EP0726590A3 - Method for forming a field emission cold cathode - Google Patents

Method for forming a field emission cold cathode Download PDF

Info

Publication number: EP0726590A3
Authority: EP; European Patent Office
Prior art keywords: forming; field emission; cold cathode; emission cold; cathode
Prior art date: 1995-02-13
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

EP96102013A

Other languages

German (de)

French (fr)

Other versions

EP0726590B1 (en

EP0726590A2 (en

Inventor

Toshio Kaihara

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

NEC Corp

Original Assignee

NEC Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1995-02-13

Filing date

1996-02-12

Publication date

1996-12-11

1996-02-12 Application filed by NEC Corp filed Critical NEC Corp

1996-08-14 Publication of EP0726590A2 publication Critical patent/EP0726590A2/en

1996-12-11 Publication of EP0726590A3 publication Critical patent/EP0726590A3/en

1999-04-07 Application granted granted Critical

1999-04-07 Publication of EP0726590B1 publication Critical patent/EP0726590B1/en

2016-02-12 Anticipated expiration legal-status Critical

Status Expired - Lifetime legal-status Critical Current

Links

Classifications

- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/30—Cold cathodes, e.g. field-emissive cathode
- H01J1/304—Field-emissive cathodes
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
- H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
- H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2209/00—Apparatus and processes for manufacture of discharge tubes
- H01J2209/02—Manufacture of cathodes
- H01J2209/022—Cold cathodes
- H01J2209/0223—Field emission cathodes
- H01J2209/0226—Sharpening or resharpening of emitting point or edge

EP96102013A 1995-02-13 1996-02-12 Method for forming a field emission cold cathode Expired - Lifetime EP0726590B1 (en)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
JP2358295A JPH08222126A (en)	1995-02-13	1995-02-13	Manufacture of field emission cold cathode
JP23582/95		1995-02-13

Publications (3)

Publication Number	Publication Date
EP0726590A2 EP0726590A2 (en)	1996-08-14
EP0726590A3 true EP0726590A3 (en)	1996-12-11
EP0726590B1 EP0726590B1 (en)	1999-04-07

Family

ID=12114577

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
EP96102013A Expired - Lifetime EP0726590B1 (en)	1995-02-13	1996-02-12	Method for forming a field emission cold cathode

Country Status (4)

Country	Link
EP (1)	EP0726590B1 (en)
JP (1)	JPH08222126A (en)
KR (1)	KR0181326B1 (en)
DE (1)	DE69601961T2 (en)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4855636A (en) *	1987-10-08	1989-08-08	Busta Heinz H	Micromachined cold cathode vacuum tube device and method of making
EP0483814A2 (en) *	1990-10-30	1992-05-06	Sony Corporation	Field emission type emitter and method of manufacturing thereof
EP0508737A1 (en) *	1991-04-12	1992-10-14	Fujitsu Limited	Method of producing metallic microscale cold cathodes
US5201992A (en) *	1990-07-12	1993-04-13	Bell Communications Research, Inc.	Method for making tapered microminiature silicon structures
FR2700222A1 (en) *	1993-01-06	1994-07-08	Samsung Display Devices Co Ltd	Method for forming a silicon field effect device.

1995
- 1995-02-13 JP JP2358295A patent/JPH08222126A/en active Pending
1996
- 1996-02-12 DE DE69601961T patent/DE69601961T2/en not_active Expired - Fee Related
- 1996-02-12 EP EP96102013A patent/EP0726590B1/en not_active Expired - Lifetime
- 1996-02-13 KR KR1019960003445A patent/KR0181326B1/en not_active IP Right Cessation

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4855636A (en) *	1987-10-08	1989-08-08	Busta Heinz H	Micromachined cold cathode vacuum tube device and method of making
US5201992A (en) *	1990-07-12	1993-04-13	Bell Communications Research, Inc.	Method for making tapered microminiature silicon structures
EP0483814A2 (en) *	1990-10-30	1992-05-06	Sony Corporation	Field emission type emitter and method of manufacturing thereof
EP0508737A1 (en) *	1991-04-12	1992-10-14	Fujitsu Limited	Method of producing metallic microscale cold cathodes
FR2700222A1 (en) *	1993-01-06	1994-07-08	Samsung Display Devices Co Ltd	Method for forming a silicon field effect device.

Also Published As

Publication number	Publication date
KR960032553A (en)	1996-09-17
JPH08222126A (en)	1996-08-30
DE69601961T2 (en)	1999-10-14
EP0726590B1 (en)	1999-04-07
DE69601961D1 (en)	1999-05-12
EP0726590A2 (en)	1996-08-14
KR0181326B1 (en)	1999-03-20

Legal Events

Date	Code	Title	Description
1996-06-28	PUAI	Public reference made under article 153(3) epc to a published international application that has entered the european phase	Free format text: ORIGINAL CODE: 0009012
1996-08-14	AK	Designated contracting states	Kind code of ref document: A2 Designated state(s): DE FR GB
1996-10-25	PUAL	Search report despatched	Free format text: ORIGINAL CODE: 0009013
1996-12-11	AK	Designated contracting states	Kind code of ref document: A3 Designated state(s): DE FR GB
1997-06-04	17P	Request for examination filed	Effective date: 19970409
1997-07-02	17Q	First examination report despatched	Effective date: 19970515
1998-08-26	GRAG	Despatch of communication of intention to grant	Free format text: ORIGINAL CODE: EPIDOS AGRA
1998-09-23	GRAG	Despatch of communication of intention to grant	Free format text: ORIGINAL CODE: EPIDOS AGRA
1998-09-23	GRAH	Despatch of communication of intention to grant a patent	Free format text: ORIGINAL CODE: EPIDOS IGRA
1999-01-12	GRAH	Despatch of communication of intention to grant a patent	Free format text: ORIGINAL CODE: EPIDOS IGRA
1999-02-19	GRAA	(expected) grant	Free format text: ORIGINAL CODE: 0009210
1999-04-07	AK	Designated contracting states	Kind code of ref document: B1 Designated state(s): DE FR GB
1999-05-12	REF	Corresponds to:	Ref document number: 69601961 Country of ref document: DE Date of ref document: 19990512
1999-07-09	ET	Fr: translation filed
1999-12-31	PGFP	Annual fee paid to national office [announced via postgrant information from national office to epo]	Ref country code: DE Payment date: 19991231 Year of fee payment: 5
2000-02-09	PGFP	Annual fee paid to national office [announced via postgrant information from national office to epo]	Ref country code: GB Payment date: 20000209 Year of fee payment: 5
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2000-02-11	PLBE	No opposition filed within time limit	Free format text: ORIGINAL CODE: 0009261
2000-02-11	STAA	Information on the status of an ep patent application or granted ep patent	Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT
2000-03-29	26N	No opposition filed
2001-02-12	PG25	Lapsed in a contracting state [announced via postgrant information from national office to epo]	Ref country code: GB Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20010212
2001-10-03	GBPC	Gb: european patent ceased through non-payment of renewal fee	Effective date: 20010212
2001-10-31	PG25	Lapsed in a contracting state [announced via postgrant information from national office to epo]	Ref country code: FR Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20011031
2001-11-30	REG	Reference to a national code	Ref country code: FR Ref legal event code: ST
2001-12-01	PG25	Lapsed in a contracting state [announced via postgrant information from national office to epo]	Ref country code: DE Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20011201

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