EP0208259A2 - Packaging for materials sensitive to humidity - Google Patents

Packaging for materials sensitive to humidity Download PDF

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Publication number
EP0208259A2
EP0208259A2 EP86109050A EP86109050A EP0208259A2 EP 0208259 A2 EP0208259 A2 EP 0208259A2 EP 86109050 A EP86109050 A EP 86109050A EP 86109050 A EP86109050 A EP 86109050A EP 0208259 A2 EP0208259 A2 EP 0208259A2
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EP
European Patent Office
Prior art keywords
packaging
photoresist
film
film tube
water vapor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP86109050A
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German (de)
French (fr)
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EP0208259B1 (en
EP0208259A3 (en
Inventor
Hans Dr. Dipl.-Chem. Wilski
Hermann Schmidt
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Hoechst AG
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Hoechst AG
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Priority to AT86109050T priority Critical patent/ATE56414T1/en
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D65/00—Wrappers or flexible covers; Packaging materials of special type or form
    • B65D65/38—Packaging materials of special type or form
    • B65D65/40—Applications of laminates for particular packaging purposes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D81/00—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents
    • B65D81/24—Adaptations for preventing deterioration or decay of contents; Applications to the container or packaging material of food preservatives, fungicides, pesticides or animal repellants
    • B65D81/26—Adaptations for preventing deterioration or decay of contents; Applications to the container or packaging material of food preservatives, fungicides, pesticides or animal repellants with provision for draining away, or absorbing, or removing by ventilation, fluids, e.g. exuded by contents; Applications of corrosion inhibitors or desiccators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D81/00—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents
    • B65D81/24—Adaptations for preventing deterioration or decay of contents; Applications to the container or packaging material of food preservatives, fungicides, pesticides or animal repellants
    • B65D81/26—Adaptations for preventing deterioration or decay of contents; Applications to the container or packaging material of food preservatives, fungicides, pesticides or animal repellants with provision for draining away, or absorbing, or removing by ventilation, fluids, e.g. exuded by contents; Applications of corrosion inhibitors or desiccators
    • B65D81/266—Adaptations for preventing deterioration or decay of contents; Applications to the container or packaging material of food preservatives, fungicides, pesticides or animal repellants with provision for draining away, or absorbing, or removing by ventilation, fluids, e.g. exuded by contents; Applications of corrosion inhibitors or desiccators for absorbing gases, e.g. oxygen absorbers or desiccants
    • B65D81/268—Adaptations for preventing deterioration or decay of contents; Applications to the container or packaging material of food preservatives, fungicides, pesticides or animal repellants with provision for draining away, or absorbing, or removing by ventilation, fluids, e.g. exuded by contents; Applications of corrosion inhibitors or desiccators for absorbing gases, e.g. oxygen absorbers or desiccants the absorber being enclosed in a small pack, e.g. bag, included in the package
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/13—Hollow or container type article [e.g., tube, vase, etc.]
    • Y10T428/1334—Nonself-supporting tubular film or bag [e.g., pouch, envelope, packet, etc.]
    • Y10T428/1338—Elemental metal containing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/13—Hollow or container type article [e.g., tube, vase, etc.]
    • Y10T428/1352—Polymer or resin containing [i.e., natural or synthetic]
    • Y10T428/1355—Elemental metal containing [e.g., substrate, foil, film, coating, etc.]
    • Y10T428/1359—Three or more layers [continuous layer]

