EP1122030A3 - Abrasive tool - Google Patents

Abrasive tool Download PDF

Info

Publication number
EP1122030A3
EP1122030A3 EP01101689A EP01101689A EP1122030A3 EP 1122030 A3 EP1122030 A3 EP 1122030A3 EP 01101689 A EP01101689 A EP 01101689A EP 01101689 A EP01101689 A EP 01101689A EP 1122030 A3 EP1122030 A3 EP 1122030A3
Authority
EP
European Patent Office
Prior art keywords
abrasive
grain
parts
ultra
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP01101689A
Other languages
German (de)
French (fr)
Other versions
EP1122030A2 (en
EP1122030B1 (en
Inventor
Tsutomu Mitsubishi Materials Corp. Takahashi
Naoki Mitsubishi Materials Corp. Shimomae
Tetsuji Mitsubishi Materials Corp. Yamashita
Hanako Mitsubishi Materials Corp. Hata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Materials Corp
Original Assignee
Mitsubishi Materials Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Materials Corp filed Critical Mitsubishi Materials Corp
Priority to EP04024424A priority Critical patent/EP1500469A1/en
Publication of EP1122030A2 publication Critical patent/EP1122030A2/en
Publication of EP1122030A3 publication Critical patent/EP1122030A3/en
Application granted granted Critical
Publication of EP1122030B1 publication Critical patent/EP1122030B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/017—Devices or means for dressing, cleaning or otherwise conditioning lapping tools
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/04—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic
    • B24D3/06—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic metallic or mixture of metals with ceramic materials, e.g. hard metals, "cermets", cements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/12—Dressing tools; Holders therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
    • B24D18/0018—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for by electrolytic deposition
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D7/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor
    • B24D7/06—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor with inserted abrasive blocks, e.g. segmental

Abstract

In the electrodeposited abrasive wheel 20 of the abrasive tool according to the present invention, plural mound parts 21, which are upheaved at the central domain of base metal 19 in almost columnar shape, are arranged mostly in the shape of lattice.
An abrasive grain layer 22 is formed on a base metal 19, and plural ultra abrasive grains 14 are adhered only to each mound parts 21 by electrodeposited metal phase 25, and referred as the small abrasive-grain-layer parts 24, respectively.
Ultra abrasive grains are laid out at corner R part 21a and top 21b of the mound parts 21 at the small abrasive-grain-layer parts 24.
Ultra abrasive grains at each small abrasive-grain-layer parts are set as 11-500 pieces, and the rate which ultra abrasive grains occupy to the whole area of abrasive grain layer accounted by plane projection is set as 20% - 80% of the range.
At the time of grinding, only ultra abrasive grains contact to grinding work piece, then high abutment pressure is maintained, and sharpness and the discharge performance of ground wastes are good.
EP01101689A 2000-02-07 2001-01-30 Abrasive tool Expired - Lifetime EP1122030B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP04024424A EP1500469A1 (en) 2000-02-07 2001-01-30 Abrasive tool

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2000029614A JP2001219376A (en) 2000-02-07 2000-02-07 Electrodeposition grinding wheel
JP2000029614 2000-02-07

Related Child Applications (1)

Application Number Title Priority Date Filing Date
EP04024424A Division EP1500469A1 (en) 2000-02-07 2001-01-30 Abrasive tool

Publications (3)

Publication Number Publication Date
EP1122030A2 EP1122030A2 (en) 2001-08-08
EP1122030A3 true EP1122030A3 (en) 2003-12-10
EP1122030B1 EP1122030B1 (en) 2006-06-28

Family

ID=18554846

Family Applications (2)

Application Number Title Priority Date Filing Date
EP01101689A Expired - Lifetime EP1122030B1 (en) 2000-02-07 2001-01-30 Abrasive tool
EP04024424A Withdrawn EP1500469A1 (en) 2000-02-07 2001-01-30 Abrasive tool

Family Applications After (1)

Application Number Title Priority Date Filing Date
EP04024424A Withdrawn EP1500469A1 (en) 2000-02-07 2001-01-30 Abrasive tool

Country Status (6)

