EP1782510A4 - Fiber amplified based light source for semiconductor inspection - Google Patents

Fiber amplified based light source for semiconductor inspection

Info

Publication number
EP1782510A4
EP1782510A4 EP05813080A EP05813080A EP1782510A4 EP 1782510 A4 EP1782510 A4 EP 1782510A4 EP 05813080 A EP05813080 A EP 05813080A EP 05813080 A EP05813080 A EP 05813080A EP 1782510 A4 EP1782510 A4 EP 1782510A4
Authority
EP
European Patent Office
Prior art keywords
light source
based light
semiconductor inspection
amplified based
fiber amplified
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP05813080A
Other languages
German (de)
French (fr)
Other versions
EP1782510A2 (en
Inventor
Yung-Ho Chuang
Joseph J Armstrong
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KLA Tencor Technologies Corp
Original Assignee
KLA Tencor Technologies Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US11/056,855 external-priority patent/US7924892B2/en
Application filed by KLA Tencor Technologies Corp filed Critical KLA Tencor Technologies Corp
Priority to EP11001760.5A priority Critical patent/EP2369695B1/en
Publication of EP1782510A2 publication Critical patent/EP1782510A2/en
Publication of EP1782510A4 publication Critical patent/EP1782510A4/en
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/23—Arrangements of two or more lasers not provided for in groups H01S3/02 - H01S3/22, e.g. tandem arrangements of separate active media
    • H01S3/2383—Parallel arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/06—Construction or shape of active medium
    • H01S3/063—Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
    • H01S3/067—Fibre lasers
    • H01S3/06708—Constructional details of the fibre, e.g. compositions, cross-section, shape or tapering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/06—Construction or shape of active medium
    • H01S3/063—Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
    • H01S3/067—Fibre lasers
    • H01S3/06754—Fibre amplifiers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/02—Optical fibres with cladding with or without a coating
    • G02B6/02295—Microstructured optical fibre
    • G02B6/02314—Plurality of longitudinal structures extending along optical fibre axis, e.g. holes
    • G02B6/02342—Plurality of longitudinal structures extending along optical fibre axis, e.g. holes characterised by cladding features, i.e. light confining region
    • G02B6/02347—Longitudinal structures arranged to form a regular periodic lattice, e.g. triangular, square, honeycomb unit cell repeated throughout cladding
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/02—Optical fibres with cladding with or without a coating
    • G02B6/02295—Microstructured optical fibre
    • G02B6/02314—Plurality of longitudinal structures extending along optical fibre axis, e.g. holes
    • G02B6/02342—Plurality of longitudinal structures extending along optical fibre axis, e.g. holes characterised by cladding features, i.e. light confining region
    • G02B6/02366—Single ring of structures, e.g. "air clad"
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
    • H01S3/0057—Temporal shaping, e.g. pulse compression, frequency chirping
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/06—Construction or shape of active medium
    • H01S3/063—Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
    • H01S3/067—Fibre lasers
    • H01S3/06708—Constructional details of the fibre, e.g. compositions, cross-section, shape or tapering
    • H01S3/06729—Peculiar transverse fibre profile
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/06—Construction or shape of active medium
    • H01S3/063—Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
    • H01S3/067—Fibre lasers
    • H01S3/06708—Constructional details of the fibre, e.g. compositions, cross-section, shape or tapering
    • H01S3/06729—Peculiar transverse fibre profile
    • H01S3/06741—Photonic crystal fibre, i.e. the fibre having a photonic bandgap
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/06—Construction or shape of active medium
    • H01S3/063—Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
    • H01S3/067—Fibre lasers
    • H01S3/06708—Constructional details of the fibre, e.g. compositions, cross-section, shape or tapering
    • H01S3/06745—Tapering of the fibre, core or active region
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/06—Construction or shape of active medium
    • H01S3/063—Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
    • H01S3/067—Fibre lasers
    • H01S3/06791—Fibre ring lasers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/091—Processes or apparatus for excitation, e.g. pumping using optical pumping
    • H01S3/094—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light
    • H01S3/094003—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light the pumped medium being a fibre
    • H01S3/094007—Cladding pumping, i.e. pump light propagating in a clad surrounding the active core
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/091—Processes or apparatus for excitation, e.g. pumping using optical pumping
    • H01S3/094—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light
    • H01S3/094003—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light the pumped medium being a fibre
    • H01S3/094019—Side pumped fibre, whereby pump light is coupled laterally into the fibre via an optical component like a prism, or a grating, or via V-groove coupling
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/091—Processes or apparatus for excitation, e.g. pumping using optical pumping
    • H01S3/094—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light
    • H01S3/0941—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light of a laser diode
    • H01S3/09415—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light of a laser diode the pumping beam being parallel to the lasing mode of the pumped medium, e.g. end-pumping
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/11—Mode locking; Q-switching; Other giant-pulse techniques, e.g. cavity dumping
    • H01S3/1106—Mode locking
    • H01S3/1112—Passive mode locking
    • H01S3/1115—Passive mode locking using intracavity saturable absorbers
    • H01S3/1118—Semiconductor saturable absorbers, e.g. semiconductor saturable absorber mirrors [SESAMs]; Solid-state saturable absorbers, e.g. carbon nanotube [CNT] based
EP05813080A 2004-08-25 2005-08-16 Fiber amplified based light source for semiconductor inspection Withdrawn EP1782510A4 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP11001760.5A EP2369695B1 (en) 2004-08-25 2005-08-16 Fiber amplifier based light source for semiconductor inspection