Definitions

  • the invention relates to a packaging for dry resist material, which is wound on rolls or stacked in sheet form.
  • So-called dry resists are aqueous-alkaline or photoresists from three-layer systems that can be processed with organic solvents, in which the photopolymer layer is embedded between a carrier film and a protective film.
  • a polyester film such as polyethylene terephthalate, is often used as the carrier film, and a polyolefin film, such as e.g. Polyethylene, related.
  • the photoresists are generally wound on rolls, wrapped in light-tight packaging films and placed in cardboard boxes.
  • the material for the packaging films is often polyethylene, which is colored with soot.
  • Square or rectangular discs are attached to the end faces of the winding cores of the rolls, which are intended to protect the rolls from mechanical damage during transport and handling.
  • the known packaging serves primarily to protect the photoresists from the undesired exposure to light, in particular ultraviolet radiation, from weather influences, from mechanical damage during transport and from contamination.
  • the object of the invention is therefore to prevent the flow of stored dry resist material, regardless of the period between the production and processing of the dry resist material, the duration of storage and the storage conditions.
  • the packaging consists of a largely water vapor impermeable material with a water vapor permeability less than 0.01 grams of water vapor per square meter and day, with a moisture gradient of 97% and an ambient temperature of 23 ° C.
  • the packaging according to the invention can of course also be used for dry resist material which is stacked in sheet form.
  • the advantage is achieved that in the case of the absolutely moisture-impermeable packaged photoresist material, edge escapes practically no longer occur, even if the photoresist material is stored for a very long time.
  • “Absolutely impermeable to moisture” is to be understood here to mean a package whose permeability to the water vapor in the air is so small that it can no longer be detected with the most sensitive measuring devices currently available. The limit of detection is currently at about 0.001 g / m2d. This result is very surprising, since the polyethylene films commonly used for packaging are generally considered to be impermeable to water vapor.
  • FIG. 1 shows the water absorption of a three-layer photoresist sample in which the photoresist was exposed to atmospheric moisture without a carrier and cover film.
  • the photoresist sample is first dried over phosphorus pentoxide and then exposed to an atmosphere with 53% relative humidity. At room temperature, the sample is saturated after 1.5 hours.
  • FIG. 2 shows the water absorption of a photoresist sample covered on both sides with foils, which, like the aforementioned photoresist sample, consists of three layers. This sample was first also dried over phosphorus pentoxide and then exposed to an atmosphere with 53% relative humidity. The equilibrium has not yet been reached after 20 hours.
  • FIG. 3 shows the viscosities of two different photoresist materials as a function of the water content of the photoresist materials.
  • the water content of the individual photoresist is roughly proportional to the air humidity.
  • the course of the viscosities shows that photoresists are manufactured largely dry and have a high initial viscosity, when stored in air, which generally always has a certain atmospheric humidity, absorb water and thereby become thin, ie, in other words, their viscosity decreases.
  • the respective ambient temperature has an influence on the viscosity of the photoresist in that it decreases with increasing temperature.
  • Water absorption causes swelling of the photoresists, which can lead to an increase in thickness and volume of up to 4.6% and 13.8%, respectively, when the relative humidity of the air is increased from 0% to 97%, at a room temperature of 23 ° C.
  • the packaging according to the invention which reliably ensures the quality of the photoresist material over long periods of time, can be of various types Wise to be executed.
  • a photoresist roll 2 is enclosed by a packaging 1, which consists of a film tube made of water vapor-impermeable material.
  • the film tube is welded or glued at both ends.
  • the winding core of the photoresist roll 2 is closed with end disks, which are not shown.
  • the upper end edges of the roll roll of the photoresist roll 2 are free of photoresist material leaks.
  • the effect of the sealed packaging can be improved further by sucking the air out of the interior of the film tube or replacing it with dry air or a dry gas immediately before the packaging 1 is sealed or glued.
  • the film tube is not damaged.
  • Small holes or cracks enable the passage of air, which always has a certain atmospheric humidity, through the packaging 1, in particular in the event of changes in temperature, so that its effect is partially canceled.
  • the water vapor introduced by the incoming air can be controlled by a container 6, the content of which is a desiccant 10, in the case of damaged packaging 1.
  • the container 6 can be arranged in the packaging 1 in various ways. Either the container 6 with the photoresist roll 2 is also packed in, inserted into a loop or pocket provided on the inside of the packaging 1, or introduced into the inside of the winding core of the photoresist roll.
  • the desiccant in the container 6 only offers protection in the event of minor damage to the packaging 1, but can in no way replace the packaging 1 as such.
  • commercially available silica gel types are suitable as drying agents.
  • a tinplate canister is provided, into which the photoresist rolls are soldered individually or in groups, so that no air humidity can penetrate into the interior of the packaging.
  • Fig. 5 shows schematically in perspective sectional view a photoresist roll 2, which is colored in a black Polyethylene film tube 11 was stored at 97% relative humidity for eleven days.
  • the photoresist roller 2 stored over saturated potassium sulfate solution to maintain 97% relative air humidity shows the schematically indicated photoresist outlets 5 on the front edges, caused by the entry of moist air through the polyethylene film tube 11 serving as packaging, the water vapor permeability of which is generally considerably greater than 1 g / m2d at 85% relative humidity difference and 23 ° C ambient temperature.
  • a film material used for the packaging 1 is shown in section in FIG. 6. It is a polyester-aluminum composite made from a biaxially stretched polyester film 7 as a carrier film, such as a polyethylene terephthalate film (HOSTAPHAN®) from Kalle Niedermik of Hoechst AG, which is laminated with an aluminum film 8 or vapor-coated with aluminum and is laminated with a polyethylene film 9.
  • the polyethylene film 9 can also be extrusion coated.
  • the polyester film 7 has a thickness of approximately 12 ⁇ m, the aluminum film 8 from 7 to 12 ⁇ m and the polyethylene film 9 from 70 to 100 ⁇ m.
  • the first-mentioned material layer namely the polyester film 7 of the composite, is always on the outside of the packaging 1; the last-mentioned layer is facing the packaged goods.
  • the sealing temperature for the film composite is between 130 to 180 ° C.
  • the water vapor permeability is less than 0.001 g / m2d and thus offers sufficient tightness for the storage of the photo resist rolls, even under very unfavorable conditions.
  • a 100 m photoresist roll with a width of 400 mm of the "Ozatec T 138 ®" photoresist from Kalle Niedermik of Hoechst AG was immediately put into a cylindrical tinplate container, closed with a lid and then soldered on.
  • a second roll of photoresist made of the same photoresist material was wrapped in a black colored film made of polyethylene. The ends of the film were loosely inserted into the hollow winding core of the photoresist roll.
  • the two differently packaged photoresist rolls were stored in a plastic container, lying on a wire shelf, at an ambient temperature of 23 ° C for four weeks.
  • the photoresist roll wrapped in the polyethylene film showed strong leakage of photoresist material at the front edges and sticking of these exits, which experience has shown to greatly impair the processability of the photoresist material.
  • Example 2 The procedure was the same as in Example 1, instead of the tinplate canister, a film tube made of the above-described polylester-aluminum composite from Kalle Niederturi of Hoechst AG was used, and the free tube ends were sealed immediately after the photo-roll was packed. After four weeks of storage, the photoresist roll packed in this way showed no changes on the front edges that were completely flawless. In this respect, this result is comparable to the result of the packaging of the photoresist roll in a soldered tinplate canister according to Example 1 without any restriction.
  • Example 1 the photoresist roll loosely packaged in the polyethylene film showed strong emergence of photoresist at the front edges and corresponding gluing of the photoresist exits.
  • Example 1 The test arrangement was the same as in Example 1.
  • a photoresist roll of the same type as in Example 1 was packed in a film tube made of polyester-aluminum composite and welded to it. The film tube was deliberately damaged by repeated bending, only the aluminum film was broken, but not the carrier film and the laminated polyethylene film, as far as this could be assessed visually.
  • a second roll of photoresist of the same type was sealed in a film tube which was treated in the manner described above.
  • a bag of 100 g granular silica gel was packed with this photo resist roll. Both packaged photoresist rolls were then stored for four weeks, as in Example 1, over water. The inspection of the photoresist rolls after this time showed that there was a slight edge leakage at the front edge of the photoresist roll when packaging without desiccant, while the photoresist roll packed with desiccant was in perfect condition.

Abstract

Eine Verpackung für Fotoresistmaterial (2), beispielsweise einen Trockenresist, besteht aus einem Folienschlauch (1), dessen Enden nach dem Einbringen einer Fotoresistrolle zugeschweißt oder verklebt werden. Als Material für den Folienschlauch wird ein Verbund aus einer Polyester-­Folie als Trägerfolie, auf der eine Aluminiumfolie auf­kaschiert oder Aluminium aufgedampft ist, und einer auf-kaschierten Polyethylen-Folie verwendet. Desweiteren wird als Verpackung ein Weißblechkanister verwendet, der nach dem Einbringen des Fotoresist­materials zugelötet wird. Bei jeder der beiden Ver­packungen ist die Wasserdampfdurchlässigkeit kleiner als 0,01 g Wasserdampf pro Quadratmeter und Tag, bei einem Feuchtegefälle von 97 % und einer Umgebungstem­peratur von 23 °C.

