DE69928474D1 - Optiche sonde für nahfeld-messungen - Google Patents

Optiche sonde für nahfeld-messungen

Info

Publication number
DE69928474D1
DE69928474D1 DE69928474T DE69928474T DE69928474D1 DE 69928474 D1 DE69928474 D1 DE 69928474D1 DE 69928474 T DE69928474 T DE 69928474T DE 69928474 T DE69928474 T DE 69928474T DE 69928474 D1 DE69928474 D1 DE 69928474D1
Authority
DE
Germany
Prior art keywords
nahfeld
measurements
optical probe
probe
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69928474T
Other languages
English (en)
Other versions
DE69928474T2 (de
Inventor
Yasuyuki Mitsuoka
Norio Chiba
Nobuyuki Kasama
Takashi Niwa
Kunio Nakajima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Instruments Inc
Original Assignee
Seiko Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Instruments Inc filed Critical Seiko Instruments Inc
Application granted granted Critical
Publication of DE69928474D1 publication Critical patent/DE69928474D1/de
Publication of DE69928474T2 publication Critical patent/DE69928474T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/18—SNOM [Scanning Near-Field Optical Microscopy] or apparatus therefor, e.g. SNOM probes
    • G01Q60/22—Probes, their manufacture, or their related instrumentation, e.g. holders
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/06—Probe tip arrays
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/125—Optical beam sources therefor, e.g. laser control circuitry specially adapted for optical storage devices; Modulators, e.g. means for controlling the size or intensity of optical spots or optical traces
    • G11B7/128—Modulators
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
    • G11B7/1353—Diffractive elements, e.g. holograms or gratings
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
    • G11B7/1362—Mirrors
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
    • G11B7/1372—Lenses
    • G11B7/1374—Objective lenses
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
    • G11B7/1387—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector using the near-field effect
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
    • G11B7/1372—Lenses
    • G11B2007/13727—Compound lenses, i.e. two or more lenses co-operating to perform a function, e.g. compound objective lens including a solid immersion lens, positive and negative lenses either bonded together or with adjustable spacing
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/22—Apparatus or processes for the manufacture of optical heads, e.g. assembly
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/862—Near-field probe
DE69928474T 1998-02-05 1999-02-05 Optiche sonde für nahfeld-messungen Expired - Lifetime DE69928474T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2480198 1998-02-05
JP02480198A JP3862845B2 (ja) 1998-02-05 1998-02-05 近接場用光プローブ
PCT/JP1999/000514 WO1999040445A1 (en) 1998-02-05 1999-02-05 Optical probe for proximity field

Publications (2)

Publication Number Publication Date
DE69928474D1 true DE69928474D1 (de) 2005-12-29
DE69928474T2 DE69928474T2 (de) 2006-07-20

Family

ID=12148310

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69928474T Expired - Lifetime DE69928474T2 (de) 1998-02-05 1999-02-05 Optiche sonde für nahfeld-messungen

Country Status (5)

Country Link
US (3) US6528780B1 (de)
EP (1) EP0981051B1 (de)
JP (1) JP3862845B2 (de)
DE (1) DE69928474T2 (de)
WO (1) WO1999040445A1 (de)