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US60454004P 2004-08-25 2004-08-25
US11/056,855 US7924892B2 (en) 2004-08-25 2005-02-11 Fiber amplifier based light source for semiconductor inspection
PCT/US2005/028993 WO2006023448A2 (en) 2004-08-25 2005-08-16 Fiber amplified based light source for semiconductor inspection

Publications (2)

Publication Number Publication Date
EP1782510A2 EP1782510A2 (en) 2007-05-09
EP1782510A4 true EP1782510A4 (en) 2010-04-07

Family

ID=35968096

Family Applications (2)

Application Number Title Priority Date Filing Date
EP11001760.5A Active EP2369695B1 (en) 2004-08-25 2005-08-16 Fiber amplifier based light source for semiconductor inspection
EP05813080A Withdrawn EP1782510A4 (en) 2004-08-25 2005-08-16 Fiber amplified based light source for semiconductor inspection

Family Applications Before (1)

Application Number Title Priority Date Filing Date
EP11001760.5A Active EP2369695B1 (en) 2004-08-25 2005-08-16 Fiber amplifier based light source for semiconductor inspection

Country Status (3)

Country Link
EP (2) EP2369695B1 (en)
JP (1) JP5255838B2 (en)
WO (1) WO2006023448A2 (en)

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US7443903B2 (en) * 2006-04-19 2008-10-28 Mobius Photonics, Inc. Laser apparatus having multiple synchronous amplifiers tied to one master oscillator
CN101939880B (en) * 2008-02-07 2013-07-24 Imra美国公司 High power parallel fiber arrays
WO2009133734A1 (en) * 2008-05-02 2009-11-05 オリンパス株式会社 Optical inspection device, electromagnetic wave detection method, electromagnetic wave detection device, organism observation method, microscope, endoscope, and optical tomographic image generation device
JP5538072B2 (en) 2010-06-03 2014-07-02 株式会社日立ハイテクノロジーズ Defect inspection method and apparatus
US9793673B2 (en) * 2011-06-13 2017-10-17 Kla-Tencor Corporation Semiconductor inspection and metrology system using laser pulse multiplier
EP2842201B1 (en) * 2012-04-27 2021-09-01 biolitec Unternehmensbeteiligungs II AG Fiber laser system for medical applications
CN106030934B (en) * 2014-01-07 2019-08-06 统雷有限公司 Using a tunable femtosecond oscillator it is adjustable in infrared super continuous spectrums generator
JP6190317B2 (en) * 2014-05-19 2017-08-30 日本電信電話株式会社 Laser oscillator
JP6190318B2 (en) * 2014-05-19 2017-08-30 日本電信電話株式会社 Laser oscillator
US9362714B1 (en) * 2015-03-12 2016-06-07 Northrop Grumman Systems Corporation Architecture for all-fiber delivery of coherently combined laser power
CN106644391B (en) * 2016-09-19 2019-03-29 核工业理化工程研究院 Chain failure expert diagnostic system and diagnostic method are put in a kind of vibration of laser

