EP0201396A1 - Device for optically joining photosensitive detectors together - Google Patents

Device for optically joining photosensitive detectors together Download PDF

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Publication number
EP0201396A1
EP0201396A1 EP86400872A EP86400872A EP0201396A1 EP 0201396 A1 EP0201396 A1 EP 0201396A1 EP 86400872 A EP86400872 A EP 86400872A EP 86400872 A EP86400872 A EP 86400872A EP 0201396 A1 EP0201396 A1 EP 0201396A1
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EP
European Patent Office
Prior art keywords
bars
detectors
faces
detector
signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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EP86400872A
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German (de)
French (fr)
Inventor
Marc Arques
Jean-Pierre Moy
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Thales SA
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Thomson CSF SA
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    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N1/00—Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
    • H04N1/04—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa
    • H04N1/19—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa using multi-element arrays
    • H04N1/191—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa using multi-element arrays the array comprising a one-dimensional array, or a combination of one-dimensional arrays, or a substantially one-dimensional array, e.g. an array of staggered elements
    • H04N1/192—Simultaneously or substantially simultaneously scanning picture elements on one main scanning line
    • H04N1/193—Simultaneously or substantially simultaneously scanning picture elements on one main scanning line using electrically scanned linear arrays, e.g. linear CCD arrays
    • H04N1/1934—Combination of arrays
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
    • H01L25/03—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
    • H01L25/04—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
    • H01L25/041—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L31/00
    • H01L25/042—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L31/00 the devices being arranged next to each other
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H01L31/0232—Optical elements or arrangements associated with the device
    • H01L31/02325—Optical elements or arrangements associated with the device the optical elements not being integrated nor being directly associated with the device
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N1/00—Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
    • H04N1/04—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa
    • H04N1/19—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa using multi-element arrays
    • H04N1/191—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa using multi-element arrays the array comprising a one-dimensional array, or a combination of one-dimensional arrays, or a substantially one-dimensional array, e.g. an array of staggered elements
    • H04N1/192—Simultaneously or substantially simultaneously scanning picture elements on one main scanning line
    • H04N1/193—Simultaneously or substantially simultaneously scanning picture elements on one main scanning line using electrically scanned linear arrays, e.g. linear CCD arrays
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N1/00—Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
    • H04N1/04—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa
    • H04N1/19—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa using multi-element arrays
    • H04N1/191—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa using multi-element arrays the array comprising a one-dimensional array, or a combination of one-dimensional arrays, or a substantially one-dimensional array, e.g. an array of staggered elements
    • H04N1/192—Simultaneously or substantially simultaneously scanning picture elements on one main scanning line
    • H04N1/193—Simultaneously or substantially simultaneously scanning picture elements on one main scanning line using electrically scanned linear arrays, e.g. linear CCD arrays
    • H04N1/1935—Optical means for mapping the whole or part of a scanned line onto the array
    • H04N1/1937—Optical means for mapping the whole or part of a scanned line onto the array using a reflecting element, e.g. a mirror or a prism
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Definitions

