EP0582017B1 - Appareil de répartition comprenant un système de distribution d'alimentation en gaz pour manipuler et stocker des récipients portatifs étanches pressurisés - Google Patents

Appareil de répartition comprenant un système de distribution d'alimentation en gaz pour manipuler et stocker des récipients portatifs étanches pressurisés Download PDF

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Publication number
EP0582017B1
EP0582017B1 EP92480110A EP92480110A EP0582017B1 EP 0582017 B1 EP0582017 B1 EP 0582017B1 EP 92480110 A EP92480110 A EP 92480110A EP 92480110 A EP92480110 A EP 92480110A EP 0582017 B1 EP0582017 B1 EP 0582017B1
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EP
European Patent Office
Prior art keywords
container
wafer
gas
dispatching apparatus
dispatching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP92480110A
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German (de)
English (en)
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EP0582017A1 (fr
Inventor
Georges Garric
André Lafond
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
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International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Priority to DE69205570T priority Critical patent/DE69205570T2/de
Priority to AT92480110T priority patent/ATE129359T1/de
Priority to ES92480110T priority patent/ES2078717T3/es
Priority to EP92480110A priority patent/EP0582017B1/fr
Priority to CA002094437A priority patent/CA2094437C/fr
Priority to TW082104644A priority patent/TW224182B/zh
Priority to JP5158473A priority patent/JPH081924B2/ja
Priority to KR1019930012591A priority patent/KR970006725B1/ko
Priority to BR9302933A priority patent/BR9302933A/pt
Priority to US08/102,075 priority patent/US5411358A/en
Publication of EP0582017A1 publication Critical patent/EP0582017A1/fr
Application granted granted Critical
Publication of EP0582017B1 publication Critical patent/EP0582017B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/70491—Information management, e.g. software; Active and passive control, e.g. details of controlling exposure processes or exposure tool monitoring processes
    • G03F7/70541—Tagging, i.e. hardware or software tagging of features or components, e.g. using tagging scripts or tagging identifier codes for identification of chips, shots or wafers
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70733—Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
    • G03F7/70741—Handling masks outside exposure position, e.g. reticle libraries
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70733—Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
    • G03F7/7075—Handling workpieces outside exposure position, e.g. SMIF box
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67769—Storage means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67775—Docking arrangements
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/14—Wafer cassette transporting

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  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Environmental & Geological Engineering (AREA)
  • Public Health (AREA)
  • Epidemiology (AREA)
  • Health & Medical Sciences (AREA)
  • Library & Information Science (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Packaging Frangible Articles (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)

Claims (11)

  1. Dispositif de répartition (300) doté d′un système de distribution d'alimentation en gaz destiné à la manipulation et au stockage d'une multiplicité de récipients portatifs étanches pressurisés (100) du type constitué d'un logement en forme de boîtier (102) pourvu d'une ouverture d'accès (104) rendue étanche par un moyen formant une porte amovible (124) et par un moyen formant une soupape injectrice de gaz (129), ledit dispositif comprenant :
    un dispositif de manipulation automatique (301) comprenant :
    un élément de base doté d'une tête possédant la faculté de tourner (303),
    un bras élévateur (304) fixé sur ladite tête possédant la faculté de tourner,
    un robot de manipulation (305) fixé sur ledit élévateur et comprenant un bras de prolongement (306) et un moyen de saisie de récipient (307), et
    un dispositif de stockage vertical (302) comprenant :
    une ossature (308) formée d'un tube au moins et comportant une multiplicité de casiers (309) sous la forme de stations de support de récipient qui lui sont fixées, dans lequel chaque casier est pourvu d'un moyen formant un injecteur de gaz (311) raccordé, d'une part, audit moyen formant une soupape injectrice de gaz et, d'autre part, à une installation d'alimentation en gaz neutre ultra pur comprimé (700) destinée à maintenir une pression différentielle positive Δp à l'intérieur de chaque récipient supporté par rapport à l'air ambiant extérieur pendant la durée du stockage.
  2. Dispositif de répartition selon la revendication 1, dans lequel ladite ossature est constituée d'une multiplicité de tubes verticaux qui sont assemblés en un agencement circulaire centré autour d'une broche qui traverse la tête possédant la faculté de tourner pour produire un agencement en forme de tour (figure 14).
  3. Dispositif de répartition selon la revendication 1, dans lequel ladite ossature est constituée d'une multiplicité de tubes verticaux qui sont assemblés suivant une direction linéaire pour produire un agencement en forme de paroi (figure 18).
  4. Dispositif de répartition selon la revendication 3, dans lequel la tête possédant la faculté de tourner est déplacée suivant une piste rectilinéaire (325).
  5. Dispositif de répartition selon l'une quelconque des revendications 2 à 4, dans lequel lesdits tubes sont creux et sont utilisés pour le transport du gaz.
  6. Dispositif de répartition selon l'une quelconque des revendications 2 à 4 précédentes, dans lequel lesdits tubes sont creux et contiennent les conduits de distribution de gaz.
  7. Dispositif de répartition selon l'une quelconque des revendications précédentes, dans lequel chacun desdits casiers est constitué d'une plaque support (310) comportant ledit moyen formant injecteur de gaz (311) qui lui est fixé.
  8. Dispositif de répartition selon la revendication 7, dans lequel ledit moyen formant injecteur de gaz est constitué d'un vérin (313) actionnant une buse rétractable (312).
  9. Dispositif de répartition selon la revendication 8, dans lequel, lorsque la buse est étendue dans le moyen formant une soupape injectrice de gaz dans le récipient, le raccordement avec l'installation d'alimentation en gaz est réalisé et dans lequel, à l'inverse, lorsque la buse est rétractée (aucun récipient n'étant présent), le raccordement est interrompu.
  10. Dispositif de répartition selon l'une quelconque des revendications précédentes, dans lequel lesdits moyens formant un injecteur de gaz sont conçus pour établir une pression différentielle positive Δp comprise approximativement dans la plage allant de 500 à 10 000 Pa à l'intérieur du récipient.
  11. Dispositif de répartition selon la revendication 10, dans lequel ladite pression différentielle Δp est égale à environ 5 000 Pa.
EP92480110A 1992-08-04 1992-08-04 Appareil de répartition comprenant un système de distribution d'alimentation en gaz pour manipuler et stocker des récipients portatifs étanches pressurisés Expired - Lifetime EP0582017B1 (fr)

