EP1507604A1 - Method and device for local treatment of substrates - Google Patents

Method and device for local treatment of substrates

Info

Publication number
EP1507604A1
EP1507604A1 EP03720014A EP03720014A EP1507604A1 EP 1507604 A1 EP1507604 A1 EP 1507604A1 EP 03720014 A EP03720014 A EP 03720014A EP 03720014 A EP03720014 A EP 03720014A EP 1507604 A1 EP1507604 A1 EP 1507604A1
Authority
EP
European Patent Office
Prior art keywords
fluid
substrate
local
local area
suction force
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP03720014A
Other languages
German (de)
French (fr)
Other versions
EP1507604A4 (en
Inventor
Michael Peter John Bertoz
Igor Lvovich Skryabin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dyesol Ltd
Original Assignee
Dyesol Ltd
Sustainable Technologies International Pty Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dyesol Ltd, Sustainable Technologies International Pty Ltd filed Critical Dyesol Ltd
Priority to EP10004817A priority Critical patent/EP2218522B1/en
Publication of EP1507604A1 publication Critical patent/EP1507604A1/en
Publication of EP1507604A4 publication Critical patent/EP1507604A4/en
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67063—Apparatus for fluid treatment for etching
    • H01L21/67075—Apparatus for fluid treatment for etching for wet etching
    • H01L21/6708—Apparatus for fluid treatment for etching for wet etching using mainly spraying means, e.g. nozzles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/26—Processes for applying liquids or other fluent materials performed by applying the liquid or other fluent material from an outlet device in contact with, or almost in contact with, the surface
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/04—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to gases
    • B05D3/0493—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to gases using vacuum
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/02—Cleaning by the force of jets or sprays
    • B08B3/022—Cleaning travelling work
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C10/00—Solid state diffusion of only metal elements or silicon into metallic material surfaces
    • C23C10/18—Solid state diffusion of only metal elements or silicon into metallic material surfaces using liquids, e.g. salt baths, liquid suspensions
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C26/00—Coating not provided for in groups C23C2/00 - C23C24/00
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/12—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
    • C23C4/123—Spraying molten metal
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/40—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using liquids, e.g. salt baths, liquid suspensions
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
    • H01G9/00—Electrolytic capacitors, rectifiers, detectors, switching devices, light-sensitive or temperature-sensitive devices; Processes of their manufacture
    • H01G9/20—Light-sensitive devices
    • H01G9/2027—Light-sensitive devices comprising an oxide semiconductor electrode
    • H01G9/2031—Light-sensitive devices comprising an oxide semiconductor electrode comprising titanium oxide, e.g. TiO2
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
    • H01G9/00—Electrolytic capacitors, rectifiers, detectors, switching devices, light-sensitive or temperature-sensitive devices; Processes of their manufacture
    • H01G9/20—Light-sensitive devices
    • H01G9/2068—Panels or arrays of photoelectrochemical cells, e.g. photovoltaic modules based on photoelectrochemical cells
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/12—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by mechanical means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B2203/00—Details of cleaning machines or methods involving the use or presence of liquid or steam
    • B08B2203/02—Details of machines or methods for cleaning by the force of jets or sprays
    • B08B2203/0229—Suction chambers for aspirating the sprayed liquid
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
    • H10K71/13—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/20—Changing the shape of the active layer in the devices, e.g. patterning
    • H10K71/231—Changing the shape of the active layer in the devices, e.g. patterning by etching of existing layers
    • H10K71/236—Changing the shape of the active layer in the devices, e.g. patterning by etching of existing layers using printing techniques, e.g. applying the etch liquid using an ink jet printer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/542—Dye sensitized solar cells

