EP0898163A1 - Method and apparatus for automatic inspection of moving surfaces - Google Patents

Method and apparatus for automatic inspection of moving surfaces Download PDF

Info

Publication number
EP0898163A1
EP0898163A1 EP97114590A EP97114590A EP0898163A1 EP 0898163 A1 EP0898163 A1 EP 0898163A1 EP 97114590 A EP97114590 A EP 97114590A EP 97114590 A EP97114590 A EP 97114590A EP 0898163 A1 EP0898163 A1 EP 0898163A1
Authority
EP
European Patent Office
Prior art keywords
light
illumination
observation
sensitive sensor
sensor device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP97114590A
Other languages
German (de)
French (fr)
Other versions
EP0898163B1 (en
Inventor
Detlef Dr. Paul
Ari Härkönen
Timo Piironen
Pertti Kontio
Martti Karppinen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
VTT Electronics
Thermo Radiometrie Oy
Original Assignee
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
VTT Electronics
Spectra Physics Visiontech Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to AT97114590T priority Critical patent/ATE197503T1/en
Application filed by Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV, VTT Electronics, Spectra Physics Visiontech Oy filed Critical Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Priority to ES97114590T priority patent/ES2153150T3/en
Priority to DE69703487T priority patent/DE69703487T2/en
Priority to EP97114590A priority patent/EP0898163B1/en
Priority to JP2000507998A priority patent/JP3423688B2/en
Priority to PCT/EP1998/004560 priority patent/WO1999010730A1/en
Priority to US09/136,376 priority patent/US6166393A/en
Publication of EP0898163A1 publication Critical patent/EP0898163A1/en
Application granted granted Critical
Publication of EP0898163B1 publication Critical patent/EP0898163B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/89Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901Optical details; Scanning details
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23GCLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
    • C23G3/00Apparatus for cleaning or pickling metallic material
    • C23G3/02Apparatus for cleaning or pickling metallic material for cleaning wires, strips, filaments continuously
    • C23G3/027Associated apparatus, e.g. for pretreating or after-treating
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/8806Specially adapted optical and illumination features
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/8806Specially adapted optical and illumination features
    • G01N2021/8822Dark field detection
    • G01N2021/8825Separate detection of dark field and bright field

