EP1075079A1 - Piezoelectric actuator, time piece, and portable device - Google Patents
Piezoelectric actuator, time piece, and portable device Download PDFInfo
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- EP1075079A1 EP1075079A1 EP99943216A EP99943216A EP1075079A1 EP 1075079 A1 EP1075079 A1 EP 1075079A1 EP 99943216 A EP99943216 A EP 99943216A EP 99943216 A EP99943216 A EP 99943216A EP 1075079 A1 EP1075079 A1 EP 1075079A1
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- vibrating plate
- rotor
- vibration
- piezoelectric actuator
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/202—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement
- H10N30/2023—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement having polygonal or rectangular shape
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
- H02N2/001—Driving devices, e.g. vibrators
- H02N2/003—Driving devices, e.g. vibrators using longitudinal or radial modes combined with bending modes
- H02N2/004—Rectangular vibrators
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/103—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors by pressing one or more vibrators against the rotor
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- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
- Electromechanical Clocks (AREA)
- Apparatuses For Generation Of Mechanical Vibrations (AREA)
Abstract
Description
- The present invention relates to a piezoelectric actuator, and to a timepiece and a portable device including the piezoelectric actuator.
- Since piezoelectric elements have excellent responsiveness and conversion efficiency from electrical energy to mechanical energy, various types of piezoelectric actuators utilizing the piezoelectric effect of piezoelectric elements have been developed in recent years. The piezoelectric actuators have been applied to the fields of piezoelectric buzzers, ink-jet heads of printers, and ultrasonic motors.
- Fig. 61 is a plan view schematically showing an ultrasonic motor using a conventional piezoelectric actuator. As shown in the figure, the ultrasonic motor of this type is called a poking type in which a rotor surface is slightly inclined and brought into contact with a tip of a vibrating piece connected to a piezoelectric element. In such a construction, when the piezoelectric element is expanded and contracted by an alternating voltage from an oscillator, and the vibrating piece reciprocates in a longitudinal direction, a force component is generated in a circumferential direction of the rotor and the rotor is rotated.
- In addition, a technique has been known in which two ultrasonic vibrators (piezoelectric elements) are included, the ultrasonic vibrators vibrate with their own electrical resonance frequencies, and a vibrating piece is displaced by the vibration (Japanese Unexamined Application Publication No. 10-25151).
- However, while the displacement of the piezoelectric element depends on the applied voltage, it is very small, usually about sub-micron, and this also applies to a case where the piezoelectric element vibrates with the above-described resonance frequency. For this reason, the displacement is amplified by a certain amplification mechanism, and is transmitted to the rotor. When the amplification mechanism is used, however, energy is consumed to operate the amplification mechanism, efficiency is lowered, and the size of an apparatus increases. In addition, when the amplification mechanism is used, it may be difficult to stably transmit a driving force to the rotor.
- In addition, since a small portable device, such as a wristwatch, is driven by a battery, it is necessary to lower the power consumption and the drive voltage. Therefore, when a piezoelectric actuator is incorporated into such a portable device, it is particularly required that the energy efficiency be high and the drive voltage be low.
- Incidentally, in a calendar display mechanism for displaying the date, the day, and so forth in a timepiece or the like, it is common for the rotational driving force from an electromagnetic stepping motor to be intermittently transmitted to a date indicator or the like via a watch-hand-driving wheel train so as to advance the date indicator or the like. On the other hand, since the wristwatch is carried by being strapped on a wrist, a reduction in thickness for convenience of carrying has long been demanded. In order to pursue the reduction in thickness, it is also necessary to reduce the thickness of the calendar display mechanism. However, since the stepping motor is constructed by incorporating parts, such as a coil and a rotor, thereinto in an out-of-plane direction, the reduction in thickness of the calendar display mechanism is limited. For this reason, there is a problem in that the conventional calendar mechanism using the stepping motor is not structurally suited for reducing the thickness.
- In particular, in order to share a mechanical system (a so-called movement) between a timepiece with a calendar display mechanism and a timepiece without such a display mechanism, it is necessary to construct the calendar display mechanism on the side of a dial. However, it is difficult for an electromagnetic stepping motor to achieve a reduction in thickness to such an extent that the calendar mechanism can be constructed on the side of the dial. Therefore, it is necessary for a conventional timepiece to be manufactured by separately designing watch-hand-driving mechanical systems according to whether there is a display mechanism, and this becomes a problem when improving the productivity thereof.
- The present invention is made in consideration of the foregoing circumstances, and an object is to provide a piezoelectric actuator that facilitates a reduction in size by simplifying conductive construction, and to provide a timepiece and a portable device including the same. In addition, it is an object to provide a piezoelectric actuator that is able to efficiently transmit vibrations of a piezoelectric element, that is suited for a reduction in size and thickness, and that is able to stably transmit a driving force, and to provide a timepiece and a portable device including the same.
- According to the present invention, there is provided a piezoelectric actuator comprising: a base frame; a vibrating plate in which a longitudinal plate-like piezoelectric element and a reinforcing portion are stacked; and a support member, which is an elastic member, having a fixing portion fixed to the base frame and a mounting portion mounted on the vibrating plate, and which provides an elastic force to the vibrating plate so that a longitudinal end of the vibrating plate abuts against an object to be driven; wherein, when the piezoelectric element vibrates in the longitudinal direction of the vibrating plate, the vibrating plate is vibrated by the vibration, and the object to be driven is driven in one direction in accordance with the displacement of the vibrating plate due to the vibration.
- In another form of the present invention, there is provided a piezoelectric actuator comprising: a base frame; a vibrating plate in which a longitudinal plate-like piezoelectric element and a reinforcing portion are stacked; a support member having a fixing portion fixed to the base frame and a mounting portion mounted on the vibrating plate, and supporting the vibrating plate on the base frame; and an elastic member for providing an elastic force to the vibrating plate so that the longitudinal end of the vibrating plate abuts against an object to be driven; wherein, when the piezoelectric element vibrates in the longitudinal direction of the vibrating plate, the vibrating plate is vibrated by the vibration, and the object to be driven is driven in one direction in accordance with the displacement of the vibrating plate due to the vibration.
- In another form of the present invention, there is provided a piezoelectric actuator comprising: a base frame; a vibrating plate in which a longitudinal plate-like piezoelectric element and a reinforcing portion are stacked; a rotor having front and back surfaces, and rotationally supported on the base frame in the direction perpendicular to the front and back surfaces as the direction of a rotation axis; and a support member, which is an elastic member, having a fixing portion fixed to the base frame and a mounting portion mounted on the vibrating plate, and which provides an elastic force to the vibrating plate so that a longitudinal end of the vibrating plate abuts against the front surface or the back surface of the rotor; wherein, when the piezoelectric element vibrates in the longitudinal direction of the vibrating plate, the vibrating plate is vibrated by the vibration, and the rotor is driven in one direction in accordance with the displacement of the vibrating plate due to the vibration.
- In another form of the present invention, there is provided a piezoelectric actuator comprising: a base frame; a vibrating plate in which a longitudinal plate-like piezoelectric element and a reinforcing portion are stacked; a rotor having front and back surfaces, and rotationally supported on the base frame in the direction perpendicular to the front and back surfaces as the direction of a rotation axis; a support member having a fixing portion fixed to the base frame and a mounting portion mounted on the vibrating plate, and supporting the vibrating plate on the base frame; and an elastic member for providing an elastic force to the vibrating plate so that the longitudinal end of the vibrating plate abuts against the front surface or the back surface of the rotor; wherein, when the piezoelectric element vibrates in the longitudinal direction of the vibrating plate, the vibrating plate is vibrated by the vibration, and the rotor is driven in one direction in accordance with the displacement of the vibrating plate due to the vibration.
- In another form of the present invention, there is provided a piezoelectric actuator comprising: a base frame; a vibrating plate in which a longitudinal plate-like piezoelectric element and a reinforcing portion are stacked; a rotor having an outer peripheral surface, and rotationally supported on the base frame; and a support member, which is an elastic member, having a fixing portion fixed to the base frame and a mounting portion mounted on the vibrating plate, and which provides an elastic force to the vibrating plate so that a longitudinal end of the vibrating plate abuts against the outer peripheral surface of the rotor; wherein, when the piezoelectric element vibrates in the longitudinal direction of the vibrating plate, the vibrating plate is vibrated by the vibration, and the rotor is driven in one direction in accordance with the displacement of the vibrating plate due to the vibration.
- In another form of the present invention, there is provided a piezoelectric actuator comprising: a base frame; a vibrating plate in which a longitudinal plate-like piezoelectric element and a reinforcing portion are stacked; a rotor having an outer peripheral surface, and rotationally supported on the base frame; a support member having a fixing portion fixed to the base frame and a mounting portion mounted on the vibrating plate, and supporting the vibrating plate on the base frame; and an elastic member for providing an elastic force to the vibrating plate so that the longitudinal end of the vibrating plate abuts against the outer peripheral surface of the rotor; wherein, when the piezoelectric element vibrates in the longitudinal direction of the vibrating plate, the vibrating plate is vibrated by the vibration, and the rotor is driven in one direction in accordance with the displacement of the vibrating plate due to the vibration.
- In another form of the present invention, there is provided a piezoelectric actuator comprising: a base frame; a vibrating plate in which a longitudinal plate-like piezoelectric element and a reinforcing portion are stacked; a rotor having an outer peripheral surface, rotationally supported on the base frame, a rotating shaft thereof being movable; a support member having a fixing portion fixed to the base frame and a mounting portion mounted on the vibrating plate, and supporting the vibrating plate on the base frame; and an elastic member for providing an elastic force to the rotor so that the outer peripheral surface of the rotor abuts against the longitudinal end of the vibrating plate; wherein, when the piezoelectric element vibrates in the longitudinal direction of the vibrating plate, the vibrating plate is vibrated by the vibration, and the rotor is driven in one direction in accordance with the displacement of the vibrating plate due to the vibration.
- In another form of the present invention, there is provided a piezoelectric actuator comprising: a base frame; a vibrating plate in which a longitudinal plate-like piezoelectric element and a reinforcing portion are stacked; a rotor having an outer peripheral surface, and rotationally supported on the base frame; and a support member having a fixing portion fixed to the base frame and a mounting portion mounted on the vibrating plate, and supporting the vibrating plate on the base frame; wherein the rotor is formed of an elastic body arranged on a position where the outer peripheral surface thereof abuts against the longitudinal end of the vibrating plate, and presses the outer peripheral surface against the end of the vibrating plate by the elastic force thereof; and wherein, when the piezoelectric element vibrates in the longitudinal direction of the vibrating plate, the vibrating plate is vibrated by the vibration, and the rotor is driven in one direction in accordance with the displacement of the vibrating plate due to the vibration.
- In another form of the present invention, there is provided a piezoelectric actuator comprising: a base frame; a vibrating plate in which a longitudinal plate-like piezoelectric element and a reinforcing portion are stacked; a selection means for selecting either a longitudinal vibration for vibrating the vibrating plate in the longitudinal direction within a plane to which the vibrating plate belongs, or a bending vibration for vibrating the vibrating plate in the widthwise direction perpendicular to the longitudinal direction within the plane; and a support member, which is an elastic member, having a fixing portion fixed to the base frame and a mounting portion mounted on the vibrating plate, and which provides an elastic force to the vibrating plate so that a longitudinal end of the vibrating plate abuts against an object to be driven; wherein, when the longitudinal vibration is selected by the selection means, the vibrating plate causes the longitudinal vibration, whereby the object to be driven is driven in one direction in accordance with the displacement of the vibrating plate due to the vibration, and wherein, when the bending vibration is selected by the selection means, the vibrating plate causes the bending vibration, whereby the object to be driven is driven in the direction opposite to the direction during the longitudinal vibration in accordance with the displacement of the vibrating plate due to the vibration.
- In another form of the present invention, there is provided a piezoelectric actuator comprising: a base frame; a vibrating plate in which a longitudinal plate-like piezoelectric element and a reinforcing portion are stacked; a selection means for selecting either a longitudinal vibration for vibrating the vibrating plate in the longitudinal direction within a plane to which the vibrating plate belongs, or a bending vibration for vibrating the vibrating plate in the widthwise direction perpendicular to the longitudinal direction within the plane; a support member having a fixing portion fixed to the base frame and mounting portion mounted on the vibrating plate, and supporting the vibrating plate on the base frame; and an elastic member for providing an elastic force to the vibrating plate so that a longitudinal end of the vibrating plate abuts against an object to be driven; wherein, when the longitudinal vibration is selected by the selection means, the vibrating plate causes the longitudinal vibration, whereby the object to be driven is driven in one direction in accordance with the displacement of the vibrating plate due to the vibration, and wherein, when the bending vibration is selected by the selection means, the vibrating plate causes the bending vibration, whereby the object to be driven is driven in the direction opposite to the direction during the longitudinal vibration in accordance with the displacement of the vibrating plate due to the vibration.
- In another form of the present invention, there is provided a piezoelectric actuator comprising: a base frame; a vibrating plate in which a longitudinal plate-like piezoelectric element and a reinforcing portion are stacked; a rotor having front and back surfaces, and rotationally supported on the base frame in the direction perpendicular to the front and back surfaces as the direction of a rotation axis; a selection means for selecting either a longitudinal vibration for vibrating the vibrating plate in the longitudinal direction within a plane to which the vibrating plate belongs, or a bending vibration for vibrating the vibrating plate in the out-of-plane direction; and a support member, which is an elastic member, having a fixing portion fixed to the base frame and a mounting portion mounted on the vibrating plate, and which provides an elastic force to the vibrating plate so that a longitudinal end of the vibrating plate abuts against the front surface or the back surface of the rotor; wherein, when the longitudinal vibration is selected by the selection means, the vibrating plate causes the longitudinal vibration, whereby the rotor is rotationally driven in one direction in accordance with the displacement of the vibrating plate due to the vibration, and wherein, when the bending vibration is selected by the selection means, the vibrating plate causes the bending vibration, whereby the rotor is rotationally driven in the direction opposite to the direction during the longitudinal vibration in accordance with the displacement of the vibrating plate due to the vibration.
- In another form of the present invention, there is provided a piezoelectric actuator comprising: a base frame; a vibrating plate in which a longitudinal plate-like piezoelectric element and a reinforcing portion are stacked; a rotor having front and back surfaces, and rotationally supported on the base frame in the direction perpendicular to the front and back surfaces as the direction of a rotation axis; a selection means for selecting either a longitudinal vibration for vibrating the vibrating plate in the longitudinal direction within a plane to which the vibrating plate belongs, or a bending vibration for vibrating the vibrating plate in the out-of-plane direction; a support member having a fixing portion fixed to the base frame and a mounting portion mounted on the vibrating plate, and supporting the vibrating plate on the base frame; and an elastic member for providing an elastic force to the vibrating plate so that a longitudinal end of the vibrating plate abuts against the front surface or the back surface of the rotor; wherein, when the longitudinal vibration is selected by the selection means, the vibrating plate causes the longitudinal vibration, whereby the rotor is rotationally driven in one direction in accordance with the displacement of the vibrating plate due to the vibration, and wherein, when the bending vibration is selected by the selection means, the vibrating plate causes the bending vibration, whereby the rotor is rotationally driven in the direction opposite to the direction during the longitudinal vibration in accordance with the displacement of the vibrating plate due to the vibration.
- In another form of the present invention, there is provided a piezoelectric actuator comprising: a base frame; a vibrating plate in which a longitudinal plate-like piezoelectric element and a reinforcing portion are stacked; a rotor having an outer peripheral surface, and rotationally supported on the base frame; a selection means for selecting either a longitudinal vibration for vibrating the vibrating plate in the longitudinal direction within a plane to which the vibrating plate belongs, or a bending vibration for vibrating the vibrating plate in the widthwise direction perpendicular to the longitudinal direction within the plane; and a support member, which is an elastic member having a fixing portion fixed to the base frame and a mounting portion mounted on the vibrating plate, and which provides an elastic force to the vibrating plate so that a longitudinal end of the vibrating plate abuts against the outer peripheral surface of the rotor; wherein, when the longitudinal vibration is selected by the selection means, the vibrating plate causes the longitudinal vibration, whereby the rotor is rotationally driven in one direction in accordance with the displacement of the vibrating plate due to the vibration, and wherein, when the bending vibration is selected by the selection means, the vibrating plate causes the bending vibration, whereby the rotor is rotationally driven in the direction opposite to the direction during the longitudinal vibration in accordance with the displacement of the vibrating plate due to the vibration.
