative one-arm, multiple link
robot arm system 208 of similar design torobot arm system 8 with the significant exceptions thatrobot arm mechanism 10L is absent and the consequent excess length oftorso link 11 is removed, and anend effector structure 230 having twooppositely extending hands hand 30R. FIGS. 8A and 8B show the interior components, mechanical linkage, and vacuum pressure line paths ofrobot arm mechanism 208. Because of the similarity ofrobot arm systems - With reference to FIGS. 7A and 7B,
end effector structure 230 includes oppositely extendinghands wrist axis 32. Because they retrieve and deliver separate specimens,hand 30 1 has a vacuum land 126 1 with an outlet 36 1 andhand 30 2 has a vacuum land 126 2 with an outlet 36 2 that are connected to separate vacuum pressure conduits routed withinbase housing 12,torso link 11,upper arm 14, andforearm 22. - With reference to FIGS.8A-1 and 8A-2 (collectively, “FIG. 8A”) and FIG. 8B,
robot arm mechanism 210 includes two separate vacuum pressure conduits 124 1 and 124 2 each including multiple path segments, with conduit 124 1 extending betweenvacuum pressure inlet 38 1 and outlet 36 1 of vacuum land 126 1 and conduit 124 2 extending betweenvacuum pressure inlet 38 2 and outlet 36 2 of vacuum land 126 2. Path segments 128 1 and 128 2 of the respective conduits 124 1 and 124 2 are flexible hoses. Path segments 129 1 and 129 2 intorso link 11, path segments 130 1 and 130 2 inupper arm 14, path segments 132 1 and 132 2 inforearm 22, and path segments 134 1 and 134 2 in therespective hands - Outlets36 1 and 36 2 constitute holes in the respective vacuum lands 126 1 and 126 2. Each path segment of conduits 124 1 and 124 2 terminating or originating at
central axis 13,shoulder axis 16,elbow axis 24, andwrist axis 32 includes a rotary multiple fluid-passageway spool 300 that functions as two independent vacuum feedthrough conduits that permit continuous rotation about any one of these four axes. The placement ofspool 300 fitted in each of the three rotary joints ofrobot arm mechanism 210 is shown in FIGS. 8A and 8B. FIGS. 9A and 9B show the design detail of a prior art rotary multiple fluid-passageway spool 300. - With reference to FIGS. 8A, 8B,9A, and 9B,
spool 300 comprises a solid metalcylindrical body 302 having two spaced-apartgrooves outer side surface 308 about alongitudinal axis 310. Two separate vacuumpressure delivery channels body 302. (Comparison of FIGS. 8A and 8B with FIG. 9B reveals that vacuumpressure delivery channels body 302 by artistic license are drawn rotated by 90 degrees in FIG. 8A only to show clearly the vacuum pressure conduits.) Each ofchannels top surface 316 ofbody 302. More specifically, forchannel 312, apassageway segment 318 extends inwardly fromgroove 304 in a direction transverse tolongitudinal axis 310 and intersects with apassageway segment 320 at a right angle juncture.Passageway segment 320 extends upwardly toward and throughtop surface 316 in a direction parallel tolongitudinal axis 310. Similarly, forchannel 314, a passageway segment 322 extends inwardly fromgroove 306 in a direction transverse tolongitudinal axis 310 and intersects with apassageway segment 324 at a right angle juncture.Passageway segment 324 extends upwardly toward and throughtop surface 316 in a direction parallel tolongitudinal axis 310. - For purposes of convenience only, the following describes the operation of
spool 300 in the rotary joint definingwrist 32. Whenspool 300 is fitted intoforearm 22, fourseal rings 330 spaced above, between (two seals), and belowgrooves annular gas spaces side surface 308 ofspool 300 and aninterior surface 336 offorearm 22.Spacers 338 that extend about 330 degrees aroundspool 300 ingrooves respective gas spaces top surface 316 ofspool 300, thereby coupling the vacuum pressure supply to and fromspool 300. - FIG. 10 includes 16 frames showing various positions of
robot arm mechanisms robot arm system 8 in an exemplary operational sequence that moves a wafer A from a left-side wafer cassette 352L to a processing station 350 (such as a cooling platform) and back toleft wafer cassette 352L, moves a wafer B fromleft wafer cassette 352L toprocessing station 350, and retrieves a wafer C from a right-side wafer cassette 352R. - In this example, in the initial position shown in