Definitions

  • the present invention relates to a method and to an apparatus for automatic inspection of moving surfaces, in particular to a method and an apparatus for automatic inspection of moving surfaces for applications such as the inspection of steel strips, wood, leather or tiles. Even more particular the present invention relates to a method and an apparatus for automatic inspection of moving surfaces using at least three different illumination/observation channels.
  • Products like the above-mentioned steel strips, wood, leather or tiles are typically produced at high speed in a continuous process and they have to be inspected during motion.
  • the defects which have to be detected and classified automatically are anomalies in the surfaces with respect to e.g. reflectivity, color, glossiness, texture and the 3D-profile of the surface under inspection.
  • the applied cameras are monochrome or color line scan cameras.
  • fluorescent lamps, halogen lamps or fiber optic illuminators are commonly used.
  • the defects to be detected and classified are e.g. scratches, dents, knots and the like as defined by the application. Typically these defects manifest themselves in different ways, e.g. in deviations of reflectivity, glossiness, color, texture or the 3D-profile of the surface under inspection.
  • a critical part in the system design is to define the apparatus for image acquisition, including the selection of a camera and the illumination system, and to determine the geometrical relations of the components.
  • the aim is to achieve images from the surface which contain the necessary information to detect and to distinguish all of the defects automatically, including 3D-defects. In many cases the result is disappointing. The reason is simply that monocular images do not contain reliable and unambiguous information on the 3D-profile and glossiness of the surface.
  • a multi-camera setup is used in some applications by means of which the surface is inspected under different viewing conditions simultaneously. In such setups, typically two monochromatic cameras and one illuminator are used to obtain bright and dark field images of the same object.
  • the technique is named photometric stereo because it uses the radiance values recorded at a single pixel location in successive views, rather than the relative positions of displaced features in binocular stereo. Since the viewing geometry in this technique is not changed, the correspondence between pixels in the taken set of images is known a priori.
  • the photometric stereo method requires that the inspected object is resting, giving time to switch the lamps and to take the images, and that the reflectance distribution of the surface is known. Therefore, the method cannot be applied for inspection of moving materials and surfaces of unknown reflectivity.
  • DE 195 11 534 A1 relates to a method and an apparatus for detecting 3D-defects, such as dents and steps in a flat surface, in applications for automatic surface inspection, following the idea of photometric stereo.
  • the surface under inspection is simultaneously illuminated with at least two lamps from different directions under dark field conditions, where the light from the lamps has different colors.
  • a color line scan camera is used for image acquisition and 3D-defects are detected by analyzing the measured color values.
  • This method yields information on 3D-defects but not on glossiness and reflectivity of the surface because a symmetrical dark field illumination is used. Therefore, the capabilities for discriminating between different types of defects are limited. Furthermore, defect detection is done by a color classifier. Using this method it is not possible to adapt to a changing appearance of the inspected surface or to changes of the illumination. In practical applications, the sensitivity for defect detection is limited.
  • EP 0 764 845 A2 describes an apparatus for image acquisition which is similar to the one described in DE 195 11 534 A1, but the method for the detection of 3D-defects is only based on shadows, which can be observed at the edges of steps in the surface.
  • the present invention provides a method for automatic inspection of moving surfaces using at least three different illumination/observation channels, said method comprising the steps of:
  • the present invention provides an apparatus for automatic inspection of moving surfaces, comprising
  • the present invention provides a method and an apparatus for automatic surface inspection which makes it possible to extract and to process information on the physical properties of the surface, like reflectivity, glossiness and slope of surface elements separately.
  • the advantage is that especially 3D-defects can be detected and classified with high reliability even in textured surfaces.
  • Applications are e.g. the inspection of steel, leather, wood, extruded profiles or other materials, which are produced in a continuous process with a high speed and have to be inspected during motion.
  • the present invention is based on the idea of photometric stereo.
  • Information on reflectivity, color, glossiness and profile of the inspected surface is captured, e.g. by an apparatus comprising a color line scan camera and at least three spatially separated light sources with different spectral characteristics.
  • the result of the image acquisition are registered images, e.g. R-, G-, B-images, basically corresponding to the channels of illumination.
  • These images are processed in several steps comprising estimation of physical properties for each surface element, detection of surface anomalies, feature extraction and classification.
  • the first illumination/observation channel is formed by a light sensitive sensor device and a first light source
  • the second illumination/observation channel is formed by the same light sensitive sensor device and by a second light source
  • the third illumination/observation channel is formed by the same light sensitive sensor device and a third light source.
  • the first illumination/observation channel is formed by a first light sensitive sensor device and by a light source
  • the second illumination/observation channel is formed by a second light sensitive sensor device and the same light source
  • the third illumination/observation channel is formed by a third light sensitive device and the same light source.
  • information on reflectivity, glossiness and slope from a moving surface are extracted separately from the surface element under inspection and based on this information the surfaces are inspected with enhanced reliability at less false alarm rate.
  • step S100 an image of the moving surface under inspection is acquired.
  • the apparatus schematically shown at step S100 in Fig. 1 will be described with reference to Fig. 3 hereinafter.
  • step S102 physical properties of the inspected surface element are estimated on the basis of the acquired image.
  • step S104 anomalies in the physical properties of the surface are detected.
  • step S106 specific features are extracted and in step S108 the detected regions are classified.
  • step S110 a decision is made whether the inspected surface is acceptable, i.e. fulfills predetermined requirements with respect to the physical properties, or whether the surface exhibits defects.
  • the image acquired in step S100 is formed from three different images which is illustrated by the arrows 100a, 100b and 100c between step S100 and step S102.
  • the three images are represented by three video signals, wherein a first signal 100a representing a first image is obtained by observing the surface to be inspected under a first observation condition by means of a first of at least three different illumination/observation channels.
  • the second and the third signals on line 100b and 100c, respectively, are obtained by observing the surface under a second observation condition by means of a second and a third of the at least three different illumination/observation channels.
  • second and third signals physical properties of the surface elements are derived in step S102.
  • step S100 information on reflectivity, color, glossiness and profile of the inspected surface is captured by an apparatus with a color line scan camera and three spatially separated light sources with different spectral characteristics, following the above outlined idea of photometric stereo.
  • the result of the image acquisition in step S100 are in this embodiment three registered images (R, G, B) basically corresponding to three channels of illumination.
  • the images are processed as follows:
  • step S102 the physical property or properties for each surface element are estimated and the result are physical property images representing reflectivity, color, glossiness and slope of the surface element, as it is illustrated by the four arrows between block S102 and block S104. These images have the same spatial resolution as the original image.
  • step S104 the anomalies are detected. Local anomalies within the property images are detected at the same spatial resolution as the original image, and regional anomalies, e.g. due to a shallow wave in the surface or surface roughness, are detected by computing the moving average or the moving standard deviation of the slope of the surface elements followed by a comparison of the resulting statistical figures with thresholds.
  • the output of step S 104 are multiple binary images, as indicated by the plurality of arrows connecting step S104 and step S106.
  • step S106 features from the binary images generated in step S104 are extracted.
  • Simple or complex geometrical features are calculated, such as the area and shape of blobs in the binary images.
  • neighborhood relations can be taken into account, e.g. accumulation of blobs, or the overlap of blobs within different layers of the multiple binary images received from step S104.
  • step S108 the classification is carried out and the segmented regions of the detection image are classified due to the extracted features.
  • Fig. 2 Prior to describing preferred embodiments of the inventive apparatus and the inventive method, with respect to Fig. 2 it is illustrated how light is scattered dependent from the reflectivity, glossiness and slope, respectively, of a surface.
  • the apparatus according to the present invention which is used for image acquisition is, according to a preferred embodiment, intended to gather information on reflectivity, glossiness, color and slope of the surface elements under inspection.
  • the apparatus and method described below are based on considerations as illustrated in Fig. 2 which shows the way how light will be scattered from a surface element if it is illuminated by a ray of light which is incident orthogonal to the inspected surface.
  • Fig. 2a the scattering characteristics with respect to the reflectivity of a surface S are shown.
  • a beam of light 200 is incident orthogonal to the surface S and light beams 202 are reemitted from the surface S.
  • a line 204 is drawn around the reemitted beams 202 indicating the lobe of the reflected light.
  • the energy of the reemitted light will be low, as it is indicated by the small lobe 204 indicating a low volume V 1 of the reflected light distribution.
  • the energy of reemitted light will be high, as it is illustrated by the large lobe 204, i.e. the volume V 2 of the reflected light distribution is high.
  • the shape of the light distribution i.e. the lobes 204, will be the same.
  • Fig. 2b the light distribution of the reemitted light for a different glossiness of the surface S is illustrated. Again a beam light of 200 is incident orthogonal to the surface S. In case of a low glossiness of the surface S (left-hand side of Fig. 2b) the light distribution as indicated by lobe 204 will be broad. For a high glossiness of surface S (right-hand side of Fig. 2b) the light distribution, again indicated by lobe 204, will be slim.
  • the reflected light distribution indicated by the volumes V 1 and V 2 is supposed to be the same in case of a low glossiness of the surface S and for a surface S of high glossiness in this example.
  • Fig. 2c the reflected light distribution in case of a slope in surface S is shown. Again a beam of light 200 is incident orthogonal to surface S and the reflected light distribution is again indicated by lobe 204, whereas the amount of reflected light is again indicated by the volumes V 1 and V 2 .
  • the light distribution 204 will be symmetrical with respect to the surface normal, and it will be tilted if the surface element S has a slope 206.
  • the volumes V 1 and V 2 are the same in both cases.
  • the different shapes of the lobes 204 and volumes V 1 , V 2 of the reemitted light distribution can be discriminated by simultaneously observing the illuminated surface element with several light sensitive sensors from different directions. The same will be true, if the light source used in Fig. 2 for illuminating the surface S with the beam of light 200 is replaced by a single light sensitive sensor, like a camera, and if the sensors are replaced by light sources.
  • the apparatus in Fig. 3 is one preferred embodiment of the present invention and is indicated by reference sign 300.
  • the apparatus 300 comprises a camera C which is a color line scan camera.
  • the camera C comprises a lens 304 and a processing section 306 for generating signals representing the received images.
  • Section 306 has three outputs R, G, B wherein the signals are representing a red image (R), a green image (G) and a blue image (B).
  • the camera C is arranged above the surface S to be inspected in such manner that the normal 308 of surface S is coincident with the axis of observation 310 of the camera C.
  • light sources L1, L2 and L3 emitting light beams 312, 314 and 316 of different spectral characteristics are provided.
  • Light from the respective light sources is viewn under an angle ⁇ by the inspected line of the surface.
  • the light beams 312 from the first light source L1 are directed via a mirror M towards the surface S in such a manner that they are incident orthogonal onto surface S.
  • the light sources L2 and L3 are arranged such that the respective beams of light 314 and 316 emitted from the light sources enclose with the normal 308 of the surface S an angle ⁇ .
  • Light source L1 is illuminating surface S under bright field conditions by means of the mirror M, which can be a beam splitting mirror.
  • Light sources L2 and L3 illuminate the surface S under symmetrical dark field conditions.
  • a bright field condition is a condition under which light emitted, e.g. by light source L1, is reflected from a specular surface S back towards the lens 304 of camera C.
  • a dark field condition is a condition under which, in case of a non-defective surface, light, e.g. emitted by light source L2 is not reflected towards the lens 304 of camera C from a specular surface.
  • the angle ⁇ and ⁇ can be chosen in accordance with the demands of the application for optimized sensitivity and robustness of the measurements. E.g. for glossy surfaces ⁇ has to be small.
  • Fig. 4 the same reference signs are used for identical elements, which have already been described with reference to Fig. 3.
  • the difference between the apparatus shown in Fig. 4 and the apparatus shown in Fig. 3 is that the axis of observation 310 of camera C and the beams of light 312 emitted from light source L1 are not coincident with the normal 308 of surface S.
  • the axis of observation 310 and normal 308 as well as the beams of light 312 of light source L1 and the normal 308 enclose an angle ⁇ .
  • the first illumination/observation channel is formed by a light sensitive sensor device which is according to Fig. 3 and 4 the camera C and by the first light source L1, wherein the camera C receives light of the first beam 312 of light reemitted from the surface element S.
  • the second illumination/observation channel is formed by the light sensitive sensor device C and the second light source L2 and the light sensitive sensor device or camera C receives light of the second beam 314 of light reemitted from the surface element S.
  • the third illumination/observation channel is formed by the light sensitive sensor device or camera C and the third light source L3, and the camera C receives light of the third beam 316 of light reemitted from the surface element S.
  • the three beams 312, 314 and 316 of light all have different characteristics, and according to a specific embodiment have different spectral characteristics, i.e. different colors.
  • the second light source L2 and third light source L3 operating under a dark field condition are arranged symmetrically with respect to the normal 308 of surface S or with respect to the first beam of light 312 emitted from the first light source L1. It is, however, noted that the light sources L2 and L3 can be arranged in a non-symmetrically manner. As to the position of the first lamp L1 it is noted that same may deviate somewhat from the exact specular direction shown in Fig. 4 without disturbing the bright field condition. Further to the described embodiment, the second and the third light source can be symmetrically arranged with respect to the normal 308 of the surface S or with respect to the first beam of light 312 emitted from the first light source L1.
  • the above described principle underlying the present invention is, however, not restricted to three channels of illumination and three color channels of the camera, or more broadly speaking to only three illumination/observation channels, but can be extended to N channels of illumination and observation.
  • the light sources L1, L2 and L3 may be simply colored fluorescent lamps. They can also be rows of halogen lamps equipped with color filters, or they can be built by using collimated fibre optics. The latter realization has the advantage of a very bright and even illumination of the inspected line of surface S, which is necessary in high speed applications, especially because the dark field illumination used in photometric stereo requires a lot of light.
  • any incandescant lamp, gas discharge lamps (colored or wide spectrum), LEDs, and Lasers can be used for illuminating the surface.
  • the three characteristic angles ⁇ , ⁇ and ⁇ in the apparatus for image acquisition as shown in Fig. 3 and Fig. 4 can be chosen independently in any of the mentioned relationships for illumination.
  • the angle ⁇ has to be selected carefully in order to detect shiny defects.
  • this angle can be determined by changing the distance between the lamps and the inspected surface or by adding mirrors behind the lamps or by adding more fluorescent tubes.
  • the used light sources are not point light sources but are somewhat expanded.
  • Fig. 3 it is assumed that fluorescent tubes are used which extend perpendicular to the direction of motion of the surface. In the direction of motion of the surface the extension is defined by the diameter of the tubes. Based on the distance of the tubes from the observed line on the surface and the diameter of the tubes the angle ⁇ (gamma) is determined under which the surface is illuminated by light. It is preferred that the angle ⁇ can be varied as shown in Fig. 5. In case of fluorescent tubes this variation can be achieved by changing the distance between the tubes and the surface, by partially covering the tubes or, as shown in Fig. 5, by arranging a plurality of tubes in parallel.
  • a light source 500 emitting a beam of light 502 is used for illuminating a surface S which is moved into a direction which is indicated by arrow 504.
  • the incident beam of light 502 is reflected at a defect portion 506 of surface S and the distribution of the reflected light energy is indicated by means of lobe 508.
  • the camera C is arranged above the surface S in such a manner that its axis of observation 310 is coincident with the normal 308 of surface
  • Fig. 5b a similar arrangement is shown, in which the light source 500 is replaced by three light sources 500a, 500b and 500c emitting respective beams of light 502a, 502b and 502c which results in a distribution of the reflected energy as indicated by lobes 508a, 508b and 508c.
  • the light sources 500a, 500b and 500c are formed by a multiple fibre optic. From a comparison of Fig. 5a and 5b it becomes clear that a wide angle dark field illumination with multiple fibre optics as shown in Fig. 5b is to be preferred, since the benefits of such an arrangement are an enhanced light level of the illumination and an enhanced probability for detection of reflections from shiny defects.
  • the apparatus 600 comprises the camera C which is arranged above the surface S, the direction of motion of surface S would be out of the plane of Fig. 6.
  • the apparatus 600 comprises three standard fibre illuminators F1, F2 and F3.
  • the field of observation of the camera C is limited as shown by the two dashed lines 602 and 604.
  • the illumination range of fibre illuminator F1 indicated by dashed lines 606 and 608 is such that light from the first illuminator F1 which is reflected by the surface S is directed towards camera C such that illuminator F1 operates under a bright field condition.
  • Fibre illuminator F2 has a range in which light is emitted, which is limited as indicated by dashed line 610
  • illuminator F3 has a range of illuminating the surface S which is limited as indicated by dashed line 612.
  • Illuminators F2 and F3 operate under a dark field condition, i.e. in case of a non-defective surface, the light from illuminators F2 and F3 reflected by a specular surface S is not directed towards the lens 304 of camera C.
  • the indicated range of illumination of illuminators F2 and F3 is achieved by arranging same in a tilted position under a required illumination angle.
  • Illuminator F1 may be aligned with camera C. Basically the bright field illuminator F1 is positioned in the same way as the light source or lamp L1 is in Fig. 4. Instead of fibre illuminators F1, F2 and F3, illuminators like halogen lamps with color filters can be used.
  • This construction is not sensitive to height variations and vibrations of the surface, but suffers from a sloping illumination profile. Depending on the reflectivity of the surface this may or may not be problematic. If the surface is not very specular, the uneven illumination can be compensated by a proper correction of the resulting video signal, without loosing a lot of dynamic range at the borders of the illuminated area.
  • Fig. 7 a preferred embodiment of a side illumination is described.
  • a fibre optic 700 To illuminate the surface S under inspection a fibre optic 700 is used.
  • the fibre optic is connected via a suited wave guide to a light source (not shown).
  • the fibre optic 700 emitts light under different angles of illumination, as can be seen from Fig. 7b.
  • a first plurality of light beams 704 and a second plurality of light beams 706 are used to achieve a dark field illumination of surface S.
  • rays or beams 704 and 706, when reflected by a specular surface S having no defects are not directed towards the lens 304 of camera C.
  • a plurality of beams 708 is directed orthogonal towards the surface S and provides the bright field illumination of surface S, since light from beam 708 is directly reflected towards the lens of camera C.
  • Fig. 7a the emitted light beams are shown in a side view and are indicated by reference sign 710.
  • the light beams are collimated.
  • the fibre optic 700 comprises a first cover layer 802 and a second cover layer 804 in between which three fibre layers 806, 808 and 810 are sandwiched.
  • Fibre layer 808 comprises, like the remaining fibre layers 806 and 810 a plurality of single fibres 808 to form a bundle of fibres which are orientated in the direction as indicated by arrow 808b.
  • Fibre layer 806 also comprises a plurality of fibres 806a which are arranged in a tilted position when compared with the arrangement of the fibres 808a in layer 808, as it is indicated by arrow 806b.
  • fibre layer 810 comprises a plurality of fibres 810a which are tilted with respect to the fibres 808a in layer 808, but in a different direction than the tilted fibres 806a in layer 806, as it is indicated by arrow 810b.
  • the different angles of illumination are constructed inside of one single fibre illuminator. This is achieved, as shown in Fig. 8, by splitting the fibre 700 into several layers 806 to 810, wherein each of the layers 806 to 810 corresponds to one of the required channels for illumination.
  • the different angles of illumination are achieved by tilting the fibres 806a and 810a of the respective layer 806 and 810 into the angle that corresponds to the required illumination angle, when taking Snell's law into account.
  • more than one layer per angle of illumination can be used.
  • sandwiched layers of fibre optics it is also possible to use an arrangement having one fibre layer with straight fibres for illumination under the bright field condition and to use an integrated pair of fibre layers having tilted fibres for the dark field illumination.
  • three separate fibre layers for illuminating the surface under the bright field condition and under the dark field condition may be used.
  • an arrangement using e.g. two or more of the sandwiched construction of fibre layers enables an illumination of the surface in more than three directions.
  • the tilted fiber illuminators can produce one or more illumination directions and can consist of one or more fibre layers per illumination direction.
  • the dark field illumination used in the photometric stereo method typically requires a lot of light.
  • the current solutions often apply high frequency or DC powered halogen lamps for the dark field illumination. These solutions are inexpensive, but the spectrum of the halogen lamps is relatively weak in the visible area, especially in the green and blue regions, and much more powerful in the near infrared and infrared portion of the spectrum.
  • the spectrally superior metal halide lamps are generally not used, since the normal AC powered metal halide lamps produce horizontal stripes in images, which are known as the 100Hz modulation. This modulation is due to the fact that the metal halide lamp is practically black between the phases of the applied voltage. High frequency and DC power supplies for metal halide lamps are very expensive and typically not even available for short arc lamps with more than 100 W of power.
  • a lamp unit 900 and a control unit 902 is shown.
  • the lamp unit 900 includes a first, a second and a third metal halide lamp L1, L2 and L3 which are controlled by respective control elements 902a, 902b and 902c in the control unit 902.
  • the control elements 902a through 902c receive via lines 904a, 904b and 904c a power.
  • the power applied to the respective control elements 902a to 902c are different in phase.
  • Each lamp L1, L2 and L3 is provided with either ellipsoid reflectors or focusing lenses to focus the light emitted from the lamps L1, L2 and L3 to associated filter elements F1, F2 and F3 to provide a lamp unit output on fibre bundles 908a, 908b and 908c of different color.
  • Optional IR-filters 906a, 906b and 906c can be used to block the IR-component of light to protect the fibre bundles from extra heat.
  • the control unit 902 controls the metal halide lamps L1 through L3 by a three phase AC power applied via lines 904a, 904b and 904c.
  • the lamps are connected to a fibre line having the fibre bundles 908a, 908b and 908c, wherein the fibre line has a randomized fibre construction.
  • the lamps are connected to the fibre line in groups of three lamps so that each of these lamps is running at a 120° phase shift compared to the others. If the fibres are properly randomized in the fibre line, the resulting illumination output is not zero at any time, and this results in a reduced amount of ripples in the image. The remaining ripples can be easily removed from the image by well known means of analog or digital signal processing.
  • the arrangement shown in Fig. 9 has the benefit that efficient metal halide lamps can be used without limiting and expensive republic.
  • the differently colored light components are produced by the color filters F1, F2 and F3 and separate lamps L1, L2 and L3 are used for each color.
  • the arrangement shown in the lamp unit 900 a preferred choice is to use an arrangement as it will be described with reference to Fig. 10. Further to the above described metal halide lamps any AC-driven lamps can be used.
  • FIG. 10 an arrangement is shown, which uses only one lamp to produce the three colors.
  • a beam of light 1000 from a lamp is directed onto a blue-reflective filter 1002 which transmit only light of red and green color as indicated by arrow 1004 and reflects light of blue color as indicated by arrow 1006.
  • the blue light is then again filtered by means of a blue filter 1008 and at a first output 1010 the blue light is output.
  • the red and green light beam is directed to a red-reflective filter 1012 which transmits green light as indicated by arrow 1014 and reflects red light as indicated by arrow 1016.
  • the transmitted green light is passed through a green filter 1018 and at a second output 1020 a beam of green light is output.
  • the red light reflected by filter 1012 is directed to a red filter 1022 and at a third output 1024 a beam of red light is output.
  • a red filter 1022 As can be seen from Fig. 10 all color components are produced from one single lamp and in this case, the amount of lamps can, in principle, reduced by a factor of three. If appropriate dichroidic filters are used, the additional color filters 1008, 1018 and 1022 are not needed.
  • Fig. 11 shows a block diagram of the first three steps S100, S102, and S104 as described with reference to Fig. 1.
  • the signals acquired by means of the camera C are in the described embodiment signals representing a red image (R), a green image (G) and a blue image (B).
  • the three images are input into block 1100 in which a channel separation is carried out.
  • Block 1100 outputs three separated signals representative of the influence of the three channels of illumination.
  • the signals x R , x G and x B are input into respective filters 1102, 1104 and 1106, as well as into respective blocks 1108, 1110, 1112 for expressing deviations in the signals not as differences from the average but as contrast.
  • the calculations carried out in block 1108, 1110 and 1112 are made on the basis of the signals received from block 1100 and on the signals received from the respective filters 1102, 1104 and 1106 which output an average signal value of the signal output from block 1100.
  • Block 1108 outputs a signal representative of the bright field
  • block 1110 outputs a signal representative of the left channel dark field
  • block 1112 outputs a signal representative of the right channel dark field.
  • Block 1114 substracts from the bright field the dark field for the left channel and for the right channel and outputs a signal representing the glossiness of the inspected surface element.
  • Block 1118 forms a difference between the left channel dark field and the right channel dark field and outputs a signal representing the slope in the surface under inspection.
  • Block 1118 sums the bright field and the two dark fields and outputs a signal representative of the reflectivity of the surface under inspection.
  • the signals indicative of the glossiness, slope and reflectivity are input into block 1120 which detects anomalies on the basis of specific statistics and by thresholding the received signals.
  • Block 1120 outputs further signals for the further processing described with reference to Fig. 1, namely the feature extraction, the classification and decision.
  • the signals R, G and B from the camera C are also input into a color classifier 1122 which outputs a signal indicating miscolored regions of the surface which is also used for the further processing of the detection images output by block 1120.
  • the first aim is to estimate the physical properties of the surface element under inspection from the video signal (R, G, B) of the camera C.
  • the spectral distribution of the three channels R, G, B of the color line scan camera C will show some overlap and/or the spectral distribution of the light sources will not meet exactly the color channels of the camera C.
  • there will be some crosstalk between the three channels of illumination which can be eliminated by measuring the crosstalk for a non-defective surface and substracting for each channel R, G, B the respective fractions of crosstalk from the other two channels, which is carried out in block 1100.
  • the filters may e.g. be low pass filters or moving average filters.
  • the filters may be low pass filters or moving average filters.
  • the results are not effected by the absolute level of illumination or the sensitivity of the camera C.
  • the three channels are scaled in the same way, regardless of e.g. the changing balance of the three channels of illumination, which is essential for the following processing step.
  • these three images carry the information on the physical properties of the surface in an explicit expression with the same spatial resolution as the original image.
  • Fig. 12 shows an example of the generation of an image representing the slope in a surface. With respect to Fig. 12 a left dark field image and a right dark field image are shown as well as the resulting image showing slopes and other 3D-defects on the surface.
  • Fig. 12a shows the image of the left dark field.
  • a surface S has some spots 1200 thereon, which are e.g. oil spots.
  • Fig. 12b shows the image of the right dark field which is substantially identical.
  • Fig. 12c illustrates the resulting image after the method described with reference to Fig. 11 has been applied. What can be seen in Fig. 12c is the surface S without the oil spots which are suppressed, and that the 3D-structure of the surface is shown in detail.
  • the image shown in Fig. 12c is the output of block 1116 and called a relief image.
  • Anomalies in the inspected surface, defect candidates can be detected by simply thresholding the images representing reflectivity, glossiness, slope or color (see block 1120 in Fig. 11). For some classes of defects this will not be the appropriate method for defect detection, e.g. for waves, shallow sloping regions on the surface, or for estimation of surface roughness. For such types of defects it is advantageous to apply statistical measurements, which are tailored to the characteristic features of the considered classes of defects. E.g. the mean value of the slope image formed by block 1116 is calculated within a moving window for detection of shallow sloping regions, or the standard deviation of the slope image formed by block 1116 within a moving window is calculated for estimation of the surface roughness. The size of the moving window is adapted to the size of the considered class of defects. For each pixel, the results of the statistical measurements are compared with a threshold.
  • the result of this stage of signal processing are detection images which carry condensed information on local or regional anomalies of the inspected surface, related to the physical properties reflectivity, glossiness, slope and color. It is the advantage of the present invention that this information can be extracted with high reliability, high speed and high spatial resolution.
  • the strips need to be inspected in several process stages during the manufacturing to prevent the production of scrap:
  • the defect lengths and widths can vary from 0.1 mm up to several meters. Many defects are elongated in the rolling direction so typically the defect length is bigger than its width. Often the critical defects are not flat but have three dimensional shapes due to broken surface or local dents. The defect depths vary from tens of microns to through holes.
  • the present invention improves decisively the quality of the measurement signal producing a much more viable basis to automatically identify the critical defects.
  • the possibility to directly measure the 3D-characteristics of defects will shorten drastically the start-up periods of the systems being the major hindrance of the current technology. Also the detection performance of small defects is improved due to better measurements.
  • the surface was illuminated by light of different colors.
  • the present invention is however not limited to these characteristics of the used light beams. Instead of light of different color, light having a different polarization can be used.
  • the above described preferred embodiments of the present invention use only one color line scan camera and multiple channels of illumination, and the signal acquisition and processing is based on the idea of photometric stereo.
  • the first illumination/observation channel is formed by a first light sensitive sensor device and a light source, wherein the first light sensitive sensor device receives light of a first characteristic reemitted from the surface element, wherein the first light source illuminates the surface element.
  • the second illumination/observation channel is formed by a second light sensitive sensor device and the light source, wherein the second light sensitive sensor device receives light of a second characteristic reemitted from the surface element.
  • the third illumination/observation channel is in this embodiment formed by a third light sensitive sensor device and the light source, wherein the third light sensor device receives light of a third characteristic reemitted from the surface element.
  • this embodiment uses only one light source and three light sensitive sensor devices receiving reemitted light of different characteristics from the surface.
  • the first, second and third light sensitive sensor devices are spatially separated from each other.

