DE69902141T2 - Rotationsscheibenverdampfer - Google Patents

Rotationsscheibenverdampfer

Info

Publication number
DE69902141T2
DE69902141T2 DE69902141T DE69902141T DE69902141T2 DE 69902141 T2 DE69902141 T2 DE 69902141T2 DE 69902141 T DE69902141 T DE 69902141T DE 69902141 T DE69902141 T DE 69902141T DE 69902141 T2 DE69902141 T2 DE 69902141T2
Authority
DE
Germany
Prior art keywords
nozzles
vapor
heated surface
disk evaporator
rotation disk
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69902141T
Other languages
English (en)
Other versions
DE69902141D1 (de
Inventor
Daniel Lemme
G Langlois
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
3M Innovative Properties Co
Original Assignee
3M Innovative Properties Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 3M Innovative Properties Co filed Critical 3M Innovative Properties Co
Application granted granted Critical
Publication of DE69902141D1 publication Critical patent/DE69902141D1/de
Publication of DE69902141T2 publication Critical patent/DE69902141T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
    • C23C16/4485—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by evaporation without using carrier gas in contact with the source material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
    • B05B7/0075—Nozzle arrangements in gas streams
DE69902141T 1998-01-15 1999-01-14 Rotationsscheibenverdampfer Expired - Lifetime DE69902141T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/007,589 US6309508B1 (en) 1998-01-15 1998-01-15 Spinning disk evaporator
PCT/US1999/000767 WO1999036186A1 (en) 1998-01-15 1999-01-14 Spinning disk evaporator

Publications (2)

Publication Number Publication Date
DE69902141D1 DE69902141D1 (de) 2002-08-22
DE69902141T2 true DE69902141T2 (de) 2002-10-31

Family

ID=21727052

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69902141T Expired - Lifetime DE69902141T2 (de) 1998-01-15 1999-01-14 Rotationsscheibenverdampfer

Country Status (8)

Country Link
US (3) US6309508B1 (de)
EP (1) EP1047506B1 (de)
JP (1) JP3545705B2 (de)
KR (1) KR100352529B1 (de)
AT (1) ATE220575T1 (de)
AU (1) AU2226699A (de)
DE (1) DE69902141T2 (de)
WO (1) WO1999036186A1 (de)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6309508B1 (en) * 1998-01-15 2001-10-30 3M Innovative Properties Company Spinning disk evaporator
US6620620B1 (en) * 1998-04-27 2003-09-16 Era Systems, Inc. Micro liquid evaporator
EP1174526A1 (de) * 2000-07-17 2002-01-23 Nederlandse Organisatie voor Toegepast Natuurwetenschappelijk Onderzoek TNO Kontinuierliches Abscheiden aus der Gasphase
US6772535B2 (en) 2002-06-10 2004-08-10 Koslow Technologies Corporation Humidity generating system and method and use in wood drying kiln
JP5107500B2 (ja) * 2003-08-20 2012-12-26 公益財団法人国際科学振興財団 蒸着装置
GR20040100467A (el) * 2004-12-03 2006-09-21 Εθνικο Κεντρο Ερευνας Φυσικων Επιστημων "Δημοκριτος" Συστημα σταθερης με τον χρονο και επαναληψιμης παροχης ατμων απο στερεους προδρομους
US8623737B2 (en) * 2006-03-31 2014-01-07 Intel Corporation Sol-gel and mask patterning for thin-film capacitor fabrication, thin-film capacitors fabricated thereby, and systems containing same
US7666950B2 (en) * 2006-06-01 2010-02-23 Lanxess Deutschland Gmbh Process for preparing hydrogenated nitrile rubbers
KR20080007820A (ko) * 2006-07-18 2008-01-23 세메스 주식회사 박막 증착용 회전 증착원 및 이를 이용하는 박막 증착 장치
EP1972699A1 (de) * 2007-03-20 2008-09-24 ArcelorMittal France Verfahren zur Beschichtung eines Substrats unter Vakuum
US7617993B2 (en) * 2007-11-29 2009-11-17 Toyota Motor Corporation Devices and methods for atomizing fluids
US20110132551A1 (en) * 2008-07-08 2011-06-09 Simone Klapdohr Method For Removing Non-Reacted Isocyanate From Its Reaction Product
US8172988B2 (en) 2008-10-17 2012-05-08 Distillation Technologies, Llc Distillation system with vertically oriented rotating plates
CN102742017A (zh) * 2010-01-06 2012-10-17 陶氏环球技术有限责任公司 具有弹性聚硅氧烷保护层的耐湿光伏器件
US8465628B1 (en) * 2010-05-03 2013-06-18 Richard L. Henderson Floating solar energy conversion and water distillation apparatus
EP2385291A1 (de) * 2010-05-06 2011-11-09 Eugen Seitz AG Anordnung von pulsmodulierten Schnellschaltventilen, Tanksystem, Verfahren zum Bereitstellen eines angeforderten Massenstroms und Verwendung eines Tanksystems
EP2394722A1 (de) * 2010-06-08 2011-12-14 Basf Se Verfahren zum Aufreinigen von Polyol-Dispersionen
DE102010024126A1 (de) * 2010-06-17 2011-12-22 Carl Freudenberg Kg Kolbenspeicher
US9302291B2 (en) 2011-08-05 2016-04-05 3M Innovative Properties Company Systems and methods for processing vapor
US9240584B1 (en) * 2012-12-27 2016-01-19 Sakti3, Inc. Phase change material source for physical vapor deposition
US20140318210A1 (en) * 2013-04-25 2014-10-30 E I Du Pont De Nemours And Company Method for calibrating mass flow controllers in a printing apparatus for dispensing a liquid composition on a backplane
WO2017003791A1 (en) 2015-06-30 2017-01-05 3M Innovative Properties Company Discontinuous coatings and methods of forming the same
US20190112711A1 (en) 2016-04-01 2019-04-18 3M Innovative Properties Company Roll-To-Roll Atomic Layer Deposition Apparatus and Method
WO2020236844A1 (en) * 2019-05-22 2020-11-26 Lam Research Corporation Vapor accumulator for corrosive gases with purging
CN115159759B (zh) * 2022-07-21 2023-05-23 遵义职业技术学院 一种辣椒深加工废水处理装置及其处理方法