frame 1,left shoulder axis 16L is radially positioned 40.0 centimeters (15.8 inches) from aneffective center 351 ofprocessing station 350 and aneffective center 353L ofcassette 352L.Right shoulder axis 16R is radially positioned 40.0 centimeters (15.8 inches) fromcenter 351 ofprocessing station 350 and aneffective center 353R ofcassette 352R.Axes axes cassettes Cassettes respective axes shoulders frame 14, radially positionsaxes effective centers - The following description tracks the angular displacement of torso link11 about
central axis 13,upper arm 14R aboutshoulder axis 16R, andupper arm 14L aboutshoulder axis 16L to demonstrate the continuous rotation capabilities oftorso link 11 and the mechanical links inrobot arm mechanisms -
Frame 1 shows the initial positions ofhands respective cassettes upper arm 14L (i.e., aline connecting axes reference line 354, and the central longitudinal axis ofupper arm 14R (i.e., aline connecting axes reference line 354.Reference line 354 is perpendicular to aline connecting centers -
Frame 2 showsupper arm 14L andforearm 22L cooperatively rotating in the first operational state ofmotor controller 54 to linearly extendhand 30L so as to reach and retrieve wafer A fromcassette 352L. To accomplish this incremental movement,upper arm 14L rotated 112.5 degrees in a counter-clockwise direction aboutshoulder axis 16L. -
Frame 3 showsupper arm 14L andforearm 22L cooperatively rotating in the first operational state ofmotor controller 54 to linearly retracthand 30L holding wafer A after the application of vacuum pressure atoutlet 36L to secure wafer A tohand 30L. To accomplish this incremental movement,upper arm 14L rotated 112.5 degrees in a counter-clockwise direction aboutshoulder axis 16L. -
Frame 4 showsupper arm 14L rotating 153.65 degrees in a counter-clockwise direction along acircular path segment 355 aboutshoulder axis 16L in the second operational state ofmotor controller 54 to keephand 30L retracted while holding wafer A,hold forearm 22L stationary, and positionhand 30L in line withprocessing station 350. Upon completion of this incremental movement,upper arm 14L exceeded a continuous 360 degree cycle of counter-clockwise rotation. -
Frame 5 showsupper arm 14L andforearm 22L cooperatively rotating in the first operational state ofcontroller 54 to linearly extendhand 30L so as to reach and place wafer A onprocessing station 350. To accomplish this incremental movement,upper arm 14L rotated 112.5 degrees in a clockwise direction aboutshoulder axis 16L. -
Frame 6 showsupper arm 14L andforearm 22L cooperatively rotating in the first operational state ofcontroller 54 to linearly retracthand 30L after the release of vacuum pressure atoutlet 36L to leave wafer A atprocessing station 350. To accomplish this incremental movement,upper arm 14L rotated 112.5 degrees in a counter-clockwise direction aboutshoulder axis 16L. -
Frame 7 showsupper arm 14L rotating 153.65 degrees in a clockwise direction along acircular path segment 356 aboutshoulder axis 16L in the second operational state ofcontroller 54 to keephand 30L retracted, holdforearm 22L stationary, and positionhand 30L in line withcassette 352L. -
Frame 8 showsupper arm 14L andforearm 22L cooperatively rotating in the first operational state ofcontroller 54 to linearly extendhand 30L to retrieve wafer B fromcassette 352L. To accomplish this incremental movement,upper arm 14L rotated 112.5 degrees in a clockwise direction aboutshoulder axis 16L. -
Frame 9 shows simultaneous rotation ofupper arms Upper arm 14L andforearm 22L is cooperatively rotate in the first operational state ofcontroller 54 to linearly retracthand 30L holding wafer B after the application of vacuum pressure atoutlet 36L to secure wafer B tohand 30L. To accomplish this incremental movement,upper arm 14L rotated 112.5 degrees in a counter-clockwise direction aboutshoulder axis 16L.Upper arm 14R rotates 206.36 degrees in a counter-clockwise direction along acircular path segment 358 aboutshoulder axis 16R in the second operational state ofcontroller 54 to keephand 30R retracted, holdforearm 22R stationary, and positionhand 30R in line withprocessing station 350. -