Figure imgaf001
A packaging for photoresist material (2), for example a dry resist, consists of a film tube (1), the ends of which are welded or glued after the introduction of a photoresist roll. The material for the film tube is a composite of a polyester film as the carrier film, on which an aluminum film is laminated or aluminum is evaporated, and a laminated polyethylene film. Furthermore, a tinplate canister is used as packaging, which is soldered after the photoresist material has been introduced. With each of the two packages, the water vapor permeability is less than 0.01 g of water vapor per square meter and day, with a moisture gradient of 97% and an ambient temperature of 23 ° C.
Figure imgaf001

Description

Die Erfindung betrifft eine Verpackung für Trockenre­sistmaterial, das auf Rollen gewickelt oder in Blatt­form gestapelt ist.The invention relates to a packaging for dry resist material, which is wound on rolls or stacked in sheet form.

Sogenannte Trockenresiste sind wäßrig-alkalisch oder mit organischen Lösungsmitteln verarbeitbare Fotore­siste aus Dreilagensystemen, bei denen die Fotopoly­merschicht zwischen einer Trägerfolie und einer Schutzfolie eingebettet ist. Als Trägerfolie wird häufig eine Polyesterfolie, wie beispielsweise Poly­ethylenterephthalat, und als Schutzfolie eine Polyole­finfolie, wie z.B. Polyethylen, verwandt.So-called dry resists are aqueous-alkaline or photoresists from three-layer systems that can be processed with organic solvents, in which the photopolymer layer is embedded between a carrier film and a protective film. A polyester film, such as polyethylene terephthalate, is often used as the carrier film, and a polyolefin film, such as e.g. Polyethylene, related.

Für den Verkauf, den Versand und die Lagerung werden die Fotoresiste im allgemeinen auf Rollen gewickelt, in lichtdichte Verpackungsfolien eingehüllt und in Pappkartons untergebracht. Das Material für die Ver­packungsfolien ist häufig Polyethylen, das mit Ruß eingefärbt ist. Auf die Stirnflächen der Wickelkerne der Rollen werden quadratische oder rechteckige Scheiben aufgesteckt, die die Rollen vor mechanischer Beschädigung beim Transport und bei der Handhabung schützen sollen.For sales, shipping and storage, the photoresists are generally wound on rolls, wrapped in light-tight packaging films and placed in cardboard boxes. The material for the packaging films is often polyethylene, which is colored with soot. Square or rectangular discs are attached to the end faces of the winding cores of the rolls, which are intended to protect the rolls from mechanical damage during transport and handling.

Die bekannte Verpackung dient in erster Linie dazu, die Fotoresiste vor der unerwünschten Einwirkung von Licht, insbesondere von ultravioletter Strahlung, vor Witte­rungseinflüssen, vor mechanischer Beschädigung beim Transport und vor Verschmutzung zu schützen.The known packaging serves primarily to protect the photoresists from the undesired exposure to light, in particular ultraviolet radiation, from weather influences, from mechanical damage during transport and from contamination.

In der Praxis zeigt sich, daß derart verpackte Fotore­siste nach längeren Transportwegen und/oder längeren Lagerzeiten zu Verklebungen an den Stirnkanten, beson­ders ausgeprägt an den Stirnkanten nahe dem Wickelkern der Rolle, neigen. Der Fotoresist tritt in diesen Fäl­len in geringer Menge an den Stirnkanten der Rolle aus und verklebt die einzelnen Lagen der Wicklung miteinan­der. Solche Verklebungen beeinträchtigen die Weiterver­arbeitung des Trockenresists empfindlich, da beim Abwickeln des Fotoresists von der Rolle kleine Resist­teilchen abgerissen werden, welche die Platten, bei­spielsweise Druck- oder Leiterplatten, verschmutzen können, auf die der Fotoresist auflaminiert wird. Der­artige Verklebungen der Stirnkanten von Fotoresistrol­len treten nicht nur als Folge von langen Lagerzeiten auf, vielmehr wurde auch festgestellt, daß die Lager­bedingungen als solche gleichfalls einen erheblichen Einfluß auf die Weiterverarbeitungseigenschaften des Fotoresists haben. So kann es vorkommen, daß eine ein Jahr lang gelagerte Fotoresistrolle noch einwandfrei verarbeitet werden kann, während eine andere Fotoresistrolle aus der gleichen Charge, an anderer Stelle unter anderen Lagerbedingungen gelagert, bereits nach drei Monaten unbrauchbar für die Weiterverar­beitung geworden ist.In practice, it has been found that photoresists packed in this way tend to stick to the front edges after longer transport routes and / or longer storage times, particularly pronounced on the front edges near the winding core of the roll. In these cases, the photoresist emerges in small amounts at the end edges of the roll and glues the individual layers of the winding together. Such bonds adversely affect the further processing of the dry resist, since when the photoresist is unwound, small resist particles are torn off the roll and can contaminate the plates, for example printing or printed circuit boards, onto which the photoresist is laminated. Such gluing of the front edges of photoresist rolls not only occurs as a result of long storage times, it was also found that the storage conditions as such also have a considerable influence on the processing properties of the photoresist. So it can happen that a photo resist roll stored for one year can still be processed perfectly, while another photo resist roll from the same batch, stored elsewhere under different storage conditions, has already become unusable for further processing after three months.

Dieses unterschiedliche Verhalten von Fotoresistmate­rial, das aus der gleichen Charge stammt, zeigt deut­lich auf, daß die Lagerbedingungen und die Transportweise erheblichen Einfluß auf die Weiterverar­beitbarkeit des Fotoresistmaterials haben. Die Verklebungen der Stirnkanten der Fotoresistrollen sind, wie nähere Untersuchungen zeigen, auf das Fließen der Fotopoly­merschicht des Fotoresistmaterials zurückzuführen.This different behavior of photoresist material, which comes from the same batch, clearly shows that the storage conditions and the mode of transport have a significant influence on the further processing of the photoresist material. The gluing of the end edges of the photoresist rolls, as closer investigations show, can be attributed to the flow of the photopolymer layer of the photoresist material.

Aufgabe der Erfindung ist es daher, das Fließen von gelagertem Trockenresistmaterial, unabhängig von der Zeitspanne zwischen der Herstellung und der Verarbei­tung des Trockenresistmaterials, der Dauer der Lagerung und den Lagerbedingungen, zu verhindern.The object of the invention is therefore to prevent the flow of stored dry resist material, regardless of the period between the production and processing of the dry resist material, the duration of storage and the storage conditions.

