EP1253320A3 - Pump and method of manufacturing same - Google Patents

Pump and method of manufacturing same Download PDF

Info

Publication number
EP1253320A3
EP1253320A3 EP02008979A EP02008979A EP1253320A3 EP 1253320 A3 EP1253320 A3 EP 1253320A3 EP 02008979 A EP02008979 A EP 02008979A EP 02008979 A EP02008979 A EP 02008979A EP 1253320 A3 EP1253320 A3 EP 1253320A3
Authority
EP
European Patent Office
Prior art keywords
check valve
pump
pump chamber
manufacturing same
inlet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP02008979A
Other languages
German (de)
French (fr)
Other versions
EP1253320A2 (en
EP1253320B1 (en
Inventor
Yoji Urano
Tatsuji Kawaguchi
Harunori Kitahara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Electric Works Co Ltd
Original Assignee
Matsushita Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Works Ltd filed Critical Matsushita Electric Works Ltd
Publication of EP1253320A2 publication Critical patent/EP1253320A2/en
Publication of EP1253320A3 publication Critical patent/EP1253320A3/en
Application granted granted Critical
Publication of EP1253320B1 publication Critical patent/EP1253320B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/10—Valves; Arrangement of valves
    • F04B53/1037—Flap valves
    • F04B53/1047—Flap valves the valve being formed by one or more flexible elements
    • F04B53/106—Flap valves the valve being formed by one or more flexible elements the valve being a membrane
    • F04B53/1062—Flap valves the valve being formed by one or more flexible elements the valve being a membrane fixed at two or more points at its periphery

Abstract

A compact pump has a pump chamber, inlet and outlet channels communicating with the pump chamber, and a pair of check valve units between the pump chamber and the inlet and outlet channels. Each check valve unit has a thin film check valve membrane, and a check valve body with a channel opened and closed by the check valve membrane due to a pressure difference.
EP02008979A 2001-04-24 2002-04-23 Pump and method of manufacturing same Expired - Lifetime EP1253320B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001125904 2001-04-24
JP2001125904 2001-04-24

Publications (3)

Publication Number Publication Date
EP1253320A2 EP1253320A2 (en) 2002-10-30
EP1253320A3 true EP1253320A3 (en) 2004-02-04
EP1253320B1 EP1253320B1 (en) 2006-02-08

Family

ID=18975035

Family Applications (1)

Application Number Title Priority Date Filing Date
EP02008979A Expired - Lifetime EP1253320B1 (en) 2001-04-24 2002-04-23 Pump and method of manufacturing same

Country Status (7)

Country Link
US (1) US20030002995A1 (en)
EP (1) EP1253320B1 (en)
KR (1) KR100494262B1 (en)
CN (1) CN1212476C (en)
DE (1) DE60209054T2 (en)
HK (1) HK1051061B (en)
TW (1) TW561223B (en)