Family Cites Families (40)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB190525552A (en) * 1905-12-08 1906-06-07 David Grove Apparatus for Evaporating Liquids
US1001660A (en) * 1910-07-28 1911-08-29 William R Macklind Rotary-disk drier.
US2343667A (en) * 1941-09-17 1944-03-07 Distillation Products Inc Centrifugal still
GB873914A (en) 1958-07-02 1961-08-02 William Mckinley Martin Improvements in or relating to surface coating application
US3258059A (en) * 1963-07-04 1966-06-28 Western Chemicals Ltd Process and apparatus for removing water from inorganic material
GB1072869A (en) 1965-02-23 1967-06-21 Edwards High Vacuum Int Ltd Improvements in or relating to methods of and apparatus for stripping liquids
US3724523A (en) * 1970-06-29 1973-04-03 Metallgesellschaft Ag Tubular structure for film evaporators
US3890205A (en) 1972-05-11 1975-06-17 Frontier Engineering Corp Rotary desalination engine and system
US3878028A (en) * 1973-08-20 1975-04-15 Envirotech Corp Method and apparatus for distributing feed stock to dryer drum
IT1029819B (it) * 1974-02-28 1979-03-20 Feres Vaclav Vaporizzatore a strato sittile
EP0056001B1 (de) * 1978-02-21 1985-12-11 Imperial Chemical Industries Plc Chemisches Verfahren auf der Oberfläche eines rotierenden Körpers mit nachfolgender Abschleuderung des Reaktionsproduktes
US4325986A (en) 1979-05-29 1982-04-20 University Of Delaware Method for continuous deposition by vacuum evaporation
US4290384A (en) 1979-10-18 1981-09-22 The Perkin-Elmer Corporation Coating apparatus
JPS57134558A (en) 1981-02-16 1982-08-19 Fuji Photo Film Co Ltd Production of organic vapor deposited thin film
US4451507A (en) * 1982-10-29 1984-05-29 Rca Corporation Automatic liquid dispensing apparatus for spinning surface of uniform thickness
FR2541379B1 (fr) 1983-02-21 1987-06-12 Renault Perfectionnement aux systemes d'injection a commande electromagnetique pour moteur diesel de type pression-temps ou l'aiguille de l'injecteur est pilotee par la decharge puis la charge d'une capacite
GB8305595D0 (en) * 1983-03-01 1983-03-30 Ici Plc Evaporator
US5032461A (en) 1983-12-19 1991-07-16 Spectrum Control, Inc. Method of making a multi-layered article
US4490774A (en) 1983-12-19 1984-12-25 General Electric Company Capacitors containing polyfunctional acrylate polymers as dielectrics
US4842893A (en) 1983-12-19 1989-06-27 Spectrum Control, Inc. High speed process for coating substrates
US4954371A (en) 1986-06-23 1990-09-04 Spectrum Control, Inc. Flash evaporation of monomer fluids
JPH07117012B2 (ja) 1986-09-05 1995-12-18 トヨタ自動車株式会社 ユニツトインジエクタ
US4833895A (en) * 1988-04-06 1989-05-30 Johnson Dwight N Spin disk evaporator
US5045155A (en) * 1989-09-11 1991-09-03 Arnold Ramsland Centrifugal distillation apparatus
US4976809A (en) 1989-12-18 1990-12-11 North American Philips Corp, Signetics Division Method of forming an aluminum conductor with highly oriented grain structure
JP2909835B2 (ja) 1990-03-15 1999-06-23 東京エレクトロン株式会社 半導体製造装置および液処理方法
US5094721A (en) * 1990-04-23 1992-03-10 Petrek John P Multiple-effect evaporation system and process
FR2669239B1 (fr) * 1990-11-21 1993-06-18 Electricite De France Appareil de distillation moleculaire a chauffage par induction.
US5409576A (en) * 1993-07-16 1995-04-25 Tleimat; Badawi Rotating evaporator device for the distillation or concentration of liquids
US5440446A (en) 1993-10-04 1995-08-08 Catalina Coatings, Inc. Acrylate coating material
JPH07287237A (ja) * 1994-04-18 1995-10-31 Chisso Corp 液晶配向膜およびそれを用いた液晶表示素子
US5624409A (en) * 1994-06-10 1997-04-29 Fluidsense Corporation Variable-pulse dynamic fluid flow controller
KR100370728B1 (ko) 1994-10-27 2003-04-07 실리콘 밸리 그룹, 인크. 기판을균일하게코팅하는방법및장치
JP3266436B2 (ja) 1994-12-28 2002-03-18 グローリー工業株式会社 硬貨入出金機
US5877895A (en) * 1995-03-20 1999-03-02 Catalina Coatings, Inc. Multicolor interference coating
US5674574A (en) 1996-05-20 1997-10-07 Micron Technology, Inc. Vapor delivery system for solid precursors and method regarding same
MY139695A (en) 1996-05-21 2009-10-30 Panasonic Corp Thin film, method and apparatus for forming the same, and electronic component incorporating the same
US6309508B1 (en) * 1998-01-15 2001-10-30 3M Innovative Properties Company Spinning disk evaporator
GB9903474D0 (en) * 1999-02-17 1999-04-07 Univ Newcastle Process for the conversion of a fluid phase substrate by dynamic heterogenous contact with an agent
GB0025552D0 (en) 2000-10-18 2000-11-29 Air Prod & Chem Process and apparatus for the generation of power

