EP0498931B1 - Single crystal silicon nozzle plate - Google Patents

Single crystal silicon nozzle plate Download PDF

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Publication number
EP0498931B1
EP0498931B1 EP91119200A EP91119200A EP0498931B1 EP 0498931 B1 EP0498931 B1 EP 0498931B1 EP 91119200 A EP91119200 A EP 91119200A EP 91119200 A EP91119200 A EP 91119200A EP 0498931 B1 EP0498931 B1 EP 0498931B1
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EP
European Patent Office
Prior art keywords
perforated plate
recess
opening
atomization
atomization opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP91119200A
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German (de)
French (fr)
Other versions
EP0498931A1 (en
Inventor
Jiri Dr.-Ing. Marek
Martin Dipl.-Ing. Maier
Hans-Peter Dipl.-Min. Trah
Juergen Dipl.-Ing. Buchholz (Fh)
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Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
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Filing date
Publication date
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Publication of EP0498931A1 publication Critical patent/EP0498931A1/en
Application granted granted Critical
Publication of EP0498931B1 publication Critical patent/EP0498931B1/en
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
    • B05B1/02—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
    • B05B1/02—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape
    • B05B1/04—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape in flat form, e.g. fan-like, sheet-like
    • B05B1/048—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape in flat form, e.g. fan-like, sheet-like having a flow conduit with, immediately behind the outlet orifice, an elongated cross section, e.g. of oval or elliptic form, of which the major axis is perpendicular to the plane of the jet
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
    • B05B1/02—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape
    • B05B1/04—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape in flat form, e.g. fan-like, sheet-like
    • B05B1/042—Outlets having two planes of symmetry perpendicular to each other, one of them defining the plane of the jet
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02M—SUPPLYING COMBUSTION ENGINES IN GENERAL WITH COMBUSTIBLE MIXTURES OR CONSTITUENTS THEREOF
    • F02M61/00—Fuel-injectors not provided for in groups F02M39/00 - F02M57/00 or F02M67/00
    • F02M61/16—Details not provided for in, or of interest apart from, the apparatus of groups F02M61/02 - F02M61/14
    • F02M61/166—Selection of particular materials
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02M—SUPPLYING COMBUSTION ENGINES IN GENERAL WITH COMBUSTIBLE MIXTURES OR CONSTITUENTS THEREOF
    • F02M61/00—Fuel-injectors not provided for in groups F02M39/00 - F02M57/00 or F02M67/00
    • F02M61/16—Details not provided for in, or of interest apart from, the apparatus of groups F02M61/02 - F02M61/14
    • F02M61/18—Injection nozzles, e.g. having valve seats; Details of valve member seated ends, not otherwise provided for
    • F02M61/1853—Orifice plates
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S239/00—Fluid sprinkling, spraying, and diffusing
    • Y10S239/19—Nozzle materials

