DE69835659D1 - Mehrschichtiges keramisches Substrat mit einem passiven Bauelement, sowie Herstellungsverfahren - Google Patents

Mehrschichtiges keramisches Substrat mit einem passiven Bauelement, sowie Herstellungsverfahren

Info

Publication number
DE69835659D1
DE69835659D1 DE69835659T DE69835659T DE69835659D1 DE 69835659 D1 DE69835659 D1 DE 69835659D1 DE 69835659 T DE69835659 T DE 69835659T DE 69835659 T DE69835659 T DE 69835659T DE 69835659 D1 DE69835659 D1 DE 69835659D1
Authority
DE
Germany
Prior art keywords
manufacturing
ceramic substrate
multilayer ceramic
passive component
passive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69835659T
Other languages
English (en)
Other versions
DE69835659T2 (de
Inventor
Hirofumi Sunahara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of DE69835659D1 publication Critical patent/DE69835659D1/de
Application granted granted Critical
Publication of DE69835659T2 publication Critical patent/DE69835659T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
    • H01L25/50Multistep manufacturing processes of assemblies consisting of devices, each device being of a type provided for in group H01L27/00 or H01L29/00
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/46Manufacturing multilayer circuits
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/48Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
    • H01L21/4814Conductive parts
    • H01L21/4846Leads on or in insulating or insulated substrates, e.g. metallisation
    • H01L21/4857Multilayer substrates
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/52Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/538Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames the interconnection structure between a plurality of semiconductor chips being formed on, or in, insulating substrates
    • H01L23/5383Multilayer substrates
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/58Structural electrical arrangements for semiconductor devices not otherwise provided for, e.g. in combination with batteries
    • H01L23/64Impedance arrangements
    • H01L23/642Capacitive arrangements
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/58Structural electrical arrangements for semiconductor devices not otherwise provided for, e.g. in combination with batteries
    • H01L23/64Impedance arrangements
    • H01L23/645Inductive arrangements
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/16Printed circuits incorporating printed electric components, e.g. printed resistor, capacitor, inductor
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/18Printed circuits structurally associated with non-printed electric components
    • H05K1/182Printed circuits structurally associated with non-printed electric components associated with components mounted in the printed circuit board, e.g. insert mounted components [IMC]
    • H05K1/185Components encapsulated in the insulating substrate of the printed circuit or incorporated in internal layers of a multilayer circuit
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/095Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00 with a principal constituent of the material being a combination of two or more materials provided in the groups H01L2924/013 - H01L2924/0715
    • H01L2924/097Glass-ceramics, e.g. devitrified glass
    • H01L2924/09701Low temperature co-fired ceramic [LTCC]
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/10Details of components or other objects attached to or integrated in a printed circuit board
    • H05K2201/10613Details of electrical connections of non-printed components, e.g. special leads
    • H05K2201/10621Components characterised by their electrical contacts
    • H05K2201/10636Leadless chip, e.g. chip capacitor or resistor
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/46Manufacturing multilayer circuits
    • H05K3/4611Manufacturing multilayer circuits by laminating two or more circuit boards
    • H05K3/4626Manufacturing multilayer circuits by laminating two or more circuit boards characterised by the insulating layers or materials
    • H05K3/4629Manufacturing multilayer circuits by laminating two or more circuit boards characterised by the insulating layers or materials laminating inorganic sheets comprising printed circuits, e.g. green ceramic sheets
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49002Electrical device making
    • Y10T29/49117Conductor or circuit manufacturing
    • Y10T29/49124On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/4913Assembling to base an electrical component, e.g., capacitor, etc.
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/24Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24802Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]
    • Y10T428/24926Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.] including ceramic, glass, porcelain or quartz layer
DE69835659T 1998-01-06 1998-12-30 Mehrschichtiges keramisches Substrat mit einem passiven Bauelement, sowie Herstellungsverfahren Expired - Lifetime DE69835659T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP58498 1998-01-06
JP00058498A JP3322199B2 (ja) 1998-01-06 1998-01-06 多層セラミック基板およびその製造方法