Families Citing this family (65)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5345170A (en) * 1992-06-11 1994-09-06 Cascade Microtech, Inc. Wafer probe station having integrated guarding, Kelvin connection and shielding systems
US6232789B1 (en) * 1997-05-28 2001-05-15 Cascade Microtech, Inc. Probe holder for low current measurements
US5729150A (en) * 1995-12-01 1998-03-17 Cascade Microtech, Inc. Low-current probe card with reduced triboelectric current generating cables
US5914613A (en) * 1996-08-08 1999-06-22 Cascade Microtech, Inc. Membrane probing system with local contact scrub
US6002263A (en) * 1997-06-06 1999-12-14 Cascade Microtech, Inc. Probe station having inner and outer shielding
US6034533A (en) * 1997-06-10 2000-03-07 Tervo; Paul A. Low-current pogo probe card
JP3862845B2 (ja) * 1998-02-05 2006-12-27 セイコーインスツル株式会社 近接場用光プローブ
US6256882B1 (en) 1998-07-14 2001-07-10 Cascade Microtech, Inc. Membrane probing system
WO2000028536A1 (fr) * 1998-11-09 2000-05-18 Seiko Instruments Inc. Tete optique a champ proche et procede de production associe
JP2000329677A (ja) * 1999-03-17 2000-11-30 Seiko Instruments Inc 光マイクロカンチレバーとその製造方法および光マイクロカンチレバーホルダ
US6578264B1 (en) * 1999-06-04 2003-06-17 Cascade Microtech, Inc. Method for constructing a membrane probe using a depression
JP4020233B2 (ja) * 1999-08-25 2007-12-12 セイコーインスツル株式会社 近視野光ヘッドとその製造方法
US6835963B2 (en) * 1999-12-22 2004-12-28 Kabushiki Kaisha Toshiba Light-emitting element and method of fabrication thereof
US6838890B2 (en) * 2000-02-25 2005-01-04 Cascade Microtech, Inc. Membrane probing system
JP4648512B2 (ja) * 2000-03-07 2011-03-09 セイコーインスツル株式会社 近視野光発生素子の製造方法
JP3882456B2 (ja) 2000-03-13 2007-02-14 株式会社日立製作所 近接場光プローブおよびそれを用いた近接場光学顕微鏡および光記録／再生装置
US6917726B2 (en) * 2001-09-27 2005-07-12 Cornell Research Foundation, Inc. Zero-mode clad waveguides for performing spectroscopy with confined effective observation volumes
JP2002005810A (ja) * 2000-06-16 2002-01-09 Canon Inc プローブ及びその製造方法、表面観察装置、露光装置、情報処理装置
WO2002010829A2 (en) * 2000-07-27 2002-02-07 Zetetic Institute Multiple-source arrays with optical transmission enhanced by resonant cavities
US6707026B2 (en) * 2000-08-04 2004-03-16 Minolta Co., Ltd. Solid immersion mirror and reproducing apparatus
US6914423B2 (en) 2000-09-05 2005-07-05 Cascade Microtech, Inc. Probe station
US6965226B2 (en) 2000-09-05 2005-11-15 Cascade Microtech, Inc. Chuck for holding a device under test
DE20114544U1 (de) 2000-12-04 2002-02-21 Cascade Microtech Inc Wafersonde
KR100672833B1 (ko) * 2001-08-09 2007-01-22 재단법인서울대학교산학협력재단 근접장 홀로그래픽 메모리 시스템 및 그 방법
WO2003052435A1 (en) * 2001-08-21 2003-06-26 Cascade Microtech, Inc. Membrane probing system
US6951846B2 (en) * 2002-03-07 2005-10-04 The United States Of America As Represented By The Secretary Of The Army Artemisinins with improved stability and bioavailability for therapeutic drug development and application
JP2003294857A (ja) * 2002-03-29 2003-10-15 Mitsubishi Electric Corp 乗員検出装置
US6724205B1 (en) * 2002-11-13 2004-04-20 Cascade Microtech, Inc. Probe for combined signals
US6861856B2 (en) * 2002-12-13 2005-03-01 Cascade Microtech, Inc. Guarded tub enclosure
US7492172B2 (en) 2003-05-23 2009-02-17 Cascade Microtech, Inc. Chuck for holding a device under test
US7057404B2 (en) 2003-05-23 2006-06-06 Sharp Laboratories Of America, Inc. Shielded probe for testing a device under test
US7250626B2 (en) 2003-10-22 2007-07-31 Cascade Microtech, Inc. Probe testing structure
JP2005144561A (ja) * 2003-11-11 2005-06-09 Seiko Epson Corp 近接場光プローブ、近接場光の取出し方法並びに近接場光を用いた加工方法
JP2007517231A (ja) 2003-12-24 2007-06-28 カスケード マイクロテック インコーポレイテッド アクティブ・ウェハプローブ
US7187188B2 (en) 2003-12-24 2007-03-06 Cascade Microtech, Inc. Chuck with integrated wafer support
JP3765314B2 (ja) * 2004-03-31 2006-04-12 セイコーエプソン株式会社 マスク、マスクの製造方法、電気光学装置の製造方法および電子機器
DE202005021435U1 (de) 2004-09-13 2008-02-28 Cascade Microtech, Inc., Beaverton Doppelseitige Prüfaufbauten
JP2008513782A (ja) * 2004-09-17 2008-05-01 パシフィック バイオサイエンシーズ オブ カリフォルニア， インコーポレイテッド 分子解析のための装置及び方法
US7170050B2 (en) 2004-09-17 2007-01-30 Pacific Biosciences Of California, Inc. Apparatus and methods for optical analysis of molecules
JP2006107584A (ja) * 2004-10-01 2006-04-20 Konica Minolta Opto Inc 光学素子及び光スポット位置調整方法
US7616987B2 (en) * 2004-10-05 2009-11-10 Agency For Science, Technology And Research Microprobe for 3D bio-imaging, method for fabricating the same and use thereof
US7656172B2 (en) 2005-01-31 2010-02-02 Cascade Microtech, Inc. System for testing semiconductors
US7535247B2 (en) 2005-01-31 2009-05-19 Cascade Microtech, Inc. Interface for testing semiconductors
US8601608B2 (en) * 2005-03-31 2013-12-03 Japan Science And Technology Agency Cantilever for scanning probe microscope and scanning probe microscope equipped with it
US20070294047A1 (en) * 2005-06-11 2007-12-20 Leonard Hayden Calibration system
EP1966596B1 (de) 2005-12-22 2018-04-11 Koninklijke Philips N.V. In einem relexionsmodus arbeitender lumineszenz-sensor
DE102006002461B8 (de) * 2006-01-18 2008-07-24 Max Planck-Gesellschaft zur Förderung der Wissenschaften e.V. Spiegeloptik für nahfeldoptische Messungen
US7723999B2 (en) 2006-06-12 2010-05-25 Cascade Microtech, Inc. Calibration structures for differential signal probing
US7403028B2 (en) 2006-06-12 2008-07-22 Cascade Microtech, Inc. Test structure and probe for differential signals
US7764072B2 (en) 2006-06-12 2010-07-27 Cascade Microtech, Inc. Differential signal probing system
US8609366B2 (en) * 2006-07-28 2013-12-17 Legacy Emanuel Hospital & Health Center Method and systems for tissue culture
EP1936340A1 (de) * 2006-12-21 2008-06-25 Koninklijke Philips Electronics N.V. Subwellenlängen-Apertur
WO2009017500A2 (en) 2007-07-31 2009-02-05 Battelle Energy Alliance, Llc Sighting optics and methods for sighting
US7876114B2 (en) 2007-08-08 2011-01-25 Cascade Microtech, Inc. Differential waveguide probe
WO2009120372A2 (en) 2008-03-28 2009-10-01 Pacific Biosciences Of California, Inc. Compositions and methods for nucleic acid sequencing
US7888957B2 (en) 2008-10-06 2011-02-15 Cascade Microtech, Inc. Probing apparatus with impedance optimized interface
US8410806B2 (en) 2008-11-21 2013-04-02 Cascade Microtech, Inc. Replaceable coupon for a probing apparatus
US8319503B2 (en) 2008-11-24 2012-11-27 Cascade Microtech, Inc. Test apparatus for measuring a characteristic of a device under test
US8675293B2 (en) * 2010-01-25 2014-03-18 Axsun Technologies, Inc. SOI lens structure for medical probe
CN102802512B (zh) * 2010-01-25 2016-03-30 奥克森技术有限公司 硅光学平台oct医学影像探头
DE202010013458U1 (de) 2010-09-23 2010-12-30 Eberhard-Karls-Universität Tübingen Sonde für aperturlose Nahfeldmikroskopie und/oder für Ramanspektroskopie
TWI427250B (zh) 2011-07-12 2014-02-21 Univ Nat Pingtung Sci & Tech 浮力式太陽集熱動力裝置
JP6341634B2 (ja) * 2013-05-28 2018-06-13 新光電気工業株式会社 プローブガイド板及びその製造方法、半導体検査装置
US9696498B2 (en) * 2015-05-04 2017-07-04 Huawei Technologies Co., Ltd. Three-dimensional (3D) photonic chip-to-fiber interposer
JP6706076B2 (ja) * 2016-01-14 2020-06-03 新光電気工業株式会社 プローブガイド板及びその製造方法とプローブ装置