Definitions

  • the invention is based on a perforated plate of the type described in EP-A-328281.
  • EP-A-328 281 is a perforated plate made of monocrystalline silicon, which has an etching-shaped recess in its upper end face with a square cross section parallel to the upper end face and two atomizing openings in the lower end face, which partially overlap from edge regions of the recess and form two flow openings, the hole axes of which are inclined with respect to the end faces.
  • the recess is not designed so that it has a direct guiding function for the liquid towards the flow openings in order to achieve better liquid atomization by forming flat jets.
  • a perforated plate made of monocrystalline silicon which has an elongated recess formed by etching with two parallel longitudinal surfaces but without transverse surfaces in an upper end face, wherein the recess intersects two spray openings extending to the lower end face.
  • the aim is to achieve a sharp, non-scattering ink jet.
  • a perforated plate made of monocrystalline silicon is known from the IBM Technical Disclosure Bulletin, Volume 19, No. 6, November 1976, pages 2311 to 2312, which has an elongated recess with transverse surfaces formed by etching in the upper end face, but the recess has several adjoining spray orifices intersect, the cross section of which narrows towards the lower end face in order to produce sharp-edged, little scattering ink jets.
  • the perforated plate according to the invention with the features of independent claim 1 has the advantage, on the other hand, of enabling the formation of flat jets due to the at least one elongated recess of the perforated plate opening into a metering opening and thus achieving a substantially better atomization of the fuel dispensed.
  • the formation of the elongated recesses and the atomization openings in the silicon perforated plate by etching enables high manufacturing accuracy.
  • the perforated plate according to the invention can be produced in a simple and inexpensive manner, since the production outlay is low even with the required narrow manufacturing tolerances. In the manufacturing process commonly used in semiconductor technology, the batch process, many perforated plates can be produced at the same time.
  • the size of the jet and atomization angle can be influenced by changing the cross sections and / or the etching depths of the elongate recesses and the atomization openings.
  • a fuel injector with such a perforated plate has the advantage of dispensing the fuel in a particularly finely atomized manner and thus making it possible to form a particularly homogeneous fuel-air mixture.
  • the longitudinal axis of the elongated recess runs parallel to a diagonal of the square-shaped atomizing opening connecting two opposite corners of the atomizing opening.
  • the two opposing longitudinal surfaces of the elongated recess run parallel to one another and perpendicular to the upper end face of the perforated plate and the longitudinal edges of the two longitudinal surfaces have the greatest length of all the edges of the elongated recess formed with the upper end face of the perforated plate.
  • the perforated plate has two elongated recesses arranged next to one another, each with an atomizing opening.
  • Such a perforated plate is particularly well suited for fuel injection valves for fuel injection systems of internal combustion engines with two intake valves.
  • FIG. 1 shows a partially illustrated fuel injector with a perforated plate designed according to a first embodiment
  • FIG. 2 shows a plan view of the perforated plate according to the first embodiment in the direction of arrow X in FIG. 1
  • FIG. 3 shows a section along the line III-III in FIG. 2
  • FIG 4 shows a plan view of a perforated plate according to a second exemplary embodiment
  • FIG. 5 shows a section along the line VV
  • FIG. 6 shows a section along the line VI-VI in FIG. 4, the flow course of the fuel and the jet formation being indicated in FIGS.
  • FIG. 4 to 6, 7 shows a plan view of a perforated plate according to a third exemplary embodiment, in which the flow pattern and the jet formation of the fuel are indicated
  • FIG. 8 shows a section along the line VIII-VIII in FIG. 7
  • FIG. 9 shows a plan view of a perforated plate according to a fourth exemplary embodiment
  • FIG. 10 a section along the line XX in Figure 9
  • Fig 11 shows a section along the line XI-XI in FIG. 9
  • FIG. 12 shows a section along the line XII-XII in FIG. 9
  • FIG. 13 shows a section along the line XIII-XIII in FIG.
  • FIG. 1 shows a partially illustrated fuel injector with a perforated plate according to a first exemplary embodiment, which can be used, for example, for injection systems of mixed-compression spark-ignition internal combustion engines.
  • a nozzle body 3 of the fuel injector Concentric to a longitudinal valve axis 1, a nozzle body 3 of the fuel injector has a stepped through opening 7.
  • a valve closing body 9 is arranged in the through opening 7. With its downstream end, which, for example, tapers conically downstream Sealing area 11 is formed, the valve closing body 9 interacts with a valve seat surface 13 of the stepped through opening 7 of the nozzle body 3, which tapers conically in the flow direction, for example.
  • a guide section 15 of the through opening 7 formed upstream of the valve seat surface serves to guide the valve closing body 9 on its at least one guide region 16.
  • valve closing body 9 The axial movement of the valve closing body 9 and thus the opening and closing of the valve takes place, for example, mechanically or electromagnetically in a known manner.
  • the valve seat surface 13 is connected in the downstream direction, e.g. cylindrical flow section 17, a transition section 19 widening radially outward in the flow direction and a receiving section 21 of the through opening 7, the wall of which runs parallel to the longitudinal valve axis 1.
  • a perforated plate 23 is arranged so that the perforated plate 23 is closely surrounded by the wall of the receiving section 21.
  • a protective cap 25 is arranged at the downstream end of the nozzle body 3, which surrounds the circumference of the nozzle body 3 in the region of its downstream end with a cylinder section 27 and with a radial section pointing radially inward downstream of the perforated plate 23 29 rests on a lower end face 31 of the perforated plate 23 facing away from the valve seat surface 13.
  • the protective cap 25 is held on the circumference of the nozzle body 3 by a snap connection 33.
  • a metal protective cap 25 it is also possible for a metal protective cap 25 to be attached to the circumference of the nozzle body 3 by means of laser welding.
  • the perforated plate 23 With its upper end face 35 facing the valve seat surface 13, the perforated plate 23 bears against a holding shoulder 37 of the stepped through opening 7 of the nozzle body 3, which, in the radial direction, extends from the receiving section 21 and faces the perforated plate.
  • the perforated plate 23 is made of monocrystalline silicon.
  • FIG. 2 shows a top view of the perforated plate 23 in the direction of the arrow X in FIG. 1 and FIG. 3 shows a section along the line III-III in FIG. 2.
  • the elongated recess 39 for example, partially overlaps with an atomizing opening 41, which extends to the lower end face 31 of the perforated plate 23, so that the recess 39 and the atomizing opening 41 together form a flow channel penetrating the perforated plate 23.
  • the atomization opening 41 is formed, for example, starting from the lower end face 31 of the perforated plate 23 by anisotropic etching. To reduce the manufacturing costs of such a perforated plate 23, it is possible to form the elongate recess 39 and the atomization opening 41 in a common operation by anisotropic etching on both sides. This results in identical etching depths for the elongated recess 39 and for the atomization opening 41 and thus identical extensions in the direction of the longitudinal valve axis 1.
  • the elongated recess 39 has a rectangular opening cross section on the upper end 35, which tapers towards the lower end 31 of the perforated plate 23 and tapers to the bottom 43 of the elongated recess 39.
  • the wall of the elongated recess 39 is formed in each case by two longitudinal surfaces 45 and transverse surfaces 47 which are inclined to the longitudinal axis 1 of the valve.
  • the longitudinal surfaces 45 each form a longitudinal edge 49 and the transverse surfaces 47 each form a transverse edge 51 with the upper end face 35 of the perforated plate 23, the two longitudinal edges 49 running parallel to one another and the two transverse edges 51 running parallel to one another.
  • the longitudinal edges 49 have a greater edge length than the transverse edges 51 of the elongated recess 39.
  • the elongated recess 39 has a longitudinal axis 53 and perpendicular to it a parallel to the transverse edges 51 extending transverse axis 55, both the longitudinal axis 53 and the transverse axis 55 running like axes of symmetry of the elongated recess and the longitudinal axis 53 and the transverse axis 55 intersect, for example, at a point on the valve longitudinal axis 1.
  • the, for example, rectangular atomizing opening 41 extends, for example, concentrically to the elongated recess 39 in the direction of the lower end face 31 of the perforated plate 23.
  • the cross section of the atomizing opening 41 widens in the direction of flow.
  • the atomization opening 41 has two mutually opposite longitudinal surfaces 58 which each form a longitudinal edge 57 with the lower end face 31 of the perforated plate 23.
  • the longitudinal edges 57 of the atomizing opening 41 run parallel to the longitudinal axis 53 of the elongated recess 39 and have a substantially shorter edge length than the longitudinal edges 49 of the elongated recess 39, the ratio of the edge lengths of the longitudinal edges 49 of the elongated recess 39 to the longitudinal edges 57 of the atomizing opening 41 is approximately 1.5: 1 to 10: 1.
  • a transverse edge 60 of a transverse surface 61 of the atomizing opening 41 formed with the lower end face 31 runs perpendicular to the longitudinal edges 57.
  • the transverse edges 60 also have a slightly longer edge length than the transverse edges 51 of the elongated recess 39 for manufacturing reasons, for example, by 5 to 30.
  • the transverse edges 60 of the atomization opening 41 can have an edge length that is up to twice as long as the transverse edges 51.
  • FIGS. 4 to 6 show a second exemplary embodiment according to the invention, in which the same and equivalent parts are identified by the same reference numerals as in FIGS. 1 to 3.
  • the perforated plate 23 has two elongated recesses 39 which are spaced apart from one another and which are each partially with a Overlap atomization opening 41.
  • the two elongated recesses 39 are arranged so that their two longitudinal axes 53 run parallel to one another on a common line.
  • the elongated recesses 39 and the atomizing openings 41 are designed in exactly the same way as in the first exemplary embodiment illustrated in FIGS. 1 to 3.
  • the flow pattern of the fuel is indicated by arrows 56 in order to clarify the functioning of the perforated plate according to the invention.
  • the geometry of the elongated recess 39 and the atomization opening 41, as shown in FIGS. 4 to 6, causes a deflection of the flow 56 of the fuel.
  • the flow 56 is deflected in the direction of the bottom 43, so that two flow halves of the fuel, which flow towards one another in the direction of the longitudinal axis 53, collide with one another via the atomization opening 41.
  • the fuel flow 56 is expanded and atomized in the form of a flat jet in the direction of the transverse axis 55 when it emerges from the atomizing opening 41, as indicated by dashed line 59.
  • This fuel stream which is indicated by the dashed line 59 and is emitted in a flat jet, has the advantage of particularly fine atomization.
  • the shape of the flat jet identified by the broken line 59 and the size of the atomizing angle can be influenced.
  • the width 65 of the flat jet identified by the broken line 59 also changes in the direction of the transverse axis 55 of the perforated plate 23 and thus the size of the atomization angle.
  • the perforated plate shown in FIGS. 4 to 6 according to the second exemplary embodiment is particularly suitable for use in fuel injection valves for internal combustion engines with two intake valves per cylinder, each flat jet being assigned an intake valve in accordance with the broken line 59.
  • the perforated plate 23 according to the third exemplary embodiment shown in FIGS. 7 and 8, which shows a section along the line VIII-VIII in FIG. 7, as well as the perforated plate according to the second exemplary embodiment, has two rectangular elongate recesses 39 lying next to one another, each of which is partially with a rectangular atomizing opening 41.
  • the same and equivalent parts are identified by the same reference numerals as in FIGS. 1 to 6.
  • the elongated recess 39 and the atomizing opening 41 are not formed concentrically with one another.
  • the atomization opening 41 of the left elongate recess 39 is shifted to the left and the atomization opening 41 of the right elongate recess 39 to the right.
  • the flat jet is deflected away from the transverse axis 55 towards the side of the elongated recess 39, towards which the atomizing opening 41 is displaced along the longitudinal axis 53.
  • This embodiment with the two diverging flat jets has proven to be advantageous since mixing of the two flat jets of fuel and thus mutual influencing is effectively avoided.
  • FIGS. 9 to 13 A fourth exemplary embodiment of a perforated plate according to the invention is shown in FIGS. 9 to 13.
  • the same and equivalent parts are identified by the same reference numerals as in FIGS. 1 to 8.
  • FIG. 9 shows a perforated plate 23 made of monocrystalline silicon with, for example, two geometrically identical elongate recesses 39, which are spaced apart and the lower end face 31 of FIG Perforated plate 23 facing each other partially overlap with a rectangular atomizing opening 41, the two atomizing openings 41 also having geometrically identical dimensions.
  • Figure 10 shows a section along the line XX in Figure 9
  • Figure 11 shows a section along the line XI-XI in Figure 9
  • Figure 12 shows a section along the line XII-XII in Figure 9
  • the figure 13 shows a section along the line XIII-XIII in FIG. 9.
  • the two elongate recesses 39 have a hexagonal opening cross section on the upper end face 35, which crosses in the direction of the bottom 43 tapers towards the elongated recess 39 of the lower end face 31 of the perforated plate 23.
  • the wall of the elongated recess 39 is formed by two longitudinal surfaces 45 running perpendicular to the upper end face 35 of the perforated plate 23 and four transverse surfaces 47 inclined to the longitudinal axis 1 of the valve, two transverse surfaces 47 adjoining each other.
  • the longitudinal surfaces 45 each form a longitudinal edge 49 with the upper end face 35 of the perforated plate 23 and the transverse surfaces 47 each form a transverse edge 51.
  • the two longitudinal edges 49 and two opposite transverse edges 51 each run parallel to one another.
  • the longitudinal edges 49 have a substantially longer edge length than the transverse edges 51.
  • the two transverse edges 51 of the mutually adjoining transverse surfaces 47 form a right angle to one another and have the same length.
  • transverse edges 51 are at an obtuse angle to the longitudinal edges 49 of the elongated recess 39.
  • the elongated recesses 39 Parallel to the longitudinal edges 49, the elongated recesses 39 have a longitudinal axis 53 and perpendicular to them a transverse axis 55 which run like axes of symmetry of the elongated recess 39.
  • the longitudinal axis 53 and the transverse axis 55 intersect at the center of the elongated recess 39.
  • the square, for example rectangular or square, atomizing opening 41 extends concentrically to the elongated recess 39 in the direction of the lower end face 31 of the perforated plate 23.
  • the cross section of the atomizing opening 41 widens in the direction of flow.
  • the elongated recess 39 and the atomizing opening 41 are arranged so that the longitudinal axis 53 of the elongated recess 39 runs parallel to and, for example, congruently with a diagonal 67 of the square atomizing opening 41 connecting two opposite corners of the atomizing opening 41.
  • the design of the elongated recess 39 and the atomization opening 41 causes a deflection of the fuel flow on the oblique transverse surfaces 47 and the bottom 43.
  • two deflection halves of the fuel flowing towards one another in the direction of the longitudinal axis 53 collide with one another due to the deflection at the bottom 43.
  • the shape and direction of the flat jet and the size of the atomizing angle of the fuel can also be influenced in the fourth exemplary embodiment by changing the geometry of the elongated recesses 39 and the atomizing openings 41 and their position relative to one another.
  • the perforated plate 23 according to the invention or the fuel injection valve with a perforated plate 23 according to the invention enables the dispensed fuel to be atomized very finely. Through the formation of the elongated recess 39 and the atomization opening 41 in the silicon perforated plate by etching, high manufacturing accuracy is achieved with little manufacturing effort.

