Patent US1491103 - ASSISTOB TO EBATO

Patents

Inventors: WHAXAM B. HOKE, WHAXAM B. HOKE
Current U.S. Classification: 451/46; 451/268

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Citing Patent	Filing date	Issue date	Original Assignee	Title
US5398459	24 Nov 1993	21 Mar 1995	Kabushiki Kaisha Toshiba Ebara Corporation	Method and apparatus for polishing a workpiece
US5941759	9 Dec 1997	24 Aug 1999	Shin-Etsu Handotai Co., Ltd.	Lapping method using upper and lower lapping turntables