EP0002433A3 - Process for making silicon photoelements - Google Patents

Process for making silicon photoelements Download PDF

Info

Publication number
EP0002433A3
EP0002433A3 EP78100845A EP78100845A EP0002433A3 EP 0002433 A3 EP0002433 A3 EP 0002433A3 EP 78100845 A EP78100845 A EP 78100845A EP 78100845 A EP78100845 A EP 78100845A EP 0002433 A3 EP0002433 A3 EP 0002433A3
Authority
EP
European Patent Office
Prior art keywords
photoelements
making silicon
silicon
making
silicon photoelements
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP78100845A
Other versions
EP0002433B1 (en
EP0002433A2 (en
Inventor
Oussama Dipl.-Ing. Alameddine
Marian Dipl.-Ing. Briska
Klaus Peter Thiel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of EP0002433A2 publication Critical patent/EP0002433A2/en
Publication of EP0002433A3 publication Critical patent/EP0002433A3/en
Application granted granted Critical
Publication of EP0002433B1 publication Critical patent/EP0002433B1/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H01L31/0224—Electrodes
    • H01L31/022408—Electrodes for devices characterised by at least one potential jump barrier or surface barrier
    • H01L31/022425—Electrodes for devices characterised by at least one potential jump barrier or surface barrier for solar cells
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H01L31/0236—Special surface textures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H01L31/0236—Special surface textures
    • H01L31/02363—Special surface textures of the semiconductor body itself, e.g. textured active layers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/033—Diffusion of aluminum
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00—Semiconductor device manufacturing: process
    • Y10S438/964—Roughened surface
EP78100845A 1977-12-08 1978-09-07 Process for making silicon photoelements Expired EP0002433B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE2754652 1977-12-08
DE19772754652 DE2754652A1 (en) 1977-12-08 1977-12-08 METHOD FOR PRODUCING SILICON PHOTO ELEMENTS

Publications (3)

Publication Number Publication Date
EP0002433A2 EP0002433A2 (en) 1979-06-27
EP0002433A3 true EP0002433A3 (en) 1979-07-11
EP0002433B1 EP0002433B1 (en) 1981-08-12

Family

ID=6025591

Family Applications (1)

Application Number Title Priority Date Filing Date
EP78100845A Expired EP0002433B1 (en) 1977-12-08 1978-09-07 Process for making silicon photoelements

Country Status (7)

Country Link
US (1) US4239810A (en)
EP (1) EP0002433B1 (en)
JP (1) JPS5487198A (en)
AT (1) AT376328B (en)
CA (1) CA1101740A (en)
DE (2) DE2754652A1 (en)
IT (1) IT1160271B (en)

