DE69917069D1 - Plasmaunterstützte gasphasenausscheidung von konjugierten polymeren - Google Patents

Plasmaunterstützte gasphasenausscheidung von konjugierten polymeren

Info

Publication number
DE69917069D1
DE69917069D1 DE69917069T DE69917069T DE69917069D1 DE 69917069 D1 DE69917069 D1 DE 69917069D1 DE 69917069 T DE69917069 T DE 69917069T DE 69917069 T DE69917069 T DE 69917069T DE 69917069 D1 DE69917069 D1 DE 69917069D1
Authority
DE
Germany
Prior art keywords
glow discharge
evaporate
gas phase
conjugated polymers
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69917069T
Other languages
English (en)
Other versions
DE69917069T2 (de
Inventor
D Affinito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Samsung Display Co Ltd
Original Assignee
Battelle Memorial Institute Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Battelle Memorial Institute Inc filed Critical Battelle Memorial Institute Inc
Application granted granted Critical
Publication of DE69917069D1 publication Critical patent/DE69917069D1/de
Publication of DE69917069T2 publication Critical patent/DE69917069T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/513—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using plasma jets
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/62—Plasma-deposition of organic layers
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/52—Multiple coating or impregnating multiple coating or impregnating with the same composition or with compositions only differing in the concentration of the constituents, is classified as single coating or impregnation
DE69917069T 1998-12-16 1999-12-15 Plasmaunterstützte gasphasenausscheidung von konjugierten polymeren Expired - Lifetime DE69917069T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/212,781 US6207239B1 (en) 1998-12-16 1998-12-16 Plasma enhanced chemical deposition of conjugated polymer
US212781 1998-12-16
PCT/US1999/030069 WO2000035602A1 (en) 1998-12-16 1999-12-15 Plasma enhanced chemical deposition of conjugated polymer

Publications (2)

Publication Number Publication Date
DE69917069D1 true DE69917069D1 (de) 2004-06-09
DE69917069T2 DE69917069T2 (de) 2005-01-27

Family

ID=22792397

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69917069T Expired - Lifetime DE69917069T2 (de) 1998-12-16 1999-12-15 Plasmaunterstützte gasphasenausscheidung von konjugierten polymeren

Country Status (8)

Country Link
US (3) US6207239B1 (de)
EP (1) EP1144131B1 (de)
JP (1) JP2002532576A (de)
KR (1) KR20010101253A (de)
AT (1) ATE265898T1 (de)
DE (1) DE69917069T2 (de)
TW (1) TW467771B (de)
WO (1) WO2000035602A1 (de)

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US6207239B1 (en) * 1998-12-16 2001-03-27 Battelle Memorial Institute Plasma enhanced chemical deposition of conjugated polymer
US6207238B1 (en) * 1998-12-16 2001-03-27 Battelle Memorial Institute Plasma enhanced chemical deposition for high and/or low index of refraction polymers
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US6413645B1 (en) 2000-04-20 2002-07-02 Battelle Memorial Institute Ultrabarrier substrates
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US20090191342A1 (en) * 1999-10-25 2009-07-30 Vitex Systems, Inc. Method for edge sealing barrier films
US6734038B2 (en) * 2001-09-04 2004-05-11 The Trustees Of Princeton University Method of manufacturing high-mobility organic thin films using organic vapor phase deposition
US20090208754A1 (en) * 2001-09-28 2009-08-20 Vitex Systems, Inc. Method for edge sealing barrier films
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KR100729097B1 (ko) * 2005-12-28 2007-06-14 삼성에스디아이 주식회사 증발원 및 이를 이용한 박막 증착방법
KR20080080154A (ko) * 2005-12-29 2008-09-02 쓰리엠 이노베이티브 프로퍼티즈 컴파니 코팅 공정을 위한 물질의 분무화 방법
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US9337446B2 (en) * 2008-12-22 2016-05-10 Samsung Display Co., Ltd. Encapsulated RGB OLEDs having enhanced optical output
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US20100167002A1 (en) * 2008-12-30 2010-07-01 Vitex Systems, Inc. Method for encapsulating environmentally sensitive devices
KR100946598B1 (ko) 2009-04-24 2010-03-09 주식회사 엘파니 플라스마 처리를 이용한 전도성 고분자용 고체 도판트, 그의 제조 방법 및 장치, 및 전도성 고분자의 고상 도핑 방법
CN102473854B (zh) * 2009-07-31 2013-04-17 Udc爱尔兰有限责任公司 用于有机器件的沉积材料以及用于制备有机器件的方法
US8590338B2 (en) * 2009-12-31 2013-11-26 Samsung Mobile Display Co., Ltd. Evaporator with internal restriction
EP2522034A1 (de) * 2010-01-06 2012-11-14 Dow Global Technologies LLC Feuchtigkeitsresistente pv-module mit elastomerer polysiloxanschutzschicht
TWI560919B (en) * 2011-08-25 2016-12-01 Univ Nat Tsing Hua Method for enhancing optoelectronic properties of conjugated polymers
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Also Published As

Publication number Publication date
US6207239B1 (en) 2001-03-27
KR20010101253A (ko) 2001-11-14
EP1144131B1 (de) 2004-05-06
US6544600B2 (en) 2003-04-08
DE69917069T2 (de) 2005-01-27
US20020071911A1 (en) 2002-06-13
US6509065B2 (en) 2003-01-21
TW467771B (en) 2001-12-11
ATE265898T1 (de) 2004-05-15
EP1144131A1 (de) 2001-10-17
WO2000035602A1 (en) 2000-06-22
US20010033901A1 (en) 2001-10-25
JP2002532576A (ja) 2002-10-02

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