  • the present invention relates to an optical abutment device for photosensitive detectors, arranged in the form of bars.
  • the mechanical abutment consists in sticking bars on a substrate respecting the pitch of the detectors as illustrated in FIG. 1.
  • optical abutment as is known from the prior art, requires the use of an optical system consisting of two identical prisms backed by a semi-reflective face.
  • This system is derived from the well known "Lummer cube” which is used to separate a convergent beam into two beams, without introducing astigmatism.
  • the optical system used is not a cube but a parallelepiped, because it is necessary to be able to align on two of its faces the arrays of detectors.
  • FIG 3 there is shown a side view of this optical system with the two prisms 4 and 5, joined by their semi-reflecting face 6.
  • the detector arrays 1 and 3 are arranged on two faces at right angles each belonging to a different prism. They are carried by a support 7.
  • the optical system doubles the image to be analyzed, thanks to its semi-reflecting face 6.
  • the bars carried by one of the faces of the system receive the image after reflection on the semi-reflecting face 6, and the bars carried by the other face of the system receive the same image transmitted by the semi-reflecting face 6.
  • Figure 2 shows how the bars 1, 2, 3 are arranged ...
  • One side carries the bars of even rank and the other those of odd rank.
  • the bars are arranged symmetrically with respect to the semi-reflecting face 6.
  • an interval corresponding substantially to a bar arranged on the other face is left.
  • an interval corresponding to the bar 3 carried by the other face is left.
  • the bars 1 and 2 receive the image by reflection and the bar 3 receives the image by transmission. The joining of the bars is thus carried out optically.
  • optical abutment known according to the prior art essentially presents the drawback of having a low signal-to-noise ratio because of the semi-reflecting layer.
  • the loss of luminosity caused by this layer is at least equal to a factor 2. In fact this loss is often much greater and equal to a factor 3 to 4.
  • Radiometry that is to say to know with precision the spectral reflectivity characteristics of the imaginary received.
  • the detectors then operate in a fairly wide spectral range and with a variable incident polarization.
  • a metallic semi-reflecting layer based on nickel or chromium for example.
  • the optical balance of these layers is for example as follows: 30% of the signal is transmitted, 30% of the signal is reflected and 40% of the signal is absorbed.
  • the signal-to-noise ratio in the case of the optical abutment, for the same detector technology is only about 0.3 .
  • the optical abutment As in the case of the mechanical abutment, the optical abutment according to the prior art translates into a zero signal-to-noise ratio the presence of a detector not operating on a bar.
  • the optical abutment according to the prior art generally does not cause disturbance at the junction of the bars. There are generally no missing points at the junction of the bars, and the points near the edges of the bars are not damaged.
  • the present invention relates to an optical abutment device for photosensitive detectors which, while retaining the essential advantages of the optical abutment device known from the prior art, has additional advantages with regard in particular to the signal to noise ratio which is much higher since it goes from 0.3 to 0.7 approximately; also with regard to obtaining, in the case of a detector not operating, a signal to noise ratio equal to approximately 0.5.
  • an accidental neutral point on a bar does not result in a blind point on the reconstituted line of detectors, but only by a point of lower signal-to-noise ratio, this provided that the presence of this dead detector has been identified.
  • This correction is particularly advantageous in the case of infrared detectors which use semiconductors where the point defects are more frequent than in silicon, and for which the production efficiency of arrays is very low.
  • optical abutment device has a redundancy of detectors which during spatial application is an asset.
  • FIG. 4 illustrates the optical abutment device according to the invention.
  • the detector arrays are always arranged on two faces at right angles, each belonging to a prism, but the arrangement of the arrays is different as illustrated in FIG. 4.
  • the bars are as close as possible to each other. They are positioned in such a way that the junction of two bars on one of the faces of the prism does not correspond to the junction of two bars on the other face.
  • the bars are arranged symmetrically with respect to the semi-reflecting face 6.
  • Each detector d provides a quantity of charges proportional to the illumination received.
  • Reading means make it possible to read each detector sequentially. These means are generally constituted by a charge transfer device comprising a multiplexer.
  • means ensure the summation of information from two detectors, located on each of the two faces, and having received the same signal.
  • the semi-reflecting layer 6 has a transmission strictly equal to its reflection, then that the signals reflected and transmitted are summed.
  • the noise corresponding to each point of the alignment of detectors which the invention can be fictitiously reconstructed is multiplied by ⁇ 2, since the two detectors corresponding to each point are substantially identical and their noises, not correlated, are simply added quadratic is lying.
  • the signal to noise ratio is degraded by a factor ⁇ 2 while it is degraded by a factor 3 to 4 in the case of optical splicing known from the prior art.
  • the signal to noise ratio is therefore around 0.7, while for the same detector technology it is equal to 1 for the mechanical abutment and 0.3 for the optical abutment according to the art prior.
  • the invention makes it possible to obtain a signal to noise ratio of approximately 0.5.
  • the signal-to-noise ratio is zero, as illustrated in FIG. 5.
  • the detector with which it is associated will however provide a signal.
  • the signal to noise ratio is then substantially equal to 0.5.
  • the detector which does not operate when the signals are summed up must not be taken into account.
  • the detector d 5 will be the only one to supply a signal because it corresponds to the junction of two bars carried by the other face of the optical system.
  • the signal to noise ratio is approximately of the order of 0.5.
  • the signal to noise ratio is therefore substantially equal to 1.
  • each face of the optical system used carries several alignments of detector arrays.
  • the optical abutment device according to the invention is therefore applicable to all kinds of mosaics of one or two-dimensional detectors.

Abstract

Le dispositif selon l'invention utilise un système optique comportant deux prismes (4, 5), accolés par une face semi-réfléchissante (6). Les détecteurs (d) sont disposés sur deux faces à angle droit, appartenant chacune à un prisme. La disposition des barrettes est telle qu'elles sont aussi proches que possible l'une de l'autre et que la jonction de deux barrettes sur l'une des deux faces ne correspond pas à la jonction de deux barrettes sur l'autre face. Des moyens assurent la sommation des informations en provenance de deux détecteurs (d3,d4), situés sur chacune des deux faces, et ayant reçu le même signal.The device according to the invention uses an optical system comprising two prisms (4, 5), joined by a semi-reflecting face (6). The detectors (d) are arranged on two faces at right angles, each belonging to a prism. The arrangement of the bars is such that they are as close as possible to each other and that the junction of two bars on one of the two faces does not correspond to the junction of two bars on the other face. Means ensure the summation of information from two detectors (d3, d4), located on each of the two faces, and having received the same signal.

