EP0920920A3 - Spin-coating apparatus for preparing optical discs - Google Patents

Spin-coating apparatus for preparing optical discs Download PDF

Info

Publication number
EP0920920A3
EP0920920A3 EP98309940A EP98309940A EP0920920A3 EP 0920920 A3 EP0920920 A3 EP 0920920A3 EP 98309940 A EP98309940 A EP 98309940A EP 98309940 A EP98309940 A EP 98309940A EP 0920920 A3 EP0920920 A3 EP 0920920A3
Authority
EP
European Patent Office
Prior art keywords
spin
optical discs
coating apparatus
pointed end
preparing optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP98309940A
Other languages
German (de)
French (fr)
Other versions
EP0920920B1 (en
EP0920920A2 (en
Inventor
Seiji Ishizuka
Yoshinobu Katagiri
Tadashi Sugiyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujifilm Holdings Corp
Original Assignee
Fuji Photo Film Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Photo Film Co Ltd filed Critical Fuji Photo Film Co Ltd
Publication of EP0920920A2 publication Critical patent/EP0920920A2/en
Publication of EP0920920A3 publication Critical patent/EP0920920A3/en
Application granted granted Critical
Publication of EP0920920B1 publication Critical patent/EP0920920B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/02—Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface
    • B05C11/08—Spreading liquid or other fluent material by manipulating the work, e.g. tilting

Abstract

A spin-coating apparatus (10) for preparing optical discs (1) is composed of an applying device equipped with a nozzle (12) having a pointed end for giving a coating liquid onto a disc substrate (1), a rotatable spinner head (13) for keeping the substrate (1) horizontally, a round guard wall (15) provided around the spinner head (13) which has an opening (16) on its top and keeps the applied coating liquid within the guard wall (15), and an air exhaust system (18), wherein the nozzle (12) has a surface of polytetrafluoroethylene at least at the pointed end and on an inside and outside walls following the pointed end at a length of 1 mm or more.
EP19980309940 1997-12-04 1998-12-04 Spin-coating apparatus for preparing optical discs Expired - Lifetime EP0920920B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP35240697 1997-12-04
JP35240697A JPH11165115A (en) 1997-12-04 1997-12-04 Spin-coating device for manufacture optical disc

Publications (3)

Publication Number Publication Date
EP0920920A2 EP0920920A2 (en) 1999-06-09
EP0920920A3 true EP0920920A3 (en) 2000-12-27
EP0920920B1 EP0920920B1 (en) 2003-05-07

Family

ID=18423859

Family Applications (1)

Application Number Title Priority Date Filing Date
EP19980309940 Expired - Lifetime EP0920920B1 (en) 1997-12-04 1998-12-04 Spin-coating apparatus for preparing optical discs

Country Status (3)

Country Link
EP (1) EP0920920B1 (en)
JP (1) JPH11165115A (en)
DE (1) DE69814315T2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005261996A (en) * 2004-03-16 2005-09-29 Toppan Printing Co Ltd Coating apparatus for photosensitive colored resin composition and method for manufacturing color filter for display device
JP4989370B2 (en) 2006-10-13 2012-08-01 大日本スクリーン製造株式会社 Nozzle and substrate processing apparatus having the same

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2088748A (en) * 1980-12-10 1982-06-16 Gusmer Corp Replaceable nozzle for a spray gun
US5002008A (en) * 1988-05-27 1991-03-26 Tokyo Electron Limited Coating apparatus and method for applying a liquid to a semiconductor wafer, including selecting a nozzle in a stand-by state
US5143552A (en) * 1988-03-09 1992-09-01 Tokyo Electron Limited Coating equipment
JPH06182274A (en) * 1992-12-16 1994-07-05 Shin Etsu Chem Co Ltd Discharging nozzle for light beam-curing type material
WO1995026237A1 (en) * 1994-03-29 1995-10-05 Siemens Aktiengesellschaft Nozzle for the metered application of drops of adhesive

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2088748A (en) * 1980-12-10 1982-06-16 Gusmer Corp Replaceable nozzle for a spray gun
US5143552A (en) * 1988-03-09 1992-09-01 Tokyo Electron Limited Coating equipment
US5002008A (en) * 1988-05-27 1991-03-26 Tokyo Electron Limited Coating apparatus and method for applying a liquid to a semiconductor wafer, including selecting a nozzle in a stand-by state
JPH06182274A (en) * 1992-12-16 1994-07-05 Shin Etsu Chem Co Ltd Discharging nozzle for light beam-curing type material
WO1995026237A1 (en) * 1994-03-29 1995-10-05 Siemens Aktiengesellschaft Nozzle for the metered application of drops of adhesive

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 018, no. 525 (C - 1257) 5 October 1994 (1994-10-05) *

Also Published As

Publication number Publication date
EP0920920B1 (en) 2003-05-07
JPH11165115A (en) 1999-06-22
DE69814315T2 (en) 2004-01-22
DE69814315D1 (en) 2003-06-12
EP0920920A2 (en) 1999-06-09

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