EP2137796A4 - Extendable electrode for gas discharge laser - Google Patents
Extendable electrode for gas discharge laserInfo
- Publication number
- EP2137796A4 EP2137796A4 EP08742239.0A EP08742239A EP2137796A4 EP 2137796 A4 EP2137796 A4 EP 2137796A4 EP 08742239 A EP08742239 A EP 08742239A EP 2137796 A4 EP2137796 A4 EP 2137796A4
- Authority
- EP
- European Patent Office
- Prior art keywords
- gas discharge
- discharge laser
- extendable electrode
- extendable
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/038—Electrodes, e.g. special shape, configuration or composition
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
- H01S3/09705—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser with particular means for stabilising the discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
- H01S3/0971—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser transversely excited
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/038—Electrodes, e.g. special shape, configuration or composition
- H01S3/0381—Anodes or particular adaptations thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
- H01S3/22—Gases
- H01S3/223—Gases the active gas being polyatomic, i.e. containing two or more atoms
- H01S3/225—Gases the active gas being polyatomic, i.e. containing two or more atoms comprising an excimer or exciplex
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/23—Arrangements of two or more lasers not provided for in groups H01S3/02 - H01S3/22, e.g. tandem arrangements of separate active media
- H01S3/2366—Arrangements of two or more lasers not provided for in groups H01S3/02 - H01S3/22, e.g. tandem arrangements of separate active media comprising a gas as the active medium
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/787,463 US7856044B2 (en) | 1999-05-10 | 2007-04-16 | Extendable electrode for gas discharge laser |
PCT/US2008/003890 WO2008130474A1 (en) | 2007-04-16 | 2008-03-25 | Extendable electrode for gas discharge laser |
Publications (3)
Publication Number | Publication Date |
---|---|
EP2137796A1 EP2137796A1 (en) | 2009-12-30 |
EP2137796A4 true EP2137796A4 (en) | 2014-01-08 |
EP2137796B1 EP2137796B1 (en) | 2019-01-16 |
Family
ID=38648278
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP08742239.0A Active EP2137796B1 (en) | 2007-04-16 | 2008-03-25 | Extendable electrode for gas discharge laser |
Country Status (6)
Country | Link |
---|---|
US (3) | US7856044B2 (en) |
EP (1) | EP2137796B1 (en) |
JP (1) | JP5680403B2 (en) |
KR (1) | KR101430516B1 (en) |
TW (1) | TWI395385B (en) |
WO (1) | WO2008130474A1 (en) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7856044B2 (en) * | 1999-05-10 | 2010-12-21 | Cymer, Inc. | Extendable electrode for gas discharge laser |
TWI455239B (en) * | 2008-03-14 | 2014-10-01 | Lam Res Corp | Cam lock electrode clamp |
US8014432B2 (en) * | 2009-03-27 | 2011-09-06 | Cymer, Inc. | Regenerative ring resonator |
USRE45957E1 (en) * | 2009-03-27 | 2016-03-29 | Cymer, Llc | Regenerative ring resonator |
CN102761047B (en) * | 2012-07-30 | 2013-09-25 | 中国科学院光电研究院 | Electrode mechanism of discharge cavity of gas laser |
WO2014046186A1 (en) * | 2012-09-21 | 2014-03-27 | ギガフォトン株式会社 | Laser device |
JP6383729B2 (en) * | 2013-10-02 | 2018-08-29 | ギガフォトン株式会社 | Laser equipment |
TWI490254B (en) | 2013-12-31 | 2015-07-01 | Ind Tech Res Inst | Inorganic passivation coating material, method for forming the same, and inorganic passivation protective film produced therefrom |
JP6364476B2 (en) * | 2014-03-18 | 2018-07-25 | ギガフォトン株式会社 | Gas laser apparatus and control method thereof |
WO2016143105A1 (en) * | 2015-03-11 | 2016-09-15 | ギガフォトン株式会社 | Excimer laser chamber device |
US10074953B2 (en) * | 2015-09-30 | 2018-09-11 | Cymer, Llc | Erosion resistant electrodes for use in generating gas discharge laser |
JP7095084B2 (en) * | 2017-10-24 | 2022-07-04 | サイマー リミテッド ライアビリティ カンパニー | Methods and equipment to extend the life of electrodes in the laser chamber |
US11349273B2 (en) * | 2018-01-17 | 2022-05-31 | Cymer, Llc | Apparatus for tuning discharge performance in a laser chamber |
CN109411996A (en) * | 2018-11-29 | 2019-03-01 | 北京科益虹源光电技术有限公司 | A kind of excimer laser electrode structure and excimer laser |
JP7381728B2 (en) * | 2019-10-11 | 2023-11-15 | サイマー リミテッド ライアビリティ カンパニー | Conductive material for discharge laser |
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- 2008-03-25 EP EP08742239.0A patent/EP2137796B1/en active Active
- 2008-03-25 WO PCT/US2008/003890 patent/WO2008130474A1/en active Application Filing
- 2008-03-25 KR KR1020097022448A patent/KR101430516B1/en active IP Right Grant
- 2008-03-25 JP JP2010504036A patent/JP5680403B2/en active Active
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2010
- 2010-11-12 US US12/945,719 patent/US8446928B2/en not_active Expired - Lifetime
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2012
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Also Published As
Publication number | Publication date |
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TW200845521A (en) | 2008-11-16 |
US20120219032A1 (en) | 2012-08-30 |
EP2137796A1 (en) | 2009-12-30 |
TWI395385B (en) | 2013-05-01 |
US8526481B2 (en) | 2013-09-03 |
US7856044B2 (en) | 2010-12-21 |
US20110058580A1 (en) | 2011-03-10 |
KR101430516B1 (en) | 2014-08-18 |
WO2008130474A1 (en) | 2008-10-30 |
KR20090129492A (en) | 2009-12-16 |
US20070253459A1 (en) | 2007-11-01 |
JP5680403B2 (en) | 2015-03-04 |
JP2010525571A (en) | 2010-07-22 |
US8446928B2 (en) | 2013-05-21 |
EP2137796B1 (en) | 2019-01-16 |
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