EP1233927A4 - Apparatus and method for forming a membrane with nanometer scale pores - Google Patents

Apparatus and method for forming a membrane with nanometer scale pores

Info

Publication number
EP1233927A4
EP1233927A4 EP00980528A EP00980528A EP1233927A4 EP 1233927 A4 EP1233927 A4 EP 1233927A4 EP 00980528 A EP00980528 A EP 00980528A EP 00980528 A EP00980528 A EP 00980528A EP 1233927 A4 EP1233927 A4 EP 1233927A4
Authority
EP
European Patent Office
Prior art keywords
membrane
forming
nanometer scale
scale pores
pores
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP00980528A
Other languages
German (de)
French (fr)
Other versions
EP1233927A1 (en
Inventor
Derek Hansford
Mauro Ferrari
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of California
Original Assignee
University of California
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University of California filed Critical University of California
Publication of EP1233927A1 publication Critical patent/EP1233927A1/en
Publication of EP1233927A4 publication Critical patent/EP1233927A4/en
Withdrawn legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
    • B81C1/00158—Diaphragms, membranes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
    • B01D71/02—Inorganic material
    • B01D71/022—Metals
    • B01D71/0221—Group 4 or 5 metals
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
    • B01D67/0039—Inorganic membrane manufacture
    • B01D67/0053—Inorganic membrane manufacture by inducing porosity into non porous precursor membranes
    • B01D67/0058—Inorganic membrane manufacture by inducing porosity into non porous precursor membranes by selective elimination of components, e.g. by leaching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
    • B01D67/0039—Inorganic membrane manufacture
    • B01D67/0053—Inorganic membrane manufacture by inducing porosity into non porous precursor membranes
    • B01D67/006—Inorganic membrane manufacture by inducing porosity into non porous precursor membranes by elimination of segments of the precursor, e.g. nucleation-track membranes, lithography or laser methods
    • B01D67/0062—Inorganic membrane manufacture by inducing porosity into non porous precursor membranes by elimination of segments of the precursor, e.g. nucleation-track membranes, lithography or laser methods by micromachining techniques, e.g. using masking and etching steps, photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
    • B01D67/0039—Inorganic membrane manufacture
    • B01D67/0072—Inorganic membrane manufacture by deposition from the gaseous phase, e.g. sputtering, CVD, PVD
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D69/00—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
    • B01D69/02—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor characterised by their properties
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
    • B01D71/02—Inorganic material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
    • B01D71/02—Inorganic material
    • B01D71/0215—Silicon carbide; Silicon nitride; Silicon oxycarbide
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
    • B01D71/02—Inorganic material
    • B01D71/022—Metals
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2325/00—Details relating to properties of membranes
    • B01D2325/02—Details relating to pores or porosity of the membranes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2325/00—Details relating to properties of membranes
    • B01D2325/02—Details relating to pores or porosity of the membranes
    • B01D2325/0283—Pore size
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2325/00—Details relating to properties of membranes
    • B01D2325/04—Characteristic thickness
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2325/00—Details relating to properties of membranes
    • B01D2325/08—Patterned membranes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/06—Bio-MEMS
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/10—Microfilters, e.g. for gas or fluids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
    • B81C2201/0102—Surface micromachining
    • B81C2201/0105—Sacrificial layer
    • B81C2201/0109—Sacrificial layers not provided for in B81C2201/0107 - B81C2201/0108
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
    • B81C2201/0128—Processes for removing material
    • B81C2201/013—Etching
    • B81C2201/0135—Controlling etch progression
    • B81C2201/014—Controlling etch progression by depositing an etch stop layer, e.g. silicon nitride, silicon oxide, metal
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/05—Temporary protection of devices or parts of the devices during manufacturing
    • B81C2201/053—Depositing a protective layers
EP00980528A 1999-11-17 2000-11-17 Apparatus and method for forming a membrane with nanometer scale pores Withdrawn EP1233927A4 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US16604999P 1999-11-17 1999-11-17
US166049P 1999-11-17
PCT/US2000/031749 WO2001036321A1 (en) 1999-11-17 2000-11-17 Apparatus and method for forming a membrane with nanometer scale pores

Publications (2)

Publication Number Publication Date
EP1233927A1 EP1233927A1 (en) 2002-08-28
EP1233927A4 true EP1233927A4 (en) 2003-01-08

Family

ID=22601590

Family Applications (1)

Application Number Title Priority Date Filing Date
EP00980528A Withdrawn EP1233927A4 (en) 1999-11-17 2000-11-17 Apparatus and method for forming a membrane with nanometer scale pores

Country Status (4)