- In another form of the present invention, there is provided a piezoelectric actuator comprising: a base frame; a vibrating plate in which a longitudinal plate-like piezoelectric element and a reinforcing portion are stacked; a rotor having an outer peripheral surface, and rotationally supported on the base frame; a selection means for selecting either a longitudinal vibration for vibrating the vibrating plate in the longitudinal direction within a plane to which the vibrating plate belongs, or a bending vibration for vibrating the vibrating plate in the widthwise direction perpendicular to the longitudinal direction within the plane; a support member having a fixing portion fixed to the base frame and a mounting portion mounted on the vibrating plate, and supporting the vibrating plate on the base frame; and an elastic member for providing an elastic force to the vibrating plate so that a longitudinal end of the vibrating plate abuts against the outer peripheral surface of the rotor; wherein, when the longitudinal vibration is selected by the selection means, the vibrating plate causes the longitudinal vibration, whereby the rotor is rotationally driven in one direction in accordance with the displacement of the vibrating plate due to the vibration, and wherein, when the bending vibration is selected by the selection means, the vibrating plate causes the bending vibration, whereby the rotor is rotationally driven in the direction opposite to the direction during the longitudinal vibration in accordance with the displacement of the vibrating plate due to the vibration.
- In another form of the present invention, there is provided a piezoelectric actuator comprising: a base frame; a vibrating plate in which a longitudinal plate-like piezoelectric element and a reinforcing portion are stacked; a rotor having an outer peripheral surface, rotationally supported on the base frame, a rotating shaft thereof being movable; a selection means for selecting either a longitudinal vibration for vibrating the vibrating plate in the longitudinal direction within a plane to which the vibrating plate belongs, or a bending vibration for vibrating the vibrating plate in the widthwise direction perpendicular to the longitudinal direction within the plane; a support member having a fixing portion fixed to the base frame and a mounting portion mounted on the vibrating plate, and supporting the vibrating plate on the base frame; and an elastic member for providing an elastic force to the rotor so that the outer peripheral surface of the rotor abuts against a longitudinal end of the vibrating plate; wherein, when the longitudinal vibration is selected by the selection means, the vibrating plate causes the longitudinal vibration, whereby the rotor is rotationally driven in one direction in accordance with the displacement of the vibrating plate due to the vibration, and wherein, when the bending vibration is selected by the selection means, the vibrating plate causes the bending vibration, whereby the rotor is rotationally driven in the direction opposite to the direction during the longitudinal vibration in accordance with the displacement of the vibrating plate due to the vibration.
- In another form of the present invention, there is provided a piezoelectric actuator comprising: a base frame; a vibrating plate in which a longitudinal plate-like piezoelectric element and a reinforcing portion are stacked; a rotor having an outer peripheral surface, and rotationally supported on the base frame; a selection means for selecting either a longitudinal vibration for vibrating the vibrating plate in the longitudinal direction within a plane to which the vibrating plate belongs, or a bending vibration for vibrating the vibrating plate in the widthwise direction perpendicular to the longitudinal direction within the plane; and a support member having a fixing portion fixed to the base frame and a mounting portion mounted on the vibrating plate, and supporting the vibrating plate on the base frame; wherein the rotor is formed of an elastic body arranged on the position where the outer peripheral surface thereof abuts against a longitudinal end of the vibrating plate, and presses the outer peripheral surface against the end of the vibrating plate by the elastic force thereof; wherein, when the longitudinal vibration is selected by the selection means, the vibrating plate causes the longitudinal vibration, whereby the rotor is rotationally driven in one direction in accordance with the displacement of the vibrating plate due to the vibration, and wherein, when the bending vibration is selected by the selection means, the vibrating plate causes the bending vibration, whereby the rotor is rotationally driven in the direction opposite to the direction during the longitudinal vibration in accordance with the displacement of the vibrating plate due to the vibration.
- From another standpoint, according to the present invention, there is provided a piezoelectric actuator having a piezoelectric elements and driving an object to be driven by the vibration of the piezoelectric element; the piezoelectric actuator comprising reinforcing portions stacked on the upper and lower sides of the piezoelectric element; wherein power is supplied to the piezoelectric element via the reinforcing portions.
- In another form of the present invention, there is provided a piezoelectric actuator having a piezoelectric element, and driving an object to be driven by the vibration of the piezoelectric element; the piezoelectric actuator comprising: a base frame; and a support member formed of a conductive material, and supporting the piezoelectric element on the base frame; wherein power is supplied to the piezoelectric element via the support member.
- In another form of the present invention, there is provided a piezoelectric actuator having a piezoelectric element, and driving an object to be driven by the vibration of the piezoelectric element; the piezoelectric actuator comprising an elastic conductive material contacting the upper and lower surfaces of the vibrating plate to clamp the vibrating plate; wherein power is supplied to the piezoelectric element via the elastic conductive material.
- In another form of the present invention, there is provided a piezoelectric actuator having a piezoelectric element, and driving an object to be driven by the vibration of the piezoelectric element; the piezoelectric actuator comprising a wire wound around the vibrating plate while being in contact therewith; wherein power is supplied to the piezoelectric element via the wire.
- In addition, according to the present invention, there is provided a timepiece comprising: a piezoelectric actuator in any one of the above forms; and a ring-shaped calendar display wheel rotationally driven by the piezoelectric actuator.
- Furthermore, according to the present invention, there is provided a portable device comprising: a piezoelectric actuator in any one of the above forms; and a battery for supplying power to the piezoelectric actuator.
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- Fig. 1 is a plan view of the principal construction of a calendar display mechanism having a piezoelectric actuator incorporated therein in a timepiece according to a first embodiment of the present invention.
- Fig. 2 is a sectional side elevation schematically showing the construction of the timepiece according to the embodiment.
- Fig. 3 is a plan view showing the overall construction of the piezoelectric actuator.
- Fig. 4 includes diagrams for explaining a sectional contact state between a rotor and a projection that are components of the piezoelectric actuator.
- Fig. 5 is a diagram for explaining another example of the sectional contact state between the rotor and the projection of the piezoelectric actuator.
- Fig. 6 is a sectional side elevation showing a vibrating plate that is a component of the piezoelectric actuator.
- Fig. 7 is a diagram showing a state in which the vibrating plate causes a longitudinal vibration.
- Fig. 8 is a block diagram showing the outline of the construction for supplying electric power to a piezoelectric element of the vibrating plate.
- Fig. 9 is a block diagram showing the outline of another construction for supplying electric power to the piezoelectric element of the vibrating plate.
- Fig. 10 is a diagram for explaining a state in which, when the vibrating plate vibrates, it causes a bending vibration by a reaction force from the rotor.
- Fig. 11 is a diagram for explaining the orbit of the projection during the bending vibration.
- Fig. 12 is a graph showing an example of the relationship between vibration frequency and impedance of the vibrating plate.
- Fig. 13 is a diagram for explaining the amplitude of the vibrating plate during the bending vibration.
- Fig. 14 is a diagram for explaining the operation of the vibrating plate when the rotor is to be rotated in a reverse direction.
- Fig. 15 is a diagram for explaining the position of the center of rotation of a support member for rotationally supporting the vibrating plate.
- Fig. 16 is a diagram for explaining another example of the position of the center of rotation of the support member for rotationally supporting the vibrating plate.
- Fig. 17 is a sectional side elevation showing a principal construction of the calendar display mechanism.
- Fig. 18 is a block diagram showing the construction of a driving circuit of the calendar display mechanism.
- Fig. 19 is a timing chart showing the operation of the driving circuit.
- Fig. 20 is a plan view showing a first modification of the piezoelectric actuator.
- Fig. 21 is a sectional side elevation of a vibrating plate of a second modification of the piezoelectric actuator.
- Fig. 22 is a plan view showing another example of the vibrating plate of the second modification of the piezoelectric actuator.
- Fig. 23 is a plan view showing a third modification of the piezoelectric actuator.
- Fig. 24 is a plan view showing another example of a vibrating plate of the third modification of the piezoelectric actuator.
- Fig. 25 is a plan view showing still another example of the vibrating plate of the third modification of the piezoelectric actuator.
- Fig. 26 is a diagram showing a further example of the vibrating plate of the third modification of the piezoelectric actuator.
- Fig. 27 is a diagram showing a still further example of the vibrating plate of the third modification of the piezoelectric actuator.
- Fig. 28 is a plan view showing a fourth modification of the piezoelectric actuator.
- Fig. 29 is a diagram showing a manufacturing method of a vibrating plate of the fourth modification.
- Fig. 30 is a plan view showing another example of the fourth modification of the piezoelectric actuator.
- Fig. 31 is a plan view showing a fifth modification of the piezoelectric actuator.
- Fig. 32 is a plan view showing a sixth modification of the piezoelectric actuator.
- Fig. 33 is a diagram for explaining the amplitude of a support member of the sixth modification of the piezoelectric actuator.
- Fig. 34 is a plan view showing another example of the sixth modification of the piezoelectric actuator.
- Fig. 35 is a plan view showing a seventh modification of the piezoelectric actuator.
- Fig. 36 is a diagram for explaining the position of the center of rotation of a support member for rotationally supporting a vibrating plate of the seventh modification of the piezoelectric actuator.
- Fig. 37 is a diagram for explaining the operation of the vibrating plate when the rotor is to be rotated in the reverse direction in the seventh modification.
- Fig. 38 is a plan view showing another example of the seventh modification of the piezoelectric actuator.
- Fig. 39 is a plan view showing a further modification of the seventh modification of the piezoelectric actuator.
- Fig. 40 is a diagram showing a conductive construction for supplying a drive voltage to the piezoelectric actuator.
- Fig. 41 is a diagram showing a modification of the conductive construction for supplying the drive voltage to the piezoelectric actuator.
- Fig. 42 is a side view showing a modification the conductive construction.
- Fig. 43 is a diagram showing another modification of the conductive construction for supplying the drive voltage to the piezoelectric actuator.
- Fig. 44 is a diagram showing a further modification of the conductive construction for supplying the drive voltage to the piezoelectric actuator.
- Fig. 45 is a side view showing a still further modification of the conductive construction.
- Fig. 46 is a plan view showing the overall construction of a piezoelectric actuator according to a second embodiment of the present invention.
- Fig. 47 is a side view showing a vibrating plate that is a component of the piezoelectric actuator according to the second embodiment.
- Fig. 48 is a plan view showing the vibrating plate of the piezoelectric actuator according to the second embodiment.
- Fig. 49 is a diagram showing a construction for supplying electric power to a piezoelectric element of the vibrating plate of the piezoelectric actuator according to the second embodiment.
- Fig. 50 includes a diagram showing a state in which the vibrating plate of the piezoelectric actuator according to the second embodiment causes a longitudinal vibration, and a diagram showing a state in which the vibrating plate causes a bending vibration.
- Fig. 51 is a diagram for explaining a driving direction of a rotor when the vibrating plate of the piezoelectric actuator according to the second embodiment causes a longitudinal vibration.
- Fig. 52 is a diagram for explaining a driving direction of the rotor when the vibrating plate of the piezoelectric actuator according to the second embodiment causes a bending vibration.
- Fig. 53 is a plan view showing the overall construction of a piezoelectric actuator according to a third embodiment of the present invention.
- Fig. 54 is a plan view showing a modification of the piezoelectric actuator according to the third embodiment.
- Fig. 55 is a plan view showing the overall construction of a piezoelectric actuator according to a fourth embodiment of the present invention.
- Fig. 56 is a side view showing the vicinity of a contacting part between the vibrating plate and the rotor of the piezoelectric actuator according to the fourth embodiment.
- Fig. 57 is a side view showing the vicinity of the contacting part between the vibrating plate and the rotor in a modification of the piezoelectric actuator according to the fourth embodiment.
- Fig. 58 is a diagram for explaining a driving direction of a rotor when a vibrating plate in another modification of the piezoelectric actuator according to the fourth embodiment causes a bending vibration.
- Fig. 59 are diagrams showing an example of the construction of a driving Circuit for switching the vibrating plate in the other modification of the piezoelectric actuator according to the fourth embodiment between a longitudinal vibration mode and a bending vibration mode.
- Fig. 60 is a diagram showing a modification of the piezoelectric actuator according to the first to fourth embodiments.
- Fig. 61 is a plan view schematically showing an ultrasonic motor using a conventional piezoelectric actuator.
-
- A description will now be given of embodiments of the present invention with reference to the drawings.
- Fig. 1 is a plan view showing the principal construction of a calendar display mechanism having a piezoelectric actuator incorporated therein in a wristwatch according to a first embodiment of the present invention.
