DE69928978D1 - Herstellen von Düsen aus Polymer mittels direkter Bilderzeugung - Google Patents

Herstellen von Düsen aus Polymer mittels direkter Bilderzeugung

Info

Publication number
DE69928978D1
DE69928978D1 DE69928978T DE69928978T DE69928978D1 DE 69928978 D1 DE69928978 D1 DE 69928978D1 DE 69928978 T DE69928978 T DE 69928978T DE 69928978 T DE69928978 T DE 69928978T DE 69928978 D1 DE69928978 D1 DE 69928978D1
Authority
DE
Germany
Prior art keywords
nozzles
polymer
manufacture
direct imaging
imaging
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69928978T
Other languages
English (en)
Other versions
DE69928978T2 (de
Inventor
Chien-Hau Chen
Donald E Wenzel
Qin Liu
Naoto Kawamura
Richard W Seaver
Carl Wu
Vooren Colby Van
Jeffery S Hess
Colin C Davis
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hewlett Packard Development Co LP
Original Assignee
Hewlett Packard Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hewlett Packard Co filed Critical Hewlett Packard Co
Publication of DE69928978D1 publication Critical patent/DE69928978D1/de
Application granted granted Critical
Publication of DE69928978T2 publication Critical patent/DE69928978T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • B41J2/1639—Manufacturing processes molding sacrificial molding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14032—Structure of the pressure chamber
    • B41J2/1404—Geometrical characteristics
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14072—Electrical connections, e.g. details on electrodes, connecting the chip to the outside...
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/1408—Structure dealing with thermal variations, e.g. cooling device, thermal coefficients of materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14088—Structure of heating means
    • B41J2/14112—Resistive element
    • B41J2/14129—Layer structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/1433—Structure of nozzle plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/162—Manufacturing of the nozzle plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14387—Front shooter
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14475—Structure thereof only for on-demand ink jet heads characterised by nozzle shapes or number of orifices per chamber
DE69928978T 1998-03-02 1999-03-01 Herstellen von Düsen aus Polymer mittels direkter Bilderzeugung Expired - Lifetime DE69928978T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/033,987 US6162589A (en) 1998-03-02 1998-03-02 Direct imaging polymer fluid jet orifice
US33987 1998-03-02

Publications (2)

Publication Number Publication Date
DE69928978D1 true DE69928978D1 (de) 2006-01-26
DE69928978T2 DE69928978T2 (de) 2006-08-24

Family

ID=21873622

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69928978T Expired - Lifetime DE69928978T2 (de) 1998-03-02 1999-03-01 Herstellen von Düsen aus Polymer mittels direkter Bilderzeugung

Country Status (10)

Country Link
US (3) US6162589A (de)
EP (2) EP0940257B1 (de)
JP (1) JP4233672B2 (de)
KR (1) KR100563356B1 (de)
CN (1) CN1142856C (de)
BR (1) BR9900203A (de)
DE (1) DE69928978T2 (de)
ES (1) ES2251153T3 (de)
RU (1) RU2221701C2 (de)
TW (1) TW404893B (de)