Diese Aufgabe wird erfindungsgemäß dadurch gelöst, daß die Verpackung aus einem weitgehend wasserdampfundurch­lässigen Material mit einer Wasserdampfdurchlässigkeit kleiner als 0,01 Gramm Wasserdampf pro Quadratmeter und Tag, bei einem Feuchtegefälle von 97 % und einer Umge­bungstemperatur von 23 °C, besteht.This object is achieved in that the packaging consists of a largely water vapor impermeable material with a water vapor permeability less than 0.01 grams of water vapor per square meter and day, with a moisture gradient of 97% and an ambient temperature of 23 ° C.

Die weitere Ausgestaltung der Erfindung ergibt sich aus den Merkmalen der Patentansprüche 2 bis 9.The further embodiment of the invention results from the features of claims 2 to 9.

Die erfindungsgemäße Verpackung kann selbstverständlich auch für Trockenresistmaterial verwendet werden, das in Blattform gestapelt ist.The packaging according to the invention can of course also be used for dry resist material which is stacked in sheet form.

Mit der Erfindung wird der Vorteil erzielt, daß bei dem absolut feuchtigkeitsundurchlässig verpackten Fotore­sistmaterial Randaustritte praktisch nicht mehr vorkom­men, und zwar auch dann nicht, wenn das Fotoresistmaterial sehr lange gelagert wird. Unter "absolut feuch­tigkeitsundurchlässig" ist hierbei eine Verpackung zu verstehen, deren Durchlässigkeit für den Wasserdampf der Luft so klein ist, daß sie mit den derzeit empfind­lichsten Meßgeräten nicht mehr erfaßt werden kann. Die Grenze der Erfassung liegt z.Zt. bei etwa 0,001 g/m²d. Dieses Ergebnis ist sehr überraschend, denn die übli­cherweise zur Verpackung verwendeten Polyethylenfolien gelten allgemein als wasserdampfundurchlässig.With the invention the advantage is achieved that in the case of the absolutely moisture-impermeable packaged photoresist material, edge escapes practically no longer occur, even if the photoresist material is stored for a very long time. “Absolutely impermeable to moisture” is to be understood here to mean a package whose permeability to the water vapor in the air is so small that it can no longer be detected with the most sensitive measuring devices currently available. The limit of detection is currently at about 0.001 g / m²d. This result is very surprising, since the polyethylene films commonly used for packaging are generally considered to be impermeable to water vapor.

Die Erfindung wird im folgenden anhand der Zeichnungen näher erläutert. Es zeigen:

  • Figuren 1 und 2 die Geschwindkeit der Wasseraufnahme eines Fotoresists,
  • Figur 3 die Viskosität zweier verschiedener Fotore­siste in Abhängigkeit von ihrem Wassergehalt,
  • Figur 4 schematisch in perspektivischer Schnittan­sicht die Stirnkanten einer Fotoresistrolle, die in einer Verpackung nach der Erfindung längere Zeit gelagert ist,
  • Figur 5 schematisch in perspektivischer Schnittan­sicht die Stirnkanten einer Fotoresistrolle, die herkömmlich verpackt gelagert ist, und
  • Figur 6 einen Schnitt durch ein für die Verpackung verwendetes Folienschlauchmaterial.
The invention is explained in more detail below with reference to the drawings. Show it:
  • FIGS. 1 and 2 the speed of water absorption by a photoresist,
  • FIG. 3 the viscosity of two different photoresists depending on their water content,
  • FIG. 4 schematically, in a perspective sectional view, the end edges of a photoresist roll which has been stored in a package according to the invention for a long time
  • Figure 5 shows schematically in a perspective sectional view the end edges of a photoresist roll, which is conventionally stored, and
  • 6 shows a section through a film tube material used for the packaging.

Anhand der Figuren 1 bis 4 werden die Ergebnisse der an Fotoresistmaterialien durchgeführten Untersuchungen be­schrieben, deren Auswertung zu der Verpackung nach der Erfindung führten.The results of the tests carried out on photoresist materials, the evaluation of which led to the packaging according to the invention, are described with reference to FIGS. 1 to 4.

Systematische Untersuchungen der Wasseraufnahme und der Viskosität von Negativ-Fotoresisten haben ergeben, daß die Viskosität der nach der Herstellung in trockenem Zustand angelieferten Fotoresiste durch Feuchtigkeits­aufnahme aus der Luft durch Diffusion während der Lage­rung sehr stark absinkt. Der durch die Verringerung der Viskosität dünnflüssig werdende Fotoresist kann dann unter dem Einfluß der Wickelspannung aus den Stirnkan­ten der Fotoresistrollen austreten. Zwei weitere Effek­te verstärken das Austreten von Fotoresist an den Stirnkanten infolge der Feuchtigkeitsaufnahme durch den Fotoresist. Dieser quillt bei der Wasseraufnahme, und der Quelldruck preßt den dünnflüssigen Fotoresist an den Rändern der Fotopolymerschicht heraus. Falls die Wickelkerne aus wasseraufnehmenden Materialien, wie beispielsweise Pappe, bestehen, beginnen sie infolge der Luftfeuchtigkeit zu quellen, wodurch ihr Preßdruck ansteigt und die voranstehend aufgezählten Effekte unterstützt.Systematic studies of the water absorption and the viscosity of negative photoresists have shown that the viscosity of the photoresists that are delivered in the dry state after production is reduced very sharply due to moisture absorption from the air by diffusion during storage. The photoresist, which becomes thin due to the reduction in viscosity, can then emerge from the end edges of the photoresist rollers under the influence of the winding tension. Two other effects increase the emergence of photoresist on the front edges due to the moisture absorption by the photoresist. This swells when the water is absorbed, and the swelling pressure presses out the thin liquid photoresist at the edges of the photopolymer layer. If the winding cores consist of water-absorbing materials, such as cardboard, they begin to swell as a result of the atmospheric moisture, which increases their pressing pressure and supports the effects listed above.