- A piezoelectric actuator A1 is generally composed of a vibrating
plate 10 that extensionally vibrates in an in-plane direction (a direction parallel to the plane of the figure) and a rotor (rotating member) 100. Therotor 100 is rotationally supported on a main plate (support body) 103, and is disposed at a position where it abuts against the vibratingplate 10. When its outer peripheral surface is tapped by vibrations generated in the vibratingplate 10, therotor 100 is rotationally driven in a direction shown by the arrow in the figure. - Next, a calendar display mechanism is coupled to the piezoelectric actuator A1, and is driven by a driving force thereof. The principal part of the calendar display mechanism is generally composed of a speed-reducing wheel train for decelerating the rotation of the
rotor 100, and a ring-shapeddate indicator 50. The deceleration wheel train includes anintermediate date wheel 40 and a dateindicator driving wheel 60. - Here, when the vibrating
plate 10 vibrates in the in-plane direction as described above, therotor 100 abutting against the vibratingplate 10 is rotated in a clockwise direction. The rotation of therotor 100 is transmitted to the dateindicator driving wheel 60 via theintermediate date wheel 40, and the dateindicator driving wheel 60 rotates thedate indicator 50 in a clockwise direction. In this way, the transmittance of all forces from the vibratingplate 10 to therotor 100, from therotor 100 to the speed-reducing wheel train, and from the speed-reducing wheel train to thedate indicator 50 is effected in the in-plane direction. For this reason, the thickness of the calendar display mechanism can be reduced. - Fig. 2 is a sectional view of a timepiece according to the first embodiment of the present invention. In the figure, a calendar mechanism including the above-described piezoelectric actuator A1 is incorporated into the hatched region, and the thickness thereof is considerably thin at about 0.5 mm. A disk-
like dial 70 is provided above the calendar display mechanism. Awindow 71 for displaying the date is provided in a part of the outer periphery of thedial 70 so that the date of thedate indicator 50 can be seen through thewindow 71. In addition, amovement 73 for drivinghands 72, and a driving circuit (not shown), which will be described later, are provided below thedial 70. - In the construction as described above, the piezoelectric actuator A1 has a construction in which a coil and a rotor are not stacked in the thickness direction as in a conventional stepping motor, but the vibrating
plate 10 and therotor 100 are disposed in the same plane. For this reason, it is structurally suited to a reduction in thickness. For this reason, the thickness of the calendar display mechanism can be reduced, and the thickness of the entire timepiece can be reduced. Furthermore, themovement 73 can be shared between a timepiece with the calendar display mechanism and a timepiece without such a display mechanism, whereby productivity can be improved. - Next, a description will be given of the piezoelectric actuator A1 according to this embodiment. As shown in Fig. 3, the piezoelectric actuator A1 includes a long plate-like vibrating
plate 10 that is elongated in the lateral direction in the figure, and asupport member 11 for supporting the vibratingplate 10 on the main plate 103 (see Fig. 1). - At a
longitudinal end 35 of the vibratingplate 10, aprojection 36 is projected toward therotor 100, and theprojection 36 is in contact with the outer peripheral surface of therotor 100. With the provision of such aprojection 36, an operation such as grinding may be performed only on theprojection 36 in order to maintain the state of the contact surface between theprojection 36 and therotor 100, so that the contact surface between theprojection 36 and therotor 100 can be easily controlled. In addition, theprojection 36 formed of a conductive member or a non-conductive member may be used. When theprojection 36 is formed of a non-conductive member,piezoelectric elements 30 and 31 (to be described later) can be prevented from shorting even if they come into contact with therotor 100 that is generally formed of metal. - As shown in the figure, in this embodiment, the
projection 36 is formed in the shape of a curved surface projecting toward therotor 100 in plane view. By forming theprojection 36 abutting against therotor 100 in the shape of a curved surface in this way, even if the positional relationship between therotor 100 and the vibratingplate 10 varies (due to variations in size and the like), the contact state between the outer peripheral surface of therotor 100 that is a curved surface and theprojection 36 formed in the shape of a curved surface does not change so much. Therefore, a stable contact state between therotor 100 and theprojection 36 can be maintained. - As shown in Fig. 4(a), in this embodiment, the
projection 36 is formed in the shape of a curved surface projecting toward therotor 100 in sectional view. On the other hand, aconcave surface 100a in the shape of a curved surface is formed in the outer peripheral surface of therotor 100 so that theprojection 36 and theconcave surface 100a in the shape of a curved surface contact each other. Since the sectional contacting structure is such that a curved surface contacts a curved surface, a good contact state can be maintained even if the contact angle between theprojection 36 and therotor 100 varies. For example, as shown in Fig. 4(b), if the outer peripheral surfaces of theprojection 36 and therotor 100 are formed in the shape of straight lines, the contact state is greatly changed by merely a slight variation of the contact angle. Here, although a guide member for guiding theprojection 36 may be provided in order to maintain the contact angle constant, such a construction causes an increase in the number of components that increases the cost. Therefore, by forming theprojection 36 and theconcave surface 100a in the shape of curved surfaces, as in this embodiment, a good contact state can be maintained without causing a substantial increase in cost. In addition, disengagement of theprojection 36 from theconcave surface 100a can be restrained. Not only theconcave surface 100a in the shape of a curved surface but also a V-groove 100b may be formed in the outer peripheral surface of therotor 100, as shown in Fig. 5. In this case, variations of the contact angle between theprojection 36 and therotor 100, and the disengagement ofprojection 36 from the V-groove 100b can also be reduced. - Returning to Fig. 3, one end portion (mounting portion) 37 of the
support member 11 is mounted on the vibratingplate 10 at a portion slightly toward therotor 100 from the longitudinal center thereof. The other end (fixed portion) 38 of thesupport member 11 is supported on the main plate 103 (see Fig. 1) by ascrew 39. In such a construction, thesupport member 11 supports the vibratingplate 10 in a state of urging, by its elastic force, toward therotor 100, whereby theprojection 36 of the vibratingplate 10 is brought into abutment with the side surface of therotor 100. - As shown in Fig. 6, the vibrating
plate 10 has a stacked structure in which a reinforcingplate 32, such as stainless steel, having substantially the same shape as thepiezoelectric elements piezoelectric elements piezoelectric elements plate 32 between thepiezoelectric elements plate 10 due to the excessive vibration of the vibratingplate 10 or an external force can be reduced. In addition, the reinforcingplate 32 having a thickness smaller than that of thepiezoelectric elements piezoelectric elements -
Electrodes 33 are disposed on the surfaces of thepiezoelectric elements piezoelectric elements electrodes 33. Here, as thepiezoelectric elements - In addition, in this embodiment, each of the
electrodes 33 is formed with a thickness of 0.5 µm or more. Electrodes each having a thickness of about 0.1 to 0.3 µm are usually formed on such a piezoelectric element. In the piezoelectric actuator A1, however, electrodes thicker than common electrodes are formed, whereby theelectrodes 33 serve the function of a reinforcing material against bending in addition to the function of the electrode so as to improve the strength of the vibratingplate 10. Here, although the strength is improved when the thickness of each of theelectrodes 33 is increased, an excessive increase in the thickness will prevent the vibration of the vibratingplate 10. Therefore, when the improvement of the strength and the influence on the vibration are considered, the thickness of each of theelectrodes 33 may preferably be 0.5 µm or more, and the sum of the thicknesses of theelectrodes 33 formed on the upper and lower surfaces may preferably be the thickness of the reinforcingplate 32 or less. In the case of the piezoelectric actuator A1 to be incorporated into the calendar display mechanism of the wristwatch as in this embodiment, when the reduction in thickness, the influence on the vibration, and the strength and the like are considered, the thickness of the reinforcingplate 32 may be about 0.1 mm. Therefore, in this case, the sum of the thicknesses of theelectrodes 33 may be 0.1 mm or less. - When an alternating voltage is applied from a driving circuit, which will be described later, to the
piezoelectric elements electrodes 33, the thus-constructed vibratingplate 10 vibrates as thepiezoelectric elements plate 10 causes a longitudinal vibration such that it expands and contracts in the longitudinal direction, as shown in Fig. 7, whereby the vibratingplate 10 vibrates in the direction shown by an arrow in Fig. 3 (an unloaded state, that is, a state in which theprojection 36 is not in contact with the rotor 100). In addition, as shown in Fig. 8, the vibratingplate 10 has a structure in which the long plate-likepiezoelectric elements piezoelectric elements plate 10 can be amplified, and a greater displacement can be obtained. On the other hand, if thepiezoelectric elements plate 10 can be vibrated with a low current. Therefore, the connecting structure of thepiezoelectric elements - Next, a description will be given of the operation of the piezoelectric actuator constructed as described above. Firstly, when a voltage is applied to the vibrating
plate 10 from a driving circuit (not shown), the vibratingplate 10 causes a flexural vibration as thepiezoelectric elements projection 36 abutting against therotor 100, as shown in Fig. 3. Therotor 100 is rotated in the direction of the arrow in accordance with the displacement of theprojection 36 caused by the vibration. Therotor 100 is rotated in this way, whereby thedate indicator 50 is rotated via the intermediate date wheel 40 (see Fig. 1), and the date and the day to be displayed are changed. - Here, in the piezoelectric actuator A1, the
projection 36 abutted against therotor 100 is provided at a position shifted from the center line shown by a one-dot chain line in Fig. 3 in the widthwise direction (vertical direction in Fig. 3) of the vibratingplate 10. Therefore, a bending vibration shown in Fig. 10 is generated in the vibratingplate 10 by a reaction force from the side surface of therotor 100. If the above-described bending vibration is induced in addition to the longitudinal vibrations of thepiezoelectric elements projection 36 moves along an elliptical orbit, as shown in Fig. 11. That is, if the bending vibration is excited in addition to the longitudinal vibration, a greater displacement can be obtained. If the displacement of theprojection 36 can be amplified in this way, driving efficiency of therotor 100 that is driven in accordance with the displacement can be improved. The position where theprojection 36 is provided is not limited to the position shown in the figure, and theprojection 36 may be provided at a position where a bending vibration can be induced in the substantially rectangular vibratingplate 10 by the reaction force of the above-describedrotor 100. - Furthermore, if the vibrating
plate 10 is used which has a shape such that the resonance frequency of the longitudinal vibration substantially coincides with the resonance frequency of the bending vibration, theprojection 36 can be moved along a larger elliptical orbit. If theprojection 36 is moved along the large elliptical orbit in this way, the time theprojection 36 comes into contact with therotor 100 is elongated, whereby the displacement of theprojection 36 during contact is amplified. Therefore, if a bending vibration that resonates with the longitudinal vibration due to the expansion and contract of thepiezoelectric elements - As described above, while the vibrating plate that has a shape such that the longitudinal vibration and the bending vibration generated in the vibrating
plate 10 resonate may be used, a vibrating plate that has a shape such that the resonance frequency of the bending vibration of the vibratingplate 10 is increased to be slightly higher than the resonance frequency of the longitudinal vibration may be used. If the resonance frequency of the bending vibration is increased to be slightly higher than the resonance frequency of the longitudinal vibration in this way, a bending vibration is generated in the vibratingplate 10, as shown in Fig. 10, whereby theprojection 36 can be greatly displaced, and the vibration generated in the vibratingplate 10 can be stabilized. This is because the bending vibration cannot follow the longitudinal vibration when the resonance frequency of the bending vibration generated in accordance with the longitudinal vibration is lower than the resonance frequency of the longitudinal vibration generated by the voltage applied to thepiezoelectric elements plate 10 become unstable. In addition, in a vibrating plate in which the resonance frequency of the bending vibration greatly differs from the resonance frequency of the longitudinal vibration, amplitudes of the longitudinal vibration and bending vibration generated in the vibrating plate decrease, whereby driving efficiency is lowered. Therefore, if the resonance frequency of the bending vibration of the vibrating plate is slightly higher than the resonance frequency of the longitudinal vibration, a decrease in the amplitude of the vibration generated in the vibratingplate 10, that is, the displacement of theprojection 36, can be restricted, and a stable vibration can be generated. For example, when a vibrating plate having the varying impedance characteristics shown in Fig. 12 was used, it was experimentally recognized that theprojection 36 greatly displaced along the above-described elliptical orbit, and a stable vibration was generated in the vibrating plate. In the vibrating plate having the characteristics shown in Fig. 12, the resonance frequency at the minimum value of the impedance of the longitudinal vibration is 284.3 kHz, and the resonance frequency at the minimum value of the impedance of the bending vibration is 288.6 kHz. Therefore, if the vibratingplate 10 in which the resonance frequency of the bending vibration of the vibratingplate 10 is increased to be higher than the resonance frequency of the longitudinal frequency by about 2% is used, the above-described advantages can be obtained. In a case where the resonance frequency of the bending vibration is slightly increased in this way, if the vibratingplate 10 is excited with a frequency between the resonance frequency of the longitudinal vibration and the resonance frequency of the bending vibration, that is, if thepiezoelectric elements plate 10, whereby therotor 100 can be rotationally driven with higher efficiency. - While the bending vibration may be induced in the vibrating
plate 10 by a reaction force from therotor 100, as described above, theprojection 36 that is an abutment portion of therotor 100 and the vibratingplate 10 may be elastically deformed in the widthwise direction by a reaction force from therotor 100 generated by the longitudinal vibration of the vibratingplate 10 so that theprojection 36 is moved along the above-described elliptical orbit. - Since the
projection 36 is urged toward therotor 100 by the elastic force of thesupport member 11 in the piezoelectric actuator A1, sufficient friction can be obtained between therotor 100 and theprojection 36. This reduces slippage of theprojection 36 and therotor 100, whereby a large driving force can be stably transmitted from theprojection 36 to therotor 100. - Since the
rotor 100 and the vibratingplate 10 are supported on themain plate 103, which is a single member, the spacing arrangement between them is maintained constant. Therefore, the contact state between theprojection 36 and therotor 100 can be stably maintained, whereby the driving force can be stably transmitted. - In the piezoelectric actuator A1 according to this embodiment, the
end 37 of thesupport member 11 is attached to the vibratingplate 10 at a position of a node of amplitude of the center lines of vibratingplate 10 shown by broken lines in Fig. 13, that is, at a position of minimum amplitude. More specifically, theend 37 is attached to the vibratingplate 10 slightly toward therotor 100 from the longitudinal central part. This is because while the position of the center of gravity of the vibratingplate 10, i.e., the longitudinal central position of the rectangular vibratingplate 10 is a node of vibration during the unloaded state, the node of vibration of the vibratingplate 10 is actually located toward therotor 100 from the central part, as shown in Fig. 13 due to the influence of the reaction force and the like from therotor 100 as described above. The vibratingplate 10 is supported at the position of the node of vibration in this way, whereby loss of vibration energy is decreased and the driving force can be transmitted with higher efficiency. In addition, if the position of a node of vibration of thesupport member 11 in accordance with the vibration of the vibratingplate 10 is allowed to substantially coincide with theend 37 of thesupport member 11, the loss of the vibration energy can be further decreased. When the vibratingplate 10 does not have a rectangular shape shown in Fig. 10, the vibratingplate 10 may be supported at a portion toward therotor 100 from the center of gravity of the vibratingplate 10. This is because the node of the vibration of the vibratingplate 10 is moved toward therotor 100 from the center of gravity of the vibratingplate 10 by the influence of the reaction force and the like from therotor 100. Thesupport member 11 may support the vibratingplate 10 at the position of the node. - Furthermore, in the piezoelectric actuator A1 according to this embodiment, the vibrating
plate 10 having a structure in which thepiezoelectric elements plate 32 are stacked can rotationally drive therotor 100 without using the amplifying member. Therefore, the construction is simplified, and the size of the device can be easily reduced. In addition, mechanical components of the piezoelectric actuator A1 are the vibratingplate 10, thesupport member 11, and the like, and components are not stacked in the thickness direction (direction perpendicular to the plane of Fig. 1). Therefore, the thickness of the device can be easily reduced. - In addition, in the piezoelectric actuator A1, the
rotor 100 is driven only in one direction shown by the arrow in the figure, and another vibrating plate for driving therotor 100 in the opposite direction, and a mechanism for changing the direction of abutment of the vibrating plate against therotor 100 are not provided, that is, there are few factors for preventing the vibration of the vibratingplate 10. Therefore, the driving force can be transmitted more efficiently. - In the piezoelectric actuator A1 according to this embodiment, since the
rotor 100 is driven only in one direction, it is necessary to restrict the rotation of therotor 100 in the opposite direction. However, when a large external force is applied or a load is increased, therotor 100 sometimes tends to rotate in the opposite direction against the driving force generated by the vibratingplate 10. For example, when an opposite torque exceeding the frictional force between theprojection 36 and therotor 100 is generated, both of theprojection 36 and therotor 100 slip against each other to allow therotor 100 to be rotated in the opposite direction. In the piezoelectric actuator A1 according to this embodiment, however, since thesupport member 11 is not a rigid body but is elastic, as shown in Fig. 14, when a force which tends to rotate therotor 100 in the opposite direction increases and therotor 100 is pushed back in the opposite direction, the rotation of therotor 100 in the opposite direction and the rotation of the vibratingplate 10 with theprojection 36 contacting therotor 100 are allowed. As shown in Fig. 15, in this embodiment, the center of rotation allowed for the vibratingplate 10 is set to be located within a quadrant formed by the line B extending from the contact point A of therotor 100 and theprojection 36 in a direction opposite to the driving direction of therotor 100 at the point A and the line C intersecting the line B at right angles on the point A. That is, the rotation of the vibratingplate 10 around theend 38 of thesupport member 11 located within the above-described quadrant is allowed. By providing the center of rotation at such a position, when the vibratingplate 10 is rotated clockwise in the figure in accordance with the opposite rotation of therotor 100, theprojection 36 is displaced toward therotor 100 as if to cut into therotor 100. Therefore, the force of theprojection 36 pressing against therotor 100 is increased, whereby the friction between theprojection 36 and therotor 100 is increased. This makes it possible to transmit a large torque (for the normal rotation) from the vibratingplate 10, whereby the rotation of therotor 100 in the opposite direction due to an increase in load and the external force can be inhibited. That is, when the load is increased, the driving torque can be increased corresponding to the increase in the load. When the force in the opposite direction is eliminated or decreased, the vibratingplate 10 is returned to the lower position shown by the one-dot chain line in Fig. 14 by the elastic force of thesupport member 11. - In addition to the increase in friction between the
projection 36 and therotor 100, when therotor 100 tends to rotate in the opposite direction, the vibratingplate 10 may be rotated so that theprojection 36 moves away in a direction opposite to the driving direction shown by the arrow in accordance with the movement of therotor 100, as shown in Fig. 16. In order to rotate the vibratingplate 10 in this way, the center of rotation of the vibratingplate 10 may be set to be located within a quadrant formed by the line D extending from the contact point A of therotor 100 and theprojection 36 in the driving direction of therotor 100 at the point A and the line C intersecting the line D at right angles on the point A. This makes it possible to rotate the vibratingplate 10 so that theprojection 36 moves away as described above, whereby damage of therotor 100 and theprojection 36 due to the external force and the like can be reduced. - Next, a description will be given of the construction of the calendar display mechanism with reference to Fig. 1 and Fig. 17, which is a sectional view of Fig. 1. In the figures, the