Frame 10 shows simultaneous rotation ofupper arms Upper arm 14L rotates 153.65 degrees in a counter-clockwise direction along acircular path segment 360 aboutshoulder axis 16L in the second operational state ofcontroller 54 to keephand 30L retracted while holding wafer B, holdforearm 22L stationary, and positionhand 30L in line withprocessing station 350.Upper arm 14R andforearm 22R cooperatively rotate in the first operational state ofmotor controller 54 to linearly extendhand 30R so as to reach and retrieve wafer A fromprocessing station 350. To accomplish this incremental movement,upper arm 14R rotated 112.5 degrees in a clockwise direction aboutshoulder axis 16R. -
Frame 11 showsupper arm 14R andforearm 22R cooperatively rotating in the first operational state ofcontroller 54 to linearly retracthand 30R holding wafer A after the application of vacuum pressure atoutlet 36R to secure wafer A tohand 30R. To accomplish this incremental movement,upper arm 14R rotated 112.5 degrees in a counter-clockwise direction aboutshoulder axis 16R. -
Frame 12 showsupper arm 14L andforearm 22L cooperatively rotating in the first operational state ofmotor controller 54 to linearly extendhand 30L so as to reach and place wafer B onprocessing station 350. To accomplish this incremental movement,upper arm 14L rotated 112.5 degrees in a clockwise direction aboutshoulder axis 16L. -
Frame 13 shows simultaneous rotation ofupper arms Upper arm 14L andforearm 22L cooperatively rotate in the first operational state ofcontroller 54 to linearly retracthand 30L after the release of vacuum pressure atoutlet 36L to leave wafer B atprocessing station 350. To accomplish this incremental movement,upper arm 14L rotated 112.5 degrees in a clockwise direction aboutshoulder axis 16L.Upper arm 14R rotates 26.35 degrees in a clockwise direction along acircular path segment 362 aboutshoulder axis 16R in the second operational state ofcontroller 54 to keephand 30R retracted while holding wafer A,hold forearm 22R stationary, and positionhand 30R in line with, but facing a direction opposite from,cassette 352R. -
Frame 14 shows torso link 11 rotating 180 degrees in a clockwise (or counter-clockwise) direction aboutcentral axis 13 to positionhand 30Ladjacent cassette 352R andhand 30R in line withcassette 352L. -
Frame 15 shows simultaneous rotation ofupper arms Upper arm 14R andforearm 22R cooperatively rotate in the first operational state ofmotor controller 54 to linearly extendhand 30R so as to reach and place wafer A incassette 352L. To accomplish this incremental movement,upper arm 14R rotated 112.5 degrees in a clockwise direction aboutshoulder axis 16R.Upper arm 14L rotates 26.35 degrees in a counter-clockwise direction along acircular path segment 364 aboutshoulder axis 16L in the second operational state ofcontroller 54 to keephand 30L retracted, holdforearm 22L stationary, and positionhand 30L in line withcassette 352R. -
Frame 16 shows simultaneous rotation ofupper arms Upper arm 14R andforearm 22R cooperatively rotate in the first operational state ofcontroller 54 to linearly retracthand 30R after the release of vacuum pressure atoutlet 36R to leave wafer A incassette 352L. To accomplish this incremental movement,upper arm 14R rotated 112.5 degrees in a counter-clockwise direction aboutshoulder axis 16R.Upper arm 14L andforearm 22L cooperatively rotate in the first operational state ofmotor controller 54 to linearly extendhand 30L so as to reach and retrieve wafer C fromcassette 352R. To accomplish this incremental movement,upper arm 14L rotated 112.5 degrees in a counter-clockwise direction aboutshoulder axis 16L. - In this example,
upper arm 14L underwent bi-directional rotational movement and completed a continuous 378.65 degree cycle in a counter-clockwise direction aboutshoulder axis 16L before any clockwise counter-rotation.Torso link 11 underwent rotational movement and completed a continuous 180 degree cycle aboutcentral axis 13 without any counter-rotation. This example demonstrates an ability to make quick exchanges between stations in a layout with a reduced footprint. As a numerical example, because of its ability to collapse its arm links, a 21-inch (53 centimeters) diameter robot can manipulate two 12-inch (30.5 centimeters) wafers.Robot arm system 8 is also capable of movinghands - FIG. 11 includes 19 frames showing various positions of
robot arm mechanism 210 ofrobot arm system 208 in an exemplary operational sequence that moves a wafer A fromwafer cassette 352L toprocessing station 350 and towafer cassette 352R, and moves a wafer B fromwafer cassette 352L toprocessing station 350. - In this example, in the initial position shown in
