DE69805756D1 - Verfahren und vorrichtung zur analyse - Google Patents

Verfahren und vorrichtung zur analyse

Info

Publication number
DE69805756D1
DE69805756D1 DE69805756T DE69805756T DE69805756D1 DE 69805756 D1 DE69805756 D1 DE 69805756D1 DE 69805756 T DE69805756 T DE 69805756T DE 69805756 T DE69805756 T DE 69805756T DE 69805756 D1 DE69805756 D1 DE 69805756D1
Authority
DE
Germany
Prior art keywords
analysis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69805756T
Other languages
English (en)
Other versions
DE69805756T2 (de
Inventor
Bengt Ivarsson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Cytiva Sweden AB
Original Assignee
Biacore AB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Biacore AB filed Critical Biacore AB
Application granted granted Critical
Publication of DE69805756D1 publication Critical patent/DE69805756D1/de
Publication of DE69805756T2 publication Critical patent/DE69805756T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/02Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0625Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55Specular reflectivity
    • G01N21/552Attenuated total reflection
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55Specular reflectivity
    • G01N21/552Attenuated total reflection
    • G01N21/553Attenuated total reflection and using surface plasmons
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21Polarisation-affecting properties
    • G01N21/211Ellipsometry
    • G01N2021/212Arrangement with total internal reflection
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21Polarisation-affecting properties
    • G01N21/211Ellipsometry
    • G01N2021/215Brewster incidence arrangement
DE69805756T 1997-02-04 1998-02-03 Verfahren und vorrichtung zur analyse Expired - Lifetime DE69805756T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
SE9700384A SE9700384D0 (sv) 1997-02-04 1997-02-04 Analytical method and apparatus
PCT/SE1998/000196 WO1998034098A1 (en) 1997-02-04 1998-02-03 Analytical method and apparatus

Publications (2)

Publication Number Publication Date
DE69805756D1 true DE69805756D1 (de) 2002-07-11
DE69805756T2 DE69805756T2 (de) 2003-01-02

Family

ID=29997718

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69805756T Expired - Lifetime DE69805756T2 (de) 1997-02-04 1998-02-03 Verfahren und vorrichtung zur analyse

Country Status (7)

Country Link
US (6) US6493097B1 (de)
EP (1) EP0958494B1 (de)
JP (2) JP4016403B2 (de)
AU (1) AU719654B2 (de)
DE (1) DE69805756T2 (de)
SE (1) SE9700384D0 (de)
WO (1) WO1998034098A1 (de)

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US6493097B1 (en) 2002-12-10
AU719654B2 (en) 2000-05-11
AU5893198A (en) 1998-08-25
JP2007127670A (ja) 2007-05-24
EP0958494B1 (de) 2002-06-05
US20050007605A1 (en) 2005-01-13
EP0958494A1 (de) 1999-11-24
US20070013912A1 (en) 2007-01-18
US20030067612A1 (en) 2003-04-10
JP4016403B2 (ja) 2007-12-05
WO1998034098A1 (en) 1998-08-06
SE9700384D0 (sv) 1997-02-04
US6999175B2 (en) 2006-02-14
DE69805756T2 (de) 2003-01-02
JP4382098B2 (ja) 2009-12-09
US6714303B2 (en) 2004-03-30
JP2001511249A (ja) 2001-08-07
US20060072115A1 (en) 2006-04-06
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US7262866B2 (en) 2007-08-28
US20080030738A1 (en) 2008-02-07

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