DE69826837D1 - Inspektionsverfahren - Google Patents
InspektionsverfahrenInfo
- Publication number
- DE69826837D1 DE69826837D1 DE69826837T DE69826837T DE69826837D1 DE 69826837 D1 DE69826837 D1 DE 69826837D1 DE 69826837 T DE69826837 T DE 69826837T DE 69826837 T DE69826837 T DE 69826837T DE 69826837 D1 DE69826837 D1 DE 69826837D1
- Authority
- DE
- Germany
- Prior art keywords
- inspection procedures
- inspection
- procedures
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000007689 inspection Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
- G01N21/95684—Patterns showing highly reflecting parts, e.g. metallic elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
- H05K13/08—Monitoring manufacture of assemblages
- H05K13/081—Integration of optical monitoring devices in assembly lines; Processes using optical monitoring devices specially adapted for controlling devices or machines in assembly lines
- H05K13/0817—Monitoring of soldering processes
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/807,397 US5943125A (en) | 1997-02-26 | 1997-02-26 | Ring illumination apparatus for illuminating reflective elements on a generally planar surface |
US08/824,173 US5926557A (en) | 1997-02-26 | 1997-03-26 | Inspection method |
PCT/US1998/001803 WO1998038498A1 (en) | 1997-02-26 | 1998-01-29 | Inspection method |
Publications (1)
Publication Number | Publication Date |
---|---|
DE69826837D1 true DE69826837D1 (de) | 2004-11-11 |
Family
ID=27123007
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69826837T Expired - Lifetime DE69826837D1 (de) | 1997-02-26 | 1998-01-29 | Inspektionsverfahren |
Country Status (8)
Country | Link |
---|---|
US (1) | US5926557A (de) |
EP (2) | EP1174708A1 (de) |
JP (1) | JP2002515123A (de) |
KR (1) | KR20000075763A (de) |
AU (1) | AU734389B2 (de) |
CA (1) | CA2282498A1 (de) |
DE (1) | DE69826837D1 (de) |
WO (1) | WO1998038498A1 (de) |
Families Citing this family (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6201892B1 (en) * | 1997-02-26 | 2001-03-13 | Acuity Imaging, Llc | System and method for arithmetic operations for electronic package inspection |
US6072898A (en) * | 1998-01-16 | 2000-06-06 | Beaty; Elwin M. | Method and apparatus for three dimensional inspection of electronic components |
US6289235B1 (en) * | 1998-03-05 | 2001-09-11 | Wake Forest University | Method and system for creating three-dimensional images using tomosynthetic computed tomography |
EP2264671B1 (de) * | 1998-04-07 | 2016-02-10 | Omron Corporation | Vorrichtung und verfahren zur bildverarbeitung, medium auf welchem die bildverarbeitung gespeichert ist und inspektionsvorrichtung |
ATE322665T1 (de) * | 1999-07-13 | 2006-04-15 | Beaty Elwin M | Verfahren und apparat für die dreidimensionale inspektion von elektronischen komponenten |
US6549647B1 (en) * | 2000-01-07 | 2003-04-15 | Cyberoptics Corporation | Inspection system with vibration resistant video capture |
KR20020000583A (ko) * | 2000-06-23 | 2002-01-05 | 최종배 | 3차원영상측정시스템 |
US6621573B2 (en) * | 2001-02-27 | 2003-09-16 | Emhart Glass, S.A. | Glass container inspection machine |
US7024031B1 (en) | 2001-10-23 | 2006-04-04 | August Technology Corp. | System and method for inspection using off-angle lighting |
US20040236594A1 (en) * | 2003-05-22 | 2004-11-25 | Clay Fisher | Methods and apparatuses for sequestering content |
WO2004107120A2 (en) * | 2003-05-22 | 2004-12-09 | Sony Electronics Inc. | Methods and apparatuses for sequestering content |
US7330528B2 (en) | 2003-08-19 | 2008-02-12 | Agilent Technologies, Inc. | System and method for parallel image reconstruction of multiple depth layers of an object under inspection from radiographic images |
KR100564259B1 (ko) * | 2003-12-22 | 2006-03-29 | 재단법인 포항산업과학연구원 | 영상처리방법을 이용한 온라인 봉강재 표면시험검사장치 |
WO2005118212A1 (en) * | 2004-06-01 | 2005-12-15 | Original Solutions Inc. | Solder mask enhancement and method of inspecting printed circuit board assemblies |
JP4365292B2 (ja) * | 2004-09-02 | 2009-11-18 | 株式会社カイジョー | ワイヤボンディングにおけるボール圧着厚の測定方法 |
US7344273B2 (en) | 2005-03-22 | 2008-03-18 | Binary Works, Inc. | Ring light with user manipulable control |