Definitions

  • This invention relates to methods and devices for treatment of substrates (cleaning, priming, etc).
  • Substrates described in this invention may have one or more layers deposited over their surfaces before the treatment.
  • the invention relates to the methods of manufacturing Dye Solar Cells (DSC) and modules.
  • DSC Dye Solar Cells
  • Methods for treatment of substrates with fluids usually comprise the 3 following stages:
  • Examples of removal of fluid from the substrate include: • Dipping in or spraying with another fluid,
  • the present invention is based on realisation that local treatment of substrates with fluids can be achieved in a continuous process that comprises simultaneous delivery of a fluid to and removal of the fluid from the local preselected areas of a substrate.
  • One aspect of the present invention provides for directing a fine jet of fluid towards the local areas of a substrate and simultaneously applying vacuum suction force to the said areas. Both said fine jet of fluid and said vacuum suction force are tuned in such a way that:
  • the fluid is allowed to interact with the said local preselected area of the substrate;
  • said vacuum suction force is applied to any of the said preselected local areas in such a way that the said fluid is removed from the said local preselected area in a direction perpendicular to that area in a close proximity from the substrate.
  • further displacement of the said fluid is not necessarily perpendicular to that local preselected area.
  • the said fluid jet is directed perpendicularly to any of the said preselected local areas.
  • the said interaction between said fluid and substrate results in dissolution of undesirable compounds on the surface of the substrate in the said fluid.
  • chemical composition of the said fluid is adjusted to ensure effective dissolution when prior knowledge of the chemical composition(s) of the said undesirable compounds is available.
  • the said interaction between said fluid and substrate results in mixing of the said fluid with undesirable small solid particles on surface of the substrate, thus the said particles are effectively removed from the substrate along with the said fluid. This describes local cleaning by mixing.
  • the said interaction between said fluid and substrate results in dissolution of material that forms the surface of the substrate. In this way local etching or grooving is achieved.
  • the said interaction between said fluid and substrate results in changing chemical properties of surface of the substrate, thus in preparation of the said local preselected areas of the substrate for further processing
  • the said interaction between said fluid and substrate results in formation of an additional layer on surface of the substrate.
  • part of the said fluid remains on the local preselected area of substrate to form an additional layer (for example, by sol-gel process), whereas excess of the fluid is removed by action of the said vacuum suction force.
  • the said fluid is the dye removal solution (e.g. ammonium hydroxide solution in water)
  • said substrate is a glass substrate coated by a transparent electronic conductor (TEC) to be used in deposition of electrodes for Dye Solar Cells (DSC), some areas of the substrate having subsequently been coated by one or more layers at least one of which is a nanoporous layer of titanium dioxide or other semiconducting material, and the whole area of the substrate having been coated by dye ; local preselected areas of the substrate are those that are coated by dye, but are not coated by other layers. Removal of the dye from the local preselected areas and possible treatment of these areas creates conditions for subsequent application of further layers of DSC, such as, for example interconnecting and sealing material.
  • DSC Dye Solar Cells
  • the said fluid comprises liquid phase or gas phase or a mixture thereof.
  • the said fluid comprises vapour that condenses on to the said local preselected areas.
  • said fluid is delivered in gas phase, but the interaction between said fluid and said local preselected area of substrate takes place when the said fluid is in liquid phase.
  • two or more jets of different fluids directed towards local preselected areas of the substrate.
