DE69813701D1 - Elektrodenstruktur einer Siliziumhalbleiteranordnung - Google Patents

Elektrodenstruktur einer Siliziumhalbleiteranordnung

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Publication number
DE69813701D1
DE69813701D1 DE69813701T DE69813701T DE69813701D1 DE 69813701 D1 DE69813701 D1 DE 69813701D1 DE 69813701 T DE69813701 T DE 69813701T DE 69813701 T DE69813701 T DE 69813701T DE 69813701 D1 DE69813701 D1 DE 69813701D1
Authority
DE
Germany
Prior art keywords
semiconductor device
electrode structure
silicon semiconductor
silicon
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69813701T
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English (en)
Other versions
DE69813701T2 (de
Inventor
Takashi Shoji
Takekazu Sakai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Resonac Holdings Corp
Original Assignee
Showa Denko KK
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Application filed by Showa Denko KK filed Critical Showa Denko KK
Publication of DE69813701D1 publication Critical patent/DE69813701D1/de
Application granted granted Critical
Publication of DE69813701T2 publication Critical patent/DE69813701T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10Details of semiconductor or other solid state devices to be connected
    • H01L2924/102Material of the semiconductor or solid state bodies
    • H01L2924/1025Semiconducting materials
    • H01L2924/10251Elemental semiconductors, i.e. Group IV
    • H01L2924/10253Silicon [Si]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/30Technical effects
    • H01L2924/301Electrical effects
    • H01L2924/3025Electromagnetic shielding
DE69813701T 1997-08-25 1998-08-24 Elektrodenstruktur einer Siliziumhalbleiteranordnung Expired - Lifetime DE69813701T2 (de)

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EP0899786A2 (de) 1999-03-03
EP0899786A3 (de) 2000-01-19
EP0899786B1 (de) 2003-04-23
TW453137B (en) 2001-09-01
KR19990023187A (ko) 1999-03-25
KR100300462B1 (ko) 2001-10-19
DE69813701T2 (de) 2004-03-11
US5982629A (en) 1999-11-09

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