main plate 103 is a first bottom plate for arranging parts thereon, and a main plate 103' is a second bottom plate partially having a stepped portion with respect to themain plate 103. Agear 100c that is coaxial with therotor 100 and is rotated with therotor 100 is provided above therotor 100. Theintermediate date wheel 40 is composed of alarge diameter section 4b and asmall diameter section 4a that is fixed so as to be concentric with thelarge diameter section 4b and is formed slightly smaller than thelarge diameter section 4b. In accordance with the rotation of thegear 100c with therotor 100, thelarge diameter section 4b that meshes with thegear 100c is rotated, whereby theintermediate wheel 40 is rotated. A peripheral surface of thesmall diameter section 4a is cut out in substantially a square shape to form acutout 4c. Ashaft 41 of theintermediate date wheel 40 is formed on the main plate 103', and a bearing (not shown) coupled to theshaft 41 is formed inside theintermediate date wheel 40. Therefore, theintermediate date wheel 40 is rotationally provided on the main plate 103'. Therotor 100 also has a bearing (not shown) formed inside thereof, and is rotationally supported on themain plate 103. - Next, the
date indicator 50 is formed in the shape of a ring, and aninternal gear 5a is formed on the inner peripheral surface thereof. The dateindicator driving wheel 60 has a gear of five teeth, and meshes with theinternal gear 5a. Ashaft 61 is provided in the center of the dateindicator driving wheel 60 to rotationally support the dateindicator driving wheel 60. Theshaft 61 is loosely inserted into a throughhole 62 formed in the main plate 103'. The through whole 62 is elongated along the circumferential direction of thedate indicator 50. - One end of a
plate spring 63 is fixed to the main plate 103', and the other end is fixed to theshaft 61. This allows theplate spring 63 to urge theshaft 61 and the dateindicator driving wheel 60. Swinging of thedate indicator 50 is prevented by the urging action of theplate spring 63. - One end of a
plate spring 64 is secured to the main plate 103' by a screw, and the other end is bent in substantially a V shape to form anend part 64a. Acontact 65 is arranged so as to come into contact with theplate spring 64 when theintermediate date wheel 40 is rotated and theend part 64a enters into thecutout 4c. A predetermined voltage is applied to theplate spring 64, and the voltage is also applied to thecontact 65 upon contacting thecontact 65. Therefore, by detecting the voltage of thecontact 65, a date feed state can be detected. A manual driving wheel meshing with theinternal gear 5a may be provided so that thedate indicator 50 is driven when a user performs a predetermined operation on a crown (not shown). - A description will be given of an automatic calendar-updating operation with reference to Fig. 1. When it is twelve o'clock midnight each day, this is detected, and a driving signal V is supplied to the
piezoelectric elements circuit 500, which will be described later. Then, the vibratingplate 10 vibrates as described above. This makes therotor 100 rotate in a clockwise direction, and, following this, theintermediate date wheel 40 starts rotation in a counterclockwise direction. - Here, the driving
circuit 500 is constructed so as to stop the supply of the driving signal V when theplate spring 64 comes into contact with thecontact 65. In a state where theplate spring 64 is in contact with thecontact 65, theend portion 64a enters into thecutout 4c. Therefore, theintermediate date wheel 40 starts to rotate. - Since the date
indicator driving wheel 60 is urged in a clockwise direction by theplate spring 63, thesmall diameter section 4a is rotated while sliding onteeth indicator driving wheel 60. When thecutout 4c reaches the position of thetooth 6a of the dateindicator driving wheel 60 during the rotation, thetooth 6a meshes with thecutout 4c. In this case, the circumscribed circle of the dateindicator driving wheel 60 has moved to the position shown by C1. - When the
intermediate date wheel 40 is continuously rotated in a counterclockwise direction, the dateindicator driving wheel 60 is rotated in a clockwise direction by one tooth, that is, by "1/5" of a revolution operatively associated with theintermediate date wheel 40. Furthermore, thedate indicator 50 is rotated in a clockwise direction by one tooth (equivalent to the date range for one day) operatively associated with the rotation of the dateindicator driving wheel 60. In the final day of a month having a number of days less than "31", the above operation is repeated a plurality of times, and the correct date based on a calendar is displayed by thedate indicator 50. - When the
intermediate date wheel 40 is continuously rotated in a counterclockwise direction, and thecutout 4c reaches theend part 64a of theplate spring 64, theend 64a enters into thecutout 4c. Then, theplate spring 64 comes into contact with thecontact 65, the supply of the driving signal V is stopped, and the rotation of theintermediate date wheel 40 is stopped. Therefore, theintermediate date wheel 40 is rotated once a day. - Incidentally, the load of the piezoelectric actuator A1 increases during 1) a first period (start of rotation) until the
end 64a of theplate spring 64 gets out of the state where it is in thecutout 4c, and 2) a second period in which thecutout 4c meshes with the dateindicator driving wheel 60 to rotate thedate indicator 50. When the load of the piezoelectric actuator A1 increases, slippage between therotor 100 and theprojection 36 is increased, and in the worst case, it becomes impossible to drive the rotor. In the mechanism of this embodiment, however, the first period and the second period do not overlap each other. That is, the maximum torque time required for detecting the date feed state and the maximum torque time required for driving thedate indicator 50 are staggered. Therefore, the peak current of the piezoelectric actuator A1 can be suppressed, and consequently, the timepiece can be positively operated by maintaining the power source voltage above a certain voltage value. - Fig. 18 is a block diagram of the driving
circuit 500 for applying a voltage to thepiezoelectric elements circuit 500. A twelve o'clockmidnight detection unit 501 is a mechanical switch incorporated in the movement 73 (see Fig. 2), and outputs a first control pulse CTLa shown in Fig. 19(a) when it is twelve o'clock midnight. A datefeed detection unit 502 has the above-describedplate spring 64 and thecontact 65 as principal sections, and outputs a second control pulse CTLb shown in Fig. 19(b) when theplate spring 64 comes into contact with thecontact 65. - A
control circuit 503 generates an oscillation control signal CTLc (see Fig. 19(c)) based on the first control pulse CTLa and the second control pulse CTLb. Thecontrol circuit 503 may be composed of, for example, an SR flip flop so that the first control pulse CTLa is supplied to set terminals, and the second control pulse CTLb is supplied to reset terminals. In this case, as shown in Fig. 19(c), when the first control pulse CTLa rises from a low level to a high level, the oscillation control signal CTLc changes from a low level to a high level, and this state is maintained until the second control pulse CTLb rises, when it changes from the high level to the low level. - The
oscillation circuit 504 is constructed so that an oscillation frequency is substantially equal to fs(n) wherein n represents the order of the vibration mode of the vibratingplate 10. Theoscillation circuit 504 may be formed by, for example, a Colpitts oscillation circuit. - Power supplied to the
oscillation circuit 504 is controlled by the oscillation control signal CTLc. The power supply is effected when the oscillation control signal CTLc is at the higher level, and is stopped when the oscillation control signal CTLc is at the lower level. Therefore, a waveform of the driving signal V, which is an output of theoscillation circuit 504, oscillates when the oscillation control signal CTLc is at a higher level, as shown in Fig. 19(d). - While the
intermediate date wheel 40 is rotated once a day as described above, the period thereof is limited, starting from twelve o'clock midnight. Therefore, theoscillation circuit 504 may sufficiently oscillate only during the period. In the drivingcircuit 50 of this embodiment, the power supply to theoscillation circuit 504 is controlled by the oscillation control signal CTLc to thereby completely stop the operation of theoscillation circuit 504 during a period in which there is no need for rotating theintermediate date wheel 40. Therefore, power consumption of theoscillation circuit 504 can be reduced. - In place of the piezoelectric actuator A1 having the construction as described above, it is possible to use the following variously modified piezoelectric actuators, and it is also possible to use a piezoelectric actuator formed as a combination of the modifications.
- While the
projection 36 is provided on the vibratingplate 10 at a contacting part between theprojection 36 and therotor 100 in the piezoelectric actuator A1 shown in the above-described embodiment, acutout 90 may be formed by cutting out a peak of a rectangular vibratingplate 10 on the side of therotor 100 so that thecutout 90 is brought into abutment with the side surface of therotor 100, as shown in Fig. 20. In this case, a surface state of thecutout 90 can be easily controlled in a manner similar to the above-describedprojection 36. By forming thecutout 90 in the shape of a curved surface, a good contact state can be maintained in a manner similar to the above-described piezoelectric actuator A1. - While the
electrodes 33 are provided on the entire surfaces of thepiezoelectric elements electrodes 33 may be disposed only near the longitudinal central parts of thepiezoelectric elements piezoelectric elements rotor 100. This is because, when the vibratingplate 10 is vibrated with its natural vibration frequency, the both ends of the vibratingplate 10 are sufficiently greatly displaced by the vibration, and the displacement is not amplified even if a voltage is applied to the displaced portions so as to expand and contract thepiezoelectric elements - As shown in Fig. 22, the
electrodes 33 may be disposed only on the widthwise (vertical direction in the figure) central part of thepiezoelectric elements - While the rectangular vibrating
plate 10 is used in the above-described embodiment, a tapered vibratingplate 95 having a small thickness on the side of therotor 100 may be used. When preparing the vibratingplate 95 having such a shape, tapered piezoelectric elements and reinforcing plate may be stacked in a manner similar to the above-described vibratingplate 10. The use of such a vibratingplate 95 amplifies the displacement of anend 96 of the vibratingplate 95 on the side of therotor 100, whereby therotor 100 can be driven at high speed. In addition, since the lengths in the widthwise direction that is the vertical direction of the figure are not uniform, the widthwise resonance of the vibratingplate 95 can be restricted, that is, the vibration in the widthwise direction, can be reduced. - In addition, a vibrating
plate 97 having a shape shown in Fig. 24 may be used. As shown in the figure, the vibratingplate 97 is, unlike the totally tapered vibratingplate 95, partially (in the figure, the side of the rotor 100) tapered. The use of the vibrating plate having such a shape makes it possible to drive therotor 100 at high speed in a manner similar to the vibratingplate 95 shown in Fig. 23, compared with the rectangular vibratingplate 10. - In addition, when a vibrating plate having a shape such that the thickness decreases toward the
rotor 100 is used, therotor 100 can be driven at high speed. For example, a vibratingplate 98 having a shape shown in Fig. 25 may be used. - While the vibrating plates shown in Figs. 23 to 25 are suitable for driving the
rotor 100 at high speed, a vibratingplate 99 having the shape shown in Fig. 26 may be used when the rotor is driven at low speed and high torque. As shown in the figure, the vibratingplate 99 has a shape such that the width increases toward therotor 100. In the vibratingplate 99, while displacement of anend 96 that is a contacting part between theend 96 and therotor 100 is reduced, compared with the rectangular vibratingplate 10, torque which tends to rotate therotor 100 is increased, whereby a low-speed drive with high torque can be effected. - When a vibrating plate having a shape other than the rectangular shape shown in Figs. 23 to 26 is used, the electrodes provided on the upper and lower surfaces thereof may have a rectangular shape. For example, as shown in Fig. 27, when a rectangular electrode is formed on the vibrating
plate 95, a high-speed drive with low drive voltage can be effected. - As shown in Fig. 28, a horn part (extended part) 110 extending toward the
rotor 100 from the vibratingplate 10 may be provided. When providing such ahorn part 110, the reinforcingplate 32 may be prepared in the shape including thehorn section 110, as shown in the figure, and thepiezoelectric elements plate 32, respectively. When the vibratingplate 10 is vibrated in this construction, the vibratingplate 10 and thehorn part 110 vibrate with amplitude shown by broken lines in Fig. 28. Therefore, the displacement of the tip of thehorn part 110 abutting against therotor 100 is amplified, whereby the driving force can be efficiently provided. Thehorn part 110 may have a shape shown in Fig. 30. - As shown in Fig. 31, the vibrating
plate 10, thesupport member 11 and therotor 100 may be disposed so that theend 38 of thesupport member 11 is located on a tangent to theprojection 36 of the vibratingplate 10 and therotor 100, i.e., on the line S perpendicular to the direction of a pressing force F from theprojection 36 to therotor 100 in the initial vibration state. When the vibratingplate 10, thesupport plate 11, and therotor 100 are disposed so as to achieve such a positional relationship, the contact position and the angle between therotor 100 and theprojection 36 are not changed even if fine adjustment of the positions of thesupport member 11 and the vibratingplate 10 is effected around theend 38 secured by thescrew 39 in order to adjust the pressing force and the like of theprojection 36 to therotor 100, whereby the driving force can always be stably provided. In addition, variations in the contact angle between the vibrating plate and the rotor due to the shape, the position, the change with the passage of time, and the like can be prevented. - As shown in Fig. 32, the longitudinal both ends of the vibrating
plate 10 may be supported by twosupport members 11. This can restrict the vibration of the vibratingplate 10 in the widthwise direction (vertical direction in the figure), that is, the vibration that prevents the vibration in the horizontal direction in the figure required for driving therotor 100 can be restricted. In this case, if theend 37 of thesupport member 11 substantially coincides with the position of an antinode of vibration of thesupport member 11 in accordance with the vibration of the vibratingplate 10, as shown in Fig. 33, for example, if the length of thesupport member 11 is set to be a quarter of the vibration wavelength of thesupport member 11, the prevention of the vibration in the horizontal direction in the figure that is a longitudinal direction of thevibration plate 10 is reduced, whereby efficiency is further improved. - In addition, when supporting the vibrating
plate 10 by the twosupport members 11 as shown in figure 34, the position of the node of the vibration of the vibratingplate 10 may be supported by one (the right side in the figure) of the twosupport members 11, and an end of the vibratingplate 10 on the side of therotor 100 may be supported by the other one (the left side in the figure) of thesupport members 11. Since one of thesupport members 11 supports the node of the vibration, this can reduce the loss of vibration energy, and the other one of thesupport members 11 can restrict the vibration in the widthwise direction near the contacting part between thesupport member 11 and therotor 100. - While the
support member 11 urges thevibration plate 10 toward therotor 100 in the above-described embodiment, the vibratingplate 10 may be urged toward therotor 100 by providing a spring member (elastic member) 180, as shown in Fig. 35. As shown in the figure, thesupport member 11 is mounted on the upper side of the vibratingplate 10, and one end of thespring member 180 is mounted on the lower side of the vibratingplate 10. The other end of thespring member 180 is supported by apin 181 provided on the main plate 103 (see Fig. 1). This allows the vibratingplate 10 to be urged toward therotor 100, upper side in the figure, whereby theprojection 36 is brought into abutment with the side surface of therotor 100. Thespring member 180 is provided so as to urge the vibratingplate 10 toward therotor 100 in this way, the driving force can be stably transmitted in a manner similar to the piezoelectric actuator A1 in the above-described embodiment. - When the
support member 11 for supporting the vibratingplate 10 and thespring member 180 for urging the vibratingplate 10 toward therotor 100 are provided in this way, the vibratingplate 10 may also be provided so as to be rotated around the position (for example, the position of theend 38 as shown in the figure) within a quadrant formed by the line B and the line C, as shown in Fig. 36, in a manner similar to the above-described embodiment. Even if therotor 100 tends to be rotated in the opposite direction due to the external force, this construction allows the vibratingplate 10 to return to the former position after it is rotated in accordance with the rotation of therotor 100 in the opposite direction, and therotor 100 returns to a normal direction in accordance with the return of the vibratingplate 10, as shown in Fig. 37, whereby the rotation of therotor 100 in the opposite direction can be restricted. - Incidentally, when the
support member 11 and thespring member 180 are provided in this way, the vibratingplate 10 may also be formed in a tapered shape, as shown in Fig. 38, and the horn part (see Fig. 28) may be provided. - As shown in Fig. 39, an
elastic support member 600 that is a combination of a support member for supporting the vibratingplate 10 and a spring member for urging the vibratingplate 10 toward therotor 100 may be provided. As shown in the figure, theelastic support member 600 is an L-shaped member, and has asupport portion 600a for supporting the vibratingplate 10 and aspring portion 600b extending from thesupport portion 600a while being bent thereat. Theelastic support member 600 is supported by ascrew 39 at a portion that is an intermediate part between thesupport portion 600a and thespring portion 600b, and an end of thespring portion 600b is supported by thepin 181, whereby the vibratingplate 10 is urged toward therotor 100. This brings theprojection 36 into abutment with the outer peripheral surface of therotor 100. In addition, slight rotation of theelastic support member 600 around thescrew 39 is allowed, whereby the rotation of therotor 100 in the opposite direction can be restricted in a manner similar to the piezoelectric actuator A1. - While the vibrating plate has a structure in which the
piezoelectric elements plate 32 in the above-described embodiment, the vibrating plate may have a simple structure in which one piezoelectric element is stacked on a reinforcing plate. In addition, three or more piezoelectric elements may be stacked. - Next, a description will be given of a conductive construction for supplying a drive voltage from the driving
circuit 500 to the piezoelectric elements in the piezoelectric actuators of the above-described various modifications. Power can be usually supplied to the piezoelectric elements by wiring theelectrodes 33 provided on the vibratingplate 10 from the drivingcircuit 500. For the purpose of simplifying the conductive construction, however, power may be supplied to the piezoelectric elements by various conductive constructions as shown in Figs. 40 to 45. - While the vibrating
plate 10 has a structure in which thepiezoelectric elements plate 32 in the above-described piezoelectric actuator A1, a piezoelectric actuator shown in Fig. 40 has a structure in which reinforcingplates 32 are stacked on the upper and lower sides of onepiezoelectric element 251. The reinforcingplate 32 of the upper layer is supported by asupport member 11a, the reinforcingplate 32 of the lower layer is supported by asupport member 11b, and the reinforcingplates 32, thesupport members circuit 500 is supplied to thepiezoelectric element 251 via thesupport members plates 32. This allows thesupport members piezoelectric element 251, in addition to the function of supporting the vibratingplate 10 while urging toward therotor 100. Therefore, the need to separately provide a conductive construction, such as wiring, for supplying the drive voltage to thepiezoelectric element 251 is eliminated, whereby the construction is simplified. In addition, when another conductive component is provided, the conductive component may prevent the vibration of the vibratingplate 10. This conductive construction, however, does not encounter such a problem, and the driving force can be efficiently transmitted. - In addition, as shown in Figs. 41 and 42, when a vibrating
plate 10 in whichpiezoelectric elements plate 32 is used, the drive voltage may be supplied from the drivingcircuit 500 to thepiezoelectric elements support members - As shown in Figs. 41 and 42, the
support member 11c is formed in the shape to branch into two on the side of the vibratingplate 10, and has anupper end 260 branched to the upper side (near side of the plane of Fig. 41) and alower end 261 branched to the lower side (far side of the plane of the figure). Theupper end 260 is attached by solder or a conductive bonding agent to anelectrode 33 formed on the surface of thepiezoelectric element 30, and thelower end 261 is attached by solder or a conductive bonding agent to anelectrode 33 formed on the surface of thepiezoelectric element 31. On the other hand, thesupport member 11d is attached to the reinforcingplate 32, whereby the drive voltage is supplied from the drivingcircuit 500 to thepiezoelectric elements support members plate 10 and serve the conducting function to thepiezoelectric elements - While the drive voltage may be supplied from the driving circuit to the piezoelectric elements via the support members formed of the conductive material as described above, the drive voltage may be supplied to the piezoelectric elements by a conductive construction shown in Fig. 43. As shown in the figure, in the conductive construction, the upper and lower surfaces (electrodes 33) of the vibrating
plate 10 are clamped by a C-shaped elasticconductive member 280, and wiring is connected from the reinforcingplate 32 to thedriving circuit 500. If such an elasticconductive member 280 is used, the drive voltage can be supplied from the drivingcircuit 500 to thepiezoelectric elements - As shown in Figs. 44 and 45, a
wire 290 may be wound around the vibratingplate 10 so that the drive voltage is supplied to thepiezoelectric elements wound wire 290. This can also supply the drive voltage to thepiezoelectric elements conductive member 280 or thewire 290 as described above, the stacked structure of the vibratingplate 10 may be either a structure in which electrodes are arranged on upper and lower surfaces or a structure in which the reinforcing plates formed of conductors are formed on the upper and lower surfaces. In addition to the vibrating plate having the stacked structure of the piezoelectric elements and the reinforcing plates, the above-described elasticconductive member 280 or thewire 290 can be used when the voltage is supplied to the piezoelectric elements. - Next, a description will be given of a piezoelectric actuator according to the second embodiment of the present invention. In the second embodiment, components common to those of the first embodiment are indicated by the same reference numerals, and a description thereof will be omitted.