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* Cited by examiner, † Cited by third party
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US4246043A (en) * 1979-12-03 1981-01-20 Solarex Corporation Yttrium oxide antireflective coating for solar cells
US4663188A (en) * 1982-09-27 1987-05-05 Rca Corporation Method for making a photodetector with enhanced light absorption
US4532537A (en) * 1982-09-27 1985-07-30 Rca Corporation Photodetector with enhanced light absorption
DE3242835A1 (en) * 1982-11-19 1984-05-24 Siemens AG, 1000 Berlin und 8000 München AMORPHEMIC SILICON SOLAR CELL
GB2139421B (en) * 1983-03-07 1987-09-23 Semiconductor Energy Lab Semiconductor photoelectric conversion device and method of manufacture
DE3310331A1 (en) * 1983-03-22 1984-09-27 Siemens AG, 1000 Berlin und 8000 München Process for enlarging the surface of a substrate
US4966437A (en) * 1988-04-19 1990-10-30 Litton Systems, Inc. Fault-tolerant anti-reflective coatings
US4933021A (en) * 1988-11-14 1990-06-12 Electric Power Research Institute Monolithic series-connected solar cells employing shorted p-n junctions for electrical isolation
US4933022A (en) * 1988-11-14 1990-06-12 Board Of Trustees Of The Leland Stanford Univ. & Electric Power Research Institute Solar cell having interdigitated contacts and internal bypass diodes
US4927770A (en) * 1988-11-14 1990-05-22 Electric Power Research Inst. Corp. Of District Of Columbia Method of fabricating back surface point contact solar cells
JPH0690014A (en) * 1992-07-22 1994-03-29 Mitsubishi Electric Corp Thin solar cell and its production, etching method and automatic etching device, and production of semiconductor device
US5358574A (en) * 1993-11-22 1994-10-25 Midwest Research Institute Dry texturing of solar cells
US5907766A (en) * 1996-10-21 1999-05-25 Electric Power Research Institute, Inc. Method of making a solar cell having improved anti-reflection passivation layer
US6317053B1 (en) * 1997-03-11 2001-11-13 Hans-Dieter Seeliger Switch cabinet with a fire extinguishing system
AU742750B2 (en) * 1997-04-23 2002-01-10 Unisearch Limited Metal contact scheme using selective silicon growth
AUPO638997A0 (en) * 1997-04-23 1997-05-22 Unisearch Limited Metal contact scheme using selective silicon growth
DE19741832A1 (en) * 1997-09-23 1999-03-25 Inst Solarenergieforschung Method of manufacturing a solar cell and solar cell
US20130164883A1 (en) * 2007-10-06 2013-06-27 Solexel, Inc. Laser annealing applications in high-efficiency solar cells
US20060252252A1 (en) * 2005-03-18 2006-11-09 Zhize Zhu Electroless deposition processes and compositions for forming interconnects
US20060246217A1 (en) 2005-03-18 2006-11-02 Weidman Timothy W Electroless deposition process on a silicide contact
US20070099806A1 (en) * 2005-10-28 2007-05-03 Stewart Michael P Composition and method for selectively removing native oxide from silicon-containing surfaces
US20080121276A1 (en) * 2006-11-29 2008-05-29 Applied Materials, Inc. Selective electroless deposition for solar cells
US7968790B2 (en) * 2009-01-16 2011-06-28 Genie Lens Technologies, Llc Photovoltaic (PV) enhancement films for enhancing optical path lengths and for trapping reflected light
US8048250B2 (en) * 2009-01-16 2011-11-01 Genie Lens Technologies, Llc Method of manufacturing photovoltaic (PV) enhancement films
US7904871B2 (en) * 2009-01-16 2011-03-08 Genie Lens Technologies, Llc Computer-implemented method of optimizing refraction and TIR structures to enhance path lengths in PV devices
US8338693B2 (en) * 2009-01-16 2012-12-25 Genie Lens Technology, LLC Solar arrays and other photovoltaic (PV) devices using PV enhancement films for trapping light
US9960302B1 (en) 2016-10-18 2018-05-01 Tesla, Inc. Cascaded photovoltaic structures with interdigitated back contacts
US10937915B2 (en) 2016-10-28 2021-03-02 Tesla, Inc. Obscuring, color matching, and camouflaging solar panels
US10560049B2 (en) 2017-03-01 2020-02-11 Tesla, Inc. System and method for packaging photovoltaic roof tiles
US10381973B2 (en) 2017-05-17 2019-08-13 Tesla, Inc. Uniformly and directionally colored photovoltaic modules
US10985688B2 (en) 2017-06-05 2021-04-20 Tesla, Inc. Sidelap interconnect for photovoltaic roofing modules
US10734938B2 (en) 2017-07-21 2020-08-04 Tesla, Inc. Packaging for solar roof tiles
US10857764B2 (en) 2017-07-25 2020-12-08 Tesla, Inc. Method for improving adhesion between glass cover and encapsulant for solar roof tiles
US10978990B2 (en) 2017-09-28 2021-04-13 Tesla, Inc. Glass cover with optical-filtering coating for managing color of a solar roof tile
US10454409B2 (en) 2018-02-02 2019-10-22 Tesla, Inc. Non-flat solar roof tiles
US10862420B2 (en) 2018-02-20 2020-12-08 Tesla, Inc. Inter-tile support for solar roof tiles
US11190128B2 (en) 2018-02-27 2021-11-30 Tesla, Inc. Parallel-connected solar roof tile modules
US11431279B2 (en) 2018-07-02 2022-08-30 Tesla, Inc. Solar roof tile with a uniform appearance
US11245354B2 (en) 2018-07-31 2022-02-08 Tesla, Inc. Solar roof tile spacer with embedded circuitry
US11082005B2 (en) 2018-07-31 2021-08-03 Tesla, Inc. External electrical contact for solar roof tiles
US11245355B2 (en) 2018-09-04 2022-02-08 Tesla, Inc. Solar roof tile module
US11581843B2 (en) 2018-09-14 2023-02-14 Tesla, Inc. Solar roof tile free of back encapsulant layer
US11431280B2 (en) 2019-08-06 2022-08-30 Tesla, Inc. System and method for improving color appearance of solar roofs

