EP1588202A4 - Micromirror systems - Google Patents

Micromirror systems

Info

Publication number: EP1588202A4
Authority: EP; European Patent Office
Prior art keywords: micromirror systems; micromirror; systems
Prior art date: 2002-10-11
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Withdrawn

Application number

EP03774800A

Other languages

German (de)

French (fr)

Other versions

EP1588202A2 (en

Inventor

Christopher M Aubuchon

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Exajoule LLC

Original Assignee

Exajoule LLC

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2002-10-11

Filing date

2003-10-10

Publication date

2007-10-10

2002-10-11 Priority claimed from US10/269,763 external-priority patent/US6825968B2/en

2002-10-11 Priority claimed from US10/269,796 external-priority patent/US6870659B2/en

2002-10-11 Priority claimed from US10/269,478 external-priority patent/US6798560B2/en

2003-10-10 Application filed by Exajoule LLC filed Critical Exajoule LLC

2005-10-26 Publication of EP1588202A2 publication Critical patent/EP1588202A2/en

2007-10-10 Publication of EP1588202A4 publication Critical patent/EP1588202A4/en

Status Withdrawn legal-status Critical Current

Links

Classifications

- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means

EP03774800A 2002-10-11 2003-10-10 Micromirror systems Withdrawn EP1588202A4 (en)

Applications Claiming Priority (7)

Application Number	Priority Date	Filing Date	Title
US269478		1981-06-02
US269796		1994-06-30
US269763		2002-10-11
US10/269,763 US6825968B2 (en)	2002-10-11	2002-10-11	Micromirror systems with electrodes configured for sequential mirror attraction
US10/269,796 US6870659B2 (en)	2002-10-11	2002-10-11	Micromirror systems with side-supported mirrors and concealed flexure members
US10/269,478 US6798560B2 (en)	2002-10-11	2002-10-11	Micromirror systems with open support structures
PCT/US2003/032348 WO2004034103A2 (en)	2002-10-11	2003-10-10	Micromirror systems

Publications (2)

Publication Number	Publication Date
EP1588202A2 EP1588202A2 (en)	2005-10-26
EP1588202A4 true EP1588202A4 (en)	2007-10-10

Family

ID=32096819

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
EP03774800A Withdrawn EP1588202A4 (en)	2002-10-11	2003-10-10	Micromirror systems

Country Status (5)

Country	Link
EP (1)	EP1588202A4 (en)
JP (1)	JP2006502449A (en)
AU (1)	AU2003282611A1 (en)
CA (1)	CA2502298A1 (en)
WO (1)	WO2004034103A2 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP4492952B2 (en) *	2004-12-03	2010-06-30	株式会社リコー	Optical deflection apparatus, optical deflection array, optical system, image projection display apparatus, and image forming apparatus
US7391554B2 (en)	2006-08-25	2008-06-24	Spatial Photonics, Inc.	High fill-ratio mirror-based spatial light modulator
EP2140300A1 (en) *	2007-04-12	2010-01-06	Thomson Licensing	Biaxial mirror color selecting micro mirror imager
JP6519284B2 (en) *	2015-04-01	2019-05-29	セイコーエプソン株式会社	Electro-optical device, method of manufacturing electro-optical device, and electronic apparatus

Citations (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE19712201A1 (en) *	1997-03-24	1998-10-01	Bodenseewerk Geraetetech	Micro-mechanical mirror arrangement with grid of individually disengageable mirror components
US6028689A (en) *	1997-01-24	2000-02-22	The United States Of America As Represented By The Secretary Of The Air Force	Multi-motion micromirror
US20020071171A1 (en) *	2000-12-13	2002-06-13	Greywall Dennis S.	Article comprising wedge-shaped electrodes

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPH0784196A (en) *	1993-09-13	1995-03-31	Canon Inc	Optical deflector and display device using the same
JP2001311900A (en) *	2000-04-27	2001-11-09	Ricoh Co Ltd	Optical scanner
US6633426B2 (en) *	2001-05-10	2003-10-14	Analog Devices, Inc.	Optical-electrical MEMS devices and method
US6666561B1 (en) *	2002-10-28	2003-12-23	Hewlett-Packard Development Company, L.P.	Continuously variable analog micro-mirror device

2003
- 2003-10-10 CA CA002502298A patent/CA2502298A1/en not_active Abandoned
- 2003-10-10 EP EP03774800A patent/EP1588202A4/en not_active Withdrawn
- 2003-10-10 WO PCT/US2003/032348 patent/WO2004034103A2/en active Application Filing
- 2003-10-10 AU AU2003282611A patent/AU2003282611A1/en not_active Abandoned
- 2003-10-10 JP JP2004543736A patent/JP2006502449A/en active Pending

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US6028689A (en) *	1997-01-24	2000-02-22	The United States Of America As Represented By The Secretary Of The Air Force	Multi-motion micromirror
DE19712201A1 (en) *	1997-03-24	1998-10-01	Bodenseewerk Geraetetech	Micro-mechanical mirror arrangement with grid of individually disengageable mirror components
US20020071171A1 (en) *	2000-12-13	2002-06-13	Greywall Dennis S.	Article comprising wedge-shaped electrodes

Also Published As

Publication number	Publication date
JP2006502449A (en)	2006-01-19
WO2004034103A2 (en)	2004-04-22
EP1588202A2 (en)	2005-10-26
AU2003282611A1 (en)	2004-05-04
CA2502298A1 (en)	2004-04-22
WO2004034103A3 (en)	2005-08-11

Legal Events

Date	Code	Title	Description
2005-09-09	PUAI	Public reference made under article 153(3) epc to a published international application that has entered the european phase	Free format text: ORIGINAL CODE: 0009012
2005-10-26	17P	Request for examination filed	Effective date: 20050412
2005-10-26	AK	Designated contracting states	Kind code of ref document: A2 Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR
2005-10-26	AX	Request for extension of the european patent	Extension state: AL LT LV MK
2006-02-01	DAX	Request for extension of the european patent (deleted)
2006-09-08	REG	Reference to a national code	Ref country code: HK Ref legal event code: DE Ref document number: 1086072 Country of ref document: HK
2007-10-10	A4	Supplementary search report drawn up and despatched	Effective date: 20070911
2007-10-10	RIC1	Information provided on ipc code assigned before grant	Ipc: G02B 26/08 20060101ALI20070905BHEP Ipc: G02B 7/182 20060101AFI20050905BHEP
2008-03-26	17Q	First examination report despatched	Effective date: 20080226
2008-09-19	STAA	Information on the status of an ep patent application or granted ep patent	Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN
2008-10-22	18D	Application deemed to be withdrawn	Effective date: 20080503
2012-05-18	REG	Reference to a national code	Ref country code: HK Ref legal event code: WD Ref document number: 1086072 Country of ref document: HK

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