Families Citing this family (97)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6336714B1 (en) 1996-02-07 2002-01-08 Hewlett-Packard Company Fully integrated thermal inkjet printhead having thin film layer shelf
US6543884B1 (en) 1996-02-07 2003-04-08 Hewlett-Packard Company Fully integrated thermal inkjet printhead having etched back PSG layer
US6305790B1 (en) 1996-02-07 2001-10-23 Hewlett-Packard Company Fully integrated thermal inkjet printhead having multiple ink feed holes per nozzle
US6162589A (en) * 1998-03-02 2000-12-19 Hewlett-Packard Company Direct imaging polymer fluid jet orifice
CA2297168A1 (en) 1998-05-20 1999-11-25 Sony Computer Entertainment Inc. Method and apparatus for image processing, and medium
TW369485B (en) * 1998-07-28 1999-09-11 Ind Tech Res Inst Monolithic producing method for chip of ink-jet printing head
IT1309735B1 (it) * 1999-12-27 2002-01-30 Olivetti Lexikon Spa Testina a canali multipli di alimentazione dell'inchiostro
US6482574B1 (en) 2000-04-20 2002-11-19 Hewlett-Packard Co. Droplet plate architecture in ink-jet printheads
US6402301B1 (en) 2000-10-27 2002-06-11 Lexmark International, Inc Ink jet printheads and methods therefor
US6375313B1 (en) * 2001-01-08 2002-04-23 Hewlett-Packard Company Orifice plate for inkjet printhead
US7594507B2 (en) 2001-01-16 2009-09-29 Hewlett-Packard Development Company, L.P. Thermal generation of droplets for aerosol
US6481832B2 (en) * 2001-01-29 2002-11-19 Hewlett-Packard Company Fluid-jet ejection device
US6520628B2 (en) 2001-01-30 2003-02-18 Hewlett-Packard Company Fluid ejection device with substrate having a fluid firing device and a fluid reservoir on a first surface thereof
GB0113639D0 (en) * 2001-06-05 2001-07-25 Xaar Technology Ltd Nozzle plate for droplet deposition apparatus
US6922203B2 (en) 2001-06-06 2005-07-26 Hewlett-Packard Development Company, L.P. Barrier/orifice design for improved printhead performance
US6561632B2 (en) 2001-06-06 2003-05-13 Hewlett-Packard Development Company, L.P. Printhead with high nozzle packing density
US6626522B2 (en) 2001-09-11 2003-09-30 Hewlett-Packard Development Company, L.P. Filtering techniques for printhead internal contamination
US6604814B2 (en) * 2001-09-28 2003-08-12 Hewlett-Packard Development Company, Lp Arrangements of interconnect circuit and fluid drop generators
US6652072B2 (en) 2001-09-28 2003-11-25 Hewlett-Packard Development Company, L.P. Interconnect circuit
US6499835B1 (en) 2001-10-30 2002-12-31 Hewlett-Packard Company Ink delivery system for an inkjet printhead
US6464343B1 (en) * 2001-10-31 2002-10-15 Hewlett-Packard Company Ink jet printhead having thin film structures for improving barrier island adhesion
US6543879B1 (en) 2001-10-31 2003-04-08 Hewlett-Packard Company Inkjet printhead assembly having very high nozzle packing density
KR100396559B1 (ko) * 2001-11-05 2003-09-02 삼성전자주식회사 일체형 잉크젯 프린트헤드의 제조 방법
US7357486B2 (en) * 2001-12-20 2008-04-15 Hewlett-Packard Development Company, L.P. Method of laser machining a fluid slot
EP1769872A3 (de) * 2001-12-20 2007-04-11 Hewlett-Packard Company Verfahren zur laserbearbeitung eines flüssigkeitsschlitzes
US20030155328A1 (en) 2002-02-15 2003-08-21 Huth Mark C. Laser micromachining and methods and systems of same
JP3912663B2 (ja) * 2002-02-26 2007-05-09 富士フイルム株式会社 カラーフィルター用画素の形成方法、液晶表示装置用カラーフィルター、液晶表示装置用スペーサー及び配向制御用突起の形成方法、液晶表示装置用スペーサー及び配向制御用突起
KR100413693B1 (ko) * 2002-04-02 2004-01-03 삼성전자주식회사 잉크젯 프린트 헤드 및 이의 제조 방법
US6675775B2 (en) * 2002-04-10 2004-01-13 Hewlett-Packard Development Company, L.P. System and method for delivering combustible liquids
US6527368B1 (en) * 2002-04-30 2003-03-04 Hewlett-Packard Company Layer with discontinuity over fluid slot