frame 1,shoulder axis 16 is radially positioned 40.0 centimeters (15.8 inches) from aneffective center 351 ofprocessing station 350 and aneffective center 353L ofcassette 352L. As shown inframe 18,shoulder axis 16 is radially positioned 40.0 centimeters (15.8 inches) fromcenter 351 ofprocessing station 350 and aneffective center 353R ofcassette 352R. The position ofaxis 16 inframe 1, the position ofaxis 16 inframe 18, and centers 353L and 353R define four corners of a rectangle with axes 16 (frame 1) and 16 (frame 18) being spaced apart by a distance of 35.5 centimeters (14.0 inches) andcassettes Cassettes shoulder 14, as shown inframe 17, radially positions axes 16 (frame 1) and 16 (frame 18) a distance of 40.0 centimeters (15.8 inches) fromrespective centers - The following description tracks the angular displacement of torso link11 about
central axis 13,upper arm 14 aboutshoulder axis 16, and hands 30 1 and 30 2 ofend effector 230 aboutwrist axis 32 to demonstrate the continuous rotation capabilities oftorso link 11 and the mechanical links inrobot arm mechanism 210. -
Frame 1 shows the initial positions ofhands cassette 352L, withhand 30 1 facing in the direction of and nearer thanhand 30 2 tocassette 352L. In these initial positions, the central longitudinal axis of upper arm 14 (i.e., aline connecting axes 16 and 24) is angularly displaced 90.00 degrees in a counter-clockwise direction from areference line 354.Reference line 354 is perpendicular to aline connecting centers -
Frame 2 showsupper arm 14 andforearm 22 cooperatively rotating in the first operational state ofmotor controller 54 to linearly extendhand 30 1 so as to reach and retrieve wafer A fromcassette 352L. To accomplish this incremental movement,upper arm 14 rotated 90.00 degrees in a counter-clockwise direction aboutshoulder axis 16. -
Frame 3 showsupper arm 14 andforearm 22 cooperatively rotating in the first operational state ofmotor controller 54 to linearly retracthand 30 1 holding wafer A after the application of vacuum pressure at outlet 36 1 to secure wafer A tohand 30 1. To accomplish this incremental movement,upper arm 14 rotated 90.00 degrees in a counter-clockwise direction aboutshoulder axis 16. -
Frame 4 showsupper arm 14 rotating 153.65 degrees in a counter-clockwise direction along acircular path segment 366 aboutshoulder axis 16 in the second operational state ofmotor controller 54 to keephand 30 1 retracted while holding wafer A, holdforearm 22 stationary, and positionhand 30 1 in line withprocessing station 350. -
Frame 5 showsupper arm 14 andforearm 22 cooperatively rotating in the first operational state ofcontroller 54 to linearly extendhand 30 1 so as to reach and place wafer A onprocessing station 350. To accomplish this incremental movement,upper arm 14 rotated 90.00 degrees in a clockwise direction aboutshoulder axis 16. -
Frame 6 showsupper arm 14 andforearm 22 cooperatively rotating in the first operational state ofcontroller 54 to linearly retracthand 30 1 after the release of vacuum pressure at outlet 36 1 to leave wafer A atprocessing station 350. To accomplish this incremental movement,upper arm 14 rotated 90.00 degrees in a clockwise direction aboutshoulder axis 16. -
Frame 7 showsupper arm 14 rotating 26.35 degrees in a counter-clockwise direction along acircular path segment 368 aboutshoulder axis 16 in the second operational state ofcontroller 54 to keephand 30 2 retracted, holdforearm 22 stationary, and positionhand 30 2 in line withcassette 352L. -
Frame 8 showsupper arm 14 andforearm 22 cooperatively rotating in the first operational state ofcontroller 54 to linearly extendhand 30 2 to retrieve wafer B fromcassette 352L. To accomplish this incremental movement,upper arm 14 rotated 90.00 degrees in a clockwise direction aboutshoulder axis 16. -
Frame 9 showsupper arm 14 andforearm 22 cooperatively rotating in the first operational state ofcontroller 54 to linearly retracthand 30 2 holding wafer B after the application of vacuum pressure at outlet 36 2 to secure wafer B tohand 30 2. To accomplish this incremental movement,upper arm 14 rotated 90.00 degrees in a clockwise direction aboutshoulder axis 16. -
Frame 10 showsupper arm 14 rotating 26.35 degrees in a clockwise direction along acircular path segment 370 aboutshoulder axis 16 in the second operational state ofcontroller 54 to keephand 30 2 retracted while holding wafer B, holdforearm 22 stationary, and positionhand 30 1 in line with and nearer thanhand 30 2 toprocessing station 350. -