Abstract

In a method and an apparatus for automatic inspection of moving surfaces the surface (S) to be inspected is observed under a first observation condition by means of a first illumination/observation channel to obtain a first signal (R), and the surface (S) is observed under a second observation condition by means of a second and a third illumination/observation channel to obtain a second signal (G) and a third signal (B), and from the first, second and third signals (R, G, B) informations on the physical properties of the surface (S) is derived.

Description

  • The present invention relates to a method and to an apparatus for automatic inspection of moving surfaces, in particular to a method and an apparatus for automatic inspection of moving surfaces for applications such as the inspection of steel strips, wood, leather or tiles. Even more particular the present invention relates to a method and an apparatus for automatic inspection of moving surfaces using at least three different illumination/observation channels.
  • Products like the above-mentioned steel strips, wood, leather or tiles are typically produced at high speed in a continuous process and they have to be inspected during motion. The defects which have to be detected and classified automatically are anomalies in the surfaces with respect to e.g. reflectivity, color, glossiness, texture and the 3D-profile of the surface under inspection.
  • In the prior art, systems for automatic surface inspection are well established and used for industrial applications such as the inspection of steel, tiles or wood. The applied cameras are monochrome or color line scan cameras. For illumination fluorescent lamps, halogen lamps or fiber optic illuminators are commonly used. The defects to be detected and classified are e.g. scratches, dents, knots and the like as defined by the application. Typically these defects manifest themselves in different ways, e.g. in deviations of reflectivity, glossiness, color, texture or the 3D-profile of the surface under inspection.
  • A critical part in the system design is to define the apparatus for image acquisition, including the selection of a camera and the illumination system, and to determine the geometrical relations of the components. The aim is to achieve images from the surface which contain the necessary information to detect and to distinguish all of the defects automatically, including 3D-defects. In many cases the result is disappointing. The reason is simply that monocular images do not contain reliable and unambiguous information on the 3D-profile and glossiness of the surface. To overcome this problem a multi-camera setup is used in some applications by means of which the surface is inspected under different viewing conditions simultaneously. In such setups, typically two monochromatic cameras and one illuminator are used to obtain bright and dark field images of the same object.
  • These setups suffer from a number of shortcomings: the alignment of two line scan cameras is difficult, and the mechanical constructions for these systems become heavy.
  • In the article by R. J. Woodham, "Photometric Method for Determining Surface Orientation from multiple Images", in Optical Engineering Vol. 19, 191, pp. 139 to 144, 1980, a photometric stereo technique is described. The principle of this technique is to take multiple images from the same object and with the same camera, and to vary the direction of the incident illumination between successive images, while holding the viewing geometry constant. This provides sufficient information to determine the surface orientation, i.e. to gather 3D-information, of each surface element of the inspected object at each image point.
  • The technique is named photometric stereo because it uses the radiance values recorded at a single pixel location in successive views, rather than the relative positions of displaced features in binocular stereo. Since the viewing geometry in this technique is not changed, the correspondence between pixels in the taken set of images is known a priori.
  • The photometric stereo method requires that the inspected object is resting, giving time to switch the lamps and to take the images, and that the reflectance distribution of the surface is known. Therefore, the method cannot be applied for inspection of moving materials and surfaces of unknown reflectivity.
  • DE 195 11 534 A1 relates to a method and an apparatus for detecting 3D-defects, such as dents and steps in a flat surface, in applications for automatic surface inspection, following the idea of photometric stereo. The surface under inspection is simultaneously illuminated with at least two lamps from different directions under dark field conditions, where the light from the lamps has different colors. A color line scan camera is used for image acquisition and 3D-defects are detected by analyzing the measured color values.
  • This method yields information on 3D-defects but not on glossiness and reflectivity of the surface because a symmetrical dark field illumination is used. Therefore, the capabilities for discriminating between different types of defects are limited. Furthermore, defect detection is done by a color classifier. Using this method it is not possible to adapt to a changing appearance of the inspected surface or to changes of the illumination. In practical applications, the sensitivity for defect detection is limited.
  • EP 0 764 845 A2 describes an apparatus for image acquisition which is similar to the one described in DE 195 11 534 A1, but the method for the detection of 3D-defects is only based on shadows, which can be observed at the edges of steps in the surface.
  • In the article by M. Magee et al., "Identification of Flaws in Metallic Surfaces Using Specular and Diffuse Bispectral Light Sources" in SPIE, Vol. 1825, Intelligent Robots and Computer Vision XI, pp. 455 to 468, 1992, a method for identification of flaws in metallic surfaces is described. The aim of this method is to enhance contrast and detection rate for scratches during automatic surface inspection of resting cast metal parts. The object under inspection is illuminated with light of different colors: there is one channel for a dark field using a very shallow angle of incidence and one channel for bright field. The used effect is that the light from the shallow dark field illumination will be scattered by sharp edges of the scratches and therefore scratches will look dark in the bright field and bright in the dark field. A second channel for dark field illumination is missing and it is therefore not possible to estimate the slope of surface elements on surfaces with varying glossiness and reflectivity.
  • Starting from this prior art it is the object of the present invention to provide an enhanced method and apparatus for automatic inspection of surfaces which enables the inspection of surfaces with enhanced reliability at less false alarm rates.
  • This object is achieved by a method according to claim 1 and by an apparatus according to claim 12.
  • The present invention provides a method for automatic inspection of moving surfaces using at least three different illumination/observation channels, said method comprising the steps of:
  • a) observing a surface element of said surface to be inspected under a first observation condition by means of a first of said at least three different illumination/observation channels to obtain a first signal;
  • b) observing said surface element under a second observation condition by means of a second and a third of said at least three different illumination/observation channels to obtain a second signal and a third signal; and
  • c) deriving from said first, second and third signals a physical property of said surface element.
  • The present invention provides an apparatus for automatic inspection of moving surfaces, comprising
  • a first illumination/observation channel for observing a surface element of said surface to be inspected under a first observation condition to obtain a first signal;
  • a second illumination/observation channel for observing said surface element under a second observation condition to obtain a second signal;
  • a third illumination/observation channel for observing said surface element under said second observation condition to obtain a third signal; and
  • means for deriving a physical property of said surface element from said first, second and third signal.
  • The present invention provides a method and an apparatus for automatic surface inspection which makes it possible to extract and to process information on the physical properties of the surface, like reflectivity, glossiness and slope of surface elements separately. The advantage is that especially 3D-defects can be detected and classified with high reliability even in textured surfaces. Applications are e.g. the inspection of steel, leather, wood, extruded profiles or other materials, which are produced in a continuous process with a high speed and have to be inspected during motion.
  • The present invention is based on the idea of photometric stereo. Information on reflectivity, color, glossiness and profile of the inspected surface is captured, e.g. by an apparatus comprising a color line scan camera and at least three spatially separated light sources with different spectral characteristics. The result of the image acquisition are registered images, e.g. R-, G-, B-images, basically corresponding to the channels of illumination. These images are processed in several steps comprising estimation of physical properties for each surface element, detection of surface anomalies, feature extraction and classification.
  • According to a preferred embodiment of the present invention the first illumination/observation channel is formed by a light sensitive sensor device and a first light source, the second illumination/observation channel is formed by the same light sensitive sensor device and by a second light source, and the third illumination/observation channel is formed by the same light sensitive sensor device and a third light source.
  • According to another embodiment of the present invention the first illumination/observation channel is formed by a first light sensitive sensor device and by a light source, the second illumination/observation channel is formed by a second light sensitive sensor device and the same light source, and the third illumination/observation channel is formed by a third light sensitive device and the same light source.
  • According to a further embodiment of the invention information on reflectivity, glossiness and slope from a moving surface are extracted separately from the surface element under inspection and based on this information the surfaces are inspected with enhanced reliability at less false alarm rate. In particular, it is possible to discriminate between 3D-defects and accepted variations within the appearance of the surface.
  • Further preferred embodiments are defined in the dependent claims.
  • In the following, preferred embodiments of the inventive method and the inventive apparatus will be described with reference to the accompanying drawings, in which
  • Fig. 1
    shows the overall concept underlying the method and the apparatus of the present invention;
    Fig. 2a-c
    illustrate how light is scattered from a surface dependent from the reflectivity, glossiness and slope, respectively, of the surface;
    Fig. 3
    shows a first embodiment of the inventive apparatus;
    Fig. 4
    shows a second embodiment of the inventive apparatus;
    Fig. 5a and b
    illustrate the influence of the angle of illumination for detection of 3D-defects in specular surfaces under dark field condition;
    Fig. 6
    shows an arrangement of the light sources for detecting 3D-defects in the surface which are orientated perpendicular to the direction of motion of the surface;
    Fig. 7a
    shows a preferred embodiment of the inventive apparatus with integrated fibre optics;
    Fig. 7b
    shows a side view of the apparatus of the Fig. 7a;
    Fig. 8
    shows an example of a fibre optic for illumination of the surface element under inspection;
    Fig. 9
    shows an arrangement of a fibre optic and lamps;
    Fig. 10
    shows an arrangement for deriving the beams of light of different color from a single light source;
    Fig. 11
    illustrates the signal processing chain for detection of anomalies based on the obtained signal;
    Fig. 12a
    shows a photographic representation obtained from the first dark field channel;
    Fig. 12b
    shows a photographic representation obtained from the second dark field channel; and
    Fig. 12c
    shows a photographic representation showing 3D-defects in the surface obtained from the images shown in Fig. 12a and Fig. 12b by applying the steps described in Fig. 11.
  • With respect to Fig. 1 the overall concept underlying the inventive method and the inventive apparatus for automatic inspection of surfaces will be described. With the measurement step S100 an image of the moving surface under inspection is acquired. The apparatus schematically shown at step S100 in Fig. 1 will be described with reference to Fig. 3 hereinafter. In step S102 physical properties of the inspected surface element are estimated on the basis of the acquired image. In step S104 anomalies in the physical properties of the surface are detected. In step S106 specific features are extracted and in step S108 the detected regions are classified. Finally in step S110 a decision is made whether the inspected surface is acceptable, i.e. fulfills predetermined requirements with respect to the physical properties, or whether the surface exhibits defects.
  • According to the present invention the image acquired in step S100 is formed from three different images which is illustrated by the arrows 100a, 100b and 100c between step S100 and step S102. The three images are represented by three video signals, wherein a first signal 100a representing a first image is obtained by observing the surface to be inspected under a first observation condition by means of a first of at least three different illumination/observation channels. The second and the third signals on line 100b and 100c, respectively, are obtained by observing the surface under a second observation condition by means of a second and a third of the at least three different illumination/observation channels. On the basis of the thus obtained first, second and third signals physical properties of the surface elements are derived in step S102.
  • According to a preferred embodiment of the present invention information on reflectivity, color, glossiness and profile of the inspected surface is captured by an apparatus with a color line scan camera and three spatially separated light sources with different spectral characteristics, following the above outlined idea of photometric stereo. The result of the image acquisition in step S100 are in this embodiment three registered images (R, G, B) basically corresponding to three channels of illumination. In the above described steps the images are processed as follows:
  • In step S102 the physical property or properties for each surface element are estimated and the result are physical property images representing reflectivity, color, glossiness and slope of the surface element, as it is illustrated by the four arrows between block S102 and block S104. These images have the same spatial resolution as the original image.
  • In step S104 the anomalies are detected. Local anomalies within the property images are detected at the same spatial resolution as the original image, and regional anomalies, e.g. due to a shallow wave in the surface or surface roughness, are detected by computing the moving average or the moving standard deviation of the slope of the surface elements followed by a comparison of the resulting statistical figures with thresholds. The output of step S 104 are multiple binary images, as indicated by the plurality of arrows connecting step S104 and step S106.
  • In step S106 features from the binary images generated in step S104 are extracted. Simple or complex geometrical features are calculated, such as the area and shape of blobs in the binary images. In addition, neighborhood relations can be taken into account, e.g. accumulation of blobs, or the overlap of blobs within different layers of the multiple binary images received from step S104.
  • In step S108 the classification is carried out and the segmented regions of the detection image are classified due to the extracted features.
  • Prior to describing preferred embodiments of the inventive apparatus and the inventive method, with respect to Fig. 2 it is illustrated how light is scattered dependent from the reflectivity, glossiness and slope, respectively, of a surface.
  • The apparatus according to the present invention which is used for image acquisition is, according to a preferred embodiment, intended to gather information on reflectivity, glossiness, color and slope of the surface elements under inspection. The apparatus and method described below are based on considerations as illustrated in Fig. 2 which shows the way how light will be scattered from a surface element if it is illuminated by a ray of light which is incident orthogonal to the inspected surface.
  • In Fig. 2a the scattering characteristics with respect to the reflectivity of a surface S are shown. In Fig. 2a a beam of light 200 is incident orthogonal to the surface S and light beams 202 are reemitted from the surface S. As can be seen from Fig. 2a a line 204 is drawn around the reemitted beams 202 indicating the lobe of the reflected light. As can be seen from Fig. 2a for a low reflectivity of the surface S (left-hand side of Fig. 2a) the energy of the reemitted light will be low, as it is indicated by the small lobe 204 indicating a low volume V1 of the reflected light distribution. In case of a high reflectivity of surface S the energy of reemitted light will be high, as it is illustrated by the large lobe 204, i.e. the volume V2 of the reflected light distribution is high. As can be seen from Fig. 2a the shape of the light distribution, i.e. the lobes 204, will be the same.
  • With respect to Fig. 2b the light distribution of the reemitted light for a different glossiness of the surface S is illustrated. Again a beam light of 200 is incident orthogonal to the surface S. In case of a low glossiness of the surface S (left-hand side of Fig. 2b) the light distribution as indicated by lobe 204 will be broad. For a high glossiness of surface S (right-hand side of Fig. 2b) the light distribution, again indicated by lobe 204, will be slim. The reflected light distribution indicated by the volumes V1 and V2 is supposed to be the same in case of a low glossiness of the surface S and for a surface S of high glossiness in this example.
  • In Fig. 2c the reflected light distribution in case of a slope in surface S is shown. Again a beam of light 200 is incident orthogonal to surface S and the reflected light distribution is again indicated by lobe 204, whereas the amount of reflected light is again indicated by the volumes V1 and V2. For a horizontal surface element, the light distribution 204 will be symmetrical with respect to the surface normal, and it will be tilted if the surface element S has a slope 206. The volumes V1 and V2 are the same in both cases.
  • The different shapes of the lobes 204 and volumes V1, V2 of the reemitted light distribution can be discriminated by simultaneously observing the illuminated surface element with several light sensitive sensors from different directions. The same will be true, if the light source used in Fig. 2 for illuminating the surface S with the beam of light 200 is replaced by a single light sensitive sensor, like a camera, and if the sensors are replaced by light sources.
  • The apparatus for image acquisition achieved by the above-mentioned replacement will be described in more detail in Fig. 3.
  • The apparatus in Fig. 3 is one preferred embodiment of the present invention and is indicated by reference sign 300. The apparatus 300 comprises a camera C which is a color line scan camera. The camera C comprises a lens 304 and a processing section 306 for generating signals representing the received images. Section 306 has three outputs R, G, B wherein the signals are representing a red image (R), a green image (G) and a blue image (B). The camera C is arranged above the surface S to be inspected in such manner that the normal 308 of surface S is coincident with the axis of observation 310 of the camera C.
  • Further three light sources L1, L2 and L3 emitting light beams 312, 314 and 316 of different spectral characteristics are provided. Light from the respective light sources is viewn under an angle γ by the inspected line of the surface. The light beams 312 from the first light source L1 are directed via a mirror M towards the surface S in such a manner that they are incident orthogonal onto surface S. The light sources L2 and L3 are arranged such that the respective beams of light 314 and 316 emitted from the light sources enclose with the normal 308 of the surface S an angle β.
  • Light source L1 is illuminating surface S under bright field conditions by means of the mirror M, which can be a beam splitting mirror. Light sources L2 and L3 illuminate the surface S under symmetrical dark field conditions. A bright field condition is a condition under which light emitted, e.g. by light source L1, is reflected from a specular surface S back towards the lens 304 of camera C. A dark field condition is a condition under which, in case of a non-defective surface, light, e.g. emitted by light source L2 is not reflected towards the lens 304 of camera C from a specular surface. The angle β and γ can be chosen in accordance with the demands of the application for optimized sensitivity and robustness of the measurements. E.g. for glossy surfaces β has to be small.
  • In most applications it will be possible to avoid the beam splitting mirror M and to use a non-symmetrical arrangement for image acquisition. Such an arrangement is shown as a further embodiment of the inventive apparatus in Fig. 4.
  • In Fig. 4 the same reference signs are used for identical elements, which have already been described with reference to Fig. 3. The difference between the apparatus shown in Fig. 4 and the apparatus shown in Fig. 3 is that the axis of observation 310 of camera C and the beams of light 312 emitted from light source L1 are not coincident with the normal 308 of surface S. The axis of observation 310 and normal 308 as well as the beams of light 312 of light source L1 and the normal 308 enclose an angle α.
  • With respect to the above description of the inventive method and the inventive apparatus it becomes clear from the description of the embodiments of Fig. 3 and 4 that in these embodiments three different illumination/observation channels are used wherein the first illumination/observation channel is formed by a light sensitive sensor device which is according to Fig. 3 and 4 the camera C and by the first light source L1, wherein the camera C receives light of the first beam 312 of light reemitted from the surface element S. The second illumination/observation channel is formed by the light sensitive sensor device C and the second light source L2 and the light sensitive sensor device or camera C receives light of the second beam 314 of light reemitted from the surface element S. The third illumination/observation channel is formed by the light sensitive sensor device or camera C and the third light source L3, and the camera C receives light of the third beam 316 of light reemitted from the surface element S. In the embodiments described with reference to Fig. 3 and 4 the three beams 312, 314 and 316 of light all have different characteristics, and according to a specific embodiment have different spectral characteristics, i.e. different colors.
  • In the embodiment described with reference to Fig. 3 and 4 the second light source L2 and third light source L3 operating under a dark field condition are arranged symmetrically with respect to the normal 308 of surface S or with respect to the first beam of light 312 emitted from the first light source L1. It is, however, noted that the light sources L2 and L3 can be arranged in a non-symmetrically manner. As to the position of the first lamp L1 it is noted that same may deviate somewhat from the exact specular direction shown in Fig. 4 without disturbing the bright field condition. Further to the described embodiment, the second and the third light source can be symmetrically arranged with respect to the normal 308 of the surface S or with respect to the first beam of light 312 emitted from the first light source L1.
  • The above described principle underlying the present invention is, however, not restricted to three channels of illumination and three color channels of the camera, or more broadly speaking to only three illumination/observation channels, but can be extended to N channels of illumination and observation.
  • The light sources L1, L2 and L3 may be simply colored fluorescent lamps. They can also be rows of halogen lamps equipped with color filters, or they can be built by using collimated fibre optics. The latter realization has the advantage of a very bright and even illumination of the inspected line of surface S, which is necessary in high speed applications, especially because the dark field illumination used in photometric stereo requires a lot of light. Besides the above mentioned fluorescent lamps, any incandescant lamp, gas discharge lamps (colored or wide spectrum), LEDs, and Lasers can be used for illuminating the surface.
  • The three characteristic angles α, β and γ in the apparatus for image acquisition as shown in Fig. 3 and Fig. 4 can be chosen independently in any of the mentioned relationships for illumination. The angle γ has to be selected carefully in order to detect shiny defects. When using fluorescent tubes, this angle can be determined by changing the distance between the lamps and the inspected surface or by adding mirrors behind the lamps or by adding more fluorescent tubes.
  • The used light sources are not point light sources but are somewhat expanded. In Fig. 3 it is assumed that fluorescent tubes are used which extend perpendicular to the direction of motion of the surface. In the direction of motion of the surface the extension is defined by the diameter of the tubes. Based on the distance of the tubes from the observed line on the surface and the diameter of the tubes the angle γ (gamma) is determined under which the surface is illuminated by light. It is preferred that the angle γ can be varied as shown in Fig. 5. In case of fluorescent tubes this variation can be achieved by changing the distance between the tubes and the surface, by partially covering the tubes or, as shown in Fig. 5, by arranging a plurality of tubes in parallel.
  • Corresponding measures can be taken if collimated fibre line optics are applied.
  • With respect to Fig. 5 the illumination under dark field conditions is explained in more detail.