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0534129A (ja) * 1991-07-31 1993-02-09 Satoshi Kawada 光学プローブ
JP3268797B2 (ja) 1991-10-09 2002-03-25 オリンパス光学工業株式会社 光導入装置
JP3213436B2 (ja) * 1993-05-24 2001-10-02 シャープ株式会社 光プローブ素子、光プローブ素子を用いた記録再生装置、および光プローブ素子の製造方法
US5354985A (en) 1993-06-03 1994-10-11 Stanford University Near field scanning optical and force microscope including cantilever and optical waveguide
AU3152795A (en) 1994-07-28 1996-02-22 Victor B. Kley Scanning probe microscope assembly
JPH0954101A (ja) * 1995-08-14 1997-02-25 Nikon Corp 走査型近接場光学顕微鏡
JP3618896B2 (ja) * 1996-03-29 2005-02-09 キヤノン株式会社 微小開口を有するプローブの作製法とそれによるプローブ、並びに該プローブを用いた走査型近接場光顕微鏡と走査型トンネル顕微鏡との複合装置、および該プローブを用いた記録再生装置
JP3327112B2 (ja) * 1996-04-19 2002-09-24 松下電器産業株式会社 異方性黒鉛薄膜基板及びそれを利用した応用装置
JPH1186364A (ja) * 1997-09-11 1999-03-30 Canon Inc 微小開口の形成方法、微小開口を含んでなるメンブレンと該メンブレンによるプローブ、及び該プローブによる表面観察装置、露光装置、情報処理装置
JPH11166935A (ja) * 1997-09-25 1999-06-22 Canon Inc 光検出または照射用の光プローブと該プローブを備えた近視野光学顕微鏡、及該光プローブの製造方法とその製造に用いる基板
JP3862845B2 (ja) * 1998-02-05 2006-12-27 セイコーインスツル株式会社 近接場用光プローブ