- As shown in Fig. 46, the piezoelectric actuator according to the second embodiment includes a vibrating
plate 310 in place of the vibratingplate 10 of the piezoelectric actuator A1 according to the first embodiment. - As shown in Fig. 47, the vibrating
plate 310 has a structure in whichpiezoelectric elements plate 32 in a manner similar to the vibratingplate 10 in the first embodiment. However, as shown in Fig. 48, the vibratingplate 310 differs from the vibratingplate 10 in thatelectrodes piezoelectric elements plate 310, the piezoelectric element 30 (also thepiezoelectric element 31 although it is not shown in fig. 48) is divided into four regions, and theelectrodes - A description will be given of a conductive construction for supplying the drive voltage to the
electrodes piezoelectric element 30 with reference to Fig. 49. As shown in the figure, by switching ON/OFF of a switch (selection unit) 341, a mode for supplying the drive voltage from apower source 340 to all of theelectrodes power source 340 to theelectrodes - When the
switch 341 is turned on, and the mode for supplying the drive voltage to all of theelectrodes plate 310 expands and contacts in the longitudinal direction to cause a longitudinal vibration in a manner similar to the above-described first embodiment (hereinafter, referred to as a longitudinal vibration mode), as shown in Fig. 50(a). On the other hand, when theswitch 341 is turned off, and the mode for supplying the drive voltage only to theelectrodes piezoelectric elements plate 310 causes a bending vibration in the widthwise direction (vertical direction in the figure) within a plane to which the vibratingplate 310 belongs (hereinafter, referred to as a bending vibration mode), as shown in Fig. 50(b). By switching theswitch 341 in this way, the vibration mode of thevibration plate 310 can be selected. - In the piezoelectric actuator according to the second embodiment, the
rotor 100 is driven using the vibratingplate 310 that can switch the two vibration modes as described above, and the driving direction of therotor 100 can be switched by operating theswitch 341 to switch the vibration modes. When the longitudinal vibration mode is selected, a leftward driving force in the figure is provided by the longitudinal vibration of the vibratingplate 310 from the abutting part between therotor 100 and theprojection 36, as shown in Fig. 51, whereby therotor 100 is rotated in a clockwise direction in the figure. - On the other hand, when the bending vibration mode is selected, an upward driving force in the figure is provided by the bending vibration of the vibrating
plate 310 from the abutting part between therotor 100 and theprojection 36, as shown in Fig. 52, whereby therotor 100 is rotated in a counterclockwise direction in the figure. - In the piezoelectric actuator according to the second embodiment, the
rotor 100 can be driven in a normal direction and an opposite direction by switching theswitch 341. Since the driving direction is switched by switching the vibration modes of the vibratingplate 310 as described above, there is no need to provide a vibrating plate for each driving direction, and to provide an adjustment mechanism for adjusting the positional relationship between the vibrating plate and the rotor that is an object to be driven. Therefore, the driving direction can be switched between the normal direction and the opposite direction without complicating the construction and increasing the size of the device. - In the piezoelectric actuator according to the second embodiment, various modifications can be made in a manner similar to the above-described first embodiment. For example, a cutout may be provided in the vibrating
plate 310 in place of the projection 36 (see Fig. 20). In addition, theend 38 of thesupport member 11 may be located on a tangent to theprojection 36 of the vibratingplate 310 and therotor 100 so that the contact state between theprojection 36 and therotor 100 is stabilized (see Fig. 31). Furthermore, a spring member may be provided in addition to thesupport member 11 so that the vibratingplate 310 is urged toward therotor 100 by the spring member (see Fig. 35). - Next, a description will be given of a piezoelectric actuator according to the third embodiment of the present invention. In the third embodiment, components common to those of the first and second embodiments are indicated by the same reference numerals, and a description thereof will be omitted.
- While the vibrating plate is urged toward the
rotor 100 by an urging force of the spring member or the support member in the above-described first and second embodiments, therotor 100 is urged toward the vibrating plate in the third embodiment. A description will be given of this construction with reference to Fig. 53. As shown in the figure, in this embodiment, arotating shaft 100j of therotor 100 is supported on one end of an elastic rotatingmember 550, and therotating shaft 100j is rotatable around arotating shaft 550a of the elastic rotatingmember 550. The elastic rotatingmember 550 is composed of arotating portion 550b of which one end supports therotating shaft 100j and the other end is rotationally supported around therotating shaft 550a, and aspring portion 550c extending from the side of therotating shaft 550a of therotating portion 550b while being bent thereat. The side surface of thespring portion 550c is supported by a raisedpin 551, whereby therotating portion 550b is urged to rotate in a clockwise direction in the figure. That is, therotating shaft 100j of therotor 100 is urged rightward in the figure. - On the other hand, the vibrating
plate 10 is, unlike the first embodiment, supported bysupport members 552 formed of a rigid body at widthwise both ends thereof. Thesupport members 552 support the vibratingplate 10 at the position of a node of vibration when the vibratingplate 10 vibrates, and the position of the vibratingplate 10 and mountingportions 553 of thesupport members 552 are fixed. By fixing the vibrating plate at the position of the node of vibration, the vibration of the vibratingplate 10 can be stabilized. Even if the vibratingplate 10 is fixedly supported, since therotor 100 is urged toward the vibratingplate 10, sufficient friction is produced between the outer peripheral surface of therotor 100 and theprojection 36, whereby the driving force can be transmitted therebetween with higher efficiency. - When the piezoelectric actuator has a gear mechanism and the like for increasing or decreasing a speed, such as a
first gear 555 that is coaxial with therotor 100, i.e., rotated together with therotor 100 using therotating shaft 100j as a rotating shaft, and asecond gear 556 meshed with thefirst gear 555, it is preferable that components be arranged so that therotating shaft 550a of the elastic rotatingmember 550, therotating shaft 100j, and arotating shaft 556a of thesecond gear 556 are arranged substantially on the straight line L, as shown in the figure, and that the vibratingplate 10 is arranged so that theprojection 36 is located in the direction perpendicular to the line L from therotating shaft 100j of therotor 100. This is because, by arranging the components in this way, even if the elastic rotatingmember 550 is rotated due to variations during mounting, variations in size, and the wear of the contact part, the contact angle between therotor 100 and theprojection 36 does not change very much, whereby a good contact state can be maintained. In addition, when thefirst gear 555 is rotated, the positional relationship between thefirst gear 555 and thesecond gear 556 does not change very much, whereby the driving force can be stably transmitted. - In the above-described construction, when a load applied to the
second gear 556 is increased, that is, when a force which tends to rotate thesecond gear 556 in a direction opposite to a driving direction that is a counterclockwise direction in the figure is increased, a force which tends to rotate thefirst gear 555 and therotor 100 in a clockwise direction is also increased. That is, a force received by thefirst gear 555 on the right side in the figure at a meshed portion with thesecond gear 556 is increased. In accordance with the increase, a force which tends to rotate the elastic rotatingmember 550 for supporting therotating shaft 100j in a clockwise direction in the figure is increased, whereby the force of the outer peripheral surface of therotor 100 pressing against theprojection 36 is increased. When the force of the outer peripheral surface of therotor 100 pressing against theprojection 36 is increased in this way, the friction between therotor 100 and theprojection 36 is increased, and a torque that can be transmitted from the vibratingplate 10 to therotor 100 is increased. In this way, in this piezoelectric actuator, the torque can be increased as the load increases. Conversely, when the load is decreased, the friction between the outer peripheral surface of therotor 100 and theprojection 36 is decreased, but the decrease in the friction makes it possible to drive therotor 100 with a low power. Therefore, in the piezoelectric actuator according to the third embodiment, the maximum torque can be improved although it can be operated with a low power consumption during the low-loaded state. - While the
rotating shaft 100j of therotor 100 is movable, and the elastic rotatingmember 550 urges therotor 100 toward the vibratingplate 100 in the third embodiment, therotor 100 may be formed of an elastic body so that the outer peripheral surface of therotor 100 is pressed toward the vibratingplate 10 by an elastic force of therotor 100, as shown in Fig. 54. In this case, if the position of therotating shaft 100j of therotor 100 is fixed to a position such that therotor 100 that does not receive the external force, that is, therotor 100 that is not elastically deformed, is arranged where the outer peripheral surface shown by the two-dot chain line in the figure crosses theprojection 36 each other, the outer peripheral surface of therotor 100 and theprojection 36 are pressed into contact with each other by the elastic force of therotor 100 which tends to return to the former shape, whereby sufficient friction is produced between the outer peripheral surface of therotor 100 and theprojection 36, and the driving force can be efficiently transmitted. As such anelastic rotor 100, a metallic member can be used as long as it has hollow sections, as shown in the figure. - In addition to the above-described vibrating
plate 10, vibrating plates in various forms may be used in the third embodiment in a manner similar to the first embodiment, and a vibrating plate that is able to select between the longitudinal vibration mode and the bending vibration mode like the vibratingplate 310 shown in the second embodiment may be used. - Next, a description will be given of a piezoelectric actuator according to the fourth embodiment of the present invention. In the fourth embodiment, components common to those of the first to third embodiments are indicated by the same reference numerals, and a description thereof will be omitted.
- As shown in Fig. 55 & 56, the piezoelectric actuator according to the fourth embodiment has a structure in which one end of the vibrating
plate 10 is overlapped on the surface of a disk-like rotor 100. As shown in Fig. 56, the vibratingplate 10 is inclined with respect to the plane of therotor 100, and aprojection 700 projected from the vibratingplate 10 toward the plane of therotor 100 abuts against the plane of therotor 100 from an oblique direction. - In this construction, when a voltage is applied to a piezoelectric element of the vibrating
plate 10 from a driving circuit (not shown), the vibratingplate 10 causes a longitudinal vibration in the direction shown by the arrow in the figure. When the vibratingplate 10 vibrates in such a manner as to extend toward the center of therotor 100 during the longitudinal vibration, the oneend 700 is displaced while it is in contact with the plane of therotor 100, whereby therotor 100 is rotationally driven in a clockwise direction shown by the arrow in Fig. 55. - The vibrating
plate 10 may be provided not only on the front surface of therotor 100 but also on the back surface of therotor 100. In addition, as shown in Fig. 57, aprojection 710 projected downward from theprojection 700 may be provided instead of inclining the vibratingplate 10 with respect to therotor 100, and theprojection 710 may be brought into abutment with the plane of therotor 100. - In addition to the above-described vibrating
plate 10, vibrating plates in various forms may be used in the fourth embodiment in a manner similar to the first embodiment. - Furthermore, a vibrating plate that is able to select the longitudinal vibration mode and the bending vibration mode may be used so as to switch the driving direction of an object to be driven. In this case, a vibrating
plate 580, which vibrates in a manner similar to the above vibrating plate to drive therotor 100 in the longitudinal vibration mode, and causes a bending vibration in an out-of-plane direction shown in Fig. 58 in the bending vibration mode may be provided, and in the bending vibration mode, therotor 100 may be driven rightward in the figure that is a direction opposite to the direction in the longitudinal vibration mode. - When switching the longitudinal vibration mode and the bending vibration mode in this way, a driving circuit shown in Fig. 59 may be constructed. When switches 581 are switched between the longitudinal vibration mode and the bending vibration mode as shown in the figure, two stacked
piezoelectric elements piezoelectric elements - While the piezoelectric actuator rotationally drives the disk-like rotor in the above-described various embodiments, an object to be driven is not limited thereto. For example, the above-described vibrating
plate 10 may be brought into abutment with a drivingmember 660 that is substantially shaped like a rectangular parallelepiped so as to drive themember 660 shaped like a rectangular parallelepiped in the longitudinal direction thereof as shown in figure 60. - The piezoelectric actuator according to the above-described various embodiments can be used by being incorporated in a portable device other than a timepiece that is driven by a battery, in addition to being incorporated in the above-described calendar display mechanism of a timepiece.