Publications (2)

Publication Number Publication Date
DE69835659D1 true DE69835659D1 (de) 2006-10-05
DE69835659T2 DE69835659T2 (de) 2007-09-20

Family

ID=11477776

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69835659T Expired - Lifetime DE69835659T2 (de) 1998-01-06 1998-12-30 Mehrschichtiges keramisches Substrat mit einem passiven Bauelement, sowie Herstellungsverfahren

Country Status (5)

Country Link
US (1) US6153290A (de)
EP (1) EP0929207B1 (de)
JP (1) JP3322199B2 (de)
KR (1) KR100352780B1 (de)
DE (1) DE69835659T2 (de)

Families Citing this family (80)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999056510A1 (fr) * 1998-04-24 1999-11-04 Matsushita Electric Industrial Co., Ltd. Procede servant a fabriquer un substrat en ceramique possedant des couches multiples
US6228196B1 (en) * 1998-06-05 2001-05-08 Murata Manufacturing Co., Ltd. Method of producing a multi-layer ceramic substrate
US6377464B1 (en) * 1999-01-29 2002-04-23 Conexant Systems, Inc. Multiple chip module with integrated RF capabilities
WO2000063970A1 (fr) * 1999-04-16 2000-10-26 Matsushita Electric Industrial Co., Ltd. Composant modulaire et son procede de production
KR20070101408A (ko) * 1999-09-02 2007-10-16 이비덴 가부시키가이샤 프린트배선판 및 프린트배선판의 제조방법
KR100890475B1 (ko) * 1999-09-02 2009-03-26 이비덴 가부시키가이샤 프린트배선판 및 그 제조방법
JP3646587B2 (ja) * 1999-10-27 2005-05-11 株式会社村田製作所 多層セラミック基板およびその製造方法
US6535398B1 (en) * 2000-03-07 2003-03-18 Fujitsu Limited Multichip module substrates with buried discrete capacitors and components and methods for making
US6841740B2 (en) * 2000-06-14 2005-01-11 Ngk Spark Plug Co., Ltd. Printed-wiring substrate and method for fabricating the same
EP1231825A4 (de) * 2000-06-29 2005-09-28 Mitsubishi Electric Corp Mehrschichtiges substratmodul und tragbares, drahtloses terminal
US6407929B1 (en) * 2000-06-29 2002-06-18 Intel Corporation Electronic package having embedded capacitors and method of fabrication therefor
CN1196392C (zh) * 2000-07-31 2005-04-06 日本特殊陶业株式会社 布线基板及其制造方法
US6600385B2 (en) * 2000-08-21 2003-07-29 Tdk Corporation Front end module for mobile communications apparatus
TW471067B (en) * 2000-08-31 2002-01-01 Advanced Semiconductor Eng Integrated circuit package board which integrates de-coupled capacitor
JP2002084065A (ja) * 2000-09-07 2002-03-22 Murata Mfg Co Ltd 多層セラミック基板およびその製造方法ならびに電子装置
US6388207B1 (en) 2000-12-29 2002-05-14 Intel Corporation Electronic assembly with trench structures and methods of manufacture
US20020158305A1 (en) * 2001-01-05 2002-10-31 Sidharth Dalmia Organic substrate having integrated passive components
JP2002246503A (ja) * 2001-02-16 2002-08-30 Philips Japan Ltd 電子部品及びその製造方法
JP2002252297A (ja) * 2001-02-23 2002-09-06 Hitachi Ltd 多層回路基板を用いた電子回路装置
JP3716783B2 (ja) * 2001-11-22 2005-11-16 株式会社村田製作所 セラミック多層基板の製造方法及び半導体装置
US6711029B2 (en) * 2002-05-21 2004-03-23 Cts Corporation Low temperature co-fired ceramic with improved shrinkage control
US7260890B2 (en) * 2002-06-26 2007-08-28 Georgia Tech Research Corporation Methods for fabricating three-dimensional all organic interconnect structures
US6987307B2 (en) 2002-06-26 2006-01-17 Georgia Tech Research Corporation Stand-alone organic-based passive devices
US6900708B2 (en) * 2002-06-26 2005-05-31 Georgia Tech Research Corporation Integrated passive devices fabricated utilizing multi-layer, organic laminates
TW546800B (en) * 2002-06-27 2003-08-11 Via Tech Inc Integrated moduled board embedded with IC chip and passive device and its manufacturing method
