EP1535697A4 - Method and device for processing inside of transparent material - Google Patents

Method and device for processing inside of transparent material

Info

Publication number
EP1535697A4
EP1535697A4 EP03755268A EP03755268A EP1535697A4 EP 1535697 A4 EP1535697 A4 EP 1535697A4 EP 03755268 A EP03755268 A EP 03755268A EP 03755268 A EP03755268 A EP 03755268A EP 1535697 A4 EP1535697 A4 EP 1535697A4
Authority
EP
European Patent Office
Prior art keywords
shape
transparent material
laser light
section
advance direction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP03755268A
Other languages
German (de)
French (fr)
Other versions
EP1535697A1 (en
Inventor
Koji Sugioka
Ya Cheng
Katsumi Midorikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RIKEN Institute of Physical and Chemical Research
Original Assignee
RIKEN Institute of Physical and Chemical Research
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RIKEN Institute of Physical and Chemical Research filed Critical RIKEN Institute of Physical and Chemical Research
Publication of EP1535697A1 publication Critical patent/EP1535697A1/en
Publication of EP1535697A4 publication Critical patent/EP1535697A4/en
Withdrawn legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
    • C03C23/0005—Other surface treatment of glass not in the form of fibres or filaments by irradiation
    • C03C23/0025—Other surface treatment of glass not in the form of fibres or filaments by irradiation by a laser beam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
    • B23K26/0624—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses using ultrashort pulses, i.e. pulses of 1ns or less
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/066—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms by using masks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/50—Working by transmitting the laser beam through or within the workpiece
    • B23K26/53—Working by transmitting the laser beam through or within the workpiece for modifying or reforming the material inside the workpiece, e.g. for producing break initiation cracks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/50—Working by transmitting the laser beam through or within the workpiece
    • B23K26/55—Working by transmitting the laser beam through or within the workpiece for creating voids inside the workpiece, e.g. for forming flow passages or flow patterns
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C4/00—Compositions for glass with special properties
    • C03C4/04—Compositions for glass with special properties for photosensitive glass

Abstract

A shape with a substantially perfect circle is obtained as a processed shape such as a modified shape or a worked shape at a light focus point in a cross-section in a direction parallel to an advance direction of a femtosecond laser light beam. A section in a direction perpendicular to an advance direction of a laser light beam emitted from a femtosecond laser (10) is formed in a predetermined shape. The laser light of which sectional shape in the direction perpendicular to the advance direction is formed in the predetermined shape is entered into a lens (14). The light is focused by the lens inside a transparent material (100) and processes the inside of the transparent material.
EP03755268A 2002-05-24 2003-05-15 Method and device for processing inside of transparent material Withdrawn EP1535697A4 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2002149931A JP3559827B2 (en) 2002-05-24 2002-05-24 Method and apparatus for processing inside transparent material
JP2002149931 2002-05-24
PCT/JP2003/006039 WO2003099507A1 (en) 2002-05-24 2003-05-15 Method and device for processing inside of transparent material

Publications (2)

Publication Number Publication Date
EP1535697A1 EP1535697A1 (en) 2005-06-01
EP1535697A4 true EP1535697A4 (en) 2007-06-13

Family

ID=29561221

Family Applications (1)

Application Number Title Priority Date Filing Date
EP03755268A Withdrawn EP1535697A4 (en) 2002-05-24 2003-05-15 Method and device for processing inside of transparent material

Country Status (4)

Country Link
US (1) US7411151B2 (en)
EP (1) EP1535697A4 (en)
JP (1) JP3559827B2 (en)
WO (1) WO2003099507A1 (en)