Description

Stand der TechnikState of the art

Die Erfindung geht aus von einer Lochplatte der in der EP-A-328281 beschriebenen Art.The invention is based on a perforated plate of the type described in EP-A-328281.

Aus der EP-A-0 354 659 ist ein Brennstoffeinspritzventil mit einem stromabwärts eines Ventilsitzes angeordneten Siliziumdüsenplättchen bekannt, das eine sich in Strömungsrichtung erweiternde Zerstäubungsöffnung aufweist. Durch diese Zerstäubungsöffnung wird ein Schnurstrahl mit einer relativ schlechten Zerstäubung des Brennstoffs erzeugt, so daß die Bildung eines weitestgehend homogenen Brennstoff-Luft-Gemisches nicht gewährleistet ist.From EP-A-0 354 659 a fuel injection valve with a silicon nozzle plate arranged downstream of a valve seat is known, which has an atomizing opening that widens in the flow direction. A line jet with a relatively poor atomization of the fuel is generated through this atomization opening, so that the formation of a largely homogeneous fuel-air mixture is not guaranteed.

Die Erzeugung von Flachstrahlen oder Fächerstrahlen, die eine bessere Zerstäubung des Brennstoffs ermöglichen, ist aus der DE-A-39 04 446 bekannt. Dort ist in der Lochplatte zumindest eine längliche Einprägung vorgesehen, die in jeweils eine Zerstäubungsoffnung mündet. Der Fertigungsaufwand für die möglichst enge Maßtoleranzen aufweisenden Einprägungen ist jedoch sehr groß, so daß die Herstellung einer solchen Lochplatte mit hohen Kosten verbunden ist. Zudem bereitet die Einhaltung der engen Fertigungstoleranzen der Einprägungen bei einer Serienfertigung Schwierigkeiten.The generation of flat jets or fan jets, which enable better atomization of the fuel, is known from DE-A-39 04 446. There, at least one elongated indentation is provided in the perforated plate, each of which opens into an atomization opening. The manufacturing effort for the narrowest possible dimensional tolerances impressions is however very large, so that the production of such a perforated plate is associated with high costs. In addition, compliance with the narrow manufacturing tolerances of the embossments is difficult in series production.

Bekannt ist aus der EP-A-328 281 ebenfalls eine Lochplatte aus monokristallinem Silizium, die in einer oberen Stirnseite eine durch Ätzen ausgebildete Ausnehmung mit zur oberen Stirnseite parallelem quadratischem Querschnitt hat und in der unteren Stirnseite zwei Zerstäubungsöffnungen, die teilweise von Randbereichen der Ausnehmung überschnitten werden und zwei Strömungsöffnungen bilden, deren Lochachsen geneigt gegenüber den Stirnseiten verlaufen. Dabei ist die Ausnehmung nicht so ausgebildet, daß sie eine direkte Leitfunktion für die Flüssigkeit zu den Strömungsöffnungen hin hat, um durch Bildung von Flachstrahlen eine bessere Flüssigkeitszerstäubung zu erzielen.Also known from EP-A-328 281 is a perforated plate made of monocrystalline silicon, which has an etching-shaped recess in its upper end face with a square cross section parallel to the upper end face and two atomizing openings in the lower end face, which partially overlap from edge regions of the recess and form two flow openings, the hole axes of which are inclined with respect to the end faces. The recess is not designed so that it has a direct guiding function for the liquid towards the flow openings in order to achieve better liquid atomization by forming flat jets.

Weiterhin bekannt ist durch IBM Technical Disclosure Bulletin, Band 21, Nr. 6., November 1978, Seiten 2585 bis 2586 eine Lochplatte aus monokristallinem Silizium, die in einer oberen Stirnseite eine durch Ätzen ausgebildete längliche Ausnehmung mit zwei parallelen Längsflächen aber ohne Querflächen hat, wobei die Ausnehmung zwei sich zur unteren Stirnseite erstreckende Abspritzöffnungen schneidet. Dabei wird die Erzielung eines scharfen, nicht streuenden Tintenstrahles angestrebt.Also known from IBM Technical Disclosure Bulletin, Volume 21, No. 6, November 1978, pages 2585 to 2586, is a perforated plate made of monocrystalline silicon, which has an elongated recess formed by etching with two parallel longitudinal surfaces but without transverse surfaces in an upper end face, wherein the recess intersects two spray openings extending to the lower end face. The aim is to achieve a sharp, non-scattering ink jet.

Zusätzlich ist aus dem IBM Technical Disclosure Bulletin, Band 19, Nr. 6, November 1976, Seiten 2311 bis 2312 eine Lochplatte aus monokristallinem Silizium bekannt, die in der oberen Stirnseite eine durch Ätzen ausgebildete längliche Ausnehmung mit Querflächen hat, wobei jedoch die Ausnehmung mehrere nebeneinander liegende Abspritzöffnungen schneidet, deren Querschnitt sich zur unteren Stirnseite hin verengt, um scharfkantige, wenig streuende Tintenstrahlen zu erzeugen.In addition, a perforated plate made of monocrystalline silicon is known from the IBM Technical Disclosure Bulletin, Volume 19, No. 6, November 1976, pages 2311 to 2312, which has an elongated recess with transverse surfaces formed by etching in the upper end face, but the recess has several adjoining spray orifices intersect, the cross section of which narrows towards the lower end face in order to produce sharp-edged, little scattering ink jets.

Vorteile der ErfindungAdvantages of the invention

Die erfindungsgemäße Lochplatte mit den Merkmalen des unabhängigen Anspruches 1 hat demgegenüber den Vorteil, aufgrund der zumindest einen in jeweils eine Zumeßöffnung mündenden länglichen Ausnehmung der Lochplatte die Bildung von Flachstrahlen zu ermöglichen und so eine wesentlich bessere Zerstäubung des abgegebenen Brennstoffs zu erzielen. Die Ausbildung der länglichen Ausnehmungen und der Zerstäubungsöffnungen in der Silizium-Lochplatte durch Ätzen ermöglicht eine hohe Fertigungsgenauigkeit. Die erfindungsgemäße Lochplatte ist auf einfache und kostengünstige Art und Weise herstellbar, da der Fertigungsaufwand auch bei den geforderten engen Fertigungstoleranzen gering ist. Bei dem in der Halbleitertechnik üblichen Fertigungsverfahren, dem Batchverfahren, können viele Lochplatten gleichzeitig hergestellt werden.The perforated plate according to the invention with the features of independent claim 1 has the advantage, on the other hand, of enabling the formation of flat jets due to the at least one elongated recess of the perforated plate opening into a metering opening and thus achieving a substantially better atomization of the fuel dispensed. The formation of the elongated recesses and the atomization openings in the silicon perforated plate by etching enables high manufacturing accuracy. The perforated plate according to the invention can be produced in a simple and inexpensive manner, since the production outlay is low even with the required narrow manufacturing tolerances. In the manufacturing process commonly used in semiconductor technology, the batch process, many perforated plates can be produced at the same time.

Durch eine Variation der Geometrie der länglichen Ausnehmungen und der Zerstäubungsöffnungen, also z.B. durch eine Veränderung der Querschnitte und/oder der Ätztiefen der länglichen Ausnehmungen und der Zerstäubungsöffnungen lassen sich die Größe des Strahl- und des Zerstäubungswinkels beeinflussen.By varying the geometry of the elongated recesses and the atomizing openings, e.g. The size of the jet and atomization angle can be influenced by changing the cross sections and / or the etching depths of the elongate recesses and the atomization openings.

