EP2043864A4 - Mems bubble generator - Google Patents

Mems bubble generator

Info

Publication number
EP2043864A4
EP2043864A4 EP07719093A EP07719093A EP2043864A4 EP 2043864 A4 EP2043864 A4 EP 2043864A4 EP 07719093 A EP07719093 A EP 07719093A EP 07719093 A EP07719093 A EP 07719093A EP 2043864 A4 EP2043864 A4 EP 2043864A4
Authority
EP
European Patent Office
Prior art keywords
bubble generator
mems bubble
mems
generator
bubble
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP07719093A
Other languages
German (de)
French (fr)
Other versions
EP2043864A1 (en
EP2043864B1 (en
Inventor
Kia Silverbrook
Roger Mervyn Lloyd Foote
Angus John North
Jennifer Mia Fishburn
Paul David Lunsmann
Alexandra Artemis Papadakis
S Lakshmi C
Frederik Jacobus Crous
Matthew Stewart Walker
Samuel George Mallinson
Paul Justin Reichl
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Memjet Technology Ltd
Original Assignee
Silverbrook Research Pty Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US11/482,977 external-priority patent/US7784915B2/en
Priority claimed from US11/482,953 external-priority patent/US7654645B2/en
Application filed by Silverbrook Research Pty Ltd filed Critical Silverbrook Research Pty Ltd
Publication of EP2043864A1 publication Critical patent/EP2043864A1/en
Publication of EP2043864A4 publication Critical patent/EP2043864A4/en
Application granted granted Critical
Publication of EP2043864B1 publication Critical patent/EP2043864B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1601Production of bubble jet print heads
    • B41J2/1603Production of bubble jet print heads of the front shooter type
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2/14016Structure of bubble jet print heads
    • B41J2/14088Structure of heating means
    • B41J2/14112Resistive element
    • B41J2/1412Shape
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1626Manufacturing processes etching
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1631Manufacturing processes photolithography
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/164Manufacturing processes thin film formation
    • B41J2/1642Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/164Manufacturing processes thin film formation
    • B41J2/1646Manufacturing processes thin film formation thin film formation by sputtering
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2002/1437Back shooter
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2002/14403Structure thereof only for on-demand ink jet heads including a filter
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2002/14475Structure thereof only for on-demand ink jet heads characterised by nozzle shapes or number of orifices per chamber
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2002/14491Electrical connection
EP07719093.2A 2006-07-10 2007-06-20 Mems bubble generator Active EP2043864B1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11/482,977 US7784915B2 (en) 2005-04-04 2006-07-10 MEMS device with nanocrystalline heater
US11/482,953 US7654645B2 (en) 2005-04-04 2006-07-10 MEMS bubble generator
PCT/AU2007/000854 WO2008006140A1 (en) 2006-07-10 2007-06-20 Mems bubble generator

Publications (3)

Publication Number Publication Date
EP2043864A1 EP2043864A1 (en) 2009-04-08
EP2043864A4 true EP2043864A4 (en) 2012-06-06
EP2043864B1 EP2043864B1 (en) 2013-09-25

Family

ID=38922831

Family Applications (1)

Application Number Title Priority Date Filing Date
EP07719093.2A Active EP2043864B1 (en) 2006-07-10 2007-06-20 Mems bubble generator

Country Status (4)

Country Link
EP (1) EP2043864B1 (en)
CA (1) CA2655322C (en)
SG (1) SG171672A1 (en)
WO (1) WO2008006140A1 (en)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0613780A2 (en) * 1993-03-02 1994-09-07 Tektronix, Inc. Apparatus and method for heating ink in an ink-jet printhead
US5448273A (en) * 1993-06-22 1995-09-05 Xerox Corporation Thermal ink jet printhead protective layers
US5635964A (en) * 1995-01-18 1997-06-03 Tektronix, Inc. Ink-jet print head having improved thermal uniformity
US5850241A (en) * 1995-04-12 1998-12-15 Eastman Kodak Company Monolithic print head structure and a manufacturing process therefor using anisotropic wet etching
US20040183863A1 (en) * 2002-11-23 2004-09-23 Silverbrook Research Pty Ltd Thermal ink jet printhead with reduced pressure transients

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2612580B2 (en) * 1987-12-01 1997-05-21 キヤノン株式会社 Liquid jet recording head and substrate for the head
US5666140A (en) * 1993-04-16 1997-09-09 Hitachi Koki Co., Ltd. Ink jet print head
US6557977B1 (en) * 1997-07-15 2003-05-06 Silverbrook Research Pty Ltd Shape memory alloy ink jet printing mechanism
TWI232806B (en) * 2004-03-17 2005-05-21 Benq Corp Fluid injector and method of manufacturing the same
US7654645B2 (en) * 2005-04-04 2010-02-02 Silverbrook Research Pty Ltd MEMS bubble generator

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0613780A2 (en) * 1993-03-02 1994-09-07 Tektronix, Inc. Apparatus and method for heating ink in an ink-jet printhead
US5448273A (en) * 1993-06-22 1995-09-05 Xerox Corporation Thermal ink jet printhead protective layers
US5635964A (en) * 1995-01-18 1997-06-03 Tektronix, Inc. Ink-jet print head having improved thermal uniformity
US5850241A (en) * 1995-04-12 1998-12-15 Eastman Kodak Company Monolithic print head structure and a manufacturing process therefor using anisotropic wet etching
US20040183863A1 (en) * 2002-11-23 2004-09-23 Silverbrook Research Pty Ltd Thermal ink jet printhead with reduced pressure transients

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2008006140A1 *

Also Published As

Publication number Publication date
CA2655322A1 (en) 2008-01-17
WO2008006140A1 (en) 2008-01-17
EP2043864A1 (en) 2009-04-08
CA2655322C (en) 2013-12-10
EP2043864B1 (en) 2013-09-25
SG171672A1 (en) 2011-06-29

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