EP0829649A3 - Micro valve with preloaded valve flap - Google Patents

Micro valve with preloaded valve flap Download PDF

Info

Publication number
EP0829649A3
EP0829649A3 EP97113980A EP97113980A EP0829649A3 EP 0829649 A3 EP0829649 A3 EP 0829649A3 EP 97113980 A EP97113980 A EP 97113980A EP 97113980 A EP97113980 A EP 97113980A EP 0829649 A3 EP0829649 A3 EP 0829649A3
Authority
EP
European Patent Office
Prior art keywords
support structure
valve
valve flap
passage opening
flap
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP97113980A
Other languages
German (de)
French (fr)
Other versions
EP0829649A2 (en
EP0829649B1 (en
Inventor
Martin Dipl.-Phys. Richter
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Original Assignee
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV filed Critical Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Publication of EP0829649A2 publication Critical patent/EP0829649A2/en
Publication of EP0829649A3 publication Critical patent/EP0829649A3/en
Application granted granted Critical
Publication of EP0829649B1 publication Critical patent/EP0829649B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C3/00—Circuit elements having moving parts
    • F15C3/08—Circuit elements having moving parts using reeds
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits

Abstract

Bei einem Mikroventil (10) mit einer Auflagestruktur (12), einer Durchlaßöffnung (13), durch die Auflagestruktur (12), und einer mechanisch vorgespannten, zumindest einseitig befestigten Ventilklappe (11), die in ihrem unbetätigten Zustand von der Auflagestruktur (12) weggebogen ist und die Durchlaßöffnung (13) öffnet und in ihrem betätigten Zustand an der Auflagestruktur (12) anliegt und die Durchlaßöffnung (13) verschließt, ist eine elektrisch isolierende Beschichtung (17) vorgesehen, die auf der der Auflagestruktur (12) zugewandten Seite der Ventilklappe (11) angeordnet ist und die Ventilklappe (11) mechanisch vorspannt. Die Beschichtung (17) liegt im Bereich der Befestigung der Ventilkappe (11) auf der Auflagestruktur auf, um die Ventilklappe (11) elektrisch von der Auflagestruktur (12) zu isolieren.

Figure 00000001
In the case of a microvalve (10) with a support structure (12), a passage opening (13), through the support structure (12), and a mechanically pretensioned valve flap (11) which is attached at least on one side and which, in its unactuated state, is separated from the support structure (12). is bent away and the passage opening (13) opens and rests in its actuated state on the support structure (12) and closes the passage opening (13), an electrically insulating coating (17) is provided on the side of the support structure (12) facing the Valve flap (11) is arranged and the valve flap (11) is mechanically pretensioned. The coating (17) lies in the area of the fastening of the valve cap (11) on the support structure in order to electrically isolate the valve flap (11) from the support structure (12).
Figure 00000001
EP97113980A 1996-09-17 1997-08-13 Micro valve with preloaded valve flap Expired - Lifetime EP0829649B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19637878 1996-09-17
DE19637878A DE19637878C2 (en) 1996-09-17 1996-09-17 Micro valve with preloaded valve flap structure

Publications (3)

Publication Number Publication Date
EP0829649A2 EP0829649A2 (en) 1998-03-18
EP0829649A3 true EP0829649A3 (en) 1998-11-04
EP0829649B1 EP0829649B1 (en) 2002-10-09

Family

ID=7805898

Family Applications (1)

Application Number Title Priority Date Filing Date
EP97113980A Expired - Lifetime EP0829649B1 (en) 1996-09-17 1997-08-13 Micro valve with preloaded valve flap

Country Status (2)

Country Link
EP (1) EP0829649B1 (en)
DE (2) DE19637878C2 (en)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU6356600A (en) * 1999-07-30 2001-02-19 Procter & Gamble Company, The Microvalve for controlling fluid flow
US6887615B1 (en) 1999-07-30 2005-05-03 The Procter & Gamble Company Microvalve for controlling fluid flow
US6962170B1 (en) 1999-07-30 2005-11-08 The Procter & Gamble Company Microvalve for controlling fluid flow
US6590267B1 (en) 2000-09-14 2003-07-08 Mcnc Microelectromechanical flexible membrane electrostatic valve device and related fabrication methods
FR2834324B1 (en) * 2001-12-31 2007-04-13 Bosch Gmbh Robert ELECTRICALLY CONTROLLED VALVE, MEMBRANE COMPRISING SUCH VALVES AND BRAKE ASSIST SERVOMOTOR COMPRISING SUCH A MEMBRANE
DE10243997B4 (en) * 2002-09-21 2005-05-25 Festo Ag & Co. Micro valve in multi-layer construction
US7195026B2 (en) 2002-12-27 2007-03-27 American Air Liquide, Inc. Micro electromechanical systems for delivering high purity fluids in a chemical delivery system
EP1574724B1 (en) * 2004-03-10 2008-02-27 Festo AG & Co Pneumatic micro valve
US7448412B2 (en) 2004-07-23 2008-11-11 Afa Controls Llc Microvalve assemblies and related structures and related methods
FR2892485B1 (en) * 2005-10-21 2008-01-04 Aldes Aeraulique Sa DEVICE FOR REGULATION AND SEALING ON AN ORIFICE WHICH HAS BEEN OBTURED OR OPEN AS NEEDED
DE102007034116B4 (en) * 2007-07-21 2009-10-22 Ab Skf contraption
DE102007034117B4 (en) * 2007-07-21 2011-03-10 Ab Skf lubricator

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4231287A (en) * 1978-05-01 1980-11-04 Physics International Company Spring diaphragm
WO1992022763A1 (en) * 1991-06-18 1992-12-23 Danfoss A/S Miniature actuating device
US5176358A (en) * 1991-08-08 1993-01-05 Honeywell Inc. Microstructure gas valve control
CH684209A5 (en) * 1990-11-20 1994-07-29 Westonbridge Int Ltd Integrated valve and micropump comprising such a valve
DE29603364U1 (en) * 1996-02-27 1996-04-18 Karlsruhe Forschzent Microvalve

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4585209A (en) * 1983-10-27 1986-04-29 Harry E. Aine Miniature valve and method of making same
US5050838A (en) * 1990-07-31 1991-09-24 Hewlett-Packard Company Control valve utilizing mechanical beam buckling

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4231287A (en) * 1978-05-01 1980-11-04 Physics International Company Spring diaphragm
CH684209A5 (en) * 1990-11-20 1994-07-29 Westonbridge Int Ltd Integrated valve and micropump comprising such a valve
WO1992022763A1 (en) * 1991-06-18 1992-12-23 Danfoss A/S Miniature actuating device
US5176358A (en) * 1991-08-08 1993-01-05 Honeywell Inc. Microstructure gas valve control
DE29603364U1 (en) * 1996-02-27 1996-04-18 Karlsruhe Forschzent Microvalve

Also Published As

Publication number Publication date
DE59708427D1 (en) 2002-11-14
DE19637878C2 (en) 1998-08-06
EP0829649A2 (en) 1998-03-18
EP0829649B1 (en) 2002-10-09
DE19637878A1 (en) 1998-04-02

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