  • In Fig. 5a a light source 500 emitting a beam of light 502 is used for illuminating a surface S which is moved into a direction which is indicated by arrow 504. The incident beam of light 502 is reflected at a defect portion 506 of surface S and the distribution of the reflected light energy is indicated by means of lobe 508. The camera C is arranged above the surface S in such a manner that its axis of observation 310 is coincident with the normal 308 of surface
  • In Fig. 5b a similar arrangement is shown, in which the light source 500 is replaced by three light sources 500a, 500b and 500c emitting respective beams of light 502a, 502b and 502c which results in a distribution of the reflected energy as indicated by lobes 508a, 508b and 508c. The light sources 500a, 500b and 500c are formed by a multiple fibre optic. From a comparison of Fig. 5a and 5b it becomes clear that a wide angle dark field illumination with multiple fibre optics as shown in Fig. 5b is to be preferred, since the benefits of such an arrangement are an enhanced light level of the illumination and an enhanced probability for detection of reflections from shiny defects.
  • It is to be noted that instead of using one illuminator/color a number of illuminators of the same color can be used when their difference of space angle is kept relatively small. This can even result in better defect contrast on some materials.
  • With an apparatus for image acquisition as it is described with reference to Fig. 3 and 4, sloping surface elements or steps in the surface under inspection will only be detected if the surface normal 308 has a component which is orientated in the direction 302 of surface motion. Steps, which are orientated parallel to the direction 302 of motion, cannot be detected. This makes such an apparatus well suited even for the inspection of profiled material, such as extruded profiles, but the apparatus is not suited for applications, where down web orientated 3D-defects might occur and have to be detected. For such applications, the incident light from the dark field illuminators should be orientated cross to the direction of motion, rather than parallel. Such a type of illumination can be realized by a side illumination, which will be described subsequently in more detail with reference to Fig. 6.
  • The apparatus 600 comprises the camera C which is arranged above the surface S, the direction of motion of surface S would be out of the plane of Fig. 6. Instead of the light sources L1 to L3 used in the embodiments described with reference to Fig. 3 and 4, the apparatus 600 comprises three standard fibre illuminators F1, F2 and F3. In Fig. 6 the field of observation of the camera C is limited as shown by the two dashed lines 602 and 604. As can be seen from Fig. 6 the illumination range of fibre illuminator F1 indicated by dashed lines 606 and 608 is such that light from the first illuminator F1 which is reflected by the surface S is directed towards camera C such that illuminator F1 operates under a bright field condition. Fibre illuminator F2 has a range in which light is emitted, which is limited as indicated by dashed line 610, and illuminator F3 has a range of illuminating the surface S which is limited as indicated by dashed line 612. Illuminators F2 and F3 operate under a dark field condition, i.e. in case of a non-defective surface, the light from illuminators F2 and F3 reflected by a specular surface S is not directed towards the lens 304 of camera C. The indicated range of illumination of illuminators F2 and F3 is achieved by arranging same in a tilted position under a required illumination angle.
  • Illuminator F1 may be aligned with camera C. Basically the bright field illuminator F1 is positioned in the same way as the light source or lamp L1 is in Fig. 4. Instead of fibre illuminators F1, F2 and F3, illuminators like halogen lamps with color filters can be used.
  • This construction is not sensitive to height variations and vibrations of the surface, but suffers from a sloping illumination profile. Depending on the reflectivity of the surface this may or may not be problematic. If the surface is not very specular, the uneven illumination can be compensated by a proper correction of the resulting video signal, without loosing a lot of dynamic range at the borders of the illuminated area.
  • With respect to Fig. 7 a preferred embodiment of a side illumination is described.
  • In Fig. 7 those elements which have already been described with reference to Fig. 3 and 4 are indicated with the same reference signs and a further description is omitted. To illuminate the surface S under inspection a fibre optic 700 is used. The fibre optic is connected via a suited wave guide to a light source (not shown). The fibre optic 700 emitts light under different angles of illumination, as can be seen from Fig. 7b. A first plurality of light beams 704 and a second plurality of light beams 706 are used to achieve a dark field illumination of surface S. As becomes clear from Fig. 7b rays or beams 704 and 706, when reflected by a specular surface S having no defects are not directed towards the lens 304 of camera C. A plurality of beams 708 is directed orthogonal towards the surface S and provides the bright field illumination of surface S, since light from beam 708 is directly reflected towards the lens of camera C. In Fig. 7a the emitted light beams are shown in a side view and are indicated by reference sign 710. By means of a lens 712 or the like, the light beams are collimated.
  • With respect to Fig. 8 the internal structure of the fibre optic 700 is described in more detail. The fibre optic 700 comprises a first cover layer 802 and a second cover layer 804 in between which three fibre layers 806, 808 and 810 are sandwiched. Fibre layer 808 comprises, like the remaining fibre layers 806 and 810 a plurality of single fibres 808 to form a bundle of fibres which are orientated in the direction as indicated by arrow 808b. Fibre layer 806 also comprises a plurality of fibres 806a which are arranged in a tilted position when compared with the arrangement of the fibres 808a in layer 808, as it is indicated by arrow 806b. Likewise fibre layer 810 comprises a plurality of fibres 810a which are tilted with respect to the fibres 808a in layer 808, but in a different direction than the tilted fibres 806a in layer 806, as it is indicated by arrow 810b. In this realization the different angles of illumination are constructed inside of one single fibre illuminator. This is achieved, as shown in Fig. 8, by splitting the fibre 700 into several layers 806 to 810, wherein each of the layers 806 to 810 corresponds to one of the required channels for illumination. The different angles of illumination are achieved by tilting the fibres 806a and 810a of the respective layer 806 and 810 into the angle that corresponds to the required illumination angle, when taking Snell's law into account. It is noted that more than one layer per angle of illumination can be used. Instead of the above described embodiment using sandwiched layers of fibre optics, it is also possible to use an arrangement having one fibre layer with straight fibres for illumination under the bright field condition and to use an integrated pair of fibre layers having tilted fibres for the dark field illumination. Furthermore, three separate fibre layers for illuminating the surface under the bright field condition and under the dark field condition may be used. Besides the above described arrangement providing three different illuminations of the surface, an arrangement using e.g. two or more of the sandwiched construction of fibre layers enables an illumination of the surface in more than three directions.
  • It is noted that differently tilted fiber layers can be placed into separate illuminators. That is, instead of using one illuminator with three or more fiber layers, three separate illuminators with one or more fibres can be used, each with fibres tilted to proper angles. Therefore, it is possible to use three totally separate illuminators, where each has its own internal structure, i.e. its own tilting angles and as many fibre layers as needed. E.g., the first illuminator could have only straight fibres and only one layer, the second illuminator could have fibres tilted "left" 30 degrees and only one layer, and the third illuminator could have fibres tilted "right" 30 degrees and, for example, two layers. In general, the tilted fibre illuminators can produce one or more illumination directions and can consist of one or more fibre layers per illumination direction.
  • The arrangement shown in Fig. 8 has the following benefits:
  • both the camera and the illuminator can be set to an angle which is very close to the surface normal. In this case, the plane of observation and the plane of illumination almost coincide and therefore the arrangement is not sensitive to height variations and vibrations of the surface under inspection,
  • the differently colored light components, e.g. red, green and blue, will automatically overlap and no alignment problems arise, and
  • the structure shown in Fig. 8 is very compact and consists of only one fibre line and one cylindrical lens (see Fig. 7a).
  • In the following, the power supply for illumination by means of a fibre optic is discussed in detail. The dark field illumination used in the photometric stereo method typically requires a lot of light. The current solutions often apply high frequency or DC powered halogen lamps for the dark field illumination. These solutions are inexpensive, but the spectrum of the halogen lamps is relatively weak in the visible area, especially in the green and blue regions, and much more powerful in the near infrared and infrared portion of the spectrum.
  • In high speed imaging, the spectrally superior metal halide lamps are generally not used, since the normal AC powered metal halide lamps produce horizontal stripes in images, which are known as the 100Hz modulation. This modulation is due to the fact that the metal halide lamp is practically black between the phases of the applied voltage. High frequency and DC power supplies for metal halide lamps are very expensive and typically not even available for short arc lamps with more than 100 W of power.
  • With respect to Fig. 9 a new approach using metal halide lamps is described. In Fig. 9 a lamp unit 900 and a control unit 902 is shown. The lamp unit 900 includes a first, a second and a third metal halide lamp L1, L2 and L3 which are controlled by respective control elements 902a, 902b and 902c in the control unit 902. The control elements 902a through 902c receive via lines 904a, 904b and 904c a power. The power applied to the respective control elements 902a to 902c are different in phase. Each lamp L1, L2 and L3 is provided with either ellipsoid reflectors or focusing lenses to focus the light emitted from the lamps L1, L2 and L3 to associated filter elements F1, F2 and F3 to provide a lamp unit output on fibre bundles 908a, 908b and 908c of different color. Optional IR- filters 906a, 906b and 906c can be used to block the IR-component of light to protect the fibre bundles from extra heat.
  • The control unit 902 controls the metal halide lamps L1 through L3 by a three phase AC power applied via lines 904a, 904b and 904c. The lamps are connected to a fibre line having the fibre bundles 908a, 908b and 908c, wherein the fibre line has a randomized fibre construction. The lamps are connected to the fibre line in groups of three lamps so that each of these lamps is running at a 120° phase shift compared to the others. If the fibres are properly randomized in the fibre line, the resulting illumination output is not zero at any time, and this results in a reduced amount of ripples in the image. The remaining ripples can be easily removed from the image by well known means of analog or digital signal processing. The arrangement shown in Fig. 9 has the benefit that efficient metal halide lamps can be used without limiting and expensive accessoires.
  • In the construction shown in Fig. 9, the differently colored light components are produced by the color filters F1, F2 and F3 and separate lamps L1, L2 and L3 are used for each color. However, such an arrangement wastes a lot of illumination power since only a narrow range of the spectrum is bandpassed through the filter and fed to the fibre line. Instead of the arrangement shown in the lamp unit 900, a preferred choice is to use an arrangement as it will be described with reference to Fig. 10. Further to the above described metal halide lamps any AC-driven lamps can be used.
  • With respect to Fig. 10 an arrangement is shown, which uses only one lamp to produce the three colors. A beam of light 1000 from a lamp (not shown) is directed onto a blue-reflective filter 1002 which transmit only light of red and green color as indicated by arrow 1004 and reflects light of blue color as indicated by arrow 1006. The blue light is then again filtered by means of a blue filter 1008 and at a first output 1010 the blue light is output. The red and green light beam is directed to a red-reflective filter 1012 which transmits green light as indicated by arrow 1014 and reflects red light as indicated by arrow 1016. The transmitted green light is passed through a green filter 1018 and at a second output 1020 a beam of green light is output. The red light reflected by filter 1012 is directed to a red filter 1022 and at a third output 1024 a beam of red light is output. As can be seen from Fig. 10 all color components are produced from one single lamp and in this case, the amount of lamps can, in principle, reduced by a factor of three. If appropriate dichroidic filters are used, the additional color filters 1008, 1018 and 1022 are not needed.
  • With respect to Fig. 11 the estimation of physical properties of a surface element under inspection according to the present invention is now described.
  • Fig. 11 shows a block diagram of the first three steps S100, S102, and S104 as described with reference to Fig. 1. The signals acquired by means of the camera C are in the described embodiment signals representing a red image (R), a green image (G) and a blue image (B). The three images are input into block 1100 in which a channel separation is carried out. For the description of Fig. 11 it ist assumed that the bright field illumination of the surface results in the red image, and that the dark field illumination results in a green image for the left channel (light source L2 in Fig. 3) and in a blue image for the right channel (light source L3 in Fig. 3). Block 1100 outputs three separated signals representative of the influence of the three channels of illumination. The signals xR, xG and xB are input into respective filters 1102, 1104 and 1106, as well as into respective blocks 1108, 1110, 1112 for expressing deviations in the signals not as differences from the average but as contrast. The calculations carried out in block 1108, 1110 and 1112 are made on the basis of the signals received from block 1100 and on the signals received from the respective filters 1102, 1104 and 1106 which output an average signal value of the signal output from block 1100. Block 1108 outputs a signal representative of the bright field, block 1110 outputs a signal representative of the left channel dark field and block 1112 outputs a signal representative of the right channel dark field. These signals are input into blocks 1114, 1116 and 1118. Block 1114 substracts from the bright field the dark field for the left channel and for the right channel and outputs a signal representing the glossiness of the inspected surface element. Block 1118 forms a difference between the left channel dark field and the right channel dark field and outputs a signal representing the slope in the surface under inspection. Block 1118 sums the bright field and the two dark fields and outputs a signal representative of the reflectivity of the surface under inspection. The signals indicative of the glossiness, slope and reflectivity are input into block 1120 which detects anomalies on the basis of specific statistics and by thresholding the received signals. Block 1120 outputs further signals for the further processing described with reference to Fig. 1, namely the feature extraction, the classification and decision. The signals R, G and B from the camera C are also input into a color classifier 1122 which outputs a signal indicating miscolored regions of the surface which is also used for the further processing of the detection images output by block 1120.
  • As becomes clear from the above description of Fig. 11, the first aim is to estimate the physical properties of the surface element under inspection from the video signal (R, G, B) of the camera C.
  • In general, the spectral distribution of the three channels R, G, B of the color line scan camera C will show some overlap and/or the spectral distribution of the light sources will not meet exactly the color channels of the camera C. As a result, there will be some crosstalk between the three channels of illumination which can be eliminated by measuring the crosstalk for a non-defective surface and substracting for each channel R, G, B the respective fractions of crosstalk from the other two channels, which is carried out in block 1100.
  • In most of the applications, it is not necessary to measure absolute values of figures for the reflectivity or the slope of the surface element under inspection. Instead, local deviations from the average appearance of the surface have to be detected. This is achieved by the stage of adaptive filters 1102, 1104 and 1106 following the channel separation 1100. Dependent of the needs of the application, the filters may e.g. be low pass filters or moving average filters. By calculating in blocks 1108, 1110 and 1112 (x-x)/(x+x) for each channel, the deviations are not expressed as differences from the average but as contrast. The advantage is that the results are not effected by the absolute level of illumination or the sensitivity of the camera C. Furthermore, the three channels are scaled in the same way, regardless of e.g. the changing balance of the three channels of illumination, which is essential for the following processing step.
  • The result of the above described stage of signal processing are scaled images representing the deviations from the average appearance for the three channels, namely the bright field, the left dark field and the right dark field. From these images the reflectivity, glossiness and slope of the surface element under inspection is estimated by blocks 1114, 1116 and 1118 as follows:
  • The reflectivity is the sum of all three channels, namely the total reflected light energy, the glossiness is the bright field minus the sum of the dark field, which yields a high glossiness for a slim distribution of reflected light, and a low glossiness for a broad distribution of light (see Fig. 2), and the slope is determined by forming the difference between the left dark field and the right dark field, i.e. by checking the balance of the dark fields or the symmetry of the reemitted light distribution.
  • In conjunction with the output image of the color classifier, these three images carry the information on the physical properties of the surface in an explicit expression with the same spatial resolution as the original image.
  • Fig. 12 shows an example of the generation of an image representing the slope in a surface. With respect to Fig. 12 a left dark field image and a right dark field image are shown as well as the resulting image showing slopes and other 3D-defects on the surface.
  • Fig. 12a shows the image of the left dark field. As can be seen a surface S has some spots 1200 thereon, which are e.g. oil spots. Fig. 12b shows the image of the right dark field which is substantially identical. Fig. 12c illustrates the resulting image after the method described with reference to Fig. 11 has been applied. What can be seen in Fig. 12c is the surface S without the oil spots which are suppressed, and that the 3D-structure of the surface is shown in detail. The image shown in Fig. 12c is the output of block 1116 and called a relief image.
  • Anomalies in the inspected surface, defect candidates, can be detected by simply thresholding the images representing reflectivity, glossiness, slope or color (see block 1120 in Fig. 11). For some classes of defects this will not be the appropriate method for defect detection, e.g. for waves, shallow sloping regions on the surface, or for estimation of surface roughness. For such types of defects it is advantageous to apply statistical measurements, which are tailored to the characteristic features of the considered classes of defects. E.g. the mean value of the slope image formed by block 1116 is calculated within a moving window for detection of shallow sloping regions, or the standard deviation of the slope image formed by block 1116 within a moving window is calculated for estimation of the surface roughness. The size of the moving window is adapted to the size of the considered class of defects. For each pixel, the results of the statistical measurements are compared with a threshold.
  • The result of this stage of signal processing are detection images which carry condensed information on local or regional anomalies of the inspected surface, related to the physical properties reflectivity, glossiness, slope and color. It is the advantage of the present invention that this information can be extracted with high reliability, high speed and high spatial resolution.
  • In the following, the application of the inventive method and the inventive apparatus to a steel production will be described.
  • Automatic visual inspection is used in steel and other metal (aluminium, copper) rolling mills to replace and aid visual inspections made by operators. The typical characteristics of rolled, flat strip have large variations:
  • - width
    100 mm - 2500 mm,
    - thickness
    0.1 mm - 25 mm, and
    - process line speed
    5 m/min - 1500 m/min.
  • The strips need to be inspected in several process stages during the manufacturing to prevent the production of scrap:
    • hot rolling (T: 500°C - 1000°C),
    • pickling and annealing processes (T < 100°C),
    • cold rolling (T < 50°C),
    • coating (galvanizing, tin plating, painting, T< 100°C),
    • cutting and splitting, and
    • final inspections before the delivery to customers, often special inspection lines are used.
  • There are a large number of various visual surface defects being critical for the quality of the strip:
    • metallurgical defects caused by impurities and weaknesses in the internal structure of the metal that have become visible during the rolling processes (e.g. slivers, scales slags and through holes),
    • defects caused by the rolling processes like repeating roll marks, dents, scratches and uneven coating, and
    • defects caused by the mechanical handling.
  • The defect lengths and widths can vary from 0.1 mm up to several meters. Many defects are elongated in the rolling direction so typically the defect length is bigger than its width. Often the critical defects are not flat but have three dimensional shapes due to broken surface or local dents. The defect depths vary from tens of microns to through holes.
  • The visual appearance of a defectless metal strip is seldom homogeneous. There are typically dirt stripes, oil spots, uneven reflectance and texture on the surface that can be easily confused with the real defects. Often the human inspectors have to stop the strip and touch the surface by hand to find out if the defect has critical 3D-characteristics. At higher line speeds human visual inspections are very unreliable and no 100% inspection can be guaranteed.
  • There are continuously increasing trends to improve the quality of the metal strips driven by demanding customers like automotive industries using thinner strips and targeting to high quality.
  • It has proved very difficult to apply automatic optical inspection in metal strip manufacturing. There are several systems in the market using either laser scanning or CCD line scan cameras but no real breakthrough has been reached. Often the systems have several cameras (or detectors) to view the surface from different directions but their capabilities to analyze the 3D shapes of the defects are very limited. Basically the systems based on the current 2D-technology are capable to detect the defects but they are not good enough to discriminate between real defects and non-important "pseudodefects". The complicated image processing and pattern recognition methods are used in defect analysis and classification to compensate the weaknesses in the basic measurement. Every defect type needs its own parameters and laborous and time consuming "teaching" periods are needed to train the automatic inspection system. Even in the best cases it takes a long time and needs great efforts to reach satisfactory results. As a consequence, most of the metal rolling mills have no resources to apply the current surface inspection technology.
  • The present invention improves decisively the quality of the measurement signal producing a much more viable basis to automatically identify the critical defects. The possibility to directly measure the 3D-characteristics of defects will shorten drastically the start-up periods of the systems being the major hindrance of the current technology. Also the detection performance of small defects is improved due to better measurements.
  • In the above described preferred embodiments the surface was illuminated by light of different colors. The present invention is however not limited to these characteristics of the used light beams. Instead of light of different color, light having a different polarization can be used.
  • The above described preferred embodiments of the present invention use only one color line scan camera and multiple channels of illumination, and the signal acquisition and processing is based on the idea of photometric stereo.
  • In a further embodiment (not shown) it is possible to use instead of the arrangement shown in Fig. 3 and 4 an arrangement which uses one illumination source and a plurality of sensor devices, like cameras each outputting one signal. In this case, the first illumination/observation channel is formed by a first light sensitive sensor device and a light source, wherein the first light sensitive sensor device receives light of a first characteristic reemitted from the surface element, wherein the first light source illuminates the surface element. The second illumination/observation channel is formed by a second light sensitive sensor device and the light source, wherein the second light sensitive sensor device receives light of a second characteristic reemitted from the surface element. The third illumination/observation channel is in this embodiment formed by a third light sensitive sensor device and the light source, wherein the third light sensor device receives light of a third characteristic reemitted from the surface element. With other words, this embodiment uses only one light source and three light sensitive sensor devices receiving reemitted light of different characteristics from the surface. The first, second and third light sensitive sensor devices are spatially separated from each other.