- While a plate-like member is used as the reinforcing
plate 32 in the above-described various embodiments, a metallic film formed by sputtering and the like may be used as a reinforcing portion stacked on the piezoelectric element, and any method may be adopted to form the metallic film.
Claims (87)
- A piezoelectric actuator comprising:a base frame;a vibrating plate in which a longitudinal plate-like piezoelectric element and a reinforcing portion are stacked; anda support member, which is an elastic member, having a fixing portion fixed to the base frame and a mounting portion mounted on the vibrating plate, and which provides an elastic force to the vibrating plate so that a longitudinal end of the vibrating plate abuts against an object to be driven;
wherein, when the piezoelectric element vibrates in the longitudinal direction of the vibrating plate, the vibrating plate is vibrated by the vibration, and the object to be driven is driven in one direction in accordance with the displacement of the vibrating plate due to the vibration. - A piezoelectric actuator as claimed in Claim 1, wherein the vibrating plate is movably supported by the support member within a plane to which the vibrating plate belongs.
- A piezoelectric actuator comprising:a base frame;a vibrating plate in which a longitudinal plate-like piezoelectric element and a reinforcing portion are stacked;a support member having a fixing portion fixed to the base frame and a mounting portion mounted on the vibrating plate, and supporting the vibrating plate on the base frame; andan elastic member for providing an elastic force to the vibrating plate so that the longitudinal end of the vibrating plate abuts against an object to be driven;
wherein, when the piezoelectric element vibrates in the longitudinal direction of the vibrating plate, the vibrating plate is vibrated by the vibration, and the object to be driven is driven in one direction in accordance with the displacement of the vibrating plate due to the vibration. - A piezoelectric actuator as claimed in Claim 3, wherein the vibrating plate is rotationally supported by the support member and the elastic member within a plane to which the vibrating plate belongs.
- A piezoelectric actuator as claimed in Claim 2 or Claim 4, wherein, the vibrating plate is supported in such a manner that a force for pressing the object to be driven is increased when a force which tends to move the vibrating plate in the direction opposite to the direction in which the object to be driven is driven, is applied to the vibrating plate.
- A piezoelectric actuator as claimed in Claim 2 or Claim 4, wherein the vibrating plate is supported in such a manner that, when a force which tends to move the vibrating plate in the direction opposite to the direction in which the object to be driven is driven, is applied to the vibrating plate, the vibrating plate is moved in the opposite direction.
- A piezoelectric actuator as claimed in any one of Claims 1 to 6, wherein the end of the vibrating plate abutting against the object to be driven has a projection, and the projection abuts against the object to be driven.
- A piezoelectric actuator as claimed in any one of Claims 1 to 6, wherein one peak of the vibrating plate is cut out in a rectangular shape, and the cut out portion of the vibrating plate abuts against the object to be driven.
- A piezoelectric actuator as claimed in any one of Claims 1 to 8, wherein the vibrating plate includes a portion having a shape such that the thickness thereof decreases from the other end toward the end abutting against the object to be driven.
- A piezoelectric actuator as claimed in any one of Claims 1 to 8, wherein the vibrating plate includes a portion having a shape such that the thickness thereof increases from the other end toward the end abutting against the object to be driven.
- A piezoelectric actuator as claimed in any one of Claims 1 to 8, wherein the reinforcing portion includes an extended part having a thickness smaller than that of the central part of the vibrating plate from the piezoelectric element toward the object to be driven, and extending toward the object to be driven to abut against the object to be driven.
- A piezoelectric actuator as claimed in any one of Claims 1 to 11, wherein the fixing portion of the support member is located in line with a driving direction of the object to be driven.
- A piezoelectric actuator as claimed in any one of Claims 1 to 12, wherein a longitudinal vibration in which the vibrating plate expands and contacts in the longitudinal direction is generated by the vibration of the piezoelectric element, and a bending vibration in which the vibrating plate vibrates in the widthwise direction perpendicular to the longitudinal direction is generated by a reaction force received by the vibrating plate from the object to be driven due to the longitudinal vibration.
- A piezoelectric actuator as claimed in Claim 13, wherein the resonance frequencies of the longitudinal vibration and the bending vibration generated in the vibrating plate substantially coincide with each other.
- A piezoelectric actuator as claimed in Claim 13, wherein the resonance frequency of the bending vibration generated in the vibrating plate is higher than the resonance frequency of the longitudinal vibration generated in the vibrating plate.
- A piezoelectric actuator as claimed in Claim 15, wherein the exciting frequency for driving the piezoelectric element is a frequency between the resonance frequency of the longitudinal vibration generated in the vibrating plate and the resonance frequency of the bending vibration generated in the vibrating plate.
- A piezoelectric actuator as claimed in any one of Claims 1 to 12, wherein a longitudinal vibration in which the vibrating plate expands and contacts in the longitudinal direction is generated by the vibration of the piezoelectric element, and the end of the vibrating plate abutting against the object to be driven is elastically deformed in the widthwise direction perpendicular to the longitudinal direction by a reaction force received by the vibrating plate from the object to be driven due to the longitudinal vibration.
- A piezoelectric actuator comprising:a base frame;a vibrating plate in which a longitudinal plate-like piezoelectric element and a reinforcing portion are stacked;a rotor having front and back surfaces, and rotationally supported on the base frame in the direction perpendicular to the front and back surfaces as the direction of a rotation axis; anda support member, which is an elastic member, having a fixing portion fixed to the base frame and a mounting portion mounted on the vibrating plate, and which provides an elastic force to the vibrating plate so that a longitudinal end of the vibrating plate abuts against the front surface or the back surface of the rotor;
wherein, when the piezoelectric element vibrates in the longitudinal direction of the vibrating plate, the vibrating plate is vibrated by the vibration, and the rotor is driven in one direction in accordance with the displacement of the vibrating plate due to the vibration. - A piezoelectric actuator as claimed in Claim 18, wherein the vibrating plate is movably supported by the support member within a plane to which the vibrating plate belongs.
- A piezoelectric actuator comprising:a base frame;a vibrating plate in which a longitudinal plate-like piezoelectric element and a reinforcing portion are stacked;a rotor having front and back surfaces, and rotationally supported on the base frame in the direction perpendicular to the front and back surfaces as the direction of a rotation axis;a support member having a fixing portion fixed to the base frame and a mounting portion mounted on the vibrating plate, and supporting the vibrating plate on the base frame; andan elastic member for providing an elastic force to the vibrating plate so that the longitudinal end of the vibrating plate abuts against the front surface or the back surface of the rotor;
wherein, when the piezoelectric element vibrates in the longitudinal direction of the vibrating plate, the vibrating plate is vibrated by the vibration, and the rotor is driven in one direction in accordance with the displacement of the vibrating plate due to the vibration. - A piezoelectric actuator as claimed in Claim 20, wherein the vibrating plate is rotationally supported by the support member and the elastic member within a plane to which the vibrating plate belongs.
- A piezoelectric actuator comprising:a base frame;a vibrating plate in which a longitudinal plate-like piezoelectric element and a reinforcing portion are stacked;a rotor having an outer peripheral surface, and rotationally supported on the base frame; anda support member, which is an elastic member, having a fixing portion fixed to the base frame and a mounting portion mounted on the vibrating plate, and which provides an elastic force to the vibrating plate so that a longitudinal end of the vibrating plate abuts against the outer peripheral surface of the rotor;
wherein, when the piezoelectric element vibrates in the longitudinal direction of the vibrating plate, the vibrating plate is vibrated by the vibration, and the rotor is driven in one direction in accordance with the displacement of the vibrating plate due to the vibration. - A piezoelectric actuator as claimed in Claim 22, wherein the vibrating plate is movably supported by the support member within a plane to which the vibrating plate belongs.
- A piezoelectric actuator comprising:a base frame;a vibrating plate in which a longitudinal plate-like piezoelectric element and a reinforcing portion are stacked;a rotor having an outer peripheral surface, and rotationally supported on the base frame;a support member having a fixing portion fixed to the base frame and a mounting portion mounted on the vibrating plate, and supporting the vibrating plate on the base frame; andan elastic member for providing an elastic force to the vibrating plate so that the longitudinal end of the vibrating plate abuts against the outer peripheral surface of the rotor;
wherein, when the piezoelectric element vibrates in the longitudinal direction of the vibrating plate, the vibrating plate is vibrated by the vibration, and the rotor is driven in one direction in accordance with the displacement of the vibrating plate due to the vibration. - A piezoelectric actuator as claimed in Claim 24, wherein the vibrating plate is rotationally supported by the support member and the elastic member within a plane to which the vibrating plate belongs.
- A piezoelectric actuator comprising:a base frame;a vibrating plate in which a longitudinal plate-like piezoelectric element and a reinforcing portion are stacked;a rotor having an outer peripheral surface, rotationally supported on the base frame, a rotating shaft thereof being movable;a support member having a fixing portion fixed to the base frame and a mounting portion mounted on the vibrating plate, and supporting the vibrating plate on the base frame; andan elastic member for providing an elastic force to the rotor so that the outer peripheral surface of the rotor abuts against the longitudinal end of the vibrating plate;
wherein, when the piezoelectric element vibrates in the longitudinal direction of the vibrating plate, the vibrating plate is vibrated by the vibration, and the rotor is driven in one direction in accordance with the displacement of the vibrating plate due to the vibration. - A piezoelectric actuator as claimed in Claim 26, further comprising:a rotating member for rotationally supporting the rotating shaft of the rotor;a first gear sharing the rotating shaft with the rotor, and integrally rotated with the rotor; anda second gear meshing with the first gear;
wherein the center of rotation of the rotating member and the rotating shafts of the rotor and the second gear are arranged substantially on one straight line; andthe abutment position between the rotor and the vibrating plate is located in a direction perpendicular to the straight line from the rotating shaft of the rotor. - A piezoelectric actuator as claimed in Claim 26 or Claim 27, wherein a force of the elastic member for pressing the rotor toward the end of the vibrating plate is increased with an increase in a rotation load of the rotor.
- A piezoelectric actuator comprising:a base frame;a vibrating plate in which a longitudinal plate-like piezoelectric element and a reinforcing portion are stacked;a rotor having an outer peripheral surface, and rotationally supported on the base frame; anda support member having a fixing portion fixed to the base frame and a mounting portion mounted on the vibrating plate, and supporting the vibrating plate on the base frame;
wherein the rotor is formed of an elastic body arranged on a position where the outer peripheral surface thereof abuts against the longitudinal end of the vibrating plate, and presses the outer peripheral surface against the end of the vibrating plate by the elastic force thereof; and
wherein, when the piezoelectric element vibrates in the longitudinal direction of the vibrating plate, the vibrating plate is vibrated by the vibration, and the rotor is driven in one direction in accordance with the displacement of the vibrating plate due to the vibration. - A piezoelectric actuator as claimed in any one of Claims 22 to 29, wherein a concave groove is formed in the outer peripheral surface of the rotor.
- A piezoelectric actuator as claimed in Claim 23 or Claim 25, wherein the vibrating plate is supported in such a manner that a force for pressing the object to be driven is increased when a force which tends to move the vibrating plate in the direction opposite to the direction in which the rotor is driven, is applied to the vibrating plate.
- A piezoelectric actuator as claimed in Claim 23 or Claim 25, wherein the vibrating plate is supported in such a manner that, when a force which tends to move the vibrating plate in the direction opposite to the direction in which the rotor is driven, is applied to the vibrating plate, the vibrating plate is moved in the opposite direction.
- A piezoelectric actuator as claimed in any one of Claims 18 to 32, wherein the end of the vibrating plate abutting against the rotor has a projection, and the projection abuts against the rotor.
- A piezoelectric actuator as claimed in any one of Claims 18 to 32, wherein one peak of the vibrating plate is cut out in a rectangular shape, and the cut out portion of the vibrating plate abuts against the rotor.
- A piezoelectric actuator as claimed in any one of Claims 18 to 34, wherein the end of the vibrating plate abutting against the rotor is formed in the shape of a curved surface.
- A piezoelectric actuator as claimed in Claim 35, wherein the end of the vibrating plate abutting against the rotor is formed in the shape of a curved surface as viewed from the direction of the rotating shaft of the rotor.
- A piezoelectric actuator as claimed in Claim 35 or Claim 36, wherein the end of the vibrating plate abutting against the rotor is formed in the shape of a curved surface as viewed from the widthwise direction of the vibrating plate.
- A piezoelectric actuator as claimed in any one of Claims 18 to 37, wherein the base frame has a single member for supporting both the rotor and the vibrating plate.
- A piezoelectric actuator as claimed in any one of Claims 18 to 38, wherein the vibrating plate includes a portion having a shape such that the thickness thereof decreases from the other end toward the end abutting against the rotor.
- A piezoelectric actuator as claimed in any one of Claims 18 to 38, wherein the vibrating plate includes a portion having a shape such that the thickness thereof increases from the other end toward the end abutting against the rotor.
- A piezoelectric actuator as claimed in any one of Claims 18 to 38, wherein the reinforcing portion includes an extended part having a thickness smaller than that of the central part of the vibrating plate from the piezoelectric element toward the rotor, and extending toward the rotor to abut against the rotor.
- A piezoelectric actuator as claimed in any one of Claims 18 to 41, wherein the fixing portion of the support member is located in line with a driving direction of the rotor.
- A piezoelectric actuator as claimed in any one of Claims 18 to 42, wherein a longitudinal vibration in which the vibrating plate expands and contacts in the longitudinal direction is generated by the vibration of the piezoelectric element, and a bending vibration in which the vibrating plate vibrates in the widthwise direction perpendicular to the longitudinal direction is generated by a reaction force received by the vibrating plate from the rotor due to the longitudinal vibration.
- A piezoelectric actuator as claimed in Claim 43, wherein the resonance frequency of the bending vibration generated in the vibrating plate is higher than the resonance frequency of the longitudinal vibration generated in the vibrating plate.
- A piezoelectric actuator as claimed in Claim 43, wherein the resonance frequency of the bending vibration generated in the vibrating plate is higher than the resonance frequency of the longitudinal vibration generated in the vibrating plate.
- A piezoelectric actuator as claimed in Claim 45, wherein the exciting frequency for driving the piezoelectric element is a frequency between the resonance frequency of the longitudinal vibration generated in the vibrating plate and the resonance frequency of the bending vibration generated in the vibrating plate.
- A piezoelectric actuator as claimed in any one of Claims 18 to 42, wherein a longitudinal vibration in which the vibrating plate expands and contacts in the longitudinal direction is generated by the vibration of the piezoelectric element, and the end of the vibrating plate abutting against the rotor is elastically deformed in the widthwise direction perpendicular to the longitudinal direction by a reaction force received by the vibrating plate from the rotor due to the longitudinal vibration.
- A piezoelectric actuator according to any one of Claims 1, 2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, and 42, wherein the mounting portion of the support member is mounted to a plurality of sections in the longitudinal direction of the vibrating plate.
- A piezoelectric actuator as claimed in Claim 48, wherein one of the mounting portions of the support member is mounted at a position of a node of vibration of the vibrating plate.
- A piezoelectric actuator as claimed in Claims 48 or Claim 49, wherein the position of the mounting portion of the support member substantially coincides with the position of an antinode of vibration of the support member in accordance with the vibration of the vibrating plate.
- A piezoelectric actuator as claimed in any one of Claims 1 to 47, wherein the mounting portion of the support member is mounted at a position of a node of vibration of the vibrating plate.
- A piezoelectric actuator as claimed in Claim 51, wherein the position of the mounting portion of the support member substantially coincides with the position of a node of vibration of the support member in accordance with the vibration of the vibrating plate.
