EP1472017A4 - Method for cleaning an article - Google Patents
Method for cleaning an articleInfo
- Publication number
- EP1472017A4 EP1472017A4 EP03729378A EP03729378A EP1472017A4 EP 1472017 A4 EP1472017 A4 EP 1472017A4 EP 03729378 A EP03729378 A EP 03729378A EP 03729378 A EP03729378 A EP 03729378A EP 1472017 A4 EP1472017 A4 EP 1472017A4
- Authority
- EP
- European Patent Office
- Prior art keywords
- article
- cleaning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000004140 cleaning Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/02—Inorganic compounds
- C11D7/04—Water-soluble compounds
- C11D7/06—Hydroxides
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
- B08B7/0021—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by liquid gases or supercritical fluids
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/02—Inorganic compounds
- C11D7/04—Water-soluble compounds
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/02—Inorganic compounds
- C11D7/04—Water-soluble compounds
- C11D7/08—Acids
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/22—Organic compounds
- C11D7/28—Organic compounds containing halogen
- C11D7/30—Halogenated hydrocarbons
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/50—Solvents
-
- C11D2111/22—
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US34650702P | 2002-01-07 | 2002-01-07 | |
US346507P | 2002-01-07 | ||
PCT/US2003/000529 WO2003057377A1 (en) | 2002-01-07 | 2003-01-07 | Method for cleaning an article |
Publications (2)
Publication Number | Publication Date |
---|---|
EP1472017A1 EP1472017A1 (en) | 2004-11-03 |
EP1472017A4 true EP1472017A4 (en) | 2007-03-21 |
Family
ID=23359727
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP03729378A Withdrawn EP1472017A4 (en) | 2002-01-07 | 2003-01-07 | Method for cleaning an article |
Country Status (8)
Country | Link |
---|---|
EP (1) | EP1472017A4 (en) |
JP (1) | JP2005515619A (en) |
KR (1) | KR20040073548A (en) |
CN (1) | CN1741863A (en) |
AU (1) | AU2003235748A1 (en) |
CA (1) | CA2472478A1 (en) |
TW (1) | TWI291200B (en) |
WO (1) | WO2003057377A1 (en) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6905555B2 (en) * | 2001-02-15 | 2005-06-14 | Micell Technologies, Inc. | Methods for transferring supercritical fluids in microelectronic and other industrial processes |
JP2004363404A (en) * | 2003-06-05 | 2004-12-24 | Nippon Telegr & Teleph Corp <Ntt> | Method for supercritical drying |
DE102004029077B4 (en) * | 2003-06-26 | 2010-07-22 | Samsung Electronics Co., Ltd., Suwon | Apparatus and method for removing a photoresist from a substrate |
US20050288485A1 (en) * | 2004-06-24 | 2005-12-29 | Mahl Jerry M | Method and apparatus for pretreatment of polymeric materials utilized in carbon dioxide purification, delivery and storage systems |
JP5521193B2 (en) * | 2010-01-20 | 2014-06-11 | 学校法人千葉工業大学 | Method for extracting hydrogen from gas fossil fuel |
CN103068496B (en) * | 2010-08-06 | 2016-04-13 | 英派尔科技开发有限公司 | Overcritical inert gas and cleaning method |
KR101395225B1 (en) * | 2010-11-25 | 2014-05-15 | 세메스 주식회사 | Method for treating substrate |
KR101187375B1 (en) | 2011-01-27 | 2012-10-05 | 부경대학교 산학협력단 | Apparatus for etching silicon oxide layer of semiconductor substrate |
US10525416B2 (en) * | 2017-05-16 | 2020-01-07 | Tokyo Electron Limited | Method of liquid filter wetting |
CN108598019A (en) * | 2018-04-17 | 2018-09-28 | 德淮半导体有限公司 | Wafer cleaning equipment and its cleaning method |
CN111744870A (en) * | 2020-06-24 | 2020-10-09 | 中国科学院苏州纳米技术与纳米仿生研究所广东(佛山)研究院 | Cleaning method for semiconductor device after gold-tin soldering |
CN114078692B (en) * | 2022-01-07 | 2024-02-20 | 浙江大学杭州国际科创中心 | Wafer cleaning method and wafer cleaning equipment |