Description

La présente invention concerne un dispositif d'aboutement optique de détecteurs photosensibles, disposés sous forme de barrettes.The present invention relates to an optical abutment device for photosensitive detectors, arranged in the form of bars.

Dans certains domaines, tels que par exemple la prise de vues de la terre par satellite, on cherche à réaliser des alignements d'un très grand nombre de détecteurs photosensibles, par exemple 10 000 détecteurs. Les détecteurs doivent être positionnés de façon très précise, avec un pas de quelques dizaines de micromètres par exemple. Pour réaliser ces lignes de détecteurs, on dispose de barrettes comportant un nombre limité de détecteurs qui est d'environ 2000 dans le cas de détecteurs en silicium et de quelques centaines seulement dans le cas de détecteurs réalisés sur des semi-conducteurs ternaires ou quaternaires, de formule par exemple Hg Cd Te ou Ga In As P.In certain fields, such as for example taking pictures of the earth by satellite, it is sought to produce alignments of a very large number of photosensitive detectors, for example 10,000 detectors. The detectors must be positioned very precisely, with a pitch of a few tens of micrometers for example. To make these lines of detectors, there are arrays comprising a limited number of detectors which is approximately 2000 in the case of silicon detectors and only a few hundred in the case of detectors produced on ternary or quaternary semiconductors, of formula for example Hg Cd Te or Ga In As P.

On sait réaliser ces lignes de détecteurs en mettant bout à bout un nombre suffisânt de barrettes.We know how to make these lines of detectors by placing end to end a sufficient number of strips.

Il est connu dans l'art antérieur de réaliser cet aboutement de façon optique ou mécanique.It is known in the prior art to produce this abutment optically or mechanically.

L'aboutement mécanique consiste à coller des barrettes sur un substrat en respectant le pas des détecteurs comme cela est illustré sur la figure 1.The mechanical abutment consists in sticking bars on a substrate respecting the pitch of the detectors as illustrated in FIG. 1.

Sur la figure 1, deux barrettes 1 et 2 sont mises bout à bout. Elles portent des détecteurs référencés d.In Figure 1, two bars 1 and 2 are placed end to end. They carry detectors referenced d.

L'aboutement mécanique présente notamment les inconvénients suivants:

  • -sa réalisation est difficile car il nécessite un positionnement précis des barrettes sur leur support, en ce qui concerne notamment leur alignement et le respect du pas entre détecteurs de deux barrettes voisines;
  • -à la jonction de deux barrettes, il est fréquent qu'il manque au moins un détecteur et que les détecteurs voisins des bords soient détériorés;
  • -enfin lorsqu'une barrette porte un détecteur qui ne fonctionne pas, le rapport signal sur bruit est nul pour ce détecteur.
The mechanical abutment has the following disadvantages in particular:
  • -its realization is difficult because it requires precise positioning of the bars on their support, in particular as regards their alignment and compliance with the pitch between detectors of two neighboring bars;
  • at the junction of two strips, it is frequent that at least one detector is missing and that the detectors close to the edges are damaged;
  • -finally when a strip carries a detector which does not work, the signal to noise ratio is zero for this detector.

L'aboutement optique, tel qu'il est connu de l'art antérieur, demande l'utilisation d'un système optique constitué de deux prismes indentiques accotés par une face semi-réftéchissante.The optical abutment, as is known from the prior art, requires the use of an optical system consisting of two identical prisms backed by a semi-reflective face.

Ce système est dérivé du "cube de Lummer" bien connu qui est utilisé pour séparer un faisceau convergent en deux faisceaux, sans introduire d'astigmatisme. Dans le cas de l'aboutement optique, le système optique utilisé n'est pas un cube mais un parallélépipède, car il faut pouvoir aligner sur deux de ses faces les barrettes de détecteurs.This system is derived from the well known "Lummer cube" which is used to separate a convergent beam into two beams, without introducing astigmatism. In the case of the optical abutment, the optical system used is not a cube but a parallelepiped, because it is necessary to be able to align on two of its faces the arrays of detectors.