US6876535B2 (en) * 2002-10-10 2005-04-05 Matsushita Electric Industrial Co., Ltd. Ceramic capacitor, method for producing the same, and dielectric multilayer device
US20040108134A1 (en) * 2002-10-11 2004-06-10 Borland William J. Printed wiring boards having low inductance embedded capacitors and methods of making same
US6806793B2 (en) * 2002-12-13 2004-10-19 International Business Machines Corporation MLC frequency selective circuit structures
US7489914B2 (en) * 2003-03-28 2009-02-10 Georgia Tech Research Corporation Multi-band RF transceiver with passive reuse in organic substrates
US7626828B1 (en) * 2003-07-30 2009-12-01 Teradata Us, Inc. Providing a resistive element between reference plane layers in a circuit board
US8345433B2 (en) * 2004-07-08 2013-01-01 Avx Corporation Heterogeneous organic laminate stack ups for high frequency applications
JP4310468B2 (ja) * 2004-10-29 2009-08-12 株式会社村田製作所 セラミック多層基板及びその製造方法
US7423608B2 (en) * 2005-12-20 2008-09-09 Motorola, Inc. High impedance electromagnetic surface and method
US7342308B2 (en) 2005-12-20 2008-03-11 Atmel Corporation Component stacking for integrated circuit electronic package
US7821122B2 (en) * 2005-12-22 2010-10-26 Atmel Corporation Method and system for increasing circuitry interconnection and component capacity in a multi-component package
US7843302B2 (en) * 2006-05-08 2010-11-30 Ibiden Co., Ltd. Inductor and electric power supply using it
US7439840B2 (en) 2006-06-27 2008-10-21 Jacket Micro Devices, Inc. Methods and apparatuses for high-performing multi-layer inductors
US7808434B2 (en) * 2006-08-09 2010-10-05 Avx Corporation Systems and methods for integrated antennae structures in multilayer organic-based printed circuit devices
US7989895B2 (en) 2006-11-15 2011-08-02 Avx Corporation Integration using package stacking with multi-layer organic substrates
KR100826410B1 (ko) * 2006-12-29 2008-04-29 삼성전기주식회사 캐패시터 및 이를 이용한 캐패시터 내장형 다층 기판 구조
KR100896601B1 (ko) * 2007-11-05 2009-05-08 삼성전기주식회사 무수축 세라믹 기판의 제조방법 및 이를 이용한 무수축세라믹 기판
US20090115022A1 (en) * 2007-11-06 2009-05-07 Nec Electronics Coroporation Semiconductor device
US8064214B2 (en) * 2008-01-04 2011-11-22 Dialogic Corporation Press fit passive component
KR101004840B1 (ko) * 2008-09-05 2010-12-28 삼성전기주식회사 캐비티를 갖는 다층 세라믹 기판의 제조방법
US8198548B2 (en) * 2009-07-23 2012-06-12 Lexmark International, Inc. Z-directed capacitor components for printed circuit boards
US8198547B2 (en) * 2009-07-23 2012-06-12 Lexmark International, Inc. Z-directed pass-through components for printed circuit boards
US8278568B2 (en) * 2009-07-23 2012-10-02 Lexmark International, Inc. Z-directed variable value components for printed circuit boards
US8237061B2 (en) * 2009-07-23 2012-08-07 Lexmark International, Inc. Z-directed filter components for printed circuit boards
US20110017502A1 (en) * 2009-07-23 2011-01-27 Keith Bryan Hardin Z-Directed Components for Printed Circuit Boards
US8735734B2 (en) * 2009-07-23 2014-05-27 Lexmark International, Inc. Z-directed delay line components for printed circuit boards
US20110017504A1 (en) * 2009-07-23 2011-01-27 Keith Bryan Hardin Z-Directed Ferrite Bead Components for Printed Circuit Boards
US8273996B2 (en) * 2009-07-23 2012-09-25 Lexmark International, Inc. Z-directed connector components for printed circuit boards
US20110017581A1 (en) * 2009-07-23 2011-01-27 Keith Bryan Hardin Z-Directed Switch Components for Printed Circuit Boards
JP5305042B2 (ja) 2010-07-22 2013-10-02 Tdk株式会社 積層型電子部品の製造方法