Priority Applications (10)

Application Number Priority Date Filing Date Title
DE69205570T DE69205570T2 (de) 1992-08-04 1992-08-04 Verteilungseinrichtung mit Gaszufuhr-Abgabevorrichtung zum Handhaben und Speichern von abdichtbaren tragbaren unter Druck stehenden Behältern.
AT92480110T ATE129359T1 (de) 1992-08-04 1992-08-04 Verteilungseinrichtung mit gaszufuhr- abgabevorrichtung zum handhaben und speichern von abdichtbaren tragbaren unter druck stehenden behältern.
ES92480110T ES2078717T3 (es) 1992-08-04 1992-08-04 Aparato de reparticion con un sistema de distribucion y alimentacion de gas para manipular y almacenar recipientes transportables estancos a presion.
EP92480110A EP0582017B1 (fr) 1992-08-04 1992-08-04 Appareil de répartition comprenant un système de distribution d'alimentation en gaz pour manipuler et stocker des récipients portatifs étanches pressurisés
CA002094437A CA2094437C (fr) 1992-08-04 1993-04-20 Repartiteur relie a un systeme de distribution de gaz pour la manutention et le stockage de contenants pressurises, hermetiques et transportables
TW082104644A TW224182B (fr) 1992-08-04 1993-06-11
JP5158473A JPH081924B2 (ja) 1992-08-04 1993-06-29 ディスパッチング装置
KR1019930012591A KR970006725B1 (ko) 1992-08-04 1993-07-03 가압식 밀봉 운반가능한 컨테이너, 가압식 인터페이스 장치, 가스 공급 분배 시스템을 갖는 운송장치, 및 자동화 및 컴퓨터화된 컨베이어 베이스 제조라인 구조
BR9302933A BR9302933A (pt) 1992-08-04 1993-07-21 Arquitetura de linha de fabricacao,totalmente automatizada e computadorizada baseada em transportadoras dotada de aparelho de interface pressurizado para transferir uma peca de trabalho a ser processada;recipientes pressurizados vedaveis e transportaveis e aparelho de expedicao com sistema de distribuicao de gas para manusear e armazenar os mesmos
US08/102,075 US5411358A (en) 1992-08-04 1993-08-03 Dispatching apparatus with a gas supply distribution system for handling and storing pressurized sealable transportable containers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP92480110A EP0582017B1 (fr) 1992-08-04 1992-08-04 Appareil de répartition comprenant un système de distribution d'alimentation en gaz pour manipuler et stocker des récipients portatifs étanches pressurisés

Publications (2)

Publication Number Publication Date
EP0582017A1 EP0582017A1 (fr) 1994-02-09
EP0582017B1 true EP0582017B1 (fr) 1995-10-18

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Family Applications (1)

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EP92480110A Expired - Lifetime EP0582017B1 (fr) 1992-08-04 1992-08-04 Appareil de répartition comprenant un système de distribution d'alimentation en gaz pour manipuler et stocker des récipients portatifs étanches pressurisés

Country Status (7)

Country Link
US (1) US5411358A (fr)
EP (1) EP0582017B1 (fr)
JP (1) JPH081924B2 (fr)
AT (1) ATE129359T1 (fr)
CA (1) CA2094437C (fr)
DE (1) DE69205570T2 (fr)
ES (1) ES2078717T3 (fr)

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DE69205570T2 (de) 1996-06-13
EP0582017A1 (fr) 1994-02-09
CA2094437C (fr) 1998-09-15
DE69205570D1 (de) 1995-11-23
CA2094437A1 (fr) 1994-02-05
JPH081924B2 (ja) 1996-01-10
ATE129359T1 (de) 1995-11-15
JPH06104332A (ja) 1994-04-15
US5411358A (en) 1995-05-02
ES2078717T3 (es) 1995-12-16

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