DE69940693D1 - Pulssteuerung in lasersystemen - Google Patents
Pulssteuerung in lasersystemenInfo
- Publication number
- DE69940693D1 DE69940693D1 DE69940693T DE69940693T DE69940693D1 DE 69940693 D1 DE69940693 D1 DE 69940693D1 DE 69940693 T DE69940693 T DE 69940693T DE 69940693 T DE69940693 T DE 69940693T DE 69940693 D1 DE69940693 D1 DE 69940693D1
- Authority
- DE
- Germany
- Prior art keywords
- pulse control
- laser systems
- laser
- systems
- pulse
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
- H01C17/22—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming
- H01C17/24—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming by removing or adding resistive material
- H01C17/242—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming by removing or adding resistive material by laser
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/13—Stabilisation of laser output parameters, e.g. frequency or amplitude
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
- B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
- H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
- H01G5/01—Details
- H01G5/019—Means for correcting the capacitance characteristics
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
- H01S3/0057—Temporal shaping, e.g. pulse compression, frequency chirping
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/11—Mode locking; Q-switching; Other giant-pulse techniques, e.g. cavity dumping
- H01S3/1123—Q-switching
- H01S3/117—Q-switching using intracavity acousto-optic devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
- H01S3/0085—Modulating the output, i.e. the laser beam is modulated outside the laser cavity
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/08—Construction or shape of optical resonators or components thereof
- H01S3/08059—Constructional details of the reflector, e.g. shape
- H01S3/08068—Holes; Stepped surface; Special cross-section
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/10038—Amplitude control
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/10038—Amplitude control
- H01S3/10046—Pulse repetition rate control
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/106—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity
- H01S3/1068—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity using an acousto-optical device
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/096,600 US6339604B1 (en) | 1998-06-12 | 1998-06-12 | Pulse control in laser systems |
PCT/US1999/012148 WO1999065123A1 (en) | 1998-06-12 | 1999-06-02 | Pulse control in laser systems |
Publications (1)
Publication Number | Publication Date |
---|---|
DE69940693D1 true DE69940693D1 (de) | 2009-05-20 |
Family
ID=22258140
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69940693T Expired - Lifetime DE69940693D1 (de) | 1998-06-12 | 1999-06-02 | Pulssteuerung in lasersystemen |
Country Status (10)
Country | Link |
---|---|
US (4) | US6339604B1 (de) |
EP (1) | EP1097492B1 (de) |
JP (1) | JP3825631B2 (de) |
KR (1) | KR100433374B1 (de) |
CN (1) | CN100399654C (de) |
AU (1) | AU4325899A (de) |
CA (1) | CA2334764A1 (de) |
DE (1) | DE69940693D1 (de) |
TW (1) | TW463432B (de) |
WO (1) | WO1999065123A1 (de) |
Families Citing this family (86)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5998759A (en) * | 1996-12-24 | 1999-12-07 | General Scanning, Inc. | Laser processing |
US6339604B1 (en) * | 1998-06-12 | 2002-01-15 | General Scanning, Inc. | Pulse control in laser systems |
US6144118A (en) | 1998-09-18 | 2000-11-07 | General Scanning, Inc. | High-speed precision positioning apparatus |
US6300590B1 (en) * | 1998-12-16 | 2001-10-09 | General Scanning, Inc. | Laser processing |
US7723642B2 (en) | 1999-12-28 | 2010-05-25 | Gsi Group Corporation | Laser-based system for memory link processing with picosecond lasers |
US7838794B2 (en) * | 1999-12-28 | 2010-11-23 | Gsi Group Corporation | Laser-based method and system for removing one or more target link structures |
US7671295B2 (en) | 2000-01-10 | 2010-03-02 | Electro Scientific Industries, Inc. | Processing a memory link with a set of at least two laser pulses |
US20060141681A1 (en) * | 2000-01-10 | 2006-06-29 | Yunlong Sun | Processing a memory link with a set of at least two laser pulses |
US20030222324A1 (en) * | 2000-01-10 | 2003-12-04 | Yunlong Sun | Laser systems for passivation or link processing with a set of laser pulses |
US20030024913A1 (en) * | 2002-04-15 | 2003-02-06 | Downes Joseph P. | Laser scanning method and system for marking articles such as printed circuit boards, integrated circuits and the like |
JP2001352120A (ja) * | 2000-06-06 | 2001-12-21 | Matsushita Electric Ind Co Ltd | レーザ装置とその制御方法およびそれを用いたレーザ加工方法とレーザ加工機 |