Sur la figure 3, on a représenté une vue de côte de ce système optique avec les deux prismes 4 et 5, accolés par leur face semi-réfléchissante 6. Les barrettes de détecteurs 1 et 3 sont disposées sur deux faces à angle droit appartenant chacune à un prisme différent. Elles sont portées par un support 7.In Figure 3, there is shown a side view of this optical system with the two prisms 4 and 5, joined by their semi-reflecting face 6. The detector arrays 1 and 3 are arranged on two faces at right angles each belonging to a different prism. They are carried by a support 7.

Sur la figure 2, on a représenté ce système optique vu de face. Sur cette vue, on a représenté les deux faces des prismes portant des barrettes référencées 1, 2, 3.In Figure 2, there is shown this optical system seen from the front. In this view, there are shown the two faces of the prisms carrying bars referenced 1, 2, 3.

Comme cela est illustré sur la figure 3 le système optique dédouble l'image à analyser, grâce à sa face semi-réfléchissante 6.As illustrated in FIG. 3, the optical system doubles the image to be analyzed, thanks to its semi-reflecting face 6.

Les barrettes portées par l'une des faces du système reçoivent l'image après réflexion sur la face semi-réfléchissante 6, et les barrettes portées par l'autre face du système reçoivent la même image transmise par la face semi-réfléchissante 6.The bars carried by one of the faces of the system receive the image after reflection on the semi-reflecting face 6, and the bars carried by the other face of the system receive the same image transmitted by the semi-reflecting face 6.

La figure 2 montre comment sont disposées les barrettes 1, 2, 3...Figure 2 shows how the bars 1, 2, 3 are arranged ...

L'une des faces porte les barrettes de rang pair et l'autre celles de rang impair.Les barreffes sont disposées de façon symétrique par rapport à la face semi-réfléchissante 6.One side carries the bars of even rank and the other those of odd rank.The bars are arranged symmetrically with respect to the semi-reflecting face 6.

Comme cela est illustré sur la figure 2, entre deux barrettes disposées sur une même face, on laisse un intervalle correspondant sensiblement à une barrette disposée sur l'autre face. Ainsi, sur la figure 2, entre les barrettes 1 et 2 on laisse un intervalle correspondant à la barrette 3 portée par l'autre face. Dans l'exemple choisi, les barrettes 1 et 2 reçoivent l'image par réflexion et la barrette 3 reçoit l'image par transmission. L'aboutement des barrettes est ainsi réalisé de façon optique.As illustrated in FIG. 2, between two bars arranged on the same face, an interval corresponding substantially to a bar arranged on the other face is left. Thus, in FIG. 2, between the bars 1 and 2, an interval corresponding to the bar 3 carried by the other face is left. In the example chosen, the bars 1 and 2 receive the image by reflection and the bar 3 receives the image by transmission. The joining of the bars is thus carried out optically.

L'aboutement optique connu selon l'art antérieur présente essentiellement t'inconvénient d'avoir un faible rapport signal sur bruit à cause de la couche semi-réfléchissante.The optical abutment known according to the prior art essentially presents the drawback of having a low signal-to-noise ratio because of the semi-reflecting layer.

La perte de luminosité causée par cette couche est'au moins égale à un facteur 2. En fait cette perte est souvent beaucop plus importante et égale à un facteur 3 à 4.The loss of luminosity caused by this layer is at least equal to a factor 2. In fact this loss is often much greater and equal to a factor 3 to 4.

En effet, on souhaite généralement faire de la radiométrie, c'est-à-dire connaître avec précision les caractéristiques de réflectivité spectrale de l'imagine reçue. Les détecteurs fonctionnent alors dans un domaine spectral assez large et avec une polarisation incidente variable.Indeed, it is generally desired to make radiometry, that is to say to know with precision the spectral reflectivity characteristics of the imaginary received. The detectors then operate in a fairly wide spectral range and with a variable incident polarization.

Pour que les coefficients de réflexion et de transmission soient égaux, même avec une polarisation incidente variable, on est conduit à utiliser une couche semi-réfléchissante métallique, à base de nickel ou de chrome par exemple. Le bilan optique de ces couches est par exemple le suivant: 30% du signal est transmis, 30% du signal est réfléchi et 40% du signal est absorbé.So that the reflection and transmission coefficients are equal, even with a variable incident polarization, it is necessary to use a metallic semi-reflecting layer, based on nickel or chromium for example. The optical balance of these layers is for example as follows: 30% of the signal is transmitted, 30% of the signal is reflected and 40% of the signal is absorbed.

Par rapport à l'aboutement mécanique pour lequel on suppose que le rapport signal sur bruit égale 1, le rapport signal sur bruit dans le cas de l'aboutement optique, pour une même technologie de détecteurs, n'est que de 0,3 environ.Compared to the mechanical abutment for which it is assumed that the signal-to-noise ratio equals 1, the signal-to-noise ratio in the case of the optical abutment, for the same detector technology, is only about 0.3 .