Also Published As

Publication number Publication date
JP3545705B2 (ja) 2004-07-21
US7300538B2 (en) 2007-11-27
EP1047506B1 (de) 2002-07-17
KR100352529B1 (ko) 2002-10-05
ATE220575T1 (de) 2002-08-15
AU2226699A (en) 1999-08-02
KR20010034156A (ko) 2001-04-25
EP1047506A1 (de) 2000-11-02
US20020008009A1 (en) 2002-01-24
US6887346B2 (en) 2005-05-03
US6309508B1 (en) 2001-10-30
DE69902141D1 (de) 2002-08-22
US20050145474A1 (en) 2005-07-07
JP2002509027A (ja) 2002-03-26
WO1999036186A1 (en) 1999-07-22

Similar Documents

Publication Publication Date Title
DE69902141D1 (de) Rotationsscheibenverdampfer
GB856489A (en) Improvements in methods of distillation
RU2004131823A (ru) Способ и установка для испарения реагентов, используемых для нанесения покрытий химическим осаждением из паровой фазы
JPWO2010123027A1 (ja) 蒸着処理装置および蒸着処理方法
ATE309513T1 (de) Verfahren zur schonenden gewinnung von trockenextrakten
US5269077A (en) Continuous freeze drying apparatus
JP3226593B2 (ja) 薄膜蒸発器
US5246167A (en) Droplet application device and method
US3578071A (en) Concentric evaporation-condensation, rotary, thin film, heat transfer apparatus
HU221171B1 (en) A method and apparatus for treating liquid-containing material based on organic waste products
AU2002352641A8 (en) Continuous process for controlled evaporation of colloidal solutions
CN212119060U (zh) 一种薄膜蒸发器
DE69607039D1 (de) Rotierender wärmeübertragungskörper zur verdampfung von flüssigkeiten oder zur trocknung von pumpfähigen produkten
JPS6470168A (en) Liquid chemical applicator
CN209137998U (zh) 一种刮板浓缩器
KR100394798B1 (ko) 가열식 감압 건조장치
US3282326A (en) Evaporating method and apparatus therefor of the rotating drum type
CA2398626C (en) Apparatus and method for applying liquid droplets to a particular mater ial
JPS63141603A (ja) 遠心薄膜乾燥機
KR200233117Y1 (ko) 가열식 감압 건조장치
SU393974A1 (ru) Камера протравливания
JP2002206856A (ja) 乾燥機の熱交換装置
RU2353351C1 (ru) Способ выделения из жидкой среды термочувствительных лекарственных препаратов и установка для его осуществления
GB2359807A (en) Sewage sludge dewatering plant
RU2101008C1 (ru) Способ получения мелкодисперсных порошков с равномерным распределением жидкой фазы по поверхности частиц и способ получения инсектоакарицидных дустов

Legal Events

Date Code Title Description
8364 No opposition during term of opposition