JP2002040627A (ja) * | 2000-07-24 | 2002-02-06 | Nec Corp | レーザパターン修正方法並びに修正装置 |
JP2002103066A (ja) * | 2000-09-25 | 2002-04-09 | Nec Corp | レーザ加工装置 |
US20070173075A1 (en) * | 2001-03-29 | 2007-07-26 | Joohan Lee | Laser-based method and system for processing a multi-material device having conductive link structures |
US6777645B2 (en) * | 2001-03-29 | 2004-08-17 | Gsi Lumonics Corporation | High-speed, precision, laser-based method and system for processing material of one or more targets within a field |
DE10140254A1 (de) * | 2001-08-09 | 2003-03-06 | Trumpf Laser Gmbh & Co Kg | Laserverstärkersystem |
JP3838064B2 (ja) * | 2001-09-28 | 2006-10-25 | 松下電器産業株式会社 | レーザ制御方法 |
US6875950B2 (en) * | 2002-03-22 | 2005-04-05 | Gsi Lumonics Corporation | Automated laser trimming of resistors |
US6951995B2 (en) | 2002-03-27 | 2005-10-04 | Gsi Lumonics Corp. | Method and system for high-speed, precise micromachining an array of devices |
US7563695B2 (en) * | 2002-03-27 | 2009-07-21 | Gsi Group Corporation | Method and system for high-speed precise laser trimming and scan lens for use therein |
US7015418B2 (en) * | 2002-05-17 | 2006-03-21 | Gsi Group Corporation | Method and system for calibrating a laser processing system and laser marking system utilizing same |
DE60317868T2 (de) * | 2002-10-28 | 2008-12-04 | Fujifilm Corp. | Lasermarkierungsverfahren |
ES2384871T3 (es) * | 2003-02-14 | 2012-07-13 | Universität Heidelberg | Procedimiento de generación de al menos un impulso y/o secuencia de impulsos con parámetros controlables |
US6930274B2 (en) * | 2003-03-26 | 2005-08-16 | Siemens Vdo Automotive Corporation | Apparatus and method of maintaining a generally constant focusing spot size at different average laser power densities |
US6947454B2 (en) * | 2003-06-30 | 2005-09-20 | Electro Scientific Industries, Inc. | Laser pulse picking employing controlled AOM loading |
US7616669B2 (en) * | 2003-06-30 | 2009-11-10 | Electro Scientific Industries, Inc. | High energy pulse suppression method |
JP4391524B2 (ja) * | 2003-08-19 | 2009-12-24 | エレクトロ サイエンティフィック インダストリーズ インコーポレーテッド | 特別形態のパワープロファイルでレーザパルスを用いるリンク処理の方法及びレーザシステム。 |
US7505196B2 (en) * | 2004-03-31 | 2009-03-17 | Imra America, Inc. | Method and apparatus for controlling and protecting pulsed high power fiber amplifier systems |
US7020582B1 (en) | 2004-04-28 | 2006-03-28 | Altera Corporation | Methods and apparatus for laser marking of integrated circuit faults |
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DE102019205285A1 (de) * | 2019-04-12 | 2020-10-15 | Trumpf Laser Gmbh | Verfahren und Vorrichtung zum Erzeugen von Laserpulsen |
US20230044929A1 (en) | 2021-03-26 | 2023-02-09 | Aeye, Inc. | Multi-Lens Lidar Receiver with Multiple Readout Channels |
US11442152B1 (en) | 2021-03-26 | 2022-09-13 | Aeye, Inc. | Hyper temporal lidar with dynamic laser control using a laser energy model |
US11630188B1 (en) | 2021-03-26 | 2023-04-18 | Aeye, Inc. | Hyper temporal lidar with dynamic laser control using safety models |
US11486977B2 (en) | 2021-03-26 | 2022-11-01 | Aeye, Inc. | Hyper temporal lidar with pulse burst scheduling |
US20220308220A1 (en) | 2021-03-26 | 2022-09-29 | Aeye, Inc. | Hyper Temporal Lidar with Controllable Detection Intervals Based on Location Information |
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- 1999-06-02 DE DE69940693T patent/DE69940693D1/de not_active Expired - Lifetime
- 1999-06-02 KR KR10-2000-7014084A patent/KR100433374B1/ko not_active IP Right Cessation
- 1999-06-02 CN CNB998085294A patent/CN100399654C/zh not_active Expired - Fee Related
- 1999-06-02 JP JP2000554036A patent/JP3825631B2/ja not_active Expired - Fee Related
- 1999-06-02 EP EP99955568A patent/EP1097492B1/de not_active Expired - Lifetime
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- 1999-06-15 TW TW088109804A patent/TW463432B/zh active
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2004
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2005
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KR100433374B1 (ko) | 2004-05-27 |
US6973104B2 (en) | 2005-12-06 |
JP2002518834A (ja) | 2002-06-25 |
CN1309826A (zh) | 2001-08-22 |
CN100399654C (zh) | 2008-07-02 |
US6831936B1 (en) | 2004-12-14 |
WO1999065123A9 (en) | 2000-03-09 |
EP1097492A1 (de) | 2001-05-09 |
EP1097492B1 (de) | 2009-04-08 |
CA2334764A1 (en) | 1999-12-16 |
WO1999065123A1 (en) | 1999-12-16 |
KR20010071457A (ko) | 2001-07-28 |
TW463432B (en) | 2001-11-11 |
EP1097492A4 (de) | 2005-05-11 |
US20050271095A1 (en) | 2005-12-08 |
AU4325899A (en) | 1999-12-30 |
US6339604B1 (en) | 2002-01-15 |
JP3825631B2 (ja) | 2006-09-27 |
US20050105568A1 (en) | 2005-05-19 |
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