Frame 11 showsupper arm 14 andforearm 22 cooperatively rotating in the first operational state ofcontroller 54 to linearly extendhand 30 1 so as to reach and retrieve wafer A fromprocessing station 350. To accomplish this incremental movement,upper arm 14 rotated 90.00 degrees in a clockwise direction aboutshoulder axis 16. -
Frame 12 showsupper arm 14 andforearm 22 cooperatively rotating in the first operational state ofmotor controller 54 to linearly retracthand 30 1 holding wafer A after the application of vacuum pressure at outlet 36 1 to secure wafer A tohand 30 1. To accomplish this incremental movement,upper arm 14 rotated 90.00 degrees in a clockwise direction aboutshoulder axis 16. -
Frame 13 showsupper arm 14 rotating 180.00 degrees in a clockwise (or counter-clockwise) direction along acircular path segment 372 aboutshoulder axis 16 in the second operational state ofmotor controller 54 to keephand 30 1 retracted while holding wafer A, holdforearm 22 stationary, and positionhand 30 2 in line withprocessing station 350. -
Frame 14 showsupper arm 14 andforearm 22 cooperatively rotating in the first operational state ofcontroller 54 to linearly extendhand 30 2 so as to reach and place wafer B onprocessing station 350. To accomplish this incremental movement,upper arm 14 rotated 90.00 degrees in a clockwise direction aboutshoulder axis 16. -
Frame 15 showsupper arm 14 andforearm 22 cooperatively rotating in the first operational state ofcontroller 54 to linearly retracthand 30 2 after the release of vacuum pressure at outlet 36 2 to leave wafer B atprocessing station 350. To accomplish this incremental movement,upper arm 14 rotated 90.00 degrees in a clockwise direction aboutshoulder axis 16. Upon completion of the incremental movements shown in frames 8-15,upper arm 14 underwent a continuous 746.35 degree cycle of clockwise rotation without any counter-rotation. -
Frame 16 showsupper arm 14 rotating 45.00 degrees in a counter-clockwise direction along acircular path 374 aboutshoulder axis 16 in the second operational state ofcontroller 54 to keephand 30 1 retracted while holding wafer A and holdforearm 22 stationary. -
Frame 17 shows torso link 11 rotating 180 degrees in a clockwise (or counter-clockwise) direction aboutcentral axis 13 to positionhand 30 2adjacent cassette 352R andhand 30 1 adjacent, but facing a direction opposite from,cassette 352R. -
Frame 18 showsupper arm 14 rotating 161.35 degrees in a counter-clockwise direction along acircular path 376 aboutshoulder axis 16 in the second operational state ofcontroller 54 to keephand 30 1 retracted, holdforearm 22 stationary, and positionhand 30 1 in line withcassette 352R. -
Frame 19 showsupper arm 14 andforearm 22 cooperatively rotating in the first operational state ofmotor controller 54 to linearly extendhand 30 1 so as to reach and place wafer A incassette 352R. To accomplish this incremental movement,upper arm 14 rotated 90.00 degrees in a clockwise direction aboutshoulder axis 16. - In this example,
upper arm 14 underwent bi-directional rotational movement and completed a continuous 746.35 degree cycle in a clockwise direction aboutshoulder axis 16 without any counter-clockwise rotation.Torso link 11 underwent rotational movement and completed a continuous 180 degree cycle aboutcentral axis 11 without any counter-rotation. -
Robot arm systems Robot arm 208 is more cost effective because it requires fewer parts to rotate the robot arm links around four axes, as compared with the six axes ofrobot arm system 8.Robot arm system 208 is faster and more compact for transporting large specimens becauserobot arm mechanism 210 requires less working space to sweep the specimen about the central axis. As a consequence,robot arm system 208 is more amenable to complex path planning. On the other hand,robot arm system 8 is easier to “teach” to perform the necessary hand movement to accomplish the exchange functions desired. -
Robot arm systems - The above example presented with reference to FIGS. 6A and 6B shows side-by-side coplanar or parallel arrangement of the openings of wafer holders or