US20060291715A1 (en) * | 2005-06-24 | 2006-12-28 | Mv Research Limited | Machine vision system and method |
AT502810B1 (de) * | 2005-11-17 | 2007-06-15 | Arc Seibersdorf Res Gmbh | Verfahren zur optischen prüfung von gegenständen |
KR100763859B1 (ko) * | 2006-06-16 | 2007-10-05 | 한국 고덴시 주식회사 | 칩 발광다이오드 패키지 |
SG138491A1 (en) * | 2006-06-21 | 2008-01-28 | Generic Power Pte Ltd | Method and apparatus for 3-dimensional vision and inspection of ball and like protrusions of electronic components |
US20080199068A1 (en) * | 2007-01-10 | 2008-08-21 | Duquette David W | Inspection System |
CN101711353A (zh) * | 2007-06-12 | 2010-05-19 | 1317442艾伯塔有限公司 | 用于相机传感器灰尘检测的放大镜和照明组件 |
KR102100211B1 (ko) * | 2015-09-10 | 2020-04-13 | 주식회사 히타치하이테크 | 검사 장치 |
US10499487B2 (en) | 2015-10-05 | 2019-12-03 | Scalia Lighting Technologies LLC | Light-emitting diode (LED) lighting fixture solutions and methods |
CN109187585A (zh) * | 2018-10-22 | 2019-01-11 | 珠海格力智能装备有限公司 | 激光图标信息获取方法以及装置 |
Family Cites Families (49)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4028728A (en) * | 1976-04-02 | 1977-06-07 | Western Electric Company, Inc. | Method of and video system for identifying different light-reflective surface areas on articles |
US4688935A (en) * | 1983-06-24 | 1987-08-25 | Morton Thiokol, Inc. | Plasma spectroscopic analysis of organometallic compounds |
JPS60249204A (ja) * | 1984-05-24 | 1985-12-09 | 肇産業株式会社 | 照明装置 |
JPS61293657A (ja) * | 1985-06-21 | 1986-12-24 | Matsushita Electric Works Ltd | 半田付け外観検査方法 |
US4695157A (en) * | 1985-10-11 | 1987-09-22 | Benchmark Industries Incorporated | Solder process inspection diffuser assembly |
US4688939A (en) * | 1985-12-27 | 1987-08-25 | At&T Technologies, Inc. | Method and apparatus for inspecting articles |
US5072127A (en) * | 1987-10-09 | 1991-12-10 | Pressco, Inc. | Engineered video inspecting lighting array |
US4972093A (en) * | 1987-10-09 | 1990-11-20 | Pressco Inc. | Inspection lighting system |
DE68925901T2 (de) * | 1988-05-09 | 1996-11-14 | Omron Tateisi Electronics Co | Substrat-prüfungsvorrichtung |
US5051872A (en) * | 1988-07-19 | 1991-09-24 | Texas Instruments Incorporated | Hemispherical non-glare illuminator |
US5247344A (en) * | 1988-10-03 | 1993-09-21 | Hughes Aircraft Company | Optical inspection system for solder joints and inspection method |
IL91492A (en) * | 1988-10-03 | 1994-07-31 | Hughes Aircraft Co | Optical inspection system for soldering joints and inspection method |
JP2771190B2 (ja) * | 1988-10-07 | 1998-07-02 | 株式会社日立製作所 | スルーホール充填状態検査方法およびその装置 |
US5030008A (en) * | 1988-10-11 | 1991-07-09 | Kla Instruments, Corporation | Method and apparatus for the automated analysis of three-dimensional objects |
US5039868A (en) * | 1988-11-24 | 1991-08-13 | Omron Corporation | Method of and apparatus for inspecting printed circuit boards and the like |
JPH02148180A (ja) * | 1988-11-29 | 1990-06-07 | Nippon Seiko Kk | パターン検査方法及び装置 |
US4988202A (en) * | 1989-06-28 | 1991-01-29 | Westinghouse Electric Corp. | Solder joint inspection system and method |
US5023916A (en) * | 1989-08-28 | 1991-06-11 | Hewlett-Packard Company | Method for inspecting the leads of electrical components on surface mount printed circuit boards |
US5058178A (en) * | 1989-12-21 | 1991-10-15 | At&T Bell Laboratories | Method and apparatus for inspection of specular, three-dimensional features |
US5298989A (en) * | 1990-03-12 | 1994-03-29 | Fujitsu Limited | Method of and apparatus for multi-image inspection of bonding wire |
US5118193A (en) * | 1990-03-19 | 1992-06-02 | Texas Instruments Incorporated | Apparatus and method for inspection |
JP2953736B2 (ja) * | 1990-03-20 | 1999-09-27 | 松下電器産業株式会社 | 半田の形状検査方法 |
BE1003136A3 (nl) * | 1990-03-23 | 1991-12-03 | Icos Vision Systems Nv | Werkwijze en inrichting voor het bepalen van een positie van ten minste een aansluitpen van een elektronische component. |
US5137362A (en) * | 1990-03-26 | 1992-08-11 | Motorola, Inc. | Automatic package inspection method |
US5064291A (en) * | 1990-04-03 | 1991-11-12 | Hughes Aircraft Company | Method and apparatus for inspection of solder joints utilizing shape determination from shading |