  • the said interaction in this case is between 1 st fluid, 2 nd fluid, etc, and the substrate. Excess of the fluids and products of interaction (where applicable) are removed from the said local areas by action of the said vacuum suction force.
  • the invention can be utilised in both static and dynamic mode.
  • static mode size and shape of said fluid jet resemble that of the said local area.
  • Application of the said jet to the said local area under simultaneous action of said vacuum suction force allows for precise treatment of the said local area.
  • dynamic mode size of the said fluid jet is smaller than that of the said local area.
  • the said fluid jet is applied only to a portion of said local preselected area. Treatment of the whole local area is achieved by movement of said fluid jet with respect to the said local area.
  • the fluid jet acts within the area to which the vacuum suction force is applied.
  • the invention also provides for the fluid jet to be followed by the vacuum suction force. The following parameters can be adjusted to ensure effective treatment in the static mode:
  • Another aspect of the present invention provides for a device for local treatment of substrates; the device comprises means for creation of fluid jet(s) and means for removing fluid from the local preselected area of the substrate by action of a vacuum suction force.
  • the said means for creation of fluid jet(s) comprise container(s) with fluid(s), source of pressure, fluid delivery pipes and nozzle(s) for release of fluid jet(s).
  • the said means for removing fluid comprise vacuum pump, vacuum pipes and vacuum nozzle for precise application of the said vacuum suction force to the said local areas of substrate.
  • said device contains additional means for precise positioning of the said vacuum and fluid nozzles with respect to the local preselected areas of the substrate.
  • the said precise positioning include positioning in X-Y direction, where X-Y is a plane that approximates a local preselected area of the substrates; and in Z- direction, perpendicular to the local preselected area of the substrate.
  • said device additionally contains means for uniform movement of said jet and vacuum nozzles with respect to the substrate. For 2-D substrates this movement takes place in one plane, for 3-D substrate this movement takes place in 3-D.
  • the said device additionally contains valves in both fluid delivery and fluid removal lines to commence/terminate fluid jet(s) and/or application of vacuum suction force in accordance with position of the said vacuum and fluid nozzles with respect to the local preselected area of the substrate.
  • size of the said vacuum nozzle is larger than that of the fluid nozzle
  • the fluid nozzle is placed within the said vacuum nozzle
  • space inside the said liquid nozzle is used to create the said fluid jet
  • space between fluid and vacuum nozzle is used to transfer said vacuum suction force to the said local preselected areas of a substrate.
  • the shape of said vacuum nozzle is similar to that of the fluid nozzle and both nozzles are concentric.
  • the said fluid delivery means comprise 2 or more concentric fluid nozzles for delivery of 2 or more fluids.
  • the said device additionally comprise means for in-situ controlling treatment of said local preselected areas.
  • said in-situ control means comprise a stable light source and a light detector; light emitted by the said light source is focused on part of the local preselected area, light detector measures the intensity of light reflected from the said part (or alternatively, the light transmitted through the said part), electrical signal generated by the said light detector serves as a measure of effectiveness and completeness of the said treatment and as a control signal for in-situ adjustment of the process parameters (such as for example, distance between nozzles and substrate, speed of motion of the nozzles with respect to the substrate, vacuum suction, fluid pressure).
  • said in-situ controls means comprise a sensor to monitor chemical composition of the removed fluid; said sensor being positioned in the said fluid removal line. Deviation of the said chemical composition from predetermined reference value serves as a measure of effectiveness and completeness of the said treatment.
  • Figure 1 Demonstrates a principle for the local treatment of substrates
  • Figure 2 is a cross sectional view of device that includes optical in-situ monitoring