Die Geschwindigkeit der Wasseraufnahme durch einen Fo­toresist aus der Luft hängt naturgemäß von äußeren Um­ständen ab. Figur 1 zeigt die Wasseraufnahme einer dreilagigen Fotoresistprobe, bei welcher der Fotoresist ohne Träger- und Deckfolie der Luftfeuchigkeit ausgesetzt wurde. Die Fotoresistprobe wird zunächst über Phosphor­pentoxid scharf getrocknet und anschließend einer Atmosphäre mit 53 % relativer Luftfeuchtigkeit aus­gesetzt. Bei Raumtemperatur ist die Sättigung der Probe nach 1,5 Stunden erreicht.The rate at which water is absorbed by a photo resist from the air naturally depends on external circumstances from. FIG. 1 shows the water absorption of a three-layer photoresist sample in which the photoresist was exposed to atmospheric moisture without a carrier and cover film. The photoresist sample is first dried over phosphorus pentoxide and then exposed to an atmosphere with 53% relative humidity. At room temperature, the sample is saturated after 1.5 hours.

Figur 2 zeigt die Wasseraufnahme einer beidseitig mit Folien bedeckten Fotoresistprobe, die gleichfalls wie die zuvor erwähnte Fotoresistprobe aus drei Lagen be­steht. Diese Probe wurde zunächst über Phosphorpentoxid gleichfalls scharf getrocknet und dann einer Atmosphäre mit 53 % relativer Luftfeuchigkeit ausgesetzt. Das Gleichgewicht ist nach 20 Stunden noch nicht erreicht.FIG. 2 shows the water absorption of a photoresist sample covered on both sides with foils, which, like the aforementioned photoresist sample, consists of three layers. This sample was first also dried over phosphorus pentoxide and then exposed to an atmosphere with 53% relative humidity. The equilibrium has not yet been reached after 20 hours.

Für den Verlauf der Wasseraufnahme einer an der Luft gelagerten Fotoresistrolle ergibt sich aus diesen Un­tersuchungen, daß von den Stirnkanten her Feuchtigkeit schneller eindringen wird als durch die durch Folien geschützten Lagen des Fotoresistmaterials.For the course of the water absorption of a photoresist roller stored in the air, it follows from these investigations that moisture will penetrate from the front edges faster than through the layers of the photoresist material protected by foils.

In Figur 3 sind die Viskositäten zweier unterschiedli­cher Fotoresistmaterialien als Funktion des Wasserge­haltes der Fotoresistmaterialien dargestellt. Dabei ist der Wassergehalt des einzelnen Fotoresists in grober Näherung der Luftfeuchtigkeit proportional. Der Verlauf der Viskositäten läßt erkennen, daß Fotoresiste, die weitgehend trocken hergestellt werden und eine hohe An­fangsviskosität besitzen, beim Lagern an der Luft, die im allgemeinen immer eine bestimmte Luftfeuchtigkeit besitzt, Wasser aufnehmen und dadurch dünnflüssig wer­den, d.h. mit anderen Worten, ihre Viskosität sich ver­ringert.FIG. 3 shows the viscosities of two different photoresist materials as a function of the water content of the photoresist materials. The water content of the individual photoresist is roughly proportional to the air humidity. The course of the viscosities shows that photoresists are manufactured largely dry and have a high initial viscosity, when stored in air, which generally always has a certain atmospheric humidity, absorb water and thereby become thin, ie, in other words, their viscosity decreases.

Die jeweilige Umgebungstemperatur hat insofern einen Einfluß auf die Viskosität der Fotoresiste, als diese mit steigender Temperatur absinkt.The respective ambient temperature has an influence on the viscosity of the photoresist in that it decreases with increasing temperature.

Die Wasseraufnahme bedingt eine Quellung der Fotore­siste, die zu einer Dicken- und Volumenzunahme bis zu 4,6 % bzw. 13,8 % führen kann, wenn die relative Feuch­tigkeit der Luft von 0 % auf 97 % erhöht wird, bei ei­ner Raumtemperatur von 23 °C.Water absorption causes swelling of the photoresists, which can lead to an increase in thickness and volume of up to 4.6% and 13.8%, respectively, when the relative humidity of the air is increased from 0% to 97%, at a room temperature of 23 ° C.

Aus den voranstehenden Ausführungen ergibt sich, daß die Wasseraufnahme durch das Fotoresistmaterial, be­dingt durch die relative Feuchtigkeit der Umgebungs­luft, den Austritt von Fotoresistmaterial an den Stirnkanten von Rollen begünstigt. Für eine ideale Ver­pakkung folgt daraus, daß sie absolut wasserdicht sein muß, damit die bei der Herstellung von Fotoresist­material eingestellte niedrige Feuchte des Materials bis zum Verbrauch erhalten bleibt und auch ein Tempera­turanstieg beim Lagern das Fotoresistmaterial nicht zu dünnflüssig werden läßt. Die Verpackung nach der Erfin­dung, die die Qualität des Fotoresistmaterials zuver­lässig über lange Zeitspannen sichert, kann in verschiedenen Weisen ausgeführt werden.It follows from the above statements that the water absorption by the photoresist material, due to the relative humidity of the ambient air, favors the emergence of photoresist material at the front edges of rolls. For an ideal packaging, it follows that it must be absolutely watertight so that the low moisture content of the material set in the production of photoresist material is maintained until consumption and also a rise in temperature during storage does not make the photoresist material too thin. The packaging according to the invention, which reliably ensures the quality of the photoresist material over long periods of time, can be of various types Wise to be executed.

Wie in Figur 4 in der schematischen und perspektivi­schen Schnittansicht dargestellt ist, wird eine Foto­resistrolle 2 von einer Verpackung 1 umschlossen, die aus einem Folienschlauch aus wasserdampfundurchlässigem Material besteht. Der Folienschlauch ist an den beiden Enden verschweißt oder verklebt. An den Enden ist der Wickelkern der Fotoresistrolle 2 mit Endscheiben abge­schlossen, die nicht dargestellt sind. Die oberen Stirnkanten des Rollenwickels der Fotoresistrolle 2 sind frei von Fotoresist-Materialaustritten. Bei dem Verpacken ist es unerheblich, ob die Fotoresistrolle 2 direkt in die Verpackung 1 aus dem Folienschlauch ein­geschweißt wird, oder ob die Fotoresistrolle 2 zuerst auf die Endscheiben gesteckt und dann eingepackt wird. Hierbei wird nur vorausgesetzt, daß sich innerhalb der Verpackung 1 keine wasserdampfabgebenden Materialien, wie beispielsweise Wickelkerne aus Pappe, befinden, da diese natürlich die Wirkung der wasserdampfdichten Ver­packung 1 einschränken würden.As shown in FIG. 4 in the schematic and perspective sectional view, a photoresist roll 2 is enclosed by a packaging 1, which consists of a film tube made of water vapor-impermeable material. The film tube is welded or glued at both ends. At the ends, the winding core of the photoresist roll 2 is closed with end disks, which are not shown. The upper end edges of the roll roll of the photoresist roll 2 are free of photoresist material leaks. When packaging, it is irrelevant whether the photoresist roll 2 is welded directly into the packaging 1 from the film tube, or whether the photoresist roll 2 is first placed on the end disks and then packed. It is only assumed that there are no water vapor-emitting materials, such as cardboard winding cores, within the package 1, since these would of course restrict the effect of the water vapor-tight package 1.

