DE69736818D1 - Verfahren und System zur Aufnahme eines Objekts oder Musters - Google Patents
Verfahren und System zur Aufnahme eines Objekts oder MustersInfo
- Publication number
- DE69736818D1 DE69736818D1 DE69736818T DE69736818T DE69736818D1 DE 69736818 D1 DE69736818 D1 DE 69736818D1 DE 69736818 T DE69736818 T DE 69736818T DE 69736818 T DE69736818 T DE 69736818T DE 69736818 D1 DE69736818 D1 DE 69736818D1
- Authority
- DE
- Germany
- Prior art keywords
- images
- subpictures
- image
- simultaneously obtained
- recording
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T5/00—Image enhancement or restoration
- G06T5/50—Image enhancement or restoration by the use of more than one image, e.g. averaging, subtraction
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T1/00—General purpose image data processing
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T1/00—General purpose image data processing
- G06T1/0007—Image acquisition
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/0002—Inspection of images, e.g. flaw detection
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/0002—Inspection of images, e.g. flaw detection
- G06T7/0004—Industrial image inspection
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
- G01N2021/8822—Dark field detection
- G01N2021/8825—Separate detection of dark field and bright field
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
- G01N2021/95638—Inspecting patterns on the surface of objects for PCB's
- G01N2021/95646—Soldering
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/9501—Semiconductor wafers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
- G01N21/95607—Inspecting patterns on the surface of objects using a comparative method
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/36—Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
- G02B21/365—Control or image processing arrangements for digital or video microscopes
- G02B21/367—Control or image processing arrangements for digital or video microscopes providing an output produced by processing a plurality of individual source images, e.g. image tiling, montage, composite images, depth sectioning, image comparison
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T2200/00—Indexing scheme for image data processing or generation, in general
- G06T2200/32—Indexing scheme for image data processing or generation, in general involving image mosaicing
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T2207/00—Indexing scheme for image analysis or image enhancement
- G06T2207/30—Subject of image; Context of image processing
- G06T2207/30108—Industrial image inspection
- G06T2207/30148—Semiconductor; IC; Wafer
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T2207/00—Indexing scheme for image analysis or image enhancement
- G06T2207/30—Subject of image; Context of image processing
- G06T2207/30108—Industrial image inspection
- G06T2207/30152—Solder
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/748,040 US6075883A (en) | 1996-11-12 | 1996-11-12 | Method and system for imaging an object or pattern |
Publications (1)
Publication Number | Publication Date |
---|---|
DE69736818D1 true DE69736818D1 (de) | 2006-11-23 |
Family
ID=25007738
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69725021T Expired - Fee Related DE69725021T2 (de) | 1996-11-12 | 1997-11-07 | Verfahren und system zum darstellen eines objektes oder musters |
DE69736818T Expired - Fee Related DE69736818D1 (de) | 1996-11-12 | 1997-11-07 | Verfahren und System zur Aufnahme eines Objekts oder Musters |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69725021T Expired - Fee Related DE69725021T2 (de) | 1996-11-12 | 1997-11-07 | Verfahren und system zum darstellen eines objektes oder musters |
Country Status (10)
Country | Link |
---|---|
US (3) | US6075883A (de) |
EP (2) | EP1359534B1 (de) |
AT (2) | ATE250249T1 (de) |
AU (1) | AU5174798A (de) |
CA (1) | CA2271492C (de) |
DE (2) | DE69725021T2 (de) |
DK (1) | DK1016028T3 (de) |
ES (1) | ES2207754T3 (de) |
PT (1) | PT1016028E (de) |
