EP2113085A4 - Arc recovery without over-voltage plasma chamber power supplies using a shunt switch - Google Patents

Arc recovery without over-voltage plasma chamber power supplies using a shunt switch

Info

Publication number: EP2113085A4
Authority: EP; European Patent Office
Prior art keywords: over; power supplies; plasma chamber; shunt switch; chamber power
Prior art date: 2007-02-22
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

EP08729944.2A

Other languages

German (de)

French (fr)

Other versions

EP2113085B1 (en

EP2113085A1 (en

EP2113085B8 (en

Inventor

Milan Ilic

Vladislav V Shilo

Robert Huff

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Aes Global Holdings Pte Ltd

Original Assignee

Advanced Energy Industries Inc

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2007-02-22

Filing date

2008-02-15

Publication date

2015-05-06

2008-02-15 Application filed by Advanced Energy Industries Inc filed Critical Advanced Energy Industries Inc

2009-11-04 Publication of EP2113085A1 publication Critical patent/EP2113085A1/en

2015-05-06 Publication of EP2113085A4 publication Critical patent/EP2113085A4/en

2019-06-12 Publication of EP2113085B1 publication Critical patent/EP2113085B1/en

2019-07-24 Application granted granted Critical

2019-07-24 Publication of EP2113085B8 publication Critical patent/EP2113085B8/en

Status Active legal-status Critical Current

2028-02-15 Anticipated expiration legal-status Critical

Links

238000011084 recovery Methods 0.000 title 1

Classifications

- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02H—EMERGENCY PROTECTIVE CIRCUIT ARRANGEMENTS
- H02H3/00—Emergency protective circuit arrangements for automatic disconnection directly responsive to an undesired change from normal electric working condition with or without subsequent reconnection ; integrated protection
- H02H3/08—Emergency protective circuit arrangements for automatic disconnection directly responsive to an undesired change from normal electric working condition with or without subsequent reconnection ; integrated protection responsive to excess current
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/12—Testing dielectric strength or breakdown voltage ; Testing or monitoring effectiveness or level of insulation, e.g. of a cable or of an apparatus, for example using partial discharge measurements; Electrostatic testing
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/32174—Circuits specially adapted for controlling the RF discharge
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32623—Mechanical discharge control means
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26

EP08729944.2A 2007-02-22 2008-02-15 Arc recovery without over-voltage plasma chamber power supplies using a shunt switch Active EP2113085B8 (en)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
US11/677,786 US8217299B2 (en)	2007-02-22	2007-02-22	Arc recovery without over-voltage for plasma chamber power supplies using a shunt switch
PCT/US2008/054056 WO2008103600A1 (en)	2007-02-22	2008-02-15	Arc recovery without over-voltage plasma chamber power supplies using a shunt switch

Publications (4)

Publication Number	Publication Date
EP2113085A1 EP2113085A1 (en)	2009-11-04
EP2113085A4 true EP2113085A4 (en)	2015-05-06
EP2113085B1 EP2113085B1 (en)	2019-06-12
EP2113085B8 EP2113085B8 (en)	2019-07-24

Family

ID=39710440

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
EP08729944.2A Active EP2113085B8 (en)	2007-02-22	2008-02-15	Arc recovery without over-voltage plasma chamber power supplies using a shunt switch

Country Status (7)

Country	Link
US (1)	US8217299B2 (en)
EP (1)	EP2113085B8 (en)
JP (1)	JP2010519708A (en)
KR (1)	KR101274514B1 (en)
CN (1)	CN101641604A (en)
TW (1)	TW200845834A (en)
WO (1)	WO2008103600A1 (en)

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2007
- 2007-02-22 US US11/677,786 patent/US8217299B2/en active Active
2008
- 2008-02-15 CN CN200880009384A patent/CN101641604A/en active Pending
- 2008-02-15 KR KR1020097018460A patent/KR101274514B1/en active IP Right Grant
- 2008-02-15 EP EP08729944.2A patent/EP2113085B8/en active Active
- 2008-02-15 WO PCT/US2008/054056 patent/WO2008103600A1/en active Application Filing
- 2008-02-15 TW TW097105285A patent/TW200845834A/en unknown
- 2008-02-15 JP JP2009550968A patent/JP2010519708A/en not_active Withdrawn

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
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Also Published As

Publication number	Publication date
EP2113085B1 (en)	2019-06-12
WO2008103600A1 (en)	2008-08-28
EP2113085A1 (en)	2009-11-04
CN101641604A (en)	2010-02-03
EP2113085B8 (en)	2019-07-24
KR20090121301A (en)	2009-11-25
US8217299B2 (en)	2012-07-10
KR101274514B1 (en)	2013-06-13
US20080203070A1 (en)	2008-08-28
TW200845834A (en)	2008-11-16
JP2010519708A (en)	2010-06-03

Legal Events

Date	Code	Title	Description
2009-10-02	PUAI	Public reference made under article 153(3) epc to a published international application that has entered the european phase	Free format text: ORIGINAL CODE: 0009012
2009-11-04	17P	Request for examination filed	Effective date: 20090821
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