Die Wirkung der dichten Verpackung kann noch dadurch­verbessert werden, daß unmittelbar vor dem Verschweißen oder Verkleben der Verpackung 1 die Luft aus dem Inne­ren des Folienschlauchs abgesaugt oder durch trockene Luft oder ein trockenes Gas ersetzt wird.The effect of the sealed packaging can be improved further by sucking the air out of the interior of the film tube or replacing it with dry air or a dry gas immediately before the packaging 1 is sealed or glued.

Beim Verpacken der Fotoresistrolle 2 mit einem Folien­schlauch ist sorgfältig darauf zu achten, daß der Folienschlauch nicht beschädigt wird. Kleine Löcher oder Risse ermöglichen, insbesondere bei Temperaturwechsel­beanspruchung, das Durchtreten von Luft, die stets eine bestimmte Luftfeuchtigkeit besitzt, durch die Ver­packung 1, so daß deren Wirkung teilweise aufgehoben wird. In bestimmtem Umfang kann der durch die eintre­tende Luft eingebrachte Wasserdampf bei beschädigter Verpackung 1 durch einen Behälter 6, dessen Inhalt ein Trockenmittel 10 ist, beherrscht werden. Der Behälter 6 kann auf verschiedene Arten in der Verpackung 1 ange­ordnet sein. Entweder wird der Behälter 6 mit der Foto­resistrolle 2 mit eingepackt, in einer auf der Innenseite der Verpackung 1 vorgesehenen Schlaufe oder Tasche eingeschoben oder in das Innere des Wickelkerns der Fotoresistrolle eingebracht. Das im Behälter 6 be­findliche Trockenmittel bietet nur einen Schutz bei kleinen Beschädigungen der Verpackung 1, kann aber kei­nesfalls die Verpackung 1 als solche ersetzen. Als Trockenmittel eignen sich zum Beispiel handelsübliche Silikagel-Sorten.When packing the photoresist roll 2 with a film tube, care must be taken that the film tube is not damaged. Small holes or cracks enable the passage of air, which always has a certain atmospheric humidity, through the packaging 1, in particular in the event of changes in temperature, so that its effect is partially canceled. To a certain extent, the water vapor introduced by the incoming air can be controlled by a container 6, the content of which is a desiccant 10, in the case of damaged packaging 1. The container 6 can be arranged in the packaging 1 in various ways. Either the container 6 with the photoresist roll 2 is also packed in, inserted into a loop or pocket provided on the inside of the packaging 1, or introduced into the inside of the winding core of the photoresist roll. The desiccant in the container 6 only offers protection in the event of minor damage to the packaging 1, but can in no way replace the packaging 1 as such. For example, commercially available silica gel types are suitable as drying agents.

Als weitere Verpackung nach der Erfindung für eine oder mehrere Fotoresistrollen 2 ist ein Kanister aus Weiß­blech vorgesehen, in den die Fotoresistrollen einzeln oder zu mehreren eingelötet sind, so daß keinerlei Luftfeuchtigkeit in das Innere der Verpackung eindrin­gen kann.As a further packaging according to the invention for one or more photoresist rolls 2, a tinplate canister is provided, into which the photoresist rolls are soldered individually or in groups, so that no air humidity can penetrate into the interior of the packaging.

Fig. 5 zeigt schematisch in perspektivischer Schnittan­sicht eine Fotoresistrolle 2, die in einem schwarz gefärbten Polyethylen-Folienschlauch 11 bei 97 % relativer Luft­feuchtigkeit elf Tage gelagert wurde. Die über ge­sättigter Kaliumsulfatlösung zum Einhalten von 97 % relativer Luftfeuchtigkeit gelagerte Fotoresistrolle 2 zeigt nach dieser Lagerung die schematisch angedeuteten Fotoresist-Austritte 5 an den Stirnkanten, verursacht durch den Eintritt feuchter Luft durch den als Verpac­kung dienenden Polyethylen-Folienschlauch 11, dessen Wasserdampfdurchlässigkeit i.a. erheblich größer als 1 g/m²d bei 85 % relativer Feuchtedifferenz und 23 °C Umgebungstemperatur ist.Fig. 5 shows schematically in perspective sectional view a photoresist roll 2, which is colored in a black Polyethylene film tube 11 was stored at 97% relative humidity for eleven days. After this storage, the photoresist roller 2 stored over saturated potassium sulfate solution to maintain 97% relative air humidity shows the schematically indicated photoresist outlets 5 on the front edges, caused by the entry of moist air through the polyethylene film tube 11 serving as packaging, the water vapor permeability of which is generally considerably greater than 1 g / m²d at 85% relative humidity difference and 23 ° C ambient temperature.