Ein Brennstoffeinspritzventil mit einer derartigen Lochplatte hat den Vorteil, den Brennstoff besonders fein zerstäubt abzugeben und so die Bildung eines besonders homogenen Brennstoff-Luft-Gemisches zu ermöglichen.A fuel injector with such a perforated plate has the advantage of dispensing the fuel in a particularly finely atomized manner and thus making it possible to form a particularly homogeneous fuel-air mixture.

Durch die in den abhängigen Ansprüchen aufgeführten Maßnahmen sind vorteilhafte Weiterbildungen und Verbesserungen der im Anspruch 1 angegebenen Lochplatte und des Brennstoffeinspritzventils möglich.The measures listed in the dependent claims are advantageous developments and improvements to those specified in claim 1 Perforated plate and the fuel injector possible.

Es ist besonders vorteilhaft, wenn die Längsachse der länglichen Ausnehmung parallel zu einer zwei gegenüberliegende Ecken der Zerstäubungsöffnung miteinander verbindenden Diagonalen der viereckförmigen Zerstäubungsöffnung verläuft. Hierdurch wird der Brennstoff flachstrahlförmig und besonders fein zerstäubt aus der Zerstäubungsöffnung abgegeben.It is particularly advantageous if the longitudinal axis of the elongated recess runs parallel to a diagonal of the square-shaped atomizing opening connecting two opposite corners of the atomizing opening. As a result, the fuel is discharged from the atomizing opening in a flat jet and particularly finely atomized.

Zu diesem Zweck ist es vorteilhaft, wenn die beiden einander gegenüberliegenden Längsflächen der länglichen Ausnehmung parallel zueinander und senkrecht zu der oberen Stirnseite der Lochplatte verlaufen und die Längskanten der beiden Längsflächen die größte Länge aller mit der oberen Stirnseite der Lochplatte gebildeten Kanten der länglichen Ausnehmung aufweisen.For this purpose, it is advantageous if the two opposing longitudinal surfaces of the elongated recess run parallel to one another and perpendicular to the upper end face of the perforated plate and the longitudinal edges of the two longitudinal surfaces have the greatest length of all the edges of the elongated recess formed with the upper end face of the perforated plate.

Vorteilhaft ist es, wenn die Lochplatte zwei nebeneinander angeordnete längliche Ausnehmungen mit je einer Zerstäubungsöffnung hat. Eine solche Lochplatte eignet sich besonders gut für Brennstoffeinspritzventile für Brennstoffeinspritzanlagen von Brennkraftmaschinen mit zwei Einlaßventilen.It is advantageous if the perforated plate has two elongated recesses arranged next to one another, each with an atomizing opening. Such a perforated plate is particularly well suited for fuel injection valves for fuel injection systems of internal combustion engines with two intake valves.

Zeichnungdrawing

Ausführungsbeispiele der Erfindung sind in der Zeichnung vereinfacht dargestellt und in der nachfolgenden Beschreibung näher erläutert. Figur 1 zeigt ein teilweise dargestelltes Brennstoffeinspritzventil mit einer gemäß eines ersten Ausführungsbeispiels ausgebildeten Lochplatte, Figur 2 eine Draufsicht der Lochplatte gemaß des ersten Ausführungsbeispiels in Richtung des Pfeiles X in Figur 1, Figur 3 einen Schnitt entlang der Linie III-III in Figur 2, Figur 4 eine Draufsicht einer Lochplatte gemäß eines zweiten Ausführungsbeispiels, Figur 5 einen Schnitt entlang der Linie V-V und Figur 6 einen Schnitt entlang der Linie VI-VI in Figur 4, wobei in den Figuren 4 bis 6 der Strömungsverlauf des Brennstoffs und die Strahlbildung angedeutet sind, Figur 7 eine Draufsicht einer Lochplatte gemäß eines dritten Ausführungsbeispiels, in der der Strömungsverlauf und die Strahlbildung des Brennstoffs angedeutet sind, Figur 8 einen Schnitt entlang der Linie VIII-VIII in Figur 7, Figur 9 eine Draufsicht einer Lochplatte gemäß eines vierten Ausführungsbeispiels, Figur 10 einen Schnitt entlang der Linie X-X in Figur 9, Figur 11 einen Schnitt entlang der Linie XI-XI in Figur 9, Figur 12 einen Schnitt entlang der Linie XII-XII in Figur 9 und Figur 13 einen Schnitt entlang der Linie XIII-XIII in Figur 9.Embodiments of the invention are shown in simplified form in the drawing and explained in more detail in the following description. 1 shows a partially illustrated fuel injector with a perforated plate designed according to a first embodiment, FIG. 2 shows a plan view of the perforated plate according to the first embodiment in the direction of arrow X in FIG. 1, FIG. 3 shows a section along the line III-III in FIG. 2, FIG 4 shows a plan view of a perforated plate according to a second exemplary embodiment, FIG. 5 shows a section along the line VV and FIG. 6 shows a section along the line VI-VI in FIG. 4, the flow course of the fuel and the jet formation being indicated in FIGS. 4 to 6, 7 shows a plan view of a perforated plate according to a third exemplary embodiment, in which the flow pattern and the jet formation of the fuel are indicated, FIG. 8 shows a section along the line VIII-VIII in FIG. 7, FIG. 9 shows a plan view of a perforated plate according to a fourth exemplary embodiment, FIG. 10 a section along the line XX in Figure 9, Fig 11 shows a section along the line XI-XI in FIG. 9, FIG. 12 shows a section along the line XII-XII in FIG. 9, and FIG. 13 shows a section along the line XIII-XIII in FIG.

Beschreibung der AusführungsbeispieleDescription of the embodiments

Die Figur 1 zeigt ein teilweise dargestelltes, beispielsweise für Einspritzanlagen von gemischverdichtenden fremdgezündeten Brennkraftmaschinen verwendbares Brennstoffeinspritzventil mit einer Lochplatte gemaß eines ersten Ausführungsbeispiels. Konzentrisch zu einer Ventillängsachse 1 weist ein Düsenkörper 3 des Brennstoffeinspritzventils eine abgestufte Durchgangsöffnung 7 auf. In der Durchgangsöffnung 7 ist ein Ventilschließkörper 9 angeordnet. Mit seinem stromabwärtigen Ende, das z.B. als stromabwärts sich konisch verjüngender Dichtbereich 11 ausgebildet ist, wirkt der Ventilschließkörper 9 mit einer sich beispielsweise in Strömungsrichtung konisch verjüngenden Ventilsitzfläche 13 der abgestuften Durchgangsöffnung 7 des Düsenkörpers 3 zusammen. Ein stromaufwärts der Ventilsitzfläche ausgebildeter Führungsabschnitt 15 der Durchgangsöffnung 7 dient zur Führung des Ventilschließkörpers 9 an dessen zumindest einem Führungsbereich 16.FIG. 1 shows a partially illustrated fuel injector with a perforated plate according to a first exemplary embodiment, which can be used, for example, for injection systems of mixed-compression spark-ignition internal combustion engines. Concentric to a longitudinal valve axis 1, a nozzle body 3 of the fuel injector has a stepped through opening 7. A valve closing body 9 is arranged in the through opening 7. With its downstream end, which, for example, tapers conically downstream Sealing area 11 is formed, the valve closing body 9 interacts with a valve seat surface 13 of the stepped through opening 7 of the nozzle body 3, which tapers conically in the flow direction, for example. A guide section 15 of the through opening 7 formed upstream of the valve seat surface serves to guide the valve closing body 9 on its at least one guide region 16.

Die Axialbewegung des Ventilschließkörpers 9 und damit das Öffnen und Schließen des Ventils erfolgt beispielsweise in bekannter Weise mechanisch oder elektromagnetisch.The axial movement of the valve closing body 9 and thus the opening and closing of the valve takes place, for example, mechanically or electromagnetically in a known manner.

