EP0178596A3 - Silicon nozzle structures and method of manufacture - Google Patents
Silicon nozzle structures and method of manufacture Download PDFInfo
- Publication number
- EP0178596A3 EP0178596A3 EP85112882A EP85112882A EP0178596A3 EP 0178596 A3 EP0178596 A3 EP 0178596A3 EP 85112882 A EP85112882 A EP 85112882A EP 85112882 A EP85112882 A EP 85112882A EP 0178596 A3 EP0178596 A3 EP 0178596A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- manufacture
- nozzle structures
- silicon nozzle
- silicon
- structures
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title 1
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
- 229910052710 silicon Inorganic materials 0.000 title 1
- 239000010703 silicon Substances 0.000 title 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1629—Manufacturing processes etching wet etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/162—Manufacturing of the nozzle plates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1632—Manufacturing processes machining
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
- Weting (AREA)
- Nozzles (AREA)
- Special Spraying Apparatus (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US66100584A | 1984-10-15 | 1984-10-15 | |
US661005 | 1984-10-15 |
Publications (4)
Publication Number | Publication Date |
---|---|
EP0178596A2 EP0178596A2 (en) | 1986-04-23 |
EP0178596A3 true EP0178596A3 (en) | 1987-09-16 |
EP0178596B1 EP0178596B1 (en) | 1991-01-16 |
EP0178596B2 EP0178596B2 (en) | 1994-06-01 |
Family
ID=24651804
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP85112882A Expired - Lifetime EP0178596B2 (en) | 1984-10-15 | 1985-10-11 | Silicon nozzle structures and method of manufacture |
Country Status (7)
Country | Link |
---|---|
EP (1) | EP0178596B2 (en) |
JP (1) | JPS6198558A (en) |
KR (1) | KR930009109B1 (en) |
AU (1) | AU582581B2 (en) |
CA (1) | CA1237020A (en) |
DE (1) | DE3581355D1 (en) |
ES (2) | ES8707144A1 (en) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4791436A (en) * | 1987-11-17 | 1988-12-13 | Hewlett-Packard Company | Nozzle plate geometry for ink jet pens and method of manufacture |
DE4222140C2 (en) * | 1992-07-06 | 1994-06-16 | Heinzl Joachim | Miniature aerostatic bearing |
US6120131A (en) * | 1995-08-28 | 2000-09-19 | Lexmark International, Inc. | Method of forming an inkjet printhead nozzle structure |
US6183064B1 (en) | 1995-08-28 | 2001-02-06 | Lexmark International, Inc. | Method for singulating and attaching nozzle plates to printheads |
WO1998051506A1 (en) * | 1997-05-14 | 1998-11-19 | Seiko Epson Corporation | Method of forming nozzle for injectors and method of manufacturing ink jet head |
JP2000198199A (en) | 1997-12-05 | 2000-07-18 | Canon Inc | Liquid jet head, head cartridge, liquid jet apparatus, and manufacture of liquid jet head |
US6491380B2 (en) * | 1997-12-05 | 2002-12-10 | Canon Kabushiki Kaisha | Liquid discharging head with common ink chamber positioned over a movable member |
EP0921004A3 (en) * | 1997-12-05 | 2000-04-26 | Canon Kabushiki Kaisha | Liquid discharge head, recording apparatus, and method for manufacturing liquid discharge heads |
US6463656B1 (en) | 2000-06-29 | 2002-10-15 | Eastman Kodak Company | Laminate and gasket manfold for ink jet delivery systems and similar devices |
KR100944884B1 (en) * | 2007-11-01 | 2010-03-03 | 주식회사 알파켐 | Nozzle for non-impact printing and printing method using the same |
JP5407162B2 (en) * | 2008-04-01 | 2014-02-05 | コニカミノルタ株式会社 | INKJET HEAD, COATING APPARATUS HAVING INKJET HEAD, AND METHOD FOR DRIVING INKJET HEAD |
KR101291689B1 (en) * | 2010-08-17 | 2013-08-01 | 엔젯 주식회사 | Nozzle for droplet jetting apparatus using electrostatic force |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3921916A (en) * | 1974-12-31 | 1975-11-25 | Ibm | Nozzles formed in monocrystalline silicon |
US4157935A (en) * | 1977-12-23 | 1979-06-12 | International Business Machines Corporation | Method for producing nozzle arrays for ink jet printers |
DE2554085B2 (en) * | 1974-12-31 | 1980-07-24 | International Business Machines Corp., Armonk, N.Y. (V.St.A.) | Method of manufacturing a spray head for an ink jet printer |
US4455192A (en) * | 1981-05-07 | 1984-06-19 | Fuji Xerox Company, Ltd. | Formation of a multi-nozzle ink jet |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USB789264I5 (en) * | 1969-01-06 | |||
JPS5040616B1 (en) * | 1970-03-18 | 1975-12-25 | ||
US3949410A (en) * | 1975-01-23 | 1976-04-06 | International Business Machines Corporation | Jet nozzle structure for electrohydrodynamic droplet formation and ink jet printing system therewith |
JPS5753366A (en) * | 1980-09-17 | 1982-03-30 | Ricoh Co Ltd | Nozzle plate for liquid jet apparatus |
JPS57116656A (en) * | 1981-01-14 | 1982-07-20 | Sharp Corp | Manufacture of orifice for ink jet printer |
-
1985
- 1985-03-27 CA CA000477672A patent/CA1237020A/en not_active Expired
- 1985-10-02 AU AU48190/85A patent/AU582581B2/en not_active Expired
- 1985-10-11 DE DE8585112882T patent/DE3581355D1/en not_active Expired - Lifetime
- 1985-10-11 EP EP85112882A patent/EP0178596B2/en not_active Expired - Lifetime
- 1985-10-14 ES ES547845A patent/ES8707144A1/en not_active Expired
- 1985-10-14 KR KR1019850007532A patent/KR930009109B1/en not_active IP Right Cessation
- 1985-10-15 JP JP60227956A patent/JPS6198558A/en active Pending
-
1987
- 1987-04-13 ES ES1987296483U patent/ES296483Y/en not_active Expired
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3921916A (en) * | 1974-12-31 | 1975-11-25 | Ibm | Nozzles formed in monocrystalline silicon |
DE2554085B2 (en) * | 1974-12-31 | 1980-07-24 | International Business Machines Corp., Armonk, N.Y. (V.St.A.) | Method of manufacturing a spray head for an ink jet printer |
US4157935A (en) * | 1977-12-23 | 1979-06-12 | International Business Machines Corporation | Method for producing nozzle arrays for ink jet printers |
US4455192A (en) * | 1981-05-07 | 1984-06-19 | Fuji Xerox Company, Ltd. | Formation of a multi-nozzle ink jet |
Also Published As
Publication number | Publication date |
---|---|
AU4819085A (en) | 1986-04-24 |
ES296483Y (en) | 1988-04-16 |
ES296483U (en) | 1987-10-16 |
EP0178596B1 (en) | 1991-01-16 |
KR930009109B1 (en) | 1993-09-23 |
EP0178596B2 (en) | 1994-06-01 |
AU582581B2 (en) | 1989-04-06 |
CA1237020A (en) | 1988-05-24 |
ES547845A0 (en) | 1987-08-16 |
JPS6198558A (en) | 1986-05-16 |
ES8707144A1 (en) | 1987-08-16 |
KR860003109A (en) | 1986-05-19 |
EP0178596A2 (en) | 1986-04-23 |
DE3581355D1 (en) | 1991-02-21 |
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