- A piezoelectric actuator comprising:a base frame;a vibrating plate in which a longitudinal plate-like piezoelectric element and a reinforcing portion are stacked;a selection means for selecting either a longitudinal vibration for vibrating the vibrating plate in the longitudinal direction within a plane to which the vibrating plate belongs, or a bending vibration for vibrating the vibrating plate in the widthwise direction perpendicular to the longitudinal direction within the plane; anda support member, which is an elastic member, having a fixing portion fixed to the base frame and a mounting portion mounted on the vibrating plate, and which provides an elastic force to the vibrating plate so that a longitudinal end of the vibrating plate abuts against an object to be driven;
wherein, when the longitudinal vibration is selected by the selection means, the vibrating plate causes the longitudinal vibration, whereby the object to be driven is driven in one direction in accordance with the displacement of the vibrating plate due to the vibration, and
wherein, when the bending vibration is selected by the selection means, the vibrating plate causes the bending vibration, whereby the object to be driven is driven in the direction opposite to the direction during the longitudinal vibration in accordance with the displacement of the vibrating plate due to the vibration. - A piezoelectric actuator comprising:a base frame;a vibrating plate in which a longitudinal plate-like piezoelectric element and a reinforcing portion are stacked;a selection means for selecting either a longitudinal vibration for vibrating the vibrating plate in the longitudinal direction within a plane to which the vibrating plate belongs, or a bending vibration for vibrating the vibrating plate in the widthwise direction perpendicular to the longitudinal direction within the plane;a support member having a fixing portion fixed to the base frame and mounting portion mounted on the vibrating plate, and supporting the vibrating plate on the base frame; andan elastic member for providing an elastic force to the vibrating plate so that a longitudinal end of the vibrating plate abuts against an object to be driven;
wherein, when the longitudinal vibration is selected by the selection means, the vibrating plate causes the longitudinal vibration, whereby the object to be driven is driven in one direction in accordance with the displacement of the vibrating plate due to the vibration, and
wherein, when the bending vibration is selected by the selection means, the vibrating plate causes the bending vibration, whereby the object to be driven is driven in the direction opposite to the direction during the longitudinal vibration in accordance with the displacement of the vibrating plate due to the vibration. - A piezoelectric actuator comprising:a base frame;a vibrating plate in which a longitudinal plate-like piezoelectric element and a reinforcing portion are stacked;a rotor having front and back surfaces, and rotationally supported on the base frame in the direction perpendicular to the front and back surfaces as the direction of a rotation axis;a selection means for selecting either a longitudinal vibration for vibrating the vibrating plate in the longitudinal direction within a plane to which the vibrating plate belongs, or a bending vibration for vibrating the vibrating plate in the out-of-plane direction; anda support member, which is an elastic member, having a fixing portion fixed to the base frame and a mounting portion mounted on the vibrating plate, and which provides an elastic force to the vibrating plate so that a longitudinal end of the vibrating plate abuts against the front surface or the back surface of the rotor;
wherein, when the longitudinal vibration is selected by the selection means, the vibrating plate causes the longitudinal vibration, whereby the rotor is rotationally driven in one direction in accordance with the displacement of the vibrating plate due to the vibration, and
wherein, when the bending vibration is selected by the selection means, the vibrating plate causes the bending vibration, whereby the rotor is rotationally driven in the direction opposite to the direction during the longitudinal vibration in accordance with the displacement of the vibrating plate due to the vibration. - A piezoelectric actuator comprising:a base frame;a vibrating plate in which a longitudinal plate-like piezoelectric element and a reinforcing portion are stacked;a rotor having front and back surfaces, and rotationally supported on the base frame in the direction perpendicular to the front and back surfaces as the direction of a rotation axis;a selection means for selecting either a longitudinal vibration for vibrating the vibrating plate in the longitudinal direction within a plane to which the vibrating plate belongs, or a bending vibration for vibrating the vibrating plate in the out-of-plane direction;a support member having a fixing portion fixed to the base frame and a mounting portion mounted on the vibrating plate, and supporting the vibrating plate on the base frame; andan elastic member for providing an elastic force to the vibrating plate so that a longitudinal end of the vibrating plate abuts against the front surface or the back surface of the rotor;
wherein, when the longitudinal vibration is selected by the selection means, the vibrating plate causes the longitudinal vibration, whereby the rotor is rotationally driven in one direction in accordance with the displacement of the vibrating plate due to the vibration, and
wherein, when the bending vibration is selected by the selection means, the vibrating plate causes the bending vibration, whereby the rotor is rotationally driven in the direction opposite to the direction during the longitudinal vibration in accordance with the displacement of the vibrating plate due to the vibration. - A piezoelectric actuator comprising:a base frame;a vibrating plate in which a longitudinal plate-like piezoelectric element and a reinforcing portion are stacked;a rotor having an outer peripheral surface, and rotationally supported on the base frame;a selection means for selecting either a longitudinal vibration for vibrating the vibrating plate in the longitudinal direction within a plane to which the vibrating plate belongs, or a bending vibration for vibrating the vibrating plate in the widthwise direction perpendicular to the longitudinal direction within the plane; anda support member, which is an elastic member having a fixing portion fixed to the base frame and a mounting portion mounted on the vibrating plate, and which provides an elastic force to the vibrating plate so that a longitudinal end of the vibrating plate abuts against the outer peripheral surface of the rotor;
wherein, when the longitudinal vibration is selected by the selection means, the vibrating plate causes the longitudinal vibration, whereby the rotor is rotationally driven in one direction in accordance with the displacement of the vibrating plate due to the vibration, and
wherein, when the bending vibration is selected by the selection means, the vibrating plate causes the bending vibration, whereby the rotor is rotationally driven in the direction opposite to the direction during the longitudinal vibration in accordance with the displacement of the vibrating plate due to the vibration. - A piezoelectric actuator comprising:a base frame;a vibrating plate in which a longitudinal plate-like piezoelectric element and a reinforcing portion are stacked;a rotor having an outer peripheral surface, and rotationally supported on the base frame;a selection means for selecting either a longitudinal vibration for vibrating the vibrating plate in the longitudinal direction within a plane to which the vibrating plate belongs, or a bending vibration for vibrating the vibrating plate in the widthwise direction perpendicular to the longitudinal direction within the plane;a support member having a fixing portion fixed to the base frame and a mounting portion mounted on the vibrating plate, and supporting the vibrating plate on the base frame; andan elastic member for providing an elastic force to the vibrating plate so that a longitudinal end of the vibrating plate abuts against the outer peripheral surface of the rotor;
wherein, when the longitudinal vibration is selected by the selection means, the vibrating plate causes the longitudinal vibration, whereby the rotor is rotationally driven in one direction in accordance with the displacement of the vibrating plate due to the vibration, and
wherein, when the bending vibration is selected by the selection means, the vibrating plate causes the bending vibration, whereby the rotor is rotationally driven in the direction opposite to the direction during the longitudinal vibration in accordance with the displacement of the vibrating plate due to the vibration. - A piezoelectric actuator comprising:a base frame;a vibrating plate in which a longitudinal plate-like piezoelectric element and a reinforcing portion are stacked;a rotor having an outer peripheral surface, rotationally supported on the base frame, a rotating shaft thereof being movable;a selection means for selecting either a longitudinal vibration for vibrating the vibrating plate in the longitudinal direction within a plane to which the vibrating plate belongs, or a bending vibration for vibrating the vibrating plate in the widthwise direction perpendicular to the longitudinal direction within the plane;a support member having a fixing portion fixed to the base frame and a mounting portion mounted on the vibrating plate, and supporting the vibrating plate on the base frame; andan elastic member for providing an elastic force to the rotor so that the outer peripheral surface of the rotor abuts against a longitudinal end of the vibrating plate;
wherein, when the longitudinal vibration is selected by the selection means, the vibrating plate causes the longitudinal vibration, whereby the rotor is rotationally driven in one direction in accordance with the displacement of the vibrating plate due to the vibration, and
wherein, when the bending vibration is selected by the selection means, the vibrating plate causes the bending vibration, whereby the rotor is rotationally driven in the direction opposite to the direction during the longitudinal vibration in accordance with the displacement of the vibrating plate due to the vibration. - A piezoelectric actuator as claimed in Claim 59, further comprising:a rotating member for rotationally supporting the rotating shaft of the rotor;a first gear sharing the rotating shaft with the rotor, and integrally rotated with the rotor; anda second gear meshing with the first gear;
wherein the center of rotation of the rotating member and the rotating shafts of the rotor and the second gear are arranged substantially on one straight line; andthe abutment position between the rotor and the vibrating plate is located in a direction perpendicular to the straight line from the rotating shaft of the rotor. - A piezoelectric actuator as claimed in Claim 59 or Claim 60, wherein a force of the elastic member for pressing the rotor toward the end of the vibrating plate is increased with an increase in a rotation load of the rotor.
- A piezoelectric actuator comprising:a base frame;a vibrating plate in which a longitudinal plate-like piezoelectric element and a reinforcing portion are stacked;a rotor having an outer peripheral surface, and rotationally supported on the base frame;a selection means for selecting either a longitudinal vibration for vibrating the vibrating plate in the longitudinal direction within a plane to which the vibrating plate belongs, or a bending vibration for vibrating the vibrating plate in the widthwise direction perpendicular to the longitudinal direction within the plane; anda support member having a fixing portion fixed to the base frame and a mounting portion mounted on the vibrating plate, and supporting the vibrating plate on the base frame;
wherein the rotor is formed of an elastic body arranged on the position where the outer peripheral surface thereof abuts against a longitudinal end of the vibrating plate, and presses the outer peripheral surface against the end of the vibrating plate by the elastic force thereof;
wherein, when the longitudinal vibration is selected by the selection means, the vibrating plate causes the longitudinal vibration, whereby the rotor is rotationally driven in one direction in accordance with the displacement of the vibrating plate due to the vibration, and
wherein, when the bending vibration is selected by the selection means, the vibrating plate causes the bending vibration, whereby the rotor is rotationally driven in the direction opposite to the direction during the longitudinal vibration in accordance with the displacement of the vibrating plate due to the vibration. - A piezoelectric actuator as claimed in any one of Claims 57 to 62, wherein a concave groove is formed in the outer peripheral surface of the rotor.
- A piezoelectric actuator as claimed in any one of Claims 55 to 63, wherein the end of the vibrating plate abutting against the rotor has a projection, and the projection abuts against the rotor.
- A piezoelectric actuator as claimed in any one of Claims 55 to 64, wherein one peak of the vibrating plate is cut out in a rectangular shape, and the cut out portion of the vibrating plate abuts against the rotor.
- A piezoelectric actuator as claimed in any one-of Claims 55 to 65, wherein the end of the vibrating plate abutting against the rotor is formed in the shape of a curved surface.
- A piezoelectric actuator as claimed in Claim 66, wherein the end of the vibrating plate abutting against the rotor is formed in the shape of a curved surface as viewed from the direction of the rotating shaft of the rotor.
- A piezoelectric actuator as claimed in Claim 66 or Claim 67, wherein the end of the vibrating plate abutting against the rotor is formed in the shape of a curved surface as viewed from the widthwise direction of the vibrating plate.
- A piezoelectric actuator as claimed in any one of Claims 55 to 68, wherein the base frame has a single member for supporting both the rotor and the vibrating plate.
- A piezoelectric actuator as claimed in Claim 53 or Claim 54, wherein the end of the vibrating plate abutting against the object to be driven has a projection, and the projection abuts against the object to be driven.
- A piezoelectric actuator as claimed in Claim 53 or Claim 54, wherein one peak of the vibrating plate is cut out in a rectangular shape, and the cut out portion of the vibrating plate abuts against the object to be driven.
- A piezoelectric actuator as claimed in any one of Claims 1 to 71, wherein the reinforcing portion is formed thinner than the piezoelectric element.
- A piezoelectric actuator as claimed in any one of Claims 1 to 71, wherein the piezoelectric element has an electrode section arranged on the surface thereof, and
wherein a thickness of the electrode section is 0.5 µm or more, and is smaller than the thickness of the reinforcing portion. - A piezoelectric actuator as claimed in any one of Claims 1 to 72, wherein the piezoelectric element has a first electrode section disposed on the longitudinal central part of the vibrating plate, and first non-electrode sections having no electrode provided thereon disposed on longitudinal both ends of the vibrating plate.
- A piezoelectric actuator as claimed in any one of Claims 1 to 72, wherein the piezoelectric element has a second electrode section disposed on the widthwise central part of the vibrating plate, and second non-electrode sections having no electrode provided thereon disposed on widthwise both ends of the vibrating plate.
- A piezoelectric actuator as claimed in any one of Claims 1 to 75, wherein the vibrating plate has a plurality of the stacked piezoelectric elements, and
wherein adjacent piezoelectric elements are polarized in the opposite directions. - A piezoelectric actuator as claimed in any one of Claims 1 to 75, wherein the vibrating plate has a plurality of the stacked piezoelectric elements, and
wherein adjacent piezoelectric elements are polarized in the same direction. - A piezoelectric actuator as claimed in any one of Claims 1 to 77, wherein the reinforcing portion is a conductor, and is stacked on the upper and the lower sides of the piezoelectric element, respectively, and
wherein power is supplied to the piezoelectric element via the reinforcing portions stacked on the upper and the lower sides of the piezoelectric element. - A piezoelectric actuator as claimed in any one of Claims 1 to 78, wherein the support member is a conductor, and
wherein power is supplied to the piezoelectric element via the support member. - A piezoelectric actuator as claimed in any one of Claims 1 to 79, further comprising an elastic conductive material contacting the upper and lower surfaces of the vibrating plate to clamp the vibrating plate;
and wherein power is supplied to the piezoelectric element via the elastic conductive material. - A piezoelectric actuator as claimed in any one of Claims 1 to 79, further comprising a wire wound around the vibrating plate while being in contact therewith;
wherein power is supplied to the piezoelectric element via the wire. - A piezoelectric actuator having a piezoelectric element, and driving an object to be driven by the vibration of the piezoelectric element;the piezoelectric actuator comprising reinforcing portions stacked on the upper and lower sides of the piezoelectric element;
wherein power is supplied to the piezoelectric element via the reinforcing portions. - A piezoelectric actuator having a piezoelectric element, and driving an object to be driven by the vibration of the piezoelectric element;the piezoelectric actuator comprising:a base frame; anda support member formed of a conductive material, and supporting the piezoelectric element on the base frame;
wherein power is supplied to the piezoelectric element via the support member. - A piezoelectric actuator having a piezoelectric element, and driving an object to be driven by the vibration of the piezoelectric element;the piezoelectric actuator comprising an elastic conductive material contacting the upper and lower surfaces of the vibrating plate to clamp the vibrating plate;
wherein power is supplied to the piezoelectric element via the elastic conductive material. - A piezoelectric actuator having a piezoelectric element, and driving an object to be driven by the vibration of the piezoelectric element;the piezoelectric actuator comprising a wire wound around the vibrating plate while being in contact therewith;
wherein power is supplied to the piezoelectric element via the wire. - A timepiece comprising:a piezoelectric actuator as claimed in any one of Claims 1 to 85; anda ring-shaped calendar display wheel rotationally driven by the piezoelectric actuator.