US9107306B2 (en) * 2010-10-14 2015-08-11 Panasonic Intellectual Property Management Co., Ltd. Hybrid substrate, method for manufacturing the same, and semiconductor integrated circuit package
US8752280B2 (en) 2011-09-30 2014-06-17 Lexmark International, Inc. Extrusion process for manufacturing a Z-directed component for a printed circuit board
US8790520B2 (en) 2011-08-31 2014-07-29 Lexmark International, Inc. Die press process for manufacturing a Z-directed component for a printed circuit board
US9009954B2 (en) 2011-08-31 2015-04-21 Lexmark International, Inc. Process for manufacturing a Z-directed component for a printed circuit board using a sacrificial constraining material
US9078374B2 (en) 2011-08-31 2015-07-07 Lexmark International, Inc. Screening process for manufacturing a Z-directed component for a printed circuit board
US8658245B2 (en) 2011-08-31 2014-02-25 Lexmark International, Inc. Spin coat process for manufacturing a Z-directed component for a printed circuit board
US8943684B2 (en) * 2011-08-31 2015-02-03 Lexmark International, Inc. Continuous extrusion process for manufacturing a Z-directed component for a printed circuit board
US8822838B2 (en) 2012-03-29 2014-09-02 Lexmark International, Inc. Z-directed printed circuit board components having conductive channels for reducing radiated emissions
US8912452B2 (en) 2012-03-29 2014-12-16 Lexmark International, Inc. Z-directed printed circuit board components having different dielectric regions
US8830692B2 (en) 2012-03-29 2014-09-09 Lexmark International, Inc. Ball grid array systems for surface mounting an integrated circuit using a Z-directed printed circuit board component
US8822840B2 (en) 2012-03-29 2014-09-02 Lexmark International, Inc. Z-directed printed circuit board components having conductive channels for controlling transmission line impedance
US9613917B2 (en) 2012-03-30 2017-04-04 Taiwan Semiconductor Manufacturing Company, Ltd. Package-on-package (PoP) device with integrated passive device in a via
US9165887B2 (en) 2012-09-10 2015-10-20 Taiwan Semiconductor Manufacturing Company, Ltd. Semiconductor device with discrete blocks
US9391041B2 (en) 2012-10-19 2016-07-12 Taiwan Semiconductor Manufacturing Company, Ltd. Fan-out wafer level package structure
JP2014192225A (ja) * 2013-03-26 2014-10-06 Ngk Spark Plug Co Ltd 配線基板
US10014843B2 (en) * 2013-08-08 2018-07-03 Zhuhai Advanced Chip Carriers & Electronic Substrate Solutions Technologies Co. Ltd. Multilayer electronic structures with embedded filters
US9373527B2 (en) 2013-10-30 2016-06-21 Taiwan Semiconductor Manufacturing Company, Ltd. Chip on package structure and method
JP2015135870A (ja) * 2014-01-16 2015-07-27 富士通株式会社 インダクタ装置及びインダクタ装置の製造方法
US20160055976A1 (en) * 2014-08-25 2016-02-25 Qualcomm Incorporated Package substrates including embedded capacitors
US10062838B2 (en) * 2015-03-31 2018-08-28 Taiwan Semiconductor Manufacturing Company, Ltd. Co-fired passive integrated circuit devices
JP2016207940A (ja) * 2015-04-27 2016-12-08 イビデン株式会社 電子部品内蔵配線板及びその製造方法
WO2016189609A1 (ja) * 2015-05-25 2016-12-01 オリンパス株式会社 立体配線板および立体配線板の製造方法
US9748227B2 (en) * 2015-07-15 2017-08-29 Apple Inc. Dual-sided silicon integrated passive devices
US9839131B2 (en) * 2015-10-21 2017-12-05 International Business Machines Corporation Embedding a discrete electrical device in a printed circuit board
WO2018063279A1 (en) * 2016-09-30 2018-04-05 Intel Corporation Vertical embedded component in a printed circuit board blind hole
CN112738994B (zh) * 2020-11-24 2022-12-09 鹤山市世拓电子科技有限公司 一种内嵌功率器件的印刷电路板