WO (1) | WO1998021687A1 (de) |
Families Citing this family (92)
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US20020014533A1 (en) | 1995-12-18 | 2002-02-07 | Xiaxun Zhu | Automated object dimensioning system employing contour tracing, vertice detection, and forner point detection and reduction methods on 2-d range data maps |
JP4143788B2 (ja) * | 1999-08-04 | 2008-09-03 | 澁谷工業株式会社 | ボールマウント装置及びマウント方法 |
US6268093B1 (en) * | 1999-10-13 | 2001-07-31 | Applied Materials, Inc. | Method for reticle inspection using aerial imaging |
US6912076B2 (en) * | 2000-03-17 | 2005-06-28 | Accu-Sort Systems, Inc. | Coplanar camera scanning system |
US7333672B2 (en) * | 2000-03-30 | 2008-02-19 | British Telecommunications Public Limited Company | Image processing system/network which performs recognition process only upon regions having higher high spatial frequency content |
US7173648B1 (en) * | 2000-04-21 | 2007-02-06 | Advanced Micro Devices, Inc. | System and method for visually monitoring a semiconductor processing system |
EP1319244A1 (de) * | 2000-09-20 | 2003-06-18 | Kla-Tencor Inc. | Methode und system zur halbleiterherstellung |
US6891627B1 (en) | 2000-09-20 | 2005-05-10 | Kla-Tencor Technologies Corp. | Methods and systems for determining a critical dimension and overlay of a specimen |
WO2002039877A2 (en) * | 2000-11-17 | 2002-05-23 | Oregon Health & Science University | Stereotactic wands, endoscopes, and methods using such wands and endoscopes |
US6547409B2 (en) * | 2001-01-12 | 2003-04-15 | Electroglas, Inc. | Method and apparatus for illuminating projecting features on the surface of a semiconductor wafer |
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US6766954B2 (en) * | 2001-06-15 | 2004-07-27 | Symbol Technologies, Inc. | Omnidirectional linear sensor-based code reading engines |
US6845178B1 (en) * | 2001-06-27 | 2005-01-18 | Electro Scientific Industries, Inc. | Automatic separation of subject pixels using segmentation based on multiple planes of measurement data |
US7113633B2 (en) * | 2001-07-02 | 2006-09-26 | Photoinaphoto.Com, Inc. | System and method for discovering and categorizing attributes of a digital image |
EP1273928A1 (de) * | 2001-07-06 | 2003-01-08 | Leica Geosystems AG | Verfahren und Vorrichtung zur Unterdrückung elektromagnetischer Hintergrundstrahlung in einem Bild |
US7356453B2 (en) | 2001-11-14 | 2008-04-08 | Columbia Insurance Company | Computerized pattern texturing |
US7221805B1 (en) * | 2001-12-21 | 2007-05-22 | Cognex Technology And Investment Corporation | Method for generating a focused image of an object |
US7344082B2 (en) * | 2002-01-02 | 2008-03-18 | Metrologic Instruments, Inc. | Automated method of and system for dimensioning objects over a conveyor belt structure by applying contouring tracing, vertice detection, corner point detection, and corner point reduction methods to two-dimensional range data maps of the space above the conveyor belt captured by an amplitude modulated laser scanning beam |
DE10209269C1 (de) * | 2002-03-01 | 2003-07-03 | Leuze Electronic Gmbh & Co | Optoelektronische Vorrichtung |
US6813016B2 (en) * | 2002-03-15 | 2004-11-02 | Ppt Vision, Inc. | Co-planarity and top-down examination method and optical module for electronic leaded components |
US7016525B2 (en) * | 2002-05-02 | 2006-03-21 | Mitutoyo Corporation | Systems and methods for continuously varying wavelength illumination |
AU2003249217A1 (en) * | 2002-07-16 | 2004-02-02 | Electro Scientific Industries, Inc. | Non-oriented optical character recognition of a wafer mark |
US20050004472A1 (en) * | 2002-08-17 | 2005-01-06 | Greg Pratt | Medical socket contour scanning system |
US6900942B2 (en) * | 2002-08-20 | 2005-05-31 | Veridian Systems | Wide field-of-view (FOV) coherent beam combiner/detector |
DE10239548A1 (de) * | 2002-08-23 | 2004-03-04 | Leica Microsystems Semiconductor Gmbh | Vorrichtung und Verfahren zur Inspektion eines Objekts |
US8171567B1 (en) | 2002-09-04 | 2012-05-01 | Tracer Detection Technology Corp. | Authentication method and system |