JP2004012564A (ja) * 2002-06-04 2004-01-15 Fuji Photo Film Co Ltd 画像形成方法
US6607264B1 (en) 2002-06-18 2003-08-19 Hewlett-Packard Development Company, L.P. Fluid controlling apparatus
KR100428793B1 (ko) * 2002-06-26 2004-04-28 삼성전자주식회사 잉크젯 프린터 헤드 및 그 제조 방법
US6739519B2 (en) * 2002-07-31 2004-05-25 Hewlett-Packard Development Company, Lp. Plurality of barrier layers
KR100474471B1 (ko) * 2002-08-20 2005-03-08 삼성전자주식회사 모노리식 버블 잉크젯 프린트 헤드 및 그 제조방법
KR100445004B1 (ko) * 2002-08-26 2004-08-21 삼성전자주식회사 모노리틱 잉크 젯 프린트 헤드 및 이의 제조 방법
EP1550556B1 (de) * 2002-09-24 2010-02-24 Konica Minolta Holdings, Inc. Verfahren zur herstellung eines flüssigkeitsabführkopfs mit elektrostatischer anziehung, verfahren zur herstellung einer düsenplatte
US6824246B2 (en) * 2002-11-23 2004-11-30 Kia Silverbrook Thermal ink jet with thin nozzle plate
US6672709B1 (en) * 2002-11-23 2004-01-06 Silverbrook Research Pty Ltd Self-cooling thermal ink jet printhead
US6926390B2 (en) 2003-02-05 2005-08-09 Hewlett-Packard Development Company, L.P. Method of forming mixed-phase compressive tantalum thin films using nitrogen residual gas, thin films and fluid ejection devices including same
US6916090B2 (en) * 2003-03-10 2005-07-12 Hewlett-Packard Development Company, L.P. Integrated fluid ejection device and filter
US6709805B1 (en) 2003-04-24 2004-03-23 Lexmark International, Inc. Inkjet printhead nozzle plate
US6893116B2 (en) * 2003-04-29 2005-05-17 Hewlett-Packard Development Company, L.P. Fluid ejection device with compressive alpha-tantalum layer
US6955835B2 (en) * 2003-04-30 2005-10-18 Hewlett-Packard Development Company, L.P. Method for forming compressive alpha-tantalum on substrates and devices including the same
EP1489460A3 (de) * 2003-06-20 2008-07-09 FUJIFILM Corporation Lichtempfindlicher Bogen mit einer Unterlage sowie einer ersten und einer zweiten lichtempfindlichen Schicht
US7309467B2 (en) * 2003-06-24 2007-12-18 Hewlett-Packard Development Company, L.P. Fluidic MEMS device
ATE376935T1 (de) * 2003-09-17 2007-11-15 Hewlett Packard Development Co Ein vielzahl von sperrschichten
US7029099B2 (en) * 2003-10-30 2006-04-18 Eastman Kodak Company Method of producing ink jet chambers using photo-imageable materials
US20050130075A1 (en) * 2003-12-12 2005-06-16 Mohammed Shaarawi Method for making fluid emitter orifice
US20050145715A1 (en) 2003-12-31 2005-07-07 Koegler John M.Iii Drop ejector for ejecting discrete drops of liquid
US20050260522A1 (en) * 2004-02-13 2005-11-24 William Weber Permanent resist composition, cured product thereof, and use thereof
US7384113B2 (en) 2004-04-19 2008-06-10 Hewlett-Packard Development Company, L.P. Fluid ejection device with address generator
US7722144B2 (en) 2004-04-19 2010-05-25 Hewlett-Packard Development Company, L.P. Fluid ejection device
US7278715B2 (en) 2004-04-19 2007-10-09 Hewlett-Packard Development Company, L.P. Device with gates configured in loop structures
US7497536B2 (en) 2004-04-19 2009-03-03 Hewlett-Packard Development Company, L.P. Fluid ejection device
US7278703B2 (en) 2004-04-19 2007-10-09 Hewlett-Packard Development Company, L.P. Fluid ejection device with identification cells
KR100570822B1 (ko) * 2004-05-11 2006-04-12 삼성전자주식회사 잉크젯 헤드의 제조방법 및 그에 의해 제조된 잉크젯 헤드
US7449280B2 (en) * 2004-05-26 2008-11-11 Microchem Corp. Photoimageable coating composition and composite article thereof
CN100496980C (zh) * 2004-06-02 2009-06-10 佳能株式会社 头基板、记录头、头盒及记录装置
US7325309B2 (en) * 2004-06-08 2008-02-05 Hewlett-Packard Development Company, L.P. Method of manufacturing a fluid ejection device with a dry-film photo-resist layer
US7322104B2 (en) * 2004-06-25 2008-01-29 Canon Kabushiki Kaisha Method for producing an ink jet head
US7267431B2 (en) * 2004-06-30 2007-09-11 Lexmark International, Inc. Multi-fluid ejection device