Claims (25)

  1. Method for automatic inspection of moving surfaces using at least three different illumination/observation channels, said method comprising the steps of:
    a) observing said surface (S) to be inspected under a first observation condition by means of a first of said at least three illumination/observation channels to obtain a first signal (R);
    b) observing said surface (S) under a second observation condition by means of a second and a third of said at least three different illumination/observation channels to obtain a second signal (G) and a third signal (B); and
    c) deriving from said first, second and third signals (R, G, B) a physical property of said surface (S).
  2. Method according to claim 1, wherein
    step a) comprises the step of illuminating said surface (S) by a first beam of light (312), said first illumination/observation channel being formed by a light sensitive sensor device (C) and a first light source (L1), said light sensitive sensor device (C) receiving light of the first beam of light reemitted from said surface element (S); and
    step b) comprises the step of illuminating said surface (S) by a second beam of light (314) and by a third beam of light (316), said first, second and third beams of light (312, 314, 316) having different characteristics, said second and third illumination/observation channels being formed by said light sensitive sensor device (C) and a second and a third light source (L2, L3), respectively, said light sensitive sensor device (C) receiving light of the second beam of light and light of the third beam of light, respectively, reemitted from said surface (S).
  3. Method according to claim 2, wherein said first, second and third beam of light (312, 314, 316) have different spectral characteristics.
  4. Method according to any of claims 1 to 3, wherein said first observation condition is a bright field condition, and said second observation condition is a dark field condition.
  5. Method according to any of claims 2 to 4, wherein said illumination of said surface (S) by said second and third beam of light (314, 316) is symmetrical with respect to the first beam of light (312) illuminating said surface (S), with respect to the normal (308) of the surface (S), or with respect to the direction of observation (310).
  6. Method according to any of claims 1 to 5, wherein said physical property of said surface (S) derived from said first, second and third signals (R, G, B) includes reflectivity, glossiness and slope of said surface (S).
  7. Method according to claim 6, wherein
    information on said reflectivity of said surface (S) is derived from the sum of the first, second and third signal;
    information on said glossiness of said surface (S) is derived from the first signal minus the sum of the second and third signals; and
    information on said slope of said surface (S) is derived from the difference of the second and the third signals.
  8. Method according to claim 7, comprising the following steps prior to deriving information on the reflectivity, glossiness and slope of said surface (S):
    filtering the first, second and third signal; and
    calculating normalized differences for each signal to scale the signals in the same way.
  9. Method according to any of claims 1 to 8, comprising the step of
    detecting anomalies of the surface (S) on the derived physical property.
  10. Method according to claim 9, wherein said step of detecting comprises the following steps:
    calculating statistical features from the derived physical property; and
    comparing the derived physical property with a threshold.
  11. Method according to claim 1, wherein
    said surface is illuminated by a beam of light;
    said first illumination/observation channel is formed by a first light sensitive sensor device and a light source, said first light sensitive sensor device receiving in steps a) light of a first characteristic reemitted from said surface element; and
    said second and third illumination/observation channels are formed by a second and a third light sensitive sensor device and said light source, said second and third light sensitive sensor device receiving in step b) light of a second and a third characteristic, respectively, reemitted from said surface, said first, second and third light sensitive sensor devices being spatially separated from each other.
  12. Apparatus for automatic inspection of moving surfaces, comprising
    a first illumination/observation channel for observing a said surface (S) to be inspected under a first observation condition to obtain a first signal (R);
    a second illumination/observation channel for observing said surface (S) under a second observation condition to obtain a second signal (G);
    a third illumination/observation channel for observing said surface (S) under said second observation condition to obtain a third signal (B); and
    means for deriving a physical property of said surface (S) from said first, second and third signals (R, G, B).
  13. Apparatus according to claim 12, wherein
    said first illumination/observation channel is formed by a light sensitive sensor device (C) and a first light source (L1) illuminating said surface (S) with light of a first spectral characteristic, said first observation condition being a bright field condition, said light sensitive sensor device (C) receiving reemitted light of the first spectral characteristic;
    said second illumination/observation channel is formed by said light sensitive sensor device (C) and a second light source (L2) illuminating said surface (S) with light of a second spectral characteristic, said second spectral characteristic being different from said first spectral characteristic, said second observation condition being a dark field condition, said light sensitive sensor device (C) receiving reemitted light of the second spectral characteristic; and
    said third illumination/observation channel being formed by said light sensitive sensor device (C) and a third light source (L3) illuminating said surface (S) with light of a third spectral characteristic, said third spectral characteristic being different from said first and second spectral characteristics, said light sensitive sensor device receiving reemitted light of the third spectral characteristic.
  14. Apparatus according to claim 13, wherein said second and third light source (L2, L3) are arranged symmetrically with respect to a light beam (312) of said first light source (L1), with respect to the normal (308) of the surface (S), or with respect to the direction of observation (310).
  15. Apparatus according to any of claims 12 to 14, wherein said physical property of said surface (S) includes reflectivity, glossiness and slope of said surface (S).
  16. Apparatus according to claim 15, wherein said means for deriving a physical property comprises:
    means (1118) for summing the first, second and third signal to provide a signal representing the reflectivity of said surface (S);
    means (1114) for forming a difference between the first signal and the sum of the second and third signal to provide a signal representing the glossiness of said surface (S); and
    means (1116) for forming a difference between the second and third signal to provide a signal representing the slope of said surface (S).
  17. Apparatus according to any of claims 12 to 16, wherein said means for deriving a physical property comprises means (1120) for detecting anomalies of said surface (S) based on the derived physical property.
  18. Apparatus according to any of claims 13 to 17, wherein said first, second and third light sources are formed by one or a plurality of fibre optic means, each fibre optic means having at least one fibre layer, the fibre optic means and the fibre layers thereof being arranged such that light of said first, second and third light sources illuminates said surface under predetermined illumination angles.
  19. Apparatus according to any of claims 13 to 17, wherein said first, second and third light sources are formed by fibre optic means (700), said fibre optic means comprising at least three layers (806, 808, 810), a first layer (806) providing light of the first spectral characteristic, a second layer (808) providing light of the second spectral characteristic and a third layer (810) providing light of the third spectral characteristic, wherein said first and third layer (806, 810) are tilted with respect to the second layer (808) such that light of the first and third spectral characteristic illuminates said surface under predetermined illumination angles.
  20. Apparatus according to any of claims 13 to 17, wherein said first, second and third light sources are formed by a first and a second fibre optic means, said first fibre optic means comprising at least one layer providing light of the first spectral characteristic, said second fibre optic means comprising at least two layers providing light of the second spectral characteristic and the third spectral characteristic, wherein said fibre layers of the second fibre optic means providing the light of the second and third characteristic are tilted with respect to the layer of the first fibre optic means such that light of the second and third spectral characteristic illuminates said surface under predetermined illumination angles.
  21. Apparatus according to any of claims 13 to 17, wherein said first, second and third light sources comprise AC-driven lamps connected to randomized fibre line (908a, 908b, 908c) in groups (900) of three lamps, wherein each lamp is controlled to be operated at a 120° phase shift with respect to the remaining two lamps.
  22. Apparatus according to any of claims 21, wherein said AC-driven lamps are metal halide lamps.
  23. Apparatus according to any of claims 13 to 17, wherein said first, second and third light sources are formed by a lamp, said lamp comprising a beam splitter means (1002, 1012) to obtain at least three different light beams (1010, 1020, 1024) having different spectral characteristics.
  24. Apparatus according to claim 21, wherein said beam splitter means (1002, 1012) comprises dichroitic mirrors and filters for the different spectral characteristics.
  25. Apparatus according to claim 12, wherein
    a light source is provided for illuminating said surface;
    said first illumination/observation channel is formed by a first light sensitive sensor device and said light source, said first light sensitive sensor device receiving light of a first spectral characteristic reemitted from said surface;
    said second illumination/observation channel is formed by a second light sensitive sensor device and said light source, said second light sensitive sensor device receiving light of a second spectral characteristic reemitted from said surface, said second spectral characteristic being different from said first spectral characteristic; and
    said third illumination/observation channel is formed by a third light sensitive sensor device and said light source, said light sensitivity sensor device receiving light of a third spectral characteristic reemitted from said surface, said third spectral characteristic being different from said first and second spectral characteristic, said first, second and third light sensitive sensor devices being spatially separated from each other.
EP97114590A 1997-08-22 1997-08-22 Method and apparatus for automatic inspection of moving surfaces Expired - Lifetime EP0898163B1 (en)