  • Figure 3 is a cross sectional view of the device with dual fluid supply
  • Figure 4a is a schematic representation of an electrode for Dye Solar cell to be treated using this invention
  • Figure 4b is a schematic representation of an electrode for Dye Solar cell after local dye removal.
  • Figure 5 is a schematic representation of fluid supply and fluid removal systems of the device
  • Figure 6 is a schematic representation of an electronic control system of the device.
  • this diagram demonstrates the principle of the local treatment of substrates.
  • a fluid nozzle 2 creates a fine fluid jet 1 directed perpendicularly to a substrate 4.
  • Surface of the substrate 4 contains an undesirable compound 5, which is to be removed from a local preselected area 10.
  • the undesirable compound 5 is dissolved in fluid delivered to the local preselected area 10 by the fluid jet.
  • the fluid and products of interaction 8 are removed from the area 10 by action of the vacuum suction force 9 created by a vacuum nozzle 3.
  • the fluid is delivered from a fluid supply system 6 and finally removed to a fluid removal system 7.
  • this diagram demonstrates removal of an undesirable compound 5 from a substrate 4 in a dynamic mode along a thin straight line.
  • the substrate is moved in direction 11, thus the left hand side 12 of the substrate surface has already been treated, whereas the right hand side 5 is to be treated.
  • the cleaning process is controlled by two optical sensors 13.
  • Each optical sensor comprises a stable light source 14 and a light detector 15.
  • Each light source generates a standard light ray 16 incident to the substrate. Intensity of light reflected from the treated area 18 is higher than that reflected from the untreated area 17.
  • Each light detector converts light intensity into an electrical signal.
  • the electrical signals from the detectors are transmitted to a comparator 19.
  • the comparator compares electrical signals from the light detectors and generates a control signal 20.
  • the control signal is used by a process control system to adjust the process parameters (speed of substrate, pressure in fluid supply, etc%) in situ in order to maintain quality of the local treatment.
  • the system comprises a first fluid nozzle 2 to create a first fluid jet 1, a vacuum nozzle 3 to create a vacuum suction force 9 and a second fluid nozzle 21 to create a second fluid jet 22.
  • the first fluid is supplied from the first fluid supply system 6 and the second - from the second fluid supply system 23.
  • Both fluids are delivered to a local preselected area of a substrate 4, where the fluids interact between each other and with the surface of the substrate. This interaction results in treatment of the local preselected area of the substrate. Products of the interaction 8 are removed from the substrate by the action of vacuum suction force 9 through the vacuum nozzle 3 to a fluid removal system 7.
  • the electrode comprises a glass substrate 24, Transparent Electronic Conductor (TEC) layer 25 and a nanoporous layer of titanium dioxide 26.
  • TEC Transparent Electronic Conductor
  • the whole area of the electrode is covered by dye 27.
  • Local preselected areas of the substrate are those that are coated by dye, but are not coated by titanium dioxide.
  • FIG. 4b cross-sectional and planar views of the working electrode for DSC (refer to Fig. 4a) after process of local dye removal are presented.
  • Required pattern of a local preselected area 28 (2 mm wide) is now clean and ready for subsequent application of further layers of DSC, such as, for example interconnecting and sealing material.
  • the fluid supply sytem 29 comprises compressed gas supply 30, compressed gas gauge 31, container with the fluid 32, fluid supply pipe 33 and fluid supply electromagnetic valve 34.
  • the fluid removal system 35 comprises vacuum pump 36, vacuum gauge 37, removed fluid tank 38, scrubbing tank 39 and fluid removal electromagnetic valve 40.
  • the system comprises a computer 41, a comparator 19, X-stage 42, Y- stage 43.
  • the computer progam drives X-Y stages in accordance with a pattern of the local preselected areas on a substrate.
  • the computer also controls supply and removal of the fluids by opening and closing electromagnetic valves 34 and 40.
  • the comparator 19 generates a differential electrical signal that is used by the computer to adjust treatment parameters.