JP4280732B2 (ja) 2004-07-06 2009-06-17 キヤノン株式会社 記録装置、データ処理装置、マスク製造方法およびマスクパターン
US7169538B2 (en) * 2004-09-10 2007-01-30 Lexmark International, Inc. Process for making a micro-fluid ejection head structure
US7585616B2 (en) * 2005-01-31 2009-09-08 Hewlett-Packard Development Company, L.P. Method for making fluid emitter orifice
JP2006347072A (ja) * 2005-06-17 2006-12-28 Canon Inc 液体吐出ヘッドの製造方法、液体吐出ヘッド、および液体吐出記録装置
US8043517B2 (en) * 2005-09-19 2011-10-25 Hewlett-Packard Development Company, L.P. Method of forming openings in substrates and inkjet printheads fabricated thereby
US7364268B2 (en) * 2005-09-30 2008-04-29 Lexmark International, Inc. Nozzle members, compositions and methods for micro-fluid ejection heads
KR101012898B1 (ko) * 2005-12-02 2011-02-08 캐논 가부시끼가이샤 액체 토출 헤드 제조 방법
KR100754201B1 (ko) * 2006-01-10 2007-09-03 삼성전자주식회사 잉크젯헤드 제조방법
US7807506B2 (en) 2006-02-03 2010-10-05 Infineon Technologies Ag Microelectromechanical semiconductor component with cavity structure and method for producing the same
DE102006005419B4 (de) * 2006-02-03 2019-05-02 Infineon Technologies Ag Mikroelektromechanisches Halbleiterbauelement mit Hohlraumstruktur und Verfahren zur Herstellung desselben
JP4834426B2 (ja) 2006-03-06 2011-12-14 キヤノン株式会社 インクジェット記録ヘッドの製造方法
US20080055363A1 (en) * 2006-09-06 2008-03-06 Eastman Kodak Company Large area array print head
US7926917B2 (en) * 2006-12-06 2011-04-19 Canon Kabushiki Kaisha. Liquid recording head
US7857422B2 (en) * 2007-01-25 2010-12-28 Eastman Kodak Company Dual feed liquid drop ejector
KR101155989B1 (ko) * 2007-06-21 2012-06-18 삼성전자주식회사 잉크젯 프린트헤드의 제조방법
JP5058719B2 (ja) 2007-08-30 2012-10-24 キヤノン株式会社 液体吐出ヘッド及びインクジェット記録装置
WO2009078879A1 (en) * 2007-12-19 2009-06-25 Hewlett-Packard Development Company, L.P. Fuse chambers on a substrate
EP2222474B1 (de) * 2007-12-20 2014-03-05 Hewlett-Packard Development Company, L.P. Tropfenerzeuger
CN101939169B (zh) * 2008-02-06 2014-12-03 惠普开发有限公司 发射单元
RU2443566C1 (ru) * 2008-05-22 2012-02-27 Кэнон Кабусики Кайся Головка для выбрасывания жидкости и способ изготовления головки для выбрасывания жидкости
JP5679665B2 (ja) * 2009-02-06 2015-03-04 キヤノン株式会社 インクジェット記録ヘッド
US8960886B2 (en) 2009-06-29 2015-02-24 Videojet Technologies Inc. Thermal inkjet print head with solvent resistance
BRPI1011559B1 (pt) * 2009-06-29 2020-01-07 Videojet Technologies Inc. Sistema de impressão a jato de tinta e método para preparar um sistema de cabeçote de impressão
US8531952B2 (en) 2009-11-30 2013-09-10 The Hong Kong Polytechnic University Method for measurement of network path capacity with minimum delay difference
US8806751B2 (en) * 2010-04-27 2014-08-19 Eastman Kodak Company Method of manufacturing printhead including polymeric filter
JP5506600B2 (ja) 2010-08-25 2014-05-28 キヤノン株式会社 液体吐出ヘッドの製造方法
CN102191289B (zh) * 2011-03-18 2012-08-15 宁夏伊品生物科技股份有限公司 赖氨酸的发酵制备
JP5546504B2 (ja) * 2011-07-14 2014-07-09 キヤノン株式会社 記録ヘッドの製造方法
US8870345B2 (en) * 2012-07-16 2014-10-28 Xerox Corporation Method of making superoleophobic re-entrant resist structures
US8778599B2 (en) * 2012-11-21 2014-07-15 Canon Kabushiki Kaisha Method of producing ink ejection head
US9006845B2 (en) 2013-01-16 2015-04-14 Infineon Technologies, A.G. MEMS device with polymer layer, system of a MEMS device with a polymer layer, method of making a MEMS device with a polymer layer
CN104669787B (zh) * 2013-11-28 2017-11-03 珠海赛纳打印科技股份有限公司 液体喷射装置及其制造方法
US9586399B2 (en) 2015-03-30 2017-03-07 Funai Electric Co., Ltd. Fluid ejection device for depositing a discrete quantity of fluid onto a surface
EP3362291B1 (de) * 2015-10-12 2023-07-26 Hewlett-Packard Development Company, L.P. Druckkopf
CN111269335A (zh) * 2020-04-08 2020-06-12 中国石油大学(华东) 一种缓交联主客体包合凝胶深部调驱剂及其制备方法、应用

