EP0763430A3 - CMOS process compatible fabrication of print heads - Google Patents

CMOS process compatible fabrication of print heads Download PDF

Info

Publication number
EP0763430A3
EP0763430A3 EP96113914A EP96113914A EP0763430A3 EP 0763430 A3 EP0763430 A3 EP 0763430A3 EP 96113914 A EP96113914 A EP 96113914A EP 96113914 A EP96113914 A EP 96113914A EP 0763430 A3 EP0763430 A3 EP 0763430A3
Authority
EP
European Patent Office
Prior art keywords
print heads
cmos process
process compatible
compatible fabrication
fabrication
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP96113914A
Other languages
German (de)
French (fr)
Other versions
EP0763430A2 (en
Inventor
Kia Silverbrook
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Eastman Kodak Co
Original Assignee
Eastman Kodak Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Eastman Kodak Co filed Critical Eastman Kodak Co
Publication of EP0763430A2 publication Critical patent/EP0763430A2/en
Publication of EP0763430A3 publication Critical patent/EP0763430A3/en
Withdrawn legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1623Manufacturing processes bonding and adhesion
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1601Production of bubble jet print heads
    • B41J2/1603Production of bubble jet print heads of the front shooter type
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1626Manufacturing processes etching
    • B41J2/1628Manufacturing processes etching dry etching
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1626Manufacturing processes etching
    • B41J2/1629Manufacturing processes etching wet etching
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1631Manufacturing processes photolithography
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/164Manufacturing processes thin film formation
    • B41J2/1642Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/164Manufacturing processes thin film formation
    • B41J2/1645Manufacturing processes thin film formation thin film formation by spincoating
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01Embodiments of or processes related to ink-jet heads
    • B41J2202/16Nozzle heaters
EP96113914A 1995-09-06 1996-08-30 CMOS process compatible fabrication of print heads Withdrawn EP0763430A3 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
AUPN5222/95 1995-09-06
AUPN5222A AUPN522295A0 (en) 1995-09-06 1995-09-06 Cmos process compatible fabrication of lift print heads

Publications (2)

Publication Number Publication Date
EP0763430A2 EP0763430A2 (en) 1997-03-19
EP0763430A3 true EP0763430A3 (en) 1997-11-05

Family

ID=3789551

Family Applications (1)

Application Number Title Priority Date Filing Date
EP96113914A Withdrawn EP0763430A3 (en) 1995-09-06 1996-08-30 CMOS process compatible fabrication of print heads

Country Status (3)

Country Link
EP (1) EP0763430A3 (en)
JP (1) JPH09169117A (en)
AU (1) AUPN522295A0 (en)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6193347B1 (en) 1997-02-06 2001-02-27 Hewlett-Packard Company Hybrid multi-drop/multi-pass printing system
US6259463B1 (en) 1997-10-30 2001-07-10 Hewlett-Packard Company Multi-drop merge on media printing system
US6786420B1 (en) 1997-07-15 2004-09-07 Silverbrook Research Pty. Ltd. Data distribution mechanism in the form of ink dots on cards
US6618117B2 (en) 1997-07-12 2003-09-09 Silverbrook Research Pty Ltd Image sensing apparatus including a microcontroller
US6624848B1 (en) 1997-07-15 2003-09-23 Silverbrook Research Pty Ltd Cascading image modification using multiple digital cameras incorporating image processing
AUPO850597A0 (en) 1997-08-11 1997-09-04 Silverbrook Research Pty Ltd Image processing method and apparatus (art01a)
US7110024B1 (en) 1997-07-15 2006-09-19 Silverbrook Research Pty Ltd Digital camera system having motion deblurring means
US6948794B2 (en) 1997-07-15 2005-09-27 Silverbrook Reserach Pty Ltd Printhead re-capping assembly for a print and demand digital camera system
US6879341B1 (en) 1997-07-15 2005-04-12 Silverbrook Research Pty Ltd Digital camera system containing a VLIW vector processor
US6690419B1 (en) 1997-07-15 2004-02-10 Silverbrook Research Pty Ltd Utilising eye detection methods for image processing in a digital image camera
US6234613B1 (en) 1997-10-30 2001-05-22 Hewlett-Packard Company Apparatus for generating small volume, high velocity ink droplets in an inkjet printer
US6193345B1 (en) * 1997-10-30 2001-02-27 Hewlett-Packard Company Apparatus for generating high frequency ink ejection and ink chamber refill
AUPP702098A0 (en) 1998-11-09 1998-12-03 Silverbrook Research Pty Ltd Image creation method and apparatus (ART73)
US7407257B2 (en) 1999-05-25 2008-08-05 Silverbrook Research Pty Ltd Mobile device including a force transfer mechanism
AUPQ056099A0 (en) 1999-05-25 1999-06-17 Silverbrook Research Pty Ltd A method and apparatus (pprint01)
KR100374788B1 (en) 2000-04-26 2003-03-04 삼성전자주식회사 Bubble-jet type ink-jet printhead, manufacturing method thereof and ejection method of the ink
KR100397604B1 (en) 2000-07-18 2003-09-13 삼성전자주식회사 Bubble-jet type ink-jet printhead and manufacturing method thereof
KR100552662B1 (en) * 2001-10-29 2006-02-20 삼성전자주식회사 High density ink-jet printhead having multi-arrayed structure

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5028514A (en) * 1988-04-30 1991-07-02 Aeg Olympia Aktiengesellschaft Method of producing an etched base plate for an ink print head
EP0498292A2 (en) * 1991-01-30 1992-08-12 Canon Information Systems Research Australia Pty Ltd. Integrally formed bubblejet print device
US5277755A (en) * 1991-12-09 1994-01-11 Xerox Corporation Fabrication of three dimensional silicon devices by single side, two-step etching process
US5278585A (en) * 1992-05-28 1994-01-11 Xerox Corporation Ink jet printhead with ink flow directing valves
US5435884A (en) * 1993-09-30 1995-07-25 Parker-Hannifin Corporation Spray nozzle and method of manufacturing same

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5028514A (en) * 1988-04-30 1991-07-02 Aeg Olympia Aktiengesellschaft Method of producing an etched base plate for an ink print head
EP0498292A2 (en) * 1991-01-30 1992-08-12 Canon Information Systems Research Australia Pty Ltd. Integrally formed bubblejet print device
US5277755A (en) * 1991-12-09 1994-01-11 Xerox Corporation Fabrication of three dimensional silicon devices by single side, two-step etching process
US5278585A (en) * 1992-05-28 1994-01-11 Xerox Corporation Ink jet printhead with ink flow directing valves
US5435884A (en) * 1993-09-30 1995-07-25 Parker-Hannifin Corporation Spray nozzle and method of manufacturing same

Also Published As

Publication number Publication date
AUPN522295A0 (en) 1995-09-28
JPH09169117A (en) 1997-06-30
EP0763430A2 (en) 1997-03-19

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