Abstract

This invention relates to a process for fabricating a working electrode for use in a Dye Solar Cell (DSC). The method including the steps of: providing a transparent substrate with a Transparent Electronic Conductor (TEC) layer; coating an area of the TEC layer with a layer of semiconducting material; applying a layer of dye over both the Transparent Electronic Conductor (TEC) layer an the layer of semiconducting material; locally treating the substrate with a fluid, the fluid being selected to dissolve the dye; said process comprising creating and directing at least one jet of fluid towards local areas of the substrate; the local areas being coated by dye, but not coated by the semiconducting material and applying a vacuum suction force to the said local areas.

Description

Method and device for local treatment of substrates
TECHNICAL FIELD
This invention relates to methods and devices for treatment of substrates (cleaning, priming, etc...). Substrates described in this invention may have one or more layers deposited over their surfaces before the treatment.
More particularly, the invention relates to the methods of manufacturing Dye Solar Cells (DSC) and modules.
BACKGROUND TO THE INVENTION
Methods for treatment of substrates with fluids usually comprise the 3 following stages:
1. Delivery of fluid to a substrate.
2. Allowing fluid to interact with surface of the substrate.
3. Removal of fluid (that may contain products of interaction (2)) from the substrate Examples of delivering fluid to a substrate described in the prior art include:
• Dipping substrates in fluid
• Spraying liquid over surface of the substrates
• Wiping substrates using wet materials
Examples of removal of fluid from the substrate include: • Dipping in or spraying with another fluid,
• Wiping substrates with dry material or material wetted by another fluid
• Using substantial pressure in gas phase (for example: gas jet) to remove the fluid.
Application of one or more of the above methods for treatment of local areas of a substrate usually involves masking the substrates in such a way that fluid is allowed to contact only the said local areas. However, the masking is often inconvenient and may compromise the integrity of the product. There therefore exists a need for a method of locally treating substrates without prior masking. There exists a further need for a device that allows practical implementation of this method.
SUMMARY OF THE INVENTION
The present invention is based on realisation that local treatment of substrates with fluids can be achieved in a continuous process that comprises simultaneous delivery of a fluid to and removal of the fluid from the local preselected areas of a substrate.
One aspect of the present invention provides for directing a fine jet of fluid towards the local areas of a substrate and simultaneously applying vacuum suction force to the said areas. Both said fine jet of fluid and said vacuum suction force are tuned in such a way that:
• the fluid is allowed to interact with the said local preselected area of the substrate; In one embodiment in accordance with this aspect of the invention, to ensure that the said fluid does not interact with areas of a substrate other then the said local preselected areas, said vacuum suction force is applied to any of the said preselected local areas in such a way that the said fluid is removed from the said local preselected area in a direction perpendicular to that area in a close proximity from the substrate. However, after the fluid has been removed, further displacement of the said fluid is not necessarily perpendicular to that local preselected area. • In another embodiment in accordance with this aspect of the invention, to ensure that the said fluid does not interact with areas of a substrate when interaction is completed, the fluid and possible products of the interaction are completely or partially removed from the substrate.
other then the said local preselected areas, the said fluid jet is directed perpendicularly to any of the said preselected local areas. In still another embodiment in accordance with this aspect of the invention the said interaction between said fluid and substrate results in dissolution of undesirable compounds on the surface of the substrate in the said fluid. In this case (local cleaning by dissolution) chemical composition of the said fluid is adjusted to ensure effective dissolution when prior knowledge of the chemical composition(s) of the said undesirable compounds is available.
In yet another embodiment in accordance with this aspect of the invention, the said interaction between said fluid and substrate results in mixing of the said fluid with undesirable small solid particles on surface of the substrate, thus the said particles are effectively removed from the substrate along with the said fluid. This describes local cleaning by mixing.
In still another embodiment in accordance with this aspect of the invention, the said interaction between said fluid and substrate results in dissolution of material that forms the surface of the substrate. In this way local etching or grooving is achieved.
In still another embodiment in accordance with this aspect of the invention, the said interaction between said fluid and substrate results in changing chemical properties of surface of the substrate, thus in preparation of the said local preselected areas of the substrate for further processing
In still a further embodiment in accordance with this aspect of the invention, the said interaction between said fluid and substrate results in formation of an additional layer on surface of the substrate. In this case part of the said fluid remains on the local preselected area of substrate to form an additional layer (for example, by sol-gel process), whereas excess of the fluid is removed by action of the said vacuum suction force.
