EP1469701A3 - Raised microstructures - Google Patents
Raised microstructures Download PDFInfo
- Publication number
- EP1469701A3 EP1469701A3 EP04076015A EP04076015A EP1469701A3 EP 1469701 A3 EP1469701 A3 EP 1469701A3 EP 04076015 A EP04076015 A EP 04076015A EP 04076015 A EP04076015 A EP 04076015A EP 1469701 A3 EP1469701 A3 EP 1469701A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- raised
- raised microstructures
- film
- microstructures
- raised micro
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R19/00—Electrostatic transducers
- H04R19/005—Electrostatic transducers using semiconductor materials
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R19/00—Electrostatic transducers
- H04R19/04—Microphones
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R31/00—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R31/00—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
- H04R31/006—Interconnection of transducer parts
Abstract
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US910110 | 1978-05-30 | ||
US63740100A | 2000-08-11 | 2000-08-11 | |
US637401 | 2000-08-11 | ||
US09/910,110 US6987859B2 (en) | 2001-07-20 | 2001-07-20 | Raised microstructure of silicon based device |
EP01959715A EP1310136B1 (en) | 2000-08-11 | 2001-08-10 | Miniature broadband transducer |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP01959715A Division EP1310136B1 (en) | 2000-08-11 | 2001-08-10 | Miniature broadband transducer |
Publications (3)
Publication Number | Publication Date |
---|---|
EP1469701A2 EP1469701A2 (en) | 2004-10-20 |
EP1469701A3 true EP1469701A3 (en) | 2005-11-16 |
EP1469701B1 EP1469701B1 (en) | 2008-04-16 |
Family
ID=27092826
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP04076015A Expired - Lifetime EP1469701B1 (en) | 2000-08-11 | 2001-08-10 | Raised microstructures |
EP01959715A Expired - Lifetime EP1310136B1 (en) | 2000-08-11 | 2001-08-10 | Miniature broadband transducer |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP01959715A Expired - Lifetime EP1310136B1 (en) | 2000-08-11 | 2001-08-10 | Miniature broadband transducer |
Country Status (9)
Country | Link |
---|---|
EP (2) | EP1469701B1 (en) |
JP (3) | JP4338395B2 (en) |
KR (1) | KR100571967B1 (en) |
CN (2) | CN1498513B (en) |
AT (2) | ATE321429T1 (en) |
AU (1) | AU2001281241A1 (en) |
DE (2) | DE60133679T2 (en) |
DK (2) | DK1310136T3 (en) |
WO (1) | WO2002015636A2 (en) |
Families Citing this family (119)
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US6535460B2 (en) | 2000-08-11 | 2003-03-18 | Knowles Electronics, Llc | Miniature broadband acoustic transducer |
US6987859B2 (en) | 2001-07-20 | 2006-01-17 | Knowles Electronics, Llc. | Raised microstructure of silicon based device |
US8629005B1 (en) | 2000-11-28 | 2014-01-14 | Knowles Electronics, Llc | Methods of manufacture of bottom port surface mount silicon condenser microphone packages |
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US7166910B2 (en) | 2000-11-28 | 2007-01-23 | Knowles Electronics Llc | Miniature silicon condenser microphone |
US7439616B2 (en) | 2000-11-28 | 2008-10-21 | Knowles Electronics, Llc | Miniature silicon condenser microphone |
US6859542B2 (en) | 2001-05-31 | 2005-02-22 | Sonion Lyngby A/S | Method of providing a hydrophobic layer and a condenser microphone having such a layer |
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DE10238523B4 (en) | 2002-08-22 | 2014-10-02 | Epcos Ag | Encapsulated electronic component and method of manufacture |
US6781231B2 (en) | 2002-09-10 | 2004-08-24 | Knowles Electronics Llc | Microelectromechanical system package with environmental and interference shield |