Country Link
EP (2) EP1122030B1 (en)
JP (1) JP2001219376A (en)
KR (1) KR100749385B1 (en)
AT (1) ATE331591T1 (en)
DE (1) DE60121070T2 (en)
HK (1) HK1039296A1 (en)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6669745B2 (en) 2001-02-21 2003-12-30 3M Innovative Properties Company Abrasive article with optimally oriented abrasive particles and method of making the same
TWI238753B (en) 2002-12-19 2005-09-01 Miyanaga Kk Diamond disk for grinding
JP2005015868A (en) * 2003-06-27 2005-01-20 Yuichiro Niizaki Metallic clay material, and bristle material, shank, disk-shaped grindstone and burr-removing holder formed of the metallic clay material
US20060276111A1 (en) * 2005-06-02 2006-12-07 Applied Materials, Inc. Conditioning element for electrochemical mechanical processing
JP4896114B2 (en) * 2008-11-20 2012-03-14 株式会社ノリタケカンパニーリミテド Electrodeposition tool manufacturing method
KR101250471B1 (en) 2011-03-18 2013-04-24 (주)인성다이아몬드 The grinding disk and its method
CN103551999A (en) * 2013-11-08 2014-02-05 谢泽 Method for producing coated abrasive tool on the basis of fiber ropes
CN103552002A (en) * 2013-11-08 2014-02-05 谢泽 Polishing wheel based on fiber adhesive rope coated abrasive tool
JPWO2015194278A1 (en) * 2014-06-17 2017-04-20 バンドー化学株式会社 Polishing pad and polishing pad manufacturing method
EP3319757B1 (en) * 2015-07-08 2020-09-02 3M Innovative Properties Company Systems and methods for making abrasive articles
JP7315332B2 (en) * 2019-01-31 2023-07-26 株式会社荏原製作所 Surface height measurement method using dummy disk and dummy disk

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06114743A (en) * 1992-04-30 1994-04-26 Osaka Diamond Ind Co Ltd Electrodeposition grinding wheel
JPH0919868A (en) * 1995-07-07 1997-01-21 Asahi Daiyamondo Kogyo Kk Electrodeposition wheel and its manufacture
JPH1177535A (en) * 1997-09-09 1999-03-23 Asahi Diamond Ind Co Ltd Conditioner and its manufacture
US5989405A (en) * 1996-06-28 1999-11-23 Asahi Diamond Industrial Co., Ltd. Process for producing a dresser
US6001008A (en) * 1998-04-22 1999-12-14 Fujimori Technology Laboratory Inc. Abrasive dresser for polishing disc of chemical-mechanical polisher
US6004196A (en) * 1998-02-27 1999-12-21 Micron Technology, Inc. Polishing pad refurbisher for in situ, real-time conditioning and cleaning of a polishing pad used in chemical-mechanical polishing of microelectronic substrates

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06114743A (en) * 1992-04-30 1994-04-26 Osaka Diamond Ind Co Ltd Electrodeposition grinding wheel
JPH0919868A (en) * 1995-07-07 1997-01-21 Asahi Daiyamondo Kogyo Kk Electrodeposition wheel and its manufacture
US5989405A (en) * 1996-06-28 1999-11-23 Asahi Diamond Industrial Co., Ltd. Process for producing a dresser
JPH1177535A (en) * 1997-09-09 1999-03-23 Asahi Diamond Ind Co Ltd Conditioner and its manufacture
US6004196A (en) * 1998-02-27 1999-12-21 Micron Technology, Inc. Polishing pad refurbisher for in situ, real-time conditioning and cleaning of a polishing pad used in chemical-mechanical polishing of microelectronic substrates
US6001008A (en) * 1998-04-22 1999-12-14 Fujimori Technology Laboratory Inc. Abrasive dresser for polishing disc of chemical-mechanical polisher

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 018, no. 396 (M - 1644) 25 July 1994 (1994-07-25) *
PATENT ABSTRACTS OF JAPAN vol. 1997, no. 05 30 May 1997 (1997-05-30) *
PATENT ABSTRACTS OF JAPAN vol. 1999, no. 08 30 June 1999 (1999-06-30) *

Also Published As

Publication number Publication date
EP1500469A1 (en) 2005-01-26
JP2001219376A (en) 2001-08-14
KR100749385B1 (en) 2007-08-14
DE60121070T2 (en) 2007-06-06
HK1039296A1 (en) 2002-04-19
ATE331591T1 (en) 2006-07-15
KR20010078363A (en) 2001-08-20
DE60121070D1 (en) 2006-08-10
EP1122030A2 (en) 2001-08-08
EP1122030B1 (en) 2006-06-28