AU2003268255A1 (en) * | 2002-09-04 | 2004-03-29 | Brooks Automation, Inc. | Device and process for reading out identification information on reticles |
JP3777149B2 (ja) * | 2002-09-19 | 2006-05-24 | 株式会社ナムコ | プログラム、情報記憶媒体及び画像生成装置 |
US7181066B1 (en) | 2002-12-26 | 2007-02-20 | Cognex Technology And Investment Corporation | Method for locating bar codes and symbols in an image |
JP3738291B2 (ja) * | 2003-06-09 | 2006-01-25 | 住友大阪セメント株式会社 | 三次元形状測定装置 |
US7236625B2 (en) * | 2003-07-28 | 2007-06-26 | The Boeing Company | Systems and method for identifying foreign objects and debris (FOD) and defects during fabrication of a composite structure |
JP3953988B2 (ja) * | 2003-07-29 | 2007-08-08 | Tdk株式会社 | 検査装置および検査方法 |
US7162322B2 (en) * | 2003-11-28 | 2007-01-09 | The Ohio Willow Wood Company | Custom prosthetic liner manufacturing system and method |
US8934702B2 (en) * | 2003-12-02 | 2015-01-13 | The Boeing Company | System and method for determining cumulative tow gap width |
US7289656B2 (en) | 2003-12-02 | 2007-10-30 | The Boeing Company | Systems and methods for determining inconsistency characteristics of a composite structure |
WO2005088517A1 (en) | 2004-03-12 | 2005-09-22 | Ingenia Technology Limited | Methods and apparatuses for creating authenticatable printed articles and subsequently verifying them |
BRPI0508631A (pt) | 2004-03-12 | 2007-08-07 | Ingenia Technology Ltd | aparelho para determinar uma assinatura de um artigo arranjado em um volume de leitura, uso do aparelho, métodos para identificar um artigo feito de papel ou papelão, um artigo feito de plástico, um produto pela sua embalagem, um documento, um item de vestuário ou calçado, e um disco, método para etiquetar um artigo, e, artigo etiquetado |
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JP6691541B2 (ja) * | 2014-12-22 | 2020-04-28 | ピレリ・タイヤ・ソチエタ・ペル・アツィオーニ | 製造ラインでタイヤをチェックする方法および装置 |
KR102534392B1 (ko) | 2014-12-22 | 2023-05-19 | 피렐리 타이어 소시에떼 퍼 아찌오니 | 생산라인에서 타이어를 제어하기 위한 기기 |
JP6832650B2 (ja) * | 2016-08-18 | 2021-02-24 | 株式会社Screenホールディングス | 検査装置および検査方法 |
CN109754425B (zh) * | 2017-11-01 | 2023-07-28 | 浙江舜宇智能光学技术有限公司 | Tof摄像模组的标定设备及其标定方法 |
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-
1996
- 1996-11-12 US US08/748,040 patent/US6075883A/en not_active Expired - Lifetime
-
1997
- 1997-11-07 AT AT97946611T patent/ATE250249T1/de not_active IP Right Cessation
- 1997-11-07 DE DE69725021T patent/DE69725021T2/de not_active Expired - Fee Related
- 1997-11-07 ES ES97946611T patent/ES2207754T3/es not_active Expired - Lifetime
- 1997-11-07 WO PCT/US1997/020432 patent/WO1998021687A1/en active IP Right Grant
- 1997-11-07 CA CA002271492A patent/CA2271492C/en not_active Expired - Fee Related
- 1997-11-07 DK DK97946611T patent/DK1016028T3/da active
- 1997-11-07 AT AT03077317T patent/ATE342549T1/de not_active IP Right Cessation
- 1997-11-07 EP EP03077317A patent/EP1359534B1/de not_active Expired - Lifetime
- 1997-11-07 PT PT97946611T patent/PT1016028E/pt unknown
- 1997-11-07 DE DE69736818T patent/DE69736818D1/de not_active Expired - Fee Related
- 1997-11-07 EP EP97946611A patent/EP1016028B1/de not_active Expired - Lifetime
- 1997-11-07 AU AU51747/98A patent/AU5174798A/en not_active Abandoned
-
2000
- 2000-03-03 US US09/518,559 patent/US6603874B1/en not_active Expired - Fee Related
-
2003
- 2003-03-12 US US10/387,940 patent/US20030215127A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
WO1998021687A1 (en) | 1998-05-22 |
DE69725021D1 (de) | 2003-10-23 |
EP1016028B1 (de) | 2003-09-17 |
US20030215127A1 (en) | 2003-11-20 |
ATE250249T1 (de) | 2003-10-15 |
ES2207754T3 (es) | 2004-06-01 |
US6075883A (en) | 2000-06-13 |
ATE342549T1 (de) | 2006-11-15 |
EP1016028A1 (de) | 2000-07-05 |
EP1359534A1 (de) | 2003-11-05 |
CA2271492A1 (en) | 1998-05-22 |
DK1016028T3 (da) | 2004-01-26 |
PT1016028E (pt) | 2004-02-27 |
US6603874B1 (en) | 2003-08-05 |
EP1359534B1 (de) | 2006-10-11 |
EP1016028A4 (de) | 2001-11-21 |
AU5174798A (en) | 1998-06-03 |
DE69725021T2 (de) | 2004-04-22 |
CA2271492C (en) | 2007-05-29 |
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