An die Ventilsitzfläche 13 schließen sich in stromabwärtiger Richtung ein z.B. zylinderförmiger Strömungsabschnitt 17, ein sich in Strömungsrichtung radial nach außen erweiternder Übergangsabschnitt 19 sowie ein Aufnahmeabschnitt 21 der Durchgangsöffnung 7 an, dessen Wandung parallel zu der Ventillängsachse 1 verlauft. In dem Aufnahmeabschnitt 21 ist eine Lochplatte 23 so angeordnet, daß die Lochplatte 23 durch die Wandung des Aufnahmeabschnittes 21 eng umgeben ist.The valve seat surface 13 is connected in the downstream direction, e.g. cylindrical flow section 17, a transition section 19 widening radially outward in the flow direction and a receiving section 21 of the through opening 7, the wall of which runs parallel to the longitudinal valve axis 1. In the receiving section 21, a perforated plate 23 is arranged so that the perforated plate 23 is closely surrounded by the wall of the receiving section 21.

Um die Lochplatte 23 vor Beschädigungen zu schützen, ist an dem stromabwärtigen Ende des Düsenkörpers 3 eine Schutzkappe 25 angeordnet, die mit einem Zylinderabschnitt 27 den Umfang des Düsenkörpers 3 im Bereich seines stromabwärtigen Endes umgibt und mit einem stromabwärts der Lochplatte 23 radial nach innen weisenden Radialabschnitt 29 an einer der Ventilsitzfläche 13 abgewandten unteren Stirnseite 31 der Lochplatte 23 anliegt. Die Schutzkappe 25 wird durch eine Rastverbindung 33 an dem Umfang des Düsenkörpers 3 gehalten. Es ist aber auch möglish, daß eine metallene Schutzkappe 25 mittels einer Laserschweißung an dem Umfang des Düsenkörpers 3 befestigt ist.To protect the perforated plate 23 from damage, a protective cap 25 is arranged at the downstream end of the nozzle body 3, which surrounds the circumference of the nozzle body 3 in the region of its downstream end with a cylinder section 27 and with a radial section pointing radially inward downstream of the perforated plate 23 29 rests on a lower end face 31 of the perforated plate 23 facing away from the valve seat surface 13. The protective cap 25 is held on the circumference of the nozzle body 3 by a snap connection 33. However, it is also possible for a metal protective cap 25 to be attached to the circumference of the nozzle body 3 by means of laser welding.

Mit ihrer der Ventilsitzfläche 13 zugewandten oberen Stirnseite 35 liegt die Lochplatte 23 an einem der Lochplatte zugewandten, in radialer Richtung ausgehend von dem Aufnahmeabschnitt 21 nach innen verlaufenden Halteabsatz 37 der abgestuften Durchgangsöffnung 7 des Düsenkörpers 3 an.With its upper end face 35 facing the valve seat surface 13, the perforated plate 23 bears against a holding shoulder 37 of the stepped through opening 7 of the nozzle body 3, which, in the radial direction, extends from the receiving section 21 and faces the perforated plate.

Die Lochplatte 23 ist aus monokristallinem Silizium ausgebildet. Die Figur 2 zeigt eine Draufsicht der Lochplatte 23 in Richtung des Pfeiles X in Figur 1 und die Figur 3 einen Schnitt entlang der Linie III-III in Figur 2. Ausgehend von der oberen Stirnseite 35 ist in der Lochplatte 23 beispielsweise durch anisotropes Ätzen zumindest eine längliche Ausnehmung 39 ausgebildet, die sich in Richtung zur unteren Stirnseite 31 hin in die Lochplatte 23 bis zu einem ebenen Boden 43 erstreckt. Die beispielsweise eine längliche Ausnehmung 39 überschneidet sich zum Teil mit einer Zerstäubungsöffnung 41, die sich bis zu der unteren Stirnseite 31 der Lochplatte 23 erstreckt, so daß die Ausnehmung 39 und die Zerstäubungsöffnung 41 zusammen einen die Lochplatte 23 durchdringenden Strömungskanal bilden. Die Zerstäubungsöffnung 41 ist beispielsweise ausgehend von der unteren Stirnseite 31 der Lochplatte 23 durch anisotropes Ätzen ausgebildet. Zur Reduzierung der Herstellkosten einer solchen Lochplatte 23 ist es möglish, die längliche Ausnehmung 39 und die Zerstäubungsöffnung 41 in einem gemeinsamen Arbeitsgang durch beidseitiges anisotropes Ätzen auszubilden. Dadurch ergeben sich für die längliche Ausnehmung 39 und für die Zerstäubungsöffnung 41 identische Ätztiefen und damit identische Erstreckungen in Richtung der Ventillängsachse 1.The perforated plate 23 is made of monocrystalline silicon. FIG. 2 shows a top view of the perforated plate 23 in the direction of the arrow X in FIG. 1 and FIG. 3 shows a section along the line III-III in FIG. 2. Starting from the upper end face 35 there is at least one in the perforated plate 23, for example by anisotropic etching elongated recess 39 formed, which extends in the direction of the lower end face 31 in the perforated plate 23 to a flat bottom 43. The elongated recess 39, for example, partially overlaps with an atomizing opening 41, which extends to the lower end face 31 of the perforated plate 23, so that the recess 39 and the atomizing opening 41 together form a flow channel penetrating the perforated plate 23. The atomization opening 41 is formed, for example, starting from the lower end face 31 of the perforated plate 23 by anisotropic etching. To reduce the manufacturing costs of such a perforated plate 23, it is possible to form the elongate recess 39 and the atomization opening 41 in a common operation by anisotropic etching on both sides. This results in identical etching depths for the elongated recess 39 and for the atomization opening 41 and thus identical extensions in the direction of the longitudinal valve axis 1.

Die längliche Ausnehmung 39 weist an der oberen Stirnseite 35 einen rechteckförmigen Öffnungsquerschnitt auf, der sich der unteren Stirnseite 31 der Lochplatte 23 zugewandt bis zu dem Boden 43 der länglichen Ausnehmung 39 verjüngt. Die Wandung der länglichen Ausnehmung 39 wird durch jeweils zwei zu der Ventillängsachse 1 geneigt verlaufende Längsflächen 45 und Querflächen 47 gebildet. Die Längsflächen 45 bilden mit der oberen Stirnseite 35 der Lochplatte 23 je eine Längskante 49 und die Querflächen 47 je eine Querkante 51 aus, wobei die beiden Längskanten 49 parallel zueinander und die beiden Querkanten 51 parallel zueinander verlaufen. Die Längskanten 49 weisen bei dem ersten, in den Figuren 1 bis 3 dargestellten Ausführungsbeispiel eine größere Kantenlänge auf als die Querkanten 51 der länglichen Ausnehmung 39. Parallel zu den Längskanten 49 weist die längliche Ausnehmung 39 eine Längsachse 53 und senkrecht dazu eine parallel zu den Querkanten 51 verlaufende Querachse 55 auf, wobei sowohl die Längsachse 53 als auch die Querachse 55 wie Symmetrieachsen der länglichen Ausnehmung verlaufen und sich die Längsachse 53 und die Querachse 55 beispielsweise in einem Punkt der Ventillängsachse 1 schneiden. Vom Boden 43 der länglichen Ausnehmung 39 ausgehend erstreckt sich die beispielsweise rechteckförmige Zerstäubungsöffnung 41 z.B. konzentrisch zu der länglichen Ausnehmung 39 in Richtung zur unteren Stirnseite 31 der Lochplatte 23. Dabei erweitert sich der Querschnitt der Zerstäubungsöffnung 41 in Strömungsrichtung.The elongated recess 39 has a rectangular opening cross section on the upper end 35, which tapers towards the lower end 31 of the perforated plate 23 and tapers to the bottom 43 of the elongated recess 39. The wall of the elongated recess 39 is formed in each case by two longitudinal surfaces 45 and transverse surfaces 47 which are inclined to the longitudinal axis 1 of the valve. The longitudinal surfaces 45 each form a longitudinal edge 49 and the transverse surfaces 47 each form a transverse edge 51 with the upper end face 35 of the perforated plate 23, the two longitudinal edges 49 running parallel to one another and the two transverse edges 51 running parallel to one another. In the first exemplary embodiment shown in FIGS. 1 to 3, the longitudinal edges 49 have a greater edge length than the transverse edges 51 of the elongated recess 39. Parallel to the longitudinal edges 49, the elongated recess 39 has a longitudinal axis 53 and perpendicular to it a parallel to the transverse edges 51 extending transverse axis 55, both the longitudinal axis 53 and the transverse axis 55 running like axes of symmetry of the elongated recess and the longitudinal axis 53 and the transverse axis 55 intersect, for example, at a point on the valve longitudinal axis 1. Starting from the bottom 43 of the elongated recess 39, the, for example, rectangular atomizing opening 41 extends, for example, concentrically to the elongated recess 39 in the direction of the lower end face 31 of the perforated plate 23. The cross section of the atomizing opening 41 widens in the direction of flow.