In still another embodiment in accordance with this aspect of the invention, the said fluid is the dye removal solution (e.g. ammonium hydroxide solution in water), said substrate is a glass substrate coated by a transparent electronic conductor (TEC) to be used in deposition of electrodes for Dye Solar Cells (DSC), some areas of the substrate having subsequently been coated by one or more layers at least one of which is a nanoporous layer of titanium dioxide or other semiconducting material, and the whole area of the substrate having been coated by dye ; local preselected areas of the substrate are those that are coated by dye, but are not coated by other layers. Removal of the dye from the local preselected areas and possible treatment of these areas creates conditions for subsequent application of further layers of DSC, such as, for example interconnecting and sealing material.
In one embodiment in accordance with this aspect of the invention the said fluid comprises liquid phase or gas phase or a mixture thereof.
In a further embodiment in accordance with this aspect of the invention the said fluid comprises vapour that condenses on to the said local preselected areas. In this case said fluid is delivered in gas phase, but the interaction between said fluid and said local preselected area of substrate takes place when the said fluid is in liquid phase.
In still a further embodiment in accordance with this aspect of the invention two or more jets of different fluids directed towards local preselected areas of the substrate. The said interaction in this case is between 1st fluid, 2nd fluid, etc, and the substrate. Excess of the fluids and products of interaction (where applicable) are removed from the said local areas by action of the said vacuum suction force.
The invention can be utilised in both static and dynamic mode. In the static mode size and shape of said fluid jet resemble that of the said local area. Application of the said jet to the said local area under simultaneous action of said vacuum suction force allows for precise treatment of the said local area. In the dynamic mode size of the said fluid jet is smaller than that of the said local area. At any given instant of time the said fluid jet is applied only to a portion of said local preselected area. Treatment of the whole local area is achieved by movement of said fluid jet with respect to the said local area.
Typically, the fluid jet acts within the area to which the vacuum suction force is applied. The invention also provides for the fluid jet to be followed by the vacuum suction force. The following parameters can be adjusted to ensure effective treatment in the static mode:
• Chemical composition of the fluid
• Velocity of the fluid
• Temperature of the fluid
• Temperature of the substrate
• Size and shape of the fluid jet
• Direction of the fluid jet (normal or oblique to the substrate)
• Size and shape of a region to which vacuum suction force is applied
• Direction of the vacuum suction force (normal or oblique to the substrate)
• Value of the vacuum suction force (pressure differential)
• Duration of application of fluid jet
• Duration of application of vacuum suction force
• Synchronisation between application of the said fluid jet and said vacuum suction force.
In addition to the above parameters, in the dynamic mode the following parameters can be adjusted to ensure effective treatment: • Speed of motion of the said fluid jet with respect to the said substrate
• Synchronisation between applications of the said fluid jet, said vacuum suction force and position of the said jet with respect to the said local area of substrate.
Another aspect of the present invention provides for a device for local treatment of substrates; the device comprises means for creation of fluid jet(s) and means for removing fluid from the local preselected area of the substrate by action of a vacuum suction force. The said means for creation of fluid jet(s) comprise container(s) with fluid(s), source of pressure, fluid delivery pipes and nozzle(s) for release of fluid jet(s). The said means for removing fluid comprise vacuum pump, vacuum pipes and vacuum nozzle for precise application of the said vacuum suction force to the said local areas of substrate. In one embodiment in accordance with this aspect of the invention said device contains additional means for precise positioning of the said vacuum and fluid nozzles with respect to the local preselected areas of the substrate. The said precise positioning include positioning in X-Y direction, where X-Y is a plane that approximates a local preselected area of the substrates; and in Z- direction, perpendicular to the local preselected area of the substrate.
In another embodiment in accordance with this aspect of the invention said device additionally contains means for uniform movement of said jet and vacuum nozzles with respect to the substrate. For 2-D substrates this movement takes place in one plane, for 3-D substrate this movement takes place in 3-D.
In still another embodiment in accordance with this aspect of the invention the said device additionally contains valves in both fluid delivery and fluid removal lines to commence/terminate fluid jet(s) and/or application of vacuum suction force in accordance with position of the said vacuum and fluid nozzles with respect to the local preselected area of the substrate.
In yet another embodiment in accordance with this aspect of the invention, size of the said vacuum nozzle is larger than that of the fluid nozzle, the fluid nozzle is placed within the said vacuum nozzle, space inside the said liquid nozzle is used to create the said fluid jet, space between fluid and vacuum nozzle is used to transfer said vacuum suction force to the said local preselected areas of a substrate.
In yet another embodiment in accordance with this aspect of the invention, the shape of said vacuum nozzle is similar to that of the fluid nozzle and both nozzles are concentric.
In further embodiment in accordance with this aspect of the invention the said fluid delivery means comprise 2 or more concentric fluid nozzles for delivery of 2 or more fluids. In one embodiment in accordance with this aspect of invention the said device additionally comprise means for in-situ controlling treatment of said local preselected areas.