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US6986649B2 (en) * 2003-04-09 2006-01-17 Motorola, Inc. Micropump with integrated pressure sensor
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WO2005075093A1 (en) * 2004-02-09 2005-08-18 Matsushita Electric Works, Ltd. Electrostatic spraying device
US7790325B2 (en) * 2004-03-31 2010-09-07 Canon Kabushiki Kaisha Valve having valve element displaced by at least one of a movement of a diaphragm and a movement of an actuator, and fuel cell using the valve
US7219848B2 (en) * 2004-11-03 2007-05-22 Meadwestvaco Corporation Fluid sprayer employing piezoelectric pump
CN100406731C (en) * 2005-03-10 2008-07-30 张坤林 Vacuum pump capable of block
US20080106071A1 (en) * 2006-11-03 2008-05-08 Chien-Tien Huang Air venting assembly of air pump
US7863035B2 (en) * 2007-02-15 2011-01-04 Osmetech Technology Inc. Fluidics devices
CN101255858B (en) * 2007-03-01 2010-05-26 讯凯国际股份有限公司 Film pump and apparatus having the same
TWI398577B (en) * 2007-08-31 2013-06-11 Microjet Technology Co Ltd Fluid transmission device cable of transmitting fluid at relatively large fluid rate
WO2009102989A1 (en) * 2008-02-13 2009-08-20 Solix Biofuels, Inc. Low shear pumps for use with bioreactors
CN101608610A (en) * 2008-06-20 2009-12-23 微创医疗器械(上海)有限公司 A kind of micropump
JP5853587B2 (en) * 2011-10-26 2016-02-09 オムロンヘルスケア株式会社 Electronic blood pressure monitor
DE102012202103A1 (en) 2012-02-13 2013-08-14 Robert Bosch Gmbh Pressure compensation element with a membrane, housing, battery cell module and motor vehicle
TWI475180B (en) * 2012-05-31 2015-03-01 Ind Tech Res Inst Synthetic jet equipment
KR20140147345A (en) * 2013-06-19 2014-12-30 삼성전기주식회사 Micro pump device
US20150057594A1 (en) * 2013-08-24 2015-02-26 Alcon Research, Ltd. Bubble-free microfluidic valve systems and methods
JP2015117647A (en) * 2013-12-19 2015-06-25 東芝テック株式会社 Piezoelectric pump and ink jet recording device with piezoelectric pump
JP6695154B2 (en) * 2016-01-28 2020-05-20 東芝テック株式会社 Ink circulation device and printer
TWI690656B (en) * 2016-01-29 2020-04-11 研能科技股份有限公司 Actuator
US10487821B2 (en) 2016-01-29 2019-11-26 Microjet Technology Co., Ltd. Miniature fluid control device
US10371136B2 (en) 2016-01-29 2019-08-06 Microjet Technology Co., Ltd. Miniature pneumatic device
US10615329B2 (en) 2016-01-29 2020-04-07 Microjet Technology Co., Ltd. Piezoelectric actuator
EP3203081B1 (en) 2016-01-29 2021-06-16 Microjet Technology Co., Ltd Miniature fluid control device
US10584695B2 (en) 2016-01-29 2020-03-10 Microjet Technology Co., Ltd. Miniature fluid control device
US9976673B2 (en) 2016-01-29 2018-05-22 Microjet Technology Co., Ltd. Miniature fluid control device
EP3203080B1 (en) 2016-01-29 2021-09-22 Microjet Technology Co., Ltd Miniature pneumatic device
US10388849B2 (en) 2016-01-29 2019-08-20 Microjet Technology Co., Ltd. Piezoelectric actuator
US10451051B2 (en) 2016-01-29 2019-10-22 Microjet Technology Co., Ltd. Miniature pneumatic device
US10388850B2 (en) 2016-01-29 2019-08-20 Microjet Technology Co., Ltd. Piezoelectric actuator
US10487820B2 (en) 2016-01-29 2019-11-26 Microjet Technology Co., Ltd. Miniature pneumatic device
US10529911B2 (en) 2016-01-29 2020-01-07 Microjet Technology Co., Ltd. Piezoelectric actuator
KR101910932B1 (en) * 2016-08-31 2018-10-23 이오플로우(주) Electoosmotic pump
US10655620B2 (en) 2016-11-10 2020-05-19 Microjet Technology Co., Ltd. Miniature fluid control device
US10683861B2 (en) 2016-11-10 2020-06-16 Microjet Technology Co., Ltd. Miniature pneumatic device
US10746169B2 (en) 2016-11-10 2020-08-18 Microjet Technology Co., Ltd. Miniature pneumatic device
CN108071580A (en) * 2016-11-10 2018-05-25 研能科技股份有限公司 Micro pressure power set
CN108071578A (en) * 2016-11-10 2018-05-25 研能科技股份有限公司 Micro pressure power set
CN108071577B (en) * 2016-11-10 2020-11-24 研能科技股份有限公司 Micro fluid control device
DE102018207858B4 (en) * 2018-05-18 2021-06-17 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Method and holding device for manufacturing a micropump with a mechanically preloaded diaphragm actuator
CN110869613B (en) * 2018-09-30 2022-08-19 深圳市大疆软件科技有限公司 Diaphragm pump and agricultural unmanned aerial vehicle
CN208950819U (en) * 2018-09-30 2019-06-07 深圳市大疆软件科技有限公司 Diaphragm pump and agriculture unmanned plane
CN208950820U (en) * 2018-09-30 2019-06-07 深圳市大疆软件科技有限公司 Diaphragm pump and agriculture unmanned plane
CN113944614B (en) * 2018-09-30 2023-06-20 深圳市大疆软件科技有限公司 Diaphragm pump and agricultural unmanned aerial vehicle
WO2020062289A1 (en) * 2018-09-30 2020-04-02 深圳市大疆软件科技有限公司 Diaphragm pump and agricultural plant protection machine having same
CN216984886U (en) * 2021-11-25 2022-07-19 华为技术有限公司 Miniature piezoelectric pump and electronic equipment