Die Zerstäubungsöffnung 41 weist zwei einander gegenüberliegende Längsflächen 58 auf, die mit der unteren Stirnseite 31 der Lochplatte 23 jeweils eine Längskante 57 bilden. Die Längskanten 57 der Zerstäubungsöffnung 41 verlaufen parallel zu der Längsachse 53 der länglichen Ausnehmung 39 und weisen eine wesentlich kürzere Kantenlänge auf als die Längskanten 49 der länglichen Ausnehmung 39, wobei das Verhältnis der Kantenlängen der Längskanten 49 der länglichen Ausnehmung 39 zu den Längskanten 57 der Zerstäubungsöffnung 41 etwa 1,5 : 1 bis 10 : 1 beträgt. Senkrecht zu den Längskanten 57 verläuft jeweils eine mit der unteren Stirnseite 31 gebildete Querkante 60 einer Querfläche 61 der Zerstäubungsöffnung 41. Die Querkanten 60 haben auch aus Fertigungsgründen eine etwas, beispielsweise um 5 bis 30 um größere Kantenlänge als die Querkanten 51 der länglichen Ausnehmung 39. Die Querkanten 60 der Zerstäubungsöffnung 41 können eine bis zu zweimal größere Kantenlänge aufweisen als die Querkanten 51. Hierdurch wird die Erstreckung der Längsflächen 45 der länglichen Ausnehmung 39 in Richtung der Ventillängsachse 1 beim teilweisen Überschneiden der länglichen Ausnehmung 39 und der Zerstäubungsöffnung 41 im Bereich der Längsflächen 58 der Zerstäubungsöffnung 41 verringert und so die Ablenkung des Brennstoffstrahls beim Austritt aus der Zerstäubungsöffnung 41 in Richtung der Querachse 55 verkleinert.The atomization opening 41 has two mutually opposite longitudinal surfaces 58 which each form a longitudinal edge 57 with the lower end face 31 of the perforated plate 23. The longitudinal edges 57 of the atomizing opening 41 run parallel to the longitudinal axis 53 of the elongated recess 39 and have a substantially shorter edge length than the longitudinal edges 49 of the elongated recess 39, the ratio of the edge lengths of the longitudinal edges 49 of the elongated recess 39 to the longitudinal edges 57 of the atomizing opening 41 is approximately 1.5: 1 to 10: 1. A transverse edge 60 of a transverse surface 61 of the atomizing opening 41 formed with the lower end face 31 runs perpendicular to the longitudinal edges 57. The transverse edges 60 also have a slightly longer edge length than the transverse edges 51 of the elongated recess 39 for manufacturing reasons, for example, by 5 to 30. The transverse edges 60 of the atomization opening 41 can have an edge length that is up to twice as long as the transverse edges 51. As a result, the extent of the longitudinal surfaces 45 of the elongated recess 39 in the direction of the longitudinal valve axis 1 is reduced when the elongated recess 39 and the atomizing opening 41 partially overlap in the region of the longitudinal surfaces 58 of the atomizing opening 41, and so on the deflection of the fuel jet on exiting atomization opening 41 in the direction of transverse axis 55 is reduced.

Die Figuren 4 bis 6 zeigen ein zweites erfindungsgemäßes Ausführungsbeispiel, bei dem gleiche und gleichwirkende Teile mit den gleichen Bezugszeichen gekennzeichnet sind wie in den Figuren 1 bis 3. Die Lochplatte 23 weist zwei mit Abstand nebeneinanderliegende längliche Ausnehmungen 39 auf, die sich jeweils teilweise mit einer Zerstäubungsöffnung 41 überschneiden. Die beiden länglichen Ausnehmungen 39 sind dabei so angeordnet, daß ihre beiden Längsachsen 53 parallel zueinander auf einer gemeinsamen Linie verlaufen. Die länglichen Ausnehmungen 39 und die Zerstäubungsöffnungen 41 sind dabei genauso ausgebildet wie bei dem in den Figuren 1 bis 3 dargestellten ersten Ausführungsbeispiel. In den Figuren 4 bis 6 ist der Strömungsverlauf des Brennstoffs durch Pfeile 56 angedeutet, um die Funktionsweise der erfindungsgemäßen Lochplatte zu verdeutlichen. Die Geometrie der länglichen Ausnehmung 39 und der Zerstäubungsöffnung 41 bewirkt, wie in den Figuren 4 bis 6 dargestellt, eine Umlenkung der Strömung 56 des Brennstoffs. Im Bereich der länglichen Ausnehmung 39 wird die Strömung 56 in Richtung des Bodens 43 umgelenkt, so daß zwei Strömungshälften des Brennstoffs, die in Richtung der Längsachse 53 aufeinander zuströmen, über der Zerstäubungsöffnung 41 aufeinander prallen. Durch den Übergang der länglichen Ausnehmung 39 in die einen engen Querschnitt aufweisende Zerstäubungsöffnung 41 und den Aufprall der Strömungshälften aufeinander wird die Brennstoffströmung 56 beim Austritt aus der Zerstäubungsöffnung 41 in Richtung der Querachse 55 flachstrahlförmig aufgeweitet und zerstäubt, wie es die gestrichelte Linie 59 andeutet. Dieser durch die gestrichelte Linie 59 angedeutete, flachstrahlförmig abgegebene Brennstoffstrom hat den Vorteil einer besonders feinen Zerstäubung.FIGS. 4 to 6 show a second exemplary embodiment according to the invention, in which the same and equivalent parts are identified by the same reference numerals as in FIGS. 1 to 3. The perforated plate 23 has two elongated recesses 39 which are spaced apart from one another and which are each partially with a Overlap atomization opening 41. The two elongated recesses 39 are arranged so that their two longitudinal axes 53 run parallel to one another on a common line. The elongated recesses 39 and the atomizing openings 41 are designed in exactly the same way as in the first exemplary embodiment illustrated in FIGS. 1 to 3. In FIGS. 4 to 6, the flow pattern of the fuel is indicated by arrows 56 in order to clarify the functioning of the perforated plate according to the invention. The geometry of the elongated recess 39 and the atomization opening 41, as shown in FIGS. 4 to 6, causes a deflection of the flow 56 of the fuel. In the region of the elongated recess 39, the flow 56 is deflected in the direction of the bottom 43, so that two flow halves of the fuel, which flow towards one another in the direction of the longitudinal axis 53, collide with one another via the atomization opening 41. As a result of the transition of the elongate recess 39 into the atomizing opening 41 having a narrow cross section and the impact of the flow halves on one another, the fuel flow 56 is expanded and atomized in the form of a flat jet in the direction of the transverse axis 55 when it emerges from the atomizing opening 41, as indicated by dashed line 59. This fuel stream, which is indicated by the dashed line 59 and is emitted in a flat jet, has the advantage of particularly fine atomization.

Durch die Veränderung der Geometrie der Ausnehmungen 39 und der Zerstäubungsöffnungen 41, also z.B. durch eine Variation der Ätztiefen und der Querschnittsgrößen der länglichen Ausnehmungen 39 und der Zerstäubungsöffnungen 41 läßt sich die Form des durch die gestrichelte Linie 59 gekennzeichneten Flachstrahls und die Größe des Zerstäubungswinkels beeinflussen.By changing the geometry of the recesses 39 and the atomizing openings 41, e.g. by varying the etching depths and the cross-sectional sizes of the elongated recesses 39 and the atomizing openings 41, the shape of the flat jet identified by the broken line 59 and the size of the atomizing angle can be influenced.

Wird z.B. die Erstreckung 63 des Bodens 43 der länglichen Ausnehmung 39 in Richtung der Längsachse 53 der Lochplatte 23 verändert, so verändert sich auch die Weite 65 des durch die gestrichelte Linie 59 gekennzeichneten Flachstrahls in Richtung der Querachse 55 der Lochplatte 23 und damit die Größe des Zerstäubungswinkels.E.g. If the extent 63 of the bottom 43 of the elongated recess 39 changes in the direction of the longitudinal axis 53 of the perforated plate 23, the width 65 of the flat jet identified by the broken line 59 also changes in the direction of the transverse axis 55 of the perforated plate 23 and thus the size of the atomization angle.

Die in den Figuren 4 bis 6 dargestellte Lochplatte gemäß des zweiten Ausführungsbeispiels eignet sich besonders für die Verwendung in Brennstoffeinspritzventilen für Brennkraftmaschinen mit zwei Einlaßventilen je Zylinder, wobei jeder Flachstrahl entsprechend der gestrichelten Linie 59 jeweils einem Einlaßventil zugeordnet ist.The perforated plate shown in FIGS. 4 to 6 according to the second exemplary embodiment is particularly suitable for use in fuel injection valves for internal combustion engines with two intake valves per cylinder, each flat jet being assigned an intake valve in accordance with the broken line 59.

