DE69902141T2 - Rotationsscheibenverdampfer - Google Patents

Rotationsscheibenverdampfer

Info

Publication number
DE69902141T2
DE69902141T2 DE69902141T DE69902141T DE69902141T2 DE 69902141 T2 DE69902141 T2 DE 69902141T2 DE 69902141 T DE69902141 T DE 69902141T DE 69902141 T DE69902141 T DE 69902141T DE 69902141 T2 DE69902141 T2 DE 69902141T2
Authority
DE
Germany
Prior art keywords
nozzles
vapor
heated surface
disk evaporator
rotation disk
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69902141T
Other languages
English (en)
Other versions
DE69902141D1 (de
Inventor
Daniel Lemme
G Langlois
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
3M Innovative Properties Co
Original Assignee
3M Innovative Properties Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 3M Innovative Properties Co filed Critical 3M Innovative Properties Co
Application granted granted Critical
Publication of DE69902141D1 publication Critical patent/DE69902141D1/de
Publication of DE69902141T2 publication Critical patent/DE69902141T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
    • C23C16/4485—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by evaporation without using carrier gas in contact with the source material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
    • B05B7/0075—Nozzle arrangements in gas streams

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
  • Artificial Filaments (AREA)
  • Physical Vapour Deposition (AREA)
  • Coating Apparatus (AREA)
  • Special Spraying Apparatus (AREA)
DE69902141T 1998-01-15 1999-01-14 Rotationsscheibenverdampfer Expired - Lifetime DE69902141T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/007,589 US6309508B1 (en) 1998-01-15 1998-01-15 Spinning disk evaporator
PCT/US1999/000767 WO1999036186A1 (en) 1998-01-15 1999-01-14 Spinning disk evaporator

Publications (2)

Publication Number Publication Date
DE69902141D1 DE69902141D1 (de) 2002-08-22
DE69902141T2 true DE69902141T2 (de) 2002-10-31

Family

ID=21727052

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69902141T Expired - Lifetime DE69902141T2 (de) 1998-01-15 1999-01-14 Rotationsscheibenverdampfer

Country Status (8)

Country Link
US (3) US6309508B1 (de)
EP (1) EP1047506B1 (de)
JP (1) JP3545705B2 (de)
KR (1) KR100352529B1 (de)
AT (1) ATE220575T1 (de)
AU (1) AU2226699A (de)
DE (1) DE69902141T2 (de)
WO (1) WO1999036186A1 (de)

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US6772535B2 (en) 2002-06-10 2004-08-10 Koslow Technologies Corporation Humidity generating system and method and use in wood drying kiln
JP5107500B2 (ja) * 2003-08-20 2012-12-26 公益財団法人国際科学振興財団 蒸着装置
GR20040100467A (el) * 2004-12-03 2006-09-21 Εθνικο Κεντρο Ερευνας Φυσικων Επιστημων "Δημοκριτος" Συστημα σταθερης με τον χρονο και επαναληψιμης παροχης ατμων απο στερεους προδρομους
US8623737B2 (en) * 2006-03-31 2014-01-07 Intel Corporation Sol-gel and mask patterning for thin-film capacitor fabrication, thin-film capacitors fabricated thereby, and systems containing same
US7666950B2 (en) * 2006-06-01 2010-02-23 Lanxess Deutschland Gmbh Process for preparing hydrogenated nitrile rubbers
KR20080007820A (ko) * 2006-07-18 2008-01-23 세메스 주식회사 박막 증착용 회전 증착원 및 이를 이용하는 박막 증착 장치
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US7617993B2 (en) * 2007-11-29 2009-11-17 Toyota Motor Corporation Devices and methods for atomizing fluids
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EP2394722A1 (de) * 2010-06-08 2011-12-14 Basf Se Verfahren zum Aufreinigen von Polyol-Dispersionen
DE102010024126A1 (de) * 2010-06-17 2011-12-22 Carl Freudenberg Kg Kolbenspeicher
KR102040758B1 (ko) 2011-08-05 2019-11-05 쓰리엠 이노베이티브 프로퍼티즈 캄파니 증기 처리 시스템 및 방법
US9240584B1 (en) * 2012-12-27 2016-01-19 Sakti3, Inc. Phase change material source for physical vapor deposition
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US20180141080A1 (en) 2015-06-30 2018-05-24 3M Innovative Properties Company Discontinuous coatings and methods of forming the same
US20190112711A1 (en) 2016-04-01 2019-04-18 3M Innovative Properties Company Roll-To-Roll Atomic Layer Deposition Apparatus and Method
CN114207182A (zh) * 2019-05-22 2022-03-18 朗姆研究公司 具有清扫的用于腐蚀性气体的蒸气储蓄器
CN115159759B (zh) * 2022-07-21 2023-05-23 遵义职业技术学院 一种辣椒深加工废水处理装置及其处理方法

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Also Published As

Publication number Publication date
EP1047506A1 (de) 2000-11-02
JP3545705B2 (ja) 2004-07-21
ATE220575T1 (de) 2002-08-15
KR20010034156A (ko) 2001-04-25
US6309508B1 (en) 2001-10-30
WO1999036186A1 (en) 1999-07-22
JP2002509027A (ja) 2002-03-26
US6887346B2 (en) 2005-05-03
EP1047506B1 (de) 2002-07-17
AU2226699A (en) 1999-08-02
US20050145474A1 (en) 2005-07-07
KR100352529B1 (ko) 2002-10-05
DE69902141D1 (de) 2002-08-22
US7300538B2 (en) 2007-11-27
US20020008009A1 (en) 2002-01-24

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Legal Events

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