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1014673B (en) * 1951-03-10 1957-08-29 Sylvania Electric Prod Process for the production of semiconducting germanium crystals with etching recesses for photoelectric devices
FR1339543A (en) * 1962-06-08 1963-10-11 Europ Des Semi Conducteurs Soc High efficiency photovoltaic cell
US3555669A (en) * 1967-12-15 1971-01-19 Int Rectifier Corp Process for soldering silicon wafers to contacts
US3956023A (en) * 1973-10-30 1976-05-11 General Electric Company Process for making a deep power diode by thermal migration of dopant
US4011582A (en) * 1973-10-30 1977-03-08 General Electric Company Deep power diode
US4056879A (en) * 1975-09-18 1977-11-08 Solarex Corporation Method of forming silicon solar energy cell having improved back contact

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3413157A (en) * 1965-10-21 1968-11-26 Ibm Solid state epitaxial growth of silicon by migration from a silicon-aluminum alloy deposit
US3772768A (en) * 1970-02-13 1973-11-20 Licentia Gmbh Method of producing a solar cell
US3755015A (en) * 1971-12-10 1973-08-28 Gen Electric Anti-reflection coating for semiconductor diode array targets
US3895975A (en) * 1973-02-13 1975-07-22 Communications Satellite Corp Method for the post-alloy diffusion of impurities into a semiconductor
US4012235A (en) * 1975-04-04 1977-03-15 California Institute Of Technology Solid phase epitaxial growth
DE2635817A1 (en) * 1976-08-09 1978-02-16 Siemens Ag Silicon semiconductor with large surface area used in solar cells - is prepd. by vapour deposition on substrate at room temp.

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1014673B (en) * 1951-03-10 1957-08-29 Sylvania Electric Prod Process for the production of semiconducting germanium crystals with etching recesses for photoelectric devices
FR1339543A (en) * 1962-06-08 1963-10-11 Europ Des Semi Conducteurs Soc High efficiency photovoltaic cell
US3555669A (en) * 1967-12-15 1971-01-19 Int Rectifier Corp Process for soldering silicon wafers to contacts
US3956023A (en) * 1973-10-30 1976-05-11 General Electric Company Process for making a deep power diode by thermal migration of dopant
US4011582A (en) * 1973-10-30 1977-03-08 General Electric Company Deep power diode
US4056879A (en) * 1975-09-18 1977-11-08 Solarex Corporation Method of forming silicon solar energy cell having improved back contact

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
IEEE TRANSACTIONS ON ELECTRON DEVICES, vol. ED-23, no. 10, Oktober 1976 New York D.J. CONNOLLY, Seiten 1195-1197. *

Also Published As

Publication number Publication date
EP0002433B1 (en) 1981-08-12
ATA615578A (en) 1984-03-15
EP0002433A2 (en) 1979-06-27
DE2754652A1 (en) 1979-06-13
CA1101740A (en) 1981-05-26
DE2860945D1 (en) 1981-11-12
AT376328B (en) 1984-11-12
IT1160271B (en) 1987-03-11
IT7830249A0 (en) 1978-11-28
JPS5520391B2 (en) 1980-06-02
US4239810A (en) 1980-12-16
JPS5487198A (en) 1979-07-11

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