Es ist aber auch möglich, in der Lochplatte 23 drei oder mehr längliche Ausnehmungen 39 und Zerstäubungsöffnungen 41 vorzusehen.However, it is also possible to provide three or more elongate recesses 39 and atomizing openings 41 in the perforated plate 23.

Die in den Figuren 7 und 8, die einen Schnitt entlang der Linie VIII-VIII in Figur 7 zeigt, dargestellte Lochplatte 23 gemäß des dritten Ausführungsbeispiels weist ebenso wie die Lochplatte gemäß des zweiten Ausführungsbeispiels zwei nebeneinanderliegende rechteckförmige längliche Ausnehmungen 39 auf, die sich jeweils teilweise mit einer rechteckigen Zerstäubungsöffnung 41 überscheiden. Gleiche und gleichwirkende Teile sind durch die gleichen Bezugszeichen gekennzeichnet wie in den Figuren 1 bis 6. Im Gegensatz zu dem ersten und dem zweiten Ausführungsbeispiel sind bei dem dritten Ausführungsbeispiel die längliche Ausnehmung 39 und die Zerstäubungsöffnung 41 nicht konzentrisch zueinander ausgeformt. Die Zerstäubungsöffnung 41 der linken länglichen Ausnehmung 39 ist nach links verschoben und die Zerstäubungsöffnung 41 der rechten länglichen Ausnehmung 39 nach rechts. Hierdurch wird erreicht, daß die beiden aus den asymmetrisch zu den länglichen Ausnehmungen 39 liegenden zwei Zerstäubungsöffnungen 41 abgegebenen Flachstrahlen, wie in der Figur 7 durch die gestrichelten Linien 59 angedeutet, ebenfalls in voneinander abgewandter Richtung asymmetrisch zur jeweiligen Querachse 55 versetzt sind. Wie durch die gestrichelte Linie 59 angedeutet, erfolgt die Ablenkung des Flachstrahles von der Querachse 55 weg zu der Seite der länglichen Ausnehmung 39 hin, zu der hin die Zerstäubungsöffnung 41 entlang der Längsachse 53 verschoben ist. Diese Ausführungsform mit den beiden divergierenden Flachstrahlen hat sich als vorteilhaft erwiesen, da so ein Vermischen der beiden Flachstrahlen des Brennstoffs und damit eine gegenseitige Beeinflussung wirkungsvoll vermieden wird.The perforated plate 23 according to the third exemplary embodiment shown in FIGS. 7 and 8, which shows a section along the line VIII-VIII in FIG. 7, as well as the perforated plate according to the second exemplary embodiment, has two rectangular elongate recesses 39 lying next to one another, each of which is partially with a rectangular atomizing opening 41. The same and equivalent parts are identified by the same reference numerals as in FIGS. 1 to 6. In contrast to the first and the second exemplary embodiment, in the third exemplary embodiment the elongated recess 39 and the atomizing opening 41 are not formed concentrically with one another. The atomization opening 41 of the left elongate recess 39 is shifted to the left and the atomization opening 41 of the right elongate recess 39 to the right. This ensures that the two flat jets emitted from the two atomizing openings 41 which are asymmetrical with respect to the elongated recesses 39, as indicated by the dashed lines 59 in FIG. 7, are also offset asymmetrically to the respective transverse axis 55 in the direction facing away from one another. As indicated by the dashed line 59, the flat jet is deflected away from the transverse axis 55 towards the side of the elongated recess 39, towards which the atomizing opening 41 is displaced along the longitudinal axis 53. This embodiment with the two diverging flat jets has proven to be advantageous since mixing of the two flat jets of fuel and thus mutual influencing is effectively avoided.

Ein viertes erfindungsgemäßes Ausführungsbeispiel eines Lochplättchens ist in den Figuren 9 bis 13 dargestellt. Gleiche und gleichwirkende Teile sind durch die gleichen Bezugszeichen gekennzeichnet wie in den Figuren 1 bis 8. In der Figur 9 ist eine aus monokristallinem Silizium ausgebildete Lochplatte 23 mit beispielsweise zwei geometrisch identischen länglichen Ausnehmungen 39 dargestellt, die zueinander beabstandet sind und der unteren Stirnseite 31 der Lochplatte 23 zugewandt sich jeweils zum Teil mit einer rechteckförmigen Zerstäubungsöffnung 41 überschneiden, wobei auch die beiden Zerstäubungsöffnungen 41 geometrisch identische Abmessungen haben. Die Figur 10 zeigt einen Schnitt entlang der Linie X-X in Figur 9, die Figur 11 einen Schnitt entlang der Linie XI-XI in Figur 9, die Figur 12 einen Schnitt entlang der Linie XII-XII in Figur 9 und die Figur 13 einen Schnitt entlang der Linie XIII-XIII in Figur 9. Die beiden länglichen Ausnehmungen 39 weisen, wie aus der Draufsicht der Lochplatte 23 in Figur 9 zu erkennen, an der oberen Stirnseite 35 einen sechseckigen Öffnungsquerschnitt auf, der sich in Richtung des Bodens 43 der länglichen Ausnehmung 39 der unteren Stirnseite 31 der Lochplatte 23 zugewandt verjüngt.A fourth exemplary embodiment of a perforated plate according to the invention is shown in FIGS. 9 to 13. The same and equivalent parts are identified by the same reference numerals as in FIGS. 1 to 8. FIG. 9 shows a perforated plate 23 made of monocrystalline silicon with, for example, two geometrically identical elongate recesses 39, which are spaced apart and the lower end face 31 of FIG Perforated plate 23 facing each other partially overlap with a rectangular atomizing opening 41, the two atomizing openings 41 also having geometrically identical dimensions. Figure 10 shows a section along the line XX in Figure 9, Figure 11 shows a section along the line XI-XI in Figure 9, Figure 12 shows a section along the line XII-XII in Figure 9 and the figure 13 shows a section along the line XIII-XIII in FIG. 9. As can be seen from the top view of the perforated plate 23 in FIG. 9, the two elongate recesses 39 have a hexagonal opening cross section on the upper end face 35, which crosses in the direction of the bottom 43 tapers towards the elongated recess 39 of the lower end face 31 of the perforated plate 23.

Die Wandung der länglichen Ausnehmung 39 wird durch zwei senkrecht zu der oberen Stirnseite 35 der Lochplatte 23 verlaufende Längsflächen 45 und vier geneigt zu der Ventillängsachse 1 verlaufenden Querflächen 47 gebildet, wobei jeweils zwei Querflächen 47 aneinander grenzen. Die Längsflächen 45 bilden mit der oberen Stirnseite 35 der Lochplatte 23 je eine Längskante 49 und die Querflächen 47 je eine Querkante 51 aus. Die beiden Längskanten 49 und jeweils zwei gegenüberliegende Querkanten 51 verlaufen parallel zueinander. In dem dargestellten vierten Ausführungsbeispiel weisen die Längskanten 49 eine wesentlich größere Kantenlänge auf als die Querkanten 51. Die beiden Querkanten 51 der aneinander grenzenden Querflächen 47 bilden einen rechten Winkel zueinander und weisen die gleiche Länge auf. Mit ihren anderen Enden grenzen diese Querkanten 51 stumpfwinklig an die Längskanten 49 der länglichen Ausnehmung 39. Parallel zu den Längskanten 49 weisen die längliche Ausnehmungen 39 eine Längsachse 53 und senkrecht dazu eine Querachse 55 auf, die wie Symmetrieachsen der länglichen Ausnehmung 39 verlaufen. Die Längsachse 53 und die Querachse 55 schneiden sich in dem Mittelpunkt der länglichen Ausnehmung 39.The wall of the elongated recess 39 is formed by two longitudinal surfaces 45 running perpendicular to the upper end face 35 of the perforated plate 23 and four transverse surfaces 47 inclined to the longitudinal axis 1 of the valve, two transverse surfaces 47 adjoining each other. The longitudinal surfaces 45 each form a longitudinal edge 49 with the upper end face 35 of the perforated plate 23 and the transverse surfaces 47 each form a transverse edge 51. The two longitudinal edges 49 and two opposite transverse edges 51 each run parallel to one another. In the fourth exemplary embodiment shown, the longitudinal edges 49 have a substantially longer edge length than the transverse edges 51. The two transverse edges 51 of the mutually adjoining transverse surfaces 47 form a right angle to one another and have the same length. With their other ends, these transverse edges 51 are at an obtuse angle to the longitudinal edges 49 of the elongated recess 39. Parallel to the longitudinal edges 49, the elongated recesses 39 have a longitudinal axis 53 and perpendicular to them a transverse axis 55 which run like axes of symmetry of the elongated recess 39. The longitudinal axis 53 and the transverse axis 55 intersect at the center of the elongated recess 39.