Similar Documents

Publication Publication Date Title
EP1122030A3 (en) Abrasive tool
GB2428243A (en) Brazed diamond dressing tool
EP1120196A3 (en) Electroplated grinding wheel and its production equipment
EP1112815A3 (en) Grinding stone, process for its production and grinding method employing it
EP1055486A3 (en) Dressing apparatus and polishing apparatus
IN2014MN01903A (en)
KR20020020724A (en) Grinding stone
US3869263A (en) Abrasive member
ZA200803185B (en) Abrasive particulate material, and method of planarizing a workpiece using the abrasive particular material
CN102639298B (en) Rotary grinding tool and manufacture method thereof
WO2012031251A3 (en) Bonded abrasive articles, method of forming such articles, and grinding performance of such articles
DE60103123D1 (en) GRINDING SPINDLE FOR GRINDING MACHINES WITH SECTIONS OF RESIN-BORN COARSE AND FINE GRAIN
EP1170088A3 (en) Semiconductor wafer grinding method and machine
MY141458A (en) Method and apparatus for grinding a workpieces
AU2003279556A1 (en) Cutting machine with a sharpening unit for a blade, sharpening method and blade for said machine
EP1066927A3 (en) Metal-bonded grinding tool and manufacturing method therefor
EP1656915A3 (en) Adhesive dressing
JP3009565B2 (en) Grinding tool
DK1348519T3 (en) Cutting tool for solid solving
AU2001247271A1 (en) Method and apparatus for shaping edges
MY120614A (en) Method of machining rare earth alloy and method of fabricating rare earth magnet using the same
EP1376666A3 (en) Method of machining silicon wafer
EP1252975A3 (en) Electro-deposited thin-blade grindstone
CN206550879U (en) A kind of high emery grinding wheel piece of support strength
JPH11165262A (en) Cup shaped grinding wheel

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

AK Designated contracting states

Kind code of ref document: A2

Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR

AX Request for extension of the european patent

Free format text: AL;LT;LV;MK;RO;SI

PUAL Search report despatched

Free format text: ORIGINAL CODE: 0009013

RIC1 Information provided on ipc code assigned before grant

Ipc: 7B 24D 3/06 A

Ipc: 7B 24D 18/00 B

Ipc: 7B 24B 53/12 B

Ipc: 7B 24B 37/04 B

Ipc: 7B 24D 7/00 B

AK Designated contracting states

Kind code of ref document: A3

Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR

AX Request for extension of the european patent

Extension state: AL LT LV MK RO SI

17P Request for examination filed

Effective date: 20040205

AKX Designation fees paid

Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR

17Q First examination report despatched

Effective date: 20040806

GRAP Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOSNIGR1

GRAS Grant fee paid

Free format text: ORIGINAL CODE: EPIDOSNIGR3

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT;WARNING: LAPSES OF ITALIAN PATENTS WITH EFFECTIVE DATE BEFORE 2007 MAY HAVE OCCURRED AT ANY TIME BEFORE 2007. THE CORRECT EFFECTIVE DATE MAY BE DIFFERENT FROM THE ONE RECORDED.

Effective date: 20060628

Ref country code: NL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20060628

Ref country code: CH

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20060628

Ref country code: BE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20060628

Ref country code: AT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20060628

Ref country code: FI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20060628

Ref country code: LI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20060628

REG Reference to a national code

Ref country code: GB

Ref legal event code: FG4D

REG Reference to a national code

Ref country code: CH

Ref legal event code: EP

REG Reference to a national code

Ref country code: IE

Ref legal event code: FG4D

REF Corresponds to:

Ref document number: 60121070

Country of ref document: DE

Date of ref document: 20060810

Kind code of ref document: P

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20060928

Ref country code: DK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20060928

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: ES

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20061009

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: PT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20061128

NLV1 Nl: lapsed or annulled due to failure to fulfill the requirements of art. 29p and 29m of the patents act
REG Reference to a national code

Ref country code: CH

Ref legal event code: PL

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MC

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20070131

PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

EN Fr: translation not filed
26N No opposition filed

Effective date: 20070329

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20060929

Ref country code: FR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20070511

REG Reference to a national code

Ref country code: HK

Ref legal event code: WD

Ref document number: 1039296

Country of ref document: HK

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: FR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20060628

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 20090122

Year of fee payment: 9

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: CY

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20060628

Ref country code: LU

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20070130

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: IT

Payment date: 20090128

Year of fee payment: 9

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: TR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20060628

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: DE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20100803

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IT

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20100130

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: IE

Payment date: 20170123

Year of fee payment: 17

REG Reference to a national code

Ref country code: IE

Ref legal event code: MM4A

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20180130

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: GB

Payment date: 20200123

Year of fee payment: 20

REG Reference to a national code

Ref country code: GB

Ref legal event code: PE20

Expiry date: 20210129

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GB

Free format text: LAPSE BECAUSE OF EXPIRATION OF PROTECTION

Effective date: 20210129