EP1148402A4 - Semiconductor manufacturing apparatus and method for controlling the operating condition parameter - Google Patents

Semiconductor manufacturing apparatus and method for controlling the operating condition parameter

Info

Publication number
EP1148402A4
EP1148402A4 EP00953556A EP00953556A EP1148402A4 EP 1148402 A4 EP1148402 A4 EP 1148402A4 EP 00953556 A EP00953556 A EP 00953556A EP 00953556 A EP00953556 A EP 00953556A EP 1148402 A4 EP1148402 A4 EP 1148402A4
Authority
EP
European Patent Office
Prior art keywords
controlling
manufacturing apparatus
operating condition
semiconductor manufacturing
condition parameter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP00953556A
Other languages
German (de)
French (fr)
Other versions
EP1148402A1 (en
Inventor
Masaya Nagata
Masahiro Sugawara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Publication of EP1148402A1 publication Critical patent/EP1148402A1/en
Publication of EP1148402A4 publication Critical patent/EP1148402A4/en
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67276—Production flow monitoring, e.g. for increasing throughput
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM]
    • G05B19/41835—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM] characterised by programme execution
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM]
    • G05B19/41845—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM] characterised by system universality, reconfigurability, modularity
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/36—Nc in input of data, input key till input tape
    • G05B2219/36088—Machining parameters, overide
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/36—Nc in input of data, input key till input tape
    • G05B2219/36089—Machining parameters, modification during operation
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/36—Nc in input of data, input key till input tape
    • G05B2219/36271—Enter, edit workpiece data
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/45—Nc applications
    • G05B2219/45026—Circuit board, pcb
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/45—Nc applications
    • G05B2219/45031—Manufacturing semiconductor wafers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
EP00953556A 1999-09-01 2000-08-22 Semiconductor manufacturing apparatus and method for controlling the operating condition parameter Withdrawn EP1148402A4 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP24746499A JP4545252B2 (en) 1999-09-01 1999-09-01 Semiconductor manufacturing equipment
JP24746499 1999-09-01
PCT/JP2000/005611 WO2001016659A1 (en) 1999-09-01 2000-08-22 Semiconductor manufacturing apparatus and method for controlling the operating condition parameter

Publications (2)

Publication Number Publication Date
EP1148402A1 EP1148402A1 (en) 2001-10-24
EP1148402A4 true EP1148402A4 (en) 2002-08-14

Family

ID=17163847

Family Applications (1)

Application Number Title Priority Date Filing Date
EP00953556A Withdrawn EP1148402A4 (en) 1999-09-01 2000-08-22 Semiconductor manufacturing apparatus and method for controlling the operating condition parameter

Country Status (6)

Country Link
US (1) US6514345B1 (en)
EP (1) EP1148402A4 (en)
JP (1) JP4545252B2 (en)
KR (1) KR100453777B1 (en)
TW (1) TW530428B (en)
WO (1) WO2001016659A1 (en)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002252161A (en) * 2001-02-23 2002-09-06 Hitachi Ltd Semiconductor manufacturing system
KR100395697B1 (en) * 2001-04-07 2003-08-25 (주)지우텍 Method for controling parameter using a process of semiconductor production
JP4126189B2 (en) * 2002-04-10 2008-07-30 株式会社日立ハイテクノロジーズ Inspection condition setting program, inspection apparatus and inspection system
JP4277100B2 (en) * 2002-11-14 2009-06-10 東京エレクトロン株式会社 Reference position correction apparatus and reference position correction method for transport mechanism
US7162317B2 (en) * 2005-02-25 2007-01-09 Lam Research Corporation Methods and apparatus for configuring plasma cluster tools
US7353379B2 (en) * 2005-02-25 2008-04-01 Lam Research Corporation Methods for configuring a plasma cluster tool
CN100585607C (en) * 2005-02-25 2010-01-27 朗姆研究公司 Methods for configuring plasma cluster tools
US7536538B1 (en) 2005-03-31 2009-05-19 Lam Research Corporation Cluster tools for processing substrates using at least a key file
JP4841183B2 (en) * 2005-06-28 2011-12-21 東京エレクトロン株式会社 Substrate processing apparatus, transfer apparatus, and control method of transfer apparatus
KR101057530B1 (en) * 2005-12-20 2011-08-17 어플라이드 머티어리얼스, 인코포레이티드 Enlarged Body for Semiconductor Device Manufacturing Equipment
JP5091413B2 (en) * 2006-03-08 2012-12-05 東京エレクトロン株式会社 Substrate processing apparatus and method for controlling substrate processing apparatus
JP4697896B2 (en) * 2007-03-24 2011-06-08 東京エレクトロン株式会社 Semiconductor manufacturing apparatus, apparatus operating parameter management method, and program
WO2010119808A1 (en) * 2009-04-15 2010-10-21 シャープ株式会社 Method and system for manufacturing product
JP6111980B2 (en) * 2013-10-29 2017-04-12 株式会社安川電機 Industrial equipment management system, industrial equipment management server, industrial equipment management method, program, and information storage medium
JP6806601B2 (en) * 2017-03-17 2021-01-06 アズビル株式会社 Device information management system

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4951190A (en) * 1985-04-30 1990-08-21 Prometrix Corporation Multilevel menu and hierarchy for selecting items and performing tasks thereon in a computer system
US4967381A (en) * 1985-04-30 1990-10-30 Prometrix Corporation Process control interface system for managing measurement data
US5469361A (en) * 1991-08-08 1995-11-21 The Board Of Regents Acting For And On Behalf Of The University Of Michigan Generic cell controlling method and apparatus for computer integrated manufacturing system
EP0877308A2 (en) * 1997-05-06 1998-11-11 Tokyo Electron Limited Control apparatus and control method

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5844784A (en) * 1981-09-11 1983-03-15 Nippon Sekigaisen Kogyo Kk Laser device
JPH06222819A (en) * 1993-01-26 1994-08-12 Fanuc Ltd Machining program executing method for nc device
JPH08129407A (en) * 1994-10-28 1996-05-21 Tokyo Electron Ltd Controller, and program loading method for the controller, and processing equipment
JPH08161013A (en) * 1994-12-09 1996-06-21 Canon Inc Device and method for device manufacture
JPH0962323A (en) * 1995-08-24 1997-03-07 Mitsubishi Electric Corp Numerical controller and its system parameter setting method
US5838565A (en) 1997-05-15 1998-11-17 Vanguard International Semiconductor Corporation Manufacturing control method for IC plant batch sequential machine
JPH113117A (en) * 1997-06-10 1999-01-06 Dainippon Screen Mfg Co Ltd Alarm device for processing system

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4951190A (en) * 1985-04-30 1990-08-21 Prometrix Corporation Multilevel menu and hierarchy for selecting items and performing tasks thereon in a computer system
US4967381A (en) * 1985-04-30 1990-10-30 Prometrix Corporation Process control interface system for managing measurement data
US5469361A (en) * 1991-08-08 1995-11-21 The Board Of Regents Acting For And On Behalf Of The University Of Michigan Generic cell controlling method and apparatus for computer integrated manufacturing system
EP0877308A2 (en) * 1997-05-06 1998-11-11 Tokyo Electron Limited Control apparatus and control method

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO0116659A1 *

Also Published As

Publication number Publication date
TW530428B (en) 2003-05-01
EP1148402A1 (en) 2001-10-24
KR100453777B1 (en) 2004-10-20
US6514345B1 (en) 2003-02-04
JP2001075628A (en) 2001-03-23
WO2001016659A1 (en) 2001-03-08
KR20010080917A (en) 2001-08-25
JP4545252B2 (en) 2010-09-15

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