Vom Boden 43 der länglichen Ausnehmung 39 ausgehend erstreckt sich die viereckförmige, beispielsweise rechteckförmige oder quadratische Zerstäubungsöffnung 41 konzentrisch zu der länglichen Ausnehmung 39 in Richtung der unteren Stirnseite 31 der Lochplatte 23. Dabei erweitert sich der Querschnitt der Zerstäubungsöffnung 41 in Strömungsrichtung. Die längliche Ausnehmung 39 und die Zerstäubungsöffnung 41 sind dabei so zueinander angeordnet, daß die Längsachse 53 der länglichen Ausnehmung 39 parallel zu und beispielsweise deckungsgleich mit einer zwei gegenüberliegende Ecken der Zerstäubungsöffnung 41 miteinander verbindenden Diagonalen 67 der quadratischen Zerstäubungsöffnung 41 verläuft.Starting from the bottom 43 of the elongated recess 39, the square, for example rectangular or square, atomizing opening 41 extends concentrically to the elongated recess 39 in the direction of the lower end face 31 of the perforated plate 23. The cross section of the atomizing opening 41 widens in the direction of flow. The elongated recess 39 and the atomizing opening 41 are arranged so that the longitudinal axis 53 of the elongated recess 39 runs parallel to and, for example, congruently with a diagonal 67 of the square atomizing opening 41 connecting two opposite corners of the atomizing opening 41.

Durch das Zusammenwirken der länglichen Ausnehmung 39 mit der zum Boden 43 nur teilweise offenen quadratischen Zerstäubungsöffnung 41 ergibt sich ein sechseckförmiger Öffnungsquerschnitt der Lochplatte 23.The interaction of the elongated recess 39 with the square atomizing opening 41, which is only partially open to the bottom 43, results in a hexagonal opening cross section of the perforated plate 23.

Die Gestaltung der länglichen Ausnehmung 39 und der Zerstäubungsöffnung 41 bewirkt an den schrägen Querflächen 47 und dem Boden 43 eine Umlenkung der Brennstoffströmung. Im Bereich der länglichen Ausnehmung 39 prallen durch die Umlenkung am Boden 43 zwei in Richtung der Längsachse 53 aufeinander zuströmende Strömungshälften des Brennstoffs aufeinander. Durch den Übergang der länglichen Ausnehmung 39 im Bereich ihres Bodens 43 in die Zerstäubungsöffnung 41 und das Aufeinanderprallen der beiden Strömungshälften wird die Brennstoffströmung flachstrahlförmig aufgeweitet und so eine besonders feine Zerstäubung des Brennstoffs erzielt.The design of the elongated recess 39 and the atomization opening 41 causes a deflection of the fuel flow on the oblique transverse surfaces 47 and the bottom 43. In the region of the elongated recess 39, two deflection halves of the fuel flowing towards one another in the direction of the longitudinal axis 53 collide with one another due to the deflection at the bottom 43. Due to the transition of the elongated recess 39 in the region of its base 43 into the atomization opening 41 and the collision of the two flow halves, the fuel flow is expanded in a flat jet shape and thus a particularly fine atomization of the fuel is achieved.

Wie bei den ersten drei Ausführungsbeispielen läßt sich auch bei dem vierten Ausführungsbeispiel durch eine Veränderung der Geometrie der länglichen Ausnehmungen 39 und der Zerstäubungsöffnungen 41 sowie deren Lage zueinander die Form und die Richtung des Flachstrahls und die Größe des Zerstäubungswinkels des Brennstoffs beeinflussen.As in the first three exemplary embodiments, the shape and direction of the flat jet and the size of the atomizing angle of the fuel can also be influenced in the fourth exemplary embodiment by changing the geometry of the elongated recesses 39 and the atomizing openings 41 and their position relative to one another.

Die erfindungsgemäße Lochplatte 23 bzw. das Brennstoffeinspritzventil mit einer erfindungsgemäßen Lochplatte 23 ermöglicht eine sehr feine Zerstäubung des abgegebenen Brennstoffs. Durch die Ausbildung der länglichen Ausnehmung 39 und der Zerstäubungsöffnung 41 in der Silizium-Lochplatte durch Ätzen wird eine hohe Fertigungsgenauigkeit bei dennoch geringem Fertigungsaufwand erreicht.The perforated plate 23 according to the invention or the fuel injection valve with a perforated plate 23 according to the invention enables the dispensed fuel to be atomized very finely. Through the formation of the elongated recess 39 and the atomization opening 41 in the silicon perforated plate by etching, high manufacturing accuracy is achieved with little manufacturing effort.

Claims (9)

  1. Perforated plate composed of monocrystalline silicon, particularly for fuel injection valves of fuel injection systems for internal combustion engines, with at least one, quadrilateral atomization opening (41), formed by etching and extending as far as a bottom side (31) of the perforated plate (23), widening as it does so, and with at least one recess (39), which is formed on a top side (35) of the perforated plate (23) by etching, in part overlaps just one atomization opening (41), parallel to the top side (35), has an elongate cross-section with two mutually opposite longitudinal faces (45) which extend towards the atomization opening (41) and the longitudinal edges (49) of which, which are formed together with the top side (35) of the perforated plate (23), extend parallel to one another and to a longitudinal axis (53) of the recess (39), each recess (39) having transverse faces (47) which slope from the top side (35) towards the atomization opening (41) and reduce the cross-section of the recess (39) towards the atomization opening (41).
  2. Perforated plate according to Claim 1, characterized in that the longitudinal axis (53) of the elongate recess (39) extends parallel to a diagonal (67) of the quadrilateral atomization opening (41) connecting two opposite corners of the atomization opening (41) to one another.
  3. Perforated plate according to Claim 2, characterized in that the two mutually opposite longitudinal faces (45) of the elongate recess (39) run parallel to one another and perpendicular to the top side (35) of the perforated plate (23).
  4. Perforated plate according to Claim 2 or 3, characterized in that the longitudinal edges (49) of the longitudinal faces (45) have the greatest length of all the edges of the elongate recess (39) which are formed with the top side (35) of the perforated plate (23).
  5. Perforated plate according to one of the preceding claims, characterized in that the elongate recess (39), of which there is at least one, tapers towards the atomization opening (41).
  6. Perforated plate according to one of the preceding claims, characterized in that the perforated plate (23) has two elongate recesses (39) arranged adjacent to one another, each having an atomization opening (41).
  7. Perforated plate according to one of the preceding claims, characterized in that the elongate recess (39) and the atomization opening (41) are formed concentrically with respect to one another.
  8. Perforated plate according to one of Claims 1 to 6, characterized in that the elongate recess (39) and the atomization opening (41) are formed asymmetrically with respect to one another.
  9. Perforated plate according to one of the preceding claims, characterized in that the perforated plate (23) is arranged downstream of a valve-seat surface (13) of a nozzle body (3) of the fuel injection valve and the top side (35) with the elongate recess (39) faces the valve-seat surface (13).
EP91119200A 1991-02-09 1991-11-12 Single crystal silicon nozzle plate Expired - Lifetime EP0498931B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE4104019A DE4104019C1 (en) 1991-02-09 1991-02-09
DE4104019 1991-02-09

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EP0498931A1 EP0498931A1 (en) 1992-08-19
EP0498931B1 true EP0498931B1 (en) 1995-09-20

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US (1) US5244154A (en)
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JP (1) JPH04303172A (en)
KR (1) KR100235126B1 (en)
BR (1) BR9200428A (en)
DE (2) DE4104019C1 (en)
ES (1) ES2077767T3 (en)

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BR9200428A (en) 1992-10-13
KR100235126B1 (en) 1999-12-15
US5244154A (en) 1993-09-14
ES2077767T3 (en) 1995-12-01
JPH04303172A (en) 1992-10-27
DE59106545D1 (en) 1995-10-26
EP0498931A1 (en) 1992-08-19
DE4104019C1 (en) 1992-04-23
KR920016149A (en) 1992-09-24

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