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0424087A1 (en) * 1989-10-17 1991-04-24 Seiko Epson Corporation Micro-pump or micro-discharge device
EP0789146A1 (en) * 1995-07-27 1997-08-13 Seiko Epson Corporation Microvalve and method of manufacturing the same, micropump using the microvalve and method of manufacturing the same, and apparatus using the micropump
US5759014A (en) * 1994-01-14 1998-06-02 Westonbridge International Limited Micropump
DE19711270A1 (en) * 1997-03-18 1998-09-24 Schwerionenforsch Gmbh Micro-pump for fluid media
US6033191A (en) * 1997-05-16 2000-03-07 Institut Fur Mikrotechnik Mainz Gmbh Micromembrane pump

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US3107630A (en) * 1955-01-31 1963-10-22 Textron Inc Non-magnetic electro-hydraulic pump
US4519751A (en) * 1982-12-16 1985-05-28 The Abet Group Piezoelectric pump with internal load sensor
US4581624A (en) * 1984-03-01 1986-04-08 Allied Corporation Microminiature semiconductor valve
JPH01174278A (en) * 1987-12-28 1989-07-10 Misuzu Erii:Kk Inverter
CH679555A5 (en) * 1989-04-11 1992-03-13 Westonbridge Int Ltd
JPH03134274A (en) * 1989-10-17 1991-06-07 Seiko Epson Corp Valve unit structure for micropump
SE508435C2 (en) * 1993-02-23 1998-10-05 Erik Stemme Diaphragm pump type pump
US5507318A (en) * 1994-10-04 1996-04-16 Walbro Corporation Umbrella check valves
US5542821A (en) * 1995-06-28 1996-08-06 Basf Corporation Plate-type diaphragm pump and method of use
US5725017A (en) * 1997-01-27 1998-03-10 Medtronic, Inc. In-line pressure check valve for drug-delivery systems
JPH10213077A (en) * 1997-01-30 1998-08-11 Kasei Optonix Co Ltd Reed valve for pump
DE19719861A1 (en) * 1997-05-12 1998-11-19 Fraunhofer Ges Forschung Method of manufacturing a micromembrane pump body
US6575715B1 (en) * 1997-09-19 2003-06-10 Omnitek Research & Development, Inc. Structural elements forming a pump
DE19918694C2 (en) * 1998-04-27 2002-03-14 Matsushita Electric Works Ltd Process for measuring the pressure of a fluid and miniature pump for carrying out this process
US6334761B1 (en) * 2000-03-02 2002-01-01 California Institute Of Technology Check-valved silicon diaphragm pump and method of fabricating the same
US6554591B1 (en) * 2001-11-26 2003-04-29 Motorola, Inc. Micropump including ball check valve utilizing ceramic technology and method of fabrication

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0424087A1 (en) * 1989-10-17 1991-04-24 Seiko Epson Corporation Micro-pump or micro-discharge device
US5759014A (en) * 1994-01-14 1998-06-02 Westonbridge International Limited Micropump
EP0789146A1 (en) * 1995-07-27 1997-08-13 Seiko Epson Corporation Microvalve and method of manufacturing the same, micropump using the microvalve and method of manufacturing the same, and apparatus using the micropump
DE19711270A1 (en) * 1997-03-18 1998-09-24 Schwerionenforsch Gmbh Micro-pump for fluid media
US6033191A (en) * 1997-05-16 2000-03-07 Institut Fur Mikrotechnik Mainz Gmbh Micromembrane pump

Also Published As

Publication number Publication date
DE60209054T2 (en) 2006-08-31
EP1253320A2 (en) 2002-10-30
TW561223B (en) 2003-11-11
CN1382909A (en) 2002-12-04
EP1253320B1 (en) 2006-02-08
HK1051061A1 (en) 2003-07-18
US20030002995A1 (en) 2003-01-02
DE60209054D1 (en) 2006-04-20
CN1212476C (en) 2005-07-27
KR100494262B1 (en) 2005-06-13
KR20020082800A (en) 2002-10-31
HK1051061B (en) 2006-08-25

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