carriers shoulder axis 16R. In a front-opening unified pod (FOUP)-based system, wafer carriers positioned side by side are often misaligned from their nominal coplanar opening arrangement relative to the robot arm mechanism. This condition typically results from misalignment of support structures on which support structure mounting elements such as kinematic coupling pin mountings are placed to receive the mounting features positioned on the bottom surfaces of the wafer carriers. Such misalignment could cause a robot arm mechanism to direct the hand or the wafer it carries to strike the wafer carrier instead of extend into its opening to, respectively, remove or replace a wafer. Misalignment can therefore result in contaminant particle creation stemming from impact of the hand or wafer against the wafer carrier. - The mathematical expressions derived with reference to FIG. 6A for the path of travel of
hand 30, together with the angular positions ofmotors glass scale encoders 106R and 108R, provide position output information ofrobot arm mechanism 10R that can be used to compensate for this misalignment. (This assumes that the angular position ofmotor 92, which is tracked byglass scale encoder 118, remains fixed during movement ofrobot arm mechanism 10R.) The position output information can be used to provide offset data for either mechanical alignment of the system components such as, for example, wafer carriers, or control the trajectory ofrobot arm mechanism 10R to compensate for support structure alignment offset. A misalignment correction technique carried out in accordance with the present invention entails the use of a component emulating fixture having mounting features that are matable to the support structure mounting elements. The emulating fixture preferably includes two upwardly extending, cylindrical locating features that are positioned to engage a fork-shaped end effector in two different extension positions. For manual correction, robot arm mechanism position output information provides the angular offset between the actual and nominal radial distances between the shoulder axis and the two locating features, one of which positioned at the effective center of a wafer properly stored in the wafer carrier. Position coordinates for proper alignment by manual repositioning of any misaligned wafer carrier can then be derived. For automatic correction, robot arm mechanism position output information is used to derive a vector trajectory that causes the end effector to properly access the wafers stored in a misaligned wafer carrier. - FIGS.12-19, together with their associated descriptions, present a self-teaching method with reference to a three-link
robot arm mechanism 10 for a preferred use with FOUP-based system wafer carriers.Robot arm mechanism 10 is of the same design as that of each ofrobot arm mechanisms - FIG. 12 shows an
upper surface 400 of asupport structure 402 adapted to receive a front-opening wafer carrier 404 (FIG. 13A) for 300 mm diameter semiconductor wafers. Three kinematic coupling pins 406 are positioned onupper surface 400 in locations required under SEMI E47.1 (Mar. 5, 1998). Apivotable latch 408 includes a clampingfinger 410 configured to mate with a carrier front retaining or clamping feature 412 (FIGS. 13B and 13C). - FIG. 13A shows
wafer carrier 404 with its door (not shown) removed to reveal in the interior of wafer carrier 404 awafer cassette 414 with itsslots 416 spaced apart to accommodate stacked 300 mm diameter semiconductor wafers. FIGS. 13B and 13C show, respectively, abottom surface 430 and carrierfront retaining feature 412 onbottom surface 430 ofwafer carrier 404. Apreferred wafer carrier 404 is a model F300 wafer carrier manufactured by Fluoroware, Inc., Chaska, Minn. - With reference to FIG. 13B,
wafer carrier 404 has on itsbottom surface 430 fivecarrier sensing pads 432, two advancingcarrier sensing pads 434, a carrier capacity (number of wafers)sensing pad 436, acarrier information pad 438, and one each of front end of line (FEOL) and back end of line (BEOL)information pads 440 required under SEMI E47.1 (Mar. 5, 1998). Three oblong, inwardly sloped depressions inbottom surface 430 form kinematic pin receiving features 444 that mate with kinematic coupling pins 406 (FIG. 12) fixed in corresponding locations onsupport structure 402 whenwafer carrier 404 is properly installed. With reference to FIGS. 13B and 13C, adepression 446 partly covered by aprojection 448 having abeveled surface 450 forms front retaining and clampingfeature 412. Beveledsurface 450 provides a ramp along which a wheel or roller can roll up to clamp againstprojection 448. - FIGS. 14A and 14B are respective bottom and top plan views of a