Comme dans le cas de l'aboutement mécanique, l'aboutement optique selon l'art antérieur traduit par un rapport signal sur bruit nul la présence d'un détecteur ne fonctionnant pas sur une barrette.As in the case of the mechanical abutment, the optical abutment according to the prior art translates into a zero signal-to-noise ratio the presence of a detector not operating on a bar.

Par rapport à l'aboutement mécanique, l'aboutement optique selon l'art antérieur ne cause généralement pas de perturbation à la jonction des barrettes. Il n'y a généralement pas de points manquants à la jonction des barrettes, et les points voisins des bords des barrettes ne sont pas détériorés.Compared to the mechanical abutment, the optical abutment according to the prior art generally does not cause disturbance at the junction of the bars. There are generally no missing points at the junction of the bars, and the points near the edges of the bars are not damaged.

La présente invention concerne un dispositif d'aboutement optique de détecteurs photosensible qui, tout en conservant les avantages essentiels du dispositif d'aboutement optique connu de l'art antérieur, présente des avantages supplémentaires en ce qui concerne notamment le rapport signal sur bruit qui est beaucoup plus élevé puisqu'il passe de 0,3 à 0,7 environ; en ce qui concerne aussi l'obtention dans le cas d'un détecteur ne fonctionnant pas d'un rapport signal sur bruit égal à 0,5 environ. Ainsi un point mort accidentel sur une barrette ne se traduit pas par un point aveugle sur la ligne de détecteurs reconstituée, mais seulement par un point de plus faible rapport signal sur bruit, ceci à condition d'avoir repéré la présence de ce détecteur mort. Cette correction est particulièrement intéressante dans le cas de détecteurs infra-rouge qui utilisent des semi-conducteurs où les défauts ponctuels sont plus fréquents que dans le silicium, et pour lesquels le rendement de fabrication de barrettes est très faible.The present invention relates to an optical abutment device for photosensitive detectors which, while retaining the essential advantages of the optical abutment device known from the prior art, has additional advantages with regard in particular to the signal to noise ratio which is much higher since it goes from 0.3 to 0.7 approximately; also with regard to obtaining, in the case of a detector not operating, a signal to noise ratio equal to approximately 0.5. Thus an accidental neutral point on a bar does not result in a blind point on the reconstituted line of detectors, but only by a point of lower signal-to-noise ratio, this provided that the presence of this dead detector has been identified. This correction is particularly advantageous in the case of infrared detectors which use semiconductors where the point defects are more frequent than in silicon, and for which the production efficiency of arrays is very low.

De plus, le dispositif d'aboutement optique selon l'invention présente une redondance de détecteurs qui lors d'application spatiales est un atout.In addition, the optical abutment device according to the invention has a redundancy of detectors which during spatial application is an asset.

La présente invention concerne un dispositif d'aboutement optique de détecteurs photosensibles, disposés sous forme de barrettes, comportant deux prismes accolés par une face semi-réfléchissante, les détecteurs étant disposés sur deux faces à angles droit, appartenant chacune à un prisme, caractérisé en ce que:

  • -il y a au moins un alignement de barrettes sur chacune des faces, ces barrettes étant aussi proches que possible l'une de l'autre et disposées de façon telle que la jonction de deux barrettes sur l'une des faces ne corresponde pas à la jonction de deux barrettes sur l'autre face;
  • -des moyens assurent la sommation des informations en provenance de deux détecteurs, situés sur chacune des deux faces, et ayant reçu le même signal.
The present invention relates to an optical abutment device of photosensitive detectors, arranged in the form of bars, comprising two prisms joined by a semi-reflecting face, the detectors being arranged on two faces at right angles, each belonging to a prism, characterized in what:
  • there is at least one alignment of bars on each of the faces, these bars being as close as possible to each other and arranged in such a way that the junction of two bars on one of the faces does not correspond to the junction of two bars on the other side;
  • means provide the summation of information from two detectors, located on each of the two faces, and having received the same signal.