Country Link
EP (1) EP1233927A4 (en)
JP (1) JP2003514677A (en)
AU (1) AU1778101A (en)
WO (1) WO2001036321A1 (en)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003028861A1 (en) * 2001-10-02 2003-04-10 Sophion Bioscience A/S Corbino disc electroosmotic flow pump
WO2003028862A1 (en) * 2001-10-02 2003-04-10 Sophion Bioscience A/S Sieve electroosmotic flow pump
FR2844725B1 (en) * 2002-09-24 2005-01-07 Commissariat Energie Atomique METHOD FOR MANUFACTURING BIOMIMETIC MEMBRANE, BIOMIMETIC MEMBRANE, AND APPLICATIONS THEREOF
US7578954B2 (en) * 2003-02-24 2009-08-25 Corium International, Inc. Method for manufacturing microstructures having multiple microelements with through-holes
DE10353894B4 (en) * 2003-07-11 2007-02-15 Nft Nanofiltertechnik Gmbh Filter element and method for its production
US7632406B2 (en) * 2004-04-20 2009-12-15 Lawrence Livermore National Security, Llc Smart membranes for nitrate removal, water purification, and selective ion transportation
NL1026530C2 (en) * 2004-06-30 2006-01-02 Friesland Brands Bv Membrane on a support, as well as a method for manufacturing such a membrane.
JP2007536071A (en) * 2004-05-03 2007-12-13 フリースランド・ブランズ・ビー・ヴイ Device having a membrane on a carrier and method for producing such a membrane
CA2606440A1 (en) * 2005-04-29 2006-11-09 University Of Rochester Ultrathin porous nanoscale membranes, methods of making, and uses thereof
EP1721657A1 (en) * 2005-05-13 2006-11-15 SONY DEUTSCHLAND GmbH A method of fabricating a polymeric membrane having at least one pore
US9114238B2 (en) 2007-04-16 2015-08-25 Corium International, Inc. Solvent-cast microprotrusion arrays containing active ingredient
WO2009048607A1 (en) 2007-10-10 2009-04-16 Corium International, Inc. Vaccine delivery via microneedle arrays
AU2011248108B2 (en) 2010-05-04 2016-05-26 Corium Pharma Solutions, Inc. Method and device for transdermal delivery of parathyroid hormone using a microprojection array
EP2517779A1 (en) * 2011-04-26 2012-10-31 Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO Nanosieve composite membrane
MX2015008157A (en) 2012-12-21 2016-02-22 Corium Int Inc Microarray for delivery of therapeutic agent and methods of use.
EP4094799A1 (en) 2013-03-12 2022-11-30 Corium, Inc. Microprojection applicators
CA2903583C (en) 2013-03-15 2021-12-28 Corium International, Inc. Microarray for delivery of therapeutic agent, methods of use, and methods of making
US10195409B2 (en) 2013-03-15 2019-02-05 Corium International, Inc. Multiple impact microprojection applicators and methods of use
JP2016514133A (en) 2013-03-15 2016-05-19 コリウム インターナショナル， インコーポレイテッド MICROARRAY CONTAINING FINE STRUCTURE CONTAINING NO POLYMER, MANUFACTURING METHOD AND USE METHOD
RU2711567C2 (en) 2013-03-15 2020-01-17 Кориум, ИНК. Microchip for drug delivery and methods for use thereof
US10624843B2 (en) 2014-09-04 2020-04-21 Corium, Inc. Microstructure array, methods of making, and methods of use
WO2017004067A1 (en) 2015-06-29 2017-01-05 Corium International, Inc. Microarray for delivery of therapeutic agent, methods of use, and methods of making
AU2019269683A1 (en) * 2018-05-18 2020-12-10 The Regents Of The University Of California In vivo blood filtration membranes and devices

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4801380A (en) * 1987-12-23 1989-01-31 The Texas A&M University System Method of producing a silicon film with micropores
US5753014A (en) * 1993-11-12 1998-05-19 Van Rijn; Cornelis Johannes Maria Membrane filter and a method of manufacturing the same as well as a membrane
US5770076A (en) * 1994-03-07 1998-06-23 The Regents Of The University Of California Micromachined capsules having porous membranes and bulk supports
US5798042A (en) * 1994-03-07 1998-08-25 Regents Of The University Of California Microfabricated filter with specially constructed channel walls, and containment well and capsule constructed with such filters
US5919364A (en) * 1996-06-24 1999-07-06 Regents Of The University Of California Microfabricated filter and shell constructed with a permeable membrane
US5948255A (en) * 1994-03-07 1999-09-07 The Regents Of The University Of California Microfabricated particle thin film filter and method of making it
US6405066B1 (en) * 2000-03-17 2002-06-11 The Regents Of The University Of California Implantable analyte sensor

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5938923A (en) * 1997-04-15 1999-08-17 The Regents Of The University Of California Microfabricated filter and capsule using a substrate sandwich