Priority Applications (7)

Application Number Priority Date Filing Date Title
ES97114590T ES2153150T3 (en) 1997-08-22 1997-08-22 METHOD AND APPLIANCE FOR AUTOMATIC INSPECTION OF MOVING SURFACES.
DE69703487T DE69703487T2 (en) 1997-08-22 1997-08-22 Method and device for automatic inspection of moving surfaces
EP97114590A EP0898163B1 (en) 1997-08-22 1997-08-22 Method and apparatus for automatic inspection of moving surfaces
AT97114590T ATE197503T1 (en) 1997-08-22 1997-08-22 METHOD AND DEVICE FOR AUTOMATICALLY TESTING MOVING SURFACES
JP2000507998A JP3423688B2 (en) 1997-08-22 1998-07-21 Method and apparatus for automatic inspection of moving surfaces
PCT/EP1998/004560 WO1999010730A1 (en) 1997-08-22 1998-07-21 Method and apparatus for automatic inspection of moving surfaces
US09/136,376 US6166393A (en) 1997-08-22 1998-08-19 Method and apparatus for automatic inspection of moving surfaces

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP97114590A EP0898163B1 (en) 1997-08-22 1997-08-22 Method and apparatus for automatic inspection of moving surfaces

Publications (2)

Publication Number Publication Date
EP0898163A1 true EP0898163A1 (en) 1999-02-24
EP0898163B1 EP0898163B1 (en) 2000-11-08

Family

ID=8227260

Family Applications (1)

Application Number Title Priority Date Filing Date
EP97114590A Expired - Lifetime EP0898163B1 (en) 1997-08-22 1997-08-22 Method and apparatus for automatic inspection of moving surfaces

Country Status (7)

Country Link
US (1) US6166393A (en)
EP (1) EP0898163B1 (en)
JP (1) JP3423688B2 (en)
AT (1) ATE197503T1 (en)
DE (1) DE69703487T2 (en)
ES (1) ES2153150T3 (en)
WO (1) WO1999010730A1 (en)

Cited By (50)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0974833A1 (en) * 1998-07-21 2000-01-26 Sollac Apparatus for detecting surface defects at moving metal strips
WO2000042381A1 (en) * 1999-01-18 2000-07-20 Mydata Automation Ab Method and device for inspecting objects
JP2000329707A (en) * 1999-03-04 2000-11-30 Byk Gardner Gmbh Device and method for judging quality of construction surface
EP1114993A2 (en) * 2000-01-07 2001-07-11 Thermo Radiometrie Oy Method and arrangement for inspection of surfaces
EP1120640A1 (en) * 1999-12-28 2001-08-01 Bridgestone Corporation Method and apparatus for inspecting appearance and shape of subject body
WO2001084126A2 (en) * 2000-04-28 2001-11-08 Electro Scientific Industries, Inc. Directional lighting and method to distinguish three dimensional information
EP1197926A2 (en) 2000-10-14 2002-04-17 National Rejectors, Inc. GmbH Method of detecting surface relief on coins in coin actuated machines
DE10063293A1 (en) * 2000-12-19 2002-07-04 Fraunhofer Ges Forschung Multi-channel inspection of moving surfaces involves synchronizing two radiation sources with image generation frequency of image acquisition device to alternately illuminate surface
WO2002065106A1 (en) * 2001-02-12 2002-08-22 3M Innovative Properties Company Web inspection method and device
WO2002090952A1 (en) * 2001-05-08 2002-11-14 Wolfgang Weinhold Method and device for examining an object in a contactless manner, especially for examining the surface form of the same
WO2003012412A2 (en) * 2001-07-25 2003-02-13 University Of The West Of England, Bristol Infra-red photometric stereo
EP1437691A1 (en) * 2003-01-10 2004-07-14 National Rejectors, Inc. GmbH Method for recognizing the relief of a coin in a coin operated apparatus
US7120515B2 (en) 2003-12-31 2006-10-10 3M Innovative Properties Company Inventory control for web-based articles
EP1752291A1 (en) * 2005-08-11 2007-02-14 DeCoSystem S.r.l. Improved method and device for the quality control of printed materials
US7187995B2 (en) 2003-12-31 2007-03-06 3M Innovative Properties Company Maximization of yield for web-based articles
WO2007039559A1 (en) * 2005-10-01 2007-04-12 Chromasens Gmbh Device for recording a number of images of disk-shaped objects
WO2007054332A1 (en) * 2005-11-10 2007-05-18 OBE OHNMACHT & BAUMGäRTNER GMBH & CO. KG Camera chip, camera and method for image recording
WO2007078408A3 (en) * 2005-10-31 2007-10-04 Boeing Co Apparatus and methods for inspecting a composite structure for defects
EP1890134A3 (en) * 2006-08-17 2008-07-30 Massen Machine Vision Systems GmbH Quality surveillance of patterned, in particular spatially curvilinear surfaces
US7542821B2 (en) 2007-07-26 2009-06-02 3M Innovative Properties Company Multi-unit process spatial synchronization of image inspection systems
EP2065675A2 (en) 2007-11-22 2009-06-03 Valtion Teknillinen Tutkimuskeskus Method and apparatus for determining the topography and optical properties of a moving surface
US7623699B2 (en) 2004-04-19 2009-11-24 3M Innovative Properties Company Apparatus and method for the automated marking of defects on webs of material
EP2144052A1 (en) * 2008-07-11 2010-01-13 Dr. Schenk GmbH Industriemesstechnik Method and device for detecting and classifying defects
WO2010006895A1 (en) * 2008-07-16 2010-01-21 Siemens Aktiengesellschaft Operating method for a processing device processing a metal strip and system for processing a metal strip
DE19944216B4 (en) * 1999-09-15 2010-02-04 Armin Steuer Embossing method and embossing device
US7797133B2 (en) 2008-09-10 2010-09-14 3M Innovative Properties Company Multi-roller registered repeat defect detection of a web process line
WO2011005110A1 (en) * 2009-07-08 2011-01-13 Norsk Hydro Asa Method and apparatus for inspection of surfaces
DE102008044991B4 (en) * 2008-08-29 2011-11-10 In-Situ Gmbh Method and device for the three-dimensional detection of object surfaces
US8175739B2 (en) 2007-07-26 2012-05-08 3M Innovative Properties Company Multi-unit process spatial synchronization
WO2014023283A1 (en) * 2012-08-08 2014-02-13 Premium Aerotec Gmbh Surface treatment process for components composed of aluminium having detection of impermissible overheating
WO2014089713A2 (en) * 2012-12-10 2014-06-19 Uster Technologies Ag Device for the optical inspection of a moving textile material
EP2799848A4 (en) * 2011-12-28 2015-08-12 Bridgestone Corp External view inspection device and external view inspection method
GB2526866A (en) * 2014-06-05 2015-12-09 Univ Bristol Apparatus for and method of inspecting surface topography of a moving object
JP2015232476A (en) * 2014-06-09 2015-12-24 株式会社キーエンス Inspection device, inspection method, and program
EP2966593A1 (en) * 2014-07-09 2016-01-13 Sick Ag Image acquisition system for detecting an object
CN105849534A (en) * 2013-12-27 2016-08-10 杰富意钢铁株式会社 Surface defect detection method and surface defect detection device
AT516824A1 (en) * 2015-01-23 2016-08-15 Ait Austrian Inst Technology Method and device for testing OVI features
KR20170044679A (en) * 2015-06-05 2017-04-25 신닛테츠스미킨 카부시키카이샤 Apparatus for inspecting shape of metal body, and method for inspecting shape of metal body
JP2018036175A (en) * 2016-09-01 2018-03-08 新日鐵住金株式会社 Surface inspection device and surface inspection method of steel material
WO2018068775A1 (en) * 2016-10-15 2018-04-19 INPRO Innovationsgesellschaft für fortgeschrittene Produktionssysteme in der Fahrzeugindustrie mbH Method and system for determining the defective surface of at least one fault location on at least one functional surface of a component or test piece
EP3315952A4 (en) * 2015-06-25 2018-06-13 JFE Steel Corporation Surface flaw detection method, surface flaw detection device, and manufacturing method for steel material
EP2732273B1 (en) 2011-07-11 2018-08-29 Bizerba Luceo Method of acquiring several images of the same package with the aid of a single linear camera
WO2018188912A1 (en) * 2017-04-10 2018-10-18 BSH Hausgeräte GmbH Determining a degree of contamination in a cooking chamber
EP3315950A4 (en) * 2015-06-25 2018-12-19 JFE Steel Corporation Surface flaw detection device, surface flaw detection method, and manufacturing method for steel material
JP2019517003A (en) * 2016-05-30 2019-06-20 ボブスト メックス ソシエテ アノニムBobst Mex SA Surface inspection system and surface inspection method
EP3401672A4 (en) * 2016-01-08 2019-08-14 SCREEN Holdings Co., Ltd. Flaw detection device and flaw detection method
WO2020216959A1 (en) * 2019-04-25 2020-10-29 Hydro Aluminium Rolled Products Gmbh Surface treatment of flat products made of aluminium alloys, comprising colour measurements
EP3761017A1 (en) 2019-07-05 2021-01-06 Aleris Rolled Products Germany GmbH Method and apparatus for thermographic inspection of the surfaces of a moving hot rolled metal strip article
EP4095518A4 (en) * 2020-01-20 2023-02-08 JFE Steel Corporation Surface inspection device, surface inspection method, method for manufacturing steel material, method for managing quality of steel material, and equipment for manufacturing steel material
US11953424B2 (en) 2019-04-25 2024-04-09 Speira Gmbh Surface treatment of flat products made of aluminium alloys comprising colour measurements