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DE102004020204A1 (en) | 2004-04-22 | 2005-11-10 | Epcos Ag | Encapsulated electrical component and method of manufacture |
US7346178B2 (en) * | 2004-10-29 | 2008-03-18 | Silicon Matrix Pte. Ltd. | Backplateless silicon microphone |
US7329933B2 (en) | 2004-10-29 | 2008-02-12 | Silicon Matrix Pte. Ltd. | Silicon microphone with softly constrained diaphragm |
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US4360955A (en) * | 1978-05-08 | 1982-11-30 | Barry Block | Method of making a capacitive force transducer |
US4776019A (en) * | 1986-05-31 | 1988-10-04 | Horiba, Ltd. | Diaphragm for use in condenser microphone type detector |
JP2000165999A (en) * | 1998-11-30 | 2000-06-16 | Hosiden Corp | Semiconductor electret condenser microphone |
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2001
- 2001-08-10 AU AU2001281241A patent/AU2001281241A1/en not_active Abandoned
- 2001-08-10 AT AT01959715T patent/ATE321429T1/en not_active IP Right Cessation
- 2001-08-10 WO PCT/US2001/025184 patent/WO2002015636A2/en active IP Right Grant
- 2001-08-10 EP EP04076015A patent/EP1469701B1/en not_active Expired - Lifetime
- 2001-08-10 KR KR1020037002017A patent/KR100571967B1/en not_active IP Right Cessation
- 2001-08-10 DK DK01959715T patent/DK1310136T3/en active
- 2001-08-10 DE DE60133679T patent/DE60133679T2/en not_active Expired - Lifetime
- 2001-08-10 EP EP01959715A patent/EP1310136B1/en not_active Expired - Lifetime
- 2001-08-10 DK DK04076015T patent/DK1469701T3/en active
- 2001-08-10 CN CN018140300A patent/CN1498513B/en not_active Expired - Lifetime
- 2001-08-10 CN CN2010102062254A patent/CN101867858B/en not_active Expired - Lifetime
- 2001-08-10 JP JP2002519372A patent/JP4338395B2/en not_active Expired - Fee Related
- 2001-08-10 DE DE60118208T patent/DE60118208T2/en not_active Expired - Lifetime
- 2001-08-10 AT AT04076015T patent/ATE392790T1/en not_active IP Right Cessation
-
2006
- 2006-11-06 JP JP2006300831A patent/JP2007116721A/en active Pending
-
2009
- 2009-04-01 JP JP2009088945A patent/JP5049312B2/en not_active Expired - Fee Related
Patent Citations (3)
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US4360955A (en) * | 1978-05-08 | 1982-11-30 | Barry Block | Method of making a capacitive force transducer |
US4776019A (en) * | 1986-05-31 | 1988-10-04 | Horiba, Ltd. | Diaphragm for use in condenser microphone type detector |
JP2000165999A (en) * | 1998-11-30 | 2000-06-16 | Hosiden Corp | Semiconductor electret condenser microphone |
Non-Patent Citations (1)
Title |
---|
PATENT ABSTRACTS OF JAPAN vol. 2000, no. 09 13 October 2000 (2000-10-13) * |
Also Published As
Publication number | Publication date |
---|---|
DK1310136T3 (en) | 2006-07-31 |
EP1310136B1 (en) | 2006-03-22 |
CN1498513B (en) | 2010-07-14 |
EP1469701B1 (en) | 2008-04-16 |
ATE392790T1 (en) | 2008-05-15 |
DE60118208T2 (en) | 2007-04-12 |
KR20030033026A (en) | 2003-04-26 |
EP1310136A2 (en) | 2003-05-14 |
JP2009153203A (en) | 2009-07-09 |
EP1469701A2 (en) | 2004-10-20 |
JP2004506394A (en) | 2004-02-26 |
JP2007116721A (en) | 2007-05-10 |
WO2002015636A2 (en) | 2002-02-21 |
DE60133679D1 (en) | 2008-05-29 |
DE60118208D1 (en) | 2006-05-11 |
CN1498513A (en) | 2004-05-19 |
JP5049312B2 (en) | 2012-10-17 |
DK1469701T3 (en) | 2008-08-18 |
KR100571967B1 (en) | 2006-04-18 |
ATE321429T1 (en) | 2006-04-15 |
JP4338395B2 (en) | 2009-10-07 |
AU2001281241A1 (en) | 2002-02-25 |
CN101867858B (en) | 2012-02-22 |
WO2002015636A3 (en) | 2002-10-24 |
CN101867858A (en) | 2010-10-20 |
DE60133679T2 (en) | 2009-06-10 |
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