CN114798602B (en) * | 2022-04-26 | 2024-01-23 | 四川博腾创达智能科技有限公司 | Method for cleaning particle pollutants |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4899767A (en) * | 1984-05-21 | 1990-02-13 | Cfm Technologies, Inc. | Method and system for fluid treatment of semiconductor wafers |
US5267455A (en) * | 1992-07-13 | 1993-12-07 | The Clorox Company | Liquid/supercritical carbon dioxide dry cleaning system |
WO1994001227A1 (en) * | 1992-07-13 | 1994-01-20 | The Clorox Company | Liquid/supercritical cleaning with decreased polymer damage |
EP0726099A2 (en) * | 1995-01-26 | 1996-08-14 | Texas Instruments Incorporated | Method of removing surface contamination |
US5556479A (en) * | 1994-07-15 | 1996-09-17 | Verteq, Inc. | Method and apparatus for drying semiconductor wafers |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5783082A (en) * | 1995-11-03 | 1998-07-21 | University Of North Carolina | Cleaning process using carbon dioxide as a solvent and employing molecularly engineered surfactants |
KR19980018262A (en) * | 1996-08-01 | 1998-06-05 | 윌리엄 비.켐플러 | I / O port and RAM memory addressing technology |
US6306564B1 (en) * | 1997-05-27 | 2001-10-23 | Tokyo Electron Limited | Removal of resist or residue from semiconductors using supercritical carbon dioxide |
AU742586B2 (en) * | 1997-05-30 | 2002-01-10 | Micell Technologies | Surface treatment |
US6454869B1 (en) * | 2001-06-27 | 2002-09-24 | International Business Machines Corporation | Process of cleaning semiconductor processing, handling and manufacturing equipment |
-
2003
- 2003-01-07 JP JP2003557723A patent/JP2005515619A/en active Pending
- 2003-01-07 KR KR10-2004-7010594A patent/KR20040073548A/en not_active Application Discontinuation
- 2003-01-07 CN CNA038054426A patent/CN1741863A/en active Pending
- 2003-01-07 WO PCT/US2003/000529 patent/WO2003057377A1/en active Application Filing
- 2003-01-07 CA CA002472478A patent/CA2472478A1/en not_active Abandoned
- 2003-01-07 EP EP03729378A patent/EP1472017A4/en not_active Withdrawn
- 2003-01-07 AU AU2003235748A patent/AU2003235748A1/en not_active Abandoned
- 2003-01-08 TW TW092100342A patent/TWI291200B/en not_active IP Right Cessation
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4899767A (en) * | 1984-05-21 | 1990-02-13 | Cfm Technologies, Inc. | Method and system for fluid treatment of semiconductor wafers |
US5267455A (en) * | 1992-07-13 | 1993-12-07 | The Clorox Company | Liquid/supercritical carbon dioxide dry cleaning system |
WO1994001227A1 (en) * | 1992-07-13 | 1994-01-20 | The Clorox Company | Liquid/supercritical cleaning with decreased polymer damage |
US5556479A (en) * | 1994-07-15 | 1996-09-17 | Verteq, Inc. | Method and apparatus for drying semiconductor wafers |
EP0726099A2 (en) * | 1995-01-26 | 1996-08-14 | Texas Instruments Incorporated | Method of removing surface contamination |
Non-Patent Citations (1)
Title |
---|
See also references of WO03057377A1 * |
Also Published As
Publication number | Publication date |
---|---|
CA2472478A1 (en) | 2003-07-17 |
WO2003057377A1 (en) | 2003-07-17 |
JP2005515619A (en) | 2005-05-26 |
EP1472017A1 (en) | 2004-11-03 |
CN1741863A (en) | 2006-03-01 |
TWI291200B (en) | 2007-12-11 |
TW200412631A (en) | 2004-07-16 |
AU2003235748A1 (en) | 2003-07-24 |
KR20040073548A (en) | 2004-08-19 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
17P | Request for examination filed |
Effective date: 20040805 |
|
AK | Designated contracting states |
Kind code of ref document: A1 Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT SE SI SK TR |
|
AX | Request for extension of the european patent |
Extension state: AL LT LV MK RO |
|
A4 | Supplementary search report drawn up and despatched |
Effective date: 20070219 |
|
17Q | First examination report despatched |
Effective date: 20080304 |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN |
|
18D | Application deemed to be withdrawn |
Effective date: 20080715 |