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4801380A (en) * 1987-12-23 1989-01-31 The Texas A&M University System Method of producing a silicon film with micropores
US5753014A (en) * 1993-11-12 1998-05-19 Van Rijn; Cornelis Johannes Maria Membrane filter and a method of manufacturing the same as well as a membrane
US5770076A (en) * 1994-03-07 1998-06-23 The Regents Of The University Of California Micromachined capsules having porous membranes and bulk supports
US5798042A (en) * 1994-03-07 1998-08-25 Regents Of The University Of California Microfabricated filter with specially constructed channel walls, and containment well and capsule constructed with such filters
US5948255A (en) * 1994-03-07 1999-09-07 The Regents Of The University Of California Microfabricated particle thin film filter and method of making it
US5919364A (en) * 1996-06-24 1999-07-06 Regents Of The University Of California Microfabricated filter and shell constructed with a permeable membrane
US6405066B1 (en) * 2000-03-17 2002-06-11 The Regents Of The University Of California Implantable analyte sensor

Non-Patent Citations (4)

* Cited by examiner, † Cited by third party
Title
"PROCESS FOR PRODUCING A PRECISION FILTER", IBM TECHNICAL DISCLOSURE BULLETIN, IBM CORP. NEW YORK, US, vol. 32, no. 4A, 1 September 1989 (1989-09-01), pages 126 - 127, XP000040003, ISSN: 0018-8689 *
DESAI T A ET AL: "Characterization of micromachined silicon membranes for immunoisolation and bioseparation applications", JOURNAL OF MEMBRANE SCIENCE, ELSEVIER SCIENCE, AMSTERDAM, NL, vol. 159, no. 1-2, 1 July 1999 (1999-07-01), pages 221 - 231, XP004169176, ISSN: 0376-7388 *
DESAI T A ET AL: "Micromachined interfaces: new approaches in cell immunoisolation and biomolecular separation", BIOMOLECULAR ENGINEERING, ELSEVIER, NEW YORK, NY, US, vol. 17, no. 1, October 2000 (2000-10-01), pages 23 - 36, XP004257822, ISSN: 1389-0344 *
See also references of WO0136321A1 *

Also Published As

Publication number Publication date
JP2003514677A (en) 2003-04-22
EP1233927A1 (en) 2002-08-28
WO2001036321A9 (en) 2002-07-04
AU1778101A (en) 2001-05-30
WO2001036321A1 (en) 2001-05-25

Similar Documents

Publication Publication Date Title
EP1233927A4 (en) Apparatus and method for forming a membrane with nanometer scale pores
AU2823900A (en) Apparatus and method for three dimensional printing
AU2001286569A1 (en) Method and apparatus for in situ synthesis on a solid support
EP1151387A4 (en) Apparatus and method for topography dependent signaling
WO2002022264A8 (en) Method and apparatus for gradient generation
AU2002213024A1 (en) Apparatus and method for providing a suspended agent
AU2001241524A1 (en) Method and apparatus for a three-dimensional web-navigator
EP1284915A4 (en) Method and apparatus for unwinding web materials
AU2001277270A1 (en) Method and apparatus for a morphology-preserving smoothing
HK1048620A1 (en) Printing apparatus and printing method
AU5899099A (en) Porous structures and methods and apparatus for forming porous structures
AU2001249638A1 (en) Apparatus and method for weighing the occupant of a bed
AU8161901A (en) Apparatus and method for producing porous polymer particles
HK1034927A1 (en) Process and apparatus for producing a laminate
HUP0302626A3 (en) Method for producing a coating on porous and/or absorbent materials
AU2001268510A1 (en) Process and apparatus for making polymeric membranes
HK1040678A1 (en) Printing method and apparatus and label-producing method and apparatus
EP1167920A4 (en) Apparatus and method for measuring displacement
AU2002231322A1 (en) Method and apparatus for a photo-activated transponder
AU2002231335A1 (en) Method and apparatus for communicating with a peripheral modem
GB2363133B (en) A method and apparatus for forming foundations
AU2001235407A1 (en) Method for producing a marking device and apparatus for carrying out said method
GB2347965B (en) Template and method for use thereof
AU5637401A (en) A process and an apparatus for forming a web
AU2001255739A1 (en) Method and apparatus for manufacturing composite sheet-like materials

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20020614

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR

AX Request for extension of the european patent

Free format text: AL;LT;LV;MK;RO;SI

A4 Supplementary search report drawn up and despatched

Effective date: 20021127

AK Designated contracting states

Kind code of ref document: A4

Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR

RIC1 Information provided on ipc code assigned before grant

Free format text: 7B 81C 1/00 A, 7B 82B 1/00 B, 7B 82B 3/00 B, 7B 01D 63/00 B, 7B 01D 71/02 B, 7B 01J 29/06 B, 7C 01B 37/00 B, 7B 01D 67/00 B

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION HAS BEEN WITHDRAWN

18W Application withdrawn

Effective date: 20030203