Also Published As

Publication number Publication date
DE69928474T2 (de) 2006-07-20
JPH11223638A (ja) 1999-08-17
WO1999040445A1 (en) 1999-08-12
US20050167576A1 (en) 2005-08-04
US7015455B2 (en) 2006-03-21
US6881947B2 (en) 2005-04-19
US20030141444A1 (en) 2003-07-31
EP0981051A1 (de) 2000-02-23
EP0981051A4 (de) 2001-05-02
US6528780B1 (en) 2003-03-04
JP3862845B2 (ja) 2006-12-27
EP0981051B1 (de) 2005-11-23

Similar Documents

Publication Publication Date Title
DE69928474D1 (de) Optiche sonde für nahfeld-messungen
DE29809568U1 (de) Sondenhalter für Niederstrom-Messungen
DE69911326D1 (de) Sendeeinheit für Messinstrument
DE60132066D1 (de) Messinstrument für 3D-Form mit Laserscanner
NO20010011D0 (no) Optisk sensor for in-situ-måling av analytter
DE29809191U1 (de) Teststreifen-Meßsystem
DE69838530D1 (de) Messchip für einen optischen Analysator
KR960014942A (ko) 고온측정용 탐침카드
DE69820382D1 (de) Prüfgerät für Detektoren
DE60018412D1 (de) Steuergerät für messinstrument
DE69801979D1 (de) Messung optischer Verluste
DE29814997U1 (de) Teststreifenmeßsystem
DE59912779D1 (de) Auswertekonzept für Abstandsmessverfahren
DE69818241D1 (de) Vorrichtung für longitudinale Messungen
FR2749943B1 (fr) Sonde velocimetrique optique
DE69839646D1 (de) Ines messinstrumentes für koordinaten- und oberflächenmessungen
DE59713051D1 (de) Probe
FR2750215B1 (fr) Sonde velocimetrique optique
DE59712951D1 (de) Dichtelement für messfühler
DE69919457D1 (de) Messtaster
DE69907241D1 (de) Nmr bohrlochmessvorrichtung
DE29817986U1 (de) Meßsondenhalterung
FI981431A (fi) Mittausmenetelmä
DE69717170T2 (de) Pitot-statische sonde
FR2749942B1 (fr) Sonde velocimetrique optique

Legal Events

Date Code Title Description
8364 No opposition during term of opposition