In a further embodiment in accordance with this aspect of the invention said in-situ control means comprise a stable light source and a light detector; light emitted by the said light source is focused on part of the local preselected area, light detector measures the intensity of light reflected from the said part (or alternatively, the light transmitted through the said part), electrical signal generated by the said light detector serves as a measure of effectiveness and completeness of the said treatment and as a control signal for in-situ adjustment of the process parameters (such as for example, distance between nozzles and substrate, speed of motion of the nozzles with respect to the substrate, vacuum suction, fluid pressure).
In still a further embodiment in accordance with this aspect of invention said in-situ controls means comprise a sensor to monitor chemical composition of the removed fluid; said sensor being positioned in the said fluid removal line. Deviation of the said chemical composition from predetermined reference value serves as a measure of effectiveness and completeness of the said treatment.
BRIEF DESCRIPTION OF DRAWINGS
Having broadly portrayed the nature of the present invention, embodiments thereof will now be described by way of example and illustration. In the following description, reference will be made to the accompanying drawings in which:
Figure 1 Demonstrates a principle for the local treatment of substrates Figure 2 is a cross sectional view of device that includes optical in-situ monitoring
Figure 3 is a cross sectional view of the device with dual fluid supply
Figure 4a is a schematic representation of an electrode for Dye Solar cell to be treated using this invention Figure 4b is a schematic representation of an electrode for Dye Solar cell after local dye removal.
Figure 5 is a schematic representation of fluid supply and fluid removal systems of the device
Figure 6 is a schematic representation of an electronic control system of the device.
DETAILED DESCRIPTION OF DRAWINGS
Referring to Figure 1, this diagram demonstrates the principle of the local treatment of substrates. A fluid nozzle 2 creates a fine fluid jet 1 directed perpendicularly to a substrate 4. Surface of the substrate 4 contains an undesirable compound 5, which is to be removed from a local preselected area 10. The undesirable compound 5 is dissolved in fluid delivered to the local preselected area 10 by the fluid jet. The fluid and products of interaction 8 are removed from the area 10 by action of the vacuum suction force 9 created by a vacuum nozzle 3. The fluid is delivered from a fluid supply system 6 and finally removed to a fluid removal system 7.
Referring to Figure 2, this diagram demonstrates removal of an undesirable compound 5 from a substrate 4 in a dynamic mode along a thin straight line. In this example the substrate is moved in direction 11, thus the left hand side 12 of the substrate surface has already been treated, whereas the right hand side 5 is to be treated. The cleaning process is controlled by two optical sensors 13. Each optical sensor comprises a stable light source 14 and a light detector 15. Each light source generates a standard light ray 16 incident to the substrate. Intensity of light reflected from the treated area 18 is higher than that reflected from the untreated area 17. Each light detector converts light intensity into an electrical signal. The electrical signals from the detectors are transmitted to a comparator 19. The comparator compares electrical signals from the light detectors and generates a control signal 20. The control signal is used by a process control system to adjust the process parameters (speed of substrate, pressure in fluid supply, etc...) in situ in order to maintain quality of the local treatment.
Referring to Figure 3, a cross-sectional view of dual fluid supply system is presented. The system comprises a first fluid nozzle 2 to create a first fluid jet 1, a vacuum nozzle 3 to create a vacuum suction force 9 and a second fluid nozzle 21 to create a second fluid jet 22.
The first fluid is supplied from the first fluid supply system 6 and the second - from the second fluid supply system 23.
Both fluids are delivered to a local preselected area of a substrate 4, where the fluids interact between each other and with the surface of the substrate. This interaction results in treatment of the local preselected area of the substrate. Products of the interaction 8 are removed from the substrate by the action of vacuum suction force 9 through the vacuum nozzle 3 to a fluid removal system 7.
Referring to Figure 4a, a cross-sectional and a planar view of a working electrode for Dye Solar (DSC) cell are presented. The electrode comprises a glass substrate 24, Transparent Electronic Conductor (TEC) layer 25 and a nanoporous layer of titanium dioxide 26. The whole area of the electrode is covered by dye 27. Local preselected areas of the substrate are those that are coated by dye, but are not coated by titanium dioxide.
Referring to Figure 4b, cross-sectional and planar views of the working electrode for DSC (refer to Fig. 4a) after process of local dye removal are presented. Required pattern of a local preselected area 28 (2 mm wide) is now clean and ready for subsequent application of further layers of DSC, such as, for example interconnecting and sealing material.
Referring to Figure 5, a fluid supply and a fluid removal system of a device for local treatment of substrates are presented. The fluid supply sytem 29 comprises compressed gas supply 30, compressed gas gauge 31, container with the fluid 32, fluid supply pipe 33 and fluid supply electromagnetic valve 34. The fluid removal system 35 comprises vacuum pump 36, vacuum gauge 37, removed fluid tank 38, scrubbing tank 39 and fluid removal electromagnetic valve 40.
Referring to Figure 6, an electronic control system of the device for local treatment of substrates is presented.
The system comprises a computer 41, a comparator 19, X-stage 42, Y- stage 43. The computer progam drives X-Y stages in accordance with a pattern of the local preselected areas on a substrate. The computer also controls supply and removal of the fluids by opening and closing electromagnetic valves 34 and 40. The comparator 19 generates a differential electrical signal that is used by the computer to adjust treatment parameters.
Examples 5 examples of the invention are presented in Figures 2-6.