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WO2005033033A1 (en) * 2003-10-06 2005-04-14 Hoya Corporation Glass component having through hole and production method therefor
DE102004037949B4 (en) * 2004-08-05 2009-04-02 Forschungszentrum Karlsruhe Gmbh Process for the preparation of photonic crystals
BE1016782A3 (en) * 2005-09-22 2007-06-05 Laser Engineering Applic METHOD FOR INTERNAL LASER MARKING IN TRANSPARENT AND LASER MATERIALS AND DEVICE USED FOR THE APPLICATION OF SAID METHOD
JP5002808B2 (en) * 2006-03-07 2012-08-15 国立大学法人北海道大学 Laser processing apparatus and laser processing method
EP1964822A1 (en) * 2007-02-27 2008-09-03 Cristales Curvados S.A. Method for manufacturing decorated glass and glass thus obtained
CA2622937A1 (en) * 2007-03-23 2008-09-23 Nec Corporation Marked body and manufacturing method thereof
US20090045179A1 (en) * 2007-08-15 2009-02-19 Ellen Marie Kosik Williams Method and system for cutting solid materials using short pulsed laser
WO2011089592A1 (en) * 2010-01-20 2011-07-28 Moshe Finarov A method of laser processing
TWI426298B (en) * 2010-12-27 2014-02-11 Univ Nat Taiwan Science Tech Optical device and laser processing method
JP5379172B2 (en) * 2011-01-11 2013-12-25 東山 亨 Femtosecond laser processing machine
EP2656961A1 (en) * 2011-02-08 2013-10-30 Fujikura Ltd. Method for manufacturing substrate having micropore, and substrate
WO2012161317A1 (en) * 2011-05-25 2012-11-29 株式会社フジクラ Method of manufacturing base substance disposed with fine hole, and base substance disposed with fine hole
EP2754524B1 (en) 2013-01-15 2015-11-25 Corning Laser Technologies GmbH Method of and apparatus for laser based processing of flat substrates being wafer or glass element using a laser beam line
EP2781296B1 (en) 2013-03-21 2020-10-21 Corning Laser Technologies GmbH Device and method for cutting out contours from flat substrates using a laser
JP6401248B2 (en) * 2013-05-15 2018-10-10 コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． LED having scattering mechanism in substrate
FR3006068B1 (en) * 2013-05-24 2015-04-24 Saint Gobain PROCESS FOR OBTAINING A SUBSTRATE
JP5744991B2 (en) * 2013-09-12 2015-07-08 東山 亨 Femtosecond laser processing machine
US11556039B2 (en) 2013-12-17 2023-01-17 Corning Incorporated Electrochromic coated glass articles and methods for laser processing the same
US9517963B2 (en) 2013-12-17 2016-12-13 Corning Incorporated Method for rapid laser drilling of holes in glass and products made therefrom
CN103949772B (en) * 2014-04-22 2016-01-13 上海大学 Femtosecond laser prepares the method for three-dimensional rotatable nanometer body grating in transparent material
EP3164828B1 (en) 2014-07-01 2018-08-29 Qiova Micromachining method and system for patterning a material, and method for using one such micromachining system
CN106687419A (en) 2014-07-08 2017-05-17 康宁股份有限公司 Methods and apparatuses for laser processing materials
US11648623B2 (en) 2014-07-14 2023-05-16 Corning Incorporated Systems and methods for processing transparent materials using adjustable laser beam focal lines
CN107922237B (en) 2015-03-24 2022-04-01 康宁股份有限公司 Laser cutting and processing of display glass compositions
LT6428B (en) * 2015-10-02 2017-07-25 Uab "Altechna R&D" Method and device for laser processing of transparent materials
KR102078294B1 (en) 2016-09-30 2020-02-17 코닝 인코포레이티드 Apparatus and method for laser machining transparent workpieces using non-axisymmetric beam spots
US10067291B2 (en) 2016-10-13 2018-09-04 Stmicroelectronics Sa Method of manufacturing a waveguide
EP3848333A1 (en) 2016-10-24 2021-07-14 Corning Incorporated Substrate processing station for laser-based machining of sheet-like glass substrates
EP4076827A4 (en) * 2019-12-20 2024-01-17 Avava Inc Systems and methods for formation of continuous channels within transparent materials
CN111408856B (en) * 2020-04-15 2022-11-22 华东师范大学重庆研究院 Method and device for manufacturing micro-fluidic chip by femtosecond plasma grating
CN111474622B (en) * 2020-04-16 2022-08-16 华东师范大学 Method for preparing three-dimensional optical waveguide and photonic device structure in transparent material
CN112756819B (en) * 2020-12-24 2022-02-08 清华大学 System and method for processing micro-channel by femtosecond laser assisted by alternating electric field

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US5948172A (en) * 1996-08-12 1999-09-07 Neiheisel; Gary L. Descaling metal with a laser having a very short pulse width and high average power
US20010050312A1 (en) * 2000-02-03 2001-12-13 Jun Koide Laser processing method and laser processing apparatus

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US5410125A (en) * 1990-10-11 1995-04-25 Harry Winston, S.A. Methods for producing indicia on diamonds
FR2673557A1 (en) * 1991-03-08 1992-09-11 Ugine Aciers METHOD AND STATIC OPTICAL DEVICE FOR LASER IRRADIATION OF A MOLECULAR METAL PRODUCT AND ITS APPLICATION TO THE TREATMENT OF MAGNETIC TOLES.
JPH11269683A (en) 1998-03-18 1999-10-05 Armco Inc Method and apparatus for removing oxide from metal surface
US6285002B1 (en) * 1999-05-10 2001-09-04 Bryan Kok Ann Ngoi Three dimensional micro machining with a modulated ultra-short laser pulse
US6977137B2 (en) * 1999-07-29 2005-12-20 Corning Incorporated Direct writing of optical devices in silica-based glass using femtosecond pulse lasers
US6573026B1 (en) * 1999-07-29 2003-06-03 Corning Incorporated Femtosecond laser writing of glass, including borosilicate, sulfide, and lead glasses
JP3522671B2 (en) * 2000-01-27 2004-04-26 住友重機械工業株式会社 Marking method, apparatus, and marked optical member
JP3754857B2 (en) 2000-02-03 2006-03-15 キヤノン株式会社 Laser processing method
TW503188B (en) * 2000-08-29 2002-09-21 Sumitomo Heavy Industries Marking method, device the optical member marked
JP3736791B2 (en) * 2000-08-31 2006-01-18 シャープ株式会社 Laser processing method

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5948172A (en) * 1996-08-12 1999-09-07 Neiheisel; Gary L. Descaling metal with a laser having a very short pulse width and high average power
US20010050312A1 (en) * 2000-02-03 2001-12-13 Jun Koide Laser processing method and laser processing apparatus

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO03099507A1 *

Also Published As

Publication number Publication date
EP1535697A1 (en) 2005-06-01
JP3559827B2 (en) 2004-09-02
US20060124618A1 (en) 2006-06-15
JP2003340579A (en) 2003-12-02
US7411151B2 (en) 2008-08-12
WO2003099507A1 (en) 2003-12-04

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