US5495424A (en) * | 1990-04-18 | 1996-02-27 | Matsushita Electric Industrial Co., Ltd. | Method and apparatus for inspecting solder portions |
JP3072998B2 (ja) * | 1990-04-18 | 2000-08-07 | 株式会社日立製作所 | はんだ付け状態検査方法及びその装置 |
US5115475A (en) * | 1990-06-04 | 1992-05-19 | Motorola, Inc. | Automatic semiconductor package inspection method |
US5257714A (en) * | 1990-11-20 | 1993-11-02 | International Business Machines Corporation | Method and apparatus for electronic component lead inspection |
US5598345A (en) * | 1990-11-29 | 1997-01-28 | Matsushita Electric Industrial Co., Ltd. | Method and apparatus for inspecting solder portions |
US5185811A (en) * | 1990-12-27 | 1993-02-09 | International Business Machines Corporation | Automated visual inspection of electronic component leads prior to placement |
US5097516A (en) * | 1991-02-28 | 1992-03-17 | At&T Bell Laboratories | Technique for illuminating a surface with a gradient intensity line of light to achieve enhanced two-dimensional imaging |
US5127727A (en) * | 1991-05-30 | 1992-07-07 | Northern Telecom Limited | Illumination devices for inspection systems |
JP3123146B2 (ja) * | 1991-09-11 | 2001-01-09 | トヨタ自動車株式会社 | 溶接ビードの品質検査装置 |
JP2981941B2 (ja) * | 1991-12-02 | 1999-11-22 | 株式会社新川 | ボンデイングワイヤ検査装置 |
US5302836A (en) * | 1992-07-16 | 1994-04-12 | Bernard Siu | High speed image acquisition for microelectronics inspection |
US5420689A (en) * | 1993-03-01 | 1995-05-30 | Siu; Bernard | High speed illumination system for microelectronics inspection |
US5424838A (en) * | 1993-03-01 | 1995-06-13 | Siu; Bernard | Microelectronics inspection system |
US5461417A (en) * | 1993-02-16 | 1995-10-24 | Northeast Robotics, Inc. | Continuous diffuse illumination method and apparatus |
US5406372A (en) * | 1993-04-16 | 1995-04-11 | Modular Vision Systems Inc. | QFP lead quality inspection system and method |
JP3051279B2 (ja) * | 1993-05-13 | 2000-06-12 | シャープ株式会社 | バンプ外観検査方法およびバンプ外観検査装置 |
EP0638801B1 (de) * | 1993-08-12 | 1998-12-23 | International Business Machines Corporation | Verfahren zur Inspektion vom Verbindungskugel-Satz eines intergrierten Schaltungsmoduls |
US5519496A (en) * | 1994-01-07 | 1996-05-21 | Applied Intelligent Systems, Inc. | Illumination system and method for generating an image of an object |
JP2919284B2 (ja) * | 1994-02-23 | 1999-07-12 | 松下電工株式会社 | 物体認識方法 |
US5418879A (en) * | 1994-04-04 | 1995-05-23 | Chrysler Corporation | Distributed light delivery system |
US5581632A (en) * | 1994-05-02 | 1996-12-03 | Cognex Corporation | Method and apparatus for ball bond inspection system |
JP3235009B2 (ja) * | 1994-09-09 | 2001-12-04 | 株式会社新川 | ボンディングワイヤ検査方法 |
US5539485A (en) * | 1994-10-31 | 1996-07-23 | White; Timothy P. | Illumination device for providing continuous diffuse light on and off an observing axis |
US5604550A (en) * | 1994-10-31 | 1997-02-18 | Northeast Robotics, Inc. | Illumination device for indirectly illuminating an object with continuous diffuse light |
-
1997
- 1997-03-26 US US08/824,173 patent/US5926557A/en not_active Expired - Lifetime
-
1998
- 1998-01-29 EP EP01118653A patent/EP1174708A1/de not_active Ceased
- 1998-01-29 AU AU63182/98A patent/AU734389B2/en not_active Ceased
- 1998-01-29 WO PCT/US1998/001803 patent/WO1998038498A1/en active IP Right Grant
- 1998-01-29 CA CA002282498A patent/CA2282498A1/en not_active Abandoned
- 1998-01-29 DE DE69826837T patent/DE69826837D1/de not_active Expired - Lifetime
- 1998-01-29 EP EP98907350A patent/EP0963548B1/de not_active Expired - Lifetime
- 1998-01-29 KR KR1019997007834A patent/KR20000075763A/ko not_active Application Discontinuation
- 1998-01-29 JP JP53764898A patent/JP2002515123A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
JP2002515123A (ja) | 2002-05-21 |
WO1998038498A1 (en) | 1998-09-03 |
EP0963548A1 (de) | 1999-12-15 |
US5926557A (en) | 1999-07-20 |
KR20000075763A (ko) | 2000-12-26 |
EP0963548B1 (de) | 2004-10-06 |
EP1174708A1 (de) | 2002-01-23 |
CA2282498A1 (en) | 1998-09-03 |
AU6318298A (en) | 1998-09-18 |
EP0963548A4 (de) | 2001-06-13 |
AU734389B2 (en) | 2001-06-14 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8332 | No legal effect for de |