- A portable device comprising:a piezoelectric actuator as claimed in any one of Claims 1 to 85; anda battery for supplying power to the piezoelectric actuator.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP07075377.7A EP1819036B1 (en) | 1998-12-21 | 1999-09-08 | Piezoelectric actuator, timepiece, and portable device |
EP12195013.3A EP2568595A3 (en) | 1998-12-21 | 1999-09-08 | Piezoelectric actuator, timepiece, and portable device |
Applications Claiming Priority (11)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP36355098A JP3680602B2 (en) | 1998-12-21 | 1998-12-21 | Piezoelectric actuators, watches and portable devices |
JP36354698 | 1998-12-21 | ||
JP36354698 | 1998-12-21 | ||
JP10363543A JP2000188882A (en) | 1998-12-21 | 1998-12-21 | Drive device, calendar displaying device, portable apparatus, and timepiece |
JP36354398 | 1998-12-21 | ||
JP36355098 | 1998-12-21 | ||
JP6915899 | 1999-03-15 | ||
JP6915899 | 1999-03-15 | ||
JP25022599A JP3719061B2 (en) | 1999-03-15 | 1999-09-03 | Piezoelectric actuators, watches and portable devices |
JP25022599 | 1999-09-03 | ||
PCT/JP1999/004877 WO2000038309A1 (en) | 1998-12-21 | 1999-09-08 | Piezoelectric actuator, time piece, and portable device |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP07075377.7A Division EP1819036B1 (en) | 1998-12-21 | 1999-09-08 | Piezoelectric actuator, timepiece, and portable device |
Publications (3)
Publication Number | Publication Date |
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EP1075079A1 true EP1075079A1 (en) | 2001-02-07 |
EP1075079A4 EP1075079A4 (en) | 2004-09-29 |
EP1075079B1 EP1075079B1 (en) | 2007-06-13 |
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Application Number | Title | Priority Date | Filing Date |
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EP12195013.3A Withdrawn EP2568595A3 (en) | 1998-12-21 | 1999-09-08 | Piezoelectric actuator, timepiece, and portable device |
EP99943216A Expired - Lifetime EP1075079B1 (en) | 1998-12-21 | 1999-09-08 | Piezoelectric actuator, time piece, and portable device |
EP07075377.7A Expired - Lifetime EP1819036B1 (en) | 1998-12-21 | 1999-09-08 | Piezoelectric actuator, timepiece, and portable device |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
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EP12195013.3A Withdrawn EP2568595A3 (en) | 1998-12-21 | 1999-09-08 | Piezoelectric actuator, timepiece, and portable device |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
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EP07075377.7A Expired - Lifetime EP1819036B1 (en) | 1998-12-21 | 1999-09-08 | Piezoelectric actuator, timepiece, and portable device |
Country Status (6)
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US (3) | US6885615B1 (en) |
EP (3) | EP2568595A3 (en) |
CN (4) | CN100367649C (en) |
DE (1) | DE69936300T2 (en) |
HK (1) | HK1035611A1 (en) |
WO (1) | WO2000038309A1 (en) |
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Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1241371B (en) * | 1964-03-04 | 1967-05-24 | Georges Ceppi | Clock oscillator |
DE1488698A1 (en) * | 1965-08-05 | 1969-06-19 | Siemens Ag | Electric drive device, in particular drive device for a small mechanical payload |
DE2530045A1 (en) * | 1974-07-05 | 1976-02-05 | Ki Politekhn I Im 50 Letia Wel | ELECTRIC MOTOR |
US4232510A (en) * | 1974-09-25 | 1980-11-11 | Citizen Watch Co., Ltd. | Timepiece |
DE3309239A1 (en) * | 1983-03-15 | 1984-09-20 | Siemens AG, 1000 Berlin und 8000 München | Piezo-electric motor |
DE3920726A1 (en) * | 1988-06-29 | 1990-01-04 | Olympus Optical Co | Ultrasonic oscillator |
DE3833342A1 (en) * | 1988-09-30 | 1990-04-05 | Siemens Ag | Piezoelectric motor |
EP0731514A1 (en) * | 1995-03-07 | 1996-09-11 | Seiko Instruments Inc. | Ultrasonic motor and electronic apparatus provided with ultrasonic motor |
US5747916A (en) * | 1995-02-28 | 1998-05-05 | Nec Corporation | Packaged piezoelectric transformer unit |
Family Cites Families (54)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5434010A (en) * | 1977-07-20 | 1979-03-13 | Seiko Instr & Electronics Ltd | Electronic clock |
JPS5937672B2 (en) | 1979-03-19 | 1984-09-11 | 年生 指田 | Rotary drive device using ultrasonic vibration |
DE3227819C2 (en) | 1982-07-26 | 1985-09-05 | Siemens AG, 1000 Berlin und 8000 München | Connector with insertable fuse |
JPS6016180A (en) | 1983-07-06 | 1985-01-26 | Horiba Ltd | Rotary drive device |
JPS60150757A (en) | 1984-01-18 | 1985-08-08 | 三菱レイヨン株式会社 | Hollow yarn membrane type artificial lung |
JPS60178677A (en) | 1984-02-24 | 1985-09-12 | Nippon Telegr & Teleph Corp <Ntt> | Bending type piezoelectric actuator |
JPS62239876A (en) * | 1986-04-11 | 1987-10-20 | Nippon Soken Inc | Piezoelectric motor |
JPS63118591U (en) * | 1987-01-26 | 1988-08-01 | ||
JPS63294281A (en) * | 1987-05-25 | 1988-11-30 | Hiroshi Shimizu | Piezoelectric driving device |
JPS63118591A (en) | 1987-10-08 | 1988-05-23 | 高砂工業株式会社 | Smoking gas agitator in smoking chamber of tile |
JP2590536B2 (en) | 1988-07-14 | 1997-03-12 | 日本電気株式会社 | Ultrasonic motor |
JPH074074B2 (en) | 1988-09-20 | 1995-01-18 | 株式会社トーキン | Ultrasonic motor |
JPH031692A (en) | 1989-05-29 | 1991-01-08 | Nippon Telegr & Teleph Corp <Ntt> | Inter-multi-point video communication system |
JP2847758B2 (en) * | 1989-06-06 | 1999-01-20 | 日本電気株式会社 | Driving method of ultrasonic motor and vibrator for ultrasonic motor |
JPH03145977A (en) | 1989-10-30 | 1991-06-21 | Okuma Mach Works Ltd | Rotary machine |
JPH04129942A (en) * | 1990-05-31 | 1992-04-30 | Omron Corp | Paper sheet conveyer |
JPH04145879A (en) * | 1990-10-02 | 1992-05-19 | Omron Corp | Ultrasonic motor |
US5345137A (en) * | 1991-04-08 | 1994-09-06 | Olympus Optical Co., Ltd. | Two-dimensionally driving ultrasonic motor |
JPH053688A (en) * | 1991-06-21 | 1993-01-08 | Omron Corp | Ultrasonic motor |
JPH052594U (en) * | 1991-06-21 | 1993-01-14 | オムロン株式会社 | Ultrasonic motor |
JP2999018B2 (en) | 1991-06-25 | 2000-01-17 | 富士通株式会社 | Automatic work organization device |
JPH05122955A (en) | 1991-10-29 | 1993-05-18 | Fuji Electric Co Ltd | Piezoelectric driving motor |
JPH05308786A (en) | 1992-04-30 | 1993-11-19 | Ricoh Co Ltd | Driving mechanism |
US5319278A (en) * | 1992-06-05 | 1994-06-07 | Nec Corporation | Longitudinal-torsional resonance ultrasonic motor with improved support structure |
CH685660B5 (en) * | 1992-09-09 | 1996-03-15 | Asulab Sa | Timepiece provided with drive means forms by a piezoelectric motor. |
JP3194647B2 (en) | 1993-04-28 | 2001-07-30 | オリンパス光学工業株式会社 | Ultrasonic linear actuator |
US5616980A (en) * | 1993-07-09 | 1997-04-01 | Nanomotion Ltd. | Ceramic motor |
KR100341871B1 (en) * | 1993-09-08 | 2002-11-29 | 아스라브 쏘시에떼 아노님 | Piezoelectric motor with rotor position detector and its piezomotor stator manufacturing method |
JP3412648B2 (en) * | 1994-01-31 | 2003-06-03 | 株式会社ニコン | Ultrasonic motor |
DE69517232T2 (en) * | 1994-03-23 | 2000-10-26 | Nikon Corp | Ultrasonic motor |
JP3823340B2 (en) * | 1994-08-01 | 2006-09-20 | 株式会社ニコン | Vibration motor |
EP0739083B1 (en) * | 1994-11-07 | 2002-02-27 | Matsushita Electric Industrial Co., Ltd. | Piezoelectric actuator and pyroelectric infrared-ray sensor using the same |
JPH08275558A (en) * | 1995-03-28 | 1996-10-18 | Fanuc Ltd | Piezoelectric motor |
CN2252448Y (en) * | 1995-11-24 | 1997-04-16 | 中国科学院上海冶金研究所 | Piezoelectric ultrasonic motor |
JPH1011956A (en) * | 1996-06-19 | 1998-01-16 | Hitachi Ltd | Vibration control leg for optical disk apparatus |
JP3363320B2 (en) | 1996-07-05 | 2003-01-08 | 元旦ビューティ工業株式会社 | Papermaking pulp sludge cement board and its manufacturing method |
JP3265461B2 (en) | 1997-02-12 | 2002-03-11 | シャープ株式会社 | Ultrasonic drive motor |
JPH1132491A (en) * | 1997-05-16 | 1999-02-02 | Seiko Instr Inc | Ultrasonic motor and electronic equipment with it |
JP3184117B2 (en) * | 1997-05-23 | 2001-07-09 | セイコーインスツルメンツ株式会社 | Ultrasonic motor and electronic device with ultrasonic motor |
JPH1152075A (en) * | 1997-08-04 | 1999-02-26 | Seiko Epson Corp | Actuator and timepiece thereof |
US6266296B1 (en) * | 1997-08-04 | 2001-07-24 | Seiko Epson Corporation | Actuator, and timepiece and notification device using the same |
JP3792864B2 (en) * | 1997-10-23 | 2006-07-05 | セイコーインスツル株式会社 | Ultrasonic motor and electronic equipment with ultrasonic motor |
JP3541656B2 (en) | 1997-11-25 | 2004-07-14 | スズキ株式会社 | Motorcycle with unit swing type engine |
DE19757139A1 (en) * | 1997-12-20 | 1999-06-24 | Philips Patentverwaltung | Drive device for at least two rotary elements with at least one piezoelectric drive element |
JP4510179B2 (en) * | 1998-08-07 | 2010-07-21 | セイコーインスツル株式会社 | Ultrasonic motor and electronic equipment with ultrasonic motor |
JP3610241B2 (en) | 1998-09-30 | 2005-01-12 | 京セラ株式会社 | Ultrasonic motor for stage equipment |
CN100367649C (en) * | 1998-12-21 | 2008-02-06 | 精工爱普生株式会社 | Piezoelectric actuator and timepiece |
US7075211B1 (en) * | 1999-05-31 | 2006-07-11 | Nanomotion Ltd. | Multilayer piezoelectric motor |
DE19945042C2 (en) * | 1999-06-30 | 2002-12-19 | Pi Ceramic Gmbh Keramische Tec | Piezoelectric drive, in particular piezoelectric motor and circuit arrangement for operating a piezoelectric motor |
US6310750B1 (en) * | 1999-10-20 | 2001-10-30 | Read-Rite Corporation | Disk drive actuator arm with microactuated read/write head positioning |
JP4103799B2 (en) * | 2002-03-04 | 2008-06-18 | セイコーエプソン株式会社 | Linear actuator |
WO2003077410A1 (en) * | 2002-03-11 | 2003-09-18 | Seiko Epson Corporation | Rotation/movement converting actuator |
JP2004266943A (en) * | 2003-02-28 | 2004-09-24 | Seiko Epson Corp | Ultrasonic motor, operation device, optical system switching mechanism, and electrical apparatus |
JP4141990B2 (en) * | 2004-07-12 | 2008-08-27 | セイコーエプソン株式会社 | Piezoelectric actuators and equipment |
-
1999
- 1999-09-08 CN CNB2004100435781A patent/CN100367649C/en not_active Expired - Fee Related
- 1999-09-08 CN CN99803151.8A patent/CN1235329C/en not_active Expired - Fee Related
- 1999-09-08 CN CNB031522874A patent/CN100346566C/en not_active Expired - Fee Related
- 1999-09-08 DE DE69936300T patent/DE69936300T2/en not_active Expired - Lifetime
- 1999-09-08 US US09/622,685 patent/US6885615B1/en not_active Expired - Fee Related
- 1999-09-08 EP EP12195013.3A patent/EP2568595A3/en not_active Withdrawn
- 1999-09-08 WO PCT/JP1999/004877 patent/WO2000038309A1/en active IP Right Grant
- 1999-09-08 EP EP99943216A patent/EP1075079B1/en not_active Expired - Lifetime
- 1999-09-08 EP EP07075377.7A patent/EP1819036B1/en not_active Expired - Lifetime
- 1999-09-08 CN CNA2007100916747A patent/CN101039085A/en active Pending
-
2001
- 2001-07-05 HK HK01104648A patent/HK1035611A1/en not_active IP Right Cessation
-
2004
- 2004-02-04 US US10/771,786 patent/US7078847B2/en not_active Expired - Fee Related
-
2006
- 2006-06-20 US US11/425,330 patent/US7253552B2/en not_active Expired - Fee Related
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1241371B (en) * | 1964-03-04 | 1967-05-24 | Georges Ceppi | Clock oscillator |
DE1488698A1 (en) * | 1965-08-05 | 1969-06-19 | Siemens Ag | Electric drive device, in particular drive device for a small mechanical payload |
DE2530045A1 (en) * | 1974-07-05 | 1976-02-05 | Ki Politekhn I Im 50 Letia Wel | ELECTRIC MOTOR |
US4232510A (en) * | 1974-09-25 | 1980-11-11 | Citizen Watch Co., Ltd. | Timepiece |
DE3309239A1 (en) * | 1983-03-15 | 1984-09-20 | Siemens AG, 1000 Berlin und 8000 München | Piezo-electric motor |
DE3920726A1 (en) * | 1988-06-29 | 1990-01-04 | Olympus Optical Co | Ultrasonic oscillator |
DE3833342A1 (en) * | 1988-09-30 | 1990-04-05 | Siemens Ag | Piezoelectric motor |
US5747916A (en) * | 1995-02-28 | 1998-05-05 | Nec Corporation | Packaged piezoelectric transformer unit |
EP0731514A1 (en) * | 1995-03-07 | 1996-09-11 | Seiko Instruments Inc. | Ultrasonic motor and electronic apparatus provided with ultrasonic motor |
Non-Patent Citations (3)
Title |
---|
ANGER H H: "Piezokeramische Vibromotoren" FEINGERAETETECHNIK, 1983, EAST GERMANY, vol. 32, no. 10, 1983, pages 470-473, XP001181520 ISSN: 0014-9683 * |
NISHIBORI K ET AL: "PWM DRIVING CHARACTERISTICS OF ROBOT HAND WITH FINGERS USING VIBRATION-TYPE ULTRASONIC MOTORS" PROCEEDINGS OF THE IECON '97: 23RD. INTERNATIONAL CONFERENCE ON INDUSTRIAL ELECTRONICS, CONTROL, AND INSTRUMENTATION. NEW ORLEANS, NOV. 9 - 14, 1997, PROCEEDINGS OF IEEE IECON: INTERNATIONAL CONFERENCE ON INDUSTRIAL ELECTRONICS, CONTROL, AND INSTRUME, vol. 3, 9 November 1997 (1997-11-09), pages 1355-1360, XP000790715 ISBN: 0-7803-3933-9 * |
See also references of WO0038309A1 * |
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US11831254B2 (en) | 2016-12-27 | 2023-11-28 | Canon Kabushiki Kaisha | Vibrator, vibration wave drive device, vibration wave motor, and electronical device |
Also Published As
Publication number | Publication date |
---|---|
CN1235329C (en) | 2006-01-04 |
EP1819036A2 (en) | 2007-08-15 |
DE69936300D1 (en) | 2007-07-26 |
EP1075079B1 (en) | 2007-06-13 |
US20040156274A1 (en) | 2004-08-12 |
EP1819036A3 (en) | 2008-06-11 |
CN1291373A (en) | 2001-04-11 |
DE69936300T2 (en) | 2008-06-19 |
WO2000038309A1 (en) | 2000-06-29 |
CN1578096A (en) | 2005-02-09 |
US7253552B2 (en) | 2007-08-07 |
HK1035611A1 (en) | 2001-11-30 |
EP2568595A3 (en) | 2013-05-15 |
US20060226737A1 (en) | 2006-10-12 |
EP1819036B1 (en) | 2013-06-19 |
CN100367649C (en) | 2008-02-06 |
US7078847B2 (en) | 2006-07-18 |
CN101039085A (en) | 2007-09-19 |
EP1075079A4 (en) | 2004-09-29 |
EP2568595A2 (en) | 2013-03-13 |
CN100346566C (en) | 2007-10-31 |
US6885615B1 (en) | 2005-04-26 |
CN1520020A (en) | 2004-08-11 |
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