D'autres objets, caractéristiques et résultats de l'invention ressortiront de la description suivante, donnée à titre d'exemple non limitatif et illustrée par les figures annexées qui représentent:

  • -la figure 1 un schéma illustrant un dispositif d'aboutement mécanique selon l'art antérieur;
  • -les figures 2 et 3, des schémas illustrant un dispositif d'aboutement optique selon l'art antérieur;
  • -la figure 4, un schéma illustrant un dispositif * d'aboutement optique selon l'invention;
  • -la figure 5, un tableau comparatif des différents dispositifs d'aboutement dont il est question dans ce brevet en ce qui concerne le rapport signal sur bruit.
Other objects, characteristics and results of the invention will emerge from the following description, given by way of nonlimiting example and illustrated by the appended figures which represent:
  • FIG. 1 a diagram illustrating a mechanical abutment device according to the prior art;
  • FIGS. 2 and 3, diagrams illustrating an optical abutment device according to the prior art;
  • FIG. 4, a diagram illustrating an optical abutment device * according to the invention;
  • FIG. 5, a comparative table of the various abutment devices which is mentioned in this patent as regards the signal to noise ratio.

Sur les différents figures, les mêmes repères désignent les mêmes éléments, mais, pour des raisons de clarté, les cotes et proportions des divers éléments ne sont pas respectées.In the different figures, the same references designate the same elements, but, for reasons of clarity, the dimensions and proportions of the various elements are not observed.

La figure 4 illustre le dispositif d'aboutement optique selon l'invention.FIG. 4 illustrates the optical abutment device according to the invention.

Comme dans le dispositif d'aboutement optique connu, on utilise toujours deux prismes accolés par une face semi-réfléchissante. Les barrettes de détecteurs sont toujours disposées sur deux faces à angle droit, appartenant chacune à un prisme, mais la disposition des barrettes est différente comme cela est illustré sur la figure 4.As in the known optical abutment device, two prisms are always used joined by a semi-reflecting face. The detector arrays are always arranged on two faces at right angles, each belonging to a prism, but the arrangement of the arrays is different as illustrated in FIG. 4.

Selon l'invention, les barrettes sont aussi proches que possible les unes des autres. Elles sont positionnées de façon telle que la jonction de deux barrettes sur l'une des faces du prisme ne corresponde pas à la jonction de deux barrettes sur l'autre face.According to the invention, the bars are as close as possible to each other. They are positioned in such a way that the junction of two bars on one of the faces of the prism does not correspond to the junction of two bars on the other face.

Sur la figure 4, à titre d'exemple il y a entre deux barrettes consécutives portées par une même face un espacement correspondant à un seul détecteur représenté en pointillés.In Figure 4, by way of example there is between two consecutive bars carried by the same face a spacing corresponding to a single detector shown in dotted lines.

Comme dans l'art antérieur, les barrettes sont disposées de façon symétrique par rapport à la face semi-réfléchissante 6.As in the prior art, the bars are arranged symmetrically with respect to the semi-reflecting face 6.

Chaque détecteur d fournit une quantité de charges proportionnelle à l'éclairement reçu. Des moyens de lecture permettent de lire séquentiellement chaque détecteur. Ces moyens sont généralement constitués par un dispositif à transfert de charge comportant un multiplexeur.Each detector d provides a quantity of charges proportional to the illumination received. Reading means make it possible to read each detector sequentially. These means are generally constituted by a charge transfer device comprising a multiplexer.

Selon l'invention, des moyens assurent la sommation des informations en provenance de deux détecteurs, situés sur chacune des deux faces, et ayant reçu le même signal.According to the invention, means ensure the summation of information from two detectors, located on each of the two faces, and having received the same signal.

Les signaux issus de deux détecteurs qui sur la figure 4 sont superposés, par exemple les détecteurs d, et d2, sont ajoutés soit de façon analogique à la sortie des multiplexeurs, soit par le calcul après mise en mémoire.The signals from two detectors which in FIG. 4 are superimposed, for example the detectors d, and d 2 , are added either analogically to the output of the multiplexers, or by calculation after storage.

Selon l'invention, il n'est pas nécessaire comme dans l'art antérieur que la couche semi-réfléchissante 6 ait une transmission rigoureusement égale à sa réflexion puis qu'on somme les signaux réfléchis et transmis. On peut donc utiliser une couche muftidiélecirique sans absorption et retrouver après addition des signaux réfléchis et transmis une réponse équivalente à celle d'un détecteur unique.According to the invention, it is not necessary as in the prior art that the semi-reflecting layer 6 has a transmission strictly equal to its reflection, then that the signals reflected and transmitted are summed. We can therefore use a muftidiélecirique layer without absorption and find after adding the reflected and transmitted signals a response equivalent to that of a single detector.

Le bruit correspondant à chaque point de l'alignement de détecteurs que permet de reconstituer fictivement l'invention est multiplié par √2, puisque les deux détecteurs correspondant à chaque point sont sensiblement identiques et que leurs bruits, non corrélés, sont simplement ajoutés quadratique- ment.The noise corresponding to each point of the alignment of detectors which the invention can be fictitiously reconstructed is multiplied by √2, since the two detectors corresponding to each point are substantially identical and their noises, not correlated, are simply added quadratic is lying.