Citations (3)

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US6014249A (en) * 1997-01-28 2000-01-11 Imra America, Inc. Apparatus and method for the generation of high-power femtosecond pulses from a fiber amplifier
US20030008448A1 (en) * 1999-05-27 2003-01-09 Kafka James D. Remote UV laser system and methods of use
JP2003008115A (en) * 2001-06-26 2003-01-10 Mitsubishi Cable Ind Ltd Optical amplifier

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US3646462A (en) * 1969-11-14 1972-02-29 American Optical Corp Fiber for distortion-free propagation
JP2656972B2 (en) * 1989-02-22 1997-09-24 日立電線株式会社 Multi-wavelength glass waveguide laser array
DE69026227T2 (en) * 1989-12-26 1996-08-29 United Technologies Corp Pumped lasers with embedded Bragg grating structure
JPH04267578A (en) * 1991-02-22 1992-09-24 Toshiba Corp Pulse laser device
JP3657694B2 (en) * 1995-03-31 2005-06-08 リンテック株式会社 Lighting device
US5694408A (en) * 1995-06-07 1997-12-02 Mcdonnell Douglas Corporation Fiber optic laser system and associated lasing method
US5867305A (en) * 1996-01-19 1999-02-02 Sdl, Inc. Optical amplifier with high energy levels systems providing high peak powers
US5832006A (en) * 1997-02-13 1998-11-03 Mcdonnell Douglas Corporation Phased array Raman laser amplifier and operating method therefor
JP4232130B2 (en) * 1998-03-11 2009-03-04 株式会社ニコン Laser apparatus and light irradiation apparatus and exposure method using this laser apparatus
US6061170A (en) * 1998-03-16 2000-05-09 Mcdonnell Douglas Corporation Dual frequency laser amplifier array and operating method therefor
DE69917776D1 (en) * 1998-06-09 2004-07-08 Crystal Fibre As Birkerod FIBER WITH PHOTONIC BAND GAP
JP3505533B2 (en) * 1999-06-30 2004-03-08 古河電気工業株式会社 Optical fiber
JP4132581B2 (en) * 2000-06-07 2008-08-13 ルーセント テクノロジーズ インコーポレーテッド Apparatus including multimode optical fiber
US6567605B1 (en) * 2000-08-25 2003-05-20 The Boeing Company Fiber optic projection device
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Patent Citations (3)

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Publication number Priority date Publication date Assignee Title
US6014249A (en) * 1997-01-28 2000-01-11 Imra America, Inc. Apparatus and method for the generation of high-power femtosecond pulses from a fiber amplifier
US20030008448A1 (en) * 1999-05-27 2003-01-09 Kafka James D. Remote UV laser system and methods of use
JP2003008115A (en) * 2001-06-26 2003-01-10 Mitsubishi Cable Ind Ltd Optical amplifier

Also Published As

Publication number Publication date
EP2369695A3 (en) 2012-02-08
JP2008511177A (en) 2008-04-10
EP2369695A2 (en) 2011-09-28
WO2006023448A2 (en) 2006-03-02
EP2369695B1 (en) 2013-11-13
JP5255838B2 (en) 2013-08-07
EP1782510A2 (en) 2007-05-09
WO2006023448A3 (en) 2006-10-19

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