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4394670A (en) * 1981-01-09 1983-07-19 Canon Kabushiki Kaisha Ink jet head and method for fabrication thereof
IT1137506B (it) * 1981-03-13 1986-09-10 Anic Spa Composizione per il rivestimento delle pareti dei reattori e delle apparecchiature collegate,destinate alla polimerizzazione di composti vinilici,idonea ad evitare o ridurre depositi ed incrostazioni delle stesse apparecchiature e metodo per la sua utilizzazione
US4456371A (en) * 1982-06-30 1984-06-26 International Business Machines Corporation Optical projection printing threshold leveling arrangement
JPS60128447A (ja) 1983-12-14 1985-07-09 Fujitsu Ltd フオトマスク
JP2635043B2 (ja) * 1986-04-28 1997-07-30 ヒューレット・パッカード・カンパニー 熱インクジエツト式プリントヘツド
US4770947A (en) * 1987-01-02 1988-09-13 International Business Machines Corporation Multiple density mask and fabrication thereof
US4789425A (en) * 1987-08-06 1988-12-06 Xerox Corporation Thermal ink jet printhead fabricating process
EP0491560B1 (de) * 1990-12-19 1997-10-01 Canon Kabushiki Kaisha Herstellungsverfahren für flüssigkeitsausströmenden Aufzeichnungskopf
US5198834A (en) * 1991-04-02 1993-03-30 Hewlett-Packard Company Ink jet print head having two cured photoimaged barrier layers
US5160577A (en) * 1991-07-30 1992-11-03 Deshpande Narayan V Method of fabricating an aperture plate for a roof-shooter type printhead
US5278584A (en) * 1992-04-02 1994-01-11 Hewlett-Packard Company Ink delivery system for an inkjet printhead
JPH07156409A (ja) * 1993-10-04 1995-06-20 Xerox Corp 一体形成した流路構造を有するインクジェット・プリントヘッドおよびその作製方法
US5376483A (en) * 1993-10-07 1994-12-27 Micron Semiconductor, Inc. Method of making masks for phase shifting lithography
US5589303A (en) * 1994-12-30 1996-12-31 Lucent Technologies Inc. Self-aligned opaque regions for attenuating phase-shifting masks
EP0734866B1 (de) * 1995-03-31 1999-08-11 Canon Kabushiki Kaisha Verfahren zum Herstellen eines Tintenstrahlkopfes
US5658471A (en) * 1995-09-22 1997-08-19 Lexmark International, Inc. Fabrication of thermal ink-jet feed slots in a silicon substrate
US6162589A (en) * 1998-03-02 2000-12-19 Hewlett-Packard Company Direct imaging polymer fluid jet orifice
US5914202A (en) * 1996-06-10 1999-06-22 Sharp Microeletronics Technology, Inc. Method for forming a multi-level reticle
US6045215A (en) * 1997-08-28 2000-04-04 Hewlett-Packard Company High durability ink cartridge printhead and method for making the same
US6520627B2 (en) * 2000-06-26 2003-02-18 Hewlett-Packard Company Direct imaging polymer fluid jet orifice
US6644789B1 (en) * 2000-07-06 2003-11-11 Lexmark International, Inc. Nozzle assembly for an ink jet printer

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EP0940257A3 (de) 2000-04-05
ES2251153T3 (es) 2006-04-16
US20020145644A1 (en) 2002-10-10
US6162589A (en) 2000-12-19
EP0940257B1 (de) 2005-12-21
US6447102B1 (en) 2002-09-10
KR100563356B1 (ko) 2006-03-22
EP0940257A2 (de) 1999-09-08
KR19990077489A (ko) 1999-10-25
EP1595703A3 (de) 2006-06-07
EP1595703A2 (de) 2005-11-16
TW404893B (en) 2000-09-11
RU2221701C2 (ru) 2004-01-20
JPH11314371A (ja) 1999-11-16
CN1142856C (zh) 2004-03-24
CN1227790A (zh) 1999-09-08
DE69928978T2 (de) 2006-08-24
BR9900203A (pt) 2000-01-04
US6902259B2 (en) 2005-06-07

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