Families Citing this family (74)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100345001B1 (en) * 1998-08-27 2002-07-19 삼성전자 주식회사 Illuminating and optical apparatus for inspecting the welding state of printed circuit board
JP4110653B2 (en) 1999-01-13 2008-07-02 株式会社ニコン Surface inspection method and apparatus
US7154527B1 (en) * 1999-02-25 2006-12-26 Visionsense Ltd. Optical device
FI111757B (en) 1999-05-10 2003-09-15 Metso Automation Oy Method and Measurement Arrangement to Measure Paper Surface
DE10019486A1 (en) * 2000-04-19 2001-10-31 Siemens Ag Arrangement for the inspection of object surfaces
EP1220596A1 (en) 2000-12-29 2002-07-03 Icos Vision Systems N.V. A method and an apparatus for measuring positions of contact elements of an electronic component
GB0107900D0 (en) * 2001-03-29 2001-05-23 Post Office Improvements in monitoring systems
DE10117048C1 (en) * 2001-04-05 2002-08-22 Fraunhofer Ges Forschung Method and device for the detection of surface defects on measurement objects
DE10122917A1 (en) * 2001-05-11 2002-11-14 Byk Gardner Gmbh Device and method for determining the properties of reflective bodies
DE10128476C2 (en) * 2001-06-12 2003-06-12 Siemens Dematic Ag Optical sensor device for the visual detection of substrates
US6919965B2 (en) 2002-03-09 2005-07-19 Kimberly-Clark Worldwide, Inc. Apparatus and method for making and inspecting pre-fastened articles
US6885451B2 (en) 2002-03-09 2005-04-26 Kimberly-Clark Worldwide, Inc. Infrared detection of composite article components
US6900450B2 (en) 2002-03-09 2005-05-31 Kimberly-Clark Worldwide, Inc. Method and apparatus for inferring item position based on multiple data
US6888143B2 (en) * 2002-03-09 2005-05-03 Kimberly-Clark Worldwide, Inc. Apparatus and method for inspecting pre-fastened articles
US6927857B2 (en) * 2002-03-09 2005-08-09 Kimberly-Clark Worldwide, Inc. Process for the detection of marked components of a composite article using infrared blockers
US7105848B2 (en) * 2002-04-15 2006-09-12 Wintriss Engineering Corporation Dual level out-of-focus light source for amplification of defects on a surface
US6934029B1 (en) * 2002-04-22 2005-08-23 Eugene Matzan Dual laser web defect scanner
US7123765B2 (en) * 2002-07-31 2006-10-17 Kimberly-Clark Worldwide, Inc. Apparatus and method for inspecting articles
US20040150815A1 (en) * 2003-02-05 2004-08-05 Applied Vision Company, Llc Flaw detection in objects and surfaces
SE525502C2 (en) * 2003-07-08 2005-03-01 Stora Enso Ab Method and apparatus for analyzing the surface structure of a web of paper or cardboard
US7236625B2 (en) * 2003-07-28 2007-06-26 The Boeing Company Systems and method for identifying foreign objects and debris (FOD) and defects during fabrication of a composite structure
JP4367085B2 (en) * 2003-10-22 2009-11-18 富士ゼロックス株式会社 Photo sensor device
JP2005172814A (en) * 2003-11-19 2005-06-30 Kansai Paint Co Ltd Reflected ultraviolet ray measuring apparatus
DE20320094U1 (en) * 2003-12-23 2004-03-11 Veka Ag Gloss measurement device
JP4045248B2 (en) * 2004-03-01 2008-02-13 ジヤトコ株式会社 Inspection method for continuously variable transmission belts
JP2005283309A (en) * 2004-03-29 2005-10-13 Jatco Ltd Inspection apparatus of metal surface
JP2005283310A (en) * 2004-03-29 2005-10-13 Jatco Ltd Ring end face defect inspection apparatus
DE102004023739A1 (en) * 2004-05-12 2005-12-15 Leica Microsystems Semiconductor Gmbh Measuring device and method for operating a measuring device for the optical inspection of an object
DE102004037040B4 (en) * 2004-07-30 2013-11-21 Byk Gardner Gmbh Device for the quantified evaluation of surface properties
CA2478757A1 (en) * 2004-08-06 2006-02-06 Mario Talbot Detection of blue stain and rot in lumber
US7471382B2 (en) * 2004-10-04 2008-12-30 Kla-Tencor Technologies Corporation Surface inspection system with improved capabilities
DE102004058408B4 (en) * 2004-12-03 2013-10-31 Byk Gardner Gmbh Device for determining surface properties
US20060145100A1 (en) * 2005-01-03 2006-07-06 Kimberly-Clark Worldwide, Inc. System and method for detecting an object on a moving web
JP4797593B2 (en) * 2005-03-10 2011-10-19 富士ゼロックス株式会社 Gloss measuring apparatus and program
JP4826750B2 (en) * 2005-04-08 2011-11-30 オムロン株式会社 Defect inspection method and defect inspection apparatus using the method
AU2006240965A1 (en) 2005-04-21 2006-11-02 Sumitomo Electric Industries, Ltd. Superconducting wire inspection device and inspection method
DE102005029901B4 (en) 2005-06-25 2022-10-06 Modi Modular Digits Gmbh Device and method for visually detecting two-dimensional or three-dimensional objects
JP4621170B2 (en) * 2006-06-05 2011-01-26 新日本製鐵株式会社 Metallographic image observation device
US7834991B2 (en) 2006-07-13 2010-11-16 Byk Gardner Gmbh Determining surface properties with angle offset correction
US7369240B1 (en) 2006-07-20 2008-05-06 Litesentry Corporation Apparatus and methods for real-time adaptive inspection for glass production
JP5086734B2 (en) * 2007-08-11 2012-11-28 花王株式会社 Pallet inspection device
DE102008000774A1 (en) * 2008-03-19 2009-09-24 Voith Patent Gmbh Optical process and measuring device for a fiber-containing web
US8502180B2 (en) * 2009-01-26 2013-08-06 Centre De Recherche Industrielle Du Quebec Apparatus and method having dual sensor unit with first and second sensing fields crossed one another for scanning the surface of a moving article
US9109330B2 (en) * 2009-03-09 2015-08-18 Honeywell International Inc. Apparatus and method for measuring properties of unstabilized moving sheets
US20110035041A1 (en) * 2009-08-06 2011-02-10 Habakus Stephen J Systems and methods for feed control of rolled stock raw materials
WO2011156919A1 (en) 2010-06-16 2011-12-22 Forensic Technology Wai, Inc. Acquisition of 3d topographic images of tool marks using non-linear photometric stereo method
DE102010060852B4 (en) 2010-11-29 2013-11-21 Breitmeier Messtechnik Gmbh Apparatus and method for detecting a surface texture of a surface of a workpiece
DE102010061559A1 (en) * 2010-12-27 2012-06-28 Dr. Schneider Kunststoffwerke Gmbh Device for recognizing film web processing errors, has detection device that detects processing error based on film web error if film web and processing errors are determined for film web region
CA2780202C (en) 2012-06-19 2014-11-18 Centre De Recherche Industrielle Du Quebec Method and system for detecting the quality of debarking at the surface of a wooden log
AT513126B1 (en) * 2012-08-01 2014-02-15 Ait Austrian Inst Technology Co-occurrence matrix
KR101480906B1 (en) * 2012-11-15 2015-01-12 주식회사 포스코 Apparatus for measuring remain scale and the method thereof
US9581554B2 (en) * 2013-05-30 2017-02-28 Seagate Technology Llc Photon emitter array
JP5949690B2 (en) * 2013-07-25 2016-07-13 Jfeスチール株式会社 Evaluation method and evaluation apparatus
WO2015027014A1 (en) * 2013-08-21 2015-02-26 Severstal Dearborn, Llc Method for measuring surface characteristics of hot dipped galvanneal steel sheet
DE102013221334A1 (en) 2013-10-21 2015-04-23 Volkswagen Aktiengesellschaft Method and measuring device for evaluating structural differences of a reflecting surface
CN104897679A (en) * 2014-03-05 2015-09-09 鞍钢股份有限公司 Steel plate surface defect inspection method
WO2016194698A1 (en) * 2015-05-29 2016-12-08 新日鐵住金株式会社 Metal body shape inspection device and metal body shape inspection method
KR102073229B1 (en) * 2015-06-25 2020-03-02 제이에프이 스틸 가부시키가이샤 Surface defect detection apparatus and surface defect detection method
JP6394514B2 (en) * 2015-06-25 2018-09-26 Jfeスチール株式会社 Surface defect detection method, surface defect detection apparatus, and steel material manufacturing method
US11493454B2 (en) 2015-11-13 2022-11-08 Cognex Corporation System and method for detecting defects on a specular surface with a vision system
US10290113B2 (en) 2016-04-08 2019-05-14 Nippon Steel & Sumitomo Metal Corporation Surface state monitoring apparatus for metallic body and surface state monitoring method for metallic body
EP3465169B1 (en) * 2016-05-30 2021-09-29 Bobst Mex Sa An image capturing system and a method for determining the position of an embossed structure on a sheet element
CN109313141A (en) * 2016-05-30 2019-02-05 鲍勃斯脱梅克斯股份有限公司 Surface inspection system and inspection method
JP6863206B2 (en) * 2017-09-28 2021-04-21 日本製鉄株式会社 Fragment analyzer, slab analysis method and program
WO2019112055A1 (en) * 2017-12-08 2019-06-13 日本製鉄株式会社 Shape inspection device and shape inspection method
JP7077635B2 (en) * 2018-01-26 2022-05-31 王子ホールディングス株式会社 Defect inspection device and manufacturing method for sheet-like materials
JP7087687B2 (en) * 2018-06-01 2022-06-21 株式会社サタケ Grain gloss measuring device
DE102018006760A1 (en) * 2018-08-27 2020-02-27 Mühlbauer Gmbh & Co. Kg Inspection when transferring electronic components from a first to a second carrier
CN113767315A (en) * 2019-01-18 2021-12-07 Essenlix 公司 Multi-mode lighting system
WO2020152865A1 (en) * 2019-01-25 2020-07-30 タカノ株式会社 Image inspection device
WO2020158340A1 (en) * 2019-02-01 2020-08-06 パナソニックIpマネジメント株式会社 Inspection device and inspection method
EP3754324B1 (en) * 2019-06-19 2023-11-29 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Method and device for classifying particulate contamination on a surface
US11282187B2 (en) * 2019-08-19 2022-03-22 Ricoh Company, Ltd. Inspection system, inspection apparatus, and method using multiple angle illumination
CN114689604A (en) * 2020-12-29 2022-07-01 致茂电子(苏州)有限公司 Image processing method for optical detection of object to be detected with smooth surface and detection system thereof

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5952735A (en) * 1982-09-20 1984-03-27 Kawasaki Steel Corp Surface flaw detecting method of hot billet
DE3242447A1 (en) * 1982-11-16 1984-05-17 Sophokles 8062 Markt Indersdorf Papaioannou Photoelectric textile web monitoring device
JPS61176825A (en) * 1985-01-31 1986-08-08 Dainippon Printing Co Ltd Optical sensor head
US5039868A (en) * 1988-11-24 1991-08-13 Omron Corporation Method of and apparatus for inspecting printed circuit boards and the like
WO1992000517A1 (en) * 1990-06-22 1992-01-09 Alcan International Limited Illumination system for high speed surface inspection of rolled aluminum sheet
US5248876A (en) * 1992-04-21 1993-09-28 International Business Machines Corporation Tandem linear scanning confocal imaging system with focal volumes at different heights
JPH0658731A (en) * 1992-06-11 1994-03-04 Fujitsu Ltd Pattern inspecting apparatus
WO1994018643A1 (en) * 1993-02-02 1994-08-18 Golden Aluminum Company Method and apparatus for imaging surfaces
DE19511534A1 (en) * 1995-03-29 1996-10-02 Fraunhofer Ges Forschung Detecting 3=D fault locations with automatic monitoring of specimen surfaces using camera

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4806776A (en) * 1980-03-10 1989-02-21 Kley Victor B Electrical illumination and detecting apparatus
US4595289A (en) * 1984-01-25 1986-06-17 At&T Bell Laboratories Inspection system utilizing dark-field illumination
US5982493A (en) * 1998-06-02 1999-11-09 Motorola, Inc. Apparatus and method for acquiring multiple images

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5952735A (en) * 1982-09-20 1984-03-27 Kawasaki Steel Corp Surface flaw detecting method of hot billet
DE3242447A1 (en) * 1982-11-16 1984-05-17 Sophokles 8062 Markt Indersdorf Papaioannou Photoelectric textile web monitoring device
JPS61176825A (en) * 1985-01-31 1986-08-08 Dainippon Printing Co Ltd Optical sensor head
US5039868A (en) * 1988-11-24 1991-08-13 Omron Corporation Method of and apparatus for inspecting printed circuit boards and the like
WO1992000517A1 (en) * 1990-06-22 1992-01-09 Alcan International Limited Illumination system for high speed surface inspection of rolled aluminum sheet
US5248876A (en) * 1992-04-21 1993-09-28 International Business Machines Corporation Tandem linear scanning confocal imaging system with focal volumes at different heights
JPH0658731A (en) * 1992-06-11 1994-03-04 Fujitsu Ltd Pattern inspecting apparatus
WO1994018643A1 (en) * 1993-02-02 1994-08-18 Golden Aluminum Company Method and apparatus for imaging surfaces
DE19511534A1 (en) * 1995-03-29 1996-10-02 Fraunhofer Ges Forschung Detecting 3=D fault locations with automatic monitoring of specimen surfaces using camera

Non-Patent Citations (4)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 008, no. 157 (P - 288) 20 July 1984 (1984-07-20) *
PATENT ABSTRACTS OF JAPAN vol. 010, no. 387 (P - 530) 25 December 1986 (1986-12-25) *
PATENT ABSTRACTS OF JAPAN vol. 018, no. 293 (P - 1747) 3 June 1994 (1994-06-03) *
WOODHAM R J: "Determining surface curvature with photometric stereo", PROCEEDINGS OF 1989 IEEE INTERNATIONAL CONFERENCE ON ROBOTICS AND AUTOMATION, vol. 1, no. 1989, ISBN 0-8186-1938-4, pages 36 - 42, XP000047432 *

