DE69829986D1 - Testkarte zur wafer-prüfung - Google Patents

Testkarte zur wafer-prüfung

Info

Publication number
DE69829986D1
DE69829986D1 DE69829986T DE69829986T DE69829986D1 DE 69829986 D1 DE69829986 D1 DE 69829986D1 DE 69829986 T DE69829986 T DE 69829986T DE 69829986 T DE69829986 T DE 69829986T DE 69829986 D1 DE69829986 D1 DE 69829986D1
Authority
DE
Germany
Prior art keywords
membrane
contact
probe card
testing
test card
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69829986T
Other languages
English (en)
Other versions
DE69829986T2 (de
Inventor
R Hembree
M Farnworth
Salman Akram
G Wood
Patrick Doherty
J Krivy
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Micron Technology Inc
Original Assignee
Micron Technology Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Micron Technology Inc filed Critical Micron Technology Inc
Publication of DE69829986D1 publication Critical patent/DE69829986D1/de
Application granted granted Critical
Publication of DE69829986T2 publication Critical patent/DE69829986T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
DE69829986T 1997-02-11 1998-02-11 Testkarte zur wafer-prüfung Expired - Lifetime DE69829986T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US08/797,719 US6060891A (en) 1997-02-11 1997-02-11 Probe card for semiconductor wafers and method and system for testing wafers
US797719 1997-02-11
PCT/US1998/003432 WO1998035238A1 (en) 1997-02-11 1998-02-11 Probe card and system for testing wafers

Publications (2)

Publication Number Publication Date
DE69829986D1 true DE69829986D1 (de) 2005-06-02
DE69829986T2 DE69829986T2 (de) 2006-02-23

Family

ID=25171622

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69829986T Expired - Lifetime DE69829986T2 (de) 1997-02-11 1998-02-11 Testkarte zur wafer-prüfung

Country Status (6)

Country Link
US (3) US6060891A (de)
EP (3) EP1018023B1 (de)
AT (1) ATE294396T1 (de)
AU (1) AU6662998A (de)
DE (1) DE69829986T2 (de)
WO (1) WO1998035238A1 (de)

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Publication number Publication date
EP1411360A2 (de) 2004-04-21
EP1411359A1 (de) 2004-04-21
EP1018023A1 (de) 2000-07-12
US6060891A (en) 2000-05-09
EP1411360A3 (de) 2004-04-28
EP1018023A4 (de) 2003-07-23
DE69829986T2 (de) 2006-02-23
WO1998035238A1 (en) 1998-08-13
AU6662998A (en) 1998-08-26
EP1018023B1 (de) 2005-04-27
US6275052B1 (en) 2001-08-14
US6359456B1 (en) 2002-03-19
ATE294396T1 (de) 2005-05-15

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