Claims

1. A process for local treatment of substrates with fluids, said process comprising creating and directing at least one fine jet of fluid towards a local area of a substrate and applying a vacuum suction force to the said local area.
2. The process of claim 1 wherein the said fine jet of fluid and said vacuum suction force are tuned in such a way that the fluid is allowed to interact with the said local area of a substrate; when interaction is completed, the fluid and possible products of the interaction are completely or partially removed from the substrate by the action of said vacuum suction force.
3. The process of claim 1 or 2, wherein the said fluid is capable of dissolving undesirable compounds on the said local area of a substrate resulting in local cleaning by dissolution.
4. The process of claim 1 or 2, wherein the said fluid is capable of mixing with undesirable compounds on the said local area resulting in cleaning by mixing.
5. The process of claim 1 or 2, wherein the said fluid is capable of dissolving material of the surface layer of the said local area, resulting in local etching.
6. The process of claims 1 or 2, wherein the said fluid is capable of changing chemical properties of surface of the said local area, resulting in local pre- treatment.
7. The process of claims 1 or 2, wherein the said fluid is capable of formation of an additional layer on the surface of the said local area.
8. The process of any preceding claims, wherein the said fluid comprises liquid, vapour or gas phase or a mixture thereof.
9. The process of claims 1 or 2, wherein the said fluid is a dye removing solution, said substrate is to be used in Dye Solar Cells (DSC), some areas of the substrate having subsequently been coated by one or more layers at least one of which is a nanoporous layer of titanium dioxide or other semiconducting material, and the whole area of the substrate having been coated by dye ; and the said local areas of the substrate are those that are coated by dye, but are not coated by other layers.
10. The process of any of the preceding claims , wherein size of the said fine jet of fluid is smaller than that of the said local area and treatment of the said local area is achieved by movement of the said fluid jet with respect to the said local area.
11. A device for local treatment of a substrate; the device comprises means for creation of fluid jet(s) and means for removing fluids from local area of the substrate by action of vacuum suction force.
12. The device of claim 11, wherein the said means for creation of fluid jet(s) comprise fluid release nozzle(s).
13. The device of claim 11, wherein the said means for removing fluids comprise vacuum nozzle.
14. The device of claim 12, wherein the said means for creation of fluid jet additionally comprise source of pressure.
15. The device according to claims 11-15, wherein the said device additionally comprises means for controlling release of the fluids and application of vacuum suction force.
16. The device according to claim 15, wherein the said means for controlling release ' of the fluids and application of vacuum suction force comprise automatic valves.
17. The device according to claims 12 and 13 wherein, size of the said vacuum nozzle is larger than that of the fluid nozzle, the fluid nozzle is placed within the said vacuum nozzle, space inside the said liquid nozzle is used to create the said fluid jet, space between fluid and vacuum nozzle is used to transfer said vacuum suction force to the said local preselected areas of a substrate.
18. The device according to claim 17, wherein the shape of said vacuum nozzle is similar to that of the fluid nozzle and both nozzles are concentric.
19. The device according to claim 11, wherein the said means for creation of fluid jets comprise 2 or more concentric fluid nozzles for delivery of 2 or more fluids.
20. The device according to any of the preceding claims 11-19, the said device additionally comprises means for precise positioning and moving of the said vacuum and fluid nozzles with respect to the local areas of the substrate.
21. The device according to claim 20, the said device additionally comprises means for in-situ controlling of the said treatment of local area of a substrate.
22. The device according to claim 21, wherein the said means comprise a light source and light detector.
23. The device according to claim 21, wherein the said means comprise chemical sensor capable of detecting changes in chemical composition of a fluid removed j from the local area of a substrate by action of the said vacuum suction force.
EP03720014A 2002-05-07 2003-05-07 Method and device for local treatment of substrates Withdrawn EP1507604A4 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP10004817A EP2218522B1 (en) 2002-05-07 2003-05-07 Method and device for local treatment of substrates

Applications Claiming Priority (3)

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AUPS2125A AUPS212502A0 (en) 2002-05-07 2002-05-07 Method and device for local treatment of substrates with fluids
AUPS212502 2002-05-07
PCT/AU2003/000532 WO2003095115A1 (en) 2002-05-07 2003-05-07 Method and device for local treatment of substrates

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EP1507604A4 EP1507604A4 (en) 2007-07-04

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AT (1) ATE530265T1 (en)
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EP2218522A1 (en) 2010-08-18
AUPS212502A0 (en) 2002-06-06
EP2218522B1 (en) 2011-10-26
ATE530265T1 (en) 2011-11-15
EP1507604A4 (en) 2007-07-04
WO2003095115A1 (en) 2003-11-20

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