Cited By (79)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0974833A1 (en) * 1998-07-21 2000-01-26 Sollac Apparatus for detecting surface defects at moving metal strips
US6496254B2 (en) 1999-01-18 2002-12-17 Mydata Automation Ab Method and device for inspecting objects
WO2000042381A1 (en) * 1999-01-18 2000-07-20 Mydata Automation Ab Method and device for inspecting objects
JP2000329707A (en) * 1999-03-04 2000-11-30 Byk Gardner Gmbh Device and method for judging quality of construction surface
DE19944216B4 (en) * 1999-09-15 2010-02-04 Armin Steuer Embossing method and embossing device
EP1120640A1 (en) * 1999-12-28 2001-08-01 Bridgestone Corporation Method and apparatus for inspecting appearance and shape of subject body
US6600567B2 (en) 1999-12-28 2003-07-29 Bridgestone Corporation Method and apparatus for inspecting appearance and shape of subject body
EP1114993A2 (en) * 2000-01-07 2001-07-11 Thermo Radiometrie Oy Method and arrangement for inspection of surfaces
EP1114993A3 (en) * 2000-01-07 2002-06-05 Thermo Radiometrie Oy Method and arrangement for inspection of surfaces
WO2001084126A2 (en) * 2000-04-28 2001-11-08 Electro Scientific Industries, Inc. Directional lighting and method to distinguish three dimensional information
WO2001084126A3 (en) * 2000-04-28 2002-04-11 Electro Scient Ind Inc Directional lighting and method to distinguish three dimensional information
US6901160B2 (en) 2000-04-28 2005-05-31 Electro Scientific Industries Directional lighting and method to distinguish three dimensional information
DE10051009A1 (en) * 2000-10-14 2002-05-02 Nat Rejectors Gmbh Method for recognizing an embossed image of a coin in a coin machine
EP1197926A2 (en) 2000-10-14 2002-04-17 National Rejectors, Inc. GmbH Method of detecting surface relief on coins in coin actuated machines
EP1197926A3 (en) * 2000-10-14 2004-01-28 National Rejectors, Inc. GmbH Method of detecting surface relief on coins in coin actuated machines
DE10063293A1 (en) * 2000-12-19 2002-07-04 Fraunhofer Ges Forschung Multi-channel inspection of moving surfaces involves synchronizing two radiation sources with image generation frequency of image acquisition device to alternately illuminate surface
WO2002065106A1 (en) * 2001-02-12 2002-08-22 3M Innovative Properties Company Web inspection method and device
US6950547B2 (en) 2001-02-12 2005-09-27 3M Innovative Properties Company Web inspection method and device
WO2002090952A1 (en) * 2001-05-08 2002-11-14 Wolfgang Weinhold Method and device for examining an object in a contactless manner, especially for examining the surface form of the same
WO2003012412A2 (en) * 2001-07-25 2003-02-13 University Of The West Of England, Bristol Infra-red photometric stereo
WO2003012412A3 (en) * 2001-07-25 2003-10-30 Univ Bristol Infra-red photometric stereo
EP1437691A1 (en) * 2003-01-10 2004-07-14 National Rejectors, Inc. GmbH Method for recognizing the relief of a coin in a coin operated apparatus
US7120515B2 (en) 2003-12-31 2006-10-10 3M Innovative Properties Company Inventory control for web-based articles
US7187995B2 (en) 2003-12-31 2007-03-06 3M Innovative Properties Company Maximization of yield for web-based articles
US8238646B2 (en) 2004-04-19 2012-08-07 3M Innovative Properties Company Apparatus and method for the automated marking of defects on webs of material
US7974459B2 (en) 2004-04-19 2011-07-05 3M Innovative Properties Company Apparatus and method for the automated marking of defects on webs of material
US7623699B2 (en) 2004-04-19 2009-11-24 3M Innovative Properties Company Apparatus and method for the automated marking of defects on webs of material
EP1752291A1 (en) * 2005-08-11 2007-02-14 DeCoSystem S.r.l. Improved method and device for the quality control of printed materials
WO2007039559A1 (en) * 2005-10-01 2007-04-12 Chromasens Gmbh Device for recording a number of images of disk-shaped objects
DE102006009593B4 (en) * 2005-10-01 2008-12-18 Vistec Semiconductor Systems Gmbh Device for taking multiple images of disc-shaped objects
WO2007078408A3 (en) * 2005-10-31 2007-10-04 Boeing Co Apparatus and methods for inspecting a composite structure for defects
US8125563B2 (en) 2005-11-10 2012-02-28 OBE OHNMACHT & BAUMGäRTNER GMBH & CO. KG Camera chip, camera and method for image recording
US8830386B2 (en) 2005-11-10 2014-09-09 Obe Ohnmacht & Baumgartner Gmbh & Co. Kg Camera chip, camera and method for image recording
WO2007054332A1 (en) * 2005-11-10 2007-05-18 OBE OHNMACHT & BAUMGäRTNER GMBH & CO. KG Camera chip, camera and method for image recording
EP1890134A3 (en) * 2006-08-17 2008-07-30 Massen Machine Vision Systems GmbH Quality surveillance of patterned, in particular spatially curvilinear surfaces
US7542821B2 (en) 2007-07-26 2009-06-02 3M Innovative Properties Company Multi-unit process spatial synchronization of image inspection systems
US8175739B2 (en) 2007-07-26 2012-05-08 3M Innovative Properties Company Multi-unit process spatial synchronization
EP2065675A2 (en) 2007-11-22 2009-06-03 Valtion Teknillinen Tutkimuskeskus Method and apparatus for determining the topography and optical properties of a moving surface
EP2144052A1 (en) * 2008-07-11 2010-01-13 Dr. Schenk GmbH Industriemesstechnik Method and device for detecting and classifying defects
WO2010006895A1 (en) * 2008-07-16 2010-01-21 Siemens Aktiengesellschaft Operating method for a processing device processing a metal strip and system for processing a metal strip
DE102008044991B4 (en) * 2008-08-29 2011-11-10 In-Situ Gmbh Method and device for the three-dimensional detection of object surfaces
US7797133B2 (en) 2008-09-10 2010-09-14 3M Innovative Properties Company Multi-roller registered repeat defect detection of a web process line
WO2011005110A1 (en) * 2009-07-08 2011-01-13 Norsk Hydro Asa Method and apparatus for inspection of surfaces
EP2732273B2 (en) 2011-07-11 2022-11-23 Bizerba Luceo Method of acquiring several images of the same package with the aid of a single linear camera
EP2732273B1 (en) 2011-07-11 2018-08-29 Bizerba Luceo Method of acquiring several images of the same package with the aid of a single linear camera
EP2799848A4 (en) * 2011-12-28 2015-08-12 Bridgestone Corp External view inspection device and external view inspection method
US9310278B2 (en) 2011-12-28 2016-04-12 Bridgestone Corporation Appearance inspection apparatus and appearance inspection method with uneveness detecting
WO2014023283A1 (en) * 2012-08-08 2014-02-13 Premium Aerotec Gmbh Surface treatment process for components composed of aluminium having detection of impermissible overheating
WO2014089713A2 (en) * 2012-12-10 2014-06-19 Uster Technologies Ag Device for the optical inspection of a moving textile material
WO2014089713A3 (en) * 2012-12-10 2014-08-07 Uster Technologies Ag Device for the optical inspection of a moving textile material
US10180401B2 (en) 2013-12-27 2019-01-15 Jfe Steel Corporation Surface defect detecting method and surface defect detecting apparatus
EP3088874A1 (en) * 2013-12-27 2016-11-02 JFE Steel Corporation Surface defect detection method and surface defect detection device
EP3088874A4 (en) * 2013-12-27 2017-05-17 JFE Steel Corporation Surface defect detection method and surface defect detection device
US10705027B2 (en) 2013-12-27 2020-07-07 Jfe Steel Corporation Surface defect detecting method and surface defect detecting apparatus
CN105849534A (en) * 2013-12-27 2016-08-10 杰富意钢铁株式会社 Surface defect detection method and surface defect detection device
CN105849534B (en) * 2013-12-27 2019-10-11 杰富意钢铁株式会社 Detection method of surface flaw and surface defect detection apparatus
GB2526866A (en) * 2014-06-05 2015-12-09 Univ Bristol Apparatus for and method of inspecting surface topography of a moving object
JP2015232476A (en) * 2014-06-09 2015-12-24 株式会社キーエンス Inspection device, inspection method, and program
EP2966593A1 (en) * 2014-07-09 2016-01-13 Sick Ag Image acquisition system for detecting an object
US9810527B2 (en) 2014-07-09 2017-11-07 Sick Ag Image detection system for detecting an object
AT516824A1 (en) * 2015-01-23 2016-08-15 Ait Austrian Inst Technology Method and device for testing OVI features
EP3182060A4 (en) * 2015-06-05 2018-01-17 Nippon Steel & Sumitomo Metal Corporation Apparatus for inspecting shape of metal body, and method for inspecting shape of metal body
KR20170044679A (en) * 2015-06-05 2017-04-25 신닛테츠스미킨 카부시키카이샤 Apparatus for inspecting shape of metal body, and method for inspecting shape of metal body
CN107003115B (en) * 2015-06-05 2019-08-09 日本制铁株式会社 The shape inspection apparatus of metallic object and the shape inspection method of metallic object
CN107003115A (en) * 2015-06-05 2017-08-01 新日铁住金株式会社 The shape inspection apparatus of metallic object and the shape inspection method of metallic object
EP3315950A4 (en) * 2015-06-25 2018-12-19 JFE Steel Corporation Surface flaw detection device, surface flaw detection method, and manufacturing method for steel material
EP3315952A4 (en) * 2015-06-25 2018-06-13 JFE Steel Corporation Surface flaw detection method, surface flaw detection device, and manufacturing method for steel material
US10495581B2 (en) 2016-01-08 2019-12-03 SCREEN Holdings Co., Ltd. Defect detection device and defect detection method
EP4254330A3 (en) * 2016-01-08 2023-11-29 SCREEN Holdings Co., Ltd. Flaw detection device and flaw detection method
EP3401672A4 (en) * 2016-01-08 2019-08-14 SCREEN Holdings Co., Ltd. Flaw detection device and flaw detection method
JP2019517003A (en) * 2016-05-30 2019-06-20 ボブスト メックス ソシエテ アノニムBobst Mex SA Surface inspection system and surface inspection method
US11022553B2 (en) 2016-05-30 2021-06-01 Bobst Mex Sa Surface inspection system and surface inspection method
JP2018036175A (en) * 2016-09-01 2018-03-08 新日鐵住金株式会社 Surface inspection device and surface inspection method of steel material
WO2018068775A1 (en) * 2016-10-15 2018-04-19 INPRO Innovationsgesellschaft für fortgeschrittene Produktionssysteme in der Fahrzeugindustrie mbH Method and system for determining the defective surface of at least one fault location on at least one functional surface of a component or test piece
WO2018188912A1 (en) * 2017-04-10 2018-10-18 BSH Hausgeräte GmbH Determining a degree of contamination in a cooking chamber
WO2020216959A1 (en) * 2019-04-25 2020-10-29 Hydro Aluminium Rolled Products Gmbh Surface treatment of flat products made of aluminium alloys, comprising colour measurements
US11953424B2 (en) 2019-04-25 2024-04-09 Speira Gmbh Surface treatment of flat products made of aluminium alloys comprising colour measurements
EP3761017A1 (en) 2019-07-05 2021-01-06 Aleris Rolled Products Germany GmbH Method and apparatus for thermographic inspection of the surfaces of a moving hot rolled metal strip article
EP4095518A4 (en) * 2020-01-20 2023-02-08 JFE Steel Corporation Surface inspection device, surface inspection method, method for manufacturing steel material, method for managing quality of steel material, and equipment for manufacturing steel material

Also Published As

Publication number Publication date
JP2001514386A (en) 2001-09-11
US6166393A (en) 2000-12-26
ES2153150T3 (en) 2001-02-16
JP3423688B2 (en) 2003-07-07
EP0898163B1 (en) 2000-11-08
ATE197503T1 (en) 2000-11-11
DE69703487D1 (en) 2000-12-14
DE69703487T2 (en) 2001-06-13
WO1999010730A1 (en) 1999-03-04

Similar Documents

Publication Publication Date Title
US6166393A (en) Method and apparatus for automatic inspection of moving surfaces
EP1943502B1 (en) Apparatus and methods for inspecting a composite structure for defects
US6327374B1 (en) Arrangement and method for inspection of surface quality
US5887077A (en) Method for the recognition and evaluation of defects in reflective surface coatings
US6064478A (en) Method of and apparatus for automatic detection of three-dimensional defects in moving surfaces by means of color vision systems
TWI399534B (en) And a defect inspection device for performing defect inspection using image analysis
US7970202B2 (en) Method and arrangement for detecting surface and structural defects of a long moving product
US20070286471A1 (en) Auto Distinction System And Auto Distinction Method
EP3364173A1 (en) Device and method for inspecting surface defect in steel plate
US20040105001A1 (en) Apparatus and method for detecting surface defects on a workpiece such as a rolled/drawn metal bar
CN104508423A (en) Method and device for inspecting surfaces of an examined object
US20180017503A1 (en) Surface defect inspecting device and method for hot-dip coated steel sheets
EP0539499B1 (en) Method and apparatus for measuring crimp frequency of a web
WO2022030083A1 (en) Metal strip surface inspection device, surface inspection method, and manufacturing method
JPH07218451A (en) Device for optically inspecting steel plate for surface flaw
NO20092602A1 (en) Surface inspection method and apparatus
Adameck et al. Three color selective stereo gradient method for fast topography recognition of metallic surfaces
JP2000065751A (en) Surface inspection apparatus
JP7136064B2 (en) Apparatus for inspecting surface of object to be inspected and method for inspecting surface of object to be inspected
CN105874318B (en) Method and device for measuring grain luster
JP4377872B2 (en) Surface inspection device
JP2004170109A (en) Apparatus and method for inspecting irregular color
JP2023103957A (en) Method for determining whether metal band meets criteria and method for manufacturing metal band

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 19980625

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AT BE CH DE ES FI FR GB IE IT LI LU SE

AKX Designation fees paid

Free format text: AT BE CH DE ES FI FR GB IE IT LI LU SE

GRAG Despatch of communication of intention to grant

Free format text: ORIGINAL CODE: EPIDOS AGRA

GRAG Despatch of communication of intention to grant

Free format text: ORIGINAL CODE: EPIDOS AGRA

GRAG Despatch of communication of intention to grant

Free format text: ORIGINAL CODE: EPIDOS AGRA

GRAH Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOS IGRA

17Q First examination report despatched

Effective date: 19981217

GRAH Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOS IGRA

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

ITF It: translation for a ep patent filed

Owner name: JACOBACCI & PERANI S.P.A.

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): AT BE CH DE ES FI FR GB IE IT LI LU SE

REF Corresponds to:

Ref document number: 197503

Country of ref document: AT

Date of ref document: 20001111

Kind code of ref document: T

REG Reference to a national code

Ref country code: CH

Ref legal event code: EP

ET Fr: translation filed
REG Reference to a national code

Ref country code: IE

Ref legal event code: FG4D

REF Corresponds to:

Ref document number: 69703487

Country of ref document: DE

Date of ref document: 20001214

REG Reference to a national code

Ref country code: ES

Ref legal event code: FG2A

Ref document number: 2153150

Country of ref document: ES

Kind code of ref document: T3

REG Reference to a national code

Ref country code: CH

Ref legal event code: NV

Representative=s name: BOVARD AG PATENTANWAELTE

PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

26N No opposition filed
REG Reference to a national code

Ref country code: GB

Ref legal event code: IF02

REG Reference to a national code

Ref country code: CH

Ref legal event code: PFA

Owner name: SPECTRA-PHYSICS VISIONTECH OY

Free format text: FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.#LEONRODSTRASSE 54#80636 MUENCHEN (DE) $ SPECTRA-PHYSICS VISIONTECH OY#TEKNOLOGIANTIE 2, P.O. BOX 80#90571 OULU (FI) $ VTT ELECTRONICS#KAITOVAEYLAE 1, P.O. BOX 1100#90571 OULU (FI) -TRANSFER TO- SPECTRA-PHYSICS VISIONTECH OY#TEKNOLOGIANTIE 2, P.O. BOX 80#90571 OULU (FI) $ VTT ELECTRONICS#KAITOVAEYLAE 1, P.O. BOX 1100#90571 OULU (FI) $ FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.#HANSASTRASSE 27 C#80686 MUENCHEN (DE)

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: IE

Payment date: 20060824

Year of fee payment: 10

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: FI

Payment date: 20060825

Year of fee payment: 10

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: BE

Payment date: 20060828

Year of fee payment: 10

Ref country code: AT

Payment date: 20060828

Year of fee payment: 10

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: LU

Payment date: 20060829

Year of fee payment: 10

Ref country code: CH

Payment date: 20060829

Year of fee payment: 10

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: ES

Payment date: 20060831

Year of fee payment: 10

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: SE

Payment date: 20060829

Year of fee payment: 10

BERE Be: lapsed

Owner name: *VTT ELECTRONICS

Effective date: 20070831

Owner name: *SPECTRA-PHYSICS VISIONTECH OY

Effective date: 20070831

Owner name: *FRAUNHOFER-GESELLSCHAFT ZUR FORDERUNG DER ANGEWAN

Effective date: 20070831

EUG Se: european patent has lapsed
REG Reference to a national code

Ref country code: CH

Ref legal event code: PL

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20070823

Ref country code: LI

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20070831

Ref country code: CH

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20070831

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: FI

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20070822

REG Reference to a national code

Ref country code: IE

Ref legal event code: MM4A

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: AT

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20070822

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: BE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20070831

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20070822

REG Reference to a national code

Ref country code: ES

Ref legal event code: FD2A

Effective date: 20070823

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: IT

Payment date: 20080826

Year of fee payment: 12

Ref country code: FR

Payment date: 20080818

Year of fee payment: 12

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: GB

Payment date: 20080822

Year of fee payment: 12

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: ES

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20070823

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LU

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20070822

GBPC Gb: european patent ceased through non-payment of renewal fee

Effective date: 20090822

REG Reference to a national code

Ref country code: FR

Ref legal event code: ST

Effective date: 20100430

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: FR

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20090831

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GB

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20090822

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IT

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20090822

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 20150820

Year of fee payment: 19

REG Reference to a national code

Ref country code: DE

Ref legal event code: R119

Ref document number: 69703487

Country of ref document: DE

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: DE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20170301