EP1032012A3 - Electron-emitting device, electron source, and manufacture method for image-forming apparatus - Google Patents

Electron-emitting device, electron source, and manufacture method for image-forming apparatus Download PDF

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Publication number
EP1032012A3
EP1032012A3 EP00301465A EP00301465A EP1032012A3 EP 1032012 A3 EP1032012 A3 EP 1032012A3 EP 00301465 A EP00301465 A EP 00301465A EP 00301465 A EP00301465 A EP 00301465A EP 1032012 A3 EP1032012 A3 EP 1032012A3
Authority
EP
European Patent Office
Prior art keywords
electron
emitting device
image
forming apparatus
manufacture method
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP00301465A
Other languages
German (de)
French (fr)
Other versions
EP1032012A2 (en
EP1032012B1 (en
Inventor
Kazuhiro Jindai
Toshikazu Ohnishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of EP1032012A2 publication Critical patent/EP1032012A2/en
Publication of EP1032012A3 publication Critical patent/EP1032012A3/en
Application granted granted Critical
Publication of EP1032012B1 publication Critical patent/EP1032012B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
    • H01J9/027—Manufacture of electrodes or electrode systems of cold cathodes of thin film cathodes

Abstract

A method of manufacturing an electron-emitting device has a step of forming a pair of conductors on a substrate, the conductors being spaced from each other, and an activation process of depositing carbon or carbon compound on at least one side of the pair of conductors in an atmosphere of carbon compound gas. The activation process includes a plurality of processes of two or more stages including a first process and a second process. The first process is executed in an atmosphere of the carbon compound gas having a partial pressure higher than a partial of the second process used as a last activation process.
EP20000301465 1999-02-25 2000-02-24 Electron-emitting device, electron source, and manufacture method for image-forming apparatus Expired - Lifetime EP1032012B1 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP4921899 1999-02-25
JP4921899 1999-02-25
JP5149799 1999-02-26
JP5149799 1999-02-26

Publications (3)

Publication Number Publication Date
EP1032012A2 EP1032012A2 (en) 2000-08-30
EP1032012A3 true EP1032012A3 (en) 2002-01-23
EP1032012B1 EP1032012B1 (en) 2009-03-25

Family

ID=26389591

Family Applications (1)

Application Number Title Priority Date Filing Date
EP20000301465 Expired - Lifetime EP1032012B1 (en) 1999-02-25 2000-02-24 Electron-emitting device, electron source, and manufacture method for image-forming apparatus

Country Status (2)

Country Link
EP (1) EP1032012B1 (en)
DE (1) DE60041845D1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3323853B2 (en) * 1999-02-25 2002-09-09 キヤノン株式会社 Electron emitting element, electron source, and method of manufacturing image forming apparatus
JP3492325B2 (en) * 2000-03-06 2004-02-03 キヤノン株式会社 Method of manufacturing image display device

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0660357A1 (en) * 1993-12-27 1995-06-28 Canon Kabushiki Kaisha Electron-emitting device, method of manufacturing the same and image-forming apparatus
EP0692809A2 (en) * 1994-07-12 1996-01-17 Canon Kabushiki Kaisha Apparatus for manufacturing electron source and image forming apparatus
EP0800198A2 (en) * 1996-04-03 1997-10-08 Canon Kabushiki Kaisha Image-forming apparatus and method of manufacturing same
EP0908916A1 (en) * 1997-09-16 1999-04-14 Canon Kabushiki Kaisha Electron source manufacture method, image forming apparatus manufacture method, and electron source manufacture apparatus
EP0955662A1 (en) * 1995-03-13 1999-11-10 Canon Kabushiki Kaisha Methods of manufacturing an electron source and image forming apparatus

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0660357A1 (en) * 1993-12-27 1995-06-28 Canon Kabushiki Kaisha Electron-emitting device, method of manufacturing the same and image-forming apparatus
EP0692809A2 (en) * 1994-07-12 1996-01-17 Canon Kabushiki Kaisha Apparatus for manufacturing electron source and image forming apparatus
EP0955662A1 (en) * 1995-03-13 1999-11-10 Canon Kabushiki Kaisha Methods of manufacturing an electron source and image forming apparatus
EP0800198A2 (en) * 1996-04-03 1997-10-08 Canon Kabushiki Kaisha Image-forming apparatus and method of manufacturing same
EP0908916A1 (en) * 1997-09-16 1999-04-14 Canon Kabushiki Kaisha Electron source manufacture method, image forming apparatus manufacture method, and electron source manufacture apparatus

Also Published As

Publication number Publication date
EP1032012A2 (en) 2000-08-30
EP1032012B1 (en) 2009-03-25
DE60041845D1 (en) 2009-05-07

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