Selon l'invention, le rapport signal sur bruit est dégradé d'un facteur √2 alors qu'il est dégradé d'un facteur 3 à 4 dans le cas du raboutage optique connu de l'art antérieur.According to the invention, the signal to noise ratio is degraded by a factor √2 while it is degraded by a factor 3 to 4 in the case of optical splicing known from the prior art.

Sur la figure 5, on a représenté l'évolution du rapport signal sur bruit dans le cas de l'aboutement mécanique -trait plein -de l'aboutement optique selon l'art antérieur -trait interrompu et dans le cas de l'aboutement optique selon l'invention -pointillés.In FIG. 5, the evolution of the signal-to-noise ratio has been shown in the case of the mechanical abutment - solid line - of the optical abutment according to the prior art - broken line and in the case of the optical abutment according to the invention - dotted lines.

Selon l'invention, le rapport signal sur bruit se situe donc vers 0,7, alors que pour une même technologie de détecteurs il est égal à 1 pour l'aboutement mécanique et à 0,3 pour l'aboutement optique selon l'art antérieur.According to the invention, the signal to noise ratio is therefore around 0.7, while for the same detector technology it is equal to 1 for the mechanical abutment and 0.3 for the optical abutment according to the art prior.

Dans le cas d'un détecteur ne fonctionnant pas, que cela provienne d'un défaut de fabrication ou d'un défaut intervenu ultérieurement, t'invention permet d'obtenir un rapport signal sur bruit de 0,5 environ.In the case of a detector that does not work, whether it comes from a manufacturing defect or from a defect that occurred later, the invention makes it possible to obtain a signal to noise ratio of approximately 0.5.

Pour les dispositifs d'aboutement connus, dans le cas d'un détecteur ne fonctionnant pas, le rapport signal signal sur bruit est nul, comme cela est illustré par la figure 5.For the known abutment devices, in the case of a detector not operating, the signal-to-noise ratio is zero, as illustrated in FIG. 5.

Selon l'invention, si un détecteur ne fonctionne pas, le détecteur avec lequel il est associé fournira cependant un signal. Le rapport signal sur bruit est alors sensiblement égal à 0,5. Il faut bien entendu ne pas prendre en compte le détecteur ne fonctionnant pas tors de la sommation des signaux.According to the invention, if a detector does not work, the detector with which it is associated will however provide a signal. The signal to noise ratio is then substantially equal to 0.5. Of course, the detector which does not operate when the signals are summed up must not be taken into account.

Cette opération de repérage des détecteurs ne fonctionnant pas ne complique pas sensiblement le fonctionnement du dispositif car il faut savoir que le signal fourni par chaque détecteur est affecté d'un coefficient de correction lié au détecteur, aux défauts du système optique..., et qui impose d'examiner successivement chaque détecteur pour déterminer ce facteur de correction. Au cours de cette opération, on peur déterminer quels détecteurs ne fonctionnent pas.This detection operation of detectors that do not work does not significantly complicate the operation of the device because it should be known that the signal supplied by each detector is affected by a correction coefficient linked to the detector, to faults in the optical system, and which requires successively examining each detector to determine this correction factor. During this operation, we can determine which detectors are not working.

A la jonction entre deux barrettes, par exemple les barrettes n et n + 1, on a représenté sur la figure 5 que, dans le cas de l'aboutement mécanique, il y avait des points manquants, pour lesquels le rapport signal sur bruit est nul et que les points voisins pouvaient être détériorés et présenter un rapport signal sur bruit dégradé.At the junction between two bars, for example bars n and n + 1, it has been shown in FIG. 5 that, in the case of the mechanical abutment, there were missing points, for which the signal to noise ratio is zero and that the neighboring points could be deteriorated and present a degraded signal to noise ratio.

Dans le cas de l'aboutement optique selon l'art antérieur, il n'y a généralement pas d'altération du rapport signal sur bruit à la jonction de deux barrettes.In the case of the optical abutment according to the prior art, there is generally no alteration of the signal to noise ratio at the junction of two bars.

Dans le cas de l'invention, à la jonction entre deux barrettes successives, il y a au moins un point qui ne correspond qu'à un seul détecteur.In the case of the invention, at the junction between two successive bars, there is at least one point which corresponds to only one detector.

Ainsi sur la figure 4, le détecteur d5 sera seul à fournir un signal car il correspond à la jonction de deux barrettes portées par l'autre face du système optique.Thus in FIG. 4, the detector d 5 will be the only one to supply a signal because it corresponds to the junction of two bars carried by the other face of the optical system.