In Fig. 6 ist im Schnitt ein für die Verpackung 1 ver­wendetes Folienmaterial gezeigt. Es handelt sich hier­bei um einen Polyester-Aluminium-Verbund aus einer biaxial gestreckten Polyester-Folie 7 als Trägerfolie, wie einer Polyethylenterephthalat-Folie (HOSTAPHAN ®) der Firma Kalle Niederlassung der Hoechst AG, die mit einer Aluminiumfolie 8 kaschiert oder mit Aluminium bedampft und mit einer Polyethylen-Folie 9 kaschiert ist. Die Polyethylen-Folie 9 kann auch extrusionsbe­schichtet sein. Die Polyester-Folie 7 hat eine Dicke von etwa 12 µm, die Aluminiumfolie 8 von 7 bis 12 µm und die Polyethylen-Folie 9 von 70 bis 100 µm. Die zuerst genannte Materialschicht, nämlich die Polyester-­Folie 7 des Verbunds liegt stets auf der Außenseite der Verpackung 1; die zuletzt genannte Schicht ist dem Verpackungsgut zugekehrt. Die Siegeltemperatur für den Folienverbund liegt zwischen 130 bis 180 °C. Die Wasserdampfdurchlässigkeit ist kleiner als 0,001 g/m²d und bietet somit eine genügende Dichtigkeit für die Lagerung der Fotoresistrollen, auch unter sehr ungünstigen Bedingungen.A film material used for the packaging 1 is shown in section in FIG. 6. It is a polyester-aluminum composite made from a biaxially stretched polyester film 7 as a carrier film, such as a polyethylene terephthalate film (HOSTAPHAN®) from Kalle Niederlassung of Hoechst AG, which is laminated with an aluminum film 8 or vapor-coated with aluminum and is laminated with a polyethylene film 9. The polyethylene film 9 can also be extrusion coated. The polyester film 7 has a thickness of approximately 12 μm, the aluminum film 8 from 7 to 12 μm and the polyethylene film 9 from 70 to 100 μm. The first-mentioned material layer, namely the polyester film 7 of the composite, is always on the outside of the packaging 1; the last-mentioned layer is facing the packaged goods. The sealing temperature for the film composite is between 130 to 180 ° C. The water vapor permeability is less than 0.001 g / m²d and thus offers sufficient tightness for the storage of the photo resist rolls, even under very unfavorable conditions.

Zur Überprüfung der Wirksamkeit der Verpackung bei der Verhinderung von Fotoresist-Austritten sind die in den folgenden Beispielen beschriebenen Vergleichsuntersu­chungen ausgeführt worden.The comparative tests described in the following examples were carried out to check the effectiveness of the packaging in preventing photoresist leaks.

Beispiel 1example 1

Eine 100 m-Fotoresistrolle von 400 mm Breite des Foto­resists "Ozatec T 138 ® " der Firma Kalle Niederlassung der Hoechst AG wurde sofort nach der Herstellung in einen zylindrischen Weißblechbehälter gesteckt, dieser mit einem Deckel abgeschlossen und anschließend zugelö­tet. Eine zweite Fotoresistrolle aus dem gleichen Foto­resistmaterial wurde in eine schwarz eingefärbte Folie aus Poylethylen eingeschlagen. Die Enden der Folie wur­den in den hohlen Wickelkern der Fotoresistrolle lose eingesteckt. Die beiden unterschiedlich verpackten Fo­toresistrollen wurden in einem Kunststoff-Behälter, auf einem Gitterrost liegend, bei einer Umgebungstemperatur von 23 °C vier Wochen lang aufbewahrt. Auf dem Boden des Kunststoff-Behälters stand während dieser Zeit 2 cm hoch Wasser, so daß im Inneren des Kunststoff-Behälters stets eine sehr hohe Luftfeuchtigkeit herrschte. Beide Fotoresistrollen wurden nach vier Wochen Lagerzeit ent­nommen, geöffnet und visuell geprüft. Die im Weißblechbehälter verpackte Fotoresistrolle zeigte nach dieser Lagerung keine Veränderung an den Stirnkanten, die völlig ein­wandfrei und frei von Fotoresist-Austritten waren.A 100 m photoresist roll with a width of 400 mm of the "Ozatec T 138 ®" photoresist from Kalle Niederlassung of Hoechst AG was immediately put into a cylindrical tinplate container, closed with a lid and then soldered on. A second roll of photoresist made of the same photoresist material was wrapped in a black colored film made of polyethylene. The ends of the film were loosely inserted into the hollow winding core of the photoresist roll. The two differently packaged photoresist rolls were stored in a plastic container, lying on a wire shelf, at an ambient temperature of 23 ° C for four weeks. During this time, 2 cm of water stood on the bottom of the plastic container, so that there was always a very high level of air humidity inside the plastic container. Both rolls of photo resist were removed after four weeks of storage, opened and checked visually. The one in the tinplate container After this storage, packed photoresist rolls showed no change on the front edges, which were completely flawless and free of photoresist leaks.

Die in der Polyethylenfolie verpackte Fotoresistrolle zeigte dagegen starken Austritt von Fotoresistmaterial an den Stirnkanten und Verklebungen dieser Austritte, die erfahrungsgemäß die Verarbeitbarkeit des Fotore­sistmaterials sehr stark beeinträchtigen.The photoresist roll wrapped in the polyethylene film, on the other hand, showed strong leakage of photoresist material at the front edges and sticking of these exits, which experience has shown to greatly impair the processability of the photoresist material.

Beispiel 2Example 2

Es wurde in der gleichen Weise wie nach Beispiel 1 ver­fahren, anstelle des Weißblechkanisters wurde ein Fo­lienschlauch aus dem voranstehend beschriebenen Polylester-Aluminium-Verbund der Firma Kalle Nieder­lassung der Hoechst AG verwendet, und die freien Schlauchenden wurden unmittelbar nach dem Verpacken der Fotoresistrolle zugeschweißt. Nach vier Wochen Lager­zeit zeigte die derart verpackte Fotoresistrolle keine Veränderungen an den Stirnkanten, die völlig ein­wandfrei waren. Insofern ist dieses Ergebnis ohne jede Einschränkung vergleichbar mit dem Ergebnis der Ver­packung der Fotoresistrolle in einem zugelöteten Weißblechkanister gemäß dem Beispiel 1.The procedure was the same as in Example 1, instead of the tinplate canister, a film tube made of the above-described polylester-aluminum composite from Kalle Niederlassung of Hoechst AG was used, and the free tube ends were sealed immediately after the photo-roll was packed. After four weeks of storage, the photoresist roll packed in this way showed no changes on the front edges that were completely flawless. In this respect, this result is comparable to the result of the packaging of the photoresist roll in a soldered tinplate canister according to Example 1 without any restriction.

Die in der Polyethylen-Folie lose verpackte Fotore­sistrolle zeigte dagegen, ebenso wie im Beispiel 1, starken Austritt von Fotoresist an den Stirnkanten und entsprechende Verklebungen der Fotoresist-Austritte.In contrast, as in Example 1, the photoresist roll loosely packaged in the polyethylene film showed strong emergence of photoresist at the front edges and corresponding gluing of the photoresist exits.