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4109296A (en) * 1977-08-01 1978-08-22 Ncr Corporation Machine insertable circuit board electronic component
JPS60166289A (ja) * 1984-02-03 1985-08-29 松下電器産業株式会社 アルミナ回路基板
JPH0632378B2 (ja) * 1985-06-14 1994-04-27 株式会社村田製作所 電子部品内蔵多層セラミック基板
JPH01179741A (ja) * 1988-01-12 1989-07-17 Asahi Glass Co Ltd ガラスセラミックス組成物
US4811164A (en) * 1988-03-28 1989-03-07 American Telephone And Telegraph Company, At&T Bell Laboratories Monolithic capacitor-varistor
US4899118A (en) * 1988-12-27 1990-02-06 Hughes Aircraft Company Low temperature cofired ceramic packages for microwave and millimeter wave gallium arsenide integrated circuits
DE4030055A1 (de) * 1990-09-22 1992-03-26 Bosch Gmbh Robert Verfahren zum herstellen einer schaltung
JP2753892B2 (ja) * 1990-09-29 1998-05-20 京セラ株式会社 コンデンサー内蔵複合回路基板
US5055966A (en) * 1990-12-17 1991-10-08 Hughes Aircraft Company Via capacitors within multi-layer, 3 dimensional structures/substrates
JPH04280496A (ja) * 1991-03-07 1992-10-06 Narumi China Corp コンデンサ内蔵セラミック多層回路基板及びその製造方法
EP0547807A3 (en) * 1991-12-16 1993-09-22 General Electric Company Packaged electronic system
US5384434A (en) * 1992-03-02 1995-01-24 Murata Manufacturing Co., Ltd. Multilayer ceramic circuit board
EP0563873B1 (de) * 1992-04-03 1998-06-03 Matsushita Electric Industrial Co., Ltd. Keramisches Mehrschicht-Substrat für hohe Frequenzen
US5661882A (en) * 1995-06-30 1997-09-02 Ferro Corporation Method of integrating electronic components into electronic circuit structures made using LTCC tape
JPH0992983A (ja) * 1995-07-17 1997-04-04 Sumitomo Kinzoku Electro Device:Kk セラミック多層基板の製造方法
JPH0992978A (ja) * 1995-09-21 1997-04-04 Sumitomo Metal Mining Co Ltd コンデンサ内蔵ガラスセラミック基板
US5708570A (en) * 1995-10-11 1998-01-13 Hughes Aircraft Company Shrinkage-matched circuit package utilizing low temperature co-fired ceramic structures
US5708559A (en) * 1995-10-27 1998-01-13 International Business Machines Corporation Precision analog metal-metal capacitor
US5757611A (en) * 1996-04-12 1998-05-26 Norhtrop Grumman Corporation Electronic package having buried passive components
US6021050A (en) * 1998-12-02 2000-02-01 Bourns, Inc. Printed circuit boards with integrated passive components and method for making same

Also Published As

Publication number Publication date
US6153290A (en) 2000-11-28
JPH11195873A (ja) 1999-07-21
KR19990067739A (ko) 1999-08-25
DE69835659T2 (de) 2007-09-20
EP0929207A2 (de) 1999-07-14
JP3322199B2 (ja) 2002-09-09
KR100352780B1 (ko) 2002-09-16
EP0929207B1 (de) 2006-08-23
EP0929207A3 (de) 2000-03-08

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