A la jonction entre deux barrettes puisqu'un seul détecteur est utilisé qui ne reçoit que la moitié du signal, le rapport signal sur bruit est sensiblement de l'ordre de 0,5.At the junction between two bars since a single detector is used which receives only half of the signal, the signal to noise ratio is approximately of the order of 0.5.

Dans le cas de détecteurs infra-rouge du type BLIP-background limited infra-red photo-detector -il n'y a pratiquement pas augmentation du bruit du fait qu'il faut sommer les signaux provenant de deux détecteurs car le bruit provient du rayonnement reçu et non des détecteurs eux-mêmes.In the case of infrared detectors of the BLIP-background limited infra-red photo-detector type - there is practically no increase in noise due to the fact that the signals from two detectors have to be summed because the noise comes from radiation received and not from the detectors themselves.

Le rapport signal sur bruit est donc sensiblement égal à 1.The signal to noise ratio is therefore substantially equal to 1.

Il est bien entendu que l'invention est utilisable si l'on veut reconstituer plusieurs lignes de détecteurs, et non pas une seule ligne.Dans ce cas chaque face du système optique utilisé porte plusieurs alignements de barrettes de détecteurs. Le dispositif d'aboutement optique selon l'invention est donc applicable à toutes sortes de mosaïques de détecteurs mono ou bi-dimensionnelles.It is understood that the invention can be used if one wants to reconstruct several lines of detectors, and not just one line. In this case, each face of the optical system used carries several alignments of detector arrays. The optical abutment device according to the invention is therefore applicable to all kinds of mosaics of one or two-dimensional detectors.

Claims (6)

1. Dispositif d'aboutement optique de détecteurs photosensibles (d), disposés sous forme de barrettes, comportant deux prismes (4, 5) accolés par une face semi-réfléchissante (6), les détecteurs étant disposés sur deux faces à angles droit, appartenant chacune à un prisme, caractérisé en ce que:1. Device for the optical abutment of photosensitive detectors (d), arranged in the form of bars, comprising two prisms (4, 5) joined by a semi-reflecting face (6), the detectors being arranged on two faces at right angles, each belonging to a prism, characterized in that: -il y a au moins un alignement de barrettes sur chacune des faces, ces barrettes étant aussi proches que possible l'une de l'autre et disposées de façon telle que la jonction de deux barrettes sur l'une des faces ne correspond pas à la jonction de deux barrettes sur l'autre face; -des moyens assurent la sommation des informations en provenance de deux détecteurs (d3,d.), situés sur chacune des deux faces, et ayant reçu le même signal. -there is at least one alignment of bars on each of the faces, these bars being as close as possible to each other and arranged in such a way that the junction of two bars on one of the faces does not correspond to the junction of two bars on the other side; -means ensure the summation of information from two detectors (d3, d.), located on each of the two faces, and having received the same signal. 2. Dispositif selon la revendication 1, caractérisé en ce que chacune des deux dites faces porte plusieurs alignements de barrettes de détecteurs.2. Device according to claim 1, characterized in that each of the two said faces carries several alignments of detector arrays. 3. Dispositif selon l'une des revendications 1 ou 2, caractérisé en ce que des moyens, constitués par un dispositif à transfert de charge comportant un multiplexeur, assurent la lecture séquentielle de chaque détecteur.3. Device according to one of claims 1 or 2, characterized in that means, constituted by a charge transfer device comprising a multiplexer, ensure the sequential reading of each detector. 4. Dispositif selon la revendication 3, caractérisé en ce que les moyens assurant la sommation des informations en provenance de deux détecteurs réalisent cette sommation de façon analogique à la sortie des multiplexeurs des moyens de lecture.4. Device according to claim 3, characterized in that the means ensuring the summation of the information coming from two detectors perform this summing in analog manner at the output of the multiplexers of the reading means. 5. Dispositif selon l'une des revendications 1 à 4, caractérisé en ce que les moyens assurant la sommation des informations en provenance de deux détecteurs réalisent cette sommation par le calcul après mise en mémoire.5. Device according to one of claims 1 to 4, characterized in that the means ensuring the summation of information from two detectors perform this summation by calculation after storage.
EP86400872A 1985-04-30 1986-04-22 Device for optically joining photosensitive detectors together Ceased EP0201396A1 (en)

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FR8506570A FR2581251B1 (en) 1985-04-30 1985-04-30 DEVICE FOR THE OPTICAL FELT OF PHOTOSENSITIVE DETECTORS
FR8506570 1985-04-30

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JPS61258573A (en) 1986-11-15
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US4743751A (en) 1988-05-10

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