Beispiel 3Example 3

Die Prüfanordnung war die gleiche wie im Beispiel 1. Eine Fotoresistrolle der gleichen Art wie im Beispiel 1 wurde in einen Folienschlauch aus Polyester-Aluminium-­Verbund verpackt und dieser zugeschweißt. Der Folien­schlauch wurde durch häufig wiederholtes Umknicken gezielt beschädigt, dabei wurde nur die Aluminiumfolie gebrochen, nicht jedoch die Trägerfolie und die aufka­schierte Polyethylen-Folie, soweit dies visuell beur­teilt werden konnte. Eine zweite Fotoresistrolle der gleichen Art wurde in einen Folienschlauch einge­schweißt, der auf die zuvor beschriebene Art und Weise behandelt wurde. Zusammen mit dieser Fotoresistrolle wurde ein Beutel mit 100 g körnigem Silicagel verpackt. Beide verpackten Fotoresistrollen wurden dann, wie im Beispiel 1, vier Wochen über Wasser gelagert. Die Über­prüfung der Fotoresistrollen nach dieser Zeit ließ bei der Verpackung ohne Trockenmittel einen geringen Rand­austritt an einer Stirnkante der Fotoresistrolle erken­nen, während die mit Trockenmittel zusammen verpackte Fotoresistrolle sich in völlig einwandfreiem Zustand befand.The test arrangement was the same as in Example 1. A photoresist roll of the same type as in Example 1 was packed in a film tube made of polyester-aluminum composite and welded to it. The film tube was deliberately damaged by repeated bending, only the aluminum film was broken, but not the carrier film and the laminated polyethylene film, as far as this could be assessed visually. A second roll of photoresist of the same type was sealed in a film tube which was treated in the manner described above. A bag of 100 g granular silica gel was packed with this photo resist roll. Both packaged photoresist rolls were then stored for four weeks, as in Example 1, over water. The inspection of the photoresist rolls after this time showed that there was a slight edge leakage at the front edge of the photoresist roll when packaging without desiccant, while the photoresist roll packed with desiccant was in perfect condition.

Claims (9)

1. Verpackung für Fotoresistmaterial, das auf Rollen gewickelt oder in Blattform gestapelt ist, dadurch ge­kennzeichnet, daß die Verpackung (1) aus einem weitge­hend wasserdampfundurchlässigen Material mit einer Wasserdampfdurchlässigkeit kleiner als 0,01 Gramm Wasserdampf pro Quadratmeter und Tag, bei einem Feuchtegefälle von 97 % und einer Umgebungstemperatur von 23 °C, besteht.1. Packaging for photoresist material, which is wound on rolls or stacked in sheet form, characterized in that the packaging (1) made of a largely water vapor impermeable material with a water vapor permeability of less than 0.01 grams of water vapor per square meter and day, with a moisture gradient of 97 % and an ambient temperature of 23 ° C. 2. Verpackung nach Anspruch 1, dadurch gekennzeich­net, daß die Wasserdampfdurchlässigkeit weniger als 0,001 Gramm Wasserdampf pro Quadratmeter und Tag be­trägt.2. Packaging according to claim 1, characterized in that the water vapor permeability is less than 0.001 grams of water vapor per square meter and day. 3. Verpackung nach Anspruch 1, dadurch gekennzeich­net, daß die Verpackung (1) ein an den beiden Enden verschlossener Folienschlauch ist.3. Packaging according to claim 1, characterized in that the packaging (1) is a film tube closed at both ends. 4. Verpackung nach Anspruch 3, dadurch gekennzeich­net, daß das Material des Folienschlauchs aus einem Verbund aus einer Polyesterfolie (7), bedampft mit Alu­minium bzw. kaschiert mit einer Aluminiumfolie (8) und einer aufkaschierten bzw. extrusionsbeschichteten Poly­ethylenfolie (9) besteht.4. Packaging according to claim 3, characterized in that the material of the film tube consists of a composite of a polyester film (7), vapor-coated with aluminum or laminated with an aluminum foil (8) and a laminated or extrusion-coated polyethylene film (9). 5. Verpackung nach Anspruch 3, dadurch gekennzeich­net, daß vor dem Verschließen des Folienschlauchs das Innere des Folienschlauchs mit trockener Luft oder ei­nem trockenen Gas gefüllt wird.5. Packaging according to claim 3, characterized in that before closing the film tube Inside the film tube is filled with dry air or a dry gas. 6. Verpackung nach Anspruch 3, dadurch gekennzeich­net, daß die Luft im Inneren des Folienschlauchs vor dem Verschließen des Folienschlauchs abgesaugt wird.6. Packaging according to claim 3, characterized in that the air is sucked off inside the film tube before closing the film tube. 7. Verpackung nach Anspruch 3, dadurch gekennzeich­net, daß die Enden des Folienschlauches luftdicht ver­klebt oder verschweißt sind.7. Packaging according to claim 3, characterized in that the ends of the film tube are glued or welded airtight. 8. Verpackung nach Anspruch 1 oder 2, dadurch ge­kennzeichnet, daß die Verpackung die Gestalt eines zy­lindrischen oder quaderförmigen Kanisters aus Weißblech aufweist, der an den Enden zugelötet ist.8. Packaging according to claim 1 or 2, characterized in that the packaging has the shape of a cylindrical or rectangular can made of tinplate, which is soldered at the ends. 9. Verpackung nach Anspruch 3, dadurch gekennzeich­net, daß im Inneren der Verpackung (1) ein in einem Be­hälter (6) verpacktes Trockenmittel (10) vorhanden ist.9. Packaging according to claim 3, characterized in that inside the packaging (1) in a container (6) packed desiccant (10) is present.
EP86109050A 1985-07-12 1986-07-03 Packaging for materials sensitive to humidity Expired - Lifetime EP0208259B1 (en)

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DE19853524846 DE3524846A1 (en) 1985-07-12 1985-07-12 PACKING FOR DRY RESISTANT MATERIAL

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DE3674092D1 (en) 1990-10-18
AU590293B2 (en) 1989-11-02
IL79108A0 (en) 1986-09-30
BR8603257A (en) 1987-02-24
HK14993A (en) 1993-03-05
US4852732A (en) 1989-08-01
AU5973486A (en) 1987-01-15
ES297122U (en) 1988-11-16
EP0208259B1 (en) 1990-09-12
SG77292G (en) 1992-12-24
DE3524846A1 (en) 1987-01-15
ATE56414T1 (en) 1990-09-15
ZA865073B (en) 1987-02-25
EP0208259A3 (en) 1988-08-24
KR870001493A (en) 1987-03-14
ES297122Y (en) 1989-06-16
JPS6216377A (en) 1987-01-24

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