component emulating fixture 460. With reference to FIG. 14A,fixture 460 is dimensioned to define a footprint that allows it to fit in the space occupied bywafer carrier 404 and includes in itsbottom surface 462 three oblong, inwardly slopeddepressions 464 and a carrierfront retaining feature 466, all of which are of the same types and are positioned in the same corresponding locations as kinematic pin receiving features 444 and retainingfeature 412 inbottom surface 430 ofwafer carrier 404. - With reference to FIG. 14B,
fixture 460 has extending upwardly from itsupper surface 470 first and second locating features 472 and 474 of preferably cylindrical shape with different heights. Locatingfeature 472 is positioned so that itslongitudinal axis 476 is preferably set at the location of theeffective center 478 of awafer 480 stored inwafer cassette 414, and locatingfeature 474 is positioned so that itslongitudinal axis 482 is preferably set forward of the location of the open front ofwafer carrier 404. Locatingfeature 472 is taller than locatingfeature 474, and the free ends of locatingfeatures top caps features Fixture 460 fits in the work space dedicated for occupancy bywafer carrier 404 and is matable, therefore, to the mounting elements, including kinematic coupling pins 406 and clampingfeature 412, provided inupper surface 400 ofsupport structure 402. - FIGS. 15A and 15B are respective diagrammatic cross-sectional and rear end elevation views of
fixture 460. FIG. 15A shows the detail of the shape of and features provided inbottom surface 462 offixture 460, and FIG. 15B shows the fit of akinematic coupling 406 within thedepression 464 located nearest the rear ofbottom surface 462 offixture 460. FIGS. 15A and 15B show that the height of locatingfeature 474, defined with reference to the top surface oftop cap 486, is set to the position of the bottom wafer stored inwafer cassette 414. Locatingfeature 472 is taller than locatingfeature 474 to provide forrobot arm mechanism 10 access to the moredistant locating feature 472. - FIGS. 16A, 16B, and16C are, respectively, a bottom plan view of
fixture 460 superimposed on an outline ofwafer carrier 404, a side elevation view offixture 460 similar to that of FIG. 15A offixture 460, and rear end view offixture 460 inverted relative to that of FIG. 15B offixture 460. FIG. 16A shows the coincidence of the placement ofeffective center 478 of awafer 480 andlongitudinal axis 476 of locatingfeature 472, as well as the coincidence of the two respective kinematic pin receiving features 444 ofwafer carrier 404 anddepressions 464 offixture 460. - FIG. 17 shows
wafer carriers wafer carriers wafer carrier 404 1 offset such that the front openings ofwafer carriers - With reference to FIGS. 17 and 18, three link
robot arm mechanism 10 is positioned to extend itsend effector 30 to reach each of first and second locating features 472 and 474 offixtures wafer carriers Direction arrows 500 show the straight line move required to withdrawwafer 480 from either ofwafer carriers Wafer 480 is shown in two positions along the straight line trajectory witheffective center 478 ofwafer 480 coincident with respectivelongitudinal axes features -
Robot arm mechanism 10 is positioned away from and between the positions of the front openings ofwafer carriers effective centers 478 of thewafers 480 stored in them. Abroken line circle 502 represents the perimeter of the distal end ofend effector 30 when it is fully extended and angularly displaced 360 degrees about itsshoulder axis 16.Circle 502 does not, therefore, intersect theeffective centers 478 ofwafers 480 stored incassettes - The position coordinates of the desired orientations of
wafer carriers arm end effector 30 to contact each of locatingfeatures end effector 30 against each locatingfeature features wafer carrier 404 1 to compute any offset or deviation from a nominal alignment relative to shoulderaxis 16 ofrobot arm mechanism 10. Equippingrobot arm mechanism 10 with Z-axis displacement control and measurement along the length ofshoulder axis 16 would provide an ability to placeend effector 30 againstlower surfaces top caps fixtures - FIG. 19 is a diagram showing radii R0 and R1 representing distances between
shoulder axis 16 andlongitudinal axes end effector 30 to locatingfeatures wafer carrier 404 1. The following mathematical expressions demonstrate the derivation from known robot arm mechanism parameters the required position coordinates forwafer carrier 404 1 to effect a straight line move for withdrawingwafer 480 as depicted in FIGS. 17 and 18. With reference to FIG. 19, the positions of locatingfeatures shoulder axis 16 as represented by position coordinates (0, 0). The robot arm extensions R0 and R1 are expressed as follows: - R 0 2 =X 2 +Y 0 2 =X 2+(Y 1 +D)2 =X 2 +Y 1 2+2Y 1 D+D 2 (4)
- R 1 2 =X 2 +Y 1 2 , where (5)
- D is the distance between
longitudinal axes 476 1 and 482 1 (i.e., (Y0−Y1)). Subtracting R1 2 from R0 2 gives - R 0 2 −R 1 2=2Y 1 D+D 2. (6)
-
- Solving equation (5) for X2 gives
- X 2 =R 1 2 −Y 1 2, (8)
-
- Applying the law of cosines to solve for D as a function of α, which is the included angle between R0 and R1, gives
- D 2 =R 0 2 +R 1 2−2R 0 R 1 cos αa. (10)
-
-
- respectively; and the angle α=θREF0−θREF1.
- The foregoing expressions dictate what the position coordinates should be for a properly aligned system. The motor angles available from glass scale encoders can give the appropriate information for
controller 54 to offset the necessary parameters to give the motion of robot arm mechanism or provide a read out to the operator indicative of how to repositionwafer carrier 404 1 to get the desired position coordinates. The “automatic training” of the robot arm mechanism path option is greatly preferred because it affords a software adjustment solution as an alternative to a difficult, time-consuming mechanical alignment solution. The mechanical alignment solution is necessary for robot arm mechanisms that are incapable of moving wafers or other specimens along nonradial paths. - Skilled persons will appreciate that the equations of motion set forth above pertain to a three link robot arm mechanism with a one-to-one link ratio. The present invention can, therefore, be implemented with robot arm mechanisms having different numbers of links and/or different link ratios. For example, the invention can be implemented with a telescopic robot arm mechanism.
- It will be obvious to those having skill in the art that many changes may be made to the details of the above-described embodiments of this invention without departing from the underlying principles thereof. As a first example, the invention can be used with a different specimen holder such as a wafer prealigner, on top of which a wafer is placed. As a second example, proper registration of the component emulating fixture need not be achieved by mounting features matable to support structure mounting elements but could be accomplished by other techniques, such as optical (e.g., a video camera) or quadrature signal alignment detection techniques. The scope of the present invention should, therefore, be determined only by the following claims.
Claims (13)
Priority Applications (1)
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US09/841,539 US6366830B2 (en) | 1995-07-10 | 2001-04-24 | Self-teaching robot arm position method to compensate for support structure component alignment offset |
Applications Claiming Priority (4)
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US08/500,489 US5765444A (en) | 1995-07-10 | 1995-07-10 | Dual end effector, multiple link robot arm system with corner reacharound and extended reach capabilities |
US9838998A | 1998-06-16 | 1998-06-16 | |
US09/224,134 US6360144B1 (en) | 1995-07-10 | 1998-12-31 | Self-teaching robot arm position method |
US09/841,539 US6366830B2 (en) | 1995-07-10 | 2001-04-24 | Self-teaching robot arm position method to compensate for support structure component alignment offset |
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US09/224,134 Division US6360144B1 (en) | 1995-07-10 | 1998-12-31 | Self-teaching robot arm position method |
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US20010020199A1 true US20010020199A1 (en) | 2001-09-06 |
US6366830B2 US6366830B2 (en) | 2002-04-02 |
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US09/841,539 Expired - Lifetime US6366830B2 (en) | 1995-07-10 | 2001-04-24 